CN108381295A - A kind of ultra-precise cutting or milling based on film thickness measuring in place are to the skill in using a kitchen knife in cookery - Google Patents
A kind of ultra-precise cutting or milling based on film thickness measuring in place are to the skill in using a kitchen knife in cookery Download PDFInfo
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- CN108381295A CN108381295A CN201810163879.XA CN201810163879A CN108381295A CN 108381295 A CN108381295 A CN 108381295A CN 201810163879 A CN201810163879 A CN 201810163879A CN 108381295 A CN108381295 A CN 108381295A
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- milling
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- cookery
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
- B23Q15/20—Automatic control or regulation of feed movement, cutting velocity or position of tool or work before or after the tool acts upon the workpiece
- B23Q15/22—Control or regulation of position of tool or workpiece
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention discloses a kind of ultra-precise cutting based on film thickness measuring in place or milling to the skill in using a kitchen knife in cookery, includes the following steps：Step 110：Vacuum cup is autotomyed；Step 120：The smooth processing of workpiece；Step 130：Transparent membrane coats；Step 140：The smooth processing of film；Step 150：Film thickness detects；Step 160：Micro-nano technology；Step 170：Film removes.Ultra-precise cutting or milling provided by the invention based on film thickness measuring in place make that the true timing accuracy of cutter zero reference point is high, efficient, at low cost and Cutter wear is few to the skill in using a kitchen knife in cookery.
Description
Technical field
The present invention relates to ultra-precise cutting or Milling Process technical fields, and film thickness measuring in place is based on more particularly to one kind
Ultra-precise cutting or milling to the skill in using a kitchen knife in cookery.
Background technology
Currently, mainly around-France to knife and vehicle/milling reference plane method is to fine by vehicle/milling in ultra-precise cutting or Milling Process
Cutter is processed the determination of datum mark.Vehicle/milling is around-France to knife to refer to：When workpiece rotates, fine cutter is gradually to workpiece surface
Feeding, the feed-disabling when the annulus that can observe in surface vehicle/mill out human eye, and using the position of cutter at this time as subsequently adding
The zero reference point of work.Vehicle/milling reference plane method refers to：Before processing, material removal process first is carried out to the surface of workpiece, obtains one
A reference plane, and using the position of cutter at this time as the zero reference point of following process.
Vehicle/milling is around-France to knife easy to operate, but there is error in principle.When can observe annulus in workpiece surface
When, actual zero reference point error is about 500nm.If the geometric accuracy of workpiece topography feature requires to be less than 500nm, by
In the presence of the datum error, it is impossible to realize that the precision is processed.
Error is not present in vehicle/milling reference plane method from principle, but reference plane will meet optical minute surface requirement, therefore milling
It must be processed with very low feed speed when processing, processing efficiency is low, of high cost.In addition, when machined material is superhard
When material (monocrystalline silicon, silicon carbide, tungsten carbide etc.), in the process of reference plane, the serious wear of cutter, it is difficult to ensure that high
The machining in quality criteria face, simultaneously because the abrasion of cutter also cannot achieve follow-up high quality machining.
Therefore we need a kind of precision high, efficient, at low cost and true to the cutter zero reference point for reducing tool wear
Determine method.
Invention content
The object of the present invention is to provide a kind of ultra-precise cuttings based on film thickness measuring in place or milling to the skill in using a kitchen knife in cookery, to solve
The above-mentioned problems of the prior art, makes that the true timing accuracy of cutter zero reference point is high, efficient, at low cost and Cutter wear
It is few.
To achieve the above object, the present invention provides following schemes：
The present invention provides a kind of ultra-precise cutting based on film thickness measuring in place or milling to the skill in using a kitchen knife in cookery, includes the following steps；
Step 110：Vacuum cup is autotomyed：Vacuum cup on machine tool chief axis is smooth by vehicle/Milling Process；
Step 120：The smooth processing of workpiece；By absorption of workpieces on machine tool chief axis, smooth processing is carried out to workpiece surface；
Step 130：Transparent membrane coats；Transparent membrane is coated on to the work surface of workpiece；
Step 140：The smooth processing of film；Smooth processing is carried out to film surface using vehicle/milling cutter, then uses vehicle/milling again
Surface of the knife after smooth is got on the bus/one planar annular of milling, and will be set as datum mark Z by vehicle/milling cutter point of a knife Z coordinate at this time1；
Step 150：Film thickness detects；The planar annular coating layer thickness of film is measured using film in-situ measurement equipment, and is remembered
Record thickness T；
Step 160：Micro-nano technology；According to thickness T, the datum mark of vehicle/milling cutter is set as Z0, and Z0=Z1- T, when processing is deep
When degree is the minutiae of D, only vehicle/milling cutter need to be fed D, you can complete geometric dimension micro-nano technology；
Step 170：Film removes：The workpiece processed is positioned in organic solvent and is dissolved, clean, dry after obtain table
Face has the workpieces processing of micro structure array.
Optionally, in-situ measurement equipment described in step 150 is ellipsometer, and the ellipsometer includes being located along the same line
Light source, the polarizer and wave plate, and be at an angle of with the line of the light source, the polarizer and wave plate analyzer, the photoelectricity of setting
Detector.
Optionally, the measurement accuracy of the ellipsometer is 0.1nm.
Optionally, the film is that the easy film-forming material of PMMA, PP, PVC, PS, PC or PET room temperature is made.
Optionally, the film is transparent membrane.
Optionally, vacuum cup is installed on the machine tool chief axis, absorption of workpieces described in step 120 is inhaled in the vacuum
On disk.
Optionally, the vehicle/milling cutter includes lathe tool and milling cutter, and the lathe tool is arc lathe tool, and the milling cutter is planar ends
Milling cutter/rose cutter.
Ultra-precise cutting or milling provided by the invention based on film thickness measuring in place take the skill in using a kitchen knife in cookery compared with the existing technology
Obtained following technique effect：
Ultra-precise cutting or milling provided by the invention based on film thickness measuring in place to the skill in using a kitchen knife in cookery in principle to knife-band come
Error in nanoscale, error is small, can ignore completely, thus can meet realize high-precision size micro-cutting processing want
It asks；The time cost consumed when vehicle/milling reference plane is avoided, processing efficiency is improved, reduces processing cost；When processed
When material is superhard material, abrasion when this method also avoids vehicle/milling reference plane to cutter, increase cutter uses the longevity
Life.
Description of the drawings
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the present invention
Example, for those of ordinary skill in the art, without having to pay creative labor, can also be according to these attached drawings
Obtain other attached drawings.
Fig. 1 is the work flow diagram to the skill in using a kitchen knife in cookery the present invention is based on the ultra-precise cutting of film thickness measuring in place or milling；
Reference sign：1 be workpiece, 2 be vacuum cup, 3 be lathe tool, 4 be transparent membrane, 5 be milling cutter, 6 be it is ellipse partially
Instrument, 7 be light source, 8 be the polarizer, 9 be wave plate, 10 be analyzer, 11 be photodetector.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
The object of the present invention is to provide a kind of ultra-precise cuttings based on film thickness measuring in place or milling to the skill in using a kitchen knife in cookery, to solve
The above-mentioned problems of the prior art, makes that the true timing accuracy of cutter zero reference point is high, efficient, at low cost and Cutter wear
It is few.
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, below in conjunction with the accompanying drawings and specific real
Applying mode, the present invention is described in further detail.
It please referring to Fig.1, wherein 2 be vacuum cup in Fig. 1, which can rotate around rotation axis, and 5 be milling cutter,
The cutter can be fed according to instruction and rotation, and 6 be ellipsometer, including light source 7, the polarizer 8 and the wave being located along the same line
Piece 9, and be at an angle of with the line of light source 7, the polarizer 8 and wave plate 9 on another straight line of setting analyzer 10, photodetection
Device 11.The thickness of transparent membrane 4 can be accurately measured using the ellipsometer 6.
Embodiment one
As shown in Figure 1, the present embodiment provides a kind of ultra-precise cuttings based on film thickness measuring in place or milling to the skill in using a kitchen knife in cookery, head
First carry out preparation：Workpiece 1 is adsorbed on the vacuum cup 2 of machine tool chief axis, then 1 surface of workpiece is carried out with lathe tool 3
Smooth turning；Transparent membrane 4 (the easy film-forming material of such as PMMA, PP, PVC, PS, PC, PET room temperature) colloid is coated later
In the work surface of workpiece 1, coating has certain thickness, has certain boundary intensity after reaction solidifies, coating will not
It falls off from surface；
So far, preparation is completed, and starts to process, and 4 surface of transparent membrane need to carry out smooth processing after coating solidification, utilize
Diamond cutter carries out smooth processing to 4 surface of transparent membrane, is then got on the bus/milling one with surface of the milling cutter 5 after smooth again
Planar annular, and the Z coordinate of 5 point of a knife of milling cutter at this time is set as datum mark Z1；Utilize 4 planar annular of ellipsometer measurement transparent membrane
Coating layer thickness, and record thickness T；
According to the planar annular coating layer thickness T for measuring the transparent membrane 4 obtained, the datum mark of milling cutter 5 is set as Z0, and Z0
=Z1- T, the at this time zero reference point of the milling cutter 5 just plane tangent with workpiece 1.When working depth is the minutiae of D, only
Milling cutter 5 need to be fed D, you can complete high-precision geometric dimension micro-nano technology.Since the measurement accuracy of transparent membrane 4 can reach
0.1nm, therefore milling cutter 5 can be controlled in nanometer scale the datum error of knife, so can be neglected to the datum error of knife
Slightly.
Finally the workpiece 1 processed is placed in organic solvent and is dissolved, clean, dry after obtain surface have micro-structure battle array
The workpieces processing of row.
Specific case is applied in the present invention, and principle and implementation of the present invention are described, above example
Illustrate the method and its core concept for being merely used to help understand the present invention；Meanwhile for those of ordinary skill in the art, according to
According to the thought of the present invention, there will be changes in the specific implementation manner and application range.In conclusion the content of the present specification
It should not be construed as limiting the invention.
Claims (7)
1. a kind of ultra-precise cutting or milling based on film thickness measuring in place are to the skill in using a kitchen knife in cookery, it is characterised in that：Include the following steps；
Step 110：Vacuum cup is autotomyed：Vacuum cup on machine tool chief axis is smooth by vehicle/Milling Process；
Step 120：The smooth processing of workpiece；By absorption of workpieces on machine tool chief axis, smooth processing is carried out to workpiece surface；
Step 130：Transparent membrane coats；Transparent membrane is coated on to the work surface of workpiece；
Step 140：The smooth processing of film；Smooth processing is carried out to film surface using vehicle/milling cutter, is then existed again with vehicle/milling cutter
Surface after smooth is got on the bus/one planar annular of milling, and will be set as datum mark Z by vehicle/milling cutter point of a knife Z coordinate at this time1；
Step 150：Film thickness detects；The planar annular coating layer thickness of film is measured using film in-situ measurement equipment, and records thickness
Spend T；
Step 160：Micro-nano technology；According to thickness T, the datum mark of vehicle/milling cutter is set as Z0, and Z0=Z1- T, when working depth is
When the minutiae of D, only vehicle/milling cutter need to be fed D, you can complete geometric dimension micro-nano technology；
Step 170：Film removes：The workpiece processed is positioned in organic solvent and is dissolved, clean, dry after obtain surface tool
There is the workpieces processing of micro structure array.
2. ultra-precise cutting or milling according to claim 1 based on film thickness measuring in place are to the skill in using a kitchen knife in cookery, it is characterised in that：
In-situ measurement equipment described in step 150 be ellipsometer, the ellipsometer include the light source being located along the same line, the polarizer and
Wave plate, and it is at an angle of the analyzer of setting, photodetector with the line of the light source, the polarizer and wave plate.
3. ultra-precise cutting or milling according to claim 2 based on film thickness measuring in place are to the skill in using a kitchen knife in cookery, it is characterised in that：
The measurement accuracy of the ellipsometer is 0.1nm.
4. ultra-precise cutting or milling according to claim 3 based on film thickness measuring in place are to the skill in using a kitchen knife in cookery, it is characterised in that：
The film is that the easy film-forming material of PMMA, PP, PVC, PS, PC or PET room temperature is made.
5. ultra-precise cutting or milling according to claim 4 based on film thickness measuring in place are to the skill in using a kitchen knife in cookery, it is characterised in that：
The film is transparent membrane.
6. ultra-precise cutting or milling according to claim 5 based on film thickness measuring in place are to the skill in using a kitchen knife in cookery, it is characterised in that：
Vacuum cup is installed, absorption of workpieces described in step 120 is on the vacuum cup on the machine tool chief axis.
7. ultra-precise cutting or milling according to claim 6 based on film thickness measuring in place are to the skill in using a kitchen knife in cookery, it is characterised in that：
Vehicle/the milling cutter includes lathe tool and milling cutter, and the lathe tool is arc lathe tool, and the milling cutter is planar ends milling cutter/rose cutter.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810163879.XA CN108381295B (en) | 2018-02-27 | 2018-02-27 | A kind of ultra-precise cutting or milling based on film thickness measuring in place is to the skill in using a kitchen knife in cookery |
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|---|---|---|---|
| CN201810163879.XA CN108381295B (en) | 2018-02-27 | 2018-02-27 | A kind of ultra-precise cutting or milling based on film thickness measuring in place is to the skill in using a kitchen knife in cookery |
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| Publication Number | Publication Date |
|---|---|
| CN108381295A true CN108381295A (en) | 2018-08-10 |
| CN108381295B CN108381295B (en) | 2019-05-21 |
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| CN201810163879.XA Active CN108381295B (en) | 2018-02-27 | 2018-02-27 | A kind of ultra-precise cutting or milling based on film thickness measuring in place is to the skill in using a kitchen knife in cookery |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110118544A (en) * | 2019-05-31 | 2019-08-13 | 北京理工大学 | A kind of form accuracy detection method based on film thickness detection |
| CN114770224A (en) * | 2022-05-25 | 2022-07-22 | 北京理工大学 | Ultra-precision machining tool mark on-site detection method |
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| DE20309760U1 (en) * | 2003-06-25 | 2004-11-11 | Koukal, Anton | Optoelectronic alignment controller for scanning geometrical lines and guiding a processing or machining tool or unit has an LED light source whose wavelength its optimized to match that of a detector |
| EP1566240A1 (en) * | 2004-02-18 | 2005-08-24 | Airbus UK Limited | Alignment Device |
| CN102091969A (en) * | 2010-12-17 | 2011-06-15 | 北京理工大学 | Method for setting machine tool |
| CN107081455A (en) * | 2017-06-23 | 2017-08-22 | 湖州师范学院 | Numerical control borer bore hole tool setting device and presetting cutter method |
| CN206780059U (en) * | 2017-05-05 | 2017-12-22 | 庆铃汽车（集团）有限公司 | A kind of boring head tool setting gauge |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE20309760U1 (en) * | 2003-06-25 | 2004-11-11 | Koukal, Anton | Optoelectronic alignment controller for scanning geometrical lines and guiding a processing or machining tool or unit has an LED light source whose wavelength its optimized to match that of a detector |
| EP1566240A1 (en) * | 2004-02-18 | 2005-08-24 | Airbus UK Limited | Alignment Device |
| CN102091969A (en) * | 2010-12-17 | 2011-06-15 | 北京理工大学 | Method for setting machine tool |
| CN206780059U (en) * | 2017-05-05 | 2017-12-22 | 庆铃汽车（集团）有限公司 | A kind of boring head tool setting gauge |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110118544A (en) * | 2019-05-31 | 2019-08-13 | 北京理工大学 | A kind of form accuracy detection method based on film thickness detection |
| CN114770224A (en) * | 2022-05-25 | 2022-07-22 | 北京理工大学 | Ultra-precision machining tool mark on-site detection method |
| CN114770224B (en) * | 2022-05-25 | 2024-03-08 | 北京理工大学 | Ultra-precise machining tool mark in-situ detection method |
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| CN108381295B (en) | 2019-05-21 |
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Inventor after: Zhou Tianfeng Inventor after: Wang Xibin Inventor after: Ruan Benshuai Inventor after: Zhou Jia Inventor after: Tang Longlong Inventor after: Liang Zhiqiang Inventor after: Jiao Li Inventor after: Liu Zhibing Inventor after: Jie Lijing Inventor after: Yan Pei Inventor before: Zhou Tianfeng Inventor before: Wang Xibin Inventor before: Ruan Benshuai Inventor before: Zhou Jia Inventor before: Tang Longlong Inventor before: Liang Zhiqiang Inventor before: Jiao Li Inventor before: Liu Zhibing Inventor before: Xie Lijing Inventor before: Yan Pei |
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