CN108332679A - A kind of precision position from defocus device and detection method - Google Patents
A kind of precision position from defocus device and detection method Download PDFInfo
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- CN108332679A CN108332679A CN201810049720.5A CN201810049720A CN108332679A CN 108332679 A CN108332679 A CN 108332679A CN 201810049720 A CN201810049720 A CN 201810049720A CN 108332679 A CN108332679 A CN 108332679A
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- defocus
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
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Abstract
A kind of precision position from defocus device and detection method, includes the structure of position from defocus light path, the realization of position from defocus algorithm, detection and compensation to defocusing amount, the record of data and etc..According to the demand of the precision of system and dynamic range, different light paths is designed, selects different microcobjective and cylindrical mirror, by changing microcobjective, two cylindrical mirrors, the distance between 4 quadrant detector, to reach different precision and dynamic range.When sample defocus, the light spot shape being reflected on detector changes, the defocused error signal of formation changes, and accurate defocusing amount is obtained come the relationship with defocusing amount by defocused error signal.Have in laser direct-write photoetching, the position from defocus of the micro- confocal scanning imaging field of large area and be widely applied very much, can accurately the defocusing amount in system operation is measured in real time and be compensated.Simple and practical, simple operation of the invention, has very high application value.
Description
Technical field
The present invention relates to laser direct-write photoetching, microscope large area confocal scanning imaging field is a kind of accurate defocus
Amount detecting device and detection method.
Background technology
In large-area laser direct-write photoetching, microscope confocal scanning imaging field, in order to reach higher inscription precision
And imaging precision, it applies numerical aperture of objective in systems very high, generally reaches 0.8 or more, thus lead to object lens
Depth of focus is very small, usually only hundreds of nanometers, thus in system operation, since sample position places out-of-flatness, fortune
The shake of moving platform during the motion, interference of the external environment to system, the inevitable defocus problem with sample, thus to from
The Precision measurement of coke amount, becomes these field key technologies and research hotspot.
In the currently employed mostly detection method based on image procossing, when CCD sees that sample surfaces are clear under microcobjective
When, i.e., subject to it is burnt, as defocus when obscuring carries out position from defocus in this, as basis for estimation；Either setting flag point leads to
Position and the distance of CCD observation mark points are crossed to judge that defocusing amount (is used for microscopical auto focusing method and equipment, CN
102998786A).The equal precision of both methods is not high, and second method operating device is complicated, when using high-NA
Microcobjective when, be all difficult to meet system requirements.
Invention content
The purpose of the present invention is to provide a kind of accurate position from defocus device and detection methods.Devise a set of position from defocus
Device is calculated and is emulated by formula, and the Optical Parametric of the systematic parameter and light path of defocus position from defocus device is obtained
It counts and builds position from defocus device.A set of position from defocus algorithm is devised, when there is defocus in sample, the detection of position from defocus device
To signal intensity, signal is handled by algorithm, is precisely calculated defocusing amount, and piezoelectric ceramics is driven to carry out defocus benefit
It repays.
In order to achieve the above objectives, technical solution of the invention is：
It is a kind of precision position from defocus device and detection method, feature be, including laser, 1/2 wave plate, four-quadrant visit
Survey device, cylindrical mirror, polarization splitting prism, quarter wave plate, microcobjective, piezoelectric ceramics controller, piezoelectric ceramic actuator, calculating
Machine, controller etc.；
The output end of the 4 quadrant detector is connected with the input terminal of the controller, and the controller and the calculating
Machine is communicated.
The output end of the piezoelectric ceramics controller is connected with the input terminal of the piezoelectric ceramic actuator, and the piezoelectricity is made pottery
Porcelain controller is communicated with the computer.
The method for carrying out position from defocus using the position from defocus device, feature are that this method includes following step
Suddenly：
Step 1) uses magnetically controlled sputter method to plate last layer aluminium film on the glass substrate as aluminium film sample (13)；
Step 2) calculates focusing error voltage signal FES：
A) four quadrants of 4 quadrant detector are set as A, B, C, D successively, using current-to-voltage convertor by four as
It limits collected current signal and is converted to voltage signal, if the voltage value for measuring four quadrants is respectively VA、VB、VC、VD；
B) adder, subtracter and divider are utilized, focusing error voltage signal FES is calculated：
C) defocus error voltage signal FES is passed to controller (13)；
Step 3) designs position from defocus light path
A) the dynamic range L needed according to system0, select the systematic parameter for meeting condition.
B) calculating process of emulation formula is as follows：
It can be obtained according to imaging formula：
Wherein aoAnd boIt is the object distance and image distance of microcobjective, axAnd bxFor cylindrical mirror CLxObject distance and image distance.
It can be obtained according to similar triangles：
Wherein ro, rclxRespectively laser is in microcobjective and cylindrical mirror CLxThe radius of upper be in hot spot.rxIt is visited for four-quadrant
Survey the radius of hot spot in the x direction on device FQD.
It can be calculated：
It can be obtained according to formula (1) and (3)：
The radius of hot spot in y-direction on 4 quadrant detector FQD, which can similarly be calculated, is：
Wherein aoFor the distance between aluminium film sample (6) and microcobjective (5), foFor the focal length of microcobjective (5), fxFor
Cylindrical mirror CLx(7) focal length, lxFor cylindrical mirror CLx(7) the distance between with microcobjective (5), mxFor cylindrical mirror CLx(7) with four
The distance between quadrant detector FQD (9), fyFor cylindrical mirror CLy(8) focal length, lxyFor cylindrical mirror CLx(7) with cylindrical mirror CLy
The distance between (8).
Assuming that laser facula is uniformly distributed on 4 quadrant detector, then the voltage value and hot spot obtained on four quadrants
The directly proportional of facula area on four quadrants can be obtained according to ellipse area formula and simple geometrical relationship：
C) a is setoValue be fo- 50um, fo-49um,…,fo-1um,fo,fo+1um,…,fo+49um,fo+ 50um. is counted
Corresponding FES values are calculated, FES-a is drawnoCurve, the dynamic range L emulated.
D) change systematic parameter fx, fy, lx, mx, lxySo that obtained emulation dynamic range L>L0.What confirmation obtained at this time
Above-mentioned 5 systematic parameters.
E) according to obtained fx, fy, lx, mx, lxyCarry out light path structure.Light path is adjusted to be directed at each optical element optical axis, and
It is aligned with the center of 4 quadrant detector (9), the method being aligned with the center of 4 quadrant detector (9) is：Four-quadrant is adjusted to visit
Device (9) is surveyed, is allowed to, in the directions x and the fine motion of the directions y, observe the curve graph of four quadrant signals.According on 4 quadrant detector
Hot spot is all being zhou duicheng tuxing with the directions x and y, works as A, the curve co-insides of two quadrants of C, the curve co-insides of two quadrants of B, D
When, the center of 4 quadrant detector (9) is aligned with the center of each optical element optical axis, and alignment is completed.
Step 4) set gradually piezoelectric ceramic actuator (10) collapsing length be 0um, 1um ..., 99um, 100um,
It is divided into 1ms, and is circularly set.
Step 5) adjusts the distance of aluminium film sample (6) and microcobjective (5), makes aluminium film sample while executing step 4)
Product (6) surface is from the nearly coke of microcobjective (5) to remote burnt movement.Piezoelectric ceramic actuator (10) is measured by 4 quadrant detector
The voltage value of (9) four quadrants of 4 quadrant detector at each position calculates and records the corresponding defocus error letter of each position
Number FES, and the FES values that each position is calculated are depicted as curve；When S types are presented in FES curves, stop adjusting aluminium film sample
(6) and the distance of microcobjective (5).
Step 6) records the corresponding FES values in linear region and piezoelectric ceramics stroke of S curve at this time.
Step 7) is arranged initial FES values and piezoelectric ceramics stroke is respectively when system is run in linear region
FES0And a0, when system defocus, the FES values obtained at this time are FESn, according to the FES values and piezoelectric ceramic actuator of record
(10) relationship of stroke obtains corresponding piezoelectric ceramic actuator (10) stroke an, then defocusing amount at this time be | an-a0|。
The stroke that piezoelectric ceramic actuator (10) is arranged in step 8) is an, FES is setnAs new initial value, it is at this time
System adjusted subject to burnt position.Re-execute step 7), detecting system again defocus when defocusing amount, and piezoelectric ceramics execution is set
The value of device (10) compensates.
Step 8) sets the range of piezoelectric ceramic actuator (10) as A, the corresponding piezoelectric ceramics stroke in linear region both ends
Respectively aminAnd amax.When system brings into operation, the initial value of piezoelectric ceramic actuator (10) is within linear region
a0.Then the dynamic through-focus detection range of the position from defocus system be min (| amin-a0|,|amax-a0|), maximum defocus compensation range
For min (a0,|A-a0|)。
Compared with prior art, technique effect of the invention is as follows：
Pass through the optical parameter of the systematic parameter and used optical element of design of Simulation position from defocus light path, structure one
Cover position from defocus device and position from defocus method.When defocus occurs for sample, the signal that position from defocus device detects defocus becomes
Change, defocus signal is handled by position from defocus algorithm, accurately calculates defocusing amount.
Its advantage is that：
1) non-contact measurement.
2) measurement accuracy is very high, and range of dynamic measurement is big.
3) of low cost, it is easy to operate.
Description of the drawings
Fig. 1 is the schematic diagram of position from defocus device of the present invention
Fig. 2 is the light path principle figure of the present invention, wherein (a) is the light path principle figure in the directions x-z, it is (b) light in the directions y-z
Road schematic diagram.
Fig. 3 is the 4 quadrant detector signal graph of the present invention
Fig. 4 is the FES curve graphs of the present invention
In figure：1- laser (658nm), 2-1/2 wave plates, 3- polarization splitting prisms, 4-1/4 wave plates, 5- microcobjectives, 6- aluminium
Membrane sample, 7- cylindrical mirrors CLx, 8- cylindrical mirrors CLy, 9- 4 quadrant detectors, 10- piezoelectric ceramic actuators, 11- piezoelectric ceramics controls
Device processed, 12- computers, 13- controllers.
Specific implementation mode
Below by embodiment and attached drawing, the invention will be further described, but the protection model of the present invention should not be limited with this
It encloses.
Embodiment 1：
A kind of novel system position from defocus device and detection method, including laser 1,1/2 wave plate 2, polarization spectro rib
Mirror 3, quarter wave plate 4, microcobjective 5, aluminium film sample 6, cylindrical mirror CLx7, cylindrical mirror CLy8,4 quadrant detector 9, piezoelectricity pottery
Porcelain actuator 10, piezoelectric ceramics controller 11, computer 12, controller 13 etc.：As shown in Figure 1, laser 1 sends out wavelength is
The directional light of 658nm, then in turn through 1/2 wave plate 2, polarization splitting prism 3, quarter wave plate 4 is incident on microcobjective 5 later,
It finally focuses on aluminium film sample 6.Laser is reflected by aluminium film sample 6, is returned along light path, then anti-by polarization splitting prism 3
It penetrates, by cylindrical mirror CLx7 and cylindrical mirror CLx8 converge on 4 quadrant detector 9.9 collected signal of 4 quadrant detector
In incoming controller 13, controller 13 is communicated with computer 12 by ICP/IP protocol.Piezoelectric ceramics controller 11 and meter
Calculation machine 12 is communicated by ICP/IP protocol, and 12 output voltage control piezoelectric ceramic actuator 10 of piezoelectric ceramics controller is stretched
Contracting amount.
Fig. 2 show microcobjective 5, cylindrical mirror CLx7 and cylindrical mirror CLx8 and 4 quadrant detector 9 constitute from
Burnt light path schematic diagram.It can be obtained using imaging formula
Wherein aoAnd boIt is the object distance and image distance of microcobjective, axAnd bxFor cylindrical mirror CLxObject distance and image distance.
It can be obtained according to similar triangles：
Wherein ro, rclxRespectively laser is in microcobjective and cylindrical mirror CLxThe radius of upper be in hot spot.rxIt is visited for four-quadrant
Survey the radius of hot spot in the x direction on device FQD.
It can be calculated：
It can be obtained according to formula (1) and (3)：
The radius of hot spot in y-direction on 4 quadrant detector FQD, which can similarly be calculated, is：
Wherein aoFor the distance between aluminium film sample 6 and microcobjective 5, foFor the focal length of microcobjective 5, fxFor cylindrical mirror
CLx7 focal length, lxFor cylindrical mirror CLxThe distance between 7 and microcobjective 5, mxFor cylindrical mirror CLx7 and 4 quadrant detector
The distance between FQD 9, fyFor cylindrical mirror CLy8 focal length, lxyFor cylindrical mirror CLx7 and cylindrical mirror CLyThe distance between 8.
Assuming that laser facula on 4 quadrant detector FQD to be uniformly distributed, then the voltage value obtained on four quadrants with
Facula area directly proportional of the hot spot on four quadrants can be obtained according to ellipse area formula and simple geometrical relationship：
A is setoValue be fo- 50um, fo-49um,…,fo-1um,fo,fo+1um,…,fo+49um,fo+ 50um. is calculated
Corresponding FES values, draw FES-aoCurve, the dynamic range L emulated.
Change systematic parameter fx, fy, lx, mx, lxySo that obtained emulation dynamic range L>15um, wherein 15um are system
The dynamic through-focus detection range needed confirms that above-mentioned 5 systematic parameters obtained at this time are respectively fx=80mm, fy=150mm,
lx=390mm, mx=150mm, lxy=30mm.
According to obtained fx=80mm, fy=150mm, lx=390mm, mx=150mm, lxy=30mm carries out optical element
Selection and light path structure.It adjusts light path to be directed at each optical element optical axis, and is aligned with the center of 4 quadrant detector 9.
The method being aligned with the center of 4 quadrant detector 9 is：4 quadrant detector 9 is adjusted, is allowed to, in the directions x and the fine motion of the directions y, see
Examine the curve graph of four quadrant signals.All it is being zhou duicheng tuxing, institute with the directions x and y according to the hot spot on 4 quadrant detector
With when the curve co-insides of two quadrants of AC, the curve co-insides of two quadrants of BD, as shown in figure 3, the center of 4 quadrant detector 9
It is aligned with the center of each optical element optical axis, alignment is completed.
The method for carrying out position from defocus using above-mentioned position from defocus device：
1. the method for using magnetron sputtering plates last layer aluminium film as reflected sample 6 on the glass substrate.
2. calculating defocus error voltage signal FES：
A) four quadrants of 4 quadrant detector are set as A, B, C, D successively.Using current-to-voltage convertor by four as
It limits collected current signal and is converted to voltage signal, if the voltage value for measuring four quadrants is respectively VA、VB、VC、VD。
B) utilize adder, subtracter, divider, according to
Obtain the voltage signal of defocus error FES.
C) obtained defocused error signal is passed to controller 13.
3. the collapsing length for setting gradually piezoelectric ceramic actuator 10 is 0um, 1um ..., 99um, 100um, it is divided into
1ms, and be circularly set.
4. while executing 3 step, adjust the distance of aluminium film sample 6 and microcobjective 5, make 6 surface of aluminium film sample from
The nearly coke of microcobjective 5 is mobile to remote coke.Piezoelectric ceramic actuator 10 is measured at each position four by 4 quadrant detector
The voltage value of 9 four quadrants of quadrant detector, calculates and records the corresponding defocused error signal FES of each position, and by each position
The FES values being calculated are depicted as curve；As shown in figure 4, when S types are presented in FES curves, stop adjusting aluminium film sample 6 and show
The distance of speck mirror 5.
5. recording the corresponding FES values in linear region and piezoelectric ceramics stroke of S curve at this time.
6. when system is run in linear region, it is respectively FES that initial FES values and piezoelectric ceramics stroke, which is arranged,0
And a0, when system defocus, the FES values obtained at this time are FESn, flexible according to the FES values of record and piezoelectric ceramic actuator 10
The relationship of amount obtains 10 stroke a of corresponding piezoelectric ceramic actuatorn, then defocusing amount at this time be | an-a0|。
7. the stroke that piezoelectric ceramic actuator 10 is arranged is an, FES is setnAs new initial value, system is modulated at this time
Whole is focus position.Re-execute the 6th step, detecting system again defocus when defocusing amount, and piezoelectric ceramic actuator 10 is set
Value compensates.
8. as shown in figure 4, setting the range of piezoelectric ceramic actuator 10 as A, the corresponding piezoelectric ceramics in linear region both ends is stretched
Contracting amount is respectively aminAnd amax.When system brings into operation, the initial value of piezoelectric ceramic actuator 10 is within linear region
a0.Then the dynamic through-focus detection range of the position from defocus system be min (| amin-a0|,|amax-a0|), maximum defocus compensation range
For min (a0,|A-a0|)。
Fig. 4 is the data image of systematic survey, it can be seen that the linearly interval of the system ranging from (24.2um,
55.4um), linearly interval has been more than 30um, and when initial position is located at the center 39.8um of linearly interval, which moves
The range of state position from defocus ranging from 15.6um, the system piezoelectric ceramic actuator are 100um, then the maximum defocus of the system is mended
Repay ranging from 39.8um.
Claims (5)
1. a kind of precision position from defocus device, which is characterized in that including laser (1), 1/2 wave plate (2), polarization splitting prism
(3), quarter wave plate (4), microcobjective (5), cylindrical mirror CLx(7), cylindrical mirror CLy(8), 4 quadrant detector (9), piezoelectric ceramics
Actuator (10), piezoelectric ceramics controller (11), computer (12) and controller (13)；
The microcobjective (5) is fixed on the piezoelectric ceramic actuator (10)；
The laser (1) sends out light and passes through 1/2 wave plate (2) and polarization splitting prism (3) successively, through the polarization spectro rib
After mirror (3) transmission, it is incident on microcobjective (5) through quarter wave plate (4), is finally focused on aluminium film sample (6), by aluminium film sample
Product (6) reflect, and polarization splitting prism (3) is back to along former input path, after the polarization splitting prism (3) reflection, pass through successively
Cylindrical mirror CLx(7) and cylindrical mirror CLy(8) converge on 4 quadrant detector (9), the output end of the 4 quadrant detector (9) with
The input terminal of the controller (13) is connected, and the controller (13) is communicated with the computer (12)；
The output end of the piezoelectric ceramics controller (11) is connected with the input terminal of the piezoelectric ceramic actuator (10), and the pressure
Electroceramics controller (11) is communicated with the computer (12).
2. precision position from defocus device according to claim 1, which is characterized in that the piezoelectric ceramic actuator (10)
Stroke be 100um.
3. precision position from defocus device according to claim 1, which is characterized in that the laser (1) sends out wavelength
For the feux rouges of 658nm.
4. being detected method using any accurate position from defocus devices of claim 1-3, which is characterized in that this method
Include the following steps：
Step 1) uses magnetically controlled sputter method to plate last layer aluminium film on the glass substrate as aluminium film sample (6)；
Step 2) calculates defocus error voltage signal FES：
A) four quadrants of 4 quadrant detector are set as A, B, C, D successively, are adopted four quadrants using current-to-voltage convertor
The current signal collected is converted to voltage signal, if the voltage value for measuring four quadrants is respectively VA、VB、VC、VD；
B) adder, subtracter and divider are utilized, focusing error voltage signal FES is calculated：
C) focusing error voltage signal FES is passed to controller (13)；
Step 3) designs position from defocus light path
A) the dynamic range L needed according to system0, emulated according to following formula：
In formula：
aoFor the distance between aluminium film sample (6) and microcobjective (5), foFor the focal length of microcobjective (5), fxFor cylindrical mirror CLx
(7) focal length, lxFor cylindrical mirror CLx(7) the distance between with microcobjective (5), mxFor cylindrical mirror CLx(7) and Quadrant detector
The distance between device (9), fyFor cylindrical mirror CLy(8) focal length, lxyFor cylindrical mirror CLx(7) with cylindrical mirror CLy(8) between away from
From；
B) a is setoValue be fo- 50um, fo-49um,…,fo-1um,fo,fo+1um,…,fo+49um,fo+ 50um. calculates phase
The FES values answered, and it is depicted as curve, the dynamic range L to be emulated；
C) change systematic parameter fx, fy, lx, mx, lxy, so as to get emulation dynamic range L>L0, confirm above-mentioned 5 obtained at this time
Systematic parameter；
D) according to obtained fx, fy, lx, mx, lxyCarry out light path structure：It adjusts light path to be directed at each optical element optical axis, and each light
Element optical axis is learned to be aligned with the center of 4 quadrant detector (9)；
The collapsing length that step 4) sets gradually piezoelectric ceramic actuator (10) is 0um, 1um ..., 99um, 100um, is divided into
1ms, and be circularly set；
Step 5) adjusts the distance of aluminium film sample (6) and microcobjective (5), makes aluminium film sample (6) while executing step 4)
Surface measures piezoelectric ceramic actuator (10) every from the close burnt to remote burnt movement of microcobjective (5) by 4 quadrant detector
The voltage value of (9) four quadrants of 4 quadrant detector when one position, calculates and records the corresponding defocused error signal of each position
FES, and the FES values that each position is calculated are depicted as curve；When S types are presented in FES curves, stop adjusting aluminium film sample
(6) and the distance of microcobjective (5)；
Step 6) records the corresponding FES values in linear region and piezoelectric ceramics stroke of S curve at this time；
For step 7) when system is run in linear region, it is respectively FES that initial FES values and piezoelectric ceramics stroke, which is arranged,0With
a0, when system defocus, the FES values obtained at this time are FESn, flexible according to the FES values and piezoelectric ceramic actuator (10) of record
The relationship of amount obtains corresponding piezoelectric ceramic actuator (10) stroke an, then defocusing amount at this time be | an-a0|；
The stroke that piezoelectric ceramic actuator (10) is arranged in step 8) is an, FES is setnAs new initial value, system has been at this time
It is adjusted to focus position；Re-execute step 7), detecting system again defocus when defocusing amount, and piezoelectric ceramic actuator is set
(10) value compensates；
Step 9) sets the range of piezoelectric ceramic actuator (10) as A, and the corresponding piezoelectric ceramics stroke in linear region both ends is distinguished
For aminAnd amax；When system brings into operation, the initial value of piezoelectric ceramic actuator (10) is a within linear region0, then
The dynamic through-focus detection range of the position from defocus system be min (| amin-a0|,|amax-a0|), maximum defocus compensation range is min
(a0,|A-a0|)。
5. precision position from defocus device according to claim 4 is detected method, which is characterized in that each optical element light
The method that axis is aligned with the center of 4 quadrant detector (9) is：
4 quadrant detector (9) is adjusted to be allowed to, in the directions x and the fine motion of the directions y, the curve graph of four quadrant signals be observed, according to four
Hot spot on quadrant detector is all being zhou duicheng tuxing with the directions x and y, when the curve co-insides of two quadrants of AC, BD two as
When the curve co-insides of limit, the center of 4 quadrant detector (9) is aligned with the center of each optical element optical axis.
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| CN109975820A (en) * | 2019-02-25 | 2019-07-05 | 南京理工大学 | Synchronization polarization phase-shifting focus detection system based on Linnik type interference microscope |
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