CN102566048A - Astigmatism-based sample axial drift compensating method and device - Google Patents
Astigmatism-based sample axial drift compensating method and device Download PDFInfo
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Abstract
The invention discloses an astigmatism-based sample axial drift compensating method and device. The astigmatism-based sample axial drift compensating device comprises a laser, a single-mode optical fiber, a collimation lens, a dispersion prism, an astigmatism processor formed by two cylindrical mirrors with same focus lengths and mutually-orthorhombic cross sections, a microobjective, a three-dimensional nano scanning platform, a focusing lens, an optical attenuator, a photoelectric induction device and a computer. The astigmatism-based sample axial drift compensating method comprises the steps of: forming a collimated light beam into a first astigmatism light beam by the astigmatism processor, reflecting the first astigmatism light beam after a sample to be tested is focused; and forming a second astigmatism light beam through the astigmatism processor, reflecting by the dispersion prism to obtain a monitoring light beam, receiving by the photoelectric induction device after focusing through the focusing lens, calibrating a relationship of a focusing light spot of the monitoring light beam and an axial drift quantity of a sample to be tested and inputting to a computer for axial drift compensation of the sample. The astigmatism-based sample axial drift compensating device has a simple structure, is convenient for use, has higher measurement sensitivity, and can be used in a high-precision super-resolution micro device.
Description
Technical field
The invention belongs to high precision, the micro-field of super-resolution, axial drift compensation method of particularly a kind of sample and device based on astigmatism.
Background technology
In the middle of the course of work of microscopic system, because the influence of factors such as thermal drift and stress drift, axial drift can take place in testing sample inevitably in time, forms out of focus, thereby the imaging precision of microscopic system is impacted.Particularly for needs repeatedly concerning same pixel carries out the microscopic method of multiple scanning, the influence that this axial drift brought will be more obvious, be not to be same pixel because axially drift will cause repeatedly multiple scanning.Therefore, a kind ofly can measure the axial drift of microscopic sample and the method that compensates in real time, will have a very important role for the precision that improves microscopic system.
Along with science and technology development, researchers have proposed the axially method of drift of multiple measuring samples, and wherein the application with the optical non-contact measurement method is the most extensive.At present, the optical non-contact measurement method is based on confocal system more.Though this system has measuring accuracy preferably, constructs more complicated, limited the scope of application of method to a certain extent.
Summary of the invention
The invention provides axial drift compensation method of a kind of sample based on astigmatism and device, apparatus structure is simple, and method is easy to use, and has higher measurement sensitivity.This kind method and apparatus can be widely used in Laser Scanning Confocal Microscope (Confocal Microscopy); In the middle of the stimulated emission loss microscope high precision super-resolution microscopy apparatus such as (STED:Stimulated Emission Depletion Microscopy); Axial location drift in order to testing sample compensates, thereby guarantees the precision of microscopic system.
The axial drift compensation method of a kind of sample based on astigmatism may further comprise the steps:
(1) laser beam that is sent by laser instrument collimates through single-mode fiber and collimation lens;
(2) through after the effect of Amici prism of the process of the light behind the collimation, be decomposed into first reflection ray and first transmitted ray;
(3) said first transmitted ray is through forming first astigmatic pencil by two astigmatism processors that cylindrical mirror constituted that focal length is identical and xsect is mutually orthogonal;
(4) said first astigmatic pencil projects on the testing sample that places on the three-dimensional manometer scanning platform after focusing on through microcobjective; Light beam after the testing sample reflection returns along original optical path is reverse; After said microcobjective collection, form second astigmatic pencil through said astigmatism processor once more;
(5) second astigmatic pencils are decomposed into second transmitted ray and second reflection ray through said Amici prism;
(6) said second reflection ray is as monitoring light beam line focus lens focus; Receive by the optoelectronic induction device through behind the optical attenuator again; Obtain the characteristic parameter of monitoring light beam focal beam spot; The relation of the characteristic parameter of demarcation monitoring light beam focal beam spot and the axial drift value of testing sample as system calibrating function input computing machine, is accomplished the demarcation of system to this relational expression;
(7) system calibrating good after; Be used for the axial drift compensation of sample: when axially drift takes place testing sample; Computing machine according to by the characteristic parameter of the monitoring light beam focal beam spot of said optoelectronic induction device output in demarcating good system tracking enquiry to the axial drift value of corresponding testing sample; And send the axial location that the three-dimensional manometer scanning platform is adjusted in instruction in view of the above, realize axial drift compensation to testing sample.
Described optoelectronic induction device is high-speed charge coupled device (CCD:Charge Couple Device) or 4 quadrant detector (QD:Quadrant Detector), and described 4 quadrant detector is vertically placed.
When using CCD as the optoelectronic induction device, the characteristic parameter of said monitoring light beam focal beam spot by monitoring light beam on CCD the full width at half maximum value of one-tenth focal beam spot strength distribution curve.
When using QD as the optoelectronic induction device, QD vertically places, the four-quadrant output current difference value of the characteristic parameter of said monitoring light beam focal beam spot for calculating according to the output current on the 4 quadrant detector four-quadrant.
The present invention also provides a kind of sample based on astigmatism axial drift compensation device, comprising:
Laser instrument;
Single-mode fiber, collimation lens, Amici prism, astigmatism processor, microcobjective that on the optical axis of the emergent light light path of said laser instrument, sets gradually and the three-dimensional manometer scanning platform that is used to place testing sample; Wherein, the outgoing end face of said single-mode fiber is positioned at the focus in object space place of collimation lens, and two cylindrical mirrors that said astigmatism processor is identical by focal length and xsect is mutually orthogonal constitute;
The condenser lens that on the optical axis of monitoring light beam light path, sets gradually, optical attenuator and optoelectronic induction device, said optoelectronic induction device is positioned at the rear focus place of said condenser lens; Wherein, The optical axis of said monitoring light beam light path is vertical with the optical axis of the emergent light light path of said laser instrument, and said monitoring light beam is for collected by said microcobjective by the light of testing sample reflection and said astigmatism processor carries out the reflection ray that obtained by said Amici prism beam split again behind the astigmatism successively;
And while and said three-dimensional manometer scanning platform and optoelectronic induction device homogeneous phase computing machine even.
In apparatus of the present invention; Said laser instrument is used to send laser beam; Said single-mode fiber and collimation lens are used for said laser beam is collimated; Said Amici prism is used for beam split; Said astigmatism processor is used for the light spot shape of incident beam modulated and obtains astigmatic pencil; The light focusing that said microcobjective is used for incident projects on the testing sample and is used for collecting through the testing sample beam reflected; Said condenser lens is used for monitoring light beam is focused on the sensitive surface of optoelectronic induction device, and it is saturated to avoid the optoelectronic induction device light intensity to occur that said optical attenuator is used to carry out optical attenuation, and said optoelectronic induction device is used to receive the monitoring light beam focal beam spot and exports corresponding monitor message (characteristic parameter of monitoring light beam focal beam spot) according to receiving signal; Said computing machine sends the adjustment control signal after being used to receive the monitor message of optoelectronic induction device feedback and carrying out analyzing and processing, and said three-dimensional manometer scanning platform is used to place testing sample and adjusts the axial location of testing sample on the scanning platform according to the adjustment control signal that said computing machine sends.
In the optimized technical scheme, in the said astigmatism processor, the angle of the first cylindrical mirror xsect and surface level is 45 °, and the angle of the second cylindrical mirror xsect and surface level is 135 °.
In the optimized technical scheme, in the said astigmatism processor, two cylindrical mirror focal lengths are 150mm.
In the optimized technical scheme, said optoelectronic induction device is high-speed charge coupled device (CCD) or 4 quadrant detector (QD).
The principle of the invention is following:
For a cylindrical mirror, its xsect (being radial section) can be regarded spherical lens as, and longitudinal section (being axial cross section) then can regard dull and stereotyped as.Therefore, when in the xsect of two parallel rayss at cylindrical mirror during incident, emergent ray can intersect on the cylindrical mirror focal line a bit; And when in two longitudinal sections of parallel rays at cylindrical mirror during incident, emergent ray is keeping parallelism still.So imagery of cylindrical mirror has the astigmatism characteristic.
According to the imaging character of the above cylindrical mirror, when Gaussian beam through after the single cylindrical mirror, the hot spot of outgoing beam will ovalization, and the major axis of ellipse light spot is vertical with the xsect of cylindrical mirror.
After the astigmatism processor that cylindrical mirror constituted of Gaussian beam through and xsect mutually orthogonal identical by two focal lengths; The ellipse light spot shape of outgoing beam will change along with the propagation of outgoing beam: at the rear focus place of first cylindrical mirror, the major axis of outgoing beam ellipse light spot is vertical with the xsect of first cylindrical mirror; And at the rear focus place of second cylindrical mirror, the major axis of outgoing beam ellipse light spot is vertical with the xsect of second cylindrical mirror.Because the xsect of two cylindrical mirrors is mutually orthogonal, therefore when outgoing beam propagated into the rear focus of second cylindrical mirror by the rear focus of first cylindrical mirror, the sensing of light beam ellipse light spot (long axis of ellipse direction) had turned over 90 °.In this process, the light beam ellipse light spot with the first cylindrical mirror xsect vertical direction on length will shorten gradually, with the second cylindrical mirror xsect vertical direction on length will be elongated gradually.
After Gaussian beam astigmatism processor that cylindrical mirror constituted and microcobjective successively through and xsect mutually orthogonal identical by two focal lengths; The shape of the ellipse light spot of outgoing beam can change along with the propagation of outgoing beam equally: at the combination rear focus place of first cylindrical mirror and microcobjective, the major axis of outgoing beam ellipse light spot is vertical with the xsect of first cylindrical mirror; And at the combination rear focus place of second cylindrical mirror and microcobjective, the major axis of outgoing beam ellipse light spot is vertical with the xsect of second cylindrical mirror.Because the xsect of two cylindrical mirrors is mutually orthogonal; Therefore when outgoing beam propagated into the combination rear focus of second cylindrical mirror and microcobjective by the combination rear focus of first cylindrical mirror and microcobjective, the sensing of light beam ellipse light spot (long axis of ellipse direction) had turned over 90 °.In this process, the light beam ellipse light spot with the first cylindrical mirror xsect vertical direction on length will shorten gradually, with the second cylindrical mirror xsect vertical direction on length will be elongated gradually.
Zone between the combination rear focus of first cylindrical mirror and microcobjective and the combination rear focus of second cylindrical mirror and microcobjective is regarded as equivalent Jiao Qu, and the axial length of equivalent Jiao Qu is called equivalent depth of focus.The equivalence depth of focus can calculate by following formula:
Wherein Δ is equivalent depth of focus, and f is the focal length of two cylindrical mirrors, and f ' is the focal length of microcobjective, d
1Be the spacing of two cylindrical mirrors, d
2Be the spacing between the microcobjective and second cylindrical mirror.
When axially drift takes place in testing sample in the burnt district of equivalence; First astigmatic pencil focuses on the shape that becomes ellipse light spot on the testing sample through microcobjective and can change thereupon, its corresponding monitoring light beam (being collected with the reflection ray that is obtained by said Amici prism beam split again after the astigmatism processor carries out astigmatism by said microcobjective successively by the light of testing sample reflection is monitoring light beam) focus on afterwards on the optoelectronic induction device become the shape of ellipse light spot also can change thereupon.Therefore, can demarcate the monitoring light beam focal beam spot that can be reflected in the change in shape that becomes ellipse light spot on the optoelectronic induction device characteristic parameter and the axial drift value of sample relation and be used for the axially real-Time Compensation of drift of sample.
The axial drift compensation device of sample based on astigmatism of the present invention can also independently module application be in the microscopical measurement light path of high precision super-resolution as one, and the axial drift to testing sample in real time compensates.
With respect to prior art, the present invention has following beneficial technical effects:
(1) apparatus structure is simple, and is easy to operate;
(2) have higher measurement sensitivity and bigger measurement range;
(3) adjustment process quick and precisely, and the working light path that can not adjust the telescope to one's eyes form to disturb.
Description of drawings
Fig. 1 is the axial drift compensation device of the sample based on an astigmatism of the present invention synoptic diagram;
Synoptic diagram when Fig. 2 is applied to the microscope working light path for the axial drift compensation device of the sample based on astigmatism of the present invention as a standalone module;
When Fig. 3 adopts CCD as the optoelectronic induction device for the present invention, the corresponding curve of measured full width at half maximum value and testing sample axial location drift value;
When Fig. 4 adopts QD as the optoelectronic induction device for the present invention, the corresponding curve of four-quadrant output current difference value and testing sample axial location drift value.
Embodiment
Specify the present invention below in conjunction with embodiment and accompanying drawing, but the present invention is not limited to this.
The axial drift compensation device of a kind of sample based on astigmatism; As shown in Figure 1, comprising: laser instrument 1, single-mode fiber 2, collimation lens 3, Amici prism 4, first cylindrical mirror 5, second cylindrical mirror 6, microcobjective 7, three-dimensional manometer scanning platform 8, condenser lens 9, optical attenuator 10, optoelectronic induction device 11 and computing machine 12.
Condenser lens 9, optical attenuator 10 and optoelectronic induction device 11 are positioned on the optical axis of monitoring light beam R2 light path successively, and optoelectronic induction device 11 is positioned at the rear focus place of condenser lens 9; Wherein, The optical axis of monitoring light beam R2 light path is vertical with the optical axis of the emergent light light path of laser instrument 1, and monitoring light beam R2 is for collected by microcobjective 7 by the light of testing sample reflection and astigmatism processor (being made up of first cylindrical mirror 5 and second cylindrical mirror 6) carries out the reflection ray that obtained by Amici prism 4 beam split again behind the astigmatism successively;
In the said apparatus, the effect of optical attenuator 10 is saturated for avoiding optoelectronic induction device 11 light intensity to occur.Optoelectronic induction device 11 is high-speed charge coupled device (CCD) or 4 quadrant detector (QD).
It is following to adopt device shown in Figure 1 to carry out based on the axial drift compensation method of the sample of astigmatism:
Laser beam from laser instrument 1 sends at first is imported into single-mode fiber 2, from single-mode fiber 2 emitting laser light beams, accomplishes collimation through collimation lens 3.
Light beam behind the collimation is decomposed into first transmitted ray and first reflection ray after through Amici prism 4, and first transmitted ray forms the first astigmatic pencil R1 through astigmatism processor (being made up of first cylindrical mirror 5 and second cylindrical mirror 6) back.
The first astigmatic pencil R1 projects on the testing sample that is positioned on the three-dimensional manometer scanning platform 8 after microcobjective 7 focuses on; Light beam after the testing sample reflection returns along original optical path is reverse; After microcobjective 7 collections; Pass through this astigmatism processor (being made up of first cylindrical mirror 5 and second cylindrical mirror 6) once more and form second astigmatic pencil, second astigmatic pencil is decomposed into second transmitted ray and second reflection ray through Amici prism 4 effects, and wherein second reflection ray is monitoring light beam R2.
Monitoring light beam R2 line focus lens 9 focus on; Receive by optoelectronic induction device 11 through optical attenuator 10 backs again; Obtain the characteristic parameter of monitoring light beam focal beam spot; The relation of the characteristic parameter of demarcation monitoring light beam focal beam spot and the axial drift value of testing sample as system calibrating function input computing machine 12, is accomplished the demarcation of system to this relational expression.
After system calibrating is good; Be used for the axial drift compensation of sample: when axially drift takes place testing sample; Computing machine 12 according to by the characteristic parameter of the monitoring light beam focal beam spot of said optoelectronic induction device output in demarcating good system tracking enquiry to the axial drift value of corresponding testing sample; And send the axial location that three-dimensional manometer scanning platform 8 is adjusted in instruction in view of the above, realize axial drift compensation to testing sample.
Specifically:
When using CCD as optoelectronic induction device 11; Testing sample is placed on the three-dimensional manometer scanning platform 8,, and obtains monitoring light beam R2 becomes the focal beam spot strength distribution curve on CCD full width at half maximum value in real time through the axial location of adjustment three-dimensional manometer scanning platform 8; Thereby obtain the relation of axial drift value of full width at half maximum value and the testing sample of focal beam spot; Curve is as shown in Figure 3, as system calibrating function input computing machine 12, accomplishes the demarcation of system to this relational expression.
After system calibrating is good; Be used for the axial drift compensation of sample: when axially drift takes place testing sample; CCD sends the full width at half maximum value of focal beam spot to computing machine 12; Computing machine 12 tracking enquiry in demarcating good system arrives the axial location drift value of corresponding testing sample, and sends the axial location of instruction adjustment three-dimensional manometer scanning platform 8 in view of the above, realizes the axial drift compensation of testing sample.When the calibration value when the full width at half maximum value of survey focal beam spot does not have axial drift with sample equates, promptly accomplished testing sample axial location drift compensation.
The full width at half maximum value of the above-mentioned focal beam spot of mentioning obtains in the following manner: cross the center of CCD optoelectronic induction face, in sensitive surface, doing one is 45 ° straight line with the horizontal direction angle, calculates the full width at half maximum value of the each point curve of light distribution on this straight line.Since according to the full width at half maximum value of focal beam spot can unique definite focal beam spot shape, therefore like this under the situation monitoring light beam on said optoelectronic induction device, become the full width at half maximum value of focal beam spot strength distribution curve to can be used as the characteristic parameter of monitoring light beam focal beam spot.
When using QD, QD is vertically placed as the optoelectronic induction device.Detection principle according to QD; Output current on its four-quadrant is linear with the light spot energy that is radiated on each quadrant respectively; Therefore, can carry out the shape that calculus of differences characterizes ellipse light spot that monitoring light beam becomes through the output current to all quadrants, concrete formula is following:
Δr＝I
1+I
3-I
2-I
4
Wherein, I
1, I
2, I
3, I
4Be respectively the output current of light beam on the QD four-quadrant, Δ r is a four-quadrant output current difference value, as the characteristic parameter of monitoring light beam focal beam spot in order to characterize the shape of focal beam spot.
Equally, testing sample is placed on the three-dimensional manometer scanning platform 8, through the axial location of adjustment three-dimensional manometer scanning platform 8; And real time record QD goes up the output current on the four-quadrant; And calculate four-quadrant output current difference value Δ r, thus obtaining the relation of the axial drift value of four-quadrant output current difference value Δ r and testing sample, curve is as shown in Figure 4; As system calibrating function input computing machine 12, accomplish the demarcation of system to this relational expression.
After system calibrating is good; Be used for the axial drift compensation of sample: when axially drift takes place testing sample; QD sends the four-quadrant output current difference value Δ r that calculates to computing machine 12; Computing machine 12 tracking enquiry in demarcating good system arrives the axial location drift value of corresponding testing sample, and sends the axial location of instruction adjustment three-dimensional manometer scanning platform 8 in view of the above, realizes the axial drift compensation of testing sample.When the calibration value when four-quadrant output current difference value Δ r does not have axial drift with sample equates, promptly accomplished testing sample axial location drift compensation.
Whole real-time process monitoring and continuous circulation are carried out, thereby accomplish the real-Time Compensation to the axial drift of testing sample.
The black surround inner structure can constitute one independently the axial drift compensation module application of sample is in the microscopical measurement light path of high precision super-resolution among Fig. 1, and the axial drift to testing sample in real time compensates.Concrete working light path is as shown in Figure 2.
Promptly; Adopted the high precision super-resolution microscopic system of the axial drift compensation module of sample of the present invention, having comprised: microcobjective 7, three-dimensional manometer scanning platform 8; Computing machine 12; Dichroic mirror 13,14, based on the axial drift compensation module 15 of the sample of astigmatism, microscope condenser lens 16 and microscope detector 17.
Wherein based on the inside concrete structure of the axial drift compensation module 15 of the sample of astigmatism shown in black surround inner structure among Fig. 1, comprising: laser instrument 1, single-mode fiber 2, collimation lens 3, Amici prism 4, first cylindrical mirror 5, second cylindrical mirror 6, condenser lens 9, optical attenuator 10 and optoelectronic induction device 11.
It is following that the axial drift compensation module 15 of the sample that the present invention is based on astigmatism is applied to the method that axial drift compensates to sample in the high precision super-resolution microscopic system:
By the first astigmatic pencil R1 that sends based on the axial drift compensation module 15 of the sample of astigmatism, form reflection through dichroic mirror 14 backs, folded light beam and microscope working beam R3 project on the testing sample after microcobjective 7 focuses on.Formation through dichroic mirror 14 time separates the astigmatic pencil that reflects through testing sample with the microscope working beam; Wherein through the astigmatic pencil of testing sample reflection by dichroic mirror 14 reflections, by receiving based on the axial drift compensation module 15 of the sample of astigmatism and changing monitoring light beam R2 into; Microscope working beam through the testing sample reflection then sees through dichroic mirror 14; Separate through dichroic mirror 13 formation microscope imaging light beam R4 and with the working beam of incident more afterwards; Microscope imaging light beam R4 focuses on the back through microscope condenser lens 16 and is received by microscope detector 17, is used for micro-imaging.
Focal beam spot information based on the axial drift compensation module 15 of the sample of astigmatism is become according to monitoring light beam R2 is exported corresponding pilot signal and is sent computing machine 12 to; Change the axial location that control signal corresponding is used to adjust three-dimensional manometer scanning platform 8 into after process computing machine 12 is handled, thereby realize the axially compensation of drift of testing sample.
In practical operation, whole real-time process monitoring and continuous circulation are carried out, thereby accomplish the real-Time Compensation to the axial drift of testing sample.
Claims (7)
1. the axial drift compensation method of the sample based on astigmatism is characterized in that, may further comprise the steps:
(1) laser beam that is sent by laser instrument collimates through single-mode fiber and collimation lens;
(2) through after the effect of Amici prism of the process of the light behind the collimation, be decomposed into first reflection ray and first transmitted ray;
(3) said first transmitted ray is through forming first astigmatic pencil by two astigmatism processors that cylindrical mirror constituted that focal length is identical and xsect is mutually orthogonal;
(4) said first astigmatic pencil projects on the testing sample that places on the three-dimensional manometer scanning platform after focusing on through microcobjective; Light beam after the testing sample reflection returns along original optical path is reverse; After said microcobjective collection, form second astigmatic pencil through said astigmatism processor once more;
(5) second astigmatic pencils are decomposed into second transmitted ray and second reflection ray through said Amici prism;
(6) said second reflection ray is as monitoring light beam line focus lens focus; Receive by the optoelectronic induction device through behind the optical attenuator again; Obtain the characteristic parameter of monitoring light beam focal beam spot; The relation of the characteristic parameter of demarcation monitoring light beam focal beam spot and the axial drift value of testing sample as system calibrating function input computing machine, is accomplished the demarcation of system to this relational expression;
(7) system calibrating good after; Be used for the axial drift compensation of sample: when axially drift takes place testing sample; Computing machine according to by the characteristic parameter of the monitoring light beam focal beam spot of said optoelectronic induction device output in demarcating good system tracking enquiry to the axial drift value of corresponding testing sample; And send the axial location that the three-dimensional manometer scanning platform is adjusted in instruction in view of the above, realize axial drift compensation to testing sample.
2. the axial drift compensation method of the sample based on astigmatism as claimed in claim 1; It is characterized in that; Described optoelectronic induction device is high-speed charge coupled device, the characteristic parameter of said monitoring light beam focal beam spot by monitoring light beam on said optoelectronic induction device the full width at half maximum value of one-tenth focal beam spot strength distribution curve.
3. the axial drift compensation method of the sample based on astigmatism as claimed in claim 1; It is characterized in that; Described optoelectronic induction device is the vertical 4 quadrant detector of placing, the four-quadrant output current difference value of the characteristic parameter of said monitoring light beam focal beam spot for calculating according to the output current on the 4 quadrant detector four-quadrant.
4. the axial drift compensation device of the sample based on astigmatism is characterized in that, comprising:
Laser instrument;
Single-mode fiber, collimation lens, Amici prism, astigmatism processor, microcobjective that on the optical axis of the emergent light light path of said laser instrument, sets gradually and the three-dimensional manometer scanning platform that is used to place testing sample; Wherein, the outgoing end face of said single-mode fiber is positioned at the focus in object space place of collimation lens, and two cylindrical mirrors that said astigmatism processor is identical by focal length and xsect is mutually orthogonal constitute;
The condenser lens that on the optical axis of monitoring light beam light path, sets gradually, optical attenuator and optoelectronic induction device, said optoelectronic induction device is positioned at the rear focus place of said condenser lens; Wherein, The optical axis of said monitoring light beam light path is vertical with the optical axis of the emergent light light path of said laser instrument, and said monitoring light beam is for collected by said microcobjective by the light of testing sample reflection and said astigmatism processor carries out the reflection ray that obtained by said Amici prism beam split again behind the astigmatism successively;
And while and said three-dimensional manometer scanning platform and optoelectronic induction device homogeneous phase computing machine even.
5. the axial drift compensation device of the sample based on astigmatism as claimed in claim 4 is characterized in that, in the said astigmatism processor, the angle of the first cylindrical mirror xsect and surface level is 45 °, and the angle of the second cylindrical mirror xsect and surface level is 135 °.
6. like claim 4 or the axial drift compensation device of 5 described samples, it is characterized in that in the said astigmatism processor, two cylindrical mirror focal lengths are 150mm based on astigmatism.
7. the axial drift compensation device of the sample based on astigmatism as claimed in claim 4 is characterized in that said optoelectronic induction device is high-speed charge coupled device or 4 quadrant detector.
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