CN108321243A - Black silicon nano PIN photoelectric detector structure and preparation method thereof - Google Patents
Black silicon nano PIN photoelectric detector structure and preparation method thereof Download PDFInfo
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/105—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PIN type
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- H01L31/02—Details
- H01L31/0236—Special surface textures
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- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
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Abstract
The present disclosure provides a black silicon nano PIN photodetector structure and a method for manufacturing the same; wherein, black silicon nanometer PIN photoelectric detector structure includes from top to bottom in proper order: the front-surface antireflection coating comprises a front-surface metal electrode, a front-surface antireflection film, a front-surface silicon oxide film, a front-surface N-type heavily-doped region, a P-type crystalline silicon substrate, a back-surface P-type heavily-doped region and a back-surface metal electrode; wherein, the front surface N type heavily doped region adopts a black silicon nano structure. The black silicon nano PIN photoelectric detector structure and the preparation method thereof greatly improve the breakdown voltage of the detector and are beneficial to obtaining higher spectral responsivity.
Description
Technical field
This disclosure relates to Si-based photodetectors technical field, and in particular to a kind of black silicon nanometer PIN photoelectric detector knot
Structure and preparation method thereof.
Background technology
No matter semiconductor detector suffers from important irreplaceable role, product dosage pole military or civilian
Greatly, range is extremely wide, only by taking silicon substrate PIN structural photodetector as an example, in Beijing Metro in widely used rays safety detection apparatus
Imaging system is exactly to rely on silicon substrate PIN photoelectric detector, the remote controlers such as refrigerator TV also in family, in hospital in CT equipment at
As system etc..But import is but relied primarily in China's semiconductor detector, either high-end or low-end product, in military affairs
Aspect seriously restricts China's national defense ability, in terms of high-tech development limit China Environment Science exploring ability, civilian
Aspect considerably increases the financial burden of common people.Therefore, it is necessary to carry out the high-performance silicon-based light with independent intellectual property right
Electric explorer.
Silicon substrate PIN photoelectric detector is developed from PN junction photodetector, have work at room temperature, energy resolution
The features such as rate is high, pulse rise time is short, detection efficient is high and performance stablizes, at present in medical CT, luggage security check, collection
The fields such as vanning inspection, large industry equipment nondestructive inspection, oil well logging, radioactivity prospecting, environmental monitoring and infrared touch panel
All play irreplaceable role.For the demand of different application field difference detecting band, need to improve silicon substrate PIN photoelectricity
Detector the quantum efficiency of different-waveband or while improving silicon substrate PIN photoelectric detector other parameters ensure device amount
Sub- efficiency.
Invention content
(1) technical problems to be solved
At least partly to solve above-mentioned technical problem, the disclosure provide a kind of black silicon nanometer PIN photoelectric detector structure and
Preparation method, to improve the quantum efficiency and spectral responsivity of detector.
(2) technical solution
According to one aspect of the disclosure, a kind of black silicon nanometer PIN photoelectric detector structure is provided, from top to down successively
Including:Front surface metal electrode, front surface antireflective coating, front surface silicon oxide film, the heavily doped area of front surface N-type, P-type crystal silicon
Substrate, the heavily doped area of back surface p-type, back surface metal electrode;Wherein, the heavily doped area of front surface N-type uses black silicon nanostructure.
In some embodiments, front surface p-type protection ring is formed around the heavily doped area of front surface N-type.
In some embodiments, within the scope of 100~1000nm, diameter exists the nanometer hole depth of the black silicon nanostructure
Within the scope of 200~1000nm.
In some embodiments, the junction depth in the heavily doped area of the N-type is within the scope of 500~2000nm, doping concentration 1 ×
1018cm-3~1 × 1020cm-3In range;The junction depth in the heavily doped area of p-type within the scope of 500~3000nm, doping concentration 1 ×
1018cm-3~1 × 1020cm-3In range.
A kind of preparation method of black silicon nanometer PIN photoelectric detector structure another aspect of the present disclosure provides,
Including:Silicon oxide film is formed in the front surface of P-type silicon substrate and back surface;It is opened on the silicon substrate of covering silicon oxide film
Window carries out boron doping, forms the heavily doped area of back surface p-type;Boron doped silicon substrate front surface windowing is completed, and is being prepared black
Silicon nanostructure;Phosphorus doping is carried out in the region for completing black silicon nanostructure, forms the heavily doped area of front surface N-type;It is mixed completing phosphorus
Miscellaneous silicon substrate front surface forms antireflective coating;And front surface and back surface windowing in silicon substrate, form front surface gold
Belong to electrode and back surface metal electrode, thus completes the preparation of the black silicon nanometer PIN photoelectric detector structure.
In some embodiments, boron doping is carried out in the silicon substrate uplifting window mouth of the covering silicon oxide film, is also formed
Front surface p-type protection ring, the front surface p-type protection ring are formed in around the heavily doped area of front surface N-type.
In some embodiments, the silicon oxide film is prepared using hot oxygen method for oxidation or PECVD methods.
In some embodiments, the boron doping, phosphorus doping are obtained using ion implanting or thermal diffusion method.
In some embodiments, the black silicon nanostructure is using the corrosion of wet method metal catalytic or dry ionic lithographic method
It prepares.
In some embodiments, the antireflective coating is prepared using PECVD methods;The metal electrode uses screen printing
It is prepared by brush, evaporation, sputtering or electro-plating method.
(3) advantageous effect
From the technical solution can be seen that black silicon nanometer PIN photoelectric detector structure of the disclosure and preparation method thereof to
Have the advantages that one of them less:
(1) the black silicon nanometer PIN photoelectric detector structure of the disclosure has front surface protection ring, and detector greatly improved
Breakdown voltage is conducive to obtain higher spectral responsivity.
(2) disclosure sets black silicon nanostructure in Si-based photodetectors incidence surface, can effectively reduce detector 400
The reflectivity of~1000nm wave bands, absorption of the enhancing detector to light, and then effectively improve the spectral responsivity and amount of detector
Sub- efficiency.
(3) technical process of the disclosure is relatively easy, and equipment cost is relatively low, is suitably applied large-scale production.
Description of the drawings
Shown in attached drawing, above and other purpose, the feature and advantage of the disclosure will be more clear.In whole attached drawings
Identical reference numeral indicates identical part, does not press actual size equal proportion scaling deliberately and draws attached drawing, it is preferred that emphasis is shows
Go out the purport of the disclosure.
Fig. 1 is according to the black silicon nanometer PIN photoelectric detector structural schematic diagram of the embodiment of the present disclosure.
Fig. 2 is the preparation method flow chart according to the black silicon nanometer PIN photoelectric detector structure of the embodiment of the present disclosure.
<Symbol description>
100- front surface metal electrodes, 101- front surface antireflective coatings, 102- front surface silicon oxide films, 103- front surfaces
Protection ring, the heavily doped area of 104- front surface N-types, 105-P type crystalline silicon substrates, the heavily doped area of 106- back surface p-types, 107- back surface gold
Belong to electrode.
Specific implementation mode
To make the purpose, technical scheme and advantage of the disclosure be more clearly understood, below in conjunction with specific embodiment, and reference
The disclosure is further described in attached drawing.
It should be noted that in attached drawing or specification description, similar or identical part all uses identical figure number.It is attached
The realization method for not being painted or describing in figure is form known to a person of ordinary skill in the art in technical field.In addition, though this
Text can provide the demonstration of the parameter comprising particular value, it is to be understood that parameter is equal to corresponding value without definite, but can connect
The error margin received is similar to be worth accordingly in design constraint.The direction term mentioned in embodiment, for example, "upper", "lower",
"front", "rear", "left", "right" etc. are only the directions of refer to the attached drawing.Therefore, the direction term used is for illustrating not to use
To limit the protection domain of the disclosure.
Present disclose provides a kind of black silicon nanometer PIN photoelectric detector structures, as shown in Figure 1, the black silicon nanometer PIN light
Electric explorer structure includes:It is followed successively by 100 (wherein, front surface metal of front surface metal electrode from top to bottom in light-receiving surface direction
Electrode is metal grid lines), front surface antireflective coating 101 (abbreviation antireflective coating), front surface silicon oxide film 102 (its for oxidation
Silicon layer can grow to be formed by pecvd process), front surface protection ring 103 (its be p-type protection ring), front surface N-type weight
Mix area 104, P-type crystal silicon substrate 105, the heavily doped area 106 of back surface p-type, back surface metal electrode 107.Wherein, the disclosure is in N
The heavily doped area 104 of type is equipped with black silicon nanostructure, effectively increases the spectral response of detector;It is devised around the heavily doped area of N-type
The breakdown reverse voltage of detector greatly improved in protection ring 103.
Specifically, the nanometer hole depth of the black silicon nanostructure is within the scope of 100~1000nm, diameter 200~
Within the scope of 1000nm.
The junction depth in the heavily doped area of N-type is within the scope of 500~2000nm, and doping concentration is 1 × 1018cm-3~1 ×
1020cm-3In range.
The junction depth in the heavily doped area of p-type is within the scope of 500~3000nm, and doping concentration is 1 × 1018cm-3~1 ×
1020cm-3In range.
The thickness of the antireflective coating is within the scope of 50~120nm, and refractive index is in 1.9~2.4 ranges.
The disclosure additionally provides a kind of preparation method of black silicon nanometer PIN photoelectric detector structure, as shown in Fig. 2, described
The preparation method of its black silicon nanometer PIN photoelectric detector structure includes the following steps:
P-type crystal silicon substrate is carried out standard RCA clean by S1;
S2, it is two-sided on the silicon substrate after the cleaning to prepare silicon oxide film;
S3, front surface and back surface output boron diffusion window on the silicon substrate of the covering silicon oxide film, and carry out
Boron doping forms front surface protection ring (namely front surface boron doping protection ring) and the heavily doped areas back surface P+;
S4 outputs phosphorus diffusion window in the boron doped silicon substrate front surface of completion, and prepares black silicon nanostructure;
S5 carries out phosphorus doping in the black silicon nanostructure region, forms the heavily doped areas N+ (namely the black silicon of front surface phosphorus doping
The areas nanometer N+);
S6, the phosphorosilicate glass (being formed in diffusion process) in removal phosphorus doping region, and in the silicon lining for completing phosphorus doping
Bottom front surface prepares antireflective coating;
S7 then outputs window in silicon substrate front-back, prepares metal electrode.
Specifically, outputing boron diffusion window around back surface and front surface, and boron diffusion is carried out, is formed P++ layers heavily doped;
Then phosphorus diffusion window is outputed in silicon substrate front surface, carries out the preparation of black silicon nanostructure, then carry out phosphorus diffusion, form N+
+ heavily doped layer;Then the phosphorosilicate glass in removal phosphorus diffusion region, and prepare Si3N4Subtract transmitting film;Finally respectively in front surface phosphorus
Diffusion zone and back surface boron diffused region windowing, and complete the preparation of metal electrode.
Specifically, the silicon oxide film is prepared using the methods of hot oxygen method for oxidation, PECVD.
The boron doping is obtained using the methods of ion implanting or thermal diffusion, and the phosphorus doping also uses ion implanting or heat
The methods of diffusion obtains.
The black silicon nanostructure is corroded using wet method metal catalytic or the preparation of the methods of dry ionic etching.
The antireflective coating is prepared using PECVD methods.
The metal electrode is prepared using the methods of silk-screen printing, evaporation, sputtering or plating.Metal electrode material is
One kind in aluminium, gold, silver, chromium, titanium or platinum or in which combination.
In above-mentioned steps S3, the boron doping depth is within the scope of 500~3000nm, and doping concentration is 1 × 1018cm-3
~1 × 1020cm-3In range.
In above-mentioned steps S4, within the scope of 100~1000nm of nanometer hole depth of black silicon nanostructure, diameter 200~
Within the scope of 1000nm.
In above-mentioned steps S5, phosphorus doping junction depth is within the scope of 500~2000nm, and doping concentration is 1 × 1018cm-3~1
×1020cm-3In range.
In above-mentioned steps S6, the thickness of antireflective coating is within the scope of 50~120nm, and refractive index is in 1.9~2.4 ranges
It is interior.
In above-mentioned steps S7, the metal electrode is prepared using the methods of silk-screen printing, evaporation, sputtering or plating;
Metal electrode material is one kind or in which combination in aluminium, gold, silver, chromium, titanium or platinum.
The preparation process of the black silicon nanometer PIN photoelectric detector structure of the disclosure is introduced in further detail below.
First, the RCA for standard being carried out to P-type crystal silicon is cleaned, and removes the organic contaminations and metallic particles of surface of crystalline silicon
Deng.After completing cleaning, silicon oxide film is prepared two-sided, can be grown with PECVD, the method that can also be aoxidized with hot oxygen is given birth to
It is long.Silicon oxide film is both the P-type crystal silicon surface passivation layer and doping blocking layer, after thickness can be according to doping etc.
Continuous process requirements determine.After having grown silicon oxide film, using photoetching technique or other pattern technologies in crystalline silicon substrate
Front surface and back surface output window, then carry out boron doping, form (the also referred to as front surface boron doping protection of front surface protection ring
Ring) and the heavily doped areas back surface P+.Doping depth is within the scope of 500~3000nm, and doping concentration is 1 × 1018cm-3~1 ×
1020cm-3In range, ion implanting may be used in boron doping or the method for diffusion is completed.The boron doping protection ring can be big
Width improves the breakdown voltage of detector, is conducive to obtain higher spectral responsivity.
After completing boron doping, window is outputed in crystalline silicon front surface, carries out the preparation of black silicon nanostructure.Black silicon nano junction
The preparation method of structure have it is several, including dry ionic etching, wet method metal catalytic corrosion etc..By taking metallic silver catalyzed corrosion as an example,
First, silicon chip is implanted into the HF and AgNO of a certain concentration proportioning3In mixed solution, after several seconds, formed on a silicon substrate random
The metal silver nano-grain of distribution.Then the HF and H of a certain concentration proportioning are implanted into2O2In mixed solution, the gold of silicon chip surface
Belong to Argent grain as cathode, silicon as anode, constitutes micro- electrochemical reaction channel in silicon face, quickly carved below metallic
Erosion silicon substrate forms black silicon nano hole structure.The black silicon nanostructure can effectively reduce detector in 400~1000nm waves
The reflectivity of section, absorption of the enhancing detector to probing light, and then effectively improve the spectral responsivity and quantum effect of detector
Rate.
Finally use HNO3Impregnate the metallic silver particles in removal nano-pore.The nanometer hole depth of black silicon nanostructure exists
Within the scope of 100~1000nm, diameter within the scope of 200~1000nm, specific depth and diameter can by follow-up phosphorus doping technique and
Detector optimum reflectivity determines.Although the disclosure prepares black silicon nanostructure as example, simultaneously using metallic silver catalyzed corrosion
The practical range of the disclosure is not limited with this.
Then, phosphorus doping is carried out on black silicon nanostructure, for doping depth within the scope of 500~2000nm, doping is dense
Degree is 1 × 1018cm-3~1 × 1020cm-3In range, ion implanting may be used in phosphorus doping or the method for diffusion is completed.Phosphorus is mixed
Surface phosphorosilicate glass is removed using dilution HF after miscellaneous, then grows antireflective coating in silicon substrate front surface, antireflective coating can
To be MgF2, TiO2Or Si3N4.With Si3N4For, Si is grown using PECVD system3N4Film, by adjusting reaction gas SiH4
And NH3Concentration ratio, the refractive index of antireflective coating is controlled in 1.9~2.4 ranges.The thickness of antireflective coating 50~
Within the scope of 120nm.Although the disclosure using silicon nitride film as example, does not limit the practical range of the disclosure with this.
And then, metal electrode window is outputed on antireflective coating, and removes the Pyrex of silicon substrate back surface, then
Prepare metal electrode.Silk-screen printing, thermal evaporation, electron beam evaporation, magnetron sputtering or electricity may be used in the preparation of metal electrode
It is prepared by the methods of plating.Electrode material is one kind or in which combination in aluminium, gold, silver, chromium, titanium or platinum.
To sum up, compared with traditional silicon substrate PIN photoelectric detector, the black silicon nano photodetectors of the disclosure can not only have
Effect reduces leakage current, increases breakdown reverse voltage, and the reflectivity of short-wave band can be greatly reduced, and solves short-wave band spectral response
Low problem effectively improves the spectral responsivity of detector.This disclosure relates to which the processing step arrived is simple, of low cost.
So far, attached drawing is had been combined the embodiment of the present disclosure is described in detail.According to above description, art technology
Personnel should have the disclosure clear understanding.
It should be noted that in attached drawing or specification text, the realization method for not being painted or describing is affiliated technology
Form known to a person of ordinary skill in the art, is not described in detail in field.In addition, the definition to each element and not only limiting
Various concrete structures, shape or the mode mentioned in embodiment, those of ordinary skill in the art can carry out simply more it
Change or replaces.
Similarly, it should be understood that in order to simplify the disclosure and help to understand one or more of each open aspect,
Above in the description of the exemplary embodiment of the disclosure, each feature of the disclosure is grouped together into single implementation sometimes
In example, figure or descriptions thereof.However, the method for the disclosure should be construed to reflect following intention:It is i.e. claimed
The disclosure require more more than the feature being expressly recited in each claim features.More precisely, as following
As claims reflect, open aspect is all features less than single embodiment disclosed above.Therefore, it abides by
Thus the claims for following specific implementation mode are expressly incorporated in the specific implementation mode, wherein each claim itself
Separate embodiments as the disclosure.
Particular embodiments described above has carried out further in detail the purpose, technical solution and advantageous effect of the disclosure
It describes in detail bright, it should be understood that the foregoing is merely the specific embodiment of the disclosure, is not limited to the disclosure, it is all
Within the spirit and principle of the disclosure, any modification, equivalent substitution, improvement and etc. done should be included in the guarantor of the disclosure
Within the scope of shield.
Claims (10)
1. a kind of black silicon nanometer PIN photoelectric detector structure, includes successively from top to down:Front surface metal electrode, front surface subtract
Reflectance coating, front surface silicon oxide film, the heavily doped area of front surface N-type, P-type crystal silicon substrate, the heavily doped area of back surface p-type, back surface
Metal electrode;Wherein, the heavily doped area of front surface N-type uses black silicon nanostructure.
2. black silicon nanometer PIN photoelectric detector structure according to claim 1, wherein in the heavily doped area of front surface N-type
Around formed front surface p-type protection ring.
3. black silicon nanometer PIN photoelectric detector structure according to claim 1, wherein the black silicon nanostructure is received
Metre hole depth is within the scope of 100~1000nm, and diameter is within the scope of 200~1000nm.
4. black silicon nanometer PIN photoelectric detector structure according to claim 1, wherein the junction depth in the heavily doped area of N-type exists
Within the scope of 500~2000nm, doping concentration is 1 × 1018cm-3~1 × 1020cm-3In range;The junction depth in the heavily doped area of p-type exists
Within the scope of 500~3000nm, doping concentration is 1 × 1018cm-3~1 × 1020cm-3In range.
5. a kind of preparation method of black silicon nanometer PIN photoelectric detector structure, including:
Silicon oxide film is formed in the front surface of P-type silicon substrate and back surface;
Boron doping is carried out in the silicon substrate uplifting window mouth of covering silicon oxide film, forms the heavily doped area of back surface p-type;
Boron doped silicon substrate front surface windowing is completed, and is preparing black silicon nanostructure;
Phosphorus doping is carried out in the region for completing black silicon nanostructure, forms the heavily doped area of front surface N-type;
Antireflective coating is formed in the silicon substrate front surface for completing phosphorus doping;And
In the front surface and back surface windowing of silicon substrate, front surface metal electrode and back surface metal electrode are formed, it is thus complete
At the preparation of the black silicon nanometer PIN photoelectric detector structure.
6. the preparation method of black silicon nanometer PIN photoelectric detector structure according to claim 5, wherein in the covering
The silicon substrate uplifting window mouth of silicon oxide film carries out boron doping, also forms front surface p-type protection ring, the front surface p-type protection
Ring is formed in around the heavily doped area of front surface N-type.
7. the preparation method of black silicon nanometer PIN photoelectric detector structure according to claim 5, wherein the oxidation
Silicon thin film is prepared using hot oxygen method for oxidation or PECVD methods.
8. the preparation method of black silicon nanometer PIN photoelectric detector structure according to claim 5, wherein the boron doping,
Phosphorus doping is obtained using ion implanting or thermal diffusion method.
9. the preparation method of black silicon nanometer PIN photoelectric detector structure according to claim 5, wherein the black silicon is received
Rice structure is corroded using wet method metal catalytic or prepared by dry ionic lithographic method.
10. the preparation method of black silicon nanometer PIN photoelectric detector structure according to claim 5, wherein the antireflective
Film is prepared using PECVD methods;The metal electrode is prepared using silk-screen printing, evaporation, sputtering or electro-plating method.
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