CN109884064B

CN109884064B - Data acquisition device of liquid sensor

Info

Publication number: CN109884064B
Application number: CN201910331834.3A
Authority: CN
Inventors: 盛振文; 王桂云; 盛明; 其他发明人请求不公开姓名
Original assignee: Shandong Xiehe University
Current assignee: Shandong Xiehe University
Priority date: 2019-04-24
Filing date: 2019-04-24
Publication date: 2021-09-07
Anticipated expiration: 2039-04-24
Also published as: CN109884064A

Abstract

The invention relates to a data acquisition device of a liquid sensor, which comprises a substrate, wherein a main body is arranged on the substrate, a photosensitive cavity is arranged on the main body, a medium block is filled in the main body, and the medium block is positioned at two sides of the photosensitive cavity; this liquid sensor's data acquisition device has higher sensitivity, and the light that detects is gathered easily, and is more quiet to the reaction of signal during the detection, and the bubble that produces after the liquid that awaits measuring that discharges gets into is favorable to improving liquid sensor's sampling precision, sensitivity easily.

Description

Data acquisition device of liquid sensor

Technical Field

The invention belongs to the technical field of sensors, and particularly relates to a data acquisition device of a liquid sensor.

Background

The sensor (english name: transducer/sensor) is a detection device, which can sense the measured information and convert the sensed information into electric signals or other information in required form according to a certain rule to output, so as to meet the requirements of information transmission, processing, storage, display, recording, control and the like.

The sensor features include: miniaturization, digitalization, intellectualization, multifunction, systematization and networking. The method is the first link for realizing automatic detection and automatic control. The existence and development of the sensor enable the object to have the senses of touch, taste, smell and the like, and the object slowly becomes alive. Generally, the sensor is classified into ten categories, i.e., a thermosensitive element, a photosensitive element, a gas-sensitive element, a force-sensitive element, a magnetic-sensitive element, a humidity-sensitive element, a sound-sensitive element, a radiation-sensitive element, a color-sensitive element, and a taste-sensitive element, according to their basic sensing functions.

The liquid sensor is used for detecting the liquid characteristic sensor, and the most important part of the liquid sensor is a sampling part, however, due to the liquid characteristic, the sampling part needs to consider not only the collection of the liquid to be detected, but also the sensitivity and accuracy of data acquisition, so that the difficulty and the accuracy of the liquid sensor for collecting the liquid to be detected are directly influenced by the liquid sampling part.

Disclosure of Invention

In view of the above problems, it is an object of the present invention to provide an efficient sampling member for collecting a liquid to be detected.

Therefore, the invention provides a data acquisition device of a liquid sensor, which comprises a substrate, wherein a main body is arranged on the substrate, a photosensitive cavity is arranged on the main body, a medium block is filled in the main body, and the medium block is positioned at two sides of the photosensitive cavity.

A dielectric layer is arranged between the substrate and the main body.

The dielectric layer is made of silicon dioxide.

A second dielectric block is arranged below the photosensitive cavity, and a plurality of through holes are formed in the second dielectric block.

And a magnetic particle layer is arranged at the bottom of the photosensitive cavity.

The magnetic particle layer is composed of magnetic metal nanoparticles.

The width of the photosensitive cavity is 80 nm-100 nm.

The depth of the photosensitive cavity is 150 nm-250 nm.

The dielectric block is made of silicon dioxide.

The medium block is made of polymethyl methacrylate.

The invention has the beneficial effects that: the data acquisition device of the liquid sensor provided by the invention has higher sensitivity, is easy to collect detected light, is more quiet in signal reaction during detection, is easy to discharge bubbles generated after liquid to be detected enters, and is beneficial to improving the sampling precision and sensitivity of the liquid sensor.

The present invention will be described in further detail below with reference to the accompanying drawings.

Drawings

Fig. 1 is a schematic diagram of a data acquisition device of a liquid sensor.

Fig. 2 is a schematic diagram of a data acquisition device of the liquid sensor.

Fig. 3 is a schematic diagram of a data acquisition device of the liquid sensor.

Fig. 4 is a fourth schematic diagram of a data acquisition device of the liquid sensor.

Fig. 5 is a first schematic diagram of the reflectivity of the data acquisition device of the liquid sensor.

Fig. 6 is a second schematic diagram of the reflectivity of the data acquisition device of the liquid sensor.

In the figure: 1. a substrate; 2. a main body; 3. a dielectric block; 4. a dielectric layer; 5. a photosensitive cavity; 6. a magnetic particle layer; 7. a second dielectric block.

Detailed Description

To further explain the technical means and effects of the present invention adopted to achieve the intended purpose, the following detailed description of the embodiments, structural features and effects of the present invention will be made with reference to the accompanying drawings and examples.

Example 1

The embodiment provides a data acquisition device of a liquid sensor as shown in fig. 1, which includes a substrate 1, wherein a main body 2 is arranged on the substrate 1, a photosensitive cavity 5 is arranged on the main body 2, a dielectric block 3 is filled in the main body 2, and the dielectric block 3 is located at two sides of the photosensitive cavity 5, so that light for detection can enter from the photosensitive cavity 5 on the main body 2, and when a liquid to be detected enters the photosensitive cavity 5, the detected light can react with the liquid to be detected in the photosensitive cavity 5, so that the reflectivity of the detected light changes; specifically, when carrying out liquid detection, the light that detects and the liquid that awaits measuring can take effect in sensitization chamber 5, arouses the reflectivity of the light that detects to change, when being provided with medium block 3 in the both sides of sensitization chamber 5, can strengthen the effect that the light that detects and the liquid that awaits measuring take place to make the liquid that awaits measuring detect more easily, the sensitivity of detection is higher.

Further, the width of the photosensitive cavity 5 is 80nm to 100nm, preferably 90nm, 95nm and the like; the depth of the photosensitive cavity 5 is 150nm to 250nm, preferably 220nm, 230nm and the like.

Further, the distance between the dielectric block 3 and both sides of the photosensitive cavity 5 may be set to 20nm to 30nm, and preferably 24nm, 25nm, or the like may be selected.

Further, the substrate 1 and the main body 2 are made of metal, and may be made of stainless steel, gold, silver, or the like.

Furthermore, the dielectric block 3 and the dielectric layer 4 are both made of silicon dioxide, the silicon dioxide is stable in structure, insoluble in water, good in optical property and light transmission, and the silicon dioxide is arranged on the two sides and the bottom of the photosensitive cavity 5, so that a good magnetic field gathering effect is achieved, and the liquid detection sensitivity is improved.

Further, as shown in fig. 2, a dielectric layer 4 is disposed between the substrate 1 and the main body 2, the dielectric layer 4 can further enhance the effect of the detected light and the liquid to be detected, and improve the sensitivity of the liquid detection, the distance from the dielectric layer 4 to the photosensitive cavity 5 is 20nm to 40nm, and preferably 30nm can be selected.

Further, as shown in fig. 3, a second dielectric block 7 is arranged below the photosensitive cavity 5, a plurality of through holes are formed in the second dielectric block 7, the second dielectric block 7 is in contact with the bottom of the photosensitive cavity 5, the magnetic field gathering of the detection light can be enhanced, the sensitivity of liquid detection is improved, bubbles in the liquid to be detected can be filtered through the through holes, and the influence of the bubbles on the liquid detection is avoided.

Further, as shown in fig. 4, the magnetic particle layer 6 is disposed at the bottom of the photosensitive cavity 5, so that the effect of the detected light and the liquid to be detected can be further enhanced, and the sensitivity of liquid detection can be improved.

The magnetic particle layer 6 is composed of magnetic metal nanoparticles, for example, gold, silver, iron nanoparticles, and the like.

Further, the dielectric block 3 is made of polymethyl methacrylate (PMMA), and the PMMA has a good thermal expansion characteristic, so that the dielectric block 3 absorbs heat and expands under the action of detected light, and thus the width of the photosensitive cavity 5 can be changed, so that the photosensitive cavity 5 can not only take account of the difficulty of liquid inflow, but also improve the magnetic field of aggregation, and thus the sensitivity of liquid detection is improved.

As shown in fig. 5, in order to obtain the light absorption characteristics after the dielectric blocks 3 are disposed on the left and right sides of the photosensitive cavity 5, the photosensitive cavity 5 is disposed to have a width of 93nm and a height of 220 nm; the distance between the dielectric block 3 and the photosensitive cavity 5 is 24 nm; it has been found that the reflectance can be close to 1 at incident light wavelengths of 1060nm to 1400nm and can be close to 0.25 at an incident light wavelength of 1790 nm.

As shown in fig. 6, for the light absorption characteristics after the dielectric blocks 3 are arranged on the left and right sides of the photosensitive cavity 5 and the dielectric layer 4 is arranged below the photosensitive cavity 5, the distance between the dielectric blocks 3 and the photosensitive cavity 5 is 20 nm-40 nm, preferably 30nm, and the distance between the dielectric layer 4 and the bottom surface of the rectangular photosensitive cavity 5 is 30 nm; it has been found that the reflectance may be close to 1 at an incident light wavelength of 1000nm to 1160nm and may be close to 0.3 at an incident light wavelength of 1490 nm.

To sum up, this liquid sensor's data acquisition device has higher sensitivity, and the light that detects is gathered easily, and the bubble that produces after the liquid that can discharge to be measured gets into is favorable to improving liquid sensor's sampling precision, sensitivity, and dielectric block 3, dielectric layer 4, magnetic particle layer 6, the second dielectric block 7 that set up moreover make sensitive optical cavity 5 can fine gathering magnetic field, further improve liquid detection's sensitivity.

The foregoing is a more detailed description of the invention in connection with specific preferred embodiments and it is not intended that the invention be limited to these specific details. For those skilled in the art to which the invention pertains, several simple deductions or substitutions can be made without departing from the spirit of the invention, and all shall be considered as belonging to the protection scope of the invention.

Claims

1. The utility model provides a data acquisition device of liquid sensor which characterized in that: the light-sensitive element comprises a substrate (1), wherein a main body (2) is arranged on the substrate (1), a light-sensitive cavity (5) is arranged on the main body (2), a dielectric block (3) is filled in the main body (2), and the dielectric block (3) is positioned on two sides of the light-sensitive cavity (5);

the substrate (1) and the body (2) are made of metal;

a magnetic particle layer (6) is arranged at the bottom of the photosensitive cavity (5);

the medium block (3) is made of polymethyl methacrylate; the medium block (3) absorbs heat to expand, and the width of the photosensitive cavity (5) changes.

2. The data acquisition device of a liquid sensor as claimed in claim 1, wherein: a dielectric layer (4) is arranged between the substrate (1) and the main body (2).

3. The data acquisition device of a liquid sensor as claimed in claim 2, wherein: the dielectric layer (4) is made of silicon dioxide.

4. The data acquisition device of a liquid sensor as claimed in claim 1, wherein: a second dielectric block (7) is arranged below the photosensitive cavity (5), and a plurality of through holes are formed in the second dielectric block (7).

5. The data acquisition device of a liquid sensor as claimed in claim 1, wherein: the magnetic particle layer (6) is composed of magnetic metal nanoparticles.

6. The data acquisition device of a liquid sensor as claimed in claim 1, wherein: the depth of the photosensitive cavity (5) is 150 nm-250 nm.

7. The data acquisition device of a liquid sensor as claimed in claim 1, wherein: the dielectric block (3) is made of silicon dioxide.