CN108253897A - A kind of point-diffraction interference three-dimensional coordinate measurement method of large scale and high accuracy - Google Patents
A kind of point-diffraction interference three-dimensional coordinate measurement method of large scale and high accuracy Download PDFInfo
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- CN108253897A CN108253897A CN201711478909.8A CN201711478909A CN108253897A CN 108253897 A CN108253897 A CN 108253897A CN 201711478909 A CN201711478909 A CN 201711478909A CN 108253897 A CN108253897 A CN 108253897A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
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Abstract
The present invention provides a kind of point-diffraction interference three-dimensional coordinate measurement method of large scale and high accuracy, is related to field of measuring technique.Measuring probe sends out spherical wave and forms interference field, photodetector acquires interference fringe picture in real time, when photodetector can not obtain clearly interference fringe picture, the three-dimensional guide rail movement of computer control, until photodetector can collect clearly interference fringe picture again, computer obtains phase information to interference fringe picture with multistep Phase-shifting algorithm, and the three-dimensional coordinate of measuring probe at this time on measured object is obtained using iterative algorithm.The coordinate position that the present invention is solved on three directions that point-diffraction interference measuring system is realized in the prior art there is technical issues that in measurement range.The present invention has the beneficial effect that：It breaches because the limitation of the factors such as optical fiber point-diffraction wavefront angular aperture, photoelectric detector performance and measuring probe structure and the earth improve point-diffraction interference absolute-coordinate three-dimensional measurement range.
Description
Technical field
The present invention relates to field of measuring technique, more particularly, to a kind of point-diffraction interference three-dimensional coordinate of large scale and high accuracy
Measuring method.
Background technology
With the production expansion and fast development of modern industry, three-dimensional coordinate measurement is in accurate measurement, design and manufacture
Increasingly important role is played in field.As a kind of general and accurate measuring method, three coordinate measuring machine into
For the important means of modern industry workmanship guarantee, it is widely used in the fields such as positioning, dimensional measurement and reverse-engineering.So
And due to expensive high-precision exclusive guideway and huge marble measuring table so that it cannot meet the reality of processing site
When quick measurement request.With the continuous development of point-diffraction interference technology, there has been proposed utilize point-diffraction interferometer realization pair
The high-acruracy survey of three-D displacement, this method avoid conventional dry interferometer Plays element mismachining tolerance for three-dimensional measurement precision
Influence.It is developed so far from point-diffraction interference technology, domestic and international published point diffraction interferometer system mainly has pin hole point diffraction
Interference system and optical fiber point-diffraction interferometer system.Chinese patent application publication No. CN104330039A, data of publication of application 2015
4 days 2 months year, the invention of entitled " a kind of large-numerical aperture optical fiber point-diffraction interference device and method for three-dimensional coordinates measurement "
Patent application document using the taper exit end of two sub-wavelength apertures single mode optical fibers as measuring probe, utilizes the two spies
Head can obtain the point diffractive spherical wavefront of high brightness and large-numerical aperture simultaneously, mainly expand cross measure range.In
State patent application publication CN105066880A, it is data of publication of application on November 18th, 2015, entitled " to be based on particle group demodulation point
The application for a patent for invention file of the three-dimensional coordinate method for fast measuring of light source interference ", provides a kind of strong antijamming capability and survey
The high three-dimensional coordinate method for fast measuring based on particle group demodulation point sotuce of accuracy of measurement.Chinese patent application publication No.
CN106643507A, data of publication of application on May 10th, 2017, a kind of entitled " three coordinates based on binary channels point-diffraction interference
The application for a patent for invention file of measuring device and method " using two sub-micron pore size optical fiber pair, solves existing only one light
Fine pair of point-diffraction interferometer existsxWithyIt is different there are sensitivity in both direction, caused by deposited on stripe direction is parallel to
Precision is low the problem of.But because optical fiber point-diffraction wavefront angular aperture, the performance and laser power of CDD photodetectors
Etc. factors limitation, the coordinate position on three directions that more than point-diffraction interference measuring system can be realized is in measurement range
There are significant limitations.Particularly to big part measured object, it is difficult to accomplish high-acruracy survey.
Invention content
It is being measured to solve the coordinate position on three directions that point-diffraction interference measuring system is realized in the prior art
There is technical issues that significant limitation is difficult to big part measured object in range, the present invention provides a kind of
The point-diffraction interference three-dimensional coordinate measurement method of large scale and high accuracy greatly extends the range of three-dimensional measurement.
The technical scheme is that：A kind of point-diffraction interference three-dimensional coordinate measurement method of large scale and high accuracy：It is wrapped
It includes：Closed bin, CDD photodetectors, three-dimensional guide rail and computer, the laser that polarization laser is sent out in closed bin is by light splitting
Prism is divided into two-way, the speculum reflection that reflected light is connect by quarter-wave plate with piezoelectric phase-shifter all the way, then
Become transmitted light by quarter-wave plate, be coupled device and be coupled to sub-wavelength apertures optical fiber SF I, another way transmitted light is coupled
Device is coupled to sub-wavelength apertures optical fiber SF II, and two sub-wavelength apertures optical fiber are stretched out outside closed bin, parallel to be integrated in measuring probe,
CDD photodetectors are connect with the vertical rod of three-dimensional guide rail, and measuring probe places measured object surface, and polarization laser sends out sharp
Light, two sub-wavelength apertures optical fiber respectively send out high-precise ball surface wave in measuring probe terminal part and form interference field, computer
Control piezoelectric phase-shifter and speculum micro-displacement, CDD photodetectors acquire interference fringe picture in real time, when CDD photoelectricity
When detector can not obtain clearly interference fringe picture, the three-dimensional guide rail movement of computer control, until CDD photodetector energy
Enough to collect clearly interference fringe picture again, computer is to the interference fringe picture that CDD photodetectors acquire with more
Step Phase-shifting algorithm obtains phase information, obtains the three-dimensional coordinate of measuring probe at this time on measured object using iterative algorithm, passes through
All three-dimensional coordinates in measured object surface obtain the three-dimensional geometry amount information of measured object.
Preferably, in the test of same measured object, the CDD photodetectors are connect with the vertical rod of three-dimensional guide rail
It is fixed.
Preferably, when measuring probe placement measured object surface starts to measure, CDD photoelectric probe positions at this time are set
It is set to the origin of three-dimensional coordinate.
Preferably, when CCD photoelectric detector can not acquire clearly interference fringe, the three-dimensional guide rail of computer control moves
Dynamic, CDD photodetectors collect clearly interference image again, and three-dimensional guide rail rate of travel is plus computer point after movement
Analyse obtained measuring probe position, the as spatial positional information of measuring probe at this time.
Compared with prior art, the beneficial effects of the invention are as follows：It breaches because of optical fiber point-diffraction wavefront angular aperture, CDD
The limitation of the factors such as photoelectric detector performance and measuring probe structure and the earth improve the survey of point-diffraction interference absolute-coordinate three-dimensional
Measure range.The equipment requirement for forming test is not high, high certainty of measurement, and use scope is wide.
Description of the drawings
Attached drawing 1 is test schematic diagram of the present invention；
System light path figure of the attached drawing 2 for the present invention.
In figure：1- polarization lasers；2- halfs wave plate I；3- Amici prisms；4- quarter-wave plates；5- speculums；
6- piezoelectric phase-shifters；7- couplers I；8- sub-wavelength apertures optical fiber SF I；9- halfs wave plate II；10- couplers II；
11- sub-wavelength apertures optical fiber SF II；12- measuring probes；13- closed bins；14- CDD photodetectors；15- three-dimensional guide rails；16-
Measured object.
Specific embodiment
Below with reference to the embodiments and with reference to the accompanying drawing the technical solutions of the present invention will be further described.
Embodiment 1：
As illustrated in fig. 1 and 2, a kind of point-diffraction interference three-dimensional coordinate measurement method of large scale and high accuracy, it includes：Closed bin
13rd, CDD photodetectors 14, three-dimensional guide rail 15 and computer.The laser that polarization laser 1 is sent out in closed bin 13 passes through two points
One of wave plate I 2 inject Amici prism 3 be divided into two-way：All the way reflected light by quarter-wave plate 4 by with piezoelectric phase-shifter
The speculum 5 of 6 connections reflects, and becomes transmitted light using quarter-wave plate 4, is coupled device I 7 and is coupled to sub-wavelength apertures light
Fine SF I 8；Another way transmitted light is coupled device II 10 by half wave plate II 9 and is coupled to sub-wavelength apertures optical fiber SF II 11.
Two sub-wavelength apertures optical fiber are stretched out outside closed bin 13, parallel to be integrated in measuring probe 12.CDD photodetectors 14 are led with three-dimensional
The vertical rod connection of rail 15.In the test of same measured object 16, CDD photodetectors 14 and three-dimensional guide rail（15）It is vertical
Bar connection is fixed.After the vertical rod of CDD photodetectors 14 and three-dimensional guide rail is fixed, it is impossible to it is mobile, it can not rotate.It measures and visits
First 12 place 16 surface of measured object.In Fig. 1, in order to express clearly, measuring probe 12 is illustrated only, is connect with measuring probe 12
13 figure of two sub-wavelength apertures optical fiber and closed bin in do not show.Dotted line represents to measure the one of the centre of measured object 16 in figure
Point.
When the location A of such as Fig. 1 of measuring probe 12, polarization laser 1 sends out wavelength X as 632.8nm laser.Two sub-wavelengths
Aperture optical fiber respectively sends out high-precise ball surface wave in 12 terminal part of measuring probe and forms interference field.Computer controls piezoelectric ceramics
Phase shifter 6 carries out speculum 5 repeatedly movement to change the optical path difference between 2 diffractive spherical wavefront, CDD photodetectors
14 acquire interference fringe picture in real time.Each measurement point, it is four width that CDD photodetectors 14, which acquire clearly interference fringe picture,
More than and.The present embodiment is illustrated by acquiring for clearly interference fringe picture is five width continuous interference figures.Measuring probe 12 is in A
Position starts to measure, and 14 position of CDD photodetectors at this time is set as to the origin of three-dimensional coordinate.Computer is to CDD photoelectricity
The interference fringe picture that detector 14 acquires obtains phase information with multistep Phase-shifting algorithm.It is tested using iterative algorithm
The three-dimensional coordinate of measuring probe 12 at this time on object 16.Measuring probe 12 is moved along 16 profile of measured object, to the B location of such as Fig. 1.This
When, CDD photodetectors 14 can not obtain clearly interference fringe picture.The three-dimensional guide rail 15 of computer control moves, until CDD
Photodetector 14 can collect clearly interference fringe picture again, as shown in dotted line in Fig. 1.Computer controls piezoelectricity
Ceramic phase shifter 6 carries out speculum 5 repeatedly movement to change the optical path difference between 2 diffractive spherical wavefront, and CDD photoelectricity is visited
It surveys device 14 and acquires five width clearly interference fringe picture in real time.The interference fringe picture that computer acquires CDD photodetectors 14
Piece obtains phase information with multistep Phase-shifting algorithm.Three-dimensional guide rail rate of travel is analyzed plus computer after movement
12 position of measuring probe, the as spatial positional information of measuring probe 12 at this time.
It illustrates：When measuring probe 12 is in location A, CCD photoelectric detector 14 is fixed on three-dimensional guide rail 15, and is set
Clearing is put, three-dimensional 15 respective coordinates of guide rail are at this time（0,0,0）m.Computer goes out measuring probe according to picture reconstruction is collected
12 three dimensional space coordinate centered on CCD photoelectric detector 14 is（20,10,300）mm.Measuring probe 12 is moved to B location
Afterwards, CCD photoelectric detector 14 can not collect clear image.The three-dimensional guide rail 15 of computer control moves, until CCD photodetections
Device 14 can collect clearly interference fringe.Corresponding three-dimensional guide rail coordinate is at this time（0,1.200,0）m.Simultaneous computer weight
Structure obtains the three dimensional space coordinate of measuring probe at this time（10,15,200）mm.Synthesis obtains the 3 d space coordinate of B location at this time
For（10,1215,200）mm.Other positions can be similarly moved to, after 16 profile of measured object all measures, by each measurement
The three-dimensional coordinate of point obtains the three-dimensional geometry amount information of measured object 16.
Claims (4)
1. a kind of point-diffraction interference three-dimensional coordinate measurement method of large scale and high accuracy：It includes：Closed bin（13）, CDD photoelectricity
Detector（14）, three-dimensional guide rail（15）And computer, closed bin（13）Interior polarization laser（1）The laser sent out is by light splitting rib
Mirror（3）It is divided into two-way, reflected light passes through quarter-wave plate all the way（4）Quilt and piezoelectric phase-shifter（6）The speculum of connection
（5）Reflection, using quarter-wave plate（4）As transmitted light, it is coupled device（7）It is coupled to sub-wavelength apertures optical fiber SF I
（8）, another way transmitted light is coupled device（10）It is coupled to sub-wavelength apertures optical fiber SF II（11）, two sub-wavelength apertures optical fiber stretch
Go out closed bin（13）Outside, it is parallel to be integrated in measuring probe（12）, it is characterised in that：The CDD photodetectors（14）With three-dimensional
Guide rail（15）Vertical rod connection, the measuring probe（12）Place measured object（16）Surface, polarization laser（1）It sends out sharp
Light, two sub-wavelength apertures optical fiber are in measuring probe（12）Terminal part respectively sends out high-precise ball surface wave and forms interference field, meter
Calculation machine controls piezoelectric phase-shifter（6）And speculum（5）Micro-displacement, CDD photodetectors（14）Acquisition interference fringe in real time
Picture, when CDD photodetectors（14）When can not obtain clearly interference fringe picture, the three-dimensional guide rail of computer control（15）It moves
It is dynamic, until CDD photodetectors（14）Clearly interference fringe picture can be collected again, and computer is to CDD photodetections
Device（14）The interference fringe picture of acquisition obtains phase information with multistep Phase-shifting algorithm, and measured object is obtained using iterative algorithm
（16）Upper measuring probe（12）Three-dimensional coordinate at this time, passes through measured object（16）All three-dimensional coordinates in surface, obtain measured object
（16）Three-dimensional geometry amount information.
2. a kind of point-diffraction interference three-dimensional coordinate measurement method of large scale and high accuracy according to claim 1, feature
It is：In same measured object（16）In test, the CDD photodetectors（14）With three-dimensional guide rail（15）Vertical rod connection
It is fixed.
3. a kind of point-diffraction interference three-dimensional coordinate measurement method of large scale and high accuracy according to claim 1, feature
It is：The measuring probe（12）Place measured object（16）When surface starts to measure, by CDD photodetectors at this time（14）Position
Install the origin for being set to three-dimensional coordinate.
4. a kind of point-diffraction interference three-dimensional coordinate measurement method of large scale and high accuracy according to claim 1, feature
It is：Work as CCD photoelectric detector（14）When can not acquire clearly interference fringe, the three-dimensional guide rail of computer control（15）It is mobile,
CDD photodetectors（14）Clearly interference image is collected again, and three-dimensional guide rail rate of travel is plus computer after movement
Analyze obtained measuring probe（12）Position, as measuring probe（12）Spatial positional information at this time.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201711478909.8A CN108253897B (en) | 2017-12-29 | 2017-12-29 | Large-range high-precision point diffraction interference three-dimensional coordinate measuring method |
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| CN201711478909.8A CN108253897B (en) | 2017-12-29 | 2017-12-29 | Large-range high-precision point diffraction interference three-dimensional coordinate measuring method |
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| CN108253897A true CN108253897A (en) | 2018-07-06 |
| CN108253897B CN108253897B (en) | 2020-03-03 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108981623A (en) * | 2018-07-23 | 2018-12-11 | 浙江大学 | A kind of remote micro-displacement detection method based on microwave signal |
| CN114187362A (en) * | 2022-02-15 | 2022-03-15 | 苏州英示测量科技有限公司 | Point diffraction interference three-dimensional positioning method, electronic equipment and point diffraction interference device |
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| CN101839700A (en) * | 2010-03-29 | 2010-09-22 | 重庆建设工业(集团)有限责任公司 | Non-contact image measuring system |
| JP2010223886A (en) * | 2009-03-25 | 2010-10-07 | Masato Aketagawa | Device for measuring error in five degrees of freedom |
| CN103217104A (en) * | 2013-03-15 | 2013-07-24 | 中国计量学院 | Non-guide measurement device and method of point diffraction three-dimensional absolute displacement |
| CN104330039A (en) * | 2014-09-28 | 2015-02-04 | 中国计量学院 | High-numerical-aperture optical fiber point diffraction interference device used for three-coordinate measurement and method thereof |
| CN106643507A (en) * | 2017-02-13 | 2017-05-10 | 中国计量大学 | Three-coordinates measuring device and method based on two-channel point-diffraction interference |
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2017
- 2017-12-29 CN CN201711478909.8A patent/CN108253897B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010223886A (en) * | 2009-03-25 | 2010-10-07 | Masato Aketagawa | Device for measuring error in five degrees of freedom |
| CN201417119Y (en) * | 2009-04-09 | 2010-03-03 | 深圳市菲恩测控科技有限公司 | Full automatic indicator verification instrument |
| CN101839700A (en) * | 2010-03-29 | 2010-09-22 | 重庆建设工业(集团)有限责任公司 | Non-contact image measuring system |
| CN103217104A (en) * | 2013-03-15 | 2013-07-24 | 中国计量学院 | Non-guide measurement device and method of point diffraction three-dimensional absolute displacement |
| CN104330039A (en) * | 2014-09-28 | 2015-02-04 | 中国计量学院 | High-numerical-aperture optical fiber point diffraction interference device used for three-coordinate measurement and method thereof |
| CN106643507A (en) * | 2017-02-13 | 2017-05-10 | 中国计量大学 | Three-coordinates measuring device and method based on two-channel point-diffraction interference |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108981623A (en) * | 2018-07-23 | 2018-12-11 | 浙江大学 | A kind of remote micro-displacement detection method based on microwave signal |
| CN114187362A (en) * | 2022-02-15 | 2022-03-15 | 苏州英示测量科技有限公司 | Point diffraction interference three-dimensional positioning method, electronic equipment and point diffraction interference device |
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| CN108253897B (en) | 2020-03-03 |
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