CN110376596A - A kind of body surface three-dimensional coordinate measuring system and measurement method - Google Patents
A kind of body surface three-dimensional coordinate measuring system and measurement method Download PDFInfo
- Publication number
- CN110376596A CN110376596A CN201910648603.5A CN201910648603A CN110376596A CN 110376596 A CN110376596 A CN 110376596A CN 201910648603 A CN201910648603 A CN 201910648603A CN 110376596 A CN110376596 A CN 110376596A
- Authority
- CN
- China
- Prior art keywords
- light
- laser
- reference arm
- sub
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of body surface three-dimensional coordinate measuring system and measurement methods, belong to laser ranging field, it includes laser ranging system, two-dimension displacement platform and processor, range unit includes light source, optoisolator, F-P filter, spectrometer, first, two couplers, first, two reference arms and measurement arm, first, there is fixed optical path difference between two reference arms, optoisolator setting is on light source outgoing light direction, spectrometer connects processor, processor is used for measurement arm, the interference signal between laser that first reference arm and the second reference arm return is analyzed and processed, to obtain object under test in the depth of Z-direction, it is also used to the object under test in conjunction with two-dimension displacement flat reaction simultaneously in X/Y plane Coordinate generation object under test three-dimensional coordinate.The present invention also provides body surface three-dimensional coordinate measuring methods.The method of the present invention and apparatus structure are simple, cheap, also solve dead-time problem, moreover it is possible to carry out high-precision and substantially planar survey.
Description
Technical field
The invention belongs to laser ranging technique fields, more particularly, to a kind of body surface three-dimensional coordinate measuring system
And measurement method.
Background technique
Currently, optical 3-dimensional coordinate measuring technology has had significant progress, can be classified as active vision method and by
Dynamic visual method two major classes, each can segment out many specific groups again.
Three important indicators can be used to evaluate three-dimensional coordinate measurement scheme: measurement accuracy, measurement range and reconstruction speed
Degree.Wherein, laser TOF measurement technology measuring speed is fast, and range is big but precision can only achieve several centimeters of ranks[1,2]；Structure light method
Range is larger, and precision is up to submillimeter level, but it is affected by environment light[3,4]；Binocular vision method visual field is larger, measurement
Up to millimeter to submillimeter level, but because its data volume is big, measuring speed is restricted precision[5,6].In short, when three-dimensional coordinate measurement
How to keep degree of precision, biggish measurement range and faster measuring speed simultaneously is still a problem, and the prior art is also
It is difficult to meet the demand that high-accuracy industrial production carries out the pattern of the objects such as workpiece, product online precise measurement.
Current conventional light source cannot concurrently reach high-acruracy survey and large range measuring requirement, and the phase occurs at the end of the 20th century
Novel femto-second laser becomes international one big research hotspot so that laser ranging technique obtains revolutionary favourable turn.It is different from
The laser ranging of round trip flight second, the laser ranging of solo flight second is only needed using a femto-second laser, and a femto-second laser cost reaches
Hundreds of thousands of RMB, therefore solo flight second laser ranging system has lower cost.
The laser ranging of solo flight second is mainly the principle of wide spectrum interfeerometry ranging to be utilized, and SLD is as a kind of more inexpensive
Coherent source, the same characteristic with wide spectrum, so SLD can be used for wide spectrum interfeerometry ranging system, to realize
Cost more lower than femtosecond laser range-measurement system.
In the principle of wide spectrum interfeerometry ranging, there are two big main problems to limit its practical application: first is that in signal
Conversion spectrum on, have Interference Peaks P existing for a fixationb, as signal peak PpWith Interference Peaks PbWhen overlapping, measurement will become not
Accurately.I.e. so that this section of distance range of signal peak and interference overlap of peaks is " can not survey ", this immeasurablel region
Referred to as dead zone[7]；Another problem is the limitation due to Fourier transformation, and there are a non-fuzzy distances for measurement distance[8].When
Tested object point is distally moved since origin, signal peak PpTo move right on axis, until object of which movement to non-fuzzy away from
From place, then start to be moved to the left.Similarly, when object from one times of non-fuzzy apart from extroversion origin it is mobile when, signal peak PpIt will
It first moves right, then is moved to the left on axis.Therefore object motion range can exceed that one times of non-fuzzy apart from when, pass through letter
The moving direction at number peak can not determine that object is close to or far from origin.It is fuzzy apart from bring direction that here it is non-fuzzies
Property.
In order to realize object large scale and high accuracy three-dimensional coordinate measurement, needs to extend the range of measurement, improves the essence of measurement
Degree, and solve above-mentioned dead zone and direction fuzzy problem.For this reason, it may be necessary to develop a kind of novel surface three dimension coordinate measuring system
And method, to overcome the defect of wide spectrum interferometry itself in the prior art, while being able to achieve high-acruracy survey and wide range
Measurement.
[1]Amann M C,Bosch T,Lescure M,et al.Laser ranging:a critical review
of usual techniques for distance measurement[J].Optical Engineering,2001,40
(1):10-19.
[2] Liu Ziwei, Xu Tingfa, Wang Hongqing wait Depth Imaging theory and realize that [J] is infrared and laser engineering, and 2016,
45(07):242-246.
[3]Lilienblum E,Al-Hamadi A,Ieee.A Structured Light Approach for 3d
Surface Reconstruction with a Stereo Line-Scan System[M].New York:Ieee,2014.
[4]Song L M,Li X Y,Yang Y G,et al.Structured-Light Based 3D
Reconstruction System for Cultural Relic Packaging[J].Sensors,2018,18(9):13.
[5]Hrdina J,Navrat A.Binocular Computer Vision Based on Conformal
Geometric Algebra[J].Advances in Applied Clifford Algebras,2017,27(3):1945-
1959.
[6]Wang D,Liu H,Cheng X.A Miniature Binocular Endoscope with Local
Feature Matching and Stereo Matching for 3D Measurement and 3D Reconstruction
[J].Sensors,2018,18(7):21.
[7]Cui M,Zeitouny M G,Bhattacharya N,et al.Long distance measurement
with femtosecond pulses using a dispersive interferometer[J].Optics Express,
2011,19(7):6557-6570.
[8]Joo K N,Kim S W.Absolute distance measurement by dispersive
interferometry using a femtosecond pulse laser[J].Optics Express,2006,14(13):
5954-60.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, the present invention provides a kind of body surface three-dimensional measurement of coordinates
System and measurement method solve above-mentioned dead it is intended that providing a kind of improved wide spectrum interfeerometry ranging device and method
Area's problem breaks through non-fuzzy and limits apart from bring, while can improve body surface three-dimensional co-ordinate measurement accuracy, while can also be real
Existing large range measuring, and apparatus structure is simple, relative inexpensiveness.
To achieve the above object, according to one aspect of the present invention, a kind of body surface three-dimensional measurement of coordinates system is provided
System comprising a set of laser ranging system, a set of two-dimension displacement platform and processor, wherein laser ranging system includes light
Source, optoisolator, F-P filter, spectrometer, the first coupler, the second coupler, the first reference arm, the second reference arm and
Arm is measured, the light source is femto-second laser or SLD laser, and the first reference arm includes the first retroeflector, the second ginseng
Examining arm includes the second retroeflector, and the first retroeflector and the second retroeflector have fixed range difference, so that the
There is fixed optical path difference between one reference arm and the second reference arm, optoisolator setting is on light source outgoing light direction, and first
Coupler one end connects optoisolator, and the other end connects second coupler one end and measurement arm one end simultaneously, measures the arm other end
For being incident to emergent light positioned at the sample to be tested surface of two-dimension displacement platform, meanwhile, it is also used to receive from sample to be tested
Surface is back to the laser of measurement arm, and when work, the laser back to measurement arm is delivered to through the first coupler and F-P filter
Spectrometer, the second coupler other end connect the first reference arm and the second reference arm simultaneously, another from the first coupler when work
It brings out the laser penetrated and is transmitted to the first reference arm and the second reference arm after the second coupler, referred to through the first reference arm and second
The laser that arm is reflected back is delivered to spectrometer using the first coupler and F-P filter after the second coupler, and spectrometer connects
Connect processor, the interference signal between laser that processor is used to return to measurement arm, the first reference arm and the second reference arm into
Row analysis processing to obtain object under test in the depth of Z-direction, while being also used in conjunction with the to be measured of two-dimension displacement flat reaction
Object is in X/Y plane Coordinate generation object under test three-dimensional coordinate.
In present system, three-dimensional coordinate measurement can be realized with SLD laser and femtosecond laser, it is preferred that use femtosecond
Laser.There is dead-time problem and direction fuzzy problem in femtosecond laser and SLD laser.
In the above inventive concept, using spectrometer as detector, by signal shift means, the signal converts hand
Section specifically refers to the signal processing methods such as Fourier transformation, can believe simultaneously the interference between three road light in a conversion spectrum
Number frequency analysis is carried out, and then be converted into distance, without switching devices such as shutters, and using mechanically being tied as shutter
Structure can make the speed and stability decline of measurement.
In addition, there is fixed optical path difference φ between the first reference arm and the second reference arm, the first reference arm and the second ginseng
It examines arm and forms first interference peaks and the second interference peaks with fixed range in conversion spectrum with measurement arm respectively, it can be based on this
When a certain interference peaks enter dead zone, ranging is completed using another interference peaks outside dead zone, is deposited when solving femtosecond laser ranging
Dead-time problem.Above-mentioned setting introduces the left and right relativeness of the first interference peaks and the second interference peaks simultaneously, also can solve list
Direction fuzzy problem existing for femtosecond laser ranging breaches several millimeters of non-fuzzy distance of traditional wide spectrum interference system
Limitation may be implemented to realize the three-dimensional coordinate measurement to body surface within the scope of arbitrary height change.
Further, optical path difference φ=φ1-φ2, wherein φ1For the light path of the first reference arm, φ2For the second reference arm
Light path preferably can set φ1> φ2, for φ1< φ2The case where correspondence analysis.Testee is opposite
The mirror image distance l of first reference arm meets l ∈ [(n-1) l apart from section in n-th of non-fuzzyNAR,nlNAR], wherein n is known
Positive integer, lNARFor non-fuzzy distance, l is calculated according to the following formula:
Wherein,
In formula, c is the light velocity, npIt is the refractive index of light propagation medium, τ1And τ2It is the first interference peaks and the second interference peaks respectively
Coordinate on transform domain, m, Z indicate integer.
Further, the femto-second laser has and only one, in apparatus of the present invention, by setting to the ingenious of system
Meter, a laser collocation spectrometer, which is only used only, can be achieved with to body surface three-dimensional measurement of coordinates.Compared to use two fly
The measuring system of second laser, one femto-second laser of every omission can save 300,000 to RMB up to a million.
Further, there is fixed splitting ratio, can pass through between first reference arm and second reference arm
The intensity of signal is converted to judge that interference peaks are derived from the second reference arm of the first reference arm or source.First reference arm and
Splitting ratio between second reference arm can be 75:25.
The x-axis and y-axis of further two-dimension displacement platform are made of linear motor and grating scale, for controlling measured object
Precise displacement occurs for body relative measurement wall, by processor control two-dimension displacement platform movement.
In the present invention, a set of two-dimensional positioning system can be set, the two-dimensional positioning system refers to be deposited above testee
Fixation top view camera, the top view camera of the fixation is connected with processor, and by processor using machine vision as means, really
Femtosecond laser point of irradiation is determined on the position of testee.
The second aspect according to the invention, also provides a kind of body surface three-dimensional coordinate measuring method, and transmitting femtosecond swashs
Perhaps SLD laser femtosecond laser or SLD laser are divided into two beams, respectively first after preventing reverse transfers from handling to light
Shu Guang and the second beam light, wherein light beam is incident on object to be measured after being processed into collimated light, and object being measured is in X
Displacement on direction and Y-direction is incident to the first light beam on object to be measured by the reflection road Er Yanyuan it is anticipated that by controlling
It returns, is the first reflected light, the first reflected light is divided into two-beam, wherein a branch of be detected after filtering processing receives, remains
Lower light beam is absorbed and disappears, and the second beam light is also divided into two beams, the respectively first sub- beam splitting light and the second sub- beam splitting light, the
One sub- beam splitting light and the second sub- beam splitting light reflected respectively after along backtracking, along the first sub- beam splitting light of backtracking and
Two sub- beam splitting light are synthesized light beam, referred to as the second reflected light, and the second reflected light includes the first son along backtracking simultaneously
The information of beam splitting light and the second sub- beam splitting light has fixed light along the first sub- beam splitting light of backtracking and the second sub- beam splitting light
Path difference, the second reflected light are again divided into two beams, wherein a branch of spare, be left it is a branch of be divided into two beams again again, respectively the
Two the first sub- beam splitting of reflected light and second the second sub- beam splitting of reflected light, second the first sub- beam splitting of reflected light are absorbed and disappear, the
Two the second sub- beam splitting of reflected light are detected after filtering processing and receive, and second the second sub- beam splitting of reflected light includes along original simultaneously
The the first sub- beam splitting light and the second sub- beam splitting light that road returns, analysis processing the first reflected light, the first sub- beam splitting along backtracking
Interference information between light and the second sub- beam splitting light, so that the height of object under test in the Z-axis direction is obtained, in conjunction with measured object
The displacement of body in the x-direction and the z-direction synthesizes object under test surface three dimension coordinate.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, can obtain down and show
Beneficial effect:
The laser ranging of solo flight second or list SLD laser ranging system that the present invention uses, by using two reference arm knots
Light combination spectrometer is analyzed, and can effectively be solved the dead-time problem in the laser ranging of solo flight second, measurement range be expanded, without adopting
With the shutter manually adjusted, while direction ambiguity present in the laser ranging of solo flight second is also effectively breached, breaches non-mould
Paste is measured apart from bring and is limited, and is realized accurate ranging, combination processing device and two-dimension displacement platform, can also be completed various big models
The three-dimensional coordinate measurement work enclosed.
Detailed description of the invention
Fig. 1 is the 3 D Coordinate Measuring System schematic diagram of the embodiment of the present invention；
Fig. 2 indicate measured point distance reference point distance be positive odd-multiple when, wide spectrum interfeerometry ranging system obtain change
Change domain signal characteristic.
Fig. 3 indicate measured point distance reference point distance be positive even-multiple when, wide spectrum interfeerometry ranging system obtain change
Change domain signal characteristic.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
The invention discloses a kind of body surface three-dimensional coordinate measuring systems, and structure is simple, and relative low price is used for
High-precision and large range measuring are carried out to object surface three-dimensional morphology or three coordinates.Generally comprise the femtosecond based on optical fiber
Laser ranging system (femto-second laser can be replaced with SLD laser in femtosecond laser range-measurement system), high-precision two-dimensional movement
Platform and processor.Wherein, femtosecond range-measurement system includes femto-second laser, optoisolator, the first coupler, the second coupling
Device, the first reference arm (including first optical fiber retroeflector), the second reference arm (including second optical fiber retroeflector), measurement
Arm (including optical fiber collimator), F-P filter, spectrometer.High-precision two-dimensional motion platform uses directly in x-axis and y-axis direction
Line motor combination grating scale, control platform complete high precision displacement.Detected object is placed on two-dimension moving platform, by
The movement for managing device control motion platform by the information of spectrometer in processor analysis femtosecond range-measurement system, and then obtains object table
The elevation information in face；In conjunction with the change in location information of two-dimension moving platform and the elevation information of body surface, body surface is obtained
Three-dimensional coordinate, so as to the surface three dimension information of synthetic body.Apparatus of the present invention may be implemented to body surface three-dimensional coordinate
High-acruracy survey and large range measuring.
Fig. 1 is the 3 D Coordinate Measuring System schematic diagram of the embodiment of the present invention, as seen from the figure, a kind of list femtosecond laser th ree-dimensional
Coordinate measuring system includes a set of femtosecond range-measurement system, a two-dimension displacement platform and a processor.Femtosecond range-measurement system
Include femtosecond light source, optoisolator, F-P filter, spectrometer, the first coupler, the second coupler, the first reference arm, second
Reference arm and measurement arm, the first reference arm include the first retroeflector, and the second reference arm includes the second retroeflector.The
There is fixed optical path difference, measurement arm includes a collimator between one reference arm and the second reference arm.When work, femtosecond laser
Device issues femtosecond laser, enters measurement arm and the second coupler by optoisolator, the first coupler, into the light of measurement arm
It is incident on testee surface by optical fiber collimator, reaches the laser on object under test surface by reflection or is scattered back into light
In fine collimator, then spectrometer entered by the first coupler and F-P filter；Light into the second coupler passes through respectively
One retroeflector and the second retroeflector are reflected back the first coupler, further enter spectrometer by the first coupler.
Before reflection laser enters spectrometer, also LS-SVM sparseness, the LS-SVM sparseness are carried out to optical mode by F-P filter
Effect be so that the light belt width that each pixel of spectrometer imaging unit receives narrows, thus by coherence length from tens of millis
Rice is promoted to several meters, and then provides possibility for the high-precision wide spectral interference ranging within the scope of several meters.Finally by processor point
Analysis by spectrometer detection to the interference signal from feeler arm and two-way reference arm totally three road femtosecond lasers.
In one embodiment of the invention, there is fixed optical path difference φ between the first reference arm and the second reference arm,
First reference arm and the second reference arm form first interference peaks and second with fixed range in conversion spectrum with measurement arm respectively
Interference peaks can be completed ranging using another interference peaks outside dead zone, solved based on this when a certain interference peaks enter dead zone
Existing dead-time problem when wide spectrum interfeerometry ranging.
Above-mentioned setting introduces the left and right relativeness of the first interference peaks and the second interference peaks simultaneously, and it is sharp also to can solve the solo flight second
Direction fuzzy problem existing for ligh-ranging breaches several millimeters of the non-fuzzy distance limit of traditional wide spectrum interfeerometry ranging system
System may be implemented to realize the three-dimensional coordinate measurement to body surface within the scope of arbitrary height change.
There is fixed splitting ratio, transformation signal can be passed through between first reference arm and second reference arm
Intensity judges that interference peaks are derived from the second reference arm of the first reference arm or source.First reference arm and second ginseng
Examining the splitting ratio between arm can be 75:25.
There is fixed optical path difference φ between first reference arm and the second reference arm, as a result, through the first reference arm and
Reflection laser through the second reference arm is formed with the reflection laser through measuring arm in conversion spectrum respectively has the first of fixed range
Interference peaks and the second interference peaks.Optical path difference φ=φ1-φ2, wherein φ1For the light path of the first reference arm, φ2For the second reference
The light path of arm preferably can set φ1> φ2, for φ1< φ2The case where correspondence analysis.
In signal transform domain as shown in Figure 2, φ=φ is given1-φ2> 0, the corresponding interference peaks P of the first reference armp?
The corresponding interference peaks P of second reference armsLeft side when, it can be determined that in the calculation formula of l, n is odd number, otherwise as shown in figure 3,
PpIn PsWhen right side, it can be determined that in the calculation formula of l, n is even number.
Testee meets l ∈ [(n-1) apart from section in n-th of non-fuzzy with respect to the mirror image distance l of the first reference arm
lNAR,nlNAR], wherein n is known positive integer, lNARFor non-fuzzy distance, l is calculated according to the following formula:
Wherein,
In formula, c is the light velocity, npIt is the refractive index of light propagation medium, τ1And τ2It is the first interference peaks and the second interference peaks respectively
Coordinate on transform domain, m, Z indicate integer.
In another embodiment of the present invention, the femto-second laser has and only one, in apparatus of the present invention, by right
The ingehious design of system, a laser collocation spectrometer, which is only used only, can be achieved with to body surface three-dimensional measurement of coordinates.Phase
Than the measuring system for using two femto-second lasers, one femto-second laser of every omission can save 300,000 to the people up to a million
Coin.
In another embodiment in the present invention, the x-axis and y-axis of two-dimension displacement platform are by linear motor and grating scale structure
At for controlling the precise displacement of testee opposed optical fibers collimator, by processor control two-dimension displacement platform movement.
In the present invention, a set of two-dimensional positioning system can be set, the two-dimensional positioning system refers to be deposited above testee
Fixation top view camera, the top view camera of the fixation is connected with processor, and by processor using machine vision as means, really
Femtosecond laser point of irradiation is determined on the position of testee.
The condition for realizing the three-dimensional coordinate measurement of complete body surface using above scheme is:
1. there are at least one known points on displacement platform or testee, it is known that at the distance l of point relative measurement origin
Non-fuzzy interval number it is known that i.e. l ∈ [(n-1) lNAR,nlNAR] in n it is known that lNARFor non-fuzzy distance (usually number milli
Rice).
2. on the scan path of laser, the deformation of testee surface consecutive points be no more than the non-fuzzy of measuring system away from
From.
Specific implementation process is as follows:
Specific implementation process is as follows:
Step 1, the instruments such as femto-second laser, spectrometer are opened, it is fully warmed-up.
Step 2, testee is placed on two-dimension moving platform, controls two-dimension moving platform, exposes to femtosecond laser
Aforementioned known point.
Step 3, to spectrometer collection to spectrum convert, obtain conversion spectrum, obtained by the signal peak in conversion spectrum
The accurate distance of known point.
Step 4, mobile two-dimension displacement platform, so that the difference in height of this measurement point and last time measurement point is non-no more than one
Fuzzy distance, to spectrometer collection to spectrum convert, obtain conversion spectrum.Signal peak is obtained to become compared with last time measurement
Moving direction and moving distance on exchanging cards with personal and family details when becoming sworn brothers judge that the distance of this measurement point exists in conjunction with the accurate distance of a upper measurement point
Formula l ∈ [(n-1) lNAR,nlNAR] in corresponding n value, then the distance of this measurement point, l is calculated by the position of signal peakNAR
For non-fuzzy distance.
Step 5, if measurement does not complete, repeatedly step 4 returns two-dimension moving platform initial if be measured
Position, process terminate.
In above-mentioned measuring process description, measurement is all associated with last measurement result every time, but this can't bring
Cumulative errors, because last measurement result is only used at this measured point of auxiliary judgment apart from section, and not
This measurement result is directly calculated using last time measurement result.
Core optical path process in a kind of body surface three-dimensional coordinate measuring method of the invention are as follows:
Perhaps SLD laser femtosecond laser or SLD laser are divided transmitting femtosecond laser after preventing reverse transfers from handling
For two beams, respectively light beam and the second beam light,
Wherein, light beam is incident on object to be measured after being processed into collimated light, and object being measured is in X-direction and Y
Displacement on direction is incident to the first light beam on object to be measured by reflection and along backtracking, is it is anticipated that by controlling
First reflected light, the first reflected light are divided into two-beam, wherein a branch of be detected after filtering processing receives, are left light beam
It is absorbed and disappears,
Second beam light is also divided into two beams, the respectively first sub- beam splitting light and the second sub- beam splitting light, the first sub- beam splitting light and
Second sub- beam splitting light reflected respectively after along backtracking, along the first sub- beam splitting light and the second sub- beam splitting light quilt of backtracking
Light beam is synthesized, referred to as the second reflected light, the second reflected light includes simultaneously along the first sub- beam splitting light of backtracking and second
The information of sub- beam splitting light,
There is fixed optical path difference along the first sub- beam splitting light of backtracking and the second sub- beam splitting light,
Second reflected light is again divided into two beams, wherein a branch of spare, be left it is a branch of be divided into two beams again again, respectively
Second the first sub- beam splitting of reflected light and second the second sub- beam splitting of reflected light, second the first sub- beam splitting of reflected light are absorbed and disappear,
Second the second sub- beam splitting of reflected light is detected after filtering processing and receives,
Second the second sub- beam splitting of reflected light includes the first sub- beam splitting light and the second sub- beam splitting light along backtracking simultaneously,
The first reflected light of analysis processing, the interference letter between the first sub- beam splitting light and the second sub- beam splitting light of backtracking
Breath, in conjunction with the displacement of object being measured in the x-direction and the z-direction, closes to obtain the height of object under test in the Z-axis direction
At object under test surface three dimension coordinate.
When specifically method and apparatus being combined together: femto-second laser issues femtosecond laser or the transmitting of SLD laser
SLD laser carries out prevention and treatment reverse transfers processing by optoisolator, enters measurement arm and the second optocoupler by the first photo-coupler
Clutch, the light into measurement arm are incident on testee by collimator, and laser is by reflection or is scattered back into collimator,
Spectrometer is entered by the first, second photo-coupler again, the light into the second photo-coupler passes through the first retroeflector respectively
It is reflected back the first photo-coupler with the second retroeflector, spectrometer is further entered by the first photo-coupler.Laser into
Before entering spectrometer, also LS-SVM sparseness is carried out to optical mode by F-P filter.It is finally analyzed by processor and is visited by spectrometer
It measures, the interference signal between feeler arm and two-way reference arm totally three road femtosecond lasers.Using spectrometer as detector,
By signal shift means, the interference signal between three road light can analyzed simultaneously in a conversion spectrum, without adopting
With switching devices such as shutters.The distance of a measured point distance reference point achieved above.Recycle processor control described two
Tie up displacement platform, make testee with respect to collimator the precise displacement on x/y plane, final synthetic body surface three dimension coordinate.Its
It is analyzed by using two reference arm combination spectrometers, can effectively solve the dead-time problem in the laser ranging of solo flight second,
Measurement range is expanded, without the shutter manually adjusted, while also effectively being breached present in the laser ranging of solo flight second
Direction ambiguity breaches non-fuzzy apart from bring and measures limitation, realizes accurate ranging
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (10)
1. a kind of body surface three-dimensional coordinate measuring system, which is characterized in that it includes a set of laser ranging system, a set of two dimension
Displacement platform and processor, wherein
Laser ranging system includes light source, optoisolator, F-P filter, spectrometer, the first coupler, the second coupler, first
Reference arm, the second reference arm and measurement arm, the light source be femto-second laser or SLD laser,
First reference arm includes the first retroeflector, and the second reference arm includes the second retroeflector, the first retroeflector
There is fixed range difference with the second retroeflector, so as to have fixed light path between the first reference arm and the second reference arm
Difference,
Optoisolator setting is on light source outgoing light direction, and first coupler one end connects optoisolator, and the other end connects simultaneously
The second coupler one end and measurement arm one end, the measurement arm other end be used to for emergent light being incident to positioned at two-dimension displacement platform to
On sample surface, meanwhile, it is also used to receive the laser from sample to be tested surface back to measurement arm, when work, back to surveying
The laser of amount arm is delivered to spectrometer through the first coupler and F-P filter,
The second coupler other end connects the first reference arm and the second reference arm simultaneously, when work, from the first coupler other end
The laser of outgoing is transmitted to the first reference arm and the second reference arm after the second coupler, through the first reference arm and the second reference arm
The laser being reflected back is delivered to spectrometer using the first coupler and F-P filter after the second coupler,
Spectrometer connects processor, and processor is used between measurement arm, the first reference arm and the laser of the second reference arm return
Interference signal be analyzed and processed, to obtain object under test in the depth of Z-direction, while being also used to flat in conjunction with two-dimension displacement
The object under test of platform reaction is in X/Y plane Coordinate generation object under test three-dimensional coordinate.
2. a kind of body surface three-dimensional coordinate measuring system as described in claim 1, which is characterized in that the femto-second laser
Or SLD laser has and only one.
3. a kind of body surface three-dimensional coordinate measuring system as claimed in claim 2, which is characterized in that swash in the reflection of multichannel
Light enters before spectrometer, by F-P filter to optical mode carry out LS-SVM sparseness, the effect of the LS-SVM sparseness be so that
The light belt width that each pixel of spectrometer imaging unit receives narrows, so that coherence length is promoted to number from tens of milliseconds
Rice, and then realize the high-precision wide spectral interference ranging within the scope of several meters.
4. a kind of body surface three-dimensional coordinate measuring system as claimed in claim 3, which is characterized in that first reference arm
There is fixed splitting ratio between second reference arm, can judge that interference peaks are sources by converting the intensity of signal
In the second reference arm of the first reference arm or source.
5. a kind of body surface three-dimensional coordinate measuring system as claimed in claim 4, which is characterized in that first reference arm
Splitting ratio between second reference arm is 75:25.
6. a kind of body surface three-dimensional coordinate measuring system as claimed in claim 5, which is characterized in that the first reference arm and the
There is fixed optical path difference φ, as a result, the reflection laser through the first reference arm and through the second reference arm between two reference arms
First interference peaks and the second interference peaks with fixed range are formed in conversion spectrum with the reflection laser through measuring arm respectively.
7. a kind of body surface three-dimensional coordinate measuring system as claimed in claim 6, which is characterized in that testee is with respect to the
The mirror image distance l of one reference arm meets l ∈ [(n-1) l apart from section in n-th of non-fuzzyNAR,nlNAR], wherein n be it is known just
Integer, lNARFor non-fuzzy distance, l is calculated according to the following formula:
Wherein,
In formula, c is the light velocity, npIt is the refractive index of light propagation medium, τ1And τ2It is that the first interference peaks and the second interference peaks are becoming respectively
The coordinate on domain is changed, m, Z indicate integer.
8. a kind of body surface three-dimensional coordinate measuring system as claimed in claim 7, which is characterized in that two-dimension displacement platform
X-axis and y-axis are made of linear motor and grating scale, for controlling the precise displacement of testee opposed optical fibers collimator, by
Processor controls the movement of two-dimension displacement platform.
9. a kind of body surface three-dimensional coordinate measuring method, which is characterized in that transmitting femtosecond laser or SLD laser, femtosecond swash
Light or SLD laser are divided into two beams, respectively light beam and the second beam light after preventing reverse transfers from handling,
Wherein, light beam is incident on object to be measured after being processed into collimated light, and object being measured is in the x direction and the y direction
On displacement it is anticipated that by controlling, be incident to the first light beam on object to be measured by reflection and along backtracking, be first
Reflected light, the first reflected light are divided into two-beam, wherein a branch of be detected after filtering processing receives, remaining light beam is inhaled
It receives and disappears,
Second beam light is also divided into two beams, the respectively first sub- beam splitting light and the second sub- beam splitting light, the first sub- beam splitting light and second
Sub- beam splitting light reflected respectively after along backtracking, be synthesized along the first sub- beam splitting light of backtracking and the second sub- beam splitting light
Light beam, referred to as the second reflected light, the second reflected light include along the first sub- beam splitting light of backtracking and the second son point simultaneously
The information of Shu Guang,
There is fixed optical path difference along the first sub- beam splitting light of backtracking and the second sub- beam splitting light,
Second reflected light is again divided into two beams, wherein a branch of spare, is left a branch of to be divided into two beams, respectively second again again
The sub- beam splitting of reflected light first and second the second sub- beam splitting of reflected light, second the first sub- beam splitting of reflected light are absorbed and disappear, and second
The sub- beam splitting of reflected light second is detected after filtering processing and receives,
Second the second sub- beam splitting of reflected light includes the first sub- beam splitting light and the second sub- beam splitting light along backtracking simultaneously,
Analysis processing the first reflected light, the interference information between the first sub- beam splitting light and the second sub- beam splitting light of backtracking,
To obtaining the height of object under test in the Z-axis direction, in conjunction with the displacement of object being measured in the x-direction and the z-direction, synthesis to
Survey body surface three-dimensional coordinate.
10. a kind of body surface three-dimensional coordinate measuring method as claimed in claim 9, which is characterized in that use femtosecond laser
Device issue femtosecond laser perhaps using SLD laser issue SLD laser femtosecond laser or SLD laser by optoisolator into
Row prevents reverse transfers processing, is then passed through the first coupler and is performed light beam splitting and enters measurement arm and the second coupler, into
The light for entering to measure arm is performed after collimationization is handled by optical fiber collimator to be incident on testee surface, testee setting
To be controlled in the displacement in X-direction and Y-direction on two-dimension displacement platform, the laser on object under test surface is reached by anti-
It penetrates or is scattered back into optical fiber collimator, then received by the first coupler and F-P filter by spectrometer detection,
Light into the second coupler passes through the first retroeflector respectively and the second retroeflector is reflected back the first coupler,
Spectrometer is further entered by the first coupler, the first retroeflector and the second retroeflector are respectively formed the first reference
Arm and the second reference arm are provided with fixed optical path difference φ between the first reference arm and the second reference arm,
By processor analyze spectrometer detection to come measurement arm and two-way reference arm totally three road femtosecond lasers or SLD laser
Between interference signal, to obtain the height of object under test in the Z-axis direction,
Two-dimension displacement platform is controlled with processor and detects coordinate of the object under test in X/Y plane of two-dimension displacement flat reaction, from
And it can synthetic body surface three dimension coordinate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910648603.5A CN110376596B (en) | 2019-07-18 | 2019-07-18 | Object surface three-dimensional coordinate measuring system and measuring method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910648603.5A CN110376596B (en) | 2019-07-18 | 2019-07-18 | Object surface three-dimensional coordinate measuring system and measuring method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110376596A true CN110376596A (en) | 2019-10-25 |
| CN110376596B CN110376596B (en) | 2021-05-18 |
Family
ID=68253831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910648603.5A Active CN110376596B (en) | 2019-07-18 | 2019-07-18 | Object surface three-dimensional coordinate measuring system and measuring method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110376596B (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110865392A (en) * | 2019-11-28 | 2020-03-06 | 天津大学 | Method based on optical frequency comb and applied to workpiece distance measurement imaging |
| CN111239762A (en) * | 2020-02-11 | 2020-06-05 | 天津大学 | Workpiece rapid imaging method of optical frequency comb |
| CN112684462A (en) * | 2020-12-21 | 2021-04-20 | 武汉光目科技有限公司 | Amplified area array sweep frequency measuring device and method |
| CN112684460A (en) * | 2020-12-21 | 2021-04-20 | 武汉光目科技有限公司 | Area array sweep frequency measuring device and method |
| CN112711029A (en) * | 2020-12-21 | 2021-04-27 | 武汉光目科技有限公司 | Area array sweep frequency measuring device and method |
| CN112882048A (en) * | 2021-01-11 | 2021-06-01 | 广州合智瑞达科技有限公司 | Radar device for high-precision distance measurement of moving object and measurement method thereof |
| CN114910013A (en) * | 2022-04-07 | 2022-08-16 | 上海盛相工业检测科技有限公司 | Three-dimensional detection method and system based on phase deflection method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102322807A (en) * | 2011-08-05 | 2012-01-18 | 北京交通大学 | Real-time measurement method for dynamic three-dimensional deformation of object |
| US20150177380A1 (en) * | 2011-08-16 | 2015-06-25 | California Institute Of Technology | Three-dimensional tomographic imaging camera |
| CN105738911A (en) * | 2016-02-01 | 2016-07-06 | 清华大学 | Femtosecond laser interference range finding system |
| CN105928606A (en) * | 2016-07-12 | 2016-09-07 | 南京大学 | Surface acoustic wave optical interference scanning detection system |
| CN105942967A (en) * | 2011-02-15 | 2016-09-21 | 视乐有限公司 | System and method for measuring internal dimensions of object by virtue of optical coherence tomography |
| CN209074572U (en) * | 2018-05-10 | 2019-07-09 | 视微影像(河南)科技有限公司 | A kind of optical interference imaging system of frequency sweep OCT |
-
2019
- 2019-07-18 CN CN201910648603.5A patent/CN110376596B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105942967A (en) * | 2011-02-15 | 2016-09-21 | 视乐有限公司 | System and method for measuring internal dimensions of object by virtue of optical coherence tomography |
| CN102322807A (en) * | 2011-08-05 | 2012-01-18 | 北京交通大学 | Real-time measurement method for dynamic three-dimensional deformation of object |
| US20150177380A1 (en) * | 2011-08-16 | 2015-06-25 | California Institute Of Technology | Three-dimensional tomographic imaging camera |
| CN105738911A (en) * | 2016-02-01 | 2016-07-06 | 清华大学 | Femtosecond laser interference range finding system |
| CN105928606A (en) * | 2016-07-12 | 2016-09-07 | 南京大学 | Surface acoustic wave optical interference scanning detection system |
| CN209074572U (en) * | 2018-05-10 | 2019-07-09 | 视微影像(河南)科技有限公司 | A kind of optical interference imaging system of frequency sweep OCT |
Non-Patent Citations (2)
| Title |
|---|
| YAN,GW ET AL.: "SNR-enhanced continuous spatial filtering velocimetry on a high-speed circuit breaker using linear CMOS", 《APPLIED PHYSICS B-LASERS AND OPTICS》 * |
| 时光 等: "高分辨率调频连续波激光绝对测距研究", 《物理学报》 * |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110865392A (en) * | 2019-11-28 | 2020-03-06 | 天津大学 | Method based on optical frequency comb and applied to workpiece distance measurement imaging |
| CN111239762A (en) * | 2020-02-11 | 2020-06-05 | 天津大学 | Workpiece rapid imaging method of optical frequency comb |
| CN112684462A (en) * | 2020-12-21 | 2021-04-20 | 武汉光目科技有限公司 | Amplified area array sweep frequency measuring device and method |
| CN112684460A (en) * | 2020-12-21 | 2021-04-20 | 武汉光目科技有限公司 | Area array sweep frequency measuring device and method |
| CN112711029A (en) * | 2020-12-21 | 2021-04-27 | 武汉光目科技有限公司 | Area array sweep frequency measuring device and method |
| CN112684460B (en) * | 2020-12-21 | 2024-03-22 | 武汉光目科技有限公司 | Area array sweep frequency measuring device and method |
| CN112882048A (en) * | 2021-01-11 | 2021-06-01 | 广州合智瑞达科技有限公司 | Radar device for high-precision distance measurement of moving object and measurement method thereof |
| CN112882048B (en) * | 2021-01-11 | 2024-06-04 | 广州合智瑞达科技有限公司 | Measuring method of radar device for high-precision ranging of moving object |
| CN114910013A (en) * | 2022-04-07 | 2022-08-16 | 上海盛相工业检测科技有限公司 | Three-dimensional detection method and system based on phase deflection method |
| CN114910013B (en) * | 2022-04-07 | 2024-06-18 | 上海盛相工业检测科技有限公司 | Three-dimensional detection method and system based on phase deviation method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110376596B (en) | 2021-05-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110376596A (en) | A kind of body surface three-dimensional coordinate measuring system and measurement method | |
| CN102519573B (en) | Remote non-contact vibration measuring device | |
| CN102494615B (en) | Step distance measuring device based on femtosecond optical-frequency comb and measuring method thereof | |
| CN207180607U (en) | A kind of angle compensation formula laser heterodyne interference displacement measuring device | |
| CN103115582B (en) | Based on the Michelson fluorescence interference micro-measurement apparatus of stimulated radiation | |
| CN103115585B (en) | Based on fluorescence interference microscopic measuring method and the device of stimulated radiation | |
| CN110160471A (en) | A kind of error measuring system and method for high-precision linear guide | |
| CN103115580B (en) | Based on three-dimensional hole shape detection method and the system of optical coherence tomography scanning | |
| CN105044035B (en) | Refractive index and thickness method for synchronously measuring and system based on spectral domain interferometer | |
| CN103884491A (en) | Two-dimensional dynamic angle measuring and calibrating method and device of scanning camera mirror | |
| CN103115583B (en) | Based on the Mirau fluorescence interference micro-measurement apparatus of stimulated radiation | |
| CN105333815B (en) | A kind of super online interferometer measuration system of lateral resolution surface three dimension based on the scanning of spectrum colour loose wire | |
| CN110369859A (en) | A kind of femtosecond laser closed loop processing system | |
| US20200363187A1 (en) | Light sensor and coordinate measuring machine | |
| CN203687880U (en) | Optical displacement measuring system | |
| CN103791844B (en) | optical displacement measurement system | |
| CN115371587A (en) | Surface topography measuring device and method and object surface height calculating method | |
| CN104154882A (en) | Double beam parallelism detection device and method based on differential defocus measurement | |
| CN208383058U (en) | A kind of small internal surface of hole three-dimensional imaging detection system of optical fiber interference type | |
| CN205643181U (en) | Optical element surface defect detecting device of reflection dual wavelength synthetic aperture holography | |
| CN101033948B (en) | Measurement system for three-dimensional deformation based on splitting optical fiber | |
| CN110449993A (en) | A kind of sports platform straight-line displacement measurement and deflection detection apparatus | |
| US20150077759A1 (en) | Compact, Slope Sensitive Optical Probe | |
| CN103267478B (en) | High-precision position detection device and method | |
| CN108982510A (en) | Utilize 90 ° of optics mixer Surface profiling dynamic detection systems and method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |