CN108151866A - A kind of Fabry-perot optical fiber sonic probe and signal demodulating system - Google Patents
A kind of Fabry-perot optical fiber sonic probe and signal demodulating system Download PDFInfo
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- CN108151866A CN108151866A CN201711406875.1A CN201711406875A CN108151866A CN 108151866 A CN108151866 A CN 108151866A CN 201711406875 A CN201711406875 A CN 201711406875A CN 108151866 A CN108151866 A CN 108151866A
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- optical fiber
- fabry
- sonic probe
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
Abstract
The present invention relates to optical fiber technology, optical engineering, material engineering and signal processing technology fields, and in particular to a kind of Fabry-perot optical fiber sonic probe and signal demodulating system.The Fabry-perot optical fiber sonic probe of the present invention, as acoustic vibration sensitive thin film, is easy to shift, makes simple, at low cost, high yield rate using oxidation graphene film;Its demodulating system employs a kind of three wavelength phases demodulation methods, the cooperation of wideband light source, circulator, Fabry-perot optical fiber sonic probe, wavelength division multiplexer, triple channel photodetector, data collecting card and data processing module is used, and the Fabry-perot optical fiber sonic probe of the present invention is made not to be affected by temperature at work.The demodulating system of the present invention is applicable in wideband light source at low cost and stability is high, and the Fabry-perot optical fiber sonic probe cooperation with the present invention can be applied to the fields such as monitoring, medicine and biomedical engineering of deploying troops on garrison duty safely.
Description
Technical field
The present invention relates to optical fiber technology, optical engineering, material engineering and signal processing technology fields, and in particular to Yi Zhongguang
Nanofarads amber sonic probe and its signal demodulating system.
Background technology
Fabry-perot optical fiber chamber is as a kind of highly important optical texture, at low cost since its is small, electromagnetism interference,
The plurality of advantages that signal can be transmitted at a distance is widely used in the fields such as precision instrument, industrial production, communication, sensing.Also just
It is due to these advantages, the research based on Fabry-perot optical fiber chamber sonic sensor has also obtained the concern of more and more people.
Traditional Fabry-perot optical fiber sonic probe is usually to be made of optical fiber and vibrating diaphragm, fiber end face and vibrating diaphragm group
Into two reflectings surface of Fa-Po cavity, air is as cavity medium.For the optical fiber sonic probe of this structure, influence to detect sensitive
Two key factors of degree are exactly the reflectivity and thickness of vibrating diaphragm.At present, it is usually organic for the selection of vibrating diaphragm
Film and metal film etc., but the vibrating diaphragm thickness of these types is all difficult to do thin, and complex manufacturing process, technological requirement
Height, the sensitivity which greatly limits sonic probe improves and batch production.Graphene as it is presently found most
The most strong a kind of novel nano-material of thin, maximum intensity, electrical and thermal conductivity performance, has been widely used in every field.
Intrinsical graphene film Fabry-perot optical fiber is made for the pressure sensor of graphene, Jin Wei et al. in 2012 to do
Relate to sensor (referring to:Jun Ma, Wei Jin, Hoi Lut Ho, etal.High-sensitivity fiber-tip
pressure sensor withgraphene diaphragm[J].Optics letters,2012,13(37):2493-
2495.) and in 2014 made extrinsic type graphene film Fabry-perot optical fiber interference sensor (referring to:Jun Ma,Wei
Jin, HaifengXuan, etal.Fiber-optic ferrule-top nanomechanical resonator with
multilayer graphene film[J].Optics letters,2014,16(39):4769-4772.).The number of applying for a patent
Chinese invention patent " a kind of light based on graphene film for being CN103557929A for 201310564209.6, application publication number
Nanofarads amber sound pressure sensor production method and its measuring method, device " discloses a kind of Fabry-perot optical fiber sound based on graphene film
Pressure sensor.The single-layer or multi-layer graphene film that they are.
All there are some shortcomings for the probe of this pure graphene film.First, in terms of film is made, this single-layer or multi-layer
Graphene generally use chemical vapor deposition method, this method needs expensive equipment and complicated technique, this is significantly
Increase cost of manufacture and manufacture difficulty.Secondly, the graphene thickness of single-layer or multi-layer only has several nanometers to tens nanometers,
In the transfer process of film, they usually require one layer of polymeric film (PMMA) as substrate, are otherwise transferred to box face
It is extremely difficult, easily rupture graphene film when finally removal PMMA film, this allows for the yield rate of graphene probe
It is very low.
Invention content
For above-mentioned there are problem or deficiency, to solve how to optimize the manufacture craft of Fabry-perot optical fiber sonic probe, reduce
Cost of manufacture improves yield rate, obtains sonic probe product that can be practical.How to overcome in traditional demodulation method some lack
Point so that the closer functionization of the optical fiber acoustic detection system.The present invention provides a kind of Fabry-perot optical fiber sonic probe and its
Signal demodulating system.
A kind of Fabry-perot optical fiber sonic probe, including:Both ends toroidal glass bushing, one end covering graphene film,
The other end is inserted into single mode optical fiber, and fiber end face forms interference Fa-Po cavity with graphene film.
The graphene film is oxidation graphene film as sonic sensitive element, elasticity modulus 50-
100GPa, thickness are 0.1-1 microns.Optical fiber is single mode optical fiber, and size is adapted with glass bushing internal diameter, glass bushing both ends
For loudspeaker opening shape, purpose one is for ease of being inserted into optical fiber, second is that in order to increase hanging oxidation graphene film
Vibrate area, increase sensitivity of the sonic probe to acoustic detection, the loudspeaker openend maximum of glass bushing it is a diameter of
0.8-2.8 millimeters.
Using the signal demodulating system of above-mentioned Fabry-perot optical fiber sonic probe, including:Wideband light source, circulator, Fabry-perot optical fiber
Sonic probe, wavelength division multiplexer, triple channel photodetector, data collecting card, data processing module.
1 port of wideband light source connection circulator, 2 port of circulator connect Fabry-perot optical fiber sonic probe, and 3 port of circulator connects wave
Division multiplexer, wavelength division multiplexer connect triple channel photodetector, and triple channel photodetector connects data collecting card, data collecting card
Connect data processing module.
Wherein, the equal light in three beams wavelength interval of wavelength division multiplexer output, wavelength interval for probe method Fabry-Parot interferent chamber from
By 1/3rd of spectral region (FSR) so that the phase difference between three wavelength in interference fringe is 120 degree.In this way, three
The information of Shu Guangqiang is converted into voltage signal through photodetector, and voltage signal is converted into digital signal by data collecting card, number
Word signal can accurately restore the sound wave letter being detected after being handled via data processing module by Digital Signal Algorithm
Breath, and do not influenced by ambient temperature variation.
The workflow of above-mentioned signal demodulating system is as follows:
Wideband light source is sent out after flashlight enters sonic probe by circulator 1,2 ports, and reflection flashlight is again through annular
3 port of device enters wavelength division multiplexer and separates the three equally spaced light waves of road wavelength;Three-beam wave respectively enters triple channel photodetection
The light intensity signal of input is converted to voltage signal by three input ports of device, photodetector, defeated by three voltage output ports
To data collecting card;Collected three road voltage data is sent into data processing module and carries out signal processing by data collecting card, most
Reduction output information of acoustic wave eventually.
In the present invention, oxidation graphene film and wideband light source and wavelength division multiplexer play most important work
With:Oxidation graphene film makes simply, is easy to shift;Wideband light source provides the flashlight of a wide range, by wavelength-division
Multiplexer is divided into the three equally spaced light beams of road wavelength so that the phase difference between three wavelength in interference fringe is 120 degree, warp
Data processing module is handled by Digital Signal Algorithm can accurately restore the information of acoustic wave being detected.
Fabry-perot optical fiber sonic probe provided by the invention is thin as acoustic vibration sensitivity using oxidation graphene film
Film, compared to the sonic probe based on individual layer and multi-layer graphene film reported, oxidation graphene film, which has, to be easy to
Film forming, manufacturing process is simple, at low cost, the advantage of high yield rate so that the probe has very high practical value.Demodulating system
A kind of three wavelength phases demodulation methods are employed, compared with traditional intensity demodulation, demodulating system of the invention is overcome in reality
The problem of being affected by temperature operating point in the application of border improves sensitivity and the stability of probe;With traditional phase demodulating phase
Than, demodulating system of the invention with wideband light source at low cost instead of expensive narrow-linewidth laser light source, reduce and be
The cost of system, stability higher.
In conclusion Fabry-perot optical fiber sonic probe provided by the invention simplifies manufacture craft, cost is reduced, is improved
Yield rate;Its demodulating system have it is at low cost, stability is good, can be applied to deploy troops on garrison duty safely monitoring, medicine and biomedical engineering
The fields of grade.
Description of the drawings
Fig. 1 is the structure diagram of sonic probe of the present invention;
Fig. 2 restores flow diagram for graphene oxide membrane of the present invention;
Fig. 3 is sonic probe production process schematic diagram of the present invention;
Fig. 4 is the hardware block diagram of sonic probe signal demodulating system of the present invention;
Fig. 5 is present invention probe interference fringe and three wavelength interval relation schematic diagrams;
Fig. 6 is the information of voltage that the acoustic signals of frequency 1000Hz export after algorithm demodulates.
Reference numeral:1- graphene oxide solutions, 2- copper foil substrates, 3- graphene oxide membranes, 4- industry vitamin Cs are molten
Liquid, 5- oxidation graphene films, 6- horn opening glass tubes, 7- optical fiber, 8- glass tubes loudspeaker opening, 9- method Fabry-Parot interferents
Chamber, 10- wideband light sources, 11- circulators, 12- Fabry-perot optical fiber sonic probes, 13- wavelength division multiplexers, 14- triple channel photodetections
Device, 15- data collecting cards, 16- data processing modules.
Specific embodiment
Below in conjunction with the accompanying drawings and specific embodiment the invention will be further described:
Prepare Fabry-perot optical fiber sonic probe as shown in Figure 1.
Fig. 2 restores flow diagram for graphene oxide membrane of the present invention.Graphene oxide powder ultrasound is dissolved in first
In ionized water, graphene oxide solution 1 is obtained, then graphene oxide solution 1 is transferred in copper foil substrate 2, in 60 degree of environment
It is middle to be evaporated graphene oxide solution 1 naturally, graphene oxide film 3 is obtained in copper foil substrate 2, copper foil substrate 2 together with oxygen
Graphite alkene film 3 is put into the industrial vitamin c solution 4 of 80 degree of water-baths, and water-bath restores 60 minutes, is obtained in copper foil substrate 2
Oxidation graphene film 5.
Fig. 3 is embodiment sonic probe production process schematic diagram.The graphene oxide membrane restored in copper foil substrate 2
After 5, with ferric chloride solution etching away copper foil substrate 2, oxidation graphene film 5 is obtained, then redox graphene
Film 5 is transferred to the end face of horn opening glass tube 6 and optical fiber 7 forms method Fabry-Parot interferent chamber 9 and obtains optical fiber sonic probe.
Fig. 4 is the signal demodulating system schematic diagram of the Fabry-perot optical fiber sonic probe.The system is by wideband light source 10, circulator
11, sonic probe 12, wavelength division multiplexer 13, triple channel photodetector 14,16 groups of data collecting card 15 and data processing module
Into.Wideband light source 10 send out flashlight by circulator 11 enter sonic probe 12 after, reflection flashlight again through circulator 11 into
Enter wavelength division multiplexer 13 and separate the three equally spaced light waves of road wavelength, three-beam respectively enters three of triple channel photodetector 14
Input port, three voltage output ports connect data collecting card 15, and collected three road voltage data is sent into data processing module 16
Carry out signal processing, you can restore and export information of acoustic wave.
Fig. 5 is present invention probe interference fringe and three wavelength interval relation principle schematic diagrames.Demodulation in the present invention
In system, the wavelength interval of three road light that wavelength division multiplexer 13 branches away be pop one's head in interference fringe Free Spectral Range three/
One.As shown in figure 5, the wavelength X 3- λ 2=λ 2- λ 1=FSR/3 that wavelength division multiplexer separates so that in interference item between three wavelength
Phase difference on line is 120 degree.
Fig. 6 is the sound wave information of voltage result exported after the data processing module 16 of signal demodulating system of the present invention demodulates
Figure.Sound-source signal is the acoustic signals of 1000Hz, and the frequency from the result it can be seen from the figure that output signal of demodulation output is
1000Hz, the frequency of sound wave sent out with sound source is just the same, demonstrates the signal demodulating system in the present invention and can be very good also
Original goes out the information of acoustic wave being detected.
Claims (3)
1. a kind of Fabry-perot optical fiber sonic probe production method and its signal demodulating system, including both ends toroidal glass bushing,
Graphene film and single mode optical fiber, it is characterised in that:
Both ends toroidal glass bushing, one end covering graphene film, the other end are inserted into single mode optical fiber, single mode optical fiber end face
Interference Fa-Po cavity is formed with graphene film;
The graphene film is oxidation graphene film as sonic sensitive element, elasticity modulus 50-100GPa,
Thickness is 0.1-1 microns;Optical fiber is single mode optical fiber, and size is adapted with glass bushing internal diameter, the loudspeaker opening of glass bushing
Hold maximum a diameter of 0.8-2.8 millimeters.
2. a kind of signal demodulating system, including wideband light source, circulator, Fabry-perot optical fiber sonic probe, wavelength division multiplexer, triple channel
Photodetector, data collecting card and data processing module, it is characterised in that:
1 port of wideband light source connection circulator, 2 port of circulator connect Fabry-perot optical fiber sonic probe, and 3 port of circulator connects wavelength-division and answers
With device, wavelength division multiplexer connects triple channel photodetector, and triple channel photodetector connects data collecting card, and data collecting card connects number
According to processing module;
The Fabry-perot optical fiber sonic probe uses Fabry-perot optical fiber sonic probe described in claim 1;
The equal light in the three beams wavelength interval of wavelength division multiplexer output, wavelength interval is probe method Fabry-Parot interferent chamber free spectrum
/ 3rd of range FSR, the phase difference between three wavelength in interference fringe are 120 degree.
3. Fabry-perot optical fiber sonic probe signal demodulating system as claimed in claim 2, workflow are as follows:
Wideband light source is sent out after flashlight enters sonic probe by circulator 1,2 ports, and reflection flashlight is again through 3 end of circulator
Mouth separates the three equally spaced light waves of road wavelength into wavelength division multiplexer;Three-beam wave respectively enters the three of triple channel photodetector
The light intensity signal of input is converted to voltage signal by a input port, photodetector, and data are transported to by three voltage output ports
Capture card;Collected three road voltage data is sent into data processing module and carries out signal processing by data collecting card, final to restore
Export information of acoustic wave.
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109029687A (en) * | 2018-07-16 | 2018-12-18 | 华中科技大学 | A kind of fiber optic acoustic sensors |
CN109238437A (en) * | 2018-08-28 | 2019-01-18 | 电子科技大学 | A kind of Fabry-perot optical fiber sonic probe based on silicon nitride MEMS film |
CN109520429A (en) * | 2018-11-26 | 2019-03-26 | 重庆大学 | The few spectrum sample point high-speed measuring system and method for white light interference type optical fiber Fabry-Perot sensor |
CN110057439A (en) * | 2019-05-15 | 2019-07-26 | 北京航空航天大学 | A kind of low quick sensing device of resonance eccentric core fiber sound based on F-P interference |
CN111289085A (en) * | 2020-02-11 | 2020-06-16 | 中国科学院电子学研究所 | Microphone diaphragm amplitude measuring method and device |
CN111366233A (en) * | 2020-04-17 | 2020-07-03 | 云南电网有限责任公司电力科学研究院 | Optical fiber Fabry-Perot acoustic sensor and preparation method thereof |
CN111537008A (en) * | 2020-03-31 | 2020-08-14 | 国网上海市电力公司 | Omnidirectional packaging structure for optical fiber Fabry-Perot acoustic wave sensor and manufacturing method |
CN112763052A (en) * | 2020-12-16 | 2021-05-07 | 华中科技大学 | Broadband acoustic wave sensor for anti-electronic monitoring |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012037480A (en) * | 2010-08-11 | 2012-02-23 | Ihi Inspection & Instrumentation Co Ltd | Ae measuring method and equipment by optical fiber sensor using wide band light |
CN103697922A (en) * | 2014-01-09 | 2014-04-02 | 中国人民解放军总参谋部工程兵科研三所 | High-speed demodulation system of optical fiber F-P cavity sensor |
CN203642944U (en) * | 2014-01-09 | 2014-06-11 | 中国人民解放军总参谋部工程兵科研三所 | High-speed demodulation system of optical fiber F-P chamber sensor |
CN105092646A (en) * | 2015-08-19 | 2015-11-25 | 电子科技大学 | Graphene/metal oxide composite film gas sensor and preparation method |
CN106289504A (en) * | 2016-08-24 | 2017-01-04 | 电子科技大学 | A kind of Fabry-perot optical fiber sonic probe device and preparation method thereof |
-
2017
- 2017-12-22 CN CN201711406875.1A patent/CN108151866A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012037480A (en) * | 2010-08-11 | 2012-02-23 | Ihi Inspection & Instrumentation Co Ltd | Ae measuring method and equipment by optical fiber sensor using wide band light |
CN103697922A (en) * | 2014-01-09 | 2014-04-02 | 中国人民解放军总参谋部工程兵科研三所 | High-speed demodulation system of optical fiber F-P cavity sensor |
CN203642944U (en) * | 2014-01-09 | 2014-06-11 | 中国人民解放军总参谋部工程兵科研三所 | High-speed demodulation system of optical fiber F-P chamber sensor |
CN105092646A (en) * | 2015-08-19 | 2015-11-25 | 电子科技大学 | Graphene/metal oxide composite film gas sensor and preparation method |
CN106289504A (en) * | 2016-08-24 | 2017-01-04 | 电子科技大学 | A kind of Fabry-perot optical fiber sonic probe device and preparation method thereof |
Non-Patent Citations (1)
Title |
---|
YU WU等: "A Highly Sensitive Fiber-Optic Microphone Based on Graphene Oxide Membrane", 《JOURNAL OF LIGHTWAVE TECHNOLOGY》 * |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109029687A (en) * | 2018-07-16 | 2018-12-18 | 华中科技大学 | A kind of fiber optic acoustic sensors |
CN109238437A (en) * | 2018-08-28 | 2019-01-18 | 电子科技大学 | A kind of Fabry-perot optical fiber sonic probe based on silicon nitride MEMS film |
CN109520429A (en) * | 2018-11-26 | 2019-03-26 | 重庆大学 | The few spectrum sample point high-speed measuring system and method for white light interference type optical fiber Fabry-Perot sensor |
CN110057439A (en) * | 2019-05-15 | 2019-07-26 | 北京航空航天大学 | A kind of low quick sensing device of resonance eccentric core fiber sound based on F-P interference |
CN111289085A (en) * | 2020-02-11 | 2020-06-16 | 中国科学院电子学研究所 | Microphone diaphragm amplitude measuring method and device |
CN111289085B (en) * | 2020-02-11 | 2021-06-08 | 中国科学院电子学研究所 | Microphone diaphragm amplitude measuring method and device |
CN111537008A (en) * | 2020-03-31 | 2020-08-14 | 国网上海市电力公司 | Omnidirectional packaging structure for optical fiber Fabry-Perot acoustic wave sensor and manufacturing method |
CN111366233A (en) * | 2020-04-17 | 2020-07-03 | 云南电网有限责任公司电力科学研究院 | Optical fiber Fabry-Perot acoustic sensor and preparation method thereof |
CN112763052A (en) * | 2020-12-16 | 2021-05-07 | 华中科技大学 | Broadband acoustic wave sensor for anti-electronic monitoring |
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Application publication date: 20180612 |