CN108034913B - 柔性oled封装用金属掩膜版的绝缘处理方法 - Google Patents
柔性oled封装用金属掩膜版的绝缘处理方法 Download PDFInfo
- Publication number
- CN108034913B CN108034913B CN201711330542.5A CN201711330542A CN108034913B CN 108034913 B CN108034913 B CN 108034913B CN 201711330542 A CN201711330542 A CN 201711330542A CN 108034913 B CN108034913 B CN 108034913B
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- CN
- China
- Prior art keywords
- metal mask
- mask plate
- aluminum layer
- cleaning
- flexible oled
- Prior art date
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C2/00—Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor
- C23C2/04—Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor characterised by the coating material
- C23C2/12—Aluminium or alloys based thereon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Electrochemistry (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201711330542.5A CN108034913B (zh) | 2017-12-13 | 2017-12-13 | 柔性oled封装用金属掩膜版的绝缘处理方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201711330542.5A CN108034913B (zh) | 2017-12-13 | 2017-12-13 | 柔性oled封装用金属掩膜版的绝缘处理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN108034913A CN108034913A (zh) | 2018-05-15 |
CN108034913B true CN108034913B (zh) | 2020-04-14 |
Family
ID=62102690
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201711330542.5A Active CN108034913B (zh) | 2017-12-13 | 2017-12-13 | 柔性oled封装用金属掩膜版的绝缘处理方法 |
Country Status (1)
Country | Link |
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CN (1) | CN108034913B (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111041422B (zh) * | 2018-10-11 | 2022-12-30 | 深圳拓扑精膜科技有限公司 | 全面积均匀多孔氧化铝薄膜的制备方法、装置及其产品 |
CN110863175A (zh) * | 2019-12-04 | 2020-03-06 | 深圳市腾深显示技术有限公司 | 金属掩膜板的表面处理方法 |
CN111763898B (zh) * | 2020-06-01 | 2021-10-01 | 武汉大学 | 一种电气绝缘设备金属表面处理防止c5f10o气体腐蚀的方法 |
CN111705287B (zh) * | 2020-07-10 | 2021-07-30 | 武汉大学 | 一种电气绝缘设备金属表面处理防止c4f7n腐蚀的方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3961962A (en) * | 1973-11-29 | 1976-06-08 | Fuji Photo Film Co., Ltd. | Photomask material and method for producing same |
CN104183683A (zh) * | 2013-05-24 | 2014-12-03 | 上海航天测控通信研究所 | 一种基于铝基复合材料基板的多芯片led封装方法 |
CN105449126A (zh) * | 2015-12-22 | 2016-03-30 | 上海天马有机发光显示技术有限公司 | 一种蒸镀掩模板及其制作方法 |
CN106920898A (zh) * | 2015-12-28 | 2017-07-04 | 昆山国显光电有限公司 | 掩模板及其制造方法、oled器件蒸镀方法 |
CN107385390A (zh) * | 2016-04-22 | 2017-11-24 | 普因特工程有限公司 | 掩模和掩模组件 |
-
2017
- 2017-12-13 CN CN201711330542.5A patent/CN108034913B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3961962A (en) * | 1973-11-29 | 1976-06-08 | Fuji Photo Film Co., Ltd. | Photomask material and method for producing same |
CN104183683A (zh) * | 2013-05-24 | 2014-12-03 | 上海航天测控通信研究所 | 一种基于铝基复合材料基板的多芯片led封装方法 |
CN105449126A (zh) * | 2015-12-22 | 2016-03-30 | 上海天马有机发光显示技术有限公司 | 一种蒸镀掩模板及其制作方法 |
CN106920898A (zh) * | 2015-12-28 | 2017-07-04 | 昆山国显光电有限公司 | 掩模板及其制造方法、oled器件蒸镀方法 |
CN107385390A (zh) * | 2016-04-22 | 2017-11-24 | 普因特工程有限公司 | 掩模和掩模组件 |
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Publication number | Publication date |
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CN108034913A (zh) | 2018-05-15 |
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TA01 | Transfer of patent application right |
Effective date of registration: 20181226 Address after: 518000 Shahu Community, Biling Street, Pingshan District, Shenzhen City, Guangdong Province, No. 2-10 South Jinlong Avenue, 1 Building, 3 Floors, 2 Buildings, 2 Floors Applicant after: Shenzhen Junyi Technology Co., Ltd. Address before: 518000 Shenzhen, Guangdong, Pingshan New District, Jinlong Road, Ma Luan Chuang 1 Building 3 and 2 2 buildings. Applicant before: Tang Jun |
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GR01 | Patent grant | ||
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TR01 | Transfer of patent right |
Effective date of registration: 20200619 Address after: 236000 building 6-7, comprehensive industrial park, Yingshang Economic Development Zone, Shencheng Town, Yingshang County, Fuyang City, Anhui Province Patentee after: Anhui Junying photoelectric Co., Ltd Address before: 518000 Shahu Community, Biling Street, Pingshan District, Shenzhen City, Guangdong Province, No. 2-10 South Jinlong Avenue, 1 Building, 3 Floors, 2 Buildings, 2 Floors Patentee before: Shenzhen Junyi Technology Co.,Ltd. |
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TR01 | Transfer of patent right |