CN108020540B - Laser-induced breakdown spectroscopy detection system - Google Patents
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- CN108020540B CN108020540B CN201711307227.0A CN201711307227A CN108020540B CN 108020540 B CN108020540 B CN 108020540B CN 201711307227 A CN201711307227 A CN 201711307227A CN 108020540 B CN108020540 B CN 108020540B
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Abstract
The invention provides a laser-induced breakdown spectroscopy detection system, which comprises a laser-induced light source, a light splitting unit, a spectral parameter monitoring unit, a data screening unit and an analysis unit, wherein the light splitting unit is used for splitting a laser beam; the data screening unit is respectively connected with the light splitting unit, the spectral parameter monitoring unit and the analysis unit; the laser induction light source is used for outputting laser to the material to be detected so as to excite the material to be detected to generate plasma light; the light splitting unit is used for splitting the plasma light and outputting spectral data; the spectral parameter monitoring unit is used for monitoring spectral parameters of the plasma light at the input side of the light splitting unit and/or spectral data at the output side; the data screening unit screens and/or corrects the spectral data according to the spectral parameters and outputs effective spectral data; the analysis unit acquires the composition of the material to be detected according to the effective spectral data. The system provided by the invention reduces the interference caused by the instability of the light splitting unit, improves the stability of spectral data and realizes high-precision component analysis.
Description
Technical Field
The invention relates to the technical field of laser-induced breakdown spectroscopy, in particular to a laser-induced breakdown spectroscopy detection system.
Background
Laser Induced Breakdown Spectroscopy (LIBS) is an elemental composition analysis technique based on the emission spectrum produced by the interaction of Laser light and a material. The laser-induced breakdown spectroscopy technology generally generates laser by a laser-induced light source, ablates on a sample to be detected to generate plasma, collects optical signals of the plasma by a spectrometer (or a spectrophotometer, etc.), and then selects spectral signals of specific wavelengths of elements to be analyzed to process the spectral signals to obtain qualitative and quantitative information of the components of the sample. The technology has the advantages of small destructiveness to the sample, extremely low sample consumption, non-destructive measurement, realization of element analysis of any physical state substance without pretreatment to the sample, wide application range, high analysis speed, small measurement destructiveness, remote non-contact measurement, realization of real-time detection and the like in the measurement process.
At present, research based on the laser-induced breakdown spectroscopy technology mainly focuses on detection in different application fields, different detection methods and processing methods of spectral data.
Aiming at the application in different fields, researchers successively put forward technical schemes of rice variety identification, molten steel component online detection, water body metal pollutant detection, trace element analysis, coal quality analysis and the like based on laser-induced breakdown spectroscopy. And aiming at different laser induction technologies and spectrum detection methods, part of laser induction detection technologies realize signal enhancement and improvement. For example, the analysis system and method based on the two-dimensional energy correlation laser-induced breakdown spectroscopy can more clearly analyze spectral characteristics and improve the detection capability and repeatability of the conventional laser-induced breakdown spectroscopy. For example, a special measuring container is adopted, liquid to be measured passes through the measuring container at a constant speed, then high-energy pulse laser light is focused on the surface of a sample to be measured flowing in the container, plasma spectrum is induced, and meanwhile, an air blower is adopted to increase air circulation on the liquid surface in the container, so that suspended matters or dust generated in measurement can be removed, and the measurement precision is improved. In addition, in the research field of different laser-induced optical structures and data processing algorithms, people successively propose that a dichroic optical device for bidirectional light splitting is adopted to realize transmission and reflection of light with specific wavelength, and a holed lens is selected to realize coaxial transceiving.
The research in all directions has produced a great promotion effect on the development of the laser-induced breakdown spectroscopy technology. However, in the existing laser induced breakdown spectroscopy detection system, there is a problem that the measurement result is uncertain due to the uncertainty of the output of the key component. The resulting spectral signal fluctuates due to, for example, noise fluctuations, external disturbances, and wavelength shifts of the spectrometer itself. The above uncertainty factors severely limit the accuracy of laser-induced breakdown spectroscopy detection.
Disclosure of Invention
The invention provides a laser-induced breakdown spectroscopy detection system for solving the problem of uncertain measurement results caused by uncertainty of component output in the prior art.
On one hand, the invention provides a laser-induced breakdown spectroscopy detection system, which comprises a laser-induced light source, a light splitting unit, a spectral parameter monitoring unit, a data screening unit and an analysis unit; the data screening unit is respectively connected with the light splitting unit, the spectral parameter monitoring unit and the analysis unit; the laser induction light source is used for outputting laser to the material to be detected so as to excite the material to be detected to generate plasma light; the light splitting unit is used for splitting the plasma light and outputting spectral data; the spectral parameter monitoring unit is used for monitoring spectral parameters of spectral data at the input side of the light splitting unit and/or at the output side of the light splitting unit; the data screening unit screens and/or corrects the spectrum data according to the spectrum parameters and outputs effective spectrum data; and the analysis unit acquires the components of the material to be detected according to the effective spectrum data.
Preferably, the spectral parameter includes at least one of an energy intensity, a drift condition of the plasma light at the input side of the light splitting unit, and an energy intensity, a signal-to-noise ratio, and a signal-to-magnification ratio of the spectral data at the output side of the light splitting unit.
Preferably, the data screening unit screens the spectral data according to the spectral parameters based on a screening rule, and the screening rule is obtained by a preset or artificial intelligence algorithm.
Preferably, when the spectral parameter is the energy intensity of the plasma light and the screening rule is the energy mean value fluctuation range of the plasma light, the data screening unit calculates the actual fluctuation value of the energy of the plasma light according to the energy intensity; if the actual fluctuation value is within the fluctuation range, the spectrum data is effective spectrum data; otherwise, rejecting the spectral data.
Preferably, when the spectral parameter is the energy intensity of the spectral data and the screening rule is the energy mean value fluctuation range of the spectral data, the data screening unit calculates the actual fluctuation value of the energy of the spectral data according to the energy intensity; if the actual fluctuation value is within the fluctuation range, the spectrum data is effective spectrum data; otherwise, rejecting the spectral data.
Preferably, when there are a plurality of the spectral parameters, the evaluation criterion corresponding to each of the spectral parameters constitutes the screening rule by an and or logical relationship combination.
Preferably, when the spectral parameter is a drift condition of the plasma light, the data screening unit corrects the spectral data according to the drift condition, and the corrected spectral data is effective spectral data.
Preferably, when the spectral parameters are the energy intensity of the spectral data, the data screening unit counts the energy intensity of any wavelength according to the energy intensity of the spectral data to obtain the reference energy of any wavelength, and corrects the spectral data in an equal proportion according to the reference energy, wherein the corrected spectral data is effective spectral data.
Preferably, the system further comprises a preprocessing unit, wherein the preprocessing unit is respectively connected with the data screening unit and the analysis unit; the preprocessing unit is used for preprocessing the effective spectral data; the preprocessing comprises at least one of a denoising algorithm, a wavelength calibration algorithm, an intensity calibration algorithm, a peak searching algorithm and an intensity interpolation algorithm.
Preferably, the device also comprises a collection unit, wherein the collection unit is connected with the light splitting unit; the collecting unit is used for collecting the plasma light.
According to the laser-induced breakdown spectroscopy detection system, the spectral data are screened according to the spectral parameters of the input side and/or the output side of the light splitting unit, interference factors caused by instability of the light splitting unit are reduced, the stability of the spectral data is effectively improved, and high-precision component analysis is realized.
Drawings
Fig. 1 is a schematic structural diagram of a laser-induced breakdown spectroscopy detection system according to an embodiment of the present invention.
Detailed Description
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
Fig. 1 is a schematic structural diagram of a laser-induced breakdown spectroscopy detection system according to an embodiment of the present invention, and as shown in fig. 1, the laser-induced breakdown spectroscopy detection system includes a laser-induced light source 101, a light splitting unit 102, a spectral parameter monitoring unit 103, a data screening unit 104, and an analysis unit 105; the data screening unit 104 is respectively connected with the light splitting unit 102, the spectral parameter monitoring unit 103 and the analysis unit 105; the laser-induced light source 101 is used for outputting laser to the material 106 to be detected so as to excite the material 106 to be detected to generate plasma light; the light splitting unit 102 is configured to split the plasma light and output spectral data; the spectral parameter monitoring unit 103 is configured to monitor spectral parameters of the input-side plasma light and/or the output-side spectral data of the light splitting unit 102; the data screening unit 104 screens and/or corrects the spectrum data according to the spectrum parameters, and outputs effective spectrum data; the analysis unit 105 obtains the composition of the material 106 to be detected according to the effective spectrum data.
Specifically, the embodiment of the present invention further includes a spectral parameter monitoring unit 103 and a data screening unit 104, at the same time of the laser-induced light source 101, the light splitting unit 102 and the analysis unit 105 included in the conventional laser-induced breakdown spectroscopy detection system, wherein the data screening unit 104 is connected to the light splitting unit 102, the spectral parameter monitoring unit 103 and the analysis unit 105, respectively.
In a conventional laser-induced breakdown spectroscopy detection system, a laser-induced light source 101 outputs laser to a material 106 to be detected, and is used for exciting the material 106 to be detected to generate plasma light; the light splitting unit 102 splits the plasma light generated by the material to be detected 106 under the excitation of the laser-induced light source 101 according to the wavelength, and outputs the spectral data after the light splitting.
Based on the above-mentioned conventional laser-induced breakdown spectroscopy detection system, the spectral parameter monitoring unit 103 added in the embodiment of the present invention collects and monitors spectral parameters of the plasma light at the input side and/or the spectral data at the output side of the light splitting unit 102, and sends the collected spectral parameters to the data screening unit 104.
The data screening unit 104 receives the spectral parameters sent by the spectral parameter monitoring unit 103, and also receives the spectral data output by the light splitting unit 102. The data screening unit 104 screens and/or corrects the spectral data according to the spectral parameters, and outputs the screened and/or corrected spectral data as effective spectral data.
The analysis unit 105 receives the effective spectrum data obtained after the data screening unit 104 performs screening and/or correction, and processes the effective spectrum data to obtain a qualitative and quantitative component analysis result of the material to be detected 106.
According to the specific embodiment of the invention, the spectral data are screened according to the spectral parameters of the input side and/or the output side of the light splitting unit 102, so that the interference factor caused by the instability of the light splitting unit 102 is reduced, the stability of the spectral data is effectively improved, and the high-precision component analysis is realized.
Based on the above specific embodiment, the laser-induced breakdown spectroscopy detection system is provided, wherein the laser-induced light source is used for outputting laser to a material to be detected and exciting the material to be detected to generate plasma light. The kind, output mode, modulation means and output wavelength of the laser-induced light source are not limited.
Further, the laser-induced light pipe includes, but is not limited to, at least one of a semiconductor laser, a solid-state laser, a gas laser, such as a Nd: YAG laser, a semiconductor laser coupled out through an optical fiber, and a carbon dioxide laser.
The laser-induced light source includes, but is not limited to, a pulsed output laser and/or a continuous output laser.
The laser-induced light source can also realize a plurality of pulse outputs with adjustable interval time through a power supply or an optical modulation method.
The laser-induced light source also comprises a combination structure of a plurality of lasers controlled by the output equipment with uniform time sequence, and a laser or a laser combination structure capable of outputting multi-wavelength laser according to the excitation requirement of plasma.
Based on any one of the above specific embodiments, the laser-induced breakdown spectroscopy detection system is not limited in the kind, the state and the test environment of the material to be detected. Specifically, the material to be detected can be a solid, liquid, or gas sample, and can be any material capable of generating plasma by laser excitation and performing spectroscopic analysis. And the material to be detected can be a material for detection under the conditions of long distance, vacuum, underwater, high air pressure and the like.
Based on any one of the above specific embodiments, in a laser-induced breakdown spectroscopy detection system, the light splitting unit performs light splitting processing on the plasma light according to wavelength, and outputs spectral data after light splitting. The light splitting unit comprises a plurality of spectral signal detection devices, and the spectral signal detection devices include but are not limited to spectrometers, spectrophotometers, and light splitting modules with CCD/CMOS photosensitive devices and light splitting device structures, such as linear array spectrometers, echelle grating spectrometers, and light splitting modules with CCD or CMOS photosensitive devices combined with linear gratings, blazed gratings or secondary light splitting gratings. The light splitting unit can output spectral data after one-dimensional or two-dimensional light splitting.
Based on any one of the above specific embodiments, the spectrum parameter includes at least one of an energy intensity, a drift condition of the plasma light at the input side of the light splitting unit, and an energy intensity, a signal-to-noise ratio, and a signal-to-multiple ratio of the spectrum data at the output side of the light splitting unit.
Specifically, the spectral parameter monitoring unit is used for monitoring spectral parameters of the plasma light at the input side and/or the spectral data at the output side of the light splitting unit.
Wherein the spectral parameters can include energy intensity and/or drift condition of the plasma light at the input side of the light splitting unit.
The energy intensity of the plasma light includes, but is not limited to, a peak intensity of the plasma light, an intensity combination of a plurality of plasma lights, a signal peak area of the plasma light, a combined signal peak area, and a relative intensity of a signal that is stable with respect to a typical plasma light.
The drift behavior of the plasma light can be monitored by means of the central wavelength of the plasma light. In the specific embodiment of the invention, a halogen lamp or other spectrum signal peaks with fixed wavelength are coupled to the input side of the light splitting unit, the central wavelength is monitored, and the drift condition of the plasma light is obtained. In addition, the narrow-band spectrum can be used for filtering a halogen lamp or other spectrum signals with fixed wavelength, so that the band pass in a certain wavelength range is ensured, and the interference to the plasma light is reduced. In the specific embodiment of the invention, the wavelength range is 1-300 nm.
The spectral parameters can further include at least one of an energy intensity, a signal-to-noise ratio, and a signal-to-noise ratio of the spectral data at the output side of the light splitting unit.
Correspondingly, the energy intensity of the plasma light and the spectrum data is acquired through an energy acquisition device. The energy parameter acquisition device comprises at least one of an energy meter, a four-quadrant photodetector and a photodiode.
Based on any one of the above embodiments, in the laser-induced breakdown spectroscopy detection system, the data screening unit screens the spectral data according to the spectral parameters based on a screening rule, and the screening rule is obtained by a preset or artificial intelligence algorithm.
Specifically, the data screening unit receives the spectral parameters sent by the spectral parameter monitoring unit, and also receives the spectral data output by the light splitting unit. The data screening unit judges whether the spectral parameters accord with screening rules or not, and screens the spectral data according to the judgment result: if the spectral parameters accord with the screening rules, the corresponding spectral data is effective spectral data; and if the spectrum parameters do not accord with the screening rule, rejecting the spectrum data.
The screening rules are rules obtained through manual presetting or rules obtained through an artificial intelligence algorithm. The artificial intelligence algorithm includes, but is not limited to, a neural network algorithm, an adaptive signal filtering algorithm, and a dynamic programming algorithm.
Based on any of the above embodiments, in a laser-induced breakdown spectroscopy detection system, when the spectral parameter is the energy intensity of the plasma light, and the screening rule is the energy mean value fluctuation range of the plasma light, the actual fluctuation value of the plasma light energy is calculated according to the energy intensity by the screening unit; if the actual fluctuation value is within the fluctuation range, the spectrum data is effective spectrum data; otherwise, rejecting the spectral data.
Specifically, when the spectral parameter monitoring unit collects and monitors the energy intensity of the plasma light input to the light splitting unit, and the corresponding screening rule is the energy mean value fluctuation range of the plasma light, the screening unit calculates the actual fluctuation value of the plasma light energy mean value according to the energy intensity of the plasma light collected by the spectral parameter monitoring unit, and determines whether the corresponding spectral data is valid spectral data according to the actual fluctuation value.
For example, the screening rule is that the average fluctuation range of 20 pulses is +/-0.1-10% as a criterion of effective spectral data. And selecting the output energy of the first 20 pulses in the plasma light energy intensity monitored by the spectral parameter monitoring unit according to the screening rule, and calculating the actual fluctuation value of the mean value.
If the actual fluctuation value is 3%, determining the spectral data corresponding to the energy parameter as effective spectral data in a fluctuation range set by the screening rule;
and if the actual fluctuation value is 12% and exceeds the fluctuation range set by the screening rule, rejecting the spectral data corresponding to the energy parameter.
The specific embodiment of the invention discloses a spectral data screening method based on the energy intensity of plasma light, which effectively eliminates instability caused by the fluctuation of the energy of the plasma light and effectively improves the accuracy of component analysis.
Based on any of the above embodiments, in a laser-induced breakdown spectroscopy detection system, when the spectral parameter is energy intensity of the spectral data and the screening rule is an energy mean value fluctuation range of the spectral data, the data screening unit calculates an actual fluctuation value of the energy of the spectral data according to the energy intensity; if the actual fluctuation value is within the fluctuation range, the spectrum data is effective spectrum data; otherwise, rejecting the spectral data.
Specifically, when the spectral parameter monitoring unit collects and monitors the energy intensity of the spectral data output by the light splitting unit, and the corresponding screening rule is the energy mean value fluctuation range of the spectral data, the screening unit calculates the actual fluctuation value of the energy mean value of the spectral data according to the energy intensity of the spectral data collected by the spectral parameter monitoring unit, and determines whether the corresponding spectral data is valid spectral data according to the actual fluctuation value.
For example, the screening rule is that the average fluctuation range of 20 pulses is +/-0.1-10% as a criterion of effective spectral data. And selecting the output energy of the first 20 pulses in the energy intensity of the spectral data monitored by the spectral parameter monitoring unit according to the screening rule, and calculating the actual fluctuation value of the average value.
If the actual fluctuation value is 3%, determining the spectral data corresponding to the energy parameter as effective spectral data in a fluctuation range set by the screening rule;
and if the actual fluctuation value is 12% and exceeds the fluctuation range set by the screening rule, rejecting the spectral data corresponding to the energy parameter.
The specific embodiment of the invention discloses a spectral data screening method based on the energy intensity of spectral data, which effectively eliminates instability caused by noise fluctuation, interference and the like of a light splitting unit and effectively improves the accuracy of component analysis.
Based on any of the above embodiments, in a laser-induced breakdown spectroscopy detection system, when there are a plurality of the spectral parameters, the evaluation criteria corresponding to each of the spectral parameters are combined by an and or logical relationship to form the screening rule.
Specifically, when a plurality of spectral parameters exist, an evaluation standard corresponding to each spectral parameter is established, the evaluation standards are combined through logical relations such as and or, so as to form a screening rule, and the spectral data is screened by applying the screening rule.
The specific embodiment of the invention provides a setting method of the screening rule, provides a rule for screening the spectral data and reducing the influence of interference factors related to the light splitting unit, and is beneficial to improving the stability of the spectral data.
Based on any one of the above specific embodiments, in a laser-induced breakdown spectroscopy detection system, when the spectral parameter is a drift condition of the plasma light, the data screening unit corrects the spectral data according to the drift condition, and the corrected spectral data is effective spectral data.
Specifically, a spectral parameter monitoring unit is used for monitoring the drift condition of the plasma light input into the light splitting unit and sending the drift condition to a data screening unit. And the data screening unit calibrates the central wavelength according to the deviation condition of the plasma light and corrects the spectral data output by the light splitting unit according to the central wavelength. In a specific embodiment of the present invention, the correction of the spectral data is achieved by translation and alignment. And finally, inputting the corrected spectral data as effective data into an analysis unit for analysis.
In the embodiment of the invention, the spectral data is corrected by monitoring the drift condition of the plasma light, so that the instability caused by the wavelength drift of the light splitting unit is eliminated, and the accuracy of component analysis is effectively improved.
Based on any of the above embodiments, in a laser-induced breakdown spectroscopy detection system, when the spectral parameters are the energy intensity of the spectral data, the data screening unit performs statistics on the energy intensity of any wavelength according to the energy intensity of the spectral data to obtain the reference energy of any wavelength, and corrects the spectral data in an equal proportion according to the reference energy, where the corrected spectral data is effective spectral data.
Specifically, a spectral parameter monitoring unit is used for monitoring the energy intensity of the spectral data output by the light splitting unit, and performing statistical analysis on the energy of a certain specific wavelength signal to obtain the reference energy intensity of the specific wavelength signal. When the light splitting unit generates fluctuation, the whole spectrum data is subjected to equal proportion correction according to the reference energy intensity of the specific wavelength signal, and the corrected spectrum data is input into an analysis unit as effective data to be analyzed.
In the embodiment of the invention, the reference energy intensity of the specific wavelength signal is obtained by monitoring the energy intensity of the spectral data, and the spectral data is corrected according to the reference energy intensity, so that the instability caused by the fluctuation of the light splitting unit is eliminated, and the accuracy of component analysis is effectively improved.
Based on any one of the above specific embodiments, a laser-induced breakdown spectroscopy detection system further comprises a preprocessing unit, wherein the preprocessing unit is respectively connected with the data screening unit and the analysis unit; the preprocessing unit is used for preprocessing the effective spectral data;
specifically, the data screening unit sends the screened and/or corrected effective spectrum data to the preprocessing unit, and the preprocessing unit preprocesses the effective spectrum data and sends the preprocessed effective spectrum data to the analysis unit.
Wherein the preprocessing comprises at least one of a denoising algorithm, a wavelength calibration algorithm, an intensity calibration algorithm, a peak searching algorithm and an intensity interpolation algorithm. The denoising algorithm includes, but is not limited to, a wavelet transform algorithm.
In the specific embodiment of the invention, the application of the preprocessing unit further improves the accuracy of component analysis.
Based on any one of the above specific embodiments, the laser-induced breakdown spectroscopy detection system further comprises a collection unit, wherein the collection unit is connected with the light splitting unit; the collecting unit is used for collecting the plasma light.
Specifically, the collection unit is configured to collect plasma light generated by the material to be detected under excitation of the laser-induced light source, and send the collected plasma light to the light splitting unit. The collecting unit is composed of a plurality of optical converging elements, and can realize signal light collection in a wide spectrum range, wherein the optical converging elements include but are not limited to at least one of a micro lens array, an aspheric lens, a spherical lens, an aspheric reflector and a paraboloid reflector.
The spectral range collected by the collection unit is typically in the range of 100 to 600 nm. The spectrum collection can also be carried out in a range of a specific application according to specific needs, for example, when only C element is detected, the spectrum collection can be carried out in a range of 193-193.5 nm; when the test is carried out on several elements of C, S, Si and P, the spectrum collection can be carried out in the range of 190-350 nm.
Based on any one of the above embodiments, the analysis method of the analysis unit includes, but is not limited to, a standard calibration method and a free calibration method.
For better understanding and application of the laser induced breakdown spectroscopy detection system proposed by the present invention, the following examples are given, and the present invention is not limited to the following examples.
The laser induction light source is a pulse laser of Nd-YAG working substance, and can form laser output with single pulse energy of 100mJ, repetition frequency of 10Hz and pulse width of 20 ns. And exciting the laser output by the laser-induced light source on the material to be detected to form plasma, and performing detection analysis. In this example, the material to be detected is a piece of a multielement composition alloy material. The collecting unit is an optical lens which is formed by combining an aspheric reflector and a lens with a focal length of 500mm, and can realize convergence of plasma light emitted by plasma. The light splitting unit is an echelle grating spectrometer of andor company, the grating resolution is 0.02nm, and the spectral range is 200-600 nm. The spectral data output by the light splitting unit is a two-dimensional matrix array, wherein one column is signal intensity, and the other column is corresponding wavelength. The acquisition of spectral data was performed after each laser-induced generation of plasma.
The spectral parameter monitoring unit comprises a photoelectric detector arranged at the entrance of the light splitting unit and is used for detecting the stability of plasma light input into the light splitting unit. The spectral parameter monitoring unit is also coupled with a magnesium lamp at the inlet of the light splitting unit, and filters light through a 280-290nm band-pass filter, so as to ensure that the wavelength of the magnesium light is 285.12nm and monitor the drift of the 285.12nm spectral peak. In addition, the spectral parameter monitoring unit also performs signal-to-noise ratio analysis on the spectral data at the output side of the light splitting unit to obtain the signal-to-noise ratio of the spectral data.
The data screening unit screens and corrects the spectral data through software.
And setting the range of +/-2% fluctuation of the mean value of the first 10 pulses as an evaluation standard of effective spectral data aiming at the energy intensity of plasma light measured by the spectral parameter monitoring unit through a photoelectric detector. If the fluctuation value of the pulse energy corresponding to the obtained spectral data is within the range of +/-2%, judging that the pulse energy accords with the evaluation standard; if the pulse energy is outside the range of ± 2% of the mean, the spectral data is considered invalid data.
And setting a signal-to-noise ratio threshold as an evaluation standard of the effective spectral data aiming at the signal-to-noise ratio of the spectral data measured by the spectral parameter monitoring unit. If the signal-to-noise ratio corresponding to the obtained spectral data is greater than or equal to the signal-to-noise ratio threshold value, judging that the evaluation standard is met; and if the signal-to-noise ratio corresponding to the obtained spectral data is smaller than the signal-to-noise ratio threshold value, the spectral data is regarded as invalid data.
If the energy intensity and the signal-to-noise ratio of the plasma light corresponding to the spectral data both meet the evaluation standard, calibrating the central wavelength according to the drift condition of the acquired spectral peak, and correcting the spectral data output by the light splitting unit according to the central wavelength.
And the component analysis unit performs qualitative and quantitative analysis on the components of the material to be detected by a standard sample calibration data processing method. In the process of establishing a standard sample database and in the process of acquiring spectral data of a material to be detected, processes of acquiring, screening and processing the spectral data through a spectral parameter monitoring unit and a data screening unit are selected; and also used for the data acquisition and analysis of unknown samples in the calibration process of the standard samples.
According to the method, the spectrum data are screened according to the spectrum parameters of the input side and the output side of the light splitting unit, interference factors caused by instability of the light splitting unit are reduced, the stability of the spectrum data is effectively improved, and high-precision component analysis is realized.
Finally, the method of the present application is only a preferred embodiment and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A laser-induced breakdown spectroscopy detection system is characterized by comprising a laser-induced light source, a light splitting unit, a spectral parameter monitoring unit, a data screening unit and an analysis unit;
the data screening unit is respectively connected with the light splitting unit, the spectral parameter monitoring unit and the analysis unit;
the laser induction light source is used for outputting laser to the material to be detected so as to excite the material to be detected to generate plasma light;
the light splitting unit is used for splitting the plasma light and outputting spectral data;
the spectral parameter monitoring unit is used for monitoring spectral parameters of spectral data at the input side of the light splitting unit and/or at the output side of the light splitting unit;
the data screening unit screens and/or corrects the spectrum data according to the spectrum parameters and outputs effective spectrum data;
and the analysis unit acquires the components of the material to be detected according to the effective spectrum data.
2. The system of claim 1, wherein the spectral parameters include at least one of an energy intensity, a drift condition of the plasma light at an input side of the light splitting unit, and an energy intensity, a signal-to-noise ratio, and a signal-to-multiple ratio of spectral data at an output side of the light splitting unit.
3. The system of claim 2, wherein the data filtering unit filters the spectral data according to the spectral parameters based on a filtering rule, wherein the filtering rule is obtained by a preset or artificial intelligence algorithm.
4. The system of claim 3, wherein when the spectral parameter is an energy intensity of the plasma light and the filtering rule is an energy mean value fluctuation range of the plasma light, the data filtering unit calculates an actual fluctuation value of the energy of the plasma light according to the energy intensity;
if the actual fluctuation value is within the fluctuation range, the spectrum data is effective spectrum data; otherwise, rejecting the spectral data.
5. The system according to claim 3, wherein when the spectral parameter is energy intensity of the spectral data and the filtering rule is an energy mean fluctuation range of the spectral data, the data filtering unit calculates an actual fluctuation value of the energy of the spectral data according to the energy intensity;
if the actual fluctuation value is within the fluctuation range, the spectrum data is effective spectrum data; otherwise, rejecting the spectral data.
6. The system according to any one of claims 3 to 5, wherein when a plurality of said spectral parameters are present, the evaluation criterion corresponding to each of said spectral parameters constitutes said screening rule by an AND-OR logical relationship.
7. The system of claim 2, wherein when the spectral parameter is a drift condition of the plasma light, the data filtering unit modifies the spectral data according to the drift condition, and the modified spectral data is valid spectral data.
8. The system according to claim 2, wherein when the spectral parameter is the energy intensity of the spectral data, the data filtering unit performs statistics on the energy intensity of any wavelength according to the energy intensity of the spectral data to obtain the reference energy of any wavelength, and corrects the spectral data in an equal proportion according to the reference energy, and the corrected spectral data is valid spectral data.
9. The system of claim 1, further comprising a preprocessing unit, the preprocessing unit being connected to the data screening unit and the analysis unit, respectively; the preprocessing unit is used for preprocessing the effective spectral data;
the preprocessing comprises at least one of a denoising algorithm, a wavelength calibration algorithm, an intensity calibration algorithm, a peak searching algorithm and an intensity interpolation algorithm.
10. The system of claim 1, further comprising a collection unit, wherein the collection unit is connected with the light splitting unit; the collecting unit is used for collecting the plasma light.
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| CN109709456B (en) * | 2019-01-14 | 2020-12-15 | 无锡杰博仪器科技有限公司 | Data acquisition system of full-digital spectrum analyzer |
| CN109916989B (en) * | 2019-04-01 | 2021-12-10 | 山东博戎伝创信息科技有限公司 | Organic matter detection method, device and system based on artificial intelligence |
| CN111257305B (en) * | 2020-03-31 | 2023-06-27 | 北京农业智能装备技术研究中心 | Two-dimensional correlation LIBS spectrum measurement method, system and device |
| CN113624745B (en) * | 2021-07-01 | 2022-10-18 | 清华大学 | Method for improving long-term stability of laser-induced breakdown spectroscopy based on light spots |
| CN115165847A (en) * | 2022-07-07 | 2022-10-11 | 中煤科工集团上海有限公司 | Coal rock spectrum sensing device and coal mining machine comprising same |
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