CN108195824B - Laser-induced breakdown spectroscopy detection system - Google Patents
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- CN108195824B CN108195824B CN201711307806.5A CN201711307806A CN108195824B CN 108195824 B CN108195824 B CN 108195824B CN 201711307806 A CN201711307806 A CN 201711307806A CN 108195824 B CN108195824 B CN 108195824B
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Abstract
The invention provides a laser-induced breakdown spectroscopy detection system, which comprises a laser-induced light source, a laser parameter monitoring unit, a light splitting unit, a data screening unit and an analysis unit, wherein the laser-induced light source is connected with the laser parameter monitoring unit; the data screening unit is respectively connected with the light splitting unit, the laser parameter monitoring unit and the analysis unit; the laser induction light source is used for outputting laser to excite the material to be detected to generate plasma light; the laser parameter monitoring unit is used for monitoring laser parameters of the laser; the light splitting unit is used for splitting light of the plasma and outputting spectral data; the data screening unit screens and/or corrects the spectrum data according to the laser parameters and outputs effective spectrum data; and the analysis unit acquires the components of the material to be detected according to the effective spectral data. The system provided by the invention reduces the interference of the output end of the light source, improves the stability of spectral data and realizes high-precision component analysis.
Description
Technical Field
The invention relates to the technical field of laser-induced breakdown spectroscopy, in particular to a laser-induced breakdown spectroscopy detection system.
Background
Laser Induced Breakdown Spectroscopy (LIBS) is an elemental composition analysis technique based on the emission spectrum produced by the interaction of Laser light and a material. The laser-induced breakdown spectroscopy technology generally generates laser by a laser-induced light source, ablates on a sample to be detected to generate plasma, collects optical signals of the plasma by a spectrometer (or a spectrophotometer, etc.), and then selects spectral signals of specific wavelengths of elements to be analyzed to process the spectral signals to obtain qualitative and quantitative information of the components of the sample. The technology has the advantages of small destructiveness to the sample, extremely low sample consumption, non-destructive measurement, realization of element analysis of any physical state substance without pretreatment to the sample, wide application range, high analysis speed, small measurement destructiveness, remote non-contact measurement, realization of real-time detection and the like in the measurement process.
At present, research based on the laser-induced breakdown spectroscopy technology mainly focuses on detection in different application fields, different detection methods and processing methods of spectral data.
Aiming at the application in different fields, researchers successively put forward technical schemes of rice variety identification, molten steel component online detection, water body metal pollutant detection, trace element analysis, coal quality analysis and the like based on laser-induced breakdown spectroscopy. And aiming at different laser induction technologies and spectrum detection methods, part of laser induction detection technologies realize signal enhancement and improvement. For example, the analysis system and method based on the two-dimensional energy correlation laser-induced breakdown spectroscopy can more clearly analyze spectral characteristics and improve the detection capability and repeatability of the conventional laser-induced breakdown spectroscopy. For example, a special measuring container is adopted, liquid to be measured passes through the measuring container at a constant speed, then high-energy pulse laser light is focused on the surface of a sample to be measured flowing in the container, plasma spectrum is induced, and meanwhile, an air blower is adopted to increase air circulation on the liquid surface in the container, so that suspended matters or dust generated in measurement can be removed, and the measurement precision is improved. In addition, in the research field of different laser-induced optical structures and data processing algorithms, people successively propose that a dichroic optical device for bidirectional light splitting is adopted to realize transmission and reflection of light with specific wavelength, and a holed lens is selected to realize coaxial transceiving.
The research in all directions has produced a great promotion effect on the development of the laser-induced breakdown spectroscopy technology. However, in the existing laser induced breakdown spectroscopy detection system, there is a problem that the measurement result is uncertain due to the uncertainty of the output of the key component. For example, the energy output by a laser-induced light source typically has a peak-to-peak jitter of 3-10%, and this instability can cause plasma fluctuations. The above uncertainty factors severely limit the accuracy of laser-induced breakdown spectroscopy detection.
Disclosure of Invention
The invention provides a laser-induced breakdown spectroscopy detection system for solving the problem of uncertain measurement results caused by uncertainty of component output in the prior art.
On one hand, the invention provides a laser-induced breakdown spectroscopy detection system, which comprises a laser-induced light source, a laser parameter monitoring unit, a light splitting unit, a data screening unit and an analysis unit; the data screening unit is respectively connected with the light splitting unit, the laser parameter monitoring unit and the analysis unit; the laser induction light source is used for outputting laser to the material to be detected so as to excite the material to be detected to generate plasma light; the laser parameter monitoring unit is used for monitoring laser parameters of the laser induced light source output laser; the light splitting unit is used for splitting the plasma light and outputting spectral data; the data screening unit screens and/or corrects the spectrum data according to the laser parameters and outputs effective spectrum data; and the analysis unit acquires the components of the material to be detected according to the effective spectrum data.
Preferably, the laser parameter monitoring unit comprises at least one of an energy parameter monitoring device, a time domain parameter monitoring device, a spatial parameter monitoring device and a polarization parameter monitoring device; correspondingly, the laser parameters include at least one of energy parameters, time domain parameters, spatial parameters and polarization parameters.
Preferably, the data screening unit screens the spectral data according to the laser parameters based on a screening rule, and the screening rule is obtained by a preset or artificial intelligence algorithm.
Preferably, when the energy parameter in the laser parameter is a plurality of pulse output energies, and the screening rule is a fluctuation range of a preset number of pulse energy mean values, the data screening unit calculates an actual fluctuation value of the preset number of pulse output energy mean values according to the one or more pulse output energies; if the actual fluctuation value is within the fluctuation range, the spectrum data is effective spectrum data; otherwise, rejecting the spectral data.
Preferably, when the spatial parameter in the laser parameter is a spot distribution parameter and the screening rule is a far field energy distribution or a centroid drift range of a spot focus of the laser beam, the data screening unit calculates an actual numerical value of the far field energy distribution or the centroid drift of the spot focus according to the spot distribution parameter; when the screening rule is the near-field energy distribution of laser beam spots or the beam quality factor M2In the drift range, the data screening unit calculates the near-field energy distribution or the beam quality factor M of the light spot according to the light spot distribution parameters2The actual value of (c); if the actual value is within the range, the spectral data is valid spectral data; otherwise, rejecting the spectral data.
Preferably, when the polarization parameter in the laser parameters is a laser polarization degree and the screening rule is a polarization range, if the laser polarization degree is within the polarization range, the data screening unit determines that the spectrum data is valid spectrum data; otherwise, rejecting the spectral data.
Preferably, when the time domain parameter in the laser parameters is a laser pulse width and the screening rule is a pulse width range, if the laser pulse width is within the pulse width range, the data screening unit determines that the spectrum data is valid spectrum data; otherwise, rejecting the spectral data.
Preferably, when there are a plurality of the laser parameters, the evaluation criterion corresponding to each of the laser parameters constitutes the screening rule by an and or logical relationship combination.
Preferably, when an energy parameter in the laser parameters is preset wavelength energy of a plurality of pulses, the data screening unit obtains reference energy according to the preset wavelength energy of the plurality of pulses, the spectral data is corrected in an equal proportion according to the reference energy, and the corrected spectral data is effective spectral data.
Preferably, the device also comprises a collection unit, wherein the collection unit is connected with the light splitting unit; the collecting unit is used for collecting the plasma light.
According to the laser-induced breakdown spectroscopy detection system, the spectral data are screened according to the laser parameters of the laser output by the laser-induced light source, so that the interference factors at the output end of the laser-induced light source are reduced, the stability of the spectral data is effectively improved, and high-precision component analysis is realized.
Drawings
FIG. 1 is a schematic structural diagram of a laser-induced breakdown spectroscopy detection system according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a laser parameter monitoring unit.
Detailed Description
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
Fig. 1 is a schematic structural diagram of a laser-induced breakdown spectroscopy detection system according to an embodiment of the present invention, and as shown in fig. 1, the laser-induced breakdown spectroscopy detection system includes a laser-induced light source 101, a light splitting unit 103, a laser parameter monitoring unit 102, a data screening unit 104, and an analysis unit 105; the data screening unit 104 is connected to the light splitting unit 103, the laser parameter monitoring unit 102 and the analyzing unit 105 respectively; the laser-induced light source 101 is used for outputting laser to the material 106 to be detected so as to excite the material 106 to be detected to generate plasma light; the laser parameter monitoring unit 102 is configured to monitor laser parameters of the laser induced light source 101 outputting laser light; the light splitting unit 103 is configured to split the plasma light and output spectral data; the data screening unit 104 screens and/or corrects the spectrum data according to the laser parameters, and outputs effective spectrum data; the analysis unit 105 obtains the composition of the material 106 to be detected according to the effective spectrum data.
Specifically, the embodiment of the present invention further includes a laser parameter monitoring unit 102 and a data screening unit 104, at the same time of the laser-induced light source 101, the light splitting unit 103 and the analysis unit 105 included in the conventional laser-induced breakdown spectroscopy detection system, wherein the data screening unit 104 is connected to the light splitting unit 103, the laser parameter monitoring unit 102 and the analysis unit 105, respectively.
In a conventional laser-induced breakdown spectroscopy detection system, the laser-induced light source 101 outputs laser to the material 106 to be detected, so as to excite the material 106 to be detected to generate plasma light; the light splitting unit 103 performs light splitting processing on the plasma light generated by the material to be detected 106 under the excitation of the laser-induced light source 101 according to the wavelength, and outputs the spectral data after light splitting.
Based on the conventional laser-induced breakdown spectroscopy detection system, the laser parameter monitoring unit 102 added in the embodiment of the present invention collects and monitors the laser parameters of the laser output by the laser-induced light source 101, and sends the collected laser parameters to the data screening unit 104.
The data screening unit 104 receives the laser parameters sent by the laser parameter monitoring unit 102, and also receives the spectrum data output by the light splitting unit 103. The data screening unit 104 screens and/or corrects the spectral data according to the laser parameters, and outputs the screened and/or corrected spectral data as effective spectral data.
The analysis unit 105 receives the effective spectrum data obtained after the data screening unit 104 performs screening and/or correction, and processes the effective spectrum data to obtain a qualitative and quantitative component analysis result of the material to be detected 106.
According to the specific embodiment of the invention, the spectral data are screened according to the laser parameters of the laser output by the laser-induced light source 101, so that the interference factor of the output end of the laser-induced light source 101 is reduced, the stability of the spectral data is effectively improved, and high-precision component analysis is realized.
Based on the above specific embodiment, a laser-induced breakdown spectroscopy detection system is provided, where the laser-induced light source is configured to output laser to a material to be detected, and excite the material to be detected to generate plasma light. The kind, output mode, modulation means and output wavelength of the laser-induced light source are not limited.
Further, the laser-induced light pipe includes, but is not limited to, at least one of a semiconductor laser, a solid-state laser, a gas laser, such as a Nd: YAG laser, a semiconductor laser coupled out through an optical fiber, and a carbon dioxide laser.
The laser-induced light source includes, but is not limited to, a pulsed output laser and/or a continuous output laser.
The laser-induced light source can also realize a plurality of pulse outputs with adjustable interval time through a power supply or an optical modulation method.
The laser-induced light source also comprises a combination structure of a plurality of lasers controlled by the output equipment with uniform time sequence, and a laser or a laser combination structure capable of outputting multi-wavelength laser according to the excitation requirement of plasma.
Based on any one of the above specific embodiments, the laser-induced breakdown spectroscopy detection system is not limited in the kind, the state and the test environment of the material to be detected. Specifically, the material to be detected can be a solid, liquid, or gas sample, and can be any material capable of generating plasma by laser excitation and performing spectroscopic analysis. And the material to be detected can be a material for detection under the conditions of long distance, vacuum, underwater, high air pressure and the like.
Based on any one of the above specific embodiments, in a laser-induced breakdown spectroscopy detection system, the light splitting unit performs light splitting processing on the plasma light according to wavelength, and outputs spectral data after light splitting. The light splitting unit comprises a plurality of spectral signal detection devices, and the spectral signal detection devices include but are not limited to spectrometers, spectrophotometers, and light splitting modules with CCD/CMOS photosensitive devices and light splitting device structures, such as linear array spectrometers, echelle grating spectrometers, and light splitting modules with CCD or CMOS photosensitive devices combined with linear gratings, blazed gratings or secondary light splitting gratings. The light splitting unit can output spectral data after one-dimensional or two-dimensional light splitting.
Based on any one of the above embodiments, a laser-induced breakdown spectroscopy detection system, wherein the laser parameter monitoring unit includes at least one of an energy parameter monitoring device, a time domain parameter monitoring device, a spatial parameter monitoring device, and a polarization parameter monitoring device; correspondingly, the laser parameters include at least one of energy parameters, time domain parameters, spatial parameters and polarization parameters.
Specifically, the laser parameter monitoring unit collects and monitors laser parameters of the laser light output by the laser-induced light source, and specifically includes at least one of an energy parameter monitoring device, a time domain parameter monitoring device, a spatial parameter monitoring device, and a polarization parameter monitoring device.
Wherein the energy parameter for monitoring by the energy parameter monitoring device includes but is not limited to single pulse energy and energy stability obtained by multiple measurements;
the time domain parameters for monitoring by the time domain parameter monitoring device include but are not limited to pulse delay, delay stability, pulse width and pulse stability;
the spatial parameters for monitoring by the spatial parameter monitoring device include but are not limited to spot size, divergence angle, directivity and beam quality factor;
the polarization parameter monitoring device is used for monitoring the polarization parameters including but not limited to polarization direction and polarization degree.
The embodiment of the invention provides the monitoring range and parameters of the laser parameter monitoring unit, and provides a basis for the screening of spectral data and the elimination of interference factors through reasonable selection and combination of the parameters.
Based on any one of the above specific embodiments, the laser-induced breakdown spectroscopy detection system includes an energy parameter acquisition device, a four-quadrant photodetector, and at least one photodiode; the time domain parameter acquisition device is a photodiode; the space parameter acquisition device comprises at least one of a CCD imaging element, a CMOS imaging element and a four-quadrant detector; the polarization parameter acquisition device comprises a polarization degree tester and/or a light splitting device and a double-energy meter combination device.
Based on any one of the above embodiments, in the laser-induced breakdown spectroscopy detection system, the data screening unit screens the spectral data according to the laser parameters based on a screening rule, and the screening rule is obtained by a preset or artificial intelligence algorithm.
Specifically, the data screening unit receives the laser parameter sent by the laser parameter monitoring unit, and also receives the spectrum data output by the light splitting unit. The data screening unit judges whether the laser parameters meet screening rules or not, and screens the spectral data according to judgment results: if the laser parameters accord with the screening rule, the corresponding spectrum data is effective spectrum data; and if the laser parameters do not accord with the screening rule, rejecting the spectral data.
The screening rules are rules obtained through manual presetting or rules obtained through an artificial intelligence algorithm. The artificial intelligence algorithm includes, but is not limited to, a neural network algorithm, an adaptive signal filtering algorithm, and a dynamic programming algorithm.
Based on any of the above embodiments, in a laser-induced breakdown spectroscopy detection system, when an energy parameter in the laser parameters is a plurality of pulse output energies, and the screening rule is a fluctuation range of a preset number of pulse energy mean values, the data screening unit calculates an actual fluctuation value of the preset number of pulse output energy mean values according to the one or more pulse output energies; if the actual fluctuation value is within the fluctuation range, the spectrum data is effective spectrum data; otherwise, rejecting the spectral data.
Specifically, when the laser parameter monitoring unit collects and monitors the energy parameter of the laser output by the laser-induced light source, and obtains a plurality of pulse output energies, and the corresponding screening rule is a fluctuation range of a preset number of pulse energy mean values, an actual fluctuation value of the preset number of pulse output energy mean values is calculated according to the one or more pulse output energies, and whether the spectral data corresponding to the energy parameter is effective spectral data is judged according to the actual fluctuation value.
For example, the screening rule is that the average fluctuation range of 20 pulses is +/-0.1-10% as a criterion of effective spectral data. And selecting the output energy of the first 20 pulses in the energy parameters monitored by the laser parameter monitoring unit according to the screening rule, and calculating the actual fluctuation value of the average value.
If the actual fluctuation value is 3%, determining the spectral data corresponding to the energy parameter as effective spectral data in a fluctuation range set by the screening rule;
and if the actual fluctuation value is 12% and exceeds the fluctuation range set by the screening rule, rejecting the spectral data corresponding to the energy parameter.
The specific embodiment of the invention discloses a spectral data screening method based on energy parameters, which effectively eliminates instability caused by the jitter of the output energy of a laser-induced light source and effectively improves the accuracy of component analysis.
Based on any one of the above embodiments, in a laser-induced breakdown spectroscopy detection system, when a spatial parameter in the laser parameter is a spot distribution parameter, and the screening rule is a far-field energy distribution of a spot focus of a laser beam or a centroid drift range, the data screening unit calculates an actual numerical value of the far-field energy distribution of the spot focus or the centroid drift according to the spot distribution parameter; when the spatial parameter in the laser parameters is a light spot distribution parameter, the screening rule is the near-field energy distribution of the laser beam light spots or a light beam quality factor M2In the drift range, the data screening unit calculates the near-field energy distribution or the beam quality factor M of the light spot according to the light spot distribution parameters2The actual value of (c); if the actual value is within the range, the spectral data is effective lightSpectral data; otherwise, rejecting the spectral data.
Specifically, when the laser parameter monitoring unit collects and monitors the spatial parameters of the laser output by the laser-induced light source, and obtains the spot distribution parameters of the laser-induced pulses, and the corresponding screening rule is the far-field energy distribution of the spot focus of the laser beam or the centroid drift range, the actual numerical value of the far-field energy distribution or the centroid drift of the spot focus is calculated according to the spot distribution parameters, and whether the spectral data corresponding to the spatial parameters is effective spectral data is judged according to the actual numerical value.
When the laser parameter monitoring unit collects and monitors the spatial parameters of the laser output by the laser-induced light source, and obtains the light spot distribution parameters of the laser-induced pulse, and the corresponding screening rule is the near-field energy distribution of the laser beam light spots or the beam quality factor M2In the drift range, calculating the near-field energy distribution or the light beam quality factor M of the light spot according to the light spot distribution parameters2And judging whether the spectral data corresponding to the spatial parameters are effective spectral data or not according to the actual numerical value.
The specific embodiment of the invention discloses a spectral data screening method based on distribution parameters, which effectively eliminates instability caused by self wave-front phase and intensity distribution distortion of laser output by a laser-induced light source and effectively improves the accuracy of component analysis.
Based on any of the above embodiments, in a laser-induced breakdown spectroscopy detection system, when a polarization parameter in the laser parameters is a laser polarization degree and the screening rule is a polarization range, if the laser polarization degree is within the polarization range, the data screening unit determines that the spectral data is valid spectral data; otherwise, rejecting the spectral data.
Specifically, when the laser parameter monitoring unit collects and monitors the polarization parameters of the laser output by the laser-induced light source, and obtains the laser polarization degree of the laser-induced pulse, and the corresponding screening rule is a polarization range, it is determined whether the spectral data corresponding to the polarization parameters is valid spectral data based on the laser polarization degree.
The specific embodiment of the invention discloses a spectral data screening method based on polarization parameters, which effectively eliminates instability of a laser-induced light source due to polarization and effectively improves the accuracy of component analysis.
Based on the above specific embodiment, in a laser-induced breakdown spectroscopy detection system, when a time domain parameter in the laser parameters is a laser pulse width, and the screening rule is a pulse width range, if the laser pulse width is within the pulse width range, the data screening unit determines that the spectral data is valid spectral data; otherwise, rejecting the spectral data.
Specifically, when the laser parameter monitoring unit collects and monitors time domain parameters of laser output by the laser-induced light source, and obtains a plurality of laser pulse widths, and the corresponding screening rule is a pulse width range, calculating a pulse average width according to the plurality of laser pulse widths, and if the pulse average width is within the pulse width range, determining that spectral data corresponding to the time domain parameters are valid spectral data; otherwise, rejecting the spectral data.
For example, the filtering rule is that the average width of 20 pulses is set to 100ns, and the allowable deviation range is ± 5%. And selecting the output energy of the first 20 pulses in the time domain parameters monitored by the laser parameter monitoring unit according to the screening rule, and calculating the actual average value of the pulse width.
If the actual average value is 102ns, determining that the spectral data corresponding to the time domain parameters are effective spectral data within a deviation range allowed by the screening rule;
and if the actual average value is 112ns and exceeds the deviation range allowed by the screening rule, rejecting the spectral data corresponding to the time domain parameter.
The specific embodiment of the invention discloses a spectral data screening method based on time domain parameters, which effectively eliminates instability caused by polarization of a laser-induced light source and effectively improves the accuracy of component analysis.
Based on any of the above embodiments, in a laser-induced breakdown spectroscopy detection system, when a plurality of laser parameters exist, the evaluation criteria corresponding to each of the laser parameters are combined by an and or logical relationship to form the screening rule.
Specifically, when a plurality of laser parameters exist, an evaluation standard corresponding to each laser parameter is established, the evaluation standards are combined through logical relations such as and or, so as to form a screening rule, and the spectrum data is screened by applying the screening rule.
The specific embodiment of the invention provides a setting method of the screening rule, provides a rule for screening the spectral data and reducing the influence of interference factors at the output end of the laser-induced light source, and is beneficial to improving the stability of the spectral data.
Based on any one of the above specific embodiments, in a laser-induced breakdown spectroscopy detection system, when an energy parameter in the laser parameters is preset wavelength energy of a plurality of pulses, the data screening unit obtains reference energy according to the preset wavelength energy of the plurality of pulses, and corrects the spectral data in an equal proportion according to the reference energy, where the corrected spectral data is effective spectral data.
Specifically, a laser parameter monitoring unit is used for monitoring the energy of a certain specific wavelength signal in a laser pulse and carrying out statistical analysis. When the induced energy fluctuates, the whole spectrum data is subjected to equal proportion correction according to the energy intensity of the specific wavelength signal, and the corrected spectrum data is input into an analysis unit as effective data to be analyzed.
Based on any one of the above specific embodiments, the laser-induced breakdown spectroscopy detection system further comprises a collection unit, wherein the collection unit is connected with the light splitting unit; the collecting unit is used for collecting the plasma light.
Specifically, the collection unit is configured to collect plasma light generated by the material to be detected under excitation of the laser-induced light source, and send the collected plasma light to the light splitting unit. The collecting unit is composed of a plurality of optical converging elements, and can realize signal light collection in a wide spectrum range, wherein the optical converging elements include but are not limited to at least one of a micro lens array, an aspheric lens, a spherical lens, an aspheric reflector and a paraboloid reflector.
The spectral range collected by the collection unit is typically in the range of 100 to 600 nm. The spectrum collection can also be carried out in a range of a specific application according to specific needs, for example, when only C element is detected, the spectrum collection can be carried out in a range of 193-193.5 nm; when the test is carried out on several elements of C, S, Si and P, the spectrum collection can be carried out in the range of 190-350 nm.
For better understanding and application of the laser induced breakdown spectroscopy detection system proposed by the present invention, the following examples are given, and the present invention is not limited to the following examples.
The laser induction light source is a pulse laser of Nd-YAG working substance, and can form laser output with single pulse energy of 100mJ, repetition frequency of 10Hz and pulse width of 20 ns. And exciting the laser output by the laser-induced light source on the material to be detected to form plasma, and performing detection analysis. In this example, the material to be detected is a piece of a multielement composition alloy material. The collecting unit is an optical lens which is formed by combining an aspheric reflector and a lens with a focal length of 500mm, and can realize convergence of plasma light emitted by plasma. The light splitting unit is an echelle grating spectrometer of andor company, the grating resolution is 0.02nm, and the spectral range is 200-600 nm. The spectral data output by the light splitting unit is a two-dimensional matrix array, wherein one column is signal intensity, and the other column is corresponding wavelength. The acquisition of spectral data was performed after each laser-induced generation of plasma.
Fig. 2 is a schematic structural diagram of the laser parameter monitoring unit 102, and as shown in fig. 2, the laser parameter monitoring unit 102 includes an energy meter, a photoelectric probe, a CCD, and a polarization degree analyzer. The laser parameter monitoring unit 102 correspondingly performs the following functions: (1) monitoring the laser energy output by the laser induction light source 101 through an energy meter; (2) detecting the time delay error between the induced laser and the plasma light collected by the collection unit through a photodiode probe; (3) detecting laser beam cross-section light spots, namely near-field distribution, through a scientific CCD (charge coupled device); (4) and analyzing the laser beam splitting polarization degree by a polarization degree analyzer. The laser parameter monitoring unit 102 monitors the laser parameters and transmits the laser parameters to the data screening unit.
The data screening unit screens and/or corrects the spectral data through software. The range of ± 2% of the mean value fluctuation of the first 10 pulses is set as an evaluation criterion of the effective spectral data for the energy value measured by the energy meter by the laser parameter monitoring unit 102. If the fluctuation value of the pulse energy corresponding to the obtained spectral data is within the range of +/-2%, the spectral data is judged to be effective spectral data and is input into a component analysis unit; if the pulse energy is outside the range of ± 2% of the mean, the spectral data is considered invalid data. Aiming at the spot distribution of each collected induction pulse, the centroid of the near-field energy distribution can be calculated, and screening is carried out according to the drift of the centroid. Similar judgment criteria can be established for other parameters, and combined evaluation is carried out through the logical relation of AND or OR to form a screening rule for judging the effectiveness of the spectral data.
The component analysis unit performs qualitative and quantitative analysis on the components of the material to be detected 106 by a data processing method of standard sample calibration. In the process of establishing a standard sample database and in the process of acquiring spectral data of a material to be detected, the processes of acquiring, screening and processing the spectral data through the laser parameter monitoring unit 102 and the data screening unit are selected; and also used for the data acquisition and analysis of unknown samples in the calibration process of the standard samples.
The spectral data are screened according to the laser parameters of the laser output by the laser-induced light source 101, so that the interference factors at the output end of the laser-induced light source 101 are reduced, the stability of the spectral data is effectively improved, and high-precision component analysis is realized.
Finally, the method of the present application is only a preferred embodiment and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. A laser-induced breakdown spectroscopy detection system is characterized by comprising a laser-induced light source, a laser parameter monitoring unit, a light splitting unit, a data screening unit and an analysis unit;
the data screening unit is respectively connected with the light splitting unit, the laser parameter monitoring unit and the analysis unit;
the laser induction light source is used for outputting laser to the material to be detected so as to excite the material to be detected to generate plasma light;
the laser parameter monitoring unit is used for monitoring laser parameters of the laser induced light source output laser;
the light splitting unit is used for splitting the plasma light and outputting spectral data;
the data screening unit screens and/or corrects the spectrum data according to the laser parameters and outputs effective spectrum data;
the analysis unit acquires the components of the material to be detected according to the effective spectrum data;
the laser parameter monitoring unit comprises an energy parameter monitoring device, a time domain parameter monitoring device, a space parameter monitoring device and a polarization parameter monitoring device;
correspondingly, the laser parameters include an energy parameter, a time domain parameter, a spatial parameter and a polarization parameter.
2. The system of claim 1, wherein the data screening unit screens the spectral data according to the laser parameters based on a screening rule, the screening rule being obtained by a preset or artificial intelligence algorithm.
3. The system according to claim 2, wherein when the energy parameter in the laser parameters is a plurality of pulse output energies and the screening rule is a preset number of pulse energy mean value fluctuation ranges, the data screening unit calculates a preset number of actual fluctuation values of the pulse output energy mean value according to the one or more pulse output energies;
if the actual fluctuation value is within the fluctuation range, the spectrum data is effective spectrum data; otherwise, rejecting the spectral data.
4. The system according to claim 2, wherein when the spatial parameter in the laser parameters is a spot distribution parameter and the screening rule is a far field energy distribution or a centroid shift range of a spot focus of the laser beam, the data screening unit calculates an actual value of the far field energy distribution or the centroid shift of the spot focus according to the spot distribution parameter; when the spatial parameter in the laser parameters is a light spot distribution parameter, the screening rule is the near-field energy distribution of the laser beam light spots or a light beam quality factor M2In the drift range, the data screening unit calculates the near-field energy distribution or the beam quality factor M of the light spot according to the light spot distribution parameters2The actual value of (c);
if the actual value is within the range, the spectral data is valid spectral data; otherwise, rejecting the spectral data.
5. The system according to claim 2, wherein when the polarization parameter in the laser parameters is a laser polarization degree and the screening rule is a polarization range, the data screening unit confirms that the spectral data is valid spectral data if the laser polarization degree is within the polarization range; otherwise, rejecting the spectral data.
6. The system according to claim 2, wherein when the temporal parameter in the laser parameters is a laser pulse width and the screening rule is a pulse width range, the data screening unit confirms the spectral data as valid spectral data if the laser pulse width is within the pulse width range; otherwise, rejecting the spectral data.
7. The system according to any one of claims 2 to 6, wherein when there are a plurality of said laser parameters, the evaluation criterion corresponding to each of said laser parameters constitutes said screening rule by an AND-OR logical relationship.
8. The system according to claim 1, wherein when the energy parameter in the laser parameter is a preset wavelength energy of a plurality of pulses, the data screening unit obtains a reference energy according to the preset wavelength energy of the plurality of pulses, and corrects the spectral data according to the reference energy in an equal proportion, wherein the corrected spectral data is valid spectral data.
9. The system of claim 1, further comprising a collection unit, wherein the collection unit is connected with the light splitting unit; the collecting unit is used for collecting the plasma light.
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