CN108020540A - A kind of laser induced breakdown spectroscopy detecting system - Google Patents
A kind of laser induced breakdown spectroscopy detecting system Download PDFInfo
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- CN108020540A CN108020540A CN201711307227.0A CN201711307227A CN108020540A CN 108020540 A CN108020540 A CN 108020540A CN 201711307227 A CN201711307227 A CN 201711307227A CN 108020540 A CN108020540 A CN 108020540A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/718—Laser microanalysis, i.e. with formation of sample plasma
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
Abstract
The present invention provides a kind of laser induced breakdown spectroscopy detecting system, including induced with laser light source, spectrophotometric unit, spectrum parameter monitoring unit, data screening unit and analytic unit；Wherein, data screening unit is connected with spectrophotometric unit, spectrum parameter monitoring unit and analytic unit respectively；Induced with laser light source is used to export laser to material to be detected to excite material to be detected to produce plasma light；Spectrophotometric unit is divided for plasma light, and output spectrum data；Spectrum parameter monitoring unit is used for the spectrum parameter for monitoring spectrophotometric unit input side plasma light and/or outlet side spectroscopic data；Data screening unit is screened and/or corrected to spectroscopic data according to spectrum parameter, and exports effective spectroscopic data；Analytic unit obtains the component of material to be detected according to effective spectroscopic data.System provided by the invention, reduces the unstable caused interference of spectrophotometric unit, improves spectroscopic data stability, realize high-precision constituent analysis.
Description
Technical field
The present invention relates to laser induced breakdown spectroscopy field, more particularly to a kind of laser induced breakdown spectroscopy detection system
System.
Background technology
Laser induced breakdown spectroscopy (Laser Induced Breakdown Spectroscopy, LIBS) is to be based on
A kind of elemental composition analytical technology for the emission spectrum that laser and material interaction produce.Laser induced breakdown spectroscopy is led to
Laser is often produced by induced with laser light source, on sample to be tested ablation produce plasma, pass through spectrometer (or spectrophotometer
Deng) carry out plasma light signal collection, then select the spectral signal of element specific wavelength to be analyzed to be handled, obtain sample
The qualitative, quantitative information of product component.For the technology in measurement process, to the destructive small of sample, sample consumption is extremely low, belongs to
Nondestructive measurement, and without being pre-processed the elemental analysis that can be achieved to any physical state material to sample, have
Applied widely, analyze speed is fast, measurement it is destructive it is small, can long-range non-cpntact measurement and the advantages that can realize real-time detection.
At present, the research based on laser induced breakdown spectroscopy, focuses primarily upon detection to different application field, no
With detection method and in the processing method of spectroscopic data.
For the application of different field, researcher successively proposes the rice varieties mirror based on laser induced breakdown spectroscopy
Not, the technical solution such as the on-line checking of molten steel composition, the detection of water body metal pollutant, trace element analysis and coal analysis.
And for different induced with laser technologies, optical spectrum detecting method, there is the enhancing that fraction of laser light induction detection technique realizes signal
And improvement.Such as a kind of analysis system and method based on the relevant laser induced breakdown spectroscopy of two-dimentional energy, can be more clear
Spectral signature is parsed clearly, improves the detectability and repeatability of conventional laser-induced breakdown spectral method.In another example using special
Different measurement container, allows testing liquid at the uniform velocity by the measurement container, then to focus in container high energy pulse laser and flow
Dynamic sample to be tested surface, induced plasma spectrum, while liquid surface increases air circulation using air blower in container, with
Just the suspended matter or dust produced in measurement is removed, improves measurement accuracy.In addition in different laser induced optical structures and
Data processing algorithm research field, people successively propose to realize to special wavelength light using the dichroic optical device of two-way light splitting
Transmission and reflection, selection have aperture mirror piece to realize coaxial transmitting-receiving.
Development of the research of above-mentioned all directions to laser induced breakdown spectroscopy generates huge impetus.
However, in existing laser induced breakdown spectroscopy detecting system, there is the uncertainty exported due to critical component, cause
The uncertain problem of measurement result.Such as the spectrum that the noise fluctuations of spectrometer itself, external interference, wave length shift cause
Signal fluctuates.Above-mentioned uncertain factor seriously constrains the precision of laser induced breakdown spectroscopy detection.
The content of the invention
The present invention is uncertain to solve measurement result caused by the uncertainty of component output existing in the prior art
A kind of problem, there is provided laser induced breakdown spectroscopy detecting system.
On the one hand, the present invention proposes a kind of laser induced breakdown spectroscopy detecting system, including induced with laser light source, light splitting list
Member, spectrum parameter monitoring unit, data screening unit and analytic unit；Wherein, the data screening unit respectively with described point
Light unit, spectrum parameter monitoring unit are connected with analytic unit；The induced with laser light source, which is used to export to material to be detected, to swash
Light is to excite the material to be detected to produce plasma light；The spectrophotometric unit is used to divide the plasma light
Light, and output spectrum data；The spectrum parameter monitoring unit be used for monitor the spectrophotometric unit input side plasma light and/
Or the spectrum parameter of outlet side spectroscopic data；The data screening unit carries out the spectroscopic data according to the spectrum parameter
Screening and/or amendment, and export effective spectroscopic data；The analytic unit obtains described to be checked according to the effectively spectroscopic data
Measure and monitor the growth of standing timber the component of material.
Preferably, the spectrum parameter includes the energy intensity of the plasma light of the spectrophotometric unit input side, drift
At least one of energy intensity, signal-to-noise ratio and letter multiple proportions of the spectroscopic data of situation and the spectrophotometric unit outlet side.
Preferably, the data screening unit is based on screening rule, according to the spectrum parameter to the spectroscopic data into
Row screening, the screening rule by preset or intelligent algorithm obtain.
Preferably, when the energy intensity that the spectrum parameter is the plasma light, the screening rule is described etc.
It is described that the plasma light is calculated according to the energy intensity according to screening unit during the average energy value fluctuation range of gas ions light
The actual undulating value of energy；If the actual undulating value, in the fluctuation range, the spectroscopic data is effective spectrum number
According to；Otherwise, the spectroscopic data is rejected.
Preferably, when the energy intensity that the spectrum parameter is the spectroscopic data, the screening rule is the spectrum
It is described that the spectroscopic data energy is calculated according to the energy intensity according to screening unit during the average energy value fluctuation range of data
Actual undulating value；If the actual undulating value, in the fluctuation range, the spectroscopic data is effective spectroscopic data；It is no
Then, the spectroscopic data is rejected.
Preferably, when there are during multiple spectrum parameters, the corresponding evaluation criterion of each spectrum parameter by with
Or logical relation combination forms the screening rule.
Preferably, when the spectrum parameter is the drift situation of the plasma light, the data screening unit root
The spectroscopic data is corrected according to the drift situation, the revised spectroscopic data is effective spectroscopic data.
Preferably, when the energy intensity of spectroscopic data described in the spectrum parameter, the data screening unit is according to
The energy intensity of spectroscopic data counts the energy intensity of any of which wavelength, obtains the reference energy of any wavelength
Amount, and the spectroscopic data is corrected according to the reference energy equal proportion, the revised spectroscopic data is effective spectrum number
According to.
Preferably, pretreatment unit is further included, the pretreatment unit is single with the data screening unit and analysis respectively
Member connection；The pretreatment unit is used to pre-process effective spectroscopic data；The pretreatment includes Denoising Algorithm, wavelength school
At least one of quasi- algorithm, intensity calibration algorithm, peak-seeking algorithm and intensity interpolation algorithm.
Preferably, collecting unit is further included, the collecting unit is connected with spectrophotometric unit；The collecting unit is used to gather
The plasma light.
A kind of laser induced breakdown spectroscopy detecting system provided by the invention, according to spectrophotometric unit input side and/or output
The spectrum parameter of side screens spectroscopic data, reduces the unstable caused disturbing factor of spectrophotometric unit itself, effectively carries
The high stability of spectroscopic data, realizes high-precision constituent analysis.
Brief description of the drawings
Fig. 1 is a kind of structure diagram of laser induced breakdown spectroscopy detecting system of the specific embodiment of the invention.
Embodiment
With reference to the accompanying drawings and examples, the embodiment of the present invention is described in further detail.Implement below
Example is used to illustrate the present invention, but is not limited to the scope of the present invention.
Fig. 1 be the specific embodiment of the invention a kind of laser induced breakdown spectroscopy detecting system structure diagram, such as Fig. 1
It is shown, a kind of laser induced breakdown spectroscopy detecting system, including induced with laser light source 101, spectrophotometric unit 102, spectrum parameter prison
Survey unit 103, data screening unit 104 and analytic unit 105；Wherein, the data screening unit 104 respectively with the light splitting
Unit 102, spectrum parameter monitoring unit 103 and analytic unit 105 connect；The induced with laser light source 101 is used for to be detected
Material 106 exports laser to excite the material to be detected 106 to produce plasma light；The spectrophotometric unit 102 is used for institute
Plasma light is stated to be divided, and output spectrum data；The spectrum parameter monitoring unit 103 is used to monitor the light splitting list
The spectrum parameter of first 102 input side plasma lights and/or outlet side spectroscopic data；The data screening unit 104 is according to institute
State spectrum parameter the spectroscopic data is screened and/or corrected, and export effective spectroscopic data；The analytic unit 105
The component of the material 106 to be detected is obtained according to the effectively spectroscopic data.
Specifically, the specific embodiment of the invention is in the induced with laser included by conventional laser induced breakdown spectroscopy detecting system
While light source 101, spectrophotometric unit 102 and analytic unit 105, spectrum parameter monitoring unit 103 and data screening list are further included
Member 104, wherein, the data screening unit 104 respectively with the spectrophotometric unit 102, spectrum parameter monitoring unit 103 and analysis
Unit 105 connects.
Conventional laser induced breakdown spectroscopy detecting system, the induced with laser light source 101 is exported to material 106 to be detected to swash
Light, for exciting the material to be detected 106 to produce plasma light；The spectrophotometric unit 102 is by the material 106 to be detected
The plasma light that produces carries out light-splitting processing according to wavelength under the induced with laser light source 101 excitation, and after exporting light splitting
Spectroscopic data.
Based on above-mentioned conventional laser induced breakdown spectroscopy detecting system, the spectrum parameter that is added in the specific embodiment of the invention
Spectrum parameter of the monitoring unit 103 to the spectroscopic data of the plasma light of 102 input side of spectrophotometric unit and/or outlet side
Monitoring is acquired, and the spectrum parameter gathered is sent to data screening unit 104.
The data screening unit 104 receives the spectrum parameter that the spectrum parameter monitoring unit 103 is sent, and also connects
Receive the spectroscopic data that the spectrophotometric unit 102 exports.The data screening unit 104 is according to the spectrum parameter to described
Spectroscopic data is screened and/or corrected, and screening and/or revised spectroscopic data are exported as effective spectroscopic data.
The analytic unit 105 receives effective light that the data screening unit 104 is screened and/or obtained after being corrected
Modal data, and the effectively spectroscopic data is handled, obtain the constituent analysis of the material 106 to be detected of qualitative, quantitative
As a result.
The specific embodiment of the invention is according to the spectrum parameter of 102 input side of spectrophotometric unit and/or outlet side to spectroscopic data
Screened, reduce the unstable caused disturbing factor of spectrophotometric unit 102 itself, effectively increase the stabilization of spectroscopic data
Property, realize high-precision constituent analysis.
Based on above-mentioned specific embodiment, a kind of laser induced breakdown spectroscopy detecting system, the induced with laser light source is used for
Laser is exported to material to be detected, the excitation material to be detected produces plasma light.The species of the induced with laser light source,
The way of output, modulation means and output wavelength are unrestricted.
Further, the induced with laser light pipe includes but not limited to semiconductor laser, solid state laser, gas laser
At least one of device, such as Nd:YAG laser, the semiconductor laser exported by fiber coupling and carbon dioxide swash
Light device.
The induced with laser light source includes but not limited to pulse output laser and/or continuous output laser.
The induced with laser light source can also realize that interval time is adjustable by power supply or the method for optical modulation
Multiple pulse outputs.
The induced with laser light source further includes the combining structure of the multiple lasers controlled by the output equipment of unified sequential,
And the laser or laser combining structure of output multiwavelength laser are required to according to the excitation of plasma.
Based on any of the above-described specific embodiment, a kind of laser induced breakdown spectroscopy detecting system, the material to be detected
Species, states of matter and test environment are unrestricted.Specifically, the material to be detected can be solid, liquid, gas sample,
Can be it is any plasma can be produced by laser excitation, and implement the material of spectrum analysis.And the material to be detected
It can be the material being detected under the conditions of remote, vacuum, underwater, hyperbar etc..
Based on any of the above-described specific embodiment, a kind of laser induced breakdown spectroscopy detecting system, the spectrophotometric unit is by institute
State plasma light and carry out light-splitting processing according to wavelength, and export the spectroscopic data after light splitting.The spectrophotometric unit includes some
A spectral signal detecting devices, the spectral signal detecting devices include but not limited to spectrometer, spectrophotometer, CCD/CMOS
Sensor devices and the spectral module of light-splitting device structure, such as linear array spectrometer, echelle spectrometer, CCD or CMOS senses
The spectral module that optical device is combined with line grating, balzed grating, or secondary spectro-grating.The spectrophotometric unit can export one-dimensional
Or the spectroscopic data after bidimensional spectroscopy.
Based on any of the above-described specific embodiment, a kind of laser induced breakdown spectroscopy detecting system, the spectrum parameter includes
The spectrum of the energy intensity of the plasma light of the spectrophotometric unit input side, situation of drifting about and the spectrophotometric unit outlet side
At least one of energy intensity, signal-to-noise ratio and letter multiple proportions of data.
Specifically, the spectrum parameter monitoring unit be used for the plasma light of the spectrophotometric unit input side and/or
The spectrum parameter of the spectroscopic data of outlet side is monitored.
Wherein, the spectrum parameter can include the spectrophotometric unit input side plasma light energy intensity and/
Or drift situation.
The energy intensity of the plasma light includes but not limited to the peak strength of plasma light, most plasmas
The intensity combination of light, the signal peak area of plasma light, composite signal peak area and relative to classicalpiston light compared with
For stable signal relative intensity.
The drift situation of the plasma light can be monitored by the centre wavelength of the plasma light.It is of the invention specific
In embodiment, halogen lamp or other spectral signal peaks with fixed wave length, monitoring are coupled in the input side of the spectrophotometric unit
The centre wavelength, obtains the drift situation of the plasma light.Further, it is also possible to by narrow-band spectrum to halogen lamp or its
The spectral signal that he has fixed wave length filters, and ensures the band logical in a wavelength range, reduces to the plasma
The interference of light.In the specific embodiment of the invention, the wave-length coverage is 1-300nm.
The spectrum parameter can also include the energy intensity of spectroscopic data of the spectrophotometric unit outlet side, signal-to-noise ratio and
Believe at least one of multiple proportions.
Accordingly, the energy intensity of the plasma light and spectroscopic data is obtained by electricity energy harvester.The energy
Measuring parameter acquisition devices includes at least one of energy meter, four-quadrant photo detector and photodiode.
Based on any of the above-described specific embodiment, a kind of laser induced breakdown spectroscopy detecting system, the data screening unit
Based on screening rule, the spectroscopic data is screened according to the spectrum parameter, the screening rule is by presetting
Or intelligent algorithm obtains.
Specifically, the data screening unit receives the spectrum parameter that the spectrum parameter monitoring unit is sent, also
Receive the spectroscopic data of the spectrophotometric unit output.Whether spectrum parameter described in the data screening unit judges meets sieve
Choosing rule, and the spectroscopic data is screened according to judging result：If the spectrum parameter meets the screening rule,
Corresponding spectroscopic data is effective spectroscopic data；If the spectrum parameter does not meet the screening rule, the spectrum is rejected
Data.
Wherein, the screening rule is the rule by manually presetting acquisition, or is obtained by intelligent algorithm
Rule.The intelligent algorithm includes but not limited to neural network algorithm, self-adapting signal filtering algorithm and Dynamic Programming
Algorithm.
Based on any of the above-described specific embodiment, a kind of laser induced breakdown spectroscopy detecting system, when the spectrum parameter is
The energy intensity of the plasma light, when the screening rule is the average energy value fluctuation range of the plasma light, institute
State the actual undulating value for calculating the plasma light energy according to the energy intensity according to screening unit；If the actual fluctuation
Value is in the fluctuation range, then the spectroscopic data is effective spectroscopic data；Otherwise, the spectroscopic data is rejected.
Specifically, when the spectrum parameter monitoring unit is to the energy intensity of the plasma light of the input spectrophotometric unit
It is acquired monitoring, and during average energy value fluctuation range that the corresponding screening rule is the plasma light, then it is described
The energy intensity for the plasma light that screening unit is gathered according to the spectrum parameter monitoring unit calculates the plasma light
The actual undulating value of average energy value, and judge whether corresponding spectroscopic data is effective spectroscopic data on this basis.
For example, the average that screening rule is 20 pulses fluctuates the criterion that ± 0.1~10% scope is effective spectroscopic data.
According to preceding 20 pulses in the plasma light energy intensity of above-mentioned screening rule chosen spectrum parameter monitoring unit monitoring
Energy is exported, calculates the actual undulating value of its average.
If the actual undulating value is 3%, in the fluctuation range that the screening rule is set, it is determined that the energy ginseng
The corresponding spectroscopic data of number is effective spectroscopic data；
If the actual undulating value is 12%, beyond the fluctuation range of screening rule setting, then the energy is rejected
The corresponding spectroscopic data of parameter.
The specific embodiment of the invention discloses the spectroscopic data screening technique of the energy intensity based on plasma light, effectively
Eliminate the precision for due to unstability caused by the shake of plasma light energy, effectively increasing constituent analysis.
Based on any of the above-described specific embodiment, a kind of laser induced breakdown spectroscopy detecting system, when the spectrum parameter is
The energy intensity of the spectroscopic data, when the screening rule is the average energy value fluctuation range of the spectroscopic data, the evidence
Screening unit calculates the actual undulating value of the spectroscopic data energy according to the energy intensity；If the actual undulating value is in institute
State in fluctuation range, then the spectroscopic data is effective spectroscopic data；Otherwise, the spectroscopic data is rejected.
Specifically, the energy intensity of the spectroscopic data exported when the spectrum parameter monitoring unit to the spectrophotometric unit into
Row collection monitoring, and the corresponding screening rule be the spectroscopic data average energy value fluctuation range when, then the screening
The energy intensity for the spectroscopic data that unit is gathered according to the spectrum parameter monitoring unit calculates the spectroscopic data average energy value
Actual undulating value, and judge whether corresponding spectroscopic data is effective spectroscopic data on this basis.
For example, the average that screening rule is 20 pulses fluctuates the criterion that ± 0.1~10% scope is effective spectroscopic data.
Preceding 20 pulses output energy in spectroscopic data energy intensity according to the monitoring of above-mentioned screening rule chosen spectrum parameter monitoring unit
Amount, calculates the actual undulating value of its average.
If the actual undulating value is 3%, in the fluctuation range that the screening rule is set, it is determined that the energy ginseng
The corresponding spectroscopic data of number is effective spectroscopic data；
If the actual undulating value is 12%, beyond the fluctuation range of screening rule setting, then the energy is rejected
The corresponding spectroscopic data of parameter.
The specific embodiment of the invention discloses the spectroscopic data screening technique of the energy intensity based on spectroscopic data, effectively picks
Except unstability caused by the reasons such as the noise fluctuations due to spectrophotometric unit itself, interference, constituent analysis is effectively increased
Precision.
Based on any of the above-described specific embodiment, a kind of laser induced breakdown spectroscopy detecting system, when there are multiple light
When composing parameter, the corresponding evaluation criterion of each spectrum parameter by with or logical relation combine the composition screening rule.
Specifically, when the evaluation criterion for there are during multiple spectrum parameters, establishing corresponding each spectrum parameter, and
Above-mentioned multiple evaluation criterions are combined by logical relations such as "AND" and "or", form screening rule, and apply the sieve
Choosing rule screens spectroscopic data.
The specific embodiment of the invention proposes the method to set up of screening rule, for list is screened and be divided to spectroscopic data
The reduction that the relevant disturbing factor of member influences provides rule, has helped to improve the stability of spectroscopic data.
Based on any of the above-described specific embodiment, a kind of laser induced breakdown spectroscopy detecting system, when the spectrum parameter is
During the drift situation of the plasma light, the data screening unit corrects the spectroscopic data according to the drift situation,
The revised spectroscopic data is effective spectroscopic data.
Specifically, the drift feelings of the plasma light of the spectrophotometric unit are inputted using the monitoring of spectrum parameter monitoring unit
Condition, and the drift situation is sent to data screening unit.The data screening unit is according to the inclined of the plasma light
Shift one's love condition, demarcate centre wavelength, and according to the centre wavelength, the spectroscopic data of spectrophotometric unit output is modified.
In the specific embodiment of the invention, pass through amendment of the realization to the spectroscopic data that translate and align.Finally, will be revised described
Spectroscopic data is analyzed as valid data input analytic unit.
In the specific embodiment of the invention, spectroscopic data is modified by the drift situation for monitoring plasma light, is picked
Except unstability caused by the wave length shift due to spectrophotometric unit itself, the precision of constituent analysis is effectively increased.
Based on any of the above-described specific embodiment, a kind of laser induced breakdown spectroscopy detecting system, when the spectrum parameter institute
The energy intensity of spectroscopic data is stated, the data screening unit is according to the energy intensity of the spectroscopic data to any of which wavelength
Energy intensity counted, obtain the reference energy of any wavelength, and institute is corrected according to the reference energy equal proportion
Spectroscopic data is stated, the revised spectroscopic data is effective spectroscopic data.
Specifically, the energy intensity of the spectroscopic data of the spectrophotometric unit output is monitored using spectrum parameter monitoring unit,
And statistical analysis is carried out to the energy of wherein a certain specific wavelength signal, the reference energy for obtaining the specific wavelength signal is strong
Degree.When the spectrophotometric unit itself produces fluctuation, according to the reference energy intensity of the specific wavelength signal to whole spectrum
Data carry out equal proportion amendment, and are analyzed revised spectroscopic data as valid data input analytic unit.
In the specific embodiment of the invention, the energy intensity by monitoring spectroscopic data obtains the reference energy of specific wavelength signal
Intensity is measured, and spectroscopic data is modified with this, eliminates due to unstability caused by the fluctuation of spectrophotometric unit itself, has
Effect improves the precision of constituent analysis.
Based on any of the above-described specific embodiment, a kind of laser induced breakdown spectroscopy detecting system, further includes pretreatment unit,
The pretreatment unit is connected with the data screening unit and analytic unit respectively；The pretreatment unit is used to pre-process institute
State effective spectroscopic data；
Specifically, the data screening unit will pass through screening and/or modified effectively spectroscopic data is sent to pretreatment
Unit, will be by effective spectroscopic data of pretreatment after the pretreatment unit pre-processes effective spectroscopic data
It is sent to analytic unit.
Wherein, the pretreatment includes Denoising Algorithm, wavelength calibration algorithm, intensity calibration algorithm, peak-seeking algorithm and intensity
At least one of interpolation algorithm.The Denoising Algorithm includes but not limited to Wavelet Transformation Algorithm.
In the specific embodiment of the invention, the application of pretreatment unit, further increases the precision of constituent analysis.
Based on any of the above-described specific embodiment, a kind of laser induced breakdown spectroscopy detecting system, further includes collecting unit, institute
Collecting unit is stated to connect with spectrophotometric unit；The collecting unit is used to gather the plasma light.
Specifically, the collecting unit is used for produce the material to be detected under the induced with laser light source excitation
Plasma light collects, and is sent to the spectrophotometric unit.The collecting unit is made of several optical collection elements,
It can realize that the flashlight in wide spectral range is collected, the optical collection element includes but not limited to microlens array, aspheric
At least one of face lens, spherical lens, non-spherical reflector and parabolic mirror.
The spectral region of the collecting unit collection is usually in the range of 100 to 600nm.Can also be according to specific need
Will, when spectral collection is carried out in the scope of some concrete application, such as being detected only for C element, can 193 to
193.5nm spectral collection is carried out in the range of；, can be 190 to 350nm's when being tested for several elements of C, S, Si, P
In the range of carry out spectral collection.
Based on any of the above-described specific embodiment, a kind of laser induced breakdown spectroscopy detecting system, point of the analytic unit
Analysis method includes but not limited to standard specimen scaling method and free scaling method.
In order to better understand with apply a kind of laser induced breakdown spectroscopy detecting system proposed by the present invention, the present invention into
Row the example below, and the present invention is not only limited to the example below.
Induced with laser light source is a Nd:The pulse laser of YAG operation materials, can be formed single pulse energy 100mJ,
The laser output of repetition rate 10Hz, pulse width 20ns.The laser of induced with laser light source output encourages on material to be detected
Plasma is formed, carries out detection analysis.In this example, material to be detected is the alloy material of one piece of multielement component.Collection
Unit be by non-spherical reflector and lens combination that focal length is 500mm into optical lens, can realize to plasma
Body launches the convergence of plasma light.Spectrophotometric unit select be andor companies echelle spectrometer, grating distinguishing
Rate 0.02nm, 200~600nm of spectral region.The spectroscopic data of the spectrophotometric unit output is a two-dimensional matrix array, wherein
One is classified as signal strength, another to be classified as corresponding wavelength.Spectroscopic data is all carried out after each induced with laser produces plasma
Collection.
Spectrum parameter monitoring unit includes the photodetector for being arranged on spectrophotometric unit inlet, for detecting described in input
The stability of the plasma light of spectrophotometric unit.The spectrum parameter monitoring unit is also coupled in the inlet of the spectrophotometric unit
Flash lamp, and filtered by the bandpass filter of one piece of 280-290nm, ensure magnesium light wavelength for 285.12nm spectrum peaks
By monitoring the drift of the 285.12nm spectrum peaks.In addition, the spectrum parameter monitoring unit is also in the spectrophotometric unit
Outlet side carries out Analysis signal-to-noise ratio (SNR) to spectroscopic data, obtains the signal-to-noise ratio of the spectroscopic data.
Data screening unit realizes the screening and amendment to spectroscopic data by software.
The energy intensity of the plasma light measured for spectrum parameter monitoring unit by photodetector, before being set in
The average of 10 pulses fluctuates the evaluation criterion that ± 2% scope is effective spectroscopic data.If the spectroscopic data obtained is corresponding
For the undulating value of pulse energy within ± 2% scope, judgement meets evaluation criterion；If pulse energy is beyond mean value ± 2%
Scope, is considered as invalid data by the spectroscopic data.
The signal-to-noise ratio of the spectroscopic data measured for spectrum parameter monitoring unit, sets snr threshold as effective spectrum number
According to evaluation criterion.If the corresponding signal-to-noise ratio of spectroscopic data obtained is greater than or equal to the snr threshold, judge to meet
Evaluation criterion；If obtain the corresponding signal-to-noise ratio of spectroscopic data be less than the snr threshold, by the spectroscopic data by regarding
For invalid data.
If the energy intensity and signal-to-noise ratio of the corresponding plasma light of spectroscopic data meet above-mentioned evaluation criterion, pin
Drift situation to the spectrum peak collected, demarcates centre wavelength, and according to the centre wavelength, the spectrophotometric unit is exported
Spectroscopic data be modified.
Constituent analysis unit carries out qualitative, quantitative by the data processing method that standard specimen is calibrated to the component of material to be detected
Analysis.During carrying out spectrum data gathering in standard specimen data base procedure is established and to detected materials, select and pass through
Spectrum parameter monitoring unit and data screening unit carry out spectrum data gathering, screening and the process of processing；Standard specimen is also used for determine
The process of data collection and analysis is carried out during mark to unknown sample.
This example screens spectroscopic data according to the spectrum parameter of spectrophotometric unit input side and outlet side, reduces point
Disturbing factor caused by light unit itself is unstable, effectively increases the stability of spectroscopic data, realizes high-precision component
Analysis.
Finally, the present processes are only preferable embodiment, are not intended to limit the scope of the present invention.It is all
Within the spirit and principles in the present invention, any modification, equivalent replacement, improvement and so on, should be included in the protection of the present invention
Within the scope of.
Claims (10)
1. a kind of laser induced breakdown spectroscopy detecting system, it is characterised in that including induced with laser light source, spectrophotometric unit, spectrum
Parameter monitoring unit, data screening unit and analytic unit；
Wherein, the data screening unit is connected with the spectrophotometric unit, spectrum parameter monitoring unit and analytic unit respectively；
The induced with laser light source is used to export laser to material to be detected to excite the material to be detected to produce plasma
Light；
The spectrophotometric unit is used to be divided the plasma light, and output spectrum data；
The spectrum parameter monitoring unit is used to monitor spectrophotometric unit input side plasma light and/or outlet side the spectrum number
According to spectrum parameter；
The data screening unit is screened and/or corrected to the spectroscopic data according to the spectrum parameter, and output has
Imitate spectroscopic data；
The analytic unit obtains the component of the material to be detected according to the effectively spectroscopic data.
2. system according to claim 1, it is characterised in that the spectrum parameter includes the spectrophotometric unit input side
The energy intensity of the spectroscopic data of the energy intensity of plasma light, situation of drifting about and the spectrophotometric unit outlet side, noise
Than and letter at least one of multiple proportions.
3. system according to claim 2, it is characterised in that the data screening unit is based on screening rule, according to institute
Spectrum parameter is stated to screen the spectroscopic data, the screening rule by preset or intelligent algorithm obtain.
4. system according to claim 3, it is characterised in that when the energy that the spectrum parameter is the plasma light
Intensity, the screening rule be the plasma light average energy value fluctuation range when, it is described according to screening unit according to
Energy intensity calculates the actual undulating value of the plasma light energy；
If the actual undulating value, in the fluctuation range, the spectroscopic data is effective spectroscopic data；Otherwise, institute is rejected
State spectroscopic data.
5. system according to claim 3, it is characterised in that when the spectrum parameter is strong for the energy of the spectroscopic data
Degree, the screening rule be the spectroscopic data average energy value fluctuation range when, it is described according to screening unit according to the energy
The actual undulating value of spectroscopic data energy described in Strength co-mputation；
If the actual undulating value, in the fluctuation range, the spectroscopic data is effective spectroscopic data；Otherwise, institute is rejected
State spectroscopic data.
6. the system according to any claim in claim 3 to 5, it is characterised in that when there are multiple spectrum
During parameter, the corresponding evaluation criterion of each spectrum parameter by with or logical relation combine and form the screening rule.
7. system according to claim 2, it is characterised in that when the drift that the spectrum parameter is the plasma light
During situation, the data screening unit corrects the spectroscopic data, the revised spectroscopic data according to the drift situation
For effective spectroscopic data.
8. system according to claim 2, it is characterised in that when the energy of spectroscopic data described in the spectrum parameter is strong
Degree, the data screening unit unite the energy intensity of any of which wavelength according to the energy intensity of the spectroscopic data
Meter, obtains the reference energy of any wavelength, and corrects the spectroscopic data according to the reference energy equal proportion, after amendment
The spectroscopic data be effective spectroscopic data.
9. system according to claim 1, it is characterised in that further include pretreatment unit, the pretreatment unit difference
It is connected with the data screening unit and analytic unit；The pretreatment unit is used to pre-process effective spectroscopic data；
The pretreatment is included in Denoising Algorithm, wavelength calibration algorithm, intensity calibration algorithm, peak-seeking algorithm and intensity interpolation algorithm
At least one.
10. system according to claim 1, it is characterised in that further include collecting unit, the collecting unit and light splitting are single
Member connection；The collecting unit is used to gather the plasma light.
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