CN107932198A - A kind of aspherical mirror processing method for the edge effect that disappears - Google Patents
A kind of aspherical mirror processing method for the edge effect that disappears Download PDFInfo
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- CN107932198A CN107932198A CN201711295260.6A CN201711295260A CN107932198A CN 107932198 A CN107932198 A CN 107932198A CN 201711295260 A CN201711295260 A CN 201711295260A CN 107932198 A CN107932198 A CN 107932198A
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- face
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- circular groove
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention discloses a kind of aspherical mirror processing method for the edge effect that disappears, first prepare the cylindrical mirror embryo that a bore is more than aspherical bore, the first circular groove is first processed in the first end face of cylindrical mirror embryo, then milling shaping is aspherical in first end face, shaping it is aspherical on still remain with the first circular groove of certain depth, annular region of the control on aspherical outside first circular groove in the range of edge effect is produced when aspherical lapping polishes, then the annular region outside aspherical bore is cut off, remaining part is the speculum of no edge effect, the technical solution effectively solves the problems, such as edge effect and stress deformation problem, and it is not easy to produce chipping and chipping at aspherical edge.
Description
Technical field
The present invention relates to a kind of processing method of optical element, and in particular to a kind of processing method of aspherical mirror.
Background technology
With computer numerical control single-point diamond Stone technique, superfine grinding technology, computer control optical surface formation skill
The further development of the aspheric surface processing technologies such as art, at present the manufacturing technology of aspherical optical element oneself from traditional craft modification
Spherical surface develops into computer and controls deterministic process.But either traditional classic polishing technology still calculates
Machine control small abrasive nose polishing technology all there is no fast and effectively method solve the problems, such as non-spherical reflector edge effect.Edge effect
Generation be due to that to remove function maximum in polishing center removal rate, it is and minimum in edge removal rate, therefore alice can be caused
Edge effect.And at edge, bistrique is understood some area and is disengaged with speculum, cause pressure at edge and bistrique and
Pressure when speculum entirely contacts simultaneously differs, and will also result in theoretical calculation and actual processing result and different edge is imitated
Should.
It is serious to hinder face shape error convergence rate just because of the presence of edge effect, it have impact on to a certain extent non-
The efficiency and increase difficulty of processing that sphere is processed.The technical solution that edge effect is handled in traditional technique has three
Kind, 1. directly grind, as the size of abrasive disk is progressively reduced in the outer shifting of most low strap on minute surface, by outside multiple reprocessabilty
The error of edge progressively reduces, this processing method can processing edge on take a substantial amount of time, and due to the use of mill by
Step, which diminishes, easily grinds the broken band that more height rise and fall, and seriously affects the convergence rate of polishing stage edge face shape error；2.
Splicing, the patent of invention of Patent No. 2016109502587 provide a kind of connection scheme, process an internal diameter and aspheric to be processed
The identical annular retaining ring of face bore, an entirety is bonded as by bonding process by retaining ring and workpiece to be processed, during grinding and polishing
Retaining ring bears the influence of edge effect, takes down retaining ring after process finishing, and this processing method can increase the difficulty of processing technology
Degree, and easily produces non-uniform stress distribution on workpiece after bonding, process to be processed terminates to unload after retaining ring due to bonding
The stress release of generation, the specular surface processed produce very big local error, the minute surface processed are repaiied again
Positive local error certainly will extend the process-cycle.3. ball changes non-, patent 201610083727X, which is provided, a kind of eliminates edge effect
Method, originate spherical radius by designing, it is minimum that traditional W-shaped error curve is designed as middle high rim, but this
Mode adds material removal amount, and the spherical surface error curved edge designed in time is minimum, in actual polishing process, error
Curved edge lowermost portion still needs to be thrown bright, so if dealing with improperly or can be influenced by edge effect, still having can
It can handle and make troubles to marginal portion.4. trimming removes, the unnecessary material removal in edge fallen using skive, it is necessary to
Substantial amounts of experimental data is grasped, if without rich experience, it will be difficult to margins of excision is controlled, be easy to cause speculum
Outside surface damage, in addition when using diamond wheel grinding, skive is sent out by the mode glass surface of grinding
Raw brittle fracture, the distribution of aspherical mirror edge stress are concentrated, and the face shape alice at aspherical mirror edge can be caused after grinding.
The content of the invention
It is an object of the invention to provide a kind of method, overcomes deficiency of the prior art, eliminates edge effect and solves at the same time
Certainly stress deformation problem.
The committed step of specific technical solution of the present invention is as follows successively：
A kind of aspherical mirror processing method for the edge effect that disappears, includes the following steps：
Step 1, prepares cylindrical mirror embryo step：Can be with envelope aspherical mirror according to aspherical structural parameters processing
Cylindrical mirror embryo；The wherein described cylindrical mirror embryo is made of first end face, second end face, cylinder side wall, and first end face is used for
Process non-spherical structure, cylindrical mirror embryo diameter be more than aspherical mirror bore, first end face it is parallel with second end face and with
The cylinder side wall of cylindrical mirror embryo is vertical；
Step 2, processes the first circular groove step：The first end face processed is fixed on the turntable of vertical machine upwards；
Wherein vertical machine main-shaft axis is overlapped with vertical machine turret axis, vertical machine turret axis and the axis of cylindrical mirror embryo
Overlap, the first end face of cylindrical mirror embryo is parallel with turntable surface；Boart boart wheel sleeve is installed on vertical machine main shaft,
Skive sleeve diameter is not less than the bore of aspherical mirror, and the first circular groove is processed using boart boart wheel sleeve, processes
It is downward along cylindrical mirror embryo axis direction to continuing behind non-spherical structure position since first end face during the first circular groove
Certain depth is processed, the first circular groove total depth is started at from first end face and is less than cylindrical mirror flake thickness degree；The continuation adds downwards
Work certain depth is the slot bottom of the first circular groove between non-spherical structure position and second end face, it is impossible to beats the first circular groove
Wear, when so may insure that follow-up milling is aspherical, the first circular groove will not all be ground away, milling go out it is aspherical on still protect
Stay the first circular groove；
Step 3, milling non-spherical structure step：Diamond milling emery wheel is installed on vertical machine main shaft, in cylinder
Milling goes out non-spherical structure in the first end face of shape mirror embryo；
Step 4, grinding and polishing step：Non-spherical structure grinding and polishing will be obtained in step 3 into aspherical mirror；
Step 5, trimming take mirror step：Specially：Acquisition aspherical mirror in step 4 is fixed on to the turntable of vertical machine
On, wherein vertical machine main-shaft axis is overlapped with vertical machine turret axis, vertical machine turret axis and cylindrical mirror embryo
Axis overlaps, and the boart boart wheel sleeve is installed on vertical machine main shaft, is extracted out with the boart boart wheel sleeve
Aspherical mirror.
Due to the utilization of above-mentioned technical proposal, technical scheme has following advantages compared with prior art：
1. first processing the first circular groove in first end face, then milling is aspherical again, Buddha's warrior attendant when advantage is later stage trimming
Stone sand wheel case jacket casing directly will not be ground aspherics face, the alice phenomenon for avoiding stress concentration and producing.
It is 2. aspherical being extracted using boart boart wheel sleeve due to processing the first circular groove in first end face in advance
When, either from the first circular groove to second end face, grinding is still ground all without in aspherical light from second end face to first end face
Occur chipping or chipping on face.
3. solving the problems, such as edge effect, it also avoid the stress deformation that tradition splicing retaining ring method is produced because glued and ask
Topic.
Brief description of the drawings
Fig. 1：Disappear the aspherical mirror machining sketch chart of edge effect；
Fig. 2：Second end face and cylindrical bottom plate gluing schematic diagram；
Fig. 3：Process the cylindrical mirror embryo top view of the first circular groove；
Fig. 4：Process the cylindrical mirror proembryo view of the first circular groove, second end face circular groove, non-spherical structure；
Fig. 5：Process the cylindrical mirror embryo sectional view of the first circular groove, second end face circular groove, non-spherical structure；
Wherein 1- cylindrical mirrors embryo；The first circular grooves of 2-；3- second end face circular grooves；4 cylindrical bottom plates；5- cylindrical mirror embryos
Axis；6- non-spherical structures；7- boart boart wheel sleeves；H0- aspherical mirrors center is thick；H1- cylindrical mirror flake thickness degree h1；h2-
First circular groove total depth；H3- second end face circular groove depth；Edge thickness at the aspherical bores of h6-；The aspherical bores of D-；D2-
Skive sleeve diameter.
Embodiment
In order to illustrate more clearly of the technical solution of invention, it is further described with reference to the accompanying drawings and embodiments
Embodiment one：With reference to attached drawing 1, to process bore as D, exemplified by center thickness is the revolution concave aspherical surface speculum of h0
The technical program is discussed in detail,
Step 1：Can be with the cylindrical mirror embryo 1 of envelope aspherical mirror according to aspherical structural parameters processing；It is wherein described
Cylindrical mirror embryo 1 be made of first end face, second end face, cylinder side wall, first end face be used for process non-spherical structure 6, circle
Cylindricality mirror embryo diameter is more than the bore D of aspherical mirror, and first end face is parallel with second end face and cylinder with cylindrical mirror embryo
Side wall is vertical；
Step 2：The first end face processed is fixed on the turntable of vertical machine upwards；Wherein vertical machine main shaft
Axis is overlapped with vertical machine turret axis, and vertical machine turret axis is overlapped with the axis 5 of cylindrical mirror embryo, cylindrical mirror embryo
First end face it is parallel with turntable surface；Boart boart wheel sleeve 7 is installed on vertical machine main shaft, boart boart wheel sleeve
Internal diameter D2 is not less than the bore D of aspherical mirror, the first circular groove 2 is processed using boart boart wheel sleeve, when processing the first circular groove
Since first end face one is processed along 5 direction of cylindrical mirror plumular axis line to continuation is downward after 6 position h6 of non-spherical structure
Depthkeeping degree, starts at the first circular groove total depth h2 from first end face and is less than cylindrical mirror flake thickness degree h1.
Step 3：Diamond milling emery wheel is installed on vertical machine main shaft, in the first end face of cylindrical mirror embryo
Milling goes out non-spherical structure 6；
Step 4：By 6 grinding and polishing of non-spherical structure into aspherical mirror；
Step 5：Aspherical mirror is extracted with the boart boart wheel sleeve；Concretely comprise the following steps：Aspheric will be obtained in step 4
Face mirror is fixed on the turntable of vertical machine, and wherein vertical machine main-shaft axis is overlapped with vertical machine turret axis, vertical machine
Bed turret axis is overlapped with the axis of cylindrical mirror embryo, and the boart boart wheel sleeve is installed on vertical machine main shaft, is used
The boart boart wheel sleeve extracts out aspherical mirror.
The first circular groove is first processed on mirror embryo before milling is aspherical, is had the benefit that, boart boart wheel sleeve is in circle
When processing the first circular groove in cylindricality mirror embryo first end face, since first end face at this time is relatively rough surface, hard rock during lower knife
Wheel sleeve and first end face are not easy chipping when contacting, and have a little chipping also to be gone when follow-up milling is aspherical in time
Remove, non-spherical surface will not be had an impact；And processing when the first circular groove when directly by deep processing to aspherical position
Under do not got through with second end face, so after follow-up milling is aspherical, a ring is just formed outside aspherical mirror bore
Shape region, the region are used to carry edge effect caused by grinding and polishing.
Embodiment two：On the basis of embodiment one, when the first circular groove is processed in the step 2 since first end face along
5 direction of cylindrical mirror plumular axis line is more than or equal to 2mm to processing certain depth downwards is continued after 6 position h6 of non-spherical structure,
It is possible to prevente effectively from aspherical edge chipping so in later stage trimming.
Embodiment three：As shown in attached drawing 1- attached drawings 5, on the basis of embodiment one, in the step 2, stay in first end face
After processing the first circular groove 2, second end face is fixed on vertical machine turntable upwards, adjusts vertical machine turret axis and circle
The axis 5 of cylindricality mirror embryo overlaps, and the second end face of cylindrical mirror embryo is parallel with turntable surface, is existed with above-mentioned skive sleeve
Process second end face circular groove 3 in second end face, 3 depth of second end face circular groove is h3, and when processing will meet h2+h3<H1, i.e., not
First circular groove 2 can be beaten with second end face circular groove 3 and connected.Beaten in the second end face of cylindrical mirror embryo second end face circular groove it
Afterwards, only need to be ground on a small quantity during more convenient follow-up trimming and can be taken off aspherical mirror, while further reduce grinding stress deformation.
Example IV：On the basis of embodiment three, in the step 2, on cylindrical mirror embryo 1 process the first circular groove 2 with
Afterwards after second end face circular groove 3, second end face is glued on the cylindrical bottom plate 4 greater diameter than the bore of aspherical mirror.
The cylinder bottom plate can play a protective role the second end face of cylindrical mirror embryo, prevent from knocking because unexpected during post-production
Touch and damage cylindrical mirror embryo.Cylinder can be removed by the technique such as heating or organic solvent immersion when negated spherical mirror
Bottom plate 4.
Embodiment five：On the basis of example IV, the cylinder bottom plate is equipped with several through holes and justifies with second end face
Groove connects.Second end face circular groove after the glued cylindrical bottom plate of second end face is connected by the through hole of setting with outside air,
Solve the problems, such as that gas varies with temperature the stress deformation produced to aspherical mirror body in second end face circular groove.
The wall thickness of preferable boart boart wheel sleeve is 0.5~2mm.Wall thickness is too wide, and the first circular groove width can be caused big, ground
Polishing bistrique can collide with the annular boundary of the first circular groove during grinding and polishing light, be easy to cause aspherical edge chipping.
In preferable step 4, paraffin is filled in the first circular groove during to non-spherical structure grinding and polishing.Paraffin filling first
After circular groove gap, grinding agent or polishing powder would not be absorbed in the first circular groove；It is possible to prevente effectively from the first circle in polishing process
The grinding agent or polishing powder being absorbed in the line of rabbet joint take to aspherical upper and scratch non-spherical surface by polishing bistrique, simultaneously because paraffin
Molten point is not fixed, glued power also very little, will not produce stress to mirror body around substantially, nor affect on later stage trimming and take mirror.
It is machined in preferable step 5 with the boart boart wheel sleeve set since the second end face of cylindrical mirror embryo
First circular groove；Or second end face is machined to since the first circular groove of cylindrical mirror embryo with the boart boart wheel sleeve set.
After preferable step 4, if first covering dried layer protective film to the non-spherical surface after polishing, then walked
Rapid five.Protective film can be optics protective film, adhesive tape, lacca etc., prevent during trimming that debris falls damage minute surface.
The preferable bore that the aspherical diameter of taking-up is ground to aspherical mirror using cylindrical grinding Carborundum wheel.Trimming takes
The cylinder side wall of aspherical mirror may be not smooth enough after mirror, select cylindrical grinding skive to the cylinder side wall of aspherical mirror into
Row micro cutting, further reduces aspherical mirror side wall cylindricity error.
The present invention method uses edge effect elimination principle for：Edge effect is often concentrated in side during optical manufacturing
In edge a certain range, a cylindrical mirror embryo for being more than aspherical bore is prepared in advance, first in the first end face of cylindrical mirror embryo
Process the first circular groove, then in first end face milling shaping it is aspherical, shaping it is aspherical on still remain with certain depth
The first circular groove, control is on aspherical outside first circular groove in the range of when aspherical lapping polishes, edge effect is produced
Annular region, then by outside aspherical bore annular region cut off, be left part be no edge effect reflection
Mirror, the technical solution effectively solve the problems, such as edge effect and stress deformation problem, and bring and be not easy to produce at aspherical edge
The effect of raw chipping and chipping.
Unspecified part of the present invention belongs to technology well known to those skilled in the art.The technical program can be also used for
Except the aspherical mirror edge effect with endoporus, it is less than or equal to the region processing one of diameter of bore at the aspherical center with endoporus
The circular groove of depthkeeping degree, principle is identical with the technical program, which can effectively solve the edge effect around endoporus and stress
Problem on deformation.The technical program can be used for the aspherical of processing rotational symmetry structure, while can be also used for by being suitably modified
Process off-axis aspheric surface.
Claims (10)
1. a kind of aspherical mirror processing method for the edge effect that disappears, includes the following steps：
Step 1, prepares cylindrical mirror embryo step：Can be with the cylinder of envelope aspherical mirror according to aspherical structural parameters processing
Shape mirror embryo；The wherein described cylindrical mirror embryo is made of first end face, second end face, cylinder side wall, and first end face is used to process
Non-spherical structure, cylindrical mirror embryo diameter are more than the bore of aspherical mirror, and first end face is parallel with second end face and and cylinder
The cylinder side wall of shape mirror embryo is vertical；
Step 2, processes the first circular groove step：The first end face processed is fixed on the turntable of vertical machine upwards；Wherein
Vertical machine main-shaft axis is overlapped with vertical machine turret axis, vertical machine turret axis and the axis weight of cylindrical mirror embryo
Close, the first end face of cylindrical mirror embryo is parallel with turntable surface；Boart boart wheel sleeve is installed on vertical machine main shaft, gold
Hard rock wheel sleeve internal diameter is not less than the bore of aspherical mirror, and the first circular groove is processed using boart boart wheel sleeve, processing the
Add during one circular groove since first end face along cylindrical mirror embryo axis direction to continuation is downward behind non-spherical structure position
Work certain depth, starts at the first circular groove total depth from first end face and is less than cylindrical mirror flake thickness degree；
Step 3, milling non-spherical structure step：Diamond milling emery wheel is installed on vertical machine main shaft, in cylindrical mirror
Milling goes out non-spherical structure in the first end face of embryo；
Step 4, grinding and polishing step：By non-spherical structure grinding and polishing into aspherical mirror；
Step 5, trimming take mirror step：Specially：It is fixed on aspherical mirror is obtained in step 4 on the turntable of vertical machine,
Wherein vertical machine main-shaft axis is overlapped with vertical machine turret axis, vertical machine turret axis and the axis of cylindrical mirror embryo
Overlap, the boart boart wheel sleeve is installed on vertical machine main shaft, aspheric is extracted out with the boart boart wheel sleeve
Face mirror.
A kind of 2. aspherical mirror processing method for the edge effect that disappears according to claim 1, it is characterised in that the step 2
It is follow-up that middle boart boart wheel sleeve is machined to non-spherical structure position since first end face along cylindrical mirror embryo axis direction
The continuous depth processed downwards is not less than 2mm.
A kind of 3. aspherical mirror processing method for the edge effect that disappears according to claim 1, it is characterised in that the step 2
In, after the first circular groove is processed in first end face, second end is processed in second end face with above-mentioned skive sleeve
Face circular groove.
A kind of 4. aspherical mirror processing method for the edge effect that disappears according to claim 3, it is characterised in that the step 2
In, the first circular groove is processed on cylindrical mirror embryo with after rear second end face circular groove, it is big that second end face is glued at a diameter
In on the cylindrical bottom plate of the bore of aspherical mirror.
A kind of 5. aspherical mirror processing method for the edge effect that disappears according to claim 4, it is characterised in that the cylinder
Bottom plate is equipped with several through holes and is connected with second end face circular groove.
6. according to a kind of one of claim 1-5 aspherical mirror processing methods for the edge effect that disappears, it is characterised in that described
The wall thickness of boart boart wheel sleeve is 0.5~2mm.
7. a kind of aspherical mirror processing method for the edge effect that disappears according to claim 6, it is characterised in that right in step 4
During non-spherical structure grinding and polishing paraffin is filled in the first circular groove.
8. a kind of aspherical mirror processing method for the edge effect that disappears according to claim 6, it is characterised in that used in step 5
The boart boart wheel sleeve set is machined to the first circular groove since the second end face of cylindrical mirror embryo；Or with the diamond
Wheel sleeve set is machined to second end face since the first circular groove of cylindrical mirror embryo.
9. a kind of aspherical mirror processing method for the edge effect that disappears according to claim 8, it is characterised in that step 4 terminates
Afterwards, if first covering dried layer protective film to the non-spherical surface after polishing, step 5 is then carried out.
10. a kind of aspherical mirror processing method for the edge effect that disappears according to claim 9, it is characterised in that use cylindrical grinding
The aspherical diameter of taking-up is ground to the bore of aspherical mirror by Carborundum wheel.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111376142A (en) * | 2019-12-25 | 2020-07-07 | 苏州大学 | Numerical control milling, grinding, forming and polishing method and device for large-aperture aspherical mirror |
| CN113021172A (en) * | 2021-03-25 | 2021-06-25 | 中国电子科技集团公司第五十四研究所 | Grinding and polishing method of LTCC substrate with cavity |
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| CN106475866A (en) * | 2016-10-26 | 2017-03-08 | 北京空间机电研究所 | A kind of large-diameter non-spherical reflecting mirror processing method eliminating edge effect |
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| EP1352708A1 (en) * | 2002-04-12 | 2003-10-15 | ESSILOR INTERNATIONAL (Compagnie Générale d'Optique) | Method for polishing an eyeglass lens comprising non-contacting measurement |
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Effective date of registration: 20200716 Address after: 215000 room 1210, building 1, Fenghua Commercial Plaza, Mudu Town, Wuzhong District, Suzhou City, Jiangsu Province Patentee after: Suzhou Bingchen Intellectual Property Operation Co.,Ltd. Address before: 215123 No. 199 benevolence Road, Suzhou Industrial Park, Jiangsu, Suzhou Patentee before: SOOCHOW University Effective date of registration: 20200716 Address after: Room 216, Building No. 6, 1188 West Second Ring Road, Shengze Town, Wujiang District, Suzhou City, Jiangsu Province Patentee after: Suzhou Bontik Intelligent Technology Co.,Ltd. Address before: 215000 room 1210, building 1, Fenghua Commercial Plaza, Mudu Town, Wuzhong District, Suzhou City, Jiangsu Province Patentee before: Suzhou Bingchen Intellectual Property Operation Co.,Ltd. |