CN205643756U - A mirror body for processing rectangle off -axis aspherical mirror - Google Patents

A mirror body for processing rectangle off -axis aspherical mirror Download PDF

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Publication number
CN205643756U
CN205643756U CN201620118094.7U CN201620118094U CN205643756U CN 205643756 U CN205643756 U CN 205643756U CN 201620118094 U CN201620118094 U CN 201620118094U CN 205643756 U CN205643756 U CN 205643756U
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China
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axis
surfacing
mirror
frame
axis aspheric
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CN201620118094.7U
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Chinese (zh)
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陈曦
郭培基
范建彬
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Suzhou University
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Suzhou University
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Abstract

The utility model relates to a mirror body for processing rectangle off -axis aspherical mirror, including rectangle off -axis aspherical mirror base, the cylindrical frame of joining in marriage, cylindrical joining in marriage is equipped with the rectangle through -hole on the frame, and the geometric centre of rectangle off -axis aspherical mirror base equals the off -axis volume of aspheric surface off -axis mirror to the cylindrical probe distance who joins in marriage the frame axial lead, bonds the constitution through the optical cement between rectangle off -axis aspherical mirror base and the rectangle through -hole and turns around symmetrical structure, characterized by: rotary symmetrical structure's after the concatenation upper surface is the concave spherical surface, and its concave spherical surface centre of sphere is on cylindrical cylinder axial lead of joining in marriage the frame, and its sphere bore equals cylindrical joins in marriage the frame diameter, summit that its sphere curvature radius equals rectangle off -axis aspheric surface generating line equation on rather than the generating line equation bore equal 1.414 times of sphere bores departments in the first place, the radius of triangle -shaped's that second point constituted circumscribed circle. The utility model provides an edge effect's the problem that influences among the prior art, improved non - spherical surface machining's efficiency, reduced the processing degree of difficulty.

Description

For processing the mirror body of surfacing of two off-axis aspheric mirror
Technical field
This utility model relates to the turned blank of a kind of optical element, is specifically related to a kind of for processing constant of the cone K < the mirror body of the recessed secondary aspherical mirror off-axis mirrors of 0.
Background technology
The optical system utilizing off-axis aspheric mirror framework have assembly few, without blocking, long-focus, big visual field, broadband, suppression veiling glare ability be strong, modulation transfer function (MTF) high, is the indispensable optics of Space Optical System, astronomy and high precision measuring system.Three mirror reflection system are its most typical application, as the core component of space telescope, can avoid central obscuration, moreover it is possible to reduce system bulk and weight, improve the image quality of system simultaneously.In view of above advantage, the process technology researching and developing new aspherical optical element is always a vital task of optical manufacturing area research.
Off-axis aspheric mirror, as an aspheric part, self does not possess axial symmetry, is a kind of typical freeform optics element, and this shape brings difficulty to processing.Meanwhile, the application of off-axis aspheric mirror determines it needs to reach Ultra-precision Turning requirement, does not the most require nothing more than the surface roughness with nanometer scale, more requires have the micron even surface figure accuracy of submicron.At present, typical aspheric mirror typically uses Diamond Cutting, grind and the technology processing such as polishing, can reach the requirement of Ultra-precision Turning.Single point diamond cutting can realize the single process of optical quality surface, it is not necessary to the subsequent handling that grinding etc. are complicated;Along with sharp knife and the appearance of slow cutter servo, rotational angle for main shaft with the addition of feedback or controls, can realize the highly-efficient processing of off-axis aspheric surface, the manufacturing technology of current aspherical optical element develops into computer from traditional craft amendment spherical surface and controls the deterministic course of processing.
Although the technology of many such advanced person is had been developed at present, but its height relies on the instrument and equipment of accurate labyrinth, it is known that these high-accuracy optical manufacturing instrument and equipment heavy dependence imports again, its equipment price is expensive and equipment uses later maintenance cost high, and the most domestic small part scientific research institution or large enterprise these equipment of strong use process off-axis aspheric surface.Actually in China's optical manufacturing field, most technology paths is used to be still that as shown in Figure 4, according to aspherical equation 11 first produce compared with aspheric surface closest to sphere 12, then precise finiss, the operation such as precise polished are relied on, multicycle revises best-fit sphere and aspheric departure, until finally giving the aspheric surface 13 of Design Requirement Drawing.The index weighing each process crudy is: the convergence rate of face shape error, the control of lower surface Failure Depth, the control i.e. removal of edge effect of edge grind amount.The quality that above-mentioned link solves will directly influence the surface quality of workpiece to be machined, handle these technological difficulties well and be paid close attention to by various countries optical technology personnel the most always.But, in tradition grinding technics, keep pressure constant, removal amount is controlled at the residence time of surface of the work, when bistrique moves to the edge of work and do not exposes edge, owing to the relative process time of marginal area is less than zone line by controlling bistrique, then removal amount reduces, and workpiece occurs " alice ";Otherwise, when bistrique part exposes the edge of work, owing to relative pressure increases, marginal area removal amount is made to increase, there is " turned-down edge " in workpiece, off-axis aspheric mirror especially rectangular aperture off-axis aspheric mirror or polygon bore off-axis aspheric mirror, its edge is linearly distributed, and on straight line each point face shape error do not have rotational symmetry make its edge problem process increasingly difficult.
In addition, recessed aspheric surface K of secondary is < when 0, off-axis aspherical splicing is in the process technology of rotationally symmetrical aspheric surface mother's mirror, first then process best-fit sphere on aspheric surface mother mirror after splicing is modified to aspheric surface by grinding technics, compare closest to sphere revolution aspheric surface mother's mirror material remove distribution curve be W shape, as shown in curve 16 in Fig. 6, material removal is distributed at female aperture of mirror 0.707 minimum, and center and peripheral is high.If not going out limit when the edge ground outside 0.707 band due to the existence mill of edge effect, low strap slowly moves to outward flange, is gradually reduced corresponding removal efficiency also reduces along with moving mill size outside low strap;If mill goes out limit, in edge of work turned-down edge, an error peak i.e. occurs after turned-down edge in the band that edge is the narrowest, needs to spend the corresponding removal efficiency of substantial amounts of energy also to reduce as removed this peak value.Just because of the existence of edge effect, the conventional error outside ball 0.707 band is the most difficult.If the bad meeting of edge treated badly influences the polishing process in later stage, serious obstruction face shape error convergence outside grinding stage workpiece 0.707, have impact on the efficiency of aspherical mirror machining to a certain extent and increase difficulty of processing.
The technical scheme processing edge effect in traditional technique has two kinds, the most directly grind, along with on minute surface, the size of abrasive disk is progressively reduced in the outer shifting of low strap, progressively reduce through the outer peripheral error of repeatedly reprocessabilty, this processing mode can take a substantial amount of time on edge processing, and easily grind, owing to the mill of use progressively diminishes, the broken band that more height rises and falls, have a strong impact on the convergence rate of polishing stage edge face shape error;2. strengthen revolution aspheric surface body diameter size, grind broken band position produced by phase process minute surface 0.707 outward flange alice and occur in outside off-axis aspheric surface mirror position, this processing mode actually machined a big aspheric surface of relative aperture actual requirement bore, with grinding and polishing during edge problem stay on the female mirror outside the sub-mirror of off-axis aspheric surface, obviously increase material cost, extend the process-cycle.
Summary of the invention
Goal of the invention of the present utility model is to provide a kind of mirror body for processing surfacing of two off-axis aspheric mirror, for processing constant of the cone K < the recessed secondary aspherical mirror off-axis mirrors of 0, need not rely on high-precision complex instrument equipment, need not spend special energy to process off-axis aspheric surface mirror marginal error, to solve to be affected, in the grinding stage, the technical problem causing edge of work treatment effeciency low by edge effect.
nullTo achieve the above object of the invention,The technical solution adopted in the utility model is: a kind of mirror body for processing surfacing of two off-axis aspheric mirror,For processing constant of the cone K < the recessed secondary aspherical mirror off-axis mirrors of 0,Including surfacing of two off-axis aspheric mirror base,Frame is joined for surfacing of two off-axis aspheric mirror base being spliced into the cylinder of cyclically symmetric structure,It is positioned at cylinder and joins on frame the rectangular through-hole for nested surfacing of two off-axis aspheric mirror,Wherein the geometric center of surfacing of two off-axis aspheric mirror base joins the horizontal range off-axis amount equal to aspheric surface off-axis mirrors of frame axial line to cylinder,Cyclically symmetric structure is constituted by optical cement bonding between surfacing of two off-axis aspheric mirror base and rectangular through-hole,The upper surface of spliced cyclically symmetric structure is concave spherical surface,Its concave sphere's center is joined on the cylinder axial line of frame in cylinder,Its sphere bore joins frame diameter equal to cylinder,Its sphere curvature radius is equal to the first point at 1.414 times of sphere bores equal to the summit of surfacing of two off-axis aspheric bus equation with bore on its bus equation、The radius of the circumscribed circle of the triangle that second point is constituted.
In technique scheme, described first and second point are two points being located at turn around axle both sides on revolution aspheric surface bus at 1.414D bore respectively.
In technique scheme, described cylinder is joined the rectangular through-hole on frame and contacts a width of 0.5 to 1 millimeter of gap between surfacing of two off-axis aspheric mirror base.
Further technical scheme, including the plastic tab for positioning and control splicing seams gap, described plastic tab is bonded in the contacting in gap of surfacing of two off-axis aspheric mirror base and rectangular through-hole by optical cement.
Preferably technical scheme, described rectangular through-hole sidewall intersects and is provided with manhole at rib, and the axial line of its manhole is positioned at rectangular through-hole sidewall and intersects on rib.
Further technical scheme, joins frame bottom be provided with cylindrical backing plate with cylinder bottom surfacing of two off-axis aspheric mirror base.
Described cylindrical backing plate be thickness be the glass pane plate of 3 to 6 millimeters.
Owing to technique scheme is used, this utility model compared with prior art has the advantage that
The upper surface of the mirror body being conventionally used to processing surfacing of two off-axis aspheric mirror is best-fit sphere, add man-hour by attrition process aspheric surface, will be closest to sphere change into aspheric during, owing to edge effect impact makes edge of work removal amount be difficult to control to, serious obstruction face shape error convergence, have impact on the efficiency of aspherical mirror machining to a certain extent, add difficulty of processing;This utility model is by arranging upper surface for initial sphere, overcome above-mentioned technical problem, achieve and be independent of high-precision complex instrument equipment, need not spend special energy to process 0.707 band outward flange error, only need to process initial sphere described in the utility model, the technique effect of later stage optical manufacturing, the processing of particularly suitable rotationally symmetrical recessed secondary aspherical off-axis mirrors optical element can be quickly completed according to traditional technique.
The technology prejudice that it is the initial sphere of target design processing with least material removal in conventional machining process that this utility model overcomes, the initial sphere material removal amount designed by the way of deliberately increasing material removal amount presents the distribution being gradually increased from edge to center on whole workpiece;Coordinate high workpiece rotational frequency easy to do to remove it with large-size abrasive disk, overcome tradition processing and revise W shape error band and be easily generated broken band by edge effect and affected the technical problem that error convergence is slow.
Accompanying drawing explanation
Accompanying drawing 1 is the structural representation that in this utility model embodiment, off-axis aspheric mirror base is spliced into cylindrical revolving body;
Accompanying drawing 2 is spliced revolving body front view;
Accompanying drawing 3 intersects manhole schematic diagram on rib for rectangular through-hole;
Accompanying drawing 4 be in prior art aspheric surface closest to face schematic diagram and aspheric surface graph of a relation;
Accompanying drawing 5 is upper surface sphere and the aspheric surface graph of a relation of cyclically symmetric structure in embodiment;
Accompanying drawing 6 is that in embodiment and prior art, distribution curve comparison diagram removed by material.
Wherein: 1-surfacing of two off-axis aspheric mirror base;2-cylinder joins frame;3-rectangular through-hole;4-measures off axis;5-summit;6-the first point;7-second point;1.414 times of sphere bores of 8-;9-cylindrical backing plate;10-manhole;11-aspheric surface bus;12-best-fit sphere;13-aspheric surface;14-cylinder joins frame diameter;The upper surface sphere of the cyclically symmetric structure obtained by aspheric surface bus in 15-OXZ coordinate system;Distribution curve removed by the material of 16-prior art;Distribution curve removed by the material of 17-embodiment.
Detailed description of the invention
Below in conjunction with the accompanying drawings and this utility model is further described by embodiment:
Embodiment: surfacing of two off-axis aspheric structural parameters: R=407.6mm, K=-0.48, the long 120mm of off-axis mirrors, off-axis mirrors width 86mm, measure 30mm off axis;According to off-axis mirrors daughter structure design revolution precursor structure diameter 230mm;The radius of curvature of the upper surface sphere of cyclically symmetric structure can be tried to achieve by 2 constituted circumscribed circles at aspheric surface summit and 1.414D bore i.e. 325.22mm bore in aspheric surface, and being calculated the initial radius of a ball is 415.558mm.Thus obtain the mirror body for processing surfacing of two off-axis aspheric mirror of the present embodiment.
Use the mirror body processing off-axis aspheric mirror of the present embodiment.Initial sphere processing aspheric material removal distribution curve is as shown in Fig. 6 17, and its distribution curve presents Gaussian distribution, and comparing aspheric surface bus equation removal amount PV is 165.2 microns;Processing a bore is 230mm, the initial concave spherical surface of radius of curvature 415.6mm;Processing three convex spherical abrasive disks, radius of curvature 411.5mm, bore is respectively 60mm, 40mm, 25mm, and abrasive disk is carved with wide 2mm, the circular groove of deep 2mm;Initial ball is ground by the corundum first selecting granularity to be W28, workpiece rotational frequency 50 revs/min, and abrasive disk motion mode was the reciprocating motion in minute surface radially direction, and bus measured by contourograph, instructs processing with error distribution on bus;When curve of error PV < 30 micron, the corundum using granularity W14 instead grinds, workpiece rotational frequency 20 revs/min, and abrasive disk motion mode was the reciprocating motion in minute surface radially direction, and bus measured by contourograph, instructs processing with error distribution on bus;When curve of error PV < 5 micron, the corundum fixed point using granularity W10 instead is ground, and workpiece rotational frequency is zero, and asymmetry local error is revised in the surface error distributed data guidance measuring the children parts whole daughter of acquisition in aspheric surface primary and secondary consubstantiality structure with contourograph;When PV < 3 micron, the corundum of granularity W10 grinds, and workpiece rotational frequency is 12 revs/min, makes material surface uniform depth everywhere remove 10 microns, can ensure that whole minute surface material damage layer everywhere is evenly distributed unanimously to greatest extent by this operation;The final aspheric surface grinding acquisition face shape error PV < 3 micron.After proceeding to the polishing stage, select cerium rouge, polyurethane polishing mould, rotating speed 50 revs/min, whole revolution aspheric surface primary and secondary consubstantiality structural plane is removed 10 microns;Rotating speed is zero afterwards, is directed to off-axis aspheric surface children parts local and repaiies throwing, until PV < 0.5 micron time, off-axis mirrors is taken out from aspheric surface mother's mirror, repair off-axis aspheric surface to Design Requirement Drawing value.

Claims (6)

  1. null1. the mirror body being used for processing surfacing of two off-axis aspheric mirror,For processing constant of the cone K < the recessed secondary aspherical mirror off-axis mirrors of 0,Including surfacing of two off-axis aspheric mirror base (1),Frame (2) is joined for surfacing of two off-axis aspheric mirror base being spliced into the cylinder of cyclically symmetric structure,It is positioned at cylinder and joins on frame the rectangular through-hole (3) for nested surfacing of two off-axis aspheric mirror,Wherein the geometric center of surfacing of two off-axis aspheric mirror base joins the horizontal range off-axis amount (4) equal to aspheric surface off-axis mirrors of frame axial line to cylinder,Cyclically symmetric structure is constituted by optical cement bonding between surfacing of two off-axis aspheric mirror base and rectangular through-hole,It is characterized in that: the upper surface of spliced cyclically symmetric structure is concave spherical surface,Its concave sphere's center is joined on the cylinder axial line of frame in cylinder,Its sphere bore joins frame diameter equal to cylinder,Its sphere curvature radius equal to bore on summit (5) and its bus equation of surfacing of two off-axis aspheric bus equation equal to first point (6) at 1.414 times of sphere bore (8) places、The radius of the circumscribed circle of the triangle that second point (7) is constituted.
  2. Mirror body for processing surfacing of two off-axis aspheric mirror the most according to claim 1, it is characterised in that: described cylinder is joined the rectangular through-hole (3) on frame (2) and contacts a width of 0.5 to 1 millimeter of gap between surfacing of two off-axis aspheric mirror base.
  3. Mirror body for processing surfacing of two off-axis aspheric mirror the most according to claim 1, it is characterized in that: include the plastic tab for positioning and control splicing seams gap, described plastic tab is bonded in the contacting in gap of surfacing of two off-axis aspheric mirror base (1) and rectangular through-hole (3) by optical cement.
  4. 4. according to the mirror body for processing surfacing of two off-axis aspheric mirror one of claims 1 to 3 Suo Shu, it is characterized in that: described rectangular through-hole (3) sidewall intersects and is provided with manhole (10) at rib, and the axial line of its manhole is positioned at rectangular through-hole sidewall and intersects on rib.
  5. Mirror body for processing surfacing of two off-axis aspheric mirror the most according to claim 1 and 2, it is characterised in that: surfacing of two off-axis aspheric mirror base (1) bottom and cylinder are joined frame (2) bottom and are provided with cylindrical backing plate (9).
  6. Mirror body for processing surfacing of two off-axis aspheric mirror the most according to claim 5, it is characterised in that: described cylindrical backing plate (9) be thickness be the glass pane plate of 3 to 6 millimeters.
CN201620118094.7U 2016-02-06 2016-02-06 A mirror body for processing rectangle off -axis aspherical mirror Expired - Fee Related CN205643756U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107797169A (en) * 2017-11-16 2018-03-13 中国科学院长春光学精密机械与物理研究所 Off axis reflector mirror and its processing method
CN107932198A (en) * 2017-12-08 2018-04-20 苏州大学 A kind of aspherical mirror processing method for the edge effect that disappears

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107797169A (en) * 2017-11-16 2018-03-13 中国科学院长春光学精密机械与物理研究所 Off axis reflector mirror and its processing method
CN107797169B (en) * 2017-11-16 2019-01-11 中国科学院长春光学精密机械与物理研究所 Off axis reflector mirror and its processing method
CN107932198A (en) * 2017-12-08 2018-04-20 苏州大学 A kind of aspherical mirror processing method for the edge effect that disappears
CN107932198B (en) * 2017-12-08 2019-02-15 苏州大学 A kind of aspherical mirror processing method for the edge effect that disappears

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