CN106475866A - A kind of large-diameter non-spherical reflecting mirror processing method eliminating edge effect - Google Patents
A kind of large-diameter non-spherical reflecting mirror processing method eliminating edge effect Download PDFInfo
- Publication number
- CN106475866A CN106475866A CN201610950258.7A CN201610950258A CN106475866A CN 106475866 A CN106475866 A CN 106475866A CN 201610950258 A CN201610950258 A CN 201610950258A CN 106475866 A CN106475866 A CN 106475866A
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- China
- Prior art keywords
- reflecting mirror
- mirror
- outer shroud
- edge effect
- base
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/0031—Machines having several working posts; Feeding and manipulating devices
- B24B13/0037—Machines having several working posts; Feeding and manipulating devices the lenses being worked by different tools, e.g. for rough-grinding, fine-grinding, polishing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/005—Blocking means, chucks or the like; Alignment devices
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
A kind of large-diameter non-spherical reflecting mirror processing method eliminating edge effect, around large-diameter non-spherical reflecting mirror, bonding one encloses the spelling ring of material identical with reflecting mirror, carry out optical manufacturing and detection again, remove spelling ring after optical manufacturing and detection, you can eliminate edge effect.Processing edge effect is removed using this kind of spelling ring, does not affect the normal carrying of reflecting mirror and processing detection.During reflecting mirror handling, its hoisting tooling will not only touch reflecting mirror with reflecting mirror contact portion but also touch bonding outer ring portion.In reflecting mirror processing and detection process, due to needing to support, so its supporting tool will not only touch reflecting mirror with reflecting mirror contact portion but also touch bonding outer ring portion.
Description
Technical field
The present invention relates to a kind of edge effect removing method.
Background technology
Develop to big visual field, wide spectrum, high-resolution direction with space optical remote sensor, the non-spherical reflector of needs
Bore is also increasing, difficulty of processing also more and more higher.Especially when processing bore and being increasing, edge effect also can be therewith
Expand and more and more obvious.And there is no fast and effectively method to solve the problems, such as large-diameter non-spherical reflecting mirror edge effect at present.
The generation of edge effect is maximum in polishing center clearance due to removing function, and minimum in edge clearance,
The edge effect of alice therefore can be caused.And at edge, bistrique is understood some area and disengaged with reflecting mirror, cause on side
The pressure when pressure of edge is entirely contacted with bistrique and reflecting mirror simultaneously differs, and will also result in Theoretical Calculation and reality processing result
Not identical edge effect.
Elimination edge effect method commonly used at present is with small abrasive nose, being determined property of edge to be processed.But this side
Method working (machining) efficiency is low, and processing effect is poor.Because it has part bistrique can rotate reflecting mirror in processing, so can cause to remove
Function is inaccurate, is therefore extremely difficult to the purpose that definitiveness eliminates edge effect.Also due to its remove function inaccurate it is impossible to
Accurately eliminate edge effect, therefore usually need circulation that processing is repeated, can cause extend process time so that edge effect
Cannot effectively remove.
Content of the invention
The technical problem to be solved in the present invention is：Overcome deficiency of the prior art, there is provided a kind of elimination edge effect
Large-diameter non-spherical reflecting mirror processing method, eliminate edge effect, do not affect simultaneously large-diameter non-spherical reflecting mirror carrying,
Processing and inspection.
The technical solution adopted in the present invention is：A kind of large-diameter non-spherical reflecting mirror processing side eliminating edge effect
Method is as follows including step：
Step one, the outer shroud of making material identical with reflecting mirror, outer shroud inner radii is consistent with reflecting mirror radius；To reflect
Mirror is pasted onto outer shroud inner ring, and reflecting mirror and outer shroud collectively constitute mirror base；
Step 2, by step one obtain mirror base be hoisted on three coordinate measuring machine be detected, make during handling
Hoist tool stretch into the pressure pin length of reflecting mirror bottom and mirror base connection gap to the distance at outer shroud edge consistent, Rigger
The pallet of tool is contacted with mirror base connection gap it is ensured that reflecting mirror and outer shroud are together by handling；
Step 3, mirror base is carried out with supported at three point, supporting point position group triangularity, supporting plane is located at the connection of mirror base
At gap；Using three coordinate measuring machine, mirror base plane is detected, measurement obtains the surface configuration of mirror base；
Step 4, the ideally-reflecting mirror surface configuration being obtained the mirror obtaining in step 3 base surface configuration with requirement are carried out
Contrast obtains attrition process amount, using planetary gear, mirror base upper surface is ground, and abrasive disk is coincide with mirror base surface configuration, makes
Surface figure accuracy PV value≤2 μm of the mirror base after must grinding；
Step 5, the mirror base to acquisition in step 4 are polished, so that mirror base face shape can enter interferometer range, making
Obtain the interference fringe of mirror base with interferometer measurement, obtain the surface configuration of mirror base according to interference fringe；
Step 6, the ideally-reflecting mirror surface configuration being obtained the mirror obtaining in step 5 base surface configuration with requirement are carried out
Contrast obtains polishing amount, using planetary gear, mirror base upper surface is polished with processing, polishing disk and mirror base surface profiles；
Step 7, separation reflecting mirror and outer shroud, obtain the reflecting mirror eliminating edge effect.
Described outer shroud Internal and external cycle semidiameter is more than or equal to 50mm, and outer shroud reaches 1 μm with the flatness of reflecting mirror.
In described step 3, the measurement spacing between each test point of three coordinate measuring machine is 2mm.
In described step 5, during interferometer measurement, interferometer sets the measurement diameter of mirror base so that mirror base
Interference fringe can be obtained in the measurement diameter range setting.
In described step one, paste outer shroud and reflecting mirror using Colophonium paraffin.
In described step 7, using gasoline, the bonding portion of outer shroud and reflecting mirror is softened.
Present invention advantage compared with prior art is：
(1) present invention removal edge effect effect is good：Due to being using spelling ring mode, after leaving and taking enough spelling rings, make it
Edge effect, all in spelling ring, directly removes spelling ring so that not having completely in clear aperture so after machining
Edge effect, does not result in part edge effect and removes and situation that another part edge effect does not remove；
(2) present invention removes edge effect efficiency high：It is using small abrasive nose opposite side because tradition removes edge effect mode
Being determined property of edge is processed, but due to it, in processing, small abrasive nose can partly rotate mirror edge, so can cause
Except function is inaccurate.Therefore can cause processing repeatedly so that process time extends, working (machining) efficiency reduces；
(3) present invention removes edge effect and is difficult reflecting mirror to be caused damage：Remove flash trimming with another kind of traditional method trimming
Edge effect is compared, and does not result in reflecting mirror and damages.Controlling feed velocity, depth of cut side because traditional trimming removes edge effect
Face, needs to be grasped substantial amounts of experimental data, without rich experience it will be difficult to be controlled to margins of excision, easily makes
Become surface damage outside reflecting mirror.And take spelling ring to remove edge effect, because it is to spell ring not causing reality to contact with reflecting mirror,
So will not cause to reflecting mirror to damage.
Brief description
Fig. 1 is machined mirrors schematic diagram of the present invention.
Fig. 2 is handling reflecting mirror schematic diagram of the present invention.
Fig. 3 supports reflecting mirror schematic diagram for the present invention.
Fig. 4 adds the top view of outer shroud for reflecting mirror of the present invention.
Specific embodiment
The generation of edge effect is maximum in polishing center clearance due to removing function, and minimum in edge clearance,
The edge effect of alice therefore can be caused.As shown in figure 1, and at edge, bistrique 2 is understood some area and is departed from reflecting mirror 1
Contact, pressure when causing the pressure at edge entirely to be contacted with bistrique 2 and reflecting mirror 1 is simultaneously differed, and will also result in theoretical meter
Calculate and the not identical edge effect of reality processing result.
As shown in Figure 2 to 4, a kind of large-diameter non-spherical reflecting mirror processing method eliminating edge effect, including step
As follows：
Step one, making reflecting mirror 1 and outer shroud 3, outer shroud 3 is made using material identical with reflecting mirror 1.In outer shroud 3
Outer radii difference is more than or equal to 50mm, then outer shroud 3 and reflecting mirror 1 is bonded together with Colophonium paraffin, outer shroud 3 and reflecting mirror
1 flatness will reach 1 μm.Reflecting mirror 1 and outer shroud 3 have collectively constituted mirror base；
Step 2, reflecting mirror 1 and outer shroud 3 are carried out handling using special hoist tool 4.In handling reflecting mirror, need
Hoist tool 4 was both contacted with reflecting mirror 1 with reflecting mirror 1 contact portion and had contacted with the outer shroud 3 of bonding, so ensure that
Outer shroud 3 does not settle so that lifting safety greatly increases it is therefore desirable to design suitable hoist tool 4.Hoist tool 4 bottom
The length stretching into the pressure pin of reflecting mirror 1 bottom will keep substantially uniform with the distance of cemented side seam and outer shroud 3 edge, to guarantee handling
Instrument 4 pallet can be by reflecting mirror 1 and outer shroud 3 part together handling；
Step 3, reflecting mirror 1 and the common handling of outer shroud 3 are detected on three coordinate measuring machine.Between every bit
Measurement spacing is 2mm, and measurement obtains the surface configuration of mirror base.When being detected with three coordinate measuring machine, need to reflecting mirror 1
Carry out supported at three point 5, it supports 5 positions also will ensure both to have supported reflecting mirror 1 itself, also supports outer shroud 3 part, so can prevent
The sedimentation of outer shroud 3 part and deformation impact to three coordinate measurements.Fig. 3 is shown in by concrete support 5 schematic diagrams.To reflecting mirror 1 and outer
Ring 3 carries out during three coordinate measurements the selection it should be noted that to measurement track.Due to three seats are being carried out to large-diameter non-spherical reflecting mirror
During mark detection, the track passed by of popping one's head in is straight line and is spaced same distance, necessarily has some to put outside reflecting mirror 1 bonding to be touched
The slotted section of ring 3, at this moment needs to be manually adjusted the point of the trajectories contact of measurement point to gap so as to be avoided gap,
Can guarantee that the degree of accuracy of measurement；
Step 4, the ideally-reflecting mirror surface configuration being obtained the mirror obtaining in step 3 base surface configuration with requirement are carried out
Contrast obtains attrition process amount, and reflecting mirror 1 and the common handling of outer shroud 3 are carried out attrition process on intelligent grinder robot.Plus
The support in man-hour is similarly supported at three point 5, and it supports 5 positions also will ensure both to have supported reflecting mirror 1 itself, also supports outer shroud 3
Part, so can prevent the sedimentation of outer shroud 3 part and deformation from attrition process is impacted.In attrition process, using planetary gear
It is processed, abrasive disk substantially will coincide with mirror surface shape so that surface figure accuracy PV value≤2 μ of mirror base after grinding
m；
Step 5, after completing attrition process, fast polishing to be carried out to reflecting mirror so that its face shape can enter interference
Instrument range, obtains the interference fringe of mirror base using interferometer measurement, obtains the surface configuration of mirror base according to interference fringe.Carry out
The aspherical degree of large-diameter non-spherical reflecting mirror during interferometer measurement, will be compensated using compensator.Interferometer is being carried out to mirror base
During detection, due to now through attrition process, necessarily having created edge effect, and the impact due to edge effect, in mirror
Base edge is carried out during interferometer detection it is impossible to enter interferometer range, therefore, the interferogram at mirror base edge can be caused irregular not
Together.At this moment it is accomplished by the mirror base scope being able to detect that is carried out with a setting, interferometer sets the measurement diameter of mirror base,
Make mirror base can obtain interference fringe in the measurement diameter range setting, outer shroud 3 is foreclosed, and need in processing
The interferogram of outer shroud 3 is simulated, in order to process.
Step 6, after interferometer measurement, will be preferable anti-with require to obtain for the mirror obtaining in step 5 base surface configuration
Penetrate mirror surface configuration and carry out contrast acquisition polishing amount, enter the polishing stage.Support during polishing is similarly
Supported at three point 5, it supports 5 positions also will ensure both to have supported reflecting mirror 1 itself, also supports outer shroud 3 part, so can prevent outer shroud
3 part sedimentations and deformation impact to polishing.In polishing, it is processed using planetary gear, polishing disk will be with
Mirror surface shape is substantially identical；
Step 7, machine after, by reflecting mirror 1 and outer shroud 3 carry out separate, typically using gasoline, bonding portion is entered
Row softens, and then takes off outer shroud 3, and is carried out in time.Complete edge effect in large-diameter non-spherical reflecting mirror processing
Elimination.
The edge effect that the method for the present invention adopts eliminates principle：
Due to edge effect can be produced at mirror base edge with current large-diameter non-spherical reflecting mirror process technology, and edge
Effect is often concentrated in edge certain limit.We make an outer shroud in the range of edge effect produces, by itself and mirror
Base is bonded together.When processing, mirror base and outer shroud are processed simultaneously.After machining, edge effect will be produced
Outer shroud takes off, and remaining part does not as have the reflecting mirror of edge effect.
Unspecified part of the present invention belongs to technology as well known to those skilled in the art.
Claims (6)
1. a kind of large-diameter non-spherical reflecting mirror processing method eliminating edge effect is it is characterised in that inclusion step is as follows：
Step one, the outer shroud (3) of making material identical with reflecting mirror (1), outer shroud (3) inner radii and reflecting mirror (1) radius one
Cause；Reflecting mirror (1) is pasted onto outer shroud (3) inner ring, reflecting mirror (1) and outer shroud (3) collectively constitute mirror base；
Step 2, by step one obtain mirror base be hoisted on three coordinate measuring machine be detected, used in handling process
The pressure pin length that hoist tool (4) stretches into reflecting mirror (1) bottom is consistent to the distance at outer shroud (3) edge with mirror base connection gap,
The pallet of hoist tool (4) is contacted with mirror base connection gap it is ensured that reflecting mirror (1) and outer shroud (3) are together by handling；
Step 3, mirror base is carried out with supported at three point (5), supporting point position group triangularity, supporting plane is located at the connection of mirror base
At gap；Using three coordinate measuring machine, mirror base plane is detected, measurement obtains the surface configuration of mirror base；
Step 4, the ideally-reflecting mirror surface configuration being obtained the mirror obtaining in step 3 base surface configuration with requirement are contrasted
Obtain attrition process amount, using planetary gear, mirror base upper surface is ground, abrasive disk is coincide so that grinding with mirror base surface configuration
Surface figure accuracy PV value≤2 μm of the mirror base after mill；
Step 5, the mirror base to acquisition in step 4 are polished so that mirror base face shape can enter interferometer range, using dry
Interferometer measurement obtains the interference fringe of mirror base, obtains the surface configuration of mirror base according to interference fringe；
Step 6, the ideally-reflecting mirror surface configuration being obtained the mirror obtaining in step 5 base surface configuration with requirement are contrasted
Obtain polishing amount, processing, polishing disk and mirror base surface profiles are polished using planetary gear to mirror base upper surface；
Step 7, separation reflecting mirror (1) and outer shroud (3), obtain the reflecting mirror (1) eliminating edge effect.
2. a kind of large-diameter non-spherical reflecting mirror processing method eliminating edge effect according to claim 1, its feature
It is：Described outer shroud (3) Internal and external cycle semidiameter is more than or equal to 50mm, and outer shroud (3) reaches 1 μm with the flatness of reflecting mirror (1).
3. a kind of large-diameter non-spherical reflecting mirror processing method eliminating edge effect according to claim 1 and 2, it is special
Levy and be：In described step 3, the measurement spacing between each test point of three coordinate measuring machine is 2mm.
4. a kind of large-diameter non-spherical reflecting mirror processing method eliminating edge effect according to claim 3, its feature
It is：In described step 5, during interferometer measurement, interferometer sets the measurement diameter of mirror base so that mirror base exists
Interference fringe can be obtained in the measurement diameter range setting.
5. a kind of large-diameter non-spherical reflecting mirror processing method eliminating edge effect according to claim 1 and 2, it is special
Levy and be：In described step one, paste outer shroud (3) and reflecting mirror (1) using Colophonium paraffin.
6. a kind of large-diameter non-spherical reflecting mirror processing method eliminating edge effect according to claim 5, its feature
It is：In described step 7, using gasoline, the bonding portion of outer shroud (3) and reflecting mirror (1) is softened.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610950258.7A CN106475866A (en) | 2016-10-26 | 2016-10-26 | A kind of large-diameter non-spherical reflecting mirror processing method eliminating edge effect |
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| CN201610950258.7A CN106475866A (en) | 2016-10-26 | 2016-10-26 | A kind of large-diameter non-spherical reflecting mirror processing method eliminating edge effect |
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| CN201610950258.7A Pending CN106475866A (en) | 2016-10-26 | 2016-10-26 | A kind of large-diameter non-spherical reflecting mirror processing method eliminating edge effect |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107932198A (en) * | 2017-12-08 | 2018-04-20 | 苏州大学 | A kind of aspherical mirror processing method for the edge effect that disappears |
| CN108127484A (en) * | 2017-11-29 | 2018-06-08 | 北京空间机电研究所 | A kind of mirror optics processing method being bonded using splicing ring and processing unit (plant) |
| CN109676469A (en) * | 2019-01-30 | 2019-04-26 | 成都精密光学工程研究中心 | A kind of optical element polishing tool and polishing method |
| CN110842658A (en) * | 2019-11-28 | 2020-02-28 | 中国科学院长春光学精密机械与物理研究所 | Combined processing method for controlling edge effect of irregular clear aperture reflector |
| CN112497022A (en) * | 2020-11-28 | 2021-03-16 | 厦门理工学院 | Polishing auxiliary supporting device for edge effect control |
| CN113070777A (en) * | 2021-04-08 | 2021-07-06 | 中国工程物理研究院激光聚变研究中心 | Component edge effect suppression tool and method |
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| US20030224701A1 (en) * | 2002-04-12 | 2003-12-04 | Laurent Guillermin | Process for grinding an ophthalmic lens, including a plotting operation without contact |
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| CN105150049A (en) * | 2015-08-13 | 2015-12-16 | 中科院南京天文仪器有限公司 | Nesting process machining method for off-axis reflection type optical part |
| CN105643374A (en) * | 2016-02-06 | 2016-06-08 | 苏州大学 | Processing method for aspherical mirror |
| CN105690187A (en) * | 2016-02-06 | 2016-06-22 | 苏州大学 | Method for machining off-axis aspherical mirror |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US20030224701A1 (en) * | 2002-04-12 | 2003-12-04 | Laurent Guillermin | Process for grinding an ophthalmic lens, including a plotting operation without contact |
| CN104385064A (en) * | 2014-10-14 | 2015-03-04 | 中国科学院光电技术研究所 | Large-aperture plane machining method by combining numerical control small tool and annular polishing machine |
| CN105150049A (en) * | 2015-08-13 | 2015-12-16 | 中科院南京天文仪器有限公司 | Nesting process machining method for off-axis reflection type optical part |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108127484A (en) * | 2017-11-29 | 2018-06-08 | 北京空间机电研究所 | A kind of mirror optics processing method being bonded using splicing ring and processing unit (plant) |
| CN108127484B (en) * | 2017-11-29 | 2019-09-06 | 北京空间机电研究所 | A kind of mirror optics processing method and processing unit (plant) using splicing ring bonding |
| CN107932198A (en) * | 2017-12-08 | 2018-04-20 | 苏州大学 | A kind of aspherical mirror processing method for the edge effect that disappears |
| CN107932198B (en) * | 2017-12-08 | 2019-02-15 | 苏州大学 | A kind of aspherical mirror processing method for the edge effect that disappears |
| CN109676469A (en) * | 2019-01-30 | 2019-04-26 | 成都精密光学工程研究中心 | A kind of optical element polishing tool and polishing method |
| CN110842658A (en) * | 2019-11-28 | 2020-02-28 | 中国科学院长春光学精密机械与物理研究所 | Combined processing method for controlling edge effect of irregular clear aperture reflector |
| CN112497022A (en) * | 2020-11-28 | 2021-03-16 | 厦门理工学院 | Polishing auxiliary supporting device for edge effect control |
| CN112497022B (en) * | 2020-11-28 | 2022-05-17 | 厦门理工学院 | Polishing auxiliary supporting device for edge effect control |
| CN113070777A (en) * | 2021-04-08 | 2021-07-06 | 中国工程物理研究院激光聚变研究中心 | Component edge effect suppression tool and method |
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Application publication date: 20170308 |
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