CN107907433A - Nano impress representative region is micro- to rotate leveling platform - Google Patents
Nano impress representative region is micro- to rotate leveling platform Download PDFInfo
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- CN107907433A CN107907433A CN201711132451.0A CN201711132451A CN107907433A CN 107907433 A CN107907433 A CN 107907433A CN 201711132451 A CN201711132451 A CN 201711132451A CN 107907433 A CN107907433 A CN 107907433A
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- 239000007788 liquid Substances 0.000 claims abstract description 29
- 238000000034 method Methods 0.000 claims abstract description 16
- 238000000227 grinding Methods 0.000 claims abstract description 12
- 238000005498 polishing Methods 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 claims description 15
- 235000007164 Oryza sativa Nutrition 0.000 claims description 3
- 235000009566 rice Nutrition 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 2
- 239000010935 stainless steel Substances 0.000 claims description 2
- 240000007594 Oryza sativa Species 0.000 claims 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 abstract description 2
- 238000012360 testing method Methods 0.000 description 19
- 238000002474 experimental method Methods 0.000 description 9
- 238000007373 indentation Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 239000002131 composite material Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 229910001005 Ni3Al Inorganic materials 0.000 description 2
- 241000209094 Oryza Species 0.000 description 2
- 210000001188 articular cartilage Anatomy 0.000 description 2
- 210000000988 bone and bone Anatomy 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000005342 ion exchange Methods 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 201000004569 Blindness Diseases 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 210000000845 cartilage Anatomy 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000002068 genetic effect Effects 0.000 description 1
- 208000010727 head pressing Diseases 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 210000001519 tissue Anatomy 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/40—Investigating hardness or rebound hardness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0058—Kind of property studied
- G01N2203/0076—Hardness, compressibility or resistance to crushing
- G01N2203/0078—Hardness, compressibility or resistance to crushing using indentation
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
The invention discloses the micro- rotation leveling platform of nano impress representative region, tested sample is embedded in the sample cup for liquid of rust free, wear resistance, after grinding and polishing so that tested sample upper surface is with sample cup for liquid top edge with high, both it ensure that tested sample had higher stiffness, it is not plastically deformed during holding out against afterwards, can also quickly obtains the plane of high quality；Conventional torque screwdriver is mainly used for preventing from destroying equipment due to exerting oneself excessive, the changing of the relative positions will not occur in the loading procedure of micro-nano-scale for the sample after holding out against jackscrew with it, by normal screws knife continue to hold out against jackscrew can microcell produce the rotation of minute yardstick without causing whole clamp structure to loosen；The present invention is realized by mechanical leveling method, of low cost, small, and be engaged with the chuck of nano-hardness tester, save space just with popularization.
Description
Technical field
Representative region of the present invention is micro- to rotate the leveling relatives of Taiwan compatriots living on the Mainland in a kind of micro nanometer mechanics test clamping device, is particularly
Sample rotating clamping device when passing through nano-indentation experiment, belongs to nano-indentation experiment technical field.
Background technology
In nano-indentation experiment, loading-depth curve is obtained by pressure head pressing in sample, this curve embodies material
The information enriched in process of press in.The elasticity modulus and hardness of these information extraction material properties, such as material can be passed through.
The contact area of remaining impression is obtained when conventional hardness is tested by being observed after experiment, to calculate material property, and nano impress
Method be by contact depth conversion into contact area, then one is how accurately to measure this contact the problem of important
Area.The pressure head used for typical Nanoindentation, such as Berkovich pressure heads, spherical indenter and columned pressure head, this
The characteristics of a little pressure heads is that the shape of pressure head is all geometry self similarity.When the vertical specimen surface of tested sample, instrument passes through pressure
Change in depth during entering can directly convert the change of contact area.
In fact, conventional nano indentation test pressing direction is to ignore with error caused by specimen surface out of plumb
's.Although all nano-hardness testers are furnished with grain-clamping table, it acts as fixed tested sample, reduces the shadow that structural compliance is brought
Ring.This kind of grain-clamping table using when need the column sample after grinding and polishing being put into, then hold out against lateral jackscrew, for by machinery plus
This kind of grain-clamping table fixed effect of typical cylindrical sample that work obtains is fine, and tested cylinder sample upper surface is vertical with pressing direction,
Deviation is minimum, the requirement of composite Nano impression test.For the test specimen conventionally used for nano-indentation experiment, it is often necessary to pass through machinery
Polish to obtain column sample.Manually or automatically rub proofness caused by quality of finish and measured material heterogeneity is non-homogeneous
Property, all determine that the test specimen conventionally used for nano-indentation experiment has certain deviation compared with standard specimen, not as being machined
The sample standard arrived.For this non-type cylindric sample, load the unilateral laterally and tightly propped folder that nano-hardness tester provides
After holding platform, the angle of test plane can not be adjusted.This to need to focus on repeatedly when testing plane reconnaissance, influences work effect
Rate.Most of all, when test plane out of plumb pressing direction can bring error.The blessing platform that Conventional nano impression is equipped with is to this
Class error is helpless.For heterogeneous material, since different phase rub proofnesses are different in material, even if in the ideal case,
Grinding and polishing by high quality is also that can not obtain the plane of completely vertical pressing direction.
Simplification of the nano impress method as complexity abrasion, it can be estimated that the binding ability of film and base material, test interface knot
Close intensity and friction coefficient.It can be used for mechanical property of the fibre reinforced composites under various temperature conditionss and cut-in characteristic
Between relation, analysis viscoplasticity to be included in resistance influence.With developing rapidly for Compound Material Engineering, people are increasingly closed
Its surface of the heart and inside it is microcosmic so that receive see mechanical property.Nano impress can be tested as a kind of experimental method in situ
For judging interface phase morphology, during yet with the linearly increasing load mode of maneuvering load and the constant load mode of load, pressure head
Tested sample depth non-constant value is included in, out of phase load is streaked and is unable to quantitative comparison, so being included in by feedback control constant
The method of depth, carrys out quantitative study load change, and then the zone of influence of substrate effect and border effect, i.e. interface are judged by it
Phase, then carry out indentation test, it is possible to obtain out of phase test result.The blindness of indentation test is avoided, improves reality
The confidence level of result is tested, the composite material each component performance that no border effect influences can be obtained.Realizing this key problem in technology is
How tested region is adjusted so that the vertical pressing direction of typical tested region.Bone-calcified bone sample is canonical biometric composite wood
Material, since its water content is big and the material property of composite construction, surface angle is extremely complex.In an experiment around sample
Moisture retention liquid small change is had due to its ion concentration of volatilizing, this makes its ion exchange between sample be to carry out always
, this ion exchange can cause the sample different tissues phase water content after grinding and polishing to change so that measured surface can occur
Regionality is uncertain to be increased or reduces, and also allows for tested sample and often occurs different planes in zonule.Such as
Fruit needs to carry out the impression or cut perpendicular to specimen surface in these planes, and one can adjust small region plane inclination angle
Method be essential.
It is as follows that conventional leveling technology is used for nano-indentation experiment main problem：
1st, specimen shape changes after conventional damascene process grinding and polishing, can not both ensure that tested sample has higher stiffness,
It is plastically deformed after holding out against, can not quickly obtains the plane of high quality.
2nd, in conventional nano impression test, usually ignore the influence that specimen surface inclination angle is brought, directly pass through compression distance
Convert geometry self similarity pressure head contact area so that the elasticity modulus of measurement is less than normal.
What the 3rd, conventional single point contacted holds out against mode, can not hold out against the non-type cylindrical sample of shape so that sample exists
Larger rotation occurs in the chuck of nano-hardness tester, the surface angle of generation significantly increases measurement error.
4th, conventional nano mark test method can not ensure the vertical pressing direction of tested representative region, sample and pressure in high precision
The relative altitude of head can change, and can not realize permanent depth cut.
5th, it can not be realized the leveling of typical minute yardstick region conventionally by the rotation of simple and mechanical control, it is vertically pressed into
Direction.
6th, conventional leveling platform, expensive and volume is larger, is unsuitable for being placed in nano-hardness tester small space and carrying out
Leveling.
The content of the invention
A kind of leveling technology for being used for permanent depth cut of the present invention can be sent out to avoid sample in the chuck of nano-hardness tester
It is raw to rotate, the plane perpendicular to pressing direction is not only obtained, but also cause the larger sample of arbitrary surfaces waviness by micrometer
The region of degree can also vertical pressing direction, solve the error that the pre- pressing direction out of plumb of tested plane is brought, it is more so that logical
The permanent depth cut of Nanoindentation progress is crossed to be possibly realized.It is of the invention to be realized by mechanical leveling method, of low cost, volume
It is small, and be combined with the chuck of nano-hardness tester, save space just with popularization.
The key of the present invention is embedded in the sample cup for liquid of rust free, wear resistance in by tested sample, so that tested sample after grinding and polishing
Upper surface, with height, both ensure that tested sample has higher stiffness, did not moulded during holding out against afterwards with sample cup for liquid top edge
Property deformation, can also quickly obtain the plane of high quality；Conventional torque screwdriver is mainly used for preventing excessive and broken due to exerting oneself
The changing of the relative positions will not occur in the loading procedure of micro-nano-scale, pass through normal screws for bad equipment, the sample after holding out against jackscrew with it
Knife continues to hold out against jackscrew can be so that microcell produces the rotation of minute yardstick without causing whole clamp structure to loosen；When adjustment A,
B is with after high, when finely tuning C, D, since AB directions are vertical with CD directions, A, B will not genetic method phase the mutual changing of the relative positions, and C, D can be with
Three, AB directions jackscrew is axis, and micro- rotation is done in the plane of vertical A, B midpoint, until C, D are same high with height, that is, A, B, C, D.
The technical solution adopted in the present invention is：Nano impress representative region is micro- to rotate leveling platform, and stage body (1) is leveling platform
Agent structure, be provided with that the first cylinder is accommodating hole (2), and stage body (1) and the first cylinder are accommodating at the central upper portion of stage body (1)
Be provided with first through hole (3) and fourth hole (6) between hole (2), the radial direction of first through hole (3) and the radial direction of fourth hole (6) it
Between angle be 90 °；The second through hole of through hole (4), the are equipped with the first of first through hole (3) offside the cylinder accommodating hole (2)
Three through holes (5), fifth hole (7) and the 6th through hole are equipped with first cylinder accommodating hole (2) of fourth hole (6) offside
(8).Rectangle is provided with the lower central of stage body (1) and houses hole (10), rectangle house be evenly equipped with hole (10) four through holes (11,
12,13,14).Screw thread is evenly equipped with through hole, screw thread is engaged with jackscrew.Sample cup for liquid (15) is placed on the accommodating hole of the first cylinder
(2) in, sample cup for liquid (15) and the first cylinder accommodating hole (2) are contour, and the overall diameter of sample cup for liquid (15) is described less than the first cylinder
The interior diameter of hole (2) is put, the central upper portion of sample cup for liquid (15) is provided with the second cylinder and houses hole (16).At the center of cover board (17)
It is provided with observation window (18)；The four corners of stage body (1) are provided with connecting hole (19,20,21,22), and the four corners of cover board (17) are provided with company
Connect hole (23,24,25,26), the connecting hole (19,20,21,22) of stage body (1) and the connecting hole (23,24,25,26) of cover board (17)
It is bolted.
The height difference of the height difference of second through hole (4) and third through-hole (5), fifth hole (7) and the 6th through hole (8) is 3 to 15
Millimeter.
The material of sample cup for liquid (15) is abrasion-proof stainless steel.
The overall diameter of sample cup for liquid (15) is less than accommodating 1 to 2 millimeter of hole interior diameter.
1 to 2 millimeter of cover sheet thickness.
The micro- method for rotating leveling platform and being tested of representative region, comprises the following steps that：Tested sample is embedded in first
In second cylinder accommodating hole (16), by grinding, polishing so that tested sample upper surface same sample cup for liquid (15) top edge is same
One plane.Sample cup for liquid (15) is fitted into the first cylinder accommodating hole (2), the connecting hole on stage body (1) is bolted
(19-22) and the connecting hole (23-26) on cover board (17), jackscrew in all through holes (3-8,11-14) is held out against with torque screwdriver.
Cover board (17) is laid down, stage body (1) is put into the chuck of nano-hardness tester, passes through micro- sem observation minute yardstick square area to be measured
Domain.
Zone level left and right sides central point A and B to be measured are focused on respectively, and when A is higher than B, third through-hole is held out against with screwdriver
(6) jackscrew is same high until A and B, and when A is less than B, the jackscrew of fifth hole (7) is held out against until A and B is the same as high with screwdriver.Point
Region upper and lower sides central point C and D to be measured are not focused on, and when observing that C is higher than D, the 7th through hole (11) is held out against with normal screws knife
Middle jackscrew is until C and D is the same as high；When observing that C is less than D, with normal screws knife hold out against in the 8th through hole (12) jackscrew until C and
D is the same as high.
Torque screwdriver uses no more than 0.4 N rice of moment of torsion.
Minute yardstick square a length of 100 microns to 500 microns of regional edge to be measured.
The present invention can solve the problems, such as to bring when conventional method tests calcified bone mechanical property, conventional damascene process grinding and polishing
Specimen shape changes afterwards, can not both ensure that tested sample has higher stiffness, is plastically deformed after holding out against, can not be fast
Speed obtains the plane of high quality；
In conventional nano impression test, usually ignore the influence that specimen surface inclination angle is brought, directly changed by compression distance
Calculate geometry self similarity pressure head contact area so that the elasticity modulus of measurement is less than normal；
Conventional single point contact holds out against mode, can not hold out against the non-type cylindrical sample of shape so that sample is being received
Larger rotation occurs in the chuck of rice impression instrument, the surface angle of generation significantly increases measurement error；Conventional nano impression
Test method can not ensure the tested vertical pressing direction of representative region in high precision, and the relative altitude of sample and pressure head can become
Change, can not realize permanent depth cut；It can not be realized the leveling of typical minute yardstick region conventionally by the rotation of simple and mechanical control,
Make its vertical pressing direction；Conventional leveling platform, expensive and volume is larger, is unsuitable for being placed in nano-hardness tester small space
And carry out leveling.
The present invention occurs to deflect it is possible to prevente effectively from clamping off-standard size sample using the objective table of nano-hardness tester,
The uniform sample test surfaces perpendicular to pressing direction can be not only obtained, the non-homogeneous examination perpendicular to pressing direction can also be obtained
Sample minute yardstick test surfaces.The error caused by test surfaces and pressing direction out of plumb is reduced, is that permanent depth nano impress is matched somebody with somebody
Cover clamping device.The present invention is realized by mechanical leveling method, of low cost, small, and with the chuck phase of nano-hardness tester
Coordinate, save space just with popularization.
Brief description of the drawings
The micro- inverted structure schematic diagram for rotating leveling platform of Fig. 1 representative regions.
The structure diagram of Fig. 2 sample cup for liquid.
The structure diagram of Fig. 3 cover boards.
The structure diagram of Fig. 4 jackscrews.
The structure diagram of Fig. 5 bolts.
Fig. 6 representative region leveling schematic diagrames.
In figure：1st, stage body, the 2, first accommodating hole of cylinder, 3, first through hole, the 4, second through hole, 5, third through-hole, 6, the
Four through holes, 7, fifth hole, the 8, the 6th through hole, 9, cup body, 10, rectangle house hole, the 11, the 7th through hole, the 12, the 8th through hole, 13,
9th through hole, the 14, the tenth through hole, the accommodating hole of the 15, sample cup for liquid, 16, second cylinder, 17, cover board, 18, observation window, 19, first
Connecting hole, the 20, second connecting hole, the 21, the 3rd connecting hole, the 22, the 4th connecting hole, the 23, the 5th connecting hole, the 24, the 6th connecting hole,
25th, the 7th connecting hole, the 26, the 8th connecting hole.
Embodiment
Representative region of the present invention is micro- to rotate leveling platform, it is characterised in that：Comprise the following steps that：Tested sample is inlayed first
In the second cylinder accommodating hole (16), by grinding, polishing so that tested sample upper surface same sample cup for liquid (15) top edge exists
Same plane.Sample cup for liquid (15) is loaded into the first cylinder and houses hole (2), the connecting hole on stage body (1) is bolted
(19-22) and the connecting hole (23-26) on cover board (17), jackscrew in all through holes (3-8,11-14) is held out against with torque screwdriver.
Cover board (17) is laid down, stage body (1) is put into the chuck of nano-hardness tester, passes through micro- sem observation minute yardstick square area to be measured
Domain.Region left and right sides central point A and B to be measured are focused on respectively, when A is higher than B, is held out against fourth hole (6) with normal screws knife and are pushed up
Silk is same high until A and B, and when A is less than B, fifth hole (7) jackscrew is held out against until A and B is the same as high with normal screws knife.Gather respectively
Burnt region upper and lower sides central point C and D to be measured, when observing that C is higher than D, top in the 7th through hole (11) is held out against with normal screws knife
Silk is until C and D is the same as high；When observing that C is less than D, jackscrew is held out against in the 8th through hole (12) until C and D are same with normal screws knife
It is high.
1 leveling Ni of example3Al representative regions, reduce error caused by tested area's out of plumb pressing direction
The Ni that will have been welded first3Al materials are embedded in accommodating hole, ensure tested typical case Ni3Al regions upward, and are higher than
1 millimeter of sample cup for liquid edge.By grinding, polishing so that tested sample upper surface is with sample cup for liquid top edge in same plane.Will examination
Sample cup enters accommodating hole, and the connecting hole on the connecting hole and cover board on stage body is bolted, and institute is held out against with torque screwdriver
There is jackscrew in through hole.Cover board is laid down, stage body is put into the chuck of nano-hardness tester, passes through micro- sem observation 100 microns × 100
Micron region to be measured.Region left and right sides central point A and B to be measured are focused on respectively, and when A is higher than B, through hole is held out against with normal screws knife
Jackscrew is same high until A and B, and when A is less than B, through hole jackscrew is held out against until A and B is the same as high with normal screws knife.Focus on respectively to be measured
Region upper and lower sides central point C and D, when observing that C is higher than D, jackscrew is held out against in through hole until C and D is the same as high with normal screws knife；
When observing that C is less than D, jackscrew is held out against in through hole until C and D is the same as high with normal screws knife.Regional center position to be measured is positioned,
Measure Ni3Al modular ratio documents are high by 15%, illustrate since measured material out of plumb pressing direction is really so that measure elasticity
Modulus is less than normal.
2 leveling articular cartilage representative region of example, complies with permanent depth cut requirement
Articular cartilage is embedded in accommodating hole first, ensures the recombination region court for including bone-calcified bone-articular cartilage
On, and it is higher than 2 millimeters of sample cup for liquid edge.By grinding, polishing so that test surfaces are with sample cup for liquid top edge in same plane.Will
Sample cup for liquid loads accommodating hole, and the connecting hole on the connecting hole and cover board on stage body is bolted, is held out against with torque screwdriver
Jackscrew in all through holes.Lay down cover board, stage body be put into the chuck of nano-hardness tester, by micro- 200 microns of sem observation ×
200 microns of regions to be measured.Region left and right sides central point A and B to be measured are focused on respectively, when A is higher than B, are held out against with normal screws knife
Through hole jackscrew is same high until AB, and when A is less than B, through hole jackscrew is held out against until AB is the same as high with normal screws knife.Focus on respectively to be measured
Region upper and lower sides central point C and D, when observing that C is higher than D, jackscrew is held out against in through hole until C D are the same as high with normal screws knife；
When observing that C is less than D, jackscrew is held out against in through hole until C D are the same as high with normal screws knife.Region left margin to be measured is positioned to carry out
Series of parallel permanent depth cut, observation measure result stabilization, no jump point and breakpoint, illustrate that the invention is suitable for nano impress
Leveling before method perseverance depth cut.
Claims (8)
1. nano impress representative region is micro- to rotate leveling platform, it is characterised in that：Stage body (1) be leveling platform agent structure, stage body
(1) it is accommodating hole (2) that the first cylinder is provided with central upper portion, stage body (1) and the first cylinder, which house, is provided with the between hole (2)
One through hole (3) and fourth hole (6), the angle between the radial direction of first through hole (3) and the radial direction of fourth hole (6) is 90 °；With
First cylinder accommodating hole (2) of first through hole (3) offside is equipped with the second through hole of through hole (4), third through-hole (5), with the 4th
First cylinder accommodating hole (2) of through hole (6) offside is equipped with fifth hole (7) and the 6th through hole (8)；The lower part of stage body (1)
Rectangle is provided with center and houses hole (10), rectangle houses in hole (10) and is evenly equipped with four through holes (11,12,13,14)；In through hole
Screw thread is furnished with, screw thread is engaged with jackscrew；Sample cup for liquid (15) is placed in the first cylinder accommodating hole (2), sample cup for liquid (15) with
First cylinder accommodating hole (2) is contour, and the overall diameter of sample cup for liquid (15) is less than the interior diameter of the first cylinder accommodating hole (2), examination
It is accommodating hole (16) that the central upper portion of sample cup (15) is provided with the second cylinder；Observation window (18) is provided with the center of cover board (17)；Platform
The four corners of body (1) are provided with connecting hole (19,20,21,22), and the four corners of cover board (17) are provided with connecting hole (23,24,25,26),
The connecting hole (19,20,21,22) of stage body (1) is bolted with the connecting hole (23,24,25,26) of cover board (17).
2. nano impress representative region according to claim 1 is micro- to rotate leveling platform, it is characterised in that：Second through hole (4)
With the height difference of third through-hole (5), the height difference of fifth hole (7) and the 6th through hole (8) is 3 to 15 millimeters.
3. nano impress representative region according to claim 1 is micro- to rotate leveling platform, it is characterised in that：Sample cup for liquid (15)
Material is abrasion-proof stainless steel.
4. nano impress representative region according to claim 1 is micro- to rotate leveling platform, it is characterised in that：Sample cup for liquid (15)
Overall diameter is less than accommodating 1 to 2 millimeter of hole interior diameter.
5. nano impress representative region according to claim 1 is micro- to rotate leveling platform, it is characterised in that：Cover sheet thickness 1 to 2
Millimeter.
6. nano impress representative region according to claim 1 is micro- to rotate leveling platform, it is characterised in that：Micro- turn of representative region
The method that dynamic leveling platform is tested, comprises the following steps that：It is accommodating hole (16) that tested sample is embedded in the second cylinder first
In, by grinding, polishing so that tested sample upper surface same sample cup for liquid (15) top edge is in same plane；By sample cup for liquid (15)
It is fitted into the first cylinder accommodating hole (2), is bolted on the connecting hole (19-22) on stage body (1) and cover board (17)
Connecting hole (23-26), jackscrew in all through holes (3-8,11-14) is held out against with torque screwdriver；Cover board (17) is laid down, by stage body
(1) it is put into the chuck of nano-hardness tester, passes through micro- sem observation minute yardstick square region to be measured；
Zone level left and right sides central point A and B to be measured are focused on respectively, and when A is higher than B, third through-hole (6) is held out against with screwdriver
Jackscrew is same high until A and B, and when A is less than B, the jackscrew of fifth hole (7) is held out against until A and B is the same as high with screwdriver；Gather respectively
Burnt region upper and lower sides central point C and D to be measured, when observing that C is higher than D, top in the 7th through hole (11) is held out against with normal screws knife
Silk is until C and D is the same as high；When observing that C is less than D, jackscrew is held out against in the 8th through hole (12) until C and D are same with normal screws knife
It is high.
7. nano impress representative region according to claim 1 is micro- to rotate leveling platform, it is characterised in that：Torque screwdriver makes
With no more than 0.4 N rice of moment of torsion.
8. nano impress representative region according to claim 1 is micro- to rotate leveling platform, it is characterised in that：Minute yardstick square
A length of 100 microns to 500 microns of regional edge to be measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711132451.0A CN107907433B (en) | 2017-11-15 | 2017-11-15 | Nano indentation typical region micro-rotation leveling platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711132451.0A CN107907433B (en) | 2017-11-15 | 2017-11-15 | Nano indentation typical region micro-rotation leveling platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107907433A true CN107907433A (en) | 2018-04-13 |
| CN107907433B CN107907433B (en) | 2020-05-19 |
Family
ID=61844325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711132451.0A Expired - Fee Related CN107907433B (en) | 2017-11-15 | 2017-11-15 | Nano indentation typical region micro-rotation leveling platform |
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| CN109870476A (en) * | 2019-03-27 | 2019-06-11 | 哈尔滨工业大学 | A kind of method that ceramic matric composite mechanical property quickly characterizes |
| CN110361247A (en) * | 2019-07-16 | 2019-10-22 | 上海海事大学 | A kind of preparation method of sample for nano impress Study on Steel fiber cement-based material median surface transition region performance |
| CN110455657A (en) * | 2019-08-28 | 2019-11-15 | 北京工业大学 | A kind of hydrogel nano impress region fine regulating device |
| CN111948205A (en) * | 2019-05-17 | 2020-11-17 | 中国航发商用航空发动机有限责任公司 | Sample placing block, sample placing device and sample detection method thereof |
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