CN107883773A - Substrate bearing device and roasting plant - Google Patents
Substrate bearing device and roasting plant Download PDFInfo
- Publication number
- CN107883773A CN107883773A CN201711080080.6A CN201711080080A CN107883773A CN 107883773 A CN107883773 A CN 107883773A CN 201711080080 A CN201711080080 A CN 201711080080A CN 107883773 A CN107883773 A CN 107883773A
- Authority
- CN
- China
- Prior art keywords
- carrier
- elevating mechanism
- bearing device
- substrate bearing
- baking vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D3/12—Travelling or movable supports or containers for the charge
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27M—INDEXING SCHEME RELATING TO ASPECTS OF THE CHARGES OR FURNACES, KILNS, OVENS OR RETORTS
- F27M2003/00—Type of treatment of the charge
- F27M2003/08—Curing; Baking
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention provides a kind of substrate bearing device, including multilayer carrier and the elevating mechanism that driving is connected with carrier, the elevating mechanism to correspond with carrier and set, and elevating mechanism is used to adjust the spacing between every layer of carrier and adjacent carrier.Present invention also offers a kind of roasting plant, including baking vessel, described substrate bearing device is provided with the baking vessel, the baking vessel is provided with substrate inlet port, and the elevating mechanism is on baking vessel's side inwall relative with substrate inlet port.Compared with prior art, the elevating mechanism set is corresponded with carrier by setting, realizes that the spacing of adjacent two layers carrier can adjust, meet the requirement of spatial altitude needed for the changing plate of robot arm；The number of substrates that can also make to place in roasting plant simultaneously improves, and so as to improve the production capacity of equipment, reduces the purchase cost and space of equipment.
Description
Technical field
The present invention relates to a kind of display panel production technology, particularly a kind of substrate bearing device and roasting plant.
Background technology
In the production of substrate, for high temperature process, in order to improve equipment capacity (capa), generally use oven in the industry
(Furnace) type equipment is toasted.But the limitation of device height is constrained to, baking vessel (Chamber) can accommodate
Number of substrates is restricted.
At present, substrate platform shelf is fixed in baking vessel, need to meet that robot arm exchanges per laminar substrate carrier
The spatial altitude requirement of piece, therefore, in design, gap is larger between adjacent two layers substrate platform shelf, so as to meet robot
The space requirement of arm changing plate, so cause each baking vessel to accommodate the negligible amounts of substrate, cause equipment capacity relatively low.
The content of the invention
For overcome the deficiencies in the prior art, the present invention provides a kind of substrate bearing device and roasting plant, enabling from
By spacing between regulation adjacent two layers substrate platform shelf, so as in the case where not influenceing the space requirement of robot arm changing plate, carry
High production capacity.
The invention provides a kind of substrate bearing device, including multilayer carrier and the lifting that driving is connected with carrier
Mechanism, the elevating mechanism are corresponded with carrier and set, and elevating mechanism is used to adjust every layer of carrier and adjacent carrier
Between spacing.
Further, in addition to controller, the controller is connected with elevating mechanism and the start and stop to elevating mechanism are carried out
Control.
Further, every layer of carrier, which is provided with, is used to know the sensor with adjacent carrier distance, sensor and control
Device connection processed.
Further, the elevating mechanism is linear electric motors, and the linear electric motors have mover seat, and the carrier is with moving
Stroma is connected.
Further, the carrier includes main support vertically disposed with elevating mechanism and located at main support away from liter
More support arms of the side surface of descending mechanism one, the support arm are vertical with main support.
Further, the sensor is located at the lower end of every layer of carrier.
Further, the sensor is optoelectronic switch.
Present invention also offers a kind of roasting plant, including baking vessel, described base plate carrying is provided with the baking vessel
Device, the baking vessel are provided with substrate inlet port, and the elevating mechanism is in the baking vessel side relative with substrate inlet port
On wall.
The present invention corresponds the elevating mechanism set with carrier compared with prior art, by setting, and realizes adjacent
The spacing of two layers of carrier can adjust, and meet the requirement of spatial altitude needed for the changing plate of robot arm；It can also make simultaneously
The number of substrates placed in roasting plant improves, and so as to improve the production capacity of equipment, reduces the purchase cost of equipment and takes up an area empty
Between.
Brief description of the drawings
Fig. 1 is the front view of substrate bearing device of the present invention；
Fig. 2 is the connection diagram of one of carrier and elevating mechanism in substrate bearing device of the present invention；
Fig. 3 is the internal structure schematic diagram of the baking vessel of roasting plant of the present invention.
Embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.
As shown in figure 1, the substrate bearing device of the present invention includes multiple carriers 1 set in a manner of stacking, it is adjacent
Spacing be present between two layers of carrier 1, so as to form the carrier 1 of multilayer, be provided with one-to-one therewith rise on the carrier 1 there
Descending mechanism 2, the one-to-one meaning are provided with an elevating mechanism 2 to drive the carrier 1 to lift for each carrier 1.
The substrate bearing device also includes a controller 3, and controller 3 is used to elevating mechanism 2 is started and stopped
Control, elevating control is carried out to multiple elevating mechanisms 2 respectively so as to realize, reaches spacing between regulation adjacent two layers carrier 1
Effect, to meet requirement of the robot arm to changing plate spatial altitude, specifically, controller 3 can be linear electric motors control
Device or servo-driver processed.
In the present invention, it is used to know the sensing with the adjacent distance of carrier 1 as shown in Fig. 2 being provided with every layer of carrier 1
Device 4, sensor 4 are connected with controller 3, after controller 3 receives the signal of sensor 4, to the elevating mechanism 2 currently lifted
It is controlled, stopping continues to lift, and so as to avoid the occurrence of the problem of adjacent two layers carrier collides, also ensure that substrate
Safety.The optoelectronic switch of sensor 4 herein, but the present invention is not limited thereto, sensor 4 can also be replaced with into touch switch, leads to
Cross and be arranged on elevating mechanism 2 and the opening position corresponding to the adjacent minimum clearance of elevating mechanism 2, so as to realize to this layer of lift
The stopping control of structure 2；The present invention can also use removes sensor 4, due to the lifting of carrier 1 be not in it is larger across
Degree, therefore, the elevating mechanism 2 of corresponding length can be set according to the lifting distance of reality, and being substituted with this needs sensor 4.
In the present invention, elevating mechanism 2 can use the modes such as V belt translation of the prior art, worm-drive or rack-driving real
It is existing, it is only necessary to realize lifting action；As shown in Fig. 2 in the present invention, the elevating mechanism 2 is linear electric motors, the straight line
Motor has mover seat 5, and carrier 1 is connected with mover seat 5.
As depicted in figs. 1 and 2, a kind of embodiment as carrier 1 of the present invention, the carrier 1 include and lifting
The vertically disposed main support 11 of mechanism 2 and more support arms 12 for deviating from the side surface of elevating mechanism 2 one located at main support 11, it is described
Support arm 12 is vertical with main support 11, and support arm 12 is connected with main support 11.
Located at the upper end of every layer of carrier 1, sensor 4 is used to carry out this layer of carrier 1 heretofore described sensor 4
Monitoring, but the invention is not restricted to this, such as the lower end of carrier 1 is arranged on, and when being arranged on the lower end of carrier 1, sensing
Device 4 is used to monitor next layer of carrier 1；The set location of sensor 4 only needs to follow for carrying adjacent two layers in the present invention
The spacing of frame 1 is monitored, therefore set location can be configured as needed.
As shown in figure 3, in roasting plant disclosed in this invention in addition to substrate bearing device is added, remaining component is not
It is changed, therefore is illustrated below only for improvements；
The roasting plant of the present invention includes baking vessel 6, and substrate bearing device, the base plate carrying dress are provided with baking vessel 6
Put including multilayer carrier 1, spacing be present between adjacent two layers carrier 1, so as to form the carrier 1 of multilayer, in carrier 1
One-to-one elevating mechanism 2 therewith is provided with, the baking vessel 6 is provided with substrate inlet port 7, and the elevating mechanism 2 is located at baking
On the side inwall relative with substrate inlet port 7 of roasted room 6.
The substrate bearing device also includes a controller 3, and controller 3 is used to elevating mechanism 2 is started and stopped
Control, elevating control is carried out to multiple elevating mechanisms 2 respectively so as to realize, reaches spacing between regulation adjacent two layers carrier 1
Effect, to meet requirement of the robot arm to changing plate spatial altitude, controller 3 is outside baking vessel 6.
In the present invention, it is used to know the sensing with the adjacent distance of carrier 1 as shown in Fig. 2 being provided with every layer of carrier 1
Device 4, sensor 4 are connected with controller 3, after controller 3 receives the signal of sensor 4, to the elevating mechanism 2 currently lifted
It is controlled, stopping continues to lift, and so as to avoid the occurrence of the problem of adjacent two layers carrier collides, also ensure that substrate
Safety.The optoelectronic switch of sensor 4 herein, but the present invention is not limited thereto, sensor 4 can also be replaced with into touch switch, leads to
Cross and be arranged on elevating mechanism 2 and the opening position corresponding to the adjacent minimum clearance of elevating mechanism 2, so as to realize to this layer of lift
The stopping control of structure 2；The present invention can also use removes sensor 4, due to the lifting of carrier 1 be not in it is larger across
Degree, therefore, the elevating mechanism 2 of corresponding length can be set according to the lifting distance of reality, and being substituted with this needs sensor 4.
Located at the upper end of every layer of carrier 1, sensor 4 is used to be monitored this layer of carrier 1 sensor 4, but
It is the invention is not restricted to this, such as is arranged on the lower end of carrier 1, when being arranged on the lower end of carrier 1, sensor 4 is used for
Monitor next layer of carrier 1；The set location of sensor 4 only needs to follow for adjacent two layers carrier 1 in the present invention
Away from being monitored, therefore set location can be configured as needed.
In roasting plant of the present invention, elevating mechanism 2 is linear electric motors, and the linear electric motors have mover seat 5, carrier 1
It is connected with mover seat 5, (i.e. it is relative with substrate inlet port 7 to be fixed on baking vessel 6 to the stator 8 of linear electric motors for base portion
On the inwall of side).
When setting the elevating mechanism 2 of corresponding length according to the lifting distance of reality, the set location of elevating mechanism 2 then root
It is fixed on according to corresponding height on the inwall of baking vessel 6.
The carrier 1 includes main support 11 vertically disposed with elevating mechanism 2 and located at main support 11 away from lifting
More support arms 12 of the side surface of mechanism 2 one, the support arm 12 is vertical with main support 11, and support arm 12 is connected with main support 11.
Although the present invention has shown and described with reference to specific embodiment, it should be appreciated by those skilled in the art that：
In the case where not departing from the spirit and scope of the present invention limited by claim and its equivalent, can carry out herein form and
Various change in details.
Claims (8)
- A kind of 1. substrate bearing device, it is characterised in that：Driving is connected including multilayer carrier (1) and with carrier (1) Elevating mechanism (2), the elevating mechanism (2) are corresponded with carrier (1) and set, and elevating mechanism (2) is held for adjusting every layer Spacing between carrier (1) and adjacent carrier (1).
- 2. substrate bearing device according to claim 1, it is characterised in that：Also include controller (3), the controller (3) it is connected with elevating mechanism (2) and the start and stop to elevating mechanism (2) is controlled.
- 3. substrate bearing device according to claim 1, it is characterised in that：Every layer of carrier (1), which is provided with, to be used to know With the sensor (4) of adjacent carrier (1) distance, sensor (4) is connected with controller (3).
- 4. according to the substrate bearing device described in claim 1-3 any one, it is characterised in that：The elevating mechanism (2) is Linear electric motors, the linear electric motors have mover seat (5), and the carrier (1) is connected with mover seat (5).
- 5. substrate bearing device according to claim 4, it is characterised in that：The carrier (1) includes and elevating mechanism (2) vertically disposed main support (11) and the more support arms located at main support (11) away from the side surface of elevating mechanism (2) one (12), the support arm (12) is vertical with main support (11).
- 6. substrate bearing device according to claim 3, it is characterised in that：The sensor (4) is located at every layer of carrier (1) upper end.
- 7. the substrate bearing device according to claim 3 or 6, it is characterised in that：The sensor (4) is optoelectronic switch.
- 8. a kind of roasting plant, including baking vessel (6), it is characterised in that：Such as claim 1-7 is provided with the baking vessel (6) Substrate bearing device described in any one, the baking vessel (6) are provided with substrate inlet port (7), and the elevating mechanism (2) is located at In baking vessel (6) and the relative side inwall of substrate inlet port (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711080080.6A CN107883773A (en) | 2017-11-06 | 2017-11-06 | Substrate bearing device and roasting plant |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711080080.6A CN107883773A (en) | 2017-11-06 | 2017-11-06 | Substrate bearing device and roasting plant |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107883773A true CN107883773A (en) | 2018-04-06 |
Family
ID=61779029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711080080.6A Pending CN107883773A (en) | 2017-11-06 | 2017-11-06 | Substrate bearing device and roasting plant |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107883773A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108608460A (en) * | 2018-04-23 | 2018-10-02 | 深圳市华星光电半导体显示技术有限公司 | Mechanical arm configuration and robot |
| CN113473736A (en) * | 2020-03-30 | 2021-10-01 | 群翊工业股份有限公司 | Nitrogen sealed baking machine table and method for enabling substrate to enter and exit baking device |
| CN115039902A (en) * | 2022-07-28 | 2022-09-13 | 安徽信息工程学院 | Tobacco leaf multilayer baking adjusting device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002299416A (en) * | 2001-04-02 | 2002-10-11 | Tokyo Ohka Kogyo Co Ltd | Substrate carrier device |
| CN1895974A (en) * | 2005-07-15 | 2007-01-17 | 日本电产三协株式会社 | Substrate move-out move-in method and system |
| CN105173433A (en) * | 2015-09-02 | 2015-12-23 | 京东方科技集团股份有限公司 | Substrate clamp |
| CN205388410U (en) * | 2016-03-15 | 2016-07-20 | 冠利得商标制品（苏州）有限公司 | Placing support |
-
2017
- 2017-11-06 CN CN201711080080.6A patent/CN107883773A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002299416A (en) * | 2001-04-02 | 2002-10-11 | Tokyo Ohka Kogyo Co Ltd | Substrate carrier device |
| CN1895974A (en) * | 2005-07-15 | 2007-01-17 | 日本电产三协株式会社 | Substrate move-out move-in method and system |
| CN105173433A (en) * | 2015-09-02 | 2015-12-23 | 京东方科技集团股份有限公司 | Substrate clamp |
| CN205388410U (en) * | 2016-03-15 | 2016-07-20 | 冠利得商标制品（苏州）有限公司 | Placing support |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108608460A (en) * | 2018-04-23 | 2018-10-02 | 深圳市华星光电半导体显示技术有限公司 | Mechanical arm configuration and robot |
| CN113473736A (en) * | 2020-03-30 | 2021-10-01 | 群翊工业股份有限公司 | Nitrogen sealed baking machine table and method for enabling substrate to enter and exit baking device |
| CN115039902A (en) * | 2022-07-28 | 2022-09-13 | 安徽信息工程学院 | Tobacco leaf multilayer baking adjusting device |
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| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20180406 |