CN107565853B - A kind of staggered magnetcisuspension suspension gravity compensator of magnets of stator - Google Patents
A kind of staggered magnetcisuspension suspension gravity compensator of magnets of stator Download PDFInfo
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- CN107565853B CN107565853B CN201710765343.0A CN201710765343A CN107565853B CN 107565853 B CN107565853 B CN 107565853B CN 201710765343 A CN201710765343 A CN 201710765343A CN 107565853 B CN107565853 B CN 107565853B
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Abstract
The invention belongs to gravity compensator fields, and disclose a kind of staggered magnetcisuspension suspension gravity compensator of magnets of stator.Gravity compensator includes lower die and upper mold, it is arranged in upper mold fluted, the outer mover in permanent magnet array magnet ring is provided on the inner sidewall of groove, groove center is additionally provided with pillar, and the outer surface of the pillar is provided with mover in permanent magnet array magnet ring corresponding with outer mover；The boss with groove cooperation is provided in lower die, the outer surface of boss is provided with end-coil, magnetic stator annular in shape and lower end-coil according to this from top to bottom, magnetic stator is along the circumferential direction divided into muti-piece arcuate permanent magnetic iron, two pieces of adjacent arc-shaped permanent magnets are staggered front to back arrangement, and the radius length difference of two pieces of adjacent arc-shaped permanent magnets is less than the thickness of magnetic stator.Through the invention, the mover approximation zero stiffness magnetic levitation in working range is realized, structure is simple, is suitable for needing on instrument with small vibration and with high accuracy, applied widely.
Description
Technical field
The invention belongs to gravity compensator fields, more particularly, to a kind of staggered magnetcisuspension buoyant weight of magnets of stator
Force compensating device.
Background technique
High accuracy platform is processed in precision machinery, and integrated circuit work and precision components manufacturing field are extremely important group
At part.By taking the lithographic equipment of Seiko manufacture as an example, as extensive circuit devcie integrated level of inheriting is continuously improved, lithography process
Resolution ratio be continuously improved, lithography system is to the index of each freedom degree direction controlling required precision of precision movement platform also continuous
It is promoted.For the Ultra-precision positioning work stage in litho machine, exempt from the micropositioner component for carrying silicon wafer in exposure process
It is most important by interference caused by being vibrated by basic framework, need to wafer-supporting platform or hold bed and carry out effective vibration damping, make its
From the interference of other systems in exposure process.Gravity compensator is exactly the new structure to grow up in this context, is passed through
Main passive damping technology, completes to wafer-supporting platform or holds the leveling and focusing of bed, and fine motion module is made to form an independent internal generation
Boundary.
Currently, relevant technical staff in the field has done some researchs, a kind of array magnetic suspension gravity benefit is disclosed
Device is repaid, the array magnetcisuspension suspension gravity compensator includes two stator structures and a Structure of mover, two mover knots
Structure applies magnetic attraction and magnetic repulsion to the mover mechanism from the upper and lower two sides of the Structure of mover respectively, described dynamic to realize
The gravity compensation of minor structure；However, the normal stiffness of the array magnetic suspension gravity compensator is higher.Correspondingly, this field is deposited
In the technical need for developing a kind of Low rigidity magnetcisuspension suspension gravity compensator.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, the present invention provides a kind of staggered magnetic of magnets of stator
Suspension gravity compensator, by the staggered setting of the magnet of magnetic stator, to form two groups of contrary suspensions
Thus power solves the high technical problem of gravity compensator rigidity so that two groups of rigidity approximations that stator is formed are offset.
To achieve the above object, it is proposed, according to the invention, provide a kind of staggered magnetic suspension gravity compensation of magnets of stator
Device, the gravity compensator include lower die and upper mold, which is characterized in that
It is arranged fluted in the upper mold, the outer mover in permanent magnet array magnet ring is provided on the inner sidewall of the groove, together
When, which is additionally provided with pillar, and the outer surface of the pillar is provided with permanent magnet array magnetic corresponding with the outer mover
Mover in ring；The boss with groove cooperation is provided in the lower die, the outer surface of the boss is arranged according to this from top to bottom
There are upper end-coil, magnetic stator annular in shape and lower end-coil, wherein the magnetic stator is along the circumferential direction divided into
Muti-piece arcuate permanent magnetic iron, two pieces of adjacent arc-shaped permanent magnets are staggered front to back arrangement, and the radius of two pieces of adjacent arc-shaped permanent magnets
Length difference is less than the thickness of the magnetic stator.
It is further preferred that the permanent magnet array magnet ring of the outer mover and interior mover is all made of Halbach permanent magnet array magnetic
Ring, wherein the outer mover and interior mover are formed by stacking from top to bottom by three pieces of permanent magnetic rings, and two pieces of adjacent magnet rings
Magnetizing direction is mutually perpendicular to.
It is further preferred that the thickness of the outer mover permanent magnet array magnet ring is less than the interior mover permanent magnet array magnet ring
Thickness.
It is further preferred that the upper end-coil and lower end-coil are symmetrical about the center line of the boss, and upper end line
Circle and the series connection of lower end-coil, in addition, the upper end-coil and lower end-coil include interior loop and exterior loop.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, can obtain down and show
Beneficial effect:
1, the present invention forms parallel-connection structure by using the outer mover of Halbach permanent magnet array magnet ring and interior mover, and every group
Halbach permanent array ring is made of the annular permanent magnet that three magnetizing directions are successively rotated by 90 °, mover magnetic field concentration in
Gap between interior outer magnetic ring；
2, for the present invention by using staggered permanent magnet as stator, the magnet close to outer mover is one group, close
The magnet of interior mover is another set, to form the suspending power of two groups of different directions, the magnetic stator close to outer mover is produced
Raw suspending power opening upwards, normal stiffness slope are greater than 0 and cross x-axis, generate close to the magnetic stator of interior mover outstanding
Open Side Down for buoyancy, and normal stiffness slope is less than 0 and crosses x-axis, and the sum of two groups of different suspending powers are then the magnetic stators
The suffered suspending power in magnetic field, two groups of permanent magnet Stiffness approximate can be offset, so that mover can in working range
Nearly zero stiffness magnetic levitation, and then realize that mover gravity compensation and position are adjusted；
3, the present invention is less than the thickness of interior mover magnet by using the magnet thickness of outer mover, adjusts interior outer magnetic ring wall thickness
Ratio, make mover magnetic field radial component in the middle part of interior outer magnetic ring gap have along axial linear variation characteristic；
4, the present invention is by using the stator of tile permanent magnet, and the magnets of stator is staggered, according to magnetic field superposition
Principle, the magnetic field force that stator generates approximate can be offset into a horizontal linear, then normal stiffness is approximately zero；
5, the present invention being symmetrical arranged by using upper end-coil and lower end-coil, with four diameters in the Structure of mover
The radial magnetic field interaction formed to magnetizing permanent magnetism ring, generates dynamic suspension power, since coil is arranged symmetrically, dynamic force
Only z is to component, resultant moment zero；
6, for the present invention by providing a kind of staggered magnetcisuspension suspension gravity compensator of stator permanent magnet, structure is simple, fits
It is applied widely together in needing on instrument with small vibration and with high accuracy, such as be applicable to process equipment, measuring instrument needs every
The Ultraprecise platform of vibration, positioning.
Detailed description of the invention
Fig. 1 is magnetcisuspension suspension gravity compensator mover magnet and magnets of stator constructed by preferred embodiment according to the invention
Top view；
Fig. 2 is the cross-sectional view of magnetcisuspension suspension gravity compensator constructed by preferred embodiment according to the invention；
Fig. 3 is mover constructed by preferred embodiment according to the invention and stator magnetizing direction schematic diagram；
Fig. 4 is the suspending power of magnetcisuspension suspension gravity compensator constructed by preferred embodiment according to the invention and stator normal direction
Schematic diagram between displacement；
Fig. 5 is the normal stiffness of magnetcisuspension suspension gravity compensator constructed by preferred embodiment according to the invention and stator method
To the schematic diagram between displacement；
Fig. 6 is the normal stiffness of magnetcisuspension suspension gravity compensator constructed by preferred embodiment according to the invention and stator method
To the schematic diagram between displacement.
In all the appended drawings, identical appended drawing reference is used to denote the same element or structure, in which:
The 5th permanent magnet 7- of 1- lower die 2- upper mold 3- the first permanent magnet 4- the second permanent magnet 5- third permanent magnet 6-
The interior lines end-coil 15- under end-coil 13- magnetic stator 14- on the 7th permanent magnet 11- boss 12- of 6th permanent magnet 8-
Enclose mover in the outer mover 23- pillar 24- of 16- exterior loop 21- groove 22-
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
Fig. 1 is the vertical view of magnetcisuspension suspension gravity compensator stator and stator constructed by preferred embodiment according to the invention
Figure, Fig. 2 is the cross-sectional view of magnetcisuspension suspension gravity compensator constructed by preferred embodiment according to the invention, as illustrated in fig. 1 and 2,
Gravity compensator includes lower die 1 and upper mold 2, and fluted 21 are arranged in upper mold 2, is provided on the inner sidewall of the groove in permanent magnetism battle array
The outer mover 22 of column magnet ring, meanwhile, which is additionally provided with pillar 23, and the outer surface of the pillar is provided with and outer mover phase
Mover 24 in corresponding permanent magnet array magnet ring；It is provided with the boss 11 with groove cooperation in lower die 1, the outer surface of the boss is from upper
It is provided with upper end-coil 12, magnetic stator 13 annular in shape and lower end-coil 14 according to this under, wherein 13 edge of magnetic stator
Circumferencial direction is divided into muti-piece arcuate permanent magnetic iron, and two pieces of adjacent arc-shaped permanent magnets are staggered front to back arrangement, and adjacent two pieces
The radius length difference of arc-shaped permanent magnet is less than the thickness of magnetic stator；The external mover 22 of stator 13 and 24 two sides of interior mover apply
Magnetic attraction and magnetic repulsion, to realize the gravity compensation of Structure of mover 10.
Fig. 3 be mover constructed by preferred embodiment according to the invention and stator magnetizing direction schematic diagram as shown in figure 3,
The outer mover and interior mover are all made of Halbach permanent magnet array magnet ring, wherein the outer mover and interior mover by three pieces forever
Magnetic magnet ring is formed by stacking from top to bottom, and the magnetizing direction of two pieces of adjacent magnet rings is mutually perpendicular to, permanent magnet array magnet ring be by
Annular permanent magnet that three magnetizing directions are successively rotated by 90 ° is constituted, and interior mover includes the first permanent magnet 3, third permanent magnet 5 and the
Six permanent magnets 7, the first permanent magnet 3 and the third permanent magnet 5 and the 6th permanent magnet 7 are sequentially overlapped setting from top to bottom,
And magnetizing direction is successively rotated by 90 °, and in present embodiment, first permanent magnet 3, the third permanent magnet 5 and the described 6th
Permanent magnet 7 is the permanent magnet of annular.
Outer mover includes the second permanent magnet 4, the 5th permanent magnet 6 and the 7th permanent magnet 8, second permanent magnet 4, described the
Five permanent magnets 6 and the 7th permanent magnet 8 are superposed from top to bottom, and magnetizing direction is successively rotated by 90 °, shown in Fig. 3 in
Arrow indicates magnetizing direction, and in present embodiment, the second permanent magnet 4, the 5th permanent magnet 6 and the 7th permanent magnet 8 are equal
For the permanent magnet of annular.The thickness of interior mover magnet is greater than the thickness of outer mover magnet.
1 top and bottom of lower die setting toroid ring recess is for placing end-coil 12 and lower end-coil 14, middle part setting
There is container, for placing magnetic stator 13, upper end-coil 12 and lower end-coil 14 include interior loop 15 and exterior loop
16, upper end-coil and lower end-coil are about the substantially symmetrical about its central axis of boss, all coils series connection.
Fig. 4 is the suspending power of magnetcisuspension suspension gravity compensator constructed by preferred embodiment according to the invention and stator normal direction
Schematic diagram between displacement, Fig. 5 are that the normal direction of magnetcisuspension suspension gravity compensator constructed by preferred embodiment according to the invention is rigid
Schematic diagram between degree and stator Normal Displacement, as shown in Figures 4 and 5, it can be seen that two groups of suspension force curves, one group of opening upwards,
One group Open Side Down, according to magnetic field superposition principle, magnetic stator of the invention between inside and outside mover in suffered suspending power,
The sum of suspending power in as Fig. 4 and Fig. 5.As shown in figure 5, magnetic stator of the invention between inside and outside mover in suffered method
To rigidity, the sum of normal stiffness in as Fig. 4 and Fig. 5.
Fig. 6 is the normal stiffness of magnetcisuspension suspension gravity compensator constructed by preferred embodiment according to the invention and stator method
To the schematic diagram between displacement, as shown in Figure 6, it can be seen that inside and outside mover in working range can nearly zero stiffness magnetic levitation,
Realize that mover gravity compensation and position are adjusted.
The working principle of the invention and process will be illustrated below.
The thickness of the staggered magnetcisuspension suspension gravity compensator of magnets of stator, interior permanent magnet array ring is greater than outer permanent magnet array
The thickness of ring, so that mover magnetic field radial component has edge in the middle part of the gap between outer permanent magnet array ring and interior permanent magnet array ring
Axial linear variation characteristic；Level of approximation straight line can get by magnetic field superposition principle by using staggered stator structure
Mover suspending power-Normal Displacement characteristic curve so that Structure of mover in working range can nearly zero stiffness magnetic levitation, realize
Mover gravity compensation and position are adjusted.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (3)
1. a kind of staggered magnetcisuspension suspension gravity compensator of magnets of stator, the gravity compensator include lower die (1) and upper mold
(2), which is characterized in that
It is arranged fluted (21) on the upper mold (2), the outer mover in permanent magnet array magnet ring is provided on the inner sidewall of the groove
(22), meanwhile, which is additionally provided with pillar (23), and the outer surface of the pillar is provided with corresponding with the outer mover
Mover (24) in permanent magnet array magnet ring；Be provided with the boss (11) with groove cooperation on the lower die (1), the boss it is outer
Surface is provided with end-coil (12), magnetic stator annular in shape (13) and lower end-coil (14) according to this from top to bottom, wherein
The magnetic stator (13) is along the circumferential direction divided into muti-piece arcuate permanent magnetic iron, hands over before and after two pieces of adjacent arc-shaped permanent magnets
Mistake arrangement, and the radius length difference of two pieces of adjacent arc-shaped permanent magnets is less than the thickness of the magnetic stator；
The permanent magnet array magnet ring of the outer mover (22) and interior mover (24) is all made of Halbach permanent magnet array magnet ring, wherein institute
It states outer mover and interior mover to be formed by stacking from top to bottom by three pieces of permanent magnetic rings, and the magnetizing direction phase of two pieces of adjacent magnet rings
It is mutually vertical.
2. a kind of staggered magnetcisuspension suspension gravity compensator of magnets of stator as described in claim 1, which is characterized in that described
The thickness of outer mover (22) permanent magnet array magnet ring is less than the thickness of interior mover (24) the permanent magnet array magnet ring.
3. a kind of staggered magnetcisuspension suspension gravity compensator of magnets of stator as described in claim 1, which is characterized in that described
Upper end-coil (12) and lower end-coil (14) are symmetrical about the center line of the boss (11), and upper end-coil and lower end-coil string
Connection, in addition, the upper end-coil and lower end-coil include interior loop (15) and exterior loop (16).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710765343.0A CN107565853B (en) | 2017-08-30 | 2017-08-30 | A kind of staggered magnetcisuspension suspension gravity compensator of magnets of stator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710765343.0A CN107565853B (en) | 2017-08-30 | 2017-08-30 | A kind of staggered magnetcisuspension suspension gravity compensator of magnets of stator |
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| Publication Number | Publication Date |
|---|---|
| CN107565853A CN107565853A (en) | 2018-01-09 |
| CN107565853B true CN107565853B (en) | 2018-12-28 |
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| CN201710765343.0A Active CN107565853B (en) | 2017-08-30 | 2017-08-30 | A kind of staggered magnetcisuspension suspension gravity compensator of magnets of stator |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108386481B (en) * | 2018-03-05 | 2019-02-22 | 青岛理工大学 | Halbach permanent magnet array-based high-linearity magnetic suspension vibration isolation device, actuator and method |
| CN113745138B (en) * | 2021-09-03 | 2024-03-22 | 上海隐冠半导体技术有限公司 | Magnetic levitation device and micro-motion platform |
| CN115891500B (en) * | 2023-03-09 | 2023-05-12 | 西南交通大学 | Magnetic wheel structure of magnetic suspension automobile |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10223555A1 (en) * | 2002-05-28 | 2003-12-18 | Alexander Stroh | Gravitation compensator is device in which force originates without opposing force, whereby this force is used to compensate for another force which may be gravity force |
| KR20090049188A (en) * | 2007-11-13 | 2009-05-18 | 연세대학교 산학협력단 | Stiffness generating apparatus using halbach array |
| CN201436604U (en) * | 2009-05-27 | 2010-04-07 | 上海微电子装备有限公司 | Gravity compensator |
| CN102215019A (en) * | 2011-06-01 | 2011-10-12 | 哈尔滨工业大学 | Active gravity compensation electromagnetic supporting device |
| CN102944979A (en) * | 2012-11-02 | 2013-02-27 | 清华大学 | Microchecker having permanent magnet gravity compensation structure |
| CN106953551A (en) * | 2017-05-05 | 2017-07-14 | 哈尔滨工业大学 | Magnetcisuspension suspension gravity compensator |
-
2017
- 2017-08-30 CN CN201710765343.0A patent/CN107565853B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10223555A1 (en) * | 2002-05-28 | 2003-12-18 | Alexander Stroh | Gravitation compensator is device in which force originates without opposing force, whereby this force is used to compensate for another force which may be gravity force |
| KR20090049188A (en) * | 2007-11-13 | 2009-05-18 | 연세대학교 산학협력단 | Stiffness generating apparatus using halbach array |
| CN201436604U (en) * | 2009-05-27 | 2010-04-07 | 上海微电子装备有限公司 | Gravity compensator |
| CN102215019A (en) * | 2011-06-01 | 2011-10-12 | 哈尔滨工业大学 | Active gravity compensation electromagnetic supporting device |
| CN102944979A (en) * | 2012-11-02 | 2013-02-27 | 清华大学 | Microchecker having permanent magnet gravity compensation structure |
| CN106953551A (en) * | 2017-05-05 | 2017-07-14 | 哈尔滨工业大学 | Magnetcisuspension suspension gravity compensator |
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