CN107479215B - A kind of Terahertz Meta Materials modulator approach and products thereof - Google Patents
A kind of Terahertz Meta Materials modulator approach and products thereof Download PDFInfo
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- CN107479215B CN107479215B CN201710568598.8A CN201710568598A CN107479215B CN 107479215 B CN107479215 B CN 107479215B CN 201710568598 A CN201710568598 A CN 201710568598A CN 107479215 B CN107479215 B CN 107479215B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0136—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/13—Function characteristic involving THZ radiation
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- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The invention discloses a kind of Terahertz Meta Materials modulator approaches and products thereof, belong to Meta Materials field, method are as follows: first, the manufacturing cycle cylindrical air chamber in the substrate of PDMS material, then, flexible media PDMS film is set above air chamber, Meta Materials are provided on PDMS film, then, outside pressure is added, make the flexible media PDMS film above air chamber that geometric parameter that is raised or sunken, and then changing Meta Materials on PDMS film occur, finally the response of incident THz wave is modulated.The present invention also provides the products for realizing method as above, it includes metamaterial structure and PDMS substrate, metamaterial structure is arranged in PDMS substrate, and Meta Materials include PDMS film and the periodic array in two dimensions that the PDMS film is arranged in, and phase property cylindrical air chamber is provided in PDMS substrate.Modulator approach simplicity of the present invention be reliable, easy to control, it is stronger to the modulating performance of line polarisation and circularly polarized light.
Description
Technical field
The invention belongs to Meta Materials fields, more particularly, to a kind of Terahertz Meta Materials modulator approach and products thereof.
Background technique
Meta Materials are a kind of novel periodic structure artificial composite materials.Since its effective dielectric constant and magnetic conductivity can
To obtain by calculating and designing, and then unusual electromagnetic property can be shown, obtain the extensive concern of researcher.
Meta Materials are generally designed to the sub-wavelength periods array structure such as split ring, rectangular strip, fishing net by metal, and inlay
It is constituted in the insulating materials such as resin, ceramics or oxide.At the resonant frequency fx, these structures have incident electromagnetic wave
Very strong coupling, and then realize to electromagnetism wave modulation, to change its transmission characteristic.By design cycle property structural unit,
The effective dielectric constant and equivalent permeability of available needs, to realize that extraordinary physics not available for nature material is special
Property, such as negative index, negative magnetoconductivity, negative permittivity, reversed Doppler effect etc..
Due to lacking effective wave source and detector, so that the research of THz wave lags behind the research of other wave bands, it should
Wave band is once referred to as Terahertz gap.And Meta Materials can make it respond THz wave by design structure size,
So Meta Materials have extremely important effect to the research of terahertz wave band.
In existing document, there are many modulator approaches of report metamaterial structure, such as document " Photo-excited
Broadband tunable terahertz metamaterial absorber " in, changed in simulations using side optical pumping
The carrier concentration for becoming silicon at split ring realizes Meta Materials wave absorbing device by change resonance mode and modulates on a large scale.The modulation
Range is big, has benefited from the mode of resonance that split ring is changed in modulation, can preferably explain modulation by distribution map of the electric field
Variation, simultaneously because cause the variation of electromagnetic property by free carrier, so driving time can achieve picosecond or less.
But the technology difficulty that silicon is embedded at split ring is larger, is difficult to prepare material object.For another example document " Design of a
tunable terahertz narrowband metamaterial absorber based on an
Electrostatically actuated MEMS cantilever and split ring resonator array " make
The cantilever beam made of MEMS technology controls the equivalent capacity at cantilever beam by voltage, and then regulates and controls to absorption characteristic.
It is larger using electrostatic drive modification scope, and absorptivity can reach near perfect absorption in modulated process.But disadvantage is same
It is complex manufacturing technology, is difficult to produce material object.But the structure that generally speaking, this kind of document is mentioned can only be confined to incident light
The modulation of transmissison characteristic, not can be carried out Polarization Modulation.
Also the substrate for thering is document to use PDMS flexible media as Meta Materials, such as document " Mechanically tunable
Terahertz metamaterials " in using PDMS as " I " fonts Meta Materials substrate, changed by way of stretching
The spacing of dies is finally modulated the transmissivity of incident THz wave.
Noted herein, PDMS has high resiliency characteristic, has suitable fissipation factor, and pass through experimental verification repeatedly
PDMS stretches the durability of modulation, is a kind of ideal substrate as Meta Materials, but the metamaterial structure is equally confined to
The modulation of transmissison characteristic.
Also there is document using helix structure, such as document " Enantiomeric switching of chiral
metamaterial for terahertz polarization modulation employing vertically
Deformable MEM spirals " in using flowing gas and changing spiral winding shape, and then to incident line polarisation
Deflection modulation is carried out, final deflection angle is up to 28 degree.But due to there is no materials for support helix structure, the spiral shell in modulation
The deformation of spin line is irregular.For another example, document " Kan T, Isozaki A, Kanda N, et al.Spiral metamaterial
for active tuning of optical activity[J].Applied Physics Letters,2013,102
(22): 221906. " being deformed helical structure by electrostatic drive, Polarization Modulation finally is carried out to incident line polarisation.
But it is weaker to the modulating performance of line polarisation.
Therefore, it is necessary to develop a kind of novel Terahertz Meta Materials modulator approach and products thereof, it is desirable that its modulator approach is easy,
Be reliable, easy to control and it is stronger to the modulating performance of line polarisation and rotatory polarization.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, the present invention provides a kind of Terahertz Meta Materials modulator approaches
And products thereof, it is intended that designing a kind of periodic cylindrical air chamber prepared by PDMS, outside pressure, which is added, makes air
Geometric parameter that is raised or sunken, and then changing Meta Materials on PDMS film occurs for the flexible media PDMS diaphragm above chamber, most
The response of incident THz wave is modulated eventually, modulator approach is easy, is reliable, easy to control and to line polarisation and circle
The modulating performance of polarisation is stronger.
To achieve the above object, according to one aspect of the present invention, a kind of Terahertz Meta Materials modulator approach is provided, it is first
First, then flexible media PDMS is arranged in the manufacturing cycle cylindrical air chamber in the substrate of PDMS material above air chamber
Film is provided with Meta Materials on PDMS film, then, outside pressure is added, makes the flexible media PDMS film above air chamber
Occur it is raised or sunken, and then change PDMS film on Meta Materials geometric parameter, finally to the response of incident THz wave into
Row modulation.
In one embodiment of the invention, the two dimension that Meta Materials are prepared on PDMS film for any conductor or semiconductor
Periodic array.
In one embodiment of the invention, the periodic array in two dimensions that Meta Materials are prepared on PDMS film for metallic gold.
In one embodiment of the invention, any conductor or the periodic array in two dimensions or metal of semiconductor preparation
The periodic array in two dimensions and periodic cylindrical air chamber of gold preparation correspond.
The second aspect according to the invention also provides a kind of a kind of Terahertz Meta Materials tune for realizing method as described above
Method product processed comprising metamaterial structure and PDMS substrate, metamaterial structure are arranged in PDMS substrate, the Meta Materials packet
PDMS film and the periodic array in two dimensions that the PDMS film is set are included, the periodic array in two dimensions material is conductor or partly leads
Body, phase property cylindrical air chamber is provided in PDMS substrate, and periodic cylindrical air chamber and periodic array in two dimensions correspond.
In one embodiment of the invention, metamaterial structure and PDMS substrate are connected as one by way of bonding.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, can obtain down and show
Beneficial effect:
A kind of periodic cylindrical air chamber prepared by PDMS is designed in the present invention, outside pressure, which is added, to be made on air chamber
Geometric parameter that is raised or sunken, and then changing Meta Materials on PDMS film occurs for the flexible media PDMS diaphragm of side, final right
The response of incident THz wave is modulated.Its manufacture craft is simple, easily prepared.By adjusting PDMS diaphragm occur protrusion or
Sinking degree, so that it may be modulated, modulator approach is easy, reliable, and repeatability is strong.In addition, its modulating performance is excellent, band is modulated
It is wider, and modulation can be realized to linearly polarized light and circularly polarized light.
Detailed description of the invention
Fig. 1~3 are the explanations of modulated structure, wherein Fig. 1 is two-dimensional metallic array-PDMS dielectric layer-metal layer three-layered node
Structure schematic diagram is the metamaterial structure of top, and Fig. 2 is the PDMS substrate schematic diagram for digging out air chamber, can be in the PDMS substrate
Driver is set, and it is the overall structure that the two is bonded together that Fig. 3, which is the schematic diagram after PDMS substrate is bonded with Meta Materials,.
Fig. 4 is the periodical chiral spiral structure unit mentioned in example 1.
Fig. 5 is to be deformed according to helical structure and define different chiral schematic diagrames, and Fig. 5 (a) is right-handed helix structure, Fig. 5
It (b) is left hand helix structure.
Fig. 6 is that helical structure carries out Deflection modulation to line polarisation.
Fig. 7 and Fig. 8 is the modulation that helical structure carries out Transflective to rotatory polarization, wherein as shown in fig. 7, working as incident light
When for left-handed rotatory polarization, due to different from the rotation of helical structure, most of light can be reflected back；As shown in figure 8, working as incident light
When for dextrorotation rotatory polarization, due to identical as the rotation of helical structure, most of light can be penetrated.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
The present invention mainly proposes a kind of method Terahertz control measures in conjunction with Meta Materials, proposes a kind of novel tune
Mode processed combines Terahertz regulation and Meta Materials characteristic, a kind of periodic cylindrical air chamber is designed, in periodicity
Outside pressure is added on cylindrical air chamber makes flexible media PDMS (dimethyl silicone polymer) circular membrane above air chamber
Geometric parameter that is raised or sunken, and then changing Meta Materials on PDMS film occurs, finally Meta Materials electromagnetic property is adjusted
System.
Present applicant proposes a kind of novel Meta Materials control methods, implementation is to make dielectric layer that shape occur by external force
Become, and then change the geometric parameter in metal layer periodic unit, achievees the purpose that modulating resonance frequency.
It realizes that the product structure of this modulator approach is segmented into two parts: being partially above metamaterial structure, by two-dimensional gold
Belong to periodic array and PDMS film is constituted, sees Fig. 1；Lower part is the substrate made of PDMS, sees Fig. 2.Existed using related process
PDMS substrate surface prepares the identical periodical array of circular apertures of specification, the two-dimensional metallic at the top of these borehole structures and Meta Materials
Layer structure is corresponding.Finally metamaterial structure and PDMS substrate are bonded together, constitute the final design structure such as Fig. 3.
Wherein, Fig. 1~3 are the explanations of modulated structure, and it is top that Fig. 1, which is two-dimensional metallic array-PDMS dielectric layer two-layer structure schematic diagram,
Metamaterial structure, Fig. 2 is the PDMS substrate schematic diagram for digging out air chamber, can the base layer on driver is set, Fig. 3 is
PDMS substrate be bonded with Meta Materials after schematic diagram, be the overall structure that the two is bonded together.
In modulated process, modulator approach is as follows:
Firstly, by additional pressure, such as the packaged addition air pressure of device or hydraulic pressure, so that pressure acts directly on sky
On PDMS diaphragm at air cavity, make its overall structure that geometric parameter that is raised or sunken, and then changing metamaterial structure occur, most
Eventually, the electromagnetic wave for being incident on the structure is regulated and controled.Wherein, the PDMS film at air chamber due to not contacted with substrate and
Deformation occurs for meeting.And it is other local because being contacted with substrate, deformation quantity is small.
In order to further explain the superiority of the method for the present invention and product Terahertz tunable performance, below with reference to specific
Embodiment is further described as follows:
Embodiment 1
The present embodiment uses a kind of Meta Materials Polarization Modulation structure, and this structure is known as chiral spiral structure, and structure is shown
Intention is shown in Fig. 4.In Fig. 4, the length of periodic array in two dimensions structural unit and wide respectively Px, Py.
It in the first layer of metamaterial structure, is made of helix, helical structure is located at PDMS substrate cylindrical air chamber
Surface, and spiral center is on the axis of symmetry of cylindrical air chamber.Helical structure materials'use is gold, with a thickness of
45nm.2 μm of helical structure line width, the inside radius of helix is 2 μm, outer radius is 25 μm.The second layer is dielectric layer, material
Use PDMS, thickness tsubIt is 4 μm, wherein the radius of PDMS diaphragm is that R is 25 μm.
The polarization properties of Meta Materials are regulated and controled by changing the outside pressure of PDMS diaphragm.By Fig. 5 it can be seen that,
Fig. 5 (a) is right-handed helix structure, and Fig. 5 (b) is left hand helix structure.When diaphragm raises upward, definition helical structure is the right hand
Spiral；When diaphragm is to lower recess, definition helical structure is left hand helix.When incident light is line polarisation, by the tune of Meta Materials
Production is elliptically polarized light with emergent light, and the main shaft of elliptically polarized light is changed compared to the polarization direction of incident light
Become.The helical structure of different rotation directions will generate antipodal effect, schematic diagram to the polarization modulation characteristics of incident line polarisation
See Fig. 6.
Embodiment 2
This example uses structure same as example one, but incident wave source uses circularly polarized light, inquires into helical structure pair
The influence of rotatory polarization, incident circularly polarized light can be divided into left-handed rotation and two kinds of right-handed rotation by the difference of rotation direction.
Outside pressure by changing PDMS diaphragm regulates and controls come the reflection and transmission characteristic to Meta Materials.Specifically, working as
Addition upwards pressure, and the helical structure on diaphragm can raise upward, and helical structure is right-handed helix.When incident light is left-handed circle
When polarisation (such as Fig. 7), due to different from the rotation of helical structure, most of light can be reflected back；When incident light is that dextrorotation circle is inclined
Light time (such as Fig. 8), due to identical as the rotation of helical structure, most of light can be penetrated.When diaphragm is to lower recess, helical structure is
Left hand helix, analytic process are same as above.The rotation for changing helical structure by outside pressure, finally to the reflectivity of incident rotatory polarization
It is modulated with transmissivity.
Generally speaking, present applicant proposes a kind of novel Terahertz Meta Materials modulator approach, design it is a kind of by
The periodic cylindrical air chamber of PDMS preparation, outside pressure, which is added, keeps the generation of the flexible media PDMS diaphragm above air chamber convex
It rises or is recessed, and then change the geometric parameter of Meta Materials on PDMS film, finally the response of incident THz wave is modulated.
The application designs a kind of metamaterial structure, i.e. chiral spiral structure, such structure and novel modulation system
It combines, allows and PDMS film structure is more efficiently changed by outside pressure, final regulation and control Meta Materials electromagnetic response is special
Property.
In the application, PDMS's should be entitled polydimethylsiloxane, and Chinese is polydimethylsiloxanes
Alkane.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (7)
1. a kind of Terahertz Meta Materials modulator approach, which is characterized in that firstly, the manufacturing cycle circle in the substrate of PDMS material
Cylindrical air chamber,
Then, flexible media PDMS film is set above air chamber, is provided with Meta Materials on PDMS film,
Then, outside pressure is added, the flexible media PDMS film above air chamber occurs raised or sunken, and then change
The geometric parameter of Meta Materials on PDMS film, is finally modulated the response of incident THz wave.
2. Terahertz Meta Materials modulator approach as described in claim 1, which is characterized in that Meta Materials are any on PDMS film
Conductor or the periodic array in two dimensions of semiconductor preparation.
3. Terahertz Meta Materials modulator approach as described in claim 1, which is characterized in that Meta Materials are metal on PDMS film
The periodic array in two dimensions of gold preparation.
4. Terahertz Meta Materials modulator approach as claimed in claim 2, which is characterized in that any conductor or semiconductor preparation
Periodic array in two dimensions and periodic cylindrical air chamber correspond.
5. Terahertz Meta Materials modulator approach as claimed in claim 3, which is characterized in that the two-dimension periodic battle array of metallic gold preparation
Column are corresponded with periodic cylindrical air chamber.
6. a kind of realize a kind of Terahertz Meta Materials modulating device such as one of claim 1-5 the method, which is characterized in that
It includes metamaterial structure and PDMS substrate, and metamaterial structure is arranged in PDMS substrate,
The metamaterial structure includes PDMS film and the periodic array in two dimensions that the PDMS film is arranged in, and is arranged in PDMS substrate
There is periodic cylindrical air chamber, periodic cylindrical air chamber and periodic array in two dimensions correspond.
7. device as claimed in claim 6, which is characterized in that metamaterial structure is connected by way of bonding with PDMS substrate
It is integrated.
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| WO2019198760A1 (en) * | 2018-04-12 | 2019-10-17 | 国立研究開発法人理化学研究所 | Light-absorbing element, light-absorbing body, and method for manufacturing light-absorbing element |
| CN108631063B (en) * | 2018-05-02 | 2023-11-21 | 中国计量大学 | Electrostatic-driven terahertz metamaterial modulator |
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| CN109659702B (en) * | 2018-11-13 | 2020-02-14 | 华中科技大学 | Novel adjustable terahertz metamaterial wave-absorbing structure |
| CN109407352A (en) * | 2018-11-20 | 2019-03-01 | 中国工程物理研究院电子工程研究所 | A kind of terahertz polarization regulation device and preparation method thereof |
| CN110690576B (en) * | 2019-09-03 | 2021-08-17 | 北京航空航天大学青岛研究院 | Device and method for realizing electromagnetic wave modulation based on metamaterial three-dimensional structure |
| CN110911850A (en) * | 2019-11-29 | 2020-03-24 | 中国人民解放军空军工程大学 | Wave-absorbing characteristic regulation and control method for regulating local strain of flexible metamaterial film |
| WO2021220808A1 (en) * | 2020-05-01 | 2021-11-04 | ソニーグループ株式会社 | Wave control medium, wave control element, wave control device, and method for manufacturing wave control medium |
| CN112886260B (en) * | 2021-01-12 | 2022-06-17 | 之江实验室 | Force/electricity double-adjustable multi-frequency-band reflection type polarization insensitive resonator |
| CN113866863B (en) * | 2021-10-28 | 2023-12-29 | 觉芯电子(无锡)有限公司 | Chiral optical element and preparation method thereof |
| CN113885118A (en) * | 2021-11-01 | 2022-01-04 | 觉芯电子(无锡)有限公司 | Chiral optical element and preparation method thereof |
| CN115424602A (en) * | 2022-07-31 | 2022-12-02 | 苏州声学产业技术研究院有限公司 | Rigidity-adjustable sound insulation board made of metamaterial |
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