CN110690576B - Device and method for realizing electromagnetic wave modulation based on metamaterial three-dimensional structure - Google Patents
Device and method for realizing electromagnetic wave modulation based on metamaterial three-dimensional structure Download PDFInfo
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- CN110690576B CN110690576B CN201910829288.6A CN201910829288A CN110690576B CN 110690576 B CN110690576 B CN 110690576B CN 201910829288 A CN201910829288 A CN 201910829288A CN 110690576 B CN110690576 B CN 110690576B
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- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
- H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
- H01Q15/0086—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices having materials with a synthesized negative refractive index, e.g. metamaterials or left-handed materials
Abstract
The invention provides a device and a method for realizing electromagnetic wave modulation based on a metamaterial three-dimensional structure, wherein the device comprises: an electromagnetic wave modulation device and an array control device; the electromagnetic wave modulation device is a metamaterial three-dimensional structure; the electromagnetic wave modulation device is arranged in the array control device, and the array control device is used for adjusting the state of the electromagnetic wave modulation device so that the response of the electromagnetic wave passing through the electromagnetic wave modulation device is modulated into a set response. The method comprises the following steps: making the electromagnetic wave incident to the electromagnetic wave modulation device to obtain the response of the set response electromagnetic wave; and adjusting the state of the electromagnetic wave modulation device through the array control device to obtain the set electromagnetic wave response and finish the response modulation of the electromagnetic wave. The device and the method for mechanically and three-dimensionally modulating the electromagnetic waves can meet the signal modulation requirements of different frequency bands, and have strong anti-electromagnetic interference capability and stability.
Description
Technical Field
The invention relates to the technical field of metamaterials, in particular to a device and a method for realizing electromagnetic wave modulation based on a metamaterial three-dimensional structure.
Background
Metamaterials (also called artificial specific materials) are artificial electromagnetic media which are formed by arranging and distributing artificially manufactured micro-nano-scale size units according to a certain rule. Because the unit size of the metamaterial is smaller than the wavelength of the working frequency band, the metamaterial can be regarded as a material with uniform performance relative to the working wavelength. Compared with natural materials, the metamaterial has the most remarkable advantages that: the adjustment of the attribute parameters of the material is realized through manual design, and particularly, the adjustment is carried out on the dielectric constant and the magnetic permeability, so that the characteristics superior to or even different from natural materials are obtained.
Nowadays, metamaterials have a plurality of wide applications, such as stealth coatings, perfect lenses, metamaterial antennas and the like. For example, the principle of realizing the wave-absorbing stealth technology based on the metamaterial is as follows: in the areas of the resonance frequency and the anti-resonance frequency, the complex dielectric constant and the imaginary part of the complex permeability of the loss characteristic of the marking material also reach the peak value, which means that the metamaterial can show strong absorption characteristics to electromagnetic waves, so that a periodic structure with strong wave absorption effect can be designed on the basis of the metamaterial. In addition, the metamaterial can realize refraction which is completely different from a conventional material, so that the research attention of the technical personnel in the field on stealth is expanded from simple wave-absorbing research to control diffraction of electromagnetic waves so as to achieve the purpose of stealth.
On the one hand, the propagation property of electromagnetic waves is closely related to the refractive index of the transmission medium, and if the electromagnetic parameters of the medium, such as the dielectric constant or the magnetic permeability, can be manually adjusted, the control of the propagation of electromagnetic waves can be realized. And based on the easy adjustability of electromagnetic parameters such as working frequency, dielectric constant, magnetic conductivity and the like, the impedance matching between the wave-absorbing layer of the metamaterial and the free space is easy to realize, so that the reflected wave intensity cover is greatly reduced.
On the other hand, at present, the realization of the electromagnetic wave modulation of the metamaterial is performed on the basis of a two-dimensional metamaterial. However, the two-dimensional metamaterial modulation has unidirectional sensitivity, and thus, omni-directional signal modulation cannot be realized. In the prior art, electromagnetic wave modulation is performed in an electrically controlled manner, and corresponding electromagnetic interference is generated in the modulation process.
Disclosure of Invention
The embodiment of the invention provides a device and a method for realizing electromagnetic wave modulation based on a metamaterial three-dimensional structure, which are used for solving or partially solving the defects in the prior art.
In one aspect, an embodiment of the present invention provides an apparatus for implementing electromagnetic wave modulation based on a three-dimensional metamaterial structure, including: an electromagnetic wave modulation device and an array control device; the electromagnetic wave modulation device is used for modulating the response characteristic response of the passing electromagnetic wave into a set response, and is arranged in the array control device. The array control device is used for adjusting the state of the electromagnetic wave modulation device, so that the response characteristic of the electromagnetic wave passing through the electromagnetic wave modulation device is modulated into a set response.
On the other hand, an embodiment of the present invention provides a method for implementing electromagnetic wave modulation based on a metamaterial three-dimensional structure, including: making the electromagnetic wave incident to the electromagnetic wave modulation device to obtain a set response electromagnetic wave; and the state of the electromagnetic wave modulation device is adjusted through the array control device, the set electromagnetic wave response characteristic is further acquired, and the response modulation of the electromagnetic wave is completed.
According to the device and the method for realizing electromagnetic wave modulation based on the metamaterial three-dimensional structure, provided by the embodiment of the invention, the electromagnetic wave modulation device and the array control device are arranged, so that the method for mechanically three-dimensionally modulating the electromagnetic waves is provided, can meet the signal modulation requirements of different frequency bands, and has strong anti-electromagnetic interference capability and stability.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an apparatus for implementing electromagnetic wave response characteristic modulation based on a three-dimensional metamaterial structure according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of another apparatus for implementing electromagnetic wave response characteristic modulation based on a three-dimensional metamaterial structure according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of another apparatus for implementing electromagnetic wave response characteristic modulation based on a three-dimensional metamaterial structure according to an embodiment of the present invention;
FIG. 4 is a process diagram of a method for fabricating a three-dimensional metamaterial structure according to an embodiment of the present invention;
FIG. 5 is a process diagram of another method for fabricating a three-dimensional metamaterial structure according to an embodiment of the present invention;
FIG. 6 is a process diagram of another method for fabricating a three-dimensional metamaterial structure according to an embodiment of the present invention;
fig. 7 is a process diagram of another method for manufacturing a three-dimensional metamaterial structure according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without any inventive step, are within the scope of the present invention.
The metamaterial is an artificial composite structure or a conforming material with extraordinary material properties which some natural materials do not have, wherein the key point is that the structure sequence can be designed on the physical scale to break through some limits of natural laws, so that the extraordinary materials or functions beyond the ordinary properties of the nature can be obtained. In summary, metamaterials are generally artificially structurally-reorganized composite materials, and the properties of the metamaterials are composed of intrinsic properties of constituent materials and artificial microstructures; metamaterials tend to have extraordinary physical properties that are not available from natural materials.
As shown in fig. 1, an embodiment of the present invention provides an apparatus for implementing electromagnetic wave modulation based on a three-dimensional metamaterial structure, including: an electromagnetic wave modulation device 10 and an array control device 20, wherein the electromagnetic wave modulation device 10 is used for modulating the response characteristic of the passing electromagnetic wave into a set response, and the electromagnetic wave modulation device 10 is a metamaterial three-dimensional structure; the electromagnetic wave modulation device 10 is provided in an array control device 20, and the array control device 20 adjusts the state of the electromagnetic wave modulation device 10 such that the response of the electromagnetic wave passing through the electromagnetic wave modulation device 10 is modulated to a set response.
In wireless transmission, signals are radiated into space through an antenna in the form of electromagnetic waves. In order to achieve a high radiation efficiency, the size of the antenna should generally be larger than a quarter of the wavelength of the transmitted signal. The lower frequency components contained in the baseband signal have longer wavelengths, which makes the antenna too long to be implemented. The size of the radiating antenna can be reduced significantly by tuning the frequency spectrum of the baseband signal to a higher carrier frequency in response to the modulation. In addition, response modulation can realize that a plurality of baseband signals are respectively modulated to different carrier frequencies, so that channel multiplexing is realized, and the channel utilization rate is improved. Finally, the response modulation can also expand the signal bandwidth, improve the anti-interference and anti-fading capability of the system and improve the signal-to-noise ratio of transmission. Therefore, in a communication system, it is very critical to select an appropriate response modulation scheme.
The embodiment of the invention provides an electromagnetic wave modulation device which is different from a conventional electromagnetic wave modulation device, in particular to a device for realizing electromagnetic wave modulation based on a metamaterial three-dimensional structure, and the response characteristic of passing electromagnetic waves is adjusted by utilizing an electromagnetic wave modulation device 10 made of the metamaterial three-dimensional structure.
Wherein, the generation of electromagnetic wave can be excited by a photoconductive antenna, a quantum cascade laser, a carbon dioxide laser, a spinning film material and the like. Electromagnetic waves generated by excitation are radiated to the metamaterial three-dimensional structure array, and the metamaterial three-dimensional structure array generates frequency response of specific amplitude at specific frequency points to the electromagnetic waves. When the height of the metamaterial three-dimensional structure array changes, the amplitude of the frequency spectrum also changes up and down, and meanwhile, the position of a frequency point moves towards low frequency or high frequency, so that the modulation of electromagnetic response is realized.
For example, the electromagnetic wave modulation devices 10 made of the metamaterial three-dimensional structure may be arranged as an array made of the metamaterial three-dimensional structure. When the electromagnetic wave is incident into the metamaterial array perpendicular to the array plane, the electromagnetic wave is subjected to response modulation by the metamaterial array. In general, when the shape of the metamaterial array is determined, the frequency of the electromagnetic wave output after modulation is constant, and for convenience of expression, the shape may be referred to as a set response.
It should be noted that, the electromagnetic wave modulation device 10 configured as the metamaterial array structure according to the embodiment of the present invention is only a part of the embodiment of the present invention, and is not to be considered as a limitation to the protection scope of the embodiment of the present invention. The electromagnetic wave modulation device 10 may be configured in other shapes capable of modulating the frequency of the electromagnetic wave according to actual needs. In addition, the embodiment of the present invention does not specifically limit the three-dimensional structure of the metamaterial constituting the electromagnetic wave modulation device.
Further, when electromagnetic waves of different frequencies need to be acquired, in the prior art, different electromagnetic wave modulation devices need to be replaced. For example, if the electromagnetic wave modulation device is a metamaterial array, when electromagnetic waves of different frequencies need to be acquired, a different metamaterial array needs to be replaced. In contrast to the drawbacks of the prior art, the present embodiment provides a more convenient electromagnetic wave modulation apparatus, further comprising an array control apparatus 20. Specifically, the array control device 20 can adjust the state, shape, and the like of the electromagnetic wave modulation device 10. For example, if the electromagnetic wave modulation device is a metamaterial array, the geometric configuration of the metamaterial array can be adjusted by the array control device to change the output frequency by changing the geometric configuration.
It should be noted that, in the embodiments of the present invention, the structure of the array control device is not specifically limited, and any device capable of effectively adjusting parameters such as the state and shape of the electromagnetic wave modulation device is considered as the scope of the embodiments of the present invention.
The device for realizing electromagnetic wave modulation based on the metamaterial three-dimensional structure, provided by the embodiment of the invention, is provided with the electromagnetic wave modulation device and the array control device, and is capable of meeting the signal modulation requirements of different frequency bands and having strong anti-electromagnetic interference capability and stability.
Based on the contents of the above-described embodiments, as an alternative embodiment, as shown in fig. 2, an electromagnetic wave modulation apparatus includes: the structure comprises a substrate 101 and a metamaterial three-dimensional structure array 102 fixedly arranged on the upper surface of the substrate 101; the metamaterial three-dimensional structure array 102 is formed by metamaterial three-dimensional structure monomers which are arranged at preset intervals in an array mode.
The three-dimensional micro-nano printing technology mainly has two realization modes, namely, metal ions in an ionic water solution are deposited to a determined position through a micro-nano processing probe to realize the printing of a 3D structure; the other method is to apply strong pulse laser to chemical substances with the characteristic of absorbing ultraviolet light wave band and polymerizing, and realize the printing of the 3D structure by matching with a proper laser head scanning line.
The electromagnetic wave modulation device provided by the embodiment of the invention can be manufactured based on the three-dimensional micro-nano printing technology, and comprises a substrate 101 and a metamaterial three-dimensional structure array 102 fixedly arranged on the upper surface of the substrate 101. The substrate 101 and the metamaterial three-dimensional structure array 102 may be made of the same material or different materials. The metamaterial three-dimensional structure array 102 is formed by metamaterial three-dimensional structure monomers arranged in an array, the array arrangement mode can be set to be equal intervals or non-equal intervals according to actual needs, and the size of the intervals is set according to actual needs.
The embodiment of the invention provides a specific structure mode of an electromagnetic wave modulation device, the electromagnetic wave frequency is adjusted through a structure array formed by metamaterial three-dimensional structure monomers, and the structure array can be manufactured through a three-dimensional micro-nano printing technology, so that the realizability of the electromagnetic wave modulation device provided by the embodiment of the invention is improved.
Based on the content of the above embodiments, as an alternative embodiment, as shown in fig. 2, the array control device 20 includes but is not limited to: the closed chamber unit 201, the conduit 202 and the air pump device 203, and the metamaterial three-dimensional structural unit is made of flexible metamaterial. Wherein, the inner top wall and the outer top wall of the closed chamber unit 201 are both made of flexible materials. The conduit 202 penetrates through the outer top wall of the closed chamber unit 201 to enter the closed chamber unit 201, and the air pump device 203 controls the discharge or injection of the gas in the closed chamber unit 201 through the conduit 202 to control the gas pressure inside the closed chamber unit 201.
When the gas pressure inside the closed chamber unit 201 is smaller than the external gas pressure, the inner top wall of the closed chamber unit 201 elastically deforms toward the metamaterial three-dimensional structure monomer, and downward pressure is applied to the metamaterial three-dimensional structure monomer, so that the height of the metamaterial three-dimensional structure monomer is reduced, and the adjustment of the state of the electromagnetic wave modulation device 10 is completed.
On the other hand, when the gas pressure inside the closed chamber unit 201 is greater than the external gas pressure, the inner top wall of the closed chamber unit 201 elastically deforms in the opposite direction to the metamaterial three-dimensional structure single body, and applies a tensile force to the metamaterial three-dimensional structure single body, so that the height of the metamaterial three-dimensional structure single body is increased, and the adjustment of the state of the electromagnetic wave modulation device 10 is completed.
Further, the closed chamber unit 201 is a closed hollow structure composed of an inner layer structure and an outer layer structure, an inner top wall of the closed hollow structure is composed of a flexible material, and an outer top wall of the closed hollow structure can be made of a flexible material or a hard material. The flexible material can be rubber or elastic plastic, and the like, and can generate corresponding elastic deformation when stressed. One port of the duct 203 enters the inside of the closed chamber unit 201 through the outer top wall, and the other port is connected to the air pump device 203. Wherein the air pump device 203 can inflate or deflate the closed hollow structure of the closed chamber unit 201 through the conduit 202 as required.
When the air pump device 203 extracts air from the closed hollow structure, the internal pressure of the closed hollow structure is reduced, the inner top wall of the closed chamber unit 201 elastically deforms towards the direction of the metamaterial three-dimensional structure monomer, and the metamaterial three-dimensional structure monomer is extruded. Because the metamaterial three-dimensional structure monomer is flexible, the height of the metamaterial three-dimensional structure can be correspondingly reduced after the pressure of the inner top wall on the metamaterial monomer exceeds the deformation pressure threshold value of the metamaterial monomer. When the air pumping amount of the air pump device 203 is larger, the height reduction amount of the metamaterial three-dimensional structure monomer is larger, so that the state variation amount of the metamaterial three-dimensional structure monomer can be controlled by controlling the air pumping amount of the air pump device 203, and the purpose of accurate regulation and control is achieved.
Accordingly, when the air pump device 203 inflates air from the closed hollow structure, the internal pressure of the closed hollow structure is increased, the inner top wall of the closed chamber unit 201 elastically deforms in the opposite direction to the metamaterial three-dimensional structure unit, and the metamaterial three-dimensional structure unit is stretched. Because the metamaterial three-dimensional structure monomer is flexible, the height of the metamaterial three-dimensional structure can be correspondingly increased after the metamaterial three-dimensional structure monomer is subjected to the tensile force of the inner top wall on the metamaterial monomer to exceed the deformation pressure threshold value of the metamaterial monomer. When the inflation volume of the air pump device 203 is larger, the height increase amount of the metamaterial three-dimensional structure monomer is larger, so that the state variation of the metamaterial three-dimensional structure monomer can be controlled by controlling the inflation volume of the air pump device 203, and the purpose of accurate regulation and control is achieved.
Further, when the height of the metamaterial three-dimensional structure unit is changed, and the electromagnetic wave passes through the metamaterial three-dimensional structure array 102 composed of the metamaterial three-dimensional structure unit, the output response of the electromagnetic wave is correspondingly changed. Therefore, the purpose of modulating the response of the electromagnetic wave can be finally achieved by controlling the operating state of the air pump device 203.
Based on the content of the above embodiments, as an alternative embodiment, the inner top wall of the closed chamber unit 201 may be connected with the top of the metamaterial three-dimensional structural unit. The advantage of adopting above-mentioned structure lies in, because the change of inside atmospheric pressure when airtight chamber unit 201, lead to the deformation of its interior roof can directly drive the free change of height of metamaterial three-dimensional structure, the reaction is more sensitive, the effectual precision and the controllability that have promoted the adjustment of electromagnetic wave frequency. It should be noted that, the embodiment of the present invention does not specifically limit how to connect the inner top wall with the three-dimensional structural unit.
Based on the content of the foregoing embodiments, as an alternative embodiment, an embodiment of the present invention provides another apparatus for implementing electromagnetic wave modulation based on a three-dimensional metamaterial structure, where the array control apparatus includes: a liner top 204 and an outer wall 205, the liner top 204 and/or the substrate 101 being movable up and down along the axis of the outer wall 205. When the distance between the substrate top 204 and the substrate 101 is smaller than the height of the metamaterial three-dimensional structure single body, the metamaterial three-dimensional structure single body is compressed, and the state of the electromagnetic wave modulation device is adjusted.
As shown in fig. 3, a case where the liner cap 204 is movable up and down along the axis of the outer wall 205 is provided. Wherein the liner top 204 may be provided as a plate-like structure, and the lower surface thereof is provided as a smooth plane. The liner roof 204 is embedded between the outer walls 205 and can move up and down along the outer walls 205 under the action of external force, and when the liner roof moves down, the metamaterial three-dimensional structure array 102 can be compressed, so that the three-dimensional structure single bodies of the materials in the array are subjected to height-reduction deformation.
Further, the liner tops 204 may be connected to the tops of the metamaterial three-dimensional structure units near the inner wall of the metamaterial three-dimensional structure array 102. Therefore, the height adjustment amount of the metamaterial three-dimensional structure monomer can be directly controlled through the displacement amount of the liner top 204, and the height of the metamaterial three-dimensional structure monomer can be reduced or increased.
Further, another apparatus for realizing electromagnetic wave modulation based on a three-dimensional metamaterial structure is provided in the embodiments of the present invention, the liner top 204 may be fixed, and height adjustment of a single three-dimensional metamaterial structure may be realized by moving the substrate 101. The substrate top 204 and the substrate 101 can also be set to be movable structures, and height adjustment of the metamaterial three-dimensional structure single body can be achieved in multiple ways through simultaneous movement of the two structures.
Further, the embodiments of the present invention may be configured to implement the up-and-down movement of the substrate and/or the top substrate between the outer walls 205 by installing a hydraulic, pneumatic or electric adjusting device on the substrate and/or the top substrate, and the embodiments of the present invention are not particularly limited thereto.
Based on the content of the foregoing embodiment, as an alternative embodiment, the apparatus for implementing electromagnetic wave modulation based on a three-dimensional metamaterial structure provided in the embodiment of the present invention, the array control apparatus 20 further includes but is not limited to: a slide rail with scale on the outer wall 205, wherein the liner cap 204 and/or the substrate 101 can move up and down along the axis of the outer wall 205 through the slide rail, and the distance of the up and down movement of the liner cap 204 and/or the substrate 101 is controlled by the scale value.
Specifically, the slide rail is vertically arranged on the inner side wall of the outer wall 205 of the array control device, and the two ends of the liner top 204 and/or the substrate 101 close to the outer wall 205 are respectively and fixedly arranged on the slide rail, so that the slide rail can move up and down along the axis of the outer wall 205. By such a structural arrangement, response adjustment to electromagnetic waves is made more feasible.
Furthermore, corresponding scales can be arranged on the slide rail, and the displacement of the substrate top 204 and/or the substrate 101 can be accurately controlled through the scales, so that the height adjustment amount of the metamaterial three-dimensional structure monomer can be accurately determined, and the accurate adjustment of electromagnetic wave response can be further realized.
The embodiment of the invention provides a method for realizing electromagnetic wave modulation based on a metamaterial three-dimensional structure, which comprises the following steps of:
step 1, making the electromagnetic wave incident to an electromagnetic wave modulation device 10, and acquiring a standard electromagnetic wave with set response;
and step 2, adjusting the state of the electromagnetic wave modulation device 10 through the array control device 20 to obtain the set electromagnetic wave response, and completing the response modulation of the electromagnetic wave.
Specifically, the electromagnetic wave modulation device 10 is a metamaterial three-dimensional structure, and includes a substrate 101 and a metamaterial three-dimensional structure array 102 fixedly arranged on the upper surface of the substrate 101; the metamaterial three-dimensional structure array 102 is formed by metamaterial three-dimensional structure monomers which are arranged at a certain interval and in an array mode.
When an electromagnetic wave is incident on the electromagnetic wave modulation device 10, the metamaterial three-dimensional structure array 102 of the electromagnetic wave modulation device 10 performs response modulation on the incident electromagnetic wave, and then outputs an electromagnetic wave with a set response. When electromagnetic waves with specific responses need to be output, amplitude, frequency point or phase adjustment needs to be performed on the electromagnetic waves, and an embodiment of the present invention provides an array control device 20, which can adjust the state of a metamaterial three-dimensional structure array 102 in an electromagnetic wave modulation device 10 according to actual needs, and mainly adjusts the height of a metamaterial three-dimensional structure monomer in the metamaterial three-dimensional structure array 102, so as to adjust the response characteristics of the electromagnetic waves.
It should be noted that in this embodiment, the prepared three-dimensional structure material may be a conductive material or a non-conductive material. If the three-dimensional structure prepared by the method is a non-conductive material, the conductivity of the material can be realized by means of film coating and the like.
According to the device and the method for realizing electromagnetic wave modulation based on the metamaterial three-dimensional structure, provided by the embodiment of the invention, the electromagnetic wave modulation device and the array control device are arranged, so that the method for mechanically three-dimensionally modulating the electromagnetic waves is provided, can meet the signal modulation requirements of different frequency bands, and has strong anti-electromagnetic interference capability and stability.
Based on the content of the foregoing embodiments, as an alternative embodiment, an embodiment of the present invention provides a method for preparing a three-dimensional metamaterial structure array, including but not limited to the following steps:
step 1, uniformly arranging a sacrificial material layer 402 on the upper surface of a substrate 401 based on a coating process;
step 2, generating a micron hole 403 in the sacrificial material layer 402 based on a patterning process;
step 3, based on a plating process, a first conductive material layer 404 and a second conductive material layer 405 are disposed on the upper surface of the sacrificial material layer 402, wherein a part of the first conductive material layer 404 may be filled in the middle of the micro-hole 403 of the sacrificial material;
step 4, after the patterning of the conductive material layers 404 and 405 is finished, repeating all the steps, and finally removing the sacrificial material layer; forming the desired three-dimensional structure.
Specifically, as shown in fig. 4, the preparation method of the metamaterial three-dimensional structure array provided by the embodiment of the invention is mainly a preparation method based on a bimetal process. Firstly, based on a coating process, for example: phase Vapor Deposition (PVD) provides a uniform layer 402 of sacrificial material on a substrate 401. Then, by a patterning process, for example: a microlithography process provides a plurality of micropores 403 in the sacrificial material layer 402.
Further, the coating process is reused, such as: the first conductive material layer 404 and the second conductive material layer 405 are sequentially disposed on the sacrificial material layer 402 by evaporation, MBE, or magnetron sputtering, and the like, and generally, the first conductive material layer 404 and the second conductive material layer 405 are required to have different thermal expansion coefficients, and at this time, the first conductive material layer 404 is injected into and filled in all the micropores 403.
Further, a sacrificial layer is spin-coated on the upper surface of the uppermost layer, i.e., the second conductive material layer 405, to form a uniform pattern layer 406, and a three-dimensional structure array pattern 407 is lithographically etched into the pattern layer 406, where the three-dimensional structure array pattern 407 is a prefabricated three-dimensional array 1: 1, the two-dimensional pattern combination is pre-manufactured in a plurality of photolithography masks,
further, the three-dimensional structure array pattern 407 located in the sacrificial layer 406 is etched away by an etching process, and the remaining un-etched portion is transferred into the first conductive material layer 404 and the second conductive layer 405.
Further, the sacrificial material layer 408 is removed; forming the desired three-dimensional structure 409.
Specifically, the first conductive material layer 404 and the second conductive material layer 405 may be raised or recessed to different degrees by an annealing process according to the difference of the thermal expansion coefficients of the first metal layer 404 and the second conductive material layer 405.
Based on the content of the foregoing embodiment, as an alternative embodiment, as shown in fig. 5, an embodiment of the present invention further provides a method for preparing a three-dimensional metamaterial structure array, including but not limited to the following steps:
step 1, arranging a printing material layer 501 on the surface of a substrate 502;
step 2, printing the metamaterial three-dimensional structure array in the printing material layer 501 based on a graphical process;
and 3, dissolving the part of the three-dimensional structure array of the unprinted metamaterial in the printing material layer 501 based on the developing process.
Specifically, the preparation method of the metamaterial three-dimensional structure array provided by the embodiment of the invention is mainly a preparation method based on a two-photon lithography process (TPL process), wherein the TPL process is mainly a process for performing lithography based on a two-photon absorption effect. Since most substances absorb light by taking a photon as a basic unit. However, in rare cases, due to the existence of a special energy level transition mode in a substance, two photons are absorbed simultaneously, which leads to a nonlinear enhancement of the absorption rate of light with a specific wavelength. When the laser light is focused with a polarity, the reaction region can be focused to a very small position near the focal point.
According to the preparation method of the metamaterial three-dimensional structure array provided by the embodiment of the invention, the reaction vessel can be driven to move by the nano-scale precision moving platform, and the substrate provided with the printing material layer 501 is placed in the reaction vessel. When the reaction vessel passes through the intersection point of the two-photon laser generated by the two-photon laser 503, the photosensitive substance in the printing material layer 501 is denatured and solidified, thereby completing the preparation of the metamaterial three-dimensional structure array.
Further, the acquired three-dimensional metamaterial structure array may be observed through the microscope 504 to check whether the printed structure is the target three-dimensional metamaterial structure array.
Further, the portions of the sacrificial layer 502 not printed with the three-dimensional structure array of the metamaterial are dissolved based on a developing process.
Furthermore, after the array is formed, the metal deposition effect on the array structure can be realized by adopting the modes of electroplating, chemical plating, atomic layer deposition, physical vapor deposition and the like, the preparation of the metal flexible three-dimensional structure metamaterial is completed, the three-dimensional structure can be printed by directly using a conductive material, the metal plating process step can be omitted, and the process flow is simplified.
Compared with the traditional preparation process, the preparation method of the metamaterial three-dimensional structure array provided by the embodiment of the invention has the following greatest advantages: the TPL process does not need a mask plate, drawing is directly carried out through a three-dimensional drawing tool, printing is carried out through computer transmission driving equipment, and convenience and rapidness are achieved.
Based on the content of the foregoing embodiment, as an alternative embodiment, as shown in fig. 6, an embodiment of the present invention further provides a method for preparing a three-dimensional metamaterial structure array, including, but not limited to, the following steps:
s1, sequentially subdividing the metamaterial three-dimensional structure array image to obtain a two-dimensional image slice group;
s2, transmitting the first layer of two-dimensional image slices in the two-dimensional image slice group to a photoelectric conversion module, and generating optical signal codes through an electro-optical conversion module, wherein the optical signal codes correspond to the two-dimensional image slices one to one; removing the first layer of two-dimensional image slices from the two-dimensional image slice group;
s3, projecting the optical signal code to the surface of the printing material through a reduction lens by using an optical module and a graphical process to obtain a first layer of metamaterial three-dimensional structure slice;
and S4, sequentially and iteratively executing the step S2 and the step S3, and enabling the obtained next metamaterial three-dimensional structure slice to form a subsequent layer of the previous metamaterial three-dimensional structure slice until the metamaterial three-dimensional structure array is obtained.
Specifically, the preparation method of the metamaterial three-dimensional structure array provided by the embodiment of the invention is a preparation method based on a structured light process (LAP μ SL process), and is a micro-nano manufacturing process for layer-by-layer processing. Compared with other three-dimensional structure manufacturing processes, the LAP mu SL process is a micro-nano manufacturing process suitable for large area and multi-scale, and is very suitable for a structure with high structural complexity and a characteristic size of mu m-mm. The working principle of the LAP mu SL process system is as follows: the combination of scanning mechanisms based on laser direct writing technology and Digital Light Processing (DLP) based image projection optics. The process system comprises a Digital Micromirror Device (DMD) chip 601, an ultraviolet ray emitting device 602, an optical imaging device 603, a Z-direction lifter 604 and a peripheral control system. The process comprises the following steps: model slicing, model processing, post-processing and iterative processing.
In step S1, the model of the metamaterial three-dimensional structure array is correspondingly format-converted, i.e., the model is sequentially sliced according to the thickness of the layer.
In step S2, the metamaterial three-dimensional structure array slices are respectively converted into two-dimensional image slices arranged in sequence, and all the two-dimensional image slices constitute a two-dimensional image slice group. Further, each two-dimensional image slice is transmitted to the photoelectric conversion module, and an optical signal code is generated through the photoelectric conversion module, wherein each optical signal code corresponds to each two-dimensional image slice one to one. And after the conversion is finished, removing the first two-dimensional image slice from the two-dimensional image slice group, and continuously converting the next two-dimensional image slice.
In step S3, each optical signal code is processed in turn. The method specifically comprises the following steps: the Z-direction position of the photosensitive resin groove 605 is determined, and the Digital Micromirror Device (DMD) chip 601 is used to determine the shutter opening and closing time of each micromirror in the DMD chip 601 and the exposure time of the ultraviolet light emitting device 602 according to the digital signal of the two-dimensional image, so as to cure the photosensitive resin material 606 at the corresponding position, and obtain the structural slice corresponding to the two-dimensional image.
In step S4, the above process is repeated through a scanning mechanism, that is, the processing steps from step S1 to step S3 are repeated for the next two-dimensional image, and the obtained next three-dimensional metamaterial structural slice forms a subsequent layer of the previous three-dimensional metamaterial structural slice, and finally the processed model is taken out of the system and washed to complete the whole processing flow, so as to obtain the corresponding three-dimensional metamaterial structural array.
Based on the content of the foregoing embodiment, it should be noted that, in this embodiment, after the preparation of the metamaterial three-dimensional structure array is completed, a metal deposition effect may also be achieved on the array structure by using electroplating, chemical plating, atomic layer deposition, physical vapor deposition, and the like, so as to complete the preparation of the metal flexible three-dimensional structure metamaterial.
Furthermore, the conductive material can also be directly used for printing the three-dimensional structure, and the technical step of plating metal can be omitted by adopting the scheme, so that the technical process is simplified.
It should be noted that: the optical imaging device 603 may include a lithography aperture filter, a metal layer filter, a scanning optical system, a focusing lens, and the like, but the specific structure of the optical imaging device 603 is not specifically limited by the embodiment of the present invention.
Based on the content of the above embodiment, as an alternative embodiment, as shown in fig. 7, an embodiment of the present invention further provides a method for manufacturing a three-dimensional metamaterial structure, first, a substrate (701) made of a suitable material is selected, and a sacrifice layer (702) is formed on the substrate, so that a top surface of the substrate (701) is uniformly provided with a sacrifice layer. In the present embodiment, a method for forming the sacrificial layer (702) is not limited, and may be based on a physical vapor deposition method, for example.
Further, the prefabricated metamaterial three-dimensional structure model is uniformly cut according to a certain thickness, a certain number of structural patterns are obtained (the structural patterns can be numbered according to the cutting sequence), and all the structural patterns can be sequentially restored to form the metamaterial three-dimensional structure model.
Further, the first one of the structure patterns is lithographed into the sacrificial layer (702) of the upper step based on a microlithography process to form the micropores (703) of the structure pattern.
Further, based on the evaporation/MBE/magnetron sputtering process and other processes, the deposition of the metal material is carried out in the micron holes (703), and the metal injected into the micron holes (703) between the sacrificial layers forms a first three-dimensional structure layer (704).
And sequentially and iteratively executing the steps until all the structural patterns are carved according to the scheme, and sequentially and mutually overlapping all the formed three-dimensional structural layers (704) to form the metamaterial three-dimensional structure. And finally, removing the periphery of the metamaterial three-dimensional structure, namely the sacrificial layer at the bottom layer, based on an etching process to obtain the metamaterial three-dimensional structure.
The above-described embodiments of the apparatus are merely illustrative, and the units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of the present embodiment. One of ordinary skill in the art can understand and implement it without inventive effort.
Through the above description of the embodiments, those skilled in the art will clearly understand that each embodiment can be implemented by software plus a necessary general hardware platform, and certainly can also be implemented by hardware. With this understanding in mind, the above-described technical solutions may be embodied in the form of a software product, which can be stored in a computer-readable storage medium such as ROM/RAM, magnetic disk, optical disk, etc., and includes instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to execute the methods described in the embodiments or some parts of the embodiments.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. An apparatus for realizing electromagnetic wave modulation based on a metamaterial three-dimensional structure, comprising:
an electromagnetic wave modulation device and an array control device;
the electromagnetic wave modulation device is used for modulating the response of the passing electromagnetic waves into a set response, and the electromagnetic wave modulation device is of a metamaterial three-dimensional structure;
the electromagnetic wave modulation device is arranged in the array control device, and the array control device is used for adjusting the state of the electromagnetic wave modulation device so that the response of the electromagnetic wave passing through the electromagnetic wave modulation device is modulated into a set response;
wherein the array control device comprises: a closed chamber unit, a conduit and a gas pump device; the inner top wall and the outer top wall of the closed chamber unit are both made of flexible materials; the conduit penetrates through the closed chamber unit; the air pump device controls the discharge or injection of air in the closed chamber unit through the conduit so as to control the air pressure inside the closed chamber unit.
2. The apparatus for realizing electromagnetic wave modulation based on the three-dimensional metamaterial structure as claimed in claim 1, wherein the electromagnetic wave modulation apparatus comprises: the metamaterial three-dimensional structure comprises a substrate and a metamaterial three-dimensional structure array fixedly arranged on the upper surface of the substrate; the metamaterial three-dimensional structure array is formed by metamaterial three-dimensional structure monomers which are arranged in an array mode.
3. The device for realizing electromagnetic wave modulation based on the metamaterial three-dimensional structure as claimed in claim 2, wherein the metamaterial three-dimensional structure single body is made of conductive flexible metamaterial;
when the gas pressure in the closed chamber unit is smaller than the external gas pressure, the inner top wall of the closed chamber unit elastically deforms towards the metamaterial three-dimensional structure monomer, and applies a compression force to the metamaterial three-dimensional structure monomer, so that the height of the metamaterial three-dimensional structure monomer is reduced, and the state of the electromagnetic wave modulation device is adjusted;
when the gas pressure in the closed chamber unit is greater than the external gas pressure, the inner top wall of the closed chamber unit elastically deforms in the direction opposite to the direction of the metamaterial three-dimensional structure monomer, and a tensile force is applied to the metamaterial three-dimensional structure monomer, so that the height of the metamaterial three-dimensional structure monomer is increased, and the adjustment of the state of the electromagnetic wave modulation device is completed.
4. The device for realizing electromagnetic wave modulation based on the three-dimensional metamaterial structure as claimed in claim 3,
and the inner top wall of the closed chamber unit is connected with the tops of all the metamaterial three-dimensional structural monomers.
5. The apparatus for realizing electromagnetic wave modulation based on the three-dimensional metamaterial structure as claimed in claim 2, wherein the array control apparatus comprises: a ceiling and an outer wall, the ceiling and/or substrate being movable up and down along an axis of the outer wall; when the distance between the liner top and the substrate is smaller than the height of the metamaterial three-dimensional structure single body, compressing the metamaterial three-dimensional structure single body to complete the adjustment of the state of the electromagnetic wave modulation device;
and when the distance between the liner top and the substrate is greater than the height of the metamaterial three-dimensional structure single body, stretching the metamaterial three-dimensional structure single body to complete the adjustment of the state of the electromagnetic wave modulation device.
6. The apparatus for realizing electromagnetic wave modulation based on the three-dimensional metamaterial structure as claimed in claim 5, wherein the array control apparatus further comprises: the liner top and/or the substrate can move up and down along the axis of the outer wall through the slide rail, and the distance of the up-and-down movement of the liner top and/or the substrate is controlled through the slide rail.
7. A method for realizing electromagnetic wave modulation based on a metamaterial three-dimensional structure by using the device as claimed in any one of claims 2 to 6, which is characterized by comprising the following steps:
making the electromagnetic wave incident to the electromagnetic wave modulation device to obtain an electromagnetic wave with standard response;
and adjusting the state of the electromagnetic wave modulation device through the array control device to acquire the electromagnetic wave with set response, thereby completing the electromagnetic wave response modulation.
8. The method for realizing electromagnetic wave modulation based on the three-dimensional metamaterial structure as claimed in claim 7, wherein the method for preparing the three-dimensional metamaterial structure array comprises:
uniformly arranging a sacrificial material layer on the upper surface of the substrate based on a coating process;
generating micropores in the sacrificial material layer based on a patterning process;
depositing a first conductive material layer and a second conductive material layer on the upper surface of the sacrificial material layer based on the coating process, wherein the first conductive material layer is positioned in the middle of the micropores of the sacrificial material; the second conductive material layer forms a required second layer structure through a patterning process;
and after the second conductive material layer is patterned, repeating all the steps, and finally removing the sacrificial material layer to obtain the required three-dimensional structure.
9. The method for realizing electromagnetic wave modulation based on the three-dimensional metamaterial structure as claimed in claim 7, wherein the method for preparing the three-dimensional metamaterial structure array comprises:
arranging a printing material layer on the surface of the substrate;
printing the metamaterial three-dimensional structure array on the printing material based on a graphical process;
and dissolving the unprinted part of the printing material based on a developing process to form a required three-dimensional structure.
10. The method for realizing electromagnetic wave modulation based on the three-dimensional metamaterial structure as claimed in claim 7, wherein the method for preparing the three-dimensional metamaterial structure array comprises:
s1, sequentially subdividing the metamaterial three-dimensional structure array image to obtain a two-dimensional image slice group;
s2, transmitting the first two-dimensional image slice in the two-dimensional image slice group to a photoelectric conversion module, and generating an optical signal code through an electro-optical conversion module, wherein the optical signal code corresponds to the two-dimensional image slice one to one; removing the first two-dimensional image slice from the two-dimensional image slice group;
s3, projecting the optical signal code to the surface of the printing material through a reduction lens by using an optical module and a graphical process to obtain a first metamaterial three-dimensional structure slice;
and S4, sequentially and iteratively executing the step S2 and the step S3, and enabling the obtained next metamaterial three-dimensional structure slice to form a subsequent layer of the previous metamaterial three-dimensional structure slice until the metamaterial three-dimensional structure array is obtained.
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