CN107479215A - A kind of Terahertz Meta Materials modulator approach and products thereof - Google Patents
A kind of Terahertz Meta Materials modulator approach and products thereof Download PDFInfo
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- CN107479215A CN107479215A CN201710568598.8A CN201710568598A CN107479215A CN 107479215 A CN107479215 A CN 107479215A CN 201710568598 A CN201710568598 A CN 201710568598A CN 107479215 A CN107479215 A CN 107479215A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0136—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/13—Function characteristic involving THZ radiation
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The invention discloses a kind of Terahertz Meta Materials modulator approach and products thereof, belong to Meta Materials field, method is：First, the manufacturing cycle cylindrical air chamber in the substrate of PDMS materials, then, flexible media PDMS film is set above air chamber, is provided with Meta Materials on PDMS film, then, add outside pressure, make the flexible media PDMS film above air chamber that geometric parameter that is raised or sunken, and then changing Meta Materials on PDMS film occur, the finally response to incident THz wave is modulated.The present invention also provides the product for as above method of realizing, it includes metamaterial structure and PDMS substrates, metamaterial structure is arranged in PDMS substrates, and Meta Materials include PDMS film and are arranged on the periodic array in two dimensions of the PDMS film, and phase property cylindrical air chamber is provided with PDMS substrates.Modulator approach simplicity of the present invention is reliable, easy to control, stronger to the modulating performance of line polarisation and circularly polarized light.
Description
Technical field
The invention belongs to Meta Materials field, more particularly, to a kind of Terahertz Meta Materials modulator approach and products thereof.
Background technology
Meta Materials are a kind of new periodic structure artificial composite materials.Because its effective dielectric constant and magnetic conductivity can
To be obtained by calculating and designing, and then unusual electromagnetic property can be shown, obtain the extensive concern of researcher.
Meta Materials are typically designed to the sub-wavelength period array structure such as split ring, rectangular strip, fishing net by metal, and inlay
Formed in the insulating materials such as resin, ceramics or oxide.At the resonant frequency fx, these structures have to the electromagnetic wave of incidence
Very strong coupling, and then realize to electromagnetism wave modulation, so as to change its transmission characteristic.By design cycle property construction unit,
The effective dielectric constant and equivalent permeability that can be needed, so as to realize that the extraordinary physics not available for nature material is special
Property, such as negative index, negative magnetoconductivity, negative permittivity, reversed Doppler effect etc..
Due to lacking effective wave source and detector so that the research of THz wave lags behind the research of other wave bands, should
Wave band was once referred to as Terahertz space.And Meta Materials can make it respond THz wave by design structure size,
So research of the Meta Materials to terahertz wave band has extremely important effect.
In existing document, there are the modulator approach of many report metamaterial structures, such as document《Photo-excited
broadband tunable terahertz metamaterial absorber》In, changed in simulations using side optical pumping
Become the carrier concentration of silicon at split ring, realize Meta Materials wave absorbing device by changing resonance mode modulates on a large scale.The modulation
Scope is big, has benefited from changing the mode of resonance of split ring in modulation, and modulation can be preferably explained by distribution map of the electric field
Change, simultaneously because causing the change of electromagnetic property by free carrier, so driving time can reach below psec.
But the technology difficulty that silicon is embedded at split ring is larger, it is difficult to prepare material object.For another example document《Design of a
tunable terahertz narrowband metamaterial absorber based on an
electrostatically actuated MEMS cantilever and split ring resonator array》Make
The cantilever beam made of MEMS technology, the equivalent capacity at cantilever beam is controlled by voltage, and then absorption characteristic is regulated and controled.
It is larger using electrostatic drive modification scope, and absorptivity can reach near perfect absorption in modulated process.But shortcoming is same
It is complex manufacturing technology, it is difficult to produce material object.But the structure that generally speaking, this kind of document is mentioned can only be confined to incident light
The modulation of transmissison characteristic, it is impossible to carry out Polarization Modulation.
Also document uses substrate of the PDMS flexible medias as Meta Materials, such as document《Mechanically tunable
terahertz metamaterials》It is middle that " work " font Meta Materials substrate is used as using PDMS, changed by way of stretching
The spacing of dies, finally the transmissivity of incident THz wave is modulated.
Noted herein, PDMS has high resiliency characteristic, has suitable fissipation factor, and pass through experimental verification repeatedly
The durability of PDMS stretching modulation, is a kind of preferable substrate as Meta Materials, but the metamaterial structure is equally confined to
The modulation of transmissison characteristic.
Also document uses helix structure, such as document《Enantiomeric switching of chiral
metamaterial for terahertz polarization modulation employing vertically
deformable MEM spirals》The shape of the middle gas and changing spiral winding using flowing, and then to the line polarisation of incidence
Deflection modulation is carried out, final deflection angle is up to 28 degree.But due to there is no materials for support helix structure, the spiral shell in modulation
The deformation of spin line is irregular.For another example, document《Kan T,Isozaki A,Kanda N,et al.Spiral metamaterial
for active tuning of optical activity[J].Applied Physics Letters,2013,102
(22):221906.》Helical structure is deformed by electrostatic drive, Polarization Modulation finally is carried out to the line polarisation of incidence.
But its modulating performance to line polarisation is weaker.
Therefore, it is necessary to develop a kind of new Terahertz Meta Materials modulator approach and products thereof, it is desirable to its modulator approach simplicity,
It is reliable, easy to control and stronger to the modulating performance of line polarisation and rotatory polarization.
The content of the invention
For the disadvantages described above or Improvement requirement of prior art, the invention provides a kind of Terahertz Meta Materials modulator approach
And products thereof, it is intended that a kind of periodic cylindrical air chamber prepared by PDMS of design, adding outside pressure makes air
Geometric parameter that is raised or sunken, and then changing Meta Materials on PDMS film occurs for the flexible media PDMS diaphragms above chamber, most
The response to incident THz wave is modulated eventually, and its modulator approach is easy, is reliable, easy to control and to line polarisation and circle
The modulating performance of polarisation is stronger.
To achieve the above object, according to one aspect of the present invention, there is provided a kind of Terahertz Meta Materials modulator approach, it is first
First, the manufacturing cycle cylindrical air chamber in the substrate of PDMS materials, then, flexible media PDMS is set above air chamber
Film, Meta Materials are provided with PDMS film, then, add outside pressure, make the flexible media PDMS film above air chamber
Generation is raised or sunken, and then changes the geometric parameter of Meta Materials on PDMS film, and the finally response to incident THz wave is entered
Row modulation.
In one embodiment of the invention, Meta Materials are two dimension prepared by any conductor or semiconductor on PDMS film
Periodic array.
In one embodiment of the invention, Meta Materials are periodic array in two dimensions prepared by metallic gold on PDMS film.
In one embodiment of the invention, the periodic array in two dimensions or metal that prepared by any conductor or semiconductor
Periodic array in two dimensions prepared by gold corresponds with periodic cylindrical air chamber.
According to the second aspect of the invention, a kind of a kind of Terahertz Meta Materials for realizing method as described above are also provided and adjusted
Method product processed, it includes metamaterial structure and PDMS substrates, and metamaterial structure is arranged in PDMS substrates, the Meta Materials bag
Include PDMS film and be arranged on the periodic array in two dimensions of the PDMS film, the periodic array in two dimensions material is conductor or partly led
Body, phase property cylindrical air chamber is provided with PDMS substrates, and periodic cylindrical air chamber corresponds with periodic array in two dimensions.
In one embodiment of the invention, metamaterial structure and PDMS substrates are connected as one by way of bonding.
In general, by the contemplated above technical scheme of the present invention compared with prior art, it can obtain down and show
Beneficial effect：
A kind of periodic cylindrical air chamber prepared by PDMS is designed in the present invention, adding outside pressure makes on air chamber
Geometric parameter that is raised or sunken, and then changing Meta Materials on PDMS film occurs for the flexible media PDMS diaphragms of side, final right
The response of incident THz wave is modulated.Its manufacture craft is simple, easily prepared.By adjust PDMS diaphragms occur it is raised or
Sinking degree, so that it may be modulated, its modulator approach is easy, reliable, and repeatability is strong.In addition, its modulating performance is excellent, band is modulated
It is wider, and modulation can be realized to linearly polarized light and circularly polarized light.
Brief description of the drawings
Fig. 1~3 are the explanations of modulated structure, wherein, Fig. 1 is two-dimensional metallic array-PDMS dielectric layers-metal level three-layered node
Structure schematic diagram, it is the metamaterial structure of top, Fig. 2 is the PDMS substrate schematic diagrames for digging out air chamber, can be in the PDMS substrates
Driver is set, and Fig. 3 is the schematic diagram after PDMS substrates are bonded with Meta Materials, is the overall structure that both are bonded together.
Fig. 4 is the periodicity chiral spiral structure unit mentioned in example 1.
Fig. 5 is to be deformed according to helical structure and define different chiral schematic diagrames, and Fig. 5 (a) is right-handed helix structure, Fig. 5
(b) it is left hand helix structure.
Fig. 6 is that helical structure carries out Deflection modulation to line polarisation.
Fig. 7 and Fig. 8 is the modulation that helical structure carries out Transflective to rotatory polarization, wherein, as shown in fig. 7, working as incident light
For left-handed rotatory polarization when, because the rotation from helical structure is different, most of light can reflect back；As shown in figure 8, work as incident light
For dextrorotation rotatory polarization when, because the rotation with helical structure is identical, most of light can pass through.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in each embodiment of invention described below
Conflict can is not formed each other to be mutually combined.
The present invention mainly proposes a kind of method that Terahertz control measures are combined with Meta Materials, it is proposed that a kind of new tune
Mode processed, combine Terahertz regulation and control and Meta Materials characteristic, design a kind of periodic cylindrical air chamber, periodically
Addition outside pressure makes flexible media PDMS (dimethyl silicone polymer) circular membrane above air chamber on cylindrical air chamber
Generation is raised or sunken, and then changes the geometric parameter of Meta Materials on PDMS film, and finally Meta Materials electromagnetic property is adjusted
System.
Present applicant proposes a kind of novel Meta Materials control methods, implementation is to make dielectric layer that shape occur by external force
Become, and then change the geometric parameter in metal level periodic unit, reach the purpose of modulating resonance frequency.
Realize that the product structure of this modulator approach is segmented into two parts：Upper part is metamaterial structure, by two-dimensional gold
Belong to periodic array to form with PDMS film, see Fig. 1；Lower part is the substrate made of PDMS, sees Fig. 2.Existed using related process
PDMS substrate surfaces prepare specification identical periodicity array of circular apertures, these borehole structures and the two-dimensional metallic at the top of Meta Materials
Rotating fields are corresponding.Finally metamaterial structure and PDMS substrates are bonded together, constitute the final design structure such as Fig. 3.
Wherein, Fig. 1~3 are the explanations of modulated structure, and Fig. 1 is two-dimensional metallic array-PDMS dielectric layer two-layer structure schematic diagrames, are tops
Metamaterial structure, Fig. 2 is the PDMS substrate schematic diagrames for digging out air chamber, can set driver on the base layer, Fig. 3 is
PDMS substrates be bonded with Meta Materials after schematic diagram, be the overall structure that both are bonded together.
In modulated process, modulator approach is as follows：
First, by additional pressure, such as the packaged addition air pressure of device or hydraulic pressure so that pressure acts directly on sky
On PDMS diaphragms at air cavity, make its overall structure that geometric parameter that is raised or sunken, and then changing metamaterial structure occur, most
Eventually, the electromagnetic wave for inciding the structure is regulated and controled.Wherein, the PDMS film at air chamber due to not with substrate contact and
It can deform upon.And it is other place because and substrate contact, deformation quantity it is small.
In order to illustrate further the superiority of the inventive method and product Terahertz tunable performance, with reference to specific
Embodiment is further described as follows：
Embodiment 1
The present embodiment uses a kind of Meta Materials Polarization Modulation structure, and this structure is referred to as chiral spiral structure, and structure is shown
Intention is shown in Fig. 4.In Fig. 4, the length of periodic array in two dimensions construction unit and wide respectively Px, Py.
In the first layer of metamaterial structure, it is made up of helix, helical structure is located at PDMS substrate cylindrical air chambers
Surface, and spiral center is on the axis of symmetry of cylindrical air chamber.Helical structure materials'use is gold, and thickness is
45nm.2 μm of helical structure line width, the inside radius of helix is 2 μm, outer radius is 25 μm.The second layer is dielectric layer, material
Use PDMS, thickness tsubIt is 4 μm, wherein, the radius of PDMS diaphragms is that R is 25 μm.
The polarization properties of Meta Materials are regulated and controled by changing the outside pressure of PDMS diaphragms.By Fig. 5 it can be seen that,
Fig. 5 (a) is right-handed helix structure, and Fig. 5 (b) is left hand helix structure.When diaphragm raises up, definition helical structure is the right hand
Spiral；When diaphragm is to lower recess, definition helical structure is left hand helix.When incident light is line polarisation, adjusted by Meta Materials
Making is elliptically polarized light with emergent light, and the main shaft of elliptically polarized light is changed compared to the polarization direction of incident light
Become.The helical structure of different rotation directions will produce antipodal effect to the polarization modulation characteristics of incident line polarisation, its schematic diagram
See Fig. 6.
Embodiment 2
This example uses the structure same with example one, but incident wave source uses circularly polarized light, inquires into helical structure pair
The influence of rotatory polarization, incident circularly polarized light can be divided into two kinds of left-handed rotation and right-handed rotation by the difference of rotation direction.
The reflection and transmission characteristic of Meta Materials is regulated and controled by changing the outside pressure of PDMS diaphragms.Specifically, work as
Addition upwards pressure, and the helical structure on diaphragm can raise up, and helical structure is right-handed helix.When incident light is left-handed circle
During polarisation (such as Fig. 7), because the rotation from helical structure is different, most of light can reflect back；When incident light is that dextrorotation circle is inclined
Light time (such as Fig. 8), because the rotation with helical structure is identical, most of light can pass through.When diaphragm is to lower recess, helical structure
Left hand helix, analysis process are same as above.Change the rotation of helical structure by outside pressure, finally to the reflectivity of incident rotatory polarization
It is modulated with transmissivity.
Generally speaking, present applicant proposes a kind of new Terahertz Meta Materials modulator approach, its design it is a kind of by
Periodic cylindrical air chamber prepared by PDMS, adding outside pressure makes the flexible media PDMS diaphragms generation above air chamber convex
Rise or be recessed, and then change the geometric parameter of Meta Materials on PDMS film, the finally response to incident THz wave is modulated.
The application designs a kind of metamaterial structure, i.e. chiral spiral structure, such a structure and new modulation system
It is combined so that PDMS film structure can more efficiently be changed by outside pressure, final regulation and control Meta Materials electromagnetic response is special
Property.
In the application, PDMS's should be entitled polydimethylsiloxane, and Chinese is polydimethylsiloxanes
Alkane.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, all any modification, equivalent and improvement made within the spirit and principles of the invention etc., all should be included
Within protection scope of the present invention.
Claims (6)
1. a kind of Terahertz Meta Materials modulator approach, it is characterised in that first, manufacturing cycle is justified in the substrate of PDMS materials
Cylindrical air chamber,
Then, flexible media PDMS film is set above air chamber, Meta Materials are provided with PDMS film,
Then, outside pressure is added, the flexible media PDMS film above air chamber occurs raised or sunken, and then change
The geometric parameter of Meta Materials on PDMS film, the finally response to incident THz wave are modulated.
2. Terahertz Meta Materials modulator approach as claimed in claim 1, it is characterised in that Meta Materials are any on PDMS film
Periodic array in two dimensions prepared by conductor or semiconductor.
3. Terahertz Meta Materials modulator approach as claimed in claim 1, it is characterised in that Meta Materials are metal on PDMS film
Periodic array in two dimensions prepared by gold.
4. Terahertz Meta Materials modulator approach as claimed in claim 2 or claim 3, it is characterised in that any conductor or semiconductor
Periodic array in two dimensions prepared by the periodic array in two dimensions or metallic gold of preparation corresponds with periodic cylindrical air chamber.
5. a kind of realize such as a kind of Terahertz Meta Materials modulator approach product of one of claim 1-4 methods described, its feature
It is, it includes metamaterial structure and PDMS substrates, and metamaterial structure is arranged in PDMS substrates,
The Meta Materials include PDMS film and are arranged on the periodic array in two dimensions of the PDMS film, the periodic array in two dimensions material
Matter is conductor or semiconductor,
It is provided with phase property cylindrical air chamber in PDMS substrates, a pair of periodic cylindrical air chamber and periodic array in two dimensions 1
Should.
6. product as claimed in claim 5, it is characterised in that metamaterial structure is connected with PDMS substrates by way of bonding
It is integrated.
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| CN108631063A (en) * | 2018-05-02 | 2018-10-09 | 中国计量大学 | A kind of Terahertz Meta Materials modulator of electrostatic drive |
| CN108933335A (en) * | 2018-08-18 | 2018-12-04 | 南昌大学 | A kind of new method of regulation radar absorbing absorption frequency |
| CN109407352A (en) * | 2018-11-20 | 2019-03-01 | 中国工程物理研究院电子工程研究所 | A kind of terahertz polarization regulation device and preparation method thereof |
| CN109659702A (en) * | 2018-11-13 | 2019-04-19 | 华中科技大学 | A kind of novel adjustable Terahertz Meta Materials absorbent structure |
| WO2019198760A1 (en) * | 2018-04-12 | 2019-10-17 | 国立研究開発法人理化学研究所 | Light-absorbing element, light-absorbing body, and method for manufacturing light-absorbing element |
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| CN115424602A (en) * | 2022-07-31 | 2022-12-02 | 苏州声学产业技术研究院有限公司 | Rigidity-adjustable sound insulation board made of metamaterial |
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| CN108631063B (en) * | 2018-05-02 | 2023-11-21 | 中国计量大学 | Electrostatic-driven terahertz metamaterial modulator |
| CN108933335A (en) * | 2018-08-18 | 2018-12-04 | 南昌大学 | A kind of new method of regulation radar absorbing absorption frequency |
| CN109659702A (en) * | 2018-11-13 | 2019-04-19 | 华中科技大学 | A kind of novel adjustable Terahertz Meta Materials absorbent structure |
| CN109407352A (en) * | 2018-11-20 | 2019-03-01 | 中国工程物理研究院电子工程研究所 | A kind of terahertz polarization regulation device and preparation method thereof |
| CN110690576A (en) * | 2019-09-03 | 2020-01-14 | 北京航空航天大学青岛研究院 | Device and method for realizing electromagnetic wave modulation based on metamaterial three-dimensional structure |
| CN110690576B (en) * | 2019-09-03 | 2021-08-17 | 北京航空航天大学青岛研究院 | Device and method for realizing electromagnetic wave modulation based on metamaterial three-dimensional structure |
| CN110911850A (en) * | 2019-11-29 | 2020-03-24 | 中国人民解放军空军工程大学 | Wave-absorbing characteristic regulation and control method for regulating local strain of flexible metamaterial film |
| WO2021220808A1 (en) * | 2020-05-01 | 2021-11-04 | ソニーグループ株式会社 | Wave control medium, wave control element, wave control device, and method for manufacturing wave control medium |
| CN112886260A (en) * | 2021-01-12 | 2021-06-01 | 之江实验室 | Force/electricity double-adjustable multi-frequency-band reflection type polarization insensitive resonator |
| CN112886260B (en) * | 2021-01-12 | 2022-06-17 | 之江实验室 | Force/electricity double-adjustable multi-frequency-band reflection type polarization insensitive resonator |
| CN113866863A (en) * | 2021-10-28 | 2021-12-31 | 觉芯电子(无锡)有限公司 | Chiral optical element and preparation method thereof |
| CN113866863B (en) * | 2021-10-28 | 2023-12-29 | 觉芯电子(无锡)有限公司 | Chiral optical element and preparation method thereof |
| CN113885118A (en) * | 2021-11-01 | 2022-01-04 | 觉芯电子(无锡)有限公司 | Chiral optical element and preparation method thereof |
| CN115424602A (en) * | 2022-07-31 | 2022-12-02 | 苏州声学产业技术研究院有限公司 | Rigidity-adjustable sound insulation board made of metamaterial |
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