CN102840823B - Common-path interference detecting device based on beam-split synchronism phase shifting and detecting method - Google Patents
Common-path interference detecting device based on beam-split synchronism phase shifting and detecting method Download PDFInfo
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Abstract
A common-path interference detecting device based on beam-split synchronism phase shifting and a detecting method belong to the field of optical interference detection, and solve the problems that the existing optical phase shifting interference detecting method is complicated and difficult to operate, requires high-quality lambda/4 wave plates, and has high cost and poor measuring precision. The scheme provided by the invention is as follows: the light beam emitted by a light source is incident to the light receiving surface of a collimating and expanding system through a polaroid, the outgoing beam collimated and expanded by the collimating and expanding system is incident to a first lens through two lambda/4 wave plates, a to-be-detected object and a rectangular window, the outgoing beam converged by the first lens is incident to a second lens through a one-dimensional periodic grating, the diffracted light beam transmitted by the second lens is incident to a beam-split synchronism phase shifting system, the outgoing beam of the beam-split synchronism phase shifting system is received by the light receiving surface of an image sensor, and the image signal output end of the image sensor is connected with the image signal input end of a computer, so as to obtain the phase distribution of the to-be-detected object.
Description
Technical field
The present invention relates to interference with common path pick-up unit and detection method based on the synchronous phase shift of light splitting, belong to optical interference detection field.
Background technology
Optical phase shift interferometer is a kind of noncontact, high-precision measurement of full field instrument, is widely used in the detection fields such as optical surface, deformation and thickness.Traditional optical interference detection method has Twyman-Green interference method, Mach-Zehnder interferometric method and shearing interference method etc.Wherein, Twyman-Green interference method, Mach-Zehnder interferometric method etc. adopt separated light path to interfere, and reference beam and measuring beam are interfered by different paths, are subject to the impacts such as extraneous vibration, temperature fluctuation; Shearing interference methods etc. adopt interference with common path, be that reference beam and measuring beam are interfered after by co-route, it vibrates to external world, temperature fluctuation etc. is insensitive, have certain antijamming capability, but shearing interference method is realized shearing displacement simultaneously and phase-shift phase regulation and control are more difficult, control accuracy is lower, and need mobile optical element to introduce phase shift and improve measuring accuracy, not only be not suitable for kinetic measurement, also can cause the vibration of optical system, form noise.In order to solve these difficulties, Chinese scholars has been made many Beneficials.
The synchronous phase shift Fizeau interference device > > that Chinese patent < < can measure in real time, publication number is CN102589414A, open day is on July 18th, 2012, this patent utilization λ/4 wave plate substitutes the standard optic plane glass crystal in traditional fizeau interferometer, making to examine light beam and measuring beam interferes after by co-route, and by single exposure, obtain four width phase shifting interferences in conjunction with four-quadrant polarizer group, guaranteeing under the prerequisite of high spatial resolution, realized the real-time of measuring, but the method complicated operation is difficult, and need high-quality λ/4 wave plate, cost is high.
Mexico scholar V.Arriz ó n etc. propose interference with common path method (the V.Arriz ó n based on 4f system and grating filtering, D.S á nchez-de-la-Llave.Common-path interferometry with one-dimensional periodic filters.Optics Letters, 2004,29 (2): 141-143).The method is used two windows at input end, place testee for one, another as a reference, common light channel structure in conjunction with the filtering of 4f system grating, by adjusting the parameters such as grating cycle, the focal length of lens, can obtain at output terminal the interference pattern of object, but the method still needs moving grating to obtain phase shift.G.Rodriguez-Zurita etc. are on said method basis, proposition utilizes Polarization Modulation method to realize synchronous phase shift (G.Rodriguez-Zurita, C.Meneses-Fabian, N.I.Toto-Arellano, J.F.V á zquez-Castillo, C.Robledo-S á nchez.One-shot phase-shifting phase-grating interferometry with modulation of polarization:case of four interferograms.Opt.Express, 2008,16 (11): 7806-7817).The method utilize that grating produces 0, ± 1 and ± 2 diffraction lights, in conjunction with Polarization Modulation, by single exposure, obtain four width phase shifting interferences.The method is easy to adjust, cost is low, and can realize real-time measurement, but interfere because utilize multi-level diffraction light to arrive CCD, cause CCD useful area utilization factor low, simultaneously because the difference of the order of diffraction time light intensity makes to obtain four width interferogram contrasts differences, and then increases the complicacy of data processing and affect measuring accuracy.
Summary of the invention
The present invention seeks in order to solve existing optical phase shift interference detection method complicated operation difficulty, and need high-quality λ/4 wave plate, cost is high, and the problem that measuring accuracy is low provides a kind of interference with common path pick-up unit and detection method based on the synchronous phase shift of light splitting.
Interference with common path pick-up unit based on the synchronous phase shift of light splitting of the present invention, it comprises light source, it also comprises polaroid, collimating and beam expanding system, two λ/4 wave plates, object under test, rectangular window, first lens, One Dimension Periodic grating, the second lens, the synchronous Phase Shifting System of light splitting, imageing sensor and computing machines, wherein λ is the optical wavelength of source emissioning light bundle
The light beam of light source transmitting is incident to the light receiving surface of collimating and beam expanding system through polaroid, outgoing beam after this collimating and beam expanding system collimator and extender is through two λ/4 wave plates, after object under test and rectangular window, be incident to first lens, outgoing beam after first lens converges is incident to the second lens after by One Dimension Periodic grating, diffracted beam after the second lens transmission is incident to the synchronous Phase Shifting System of light splitting, the outgoing beam of the synchronous Phase Shifting System of this light splitting is received by the light receiving surface of imageing sensor, the image signal output end of imageing sensor connects the picture signal input end of computing machine,
The direction of optical axis of take is set up xyz coordinate axis as z direction of principal axis, and described rectangular window is along the direction setting perpendicular to optical axis, and is divided into two wickets along x direction of principal axis;
Two λ/4 wave plates all be arranged in parallel with rectangular window and are positioned at same plane, and described two λ/4 wave plates are equidistantly arranged along x direction of principal axis is parallel;
The focal length of first lens and the second lens is all f;
Rectangular window is positioned on the front focal plane of first lens; One Dimension Periodic grating is positioned on the back focal plane of first lens and is positioned on the front focal plane of the second lens;
Imageing sensor is positioned on the back focal plane of the second lens;
The cycle d of One Dimension Periodic grating and rectangular window are along meeting relation between the axial width D of x: d=2 λ f/D.
The synchronous Phase Shifting System of light splitting is comprised of depolarization Amici prism and four-quadrant polarizer group, and described depolarization Amici prism is cube structure, and described four-quadrant polarizer group is comprised of four polaroids,
The incident beam of the synchronous Phase Shifting System of light splitting is the incident beam of depolarization Amici prism, and the outgoing beam of the synchronous Phase Shifting System of light splitting is the outgoing beam of four-quadrant polarizer group,
Depolarization Amici prism is divided into two light beams by incident beam, be respectively folded light beam and transmitted light beam, folded light beam is corresponding to two polaroids in four-quadrant polarizer group, transmitted light beam is corresponding to two polaroids in four-quadrant polarizer group, outgoing after four polaroid polarizations, as the outgoing beam of four-quadrant polarizer group;
The light splitting surface of depolarization Amici prism and xoz plane parallel, the incident beam of depolarization Amici prism is parallel with described light splitting surface, and the incident beam of depolarization Amici prism is from the inclined-plane incident of light splitting surface one side; Described four-quadrant polarizer group is 2 * 2 arrays that polarization direction is rotated counterclockwise four polaroids compositions of 45° angle successively.
Object under test is placed in rectangular window, the light beam light incident side of rectangular window or the light beam exiting side of rectangular window, and object under test is less than or equal to D/2 along the axial length of x, and object under test is positioned at the dead astern of one of them λ/4 wave plate.
One Dimension Periodic grating is two-value One Dimension Periodic grating, sinusoidal One Dimension Periodic grating or cosine One Dimension Periodic grating.
Detection method based on the above-mentioned three window interference with common path pick-up units based on Amici prism, its implementation procedure is as follows:
Open light source, make the light beam of light source transmitting form parallel polarization light beam after polaroid and collimating and beam expanding system collimator and extender, this parallel polarization light beam is by two λ/4 wave plates, after object under test and rectangular window, pass through successively again first lens, One Dimension Periodic grating and the second lens produce 0 grade and ± 1 order diffraction light beam, this diffracted beam is incident to after the synchronous Phase Shifting System of light splitting, in image sensor plane, produce and interfere, the interference pattern that computer acquisition is obtained is cut apart the four width interference patterns that obtain object under test according to the size of the wicket of rectangular window, this four width interference pattern be take upper right corner image as the first width interference pattern, and be first to fourth width interference pattern according to counterclockwise arranging, the intensity of the third and fourth width interference pattern being carried out to four width interference patterns after mirror image switch is I in turn
1, I
2, I
3and I
4, and press formula
Obtain the PHASE DISTRIBUTION of object under test
Advantage of the present invention:
Interference with common path detection method based on the synchronous phase shift of light splitting has following characteristics and beneficial effect:
1. Dual-window interference with common path method and the synchronous phase-shifting technique of light splitting are combined, by single exposure, gather the object that the interferogram that just can obtain four width reaches object phase bit recovery, guaranteeing on measuring accuracy, antijamming capability and stability basis, method is simple, and can improve imageing sensor useful area utilization factor, this is one of innovative point being different from prior art;
2. four width interferogram contrasts are identical, and mapping relations are simple, can greatly improve Phase Retrieve Algorithm efficiency, can eliminate phase displacement error and the random noise because of multilevel diffraction, introduced simultaneously, improve measuring accuracy, and then be more suitable for real time dynamic measurement, this be different from prior art innovative point two;
Apparatus of the present invention have following distinguishing feature:
1. apparatus of the present invention are simple in structure, compact, insensitive to environmental interference;
2. apparatus of the present invention cost is low, does not need to change in operation light path, does not also need mobile any experiment apparatus, and flexible to operation, stability is high.
Accompanying drawing explanation
Fig. 1 is interference with common path pick-up unit based on the synchronous phase shift of light splitting of the present invention and the structural representation of detection method;
Fig. 2 is the structural representation of the synchronous Phase Shifting System of light splitting;
Fig. 3 is the polarization direction schematic diagram of Fig. 2 four-quadrant polarizer group;
Fig. 4 is the four width interference patterns that the interference pattern for computer acquisition is obtained is cut apart the object under test of acquisition;
Fig. 5 is the PHASE DISTRIBUTION according to object under test
recover the PHASE DISTRIBUTION of the object under test of acquisition.
Embodiment
Embodiment one: present embodiment is described below in conjunction with Fig. 1 to Fig. 5, interference with common path pick-up unit based on the synchronous phase shift of light splitting described in present embodiment, it comprises light source 1, it also comprises polaroid 2, collimating and beam expanding system 3, two λ/4 wave plates 4, object under test 5, rectangular window 6, first lens 7, One Dimension Periodic grating 8, the second lens 9, the synchronous Phase Shifting System 10 of light splitting, imageing sensor 11 and computing machines 12, wherein λ is the optical wavelength of light source 1 transmitting light beam
The light beam of light source 1 transmitting is incident to the light receiving surface of collimating and beam expanding system 3 through polaroid 2, outgoing beam after these collimating and beam expanding system 3 collimator and extenders is through two λ/4 wave plates 4, after object under test 5 and rectangular window 6, be incident to first lens 7, outgoing beam after first lens 7 converges is incident to the second lens 9 after by One Dimension Periodic grating 8, diffracted beam after the second lens 9 transmissions is incident to the synchronous Phase Shifting System 10 of light splitting, the outgoing beam of the synchronous Phase Shifting System 10 of this light splitting is received by the light receiving surface of imageing sensor 11, the image signal output end of imageing sensor 11 connects the picture signal input end of computing machine 12,
The direction of optical axis of take is set up xyz coordinate axis as z direction of principal axis, and described rectangular window 6 is along the direction setting perpendicular to optical axis, and is divided into two wickets along x direction of principal axis;
Two λ/4 wave plates 4 all be arranged in parallel with rectangular window 6 and are positioned at same plane, and described two λ/4 wave plates 4 are equidistantly arranged along x direction of principal axis is parallel;
The focal length of first lens 7 and the second lens 9 is all f;
Rectangular window 6 is positioned on the front focal plane of first lens 7; One Dimension Periodic grating 8 is positioned on the back focal plane of first lens 7 and is positioned on the front focal plane of the second lens 9;
Imageing sensor 11 is positioned on the back focal plane of the second lens 9;
The cycle d of One Dimension Periodic grating 8 and rectangular window 6 are along meeting relation between the axial width D of x: d=2 λ f/D.
In present embodiment, light source 1 adopts the He-Ne laser instrument of wavelength 632.8nm.
The focal length of first lens 7 and the second lens 9 is f=250mm.
Embodiment two: present embodiment is described below in conjunction with Fig. 2 and Fig. 3, present embodiment is described further embodiment one, the synchronous Phase Shifting System 10 of light splitting is comprised of depolarization Amici prism 10-1 and four-quadrant polarizer group 10-2, described depolarization Amici prism 10-1 is cube structure, described four-quadrant polarizer group 10-2 is comprised of four polaroids
The incident beam of the synchronous Phase Shifting System 10 of light splitting is the incident beam of depolarization Amici prism 10-1, and the outgoing beam of the synchronous Phase Shifting System 10 of light splitting is the outgoing beam of four-quadrant polarizer group 10-2,
Depolarization Amici prism 10-1 is divided into two light beams by incident beam, be respectively folded light beam and transmitted light beam, folded light beam is corresponding to two polaroids in four-quadrant polarizer group 10-2, transmitted light beam is corresponding to two polaroids in four-quadrant polarizer group 10-2, outgoing after four polaroid polarizations, as the outgoing beam of four-quadrant polarizer group 10-2;
The light splitting surface of depolarization Amici prism 10-1 and xoz plane parallel, the incident beam of depolarization Amici prism 10-1 is parallel with described light splitting surface, and the incident beam of depolarization Amici prism 10-1 is from the inclined-plane incident of light splitting surface one side; Described four-quadrant polarizer group 10-2 is 2 * 2 arrays that polarization direction is rotated counterclockwise four polaroids compositions of 45° angle successively.
The polarization direction of four polaroids is different, four polarization directions as shown in Figures 2 and 3, the polarization direction of upper right corner polaroid and optical axis included angle are 0, other three polaroids be take upper right corner polaroid and are arranged in the counterclockwise direction as benchmark, and take upper right corner polaroid and be rotated counterclockwise 45° angle with respect to previous polaroid successively as benchmark in the polarization direction of these three polaroids.
Embodiment three: present embodiment is described further embodiment one or two, object under test 5 is placed in rectangular window 6, the light beam light incident side of rectangular window 6 or the light beam exiting side of rectangular window 6, object under test 5 is less than or equal to D/2 along the axial length of x, and object under test 5 is positioned at the dead astern of one of them λ/4 wave plate 4.
Described object under test 5 can be chosen as required along the axial length of x, as long as be less than or equal to D/2.
Embodiment four: present embodiment is described further embodiment one, two or three, One Dimension Periodic grating 8 is two-value One Dimension Periodic grating, sinusoidal One Dimension Periodic grating or cosine One Dimension Periodic grating.
In present embodiment, One Dimension Periodic grating 8 adopts the Ronchi grating of cycle d=50 μ m.
Embodiment five: present embodiment is described further embodiment one, two, three or four, the light transmission shaft of polaroid 2 and x axle are 45° angle.
Embodiment six: present embodiment is described further embodiment one, two, three, four or five, in two λ/4 wave plates 4, a fast axle of λ/4 wave plate 4 is placed along x direction of principal axis, and the fast axle of another λ/4 wave plate 4 is placed along y direction of principal axis.
Embodiment seven: present embodiment is described further embodiment one, two, three, four, five or six, described rectangular window 6 is the window of D * (D/3)=9.49mm * 3.16mm.
In present embodiment, the size of rectangular window 6 can be adjusted as required.This window is divided into two parts, the size of every part and a width interference pattern measure-alike.
Embodiment eight: the interference detection method based on the arbitrary described three window interference with common path pick-up units based on Amici prism of embodiment one to seven, its implementation procedure is as follows:
Open light source 1, make the light beam of light source 1 transmitting form parallel polarization light beam after polaroid 2 and collimating and beam expanding system 3 collimator and extenders, this parallel polarization light beam is by two λ/4 wave plates 4, after object under test 5 and rectangular window 6, pass through successively again first lens 7, One Dimension Periodic grating 8 and the second lens 9 produce 0 grade and ± 1 order diffraction light beam, this diffracted beam is incident to after the synchronous Phase Shifting System 10 of light splitting, in imageing sensor 11 planes, produce and interfere, computing machine 12 is gathered to the interference pattern obtaining and according to the size of the wicket of rectangular window 6, cut apart the four width interference patterns that obtain object under test 5, this four width interference pattern be take upper right corner image as the first width interference pattern, and be first to fourth width interference pattern according to counterclockwise arranging, the intensity of the third and fourth width interference pattern being carried out to four width interference patterns after mirror image switch is I in turn
1, I
2, I
3and I
4, and press formula
Obtain the PHASE DISTRIBUTION of object under test 5
In present embodiment, before pick-up unit operation, need adjust as required whole optical system.In measuring process, do not need mobile optical device, this embodiment is simple in structure, measures light and reference light and propagates along same paths, make device good anti-vibration, because adopt the synchronous phase-shifting technique of light splitting, avoided device to move the interference of introducing, system stability is good simultaneously.Four required interference patterns of phase bit recovery generate in an interferogram, and recovery algorithms is simple, has reduced the complexity of system.Present embodiment method collects four width interference patterns of object under test 5 by single exposure, guaranteeing, on the basis of measurement real-time, greatly to have improved measuring accuracy, and recovery algorithms is simple, and system complexity is low.
Principle of work:
This light path is a typical optics 4f system, and the pass between input face, frequency plane and output face is: the optical field distribution of frequency plane is the Fourier transform of input face optical field distribution, and the optical field distribution of output face is the inverse Fourier transform of frequency plane optical field distribution; Two lens play respectively Fourier transform and inverse Fourier transform.
On input face, rectangular aperture is divided into two windows, and object under test 5 is placed on the window rear all separating of rectangular window 6; On frequency plane, just obtained the frequency spectrum of input plane optical field distribution, by using One Dimension Periodic grating 8 to carry out filtering, just frequency spectrum has been diffracted into a plurality of levels time on frequency plane; Through second lens 9, carry out after inverse Fourier transform like this, in output face, just obtained a plurality of level time with the similar light field of input optical field distribution (be that each order of diffraction is the structure of Dual-window, one side window is reference light, and opposite side window is PHASE DISTRIBUTION); In native system, only use 0 grade ,+1 grade and-1 order diffraction light, by adjusting the cycle d of One Dimension Periodic grating 8 and rectangular window 6 along meeting relation between the axial width D of x: d=2 λ f/D, just can make a side window coincidence (two windows overlap) of a side window and-1 grade of light of 0 grade of light, thereby produce an interference pattern, simultaneously a side window of 0 grade of light overlap with a side window of+1 grade of light (two windows coincidences) produce another interference pattern, so just can obtain two width interferograms.
In order to obtain four width interferograms, we had used a depolarization Amici prism 10-1 before light enters imageing sensor 11.The effect of depolarization Amici prism 10-1 is exactly that incident light is divided into reflection and transmission two-beam in the ratio of intensity one to one, can not affect the PHASE DISTRIBUTION of light field, and because the effect of reflection makes the mirror image switch that the reflected light of outgoing is incident light, and transmitted light can not overturn, so two interference patterns that reflection need to be obtained when processing interferogram carry out mirror image switch.
Use polarizer group 10-2 to carry out polarization filtering to interference pattern, each interference pattern of four interference patterns is respectively by a polaroid of polarizer group 10-2, because the polarization direction of each polaroid is different with the angle of optical axis, thereby introduce different phase shifts in four interference patterns, four polarization directions as shown in Figure 3, thereby the interference pattern that obtains the different phase shifts of four width, four interference patterns shown in Fig. 4 are corresponding from the different phase shifts shown in Fig. 3.By the intensity distributions of the interference pattern of these four different phase shifts, just can calculate the PHASE DISTRIBUTION of object under test.
The interference pattern that we mention all refers to the intensity distributions of light field.
PHASE DISTRIBUTION and optical surface pattern, deformation and the isoparametric relation of transparent substance thickness are such:
When utilizing the photo measure optical surface being reflected back from optical surface, the relation of PHASE DISTRIBUTION and optical surface pattern, deformation:
When light is beaten on optical surface, the phase place of light beam will be modulated by the variation of optical surface, in light wave, just there is surperficial information, so it is exactly the pattern of optical surface that the phase place recording changes, be exactly the surperficial pattern after deformation, and the variation of optical surface height can obtain by following formula:
Wherein, h (x, y) is exactly the surface elevation variation of object under test 5,
it is the PHASE DISTRIBUTION of object under test 5.
When utilize from the photo measure transparent substance of transparent substance transmission thickness distribution time, the relation between PHASE DISTRIBUTION and thickness distribution:
When object under test 5 is the uniform transparent substance of index distribution, the thickness w (x, y) of object under test 5 and the PHASE DISTRIBUTION of object under test 5
pass be:
Wherein, the refractive index that n is transparent substance.
Claims (7)
1. the interference with common path pick-up unit based on the synchronous phase shift of light splitting, it comprises light source (1), it is characterized in that: it also comprises polaroid (2), collimating and beam expanding system (3), two λ/4 wave plates (4), object under test (5), rectangular window (6), first lens (7), One Dimension Periodic grating (8), the second lens (9), the synchronous Phase Shifting System of light splitting (10), imageing sensor (11) and computing machine (12), wherein λ is the optical wavelength of light source (1) transmitting light beam
The light beam of light source (1) transmitting is incident to the light receiving surface of collimating and beam expanding system (3) through polaroid (2), outgoing beam after this collimating and beam expanding system (3) collimator and extender is through two λ/4 wave plates (4), after object under test (5) and rectangular window (6), be incident to first lens (7), outgoing beam after first lens (7) converges is incident to the second lens (9) after by One Dimension Periodic grating (8), diffracted beam after the second lens (9) transmission is incident to the synchronous Phase Shifting System of light splitting (10), the outgoing beam of the synchronous Phase Shifting System of this light splitting (10) is received by the light receiving surface of imageing sensor (11), the image signal output end of imageing sensor (11) connects the picture signal input end of computing machine (12),
The synchronous Phase Shifting System of light splitting (10) is comprised of depolarization Amici prism (10-1) and four-quadrant polarizer group (10-2), described depolarization Amici prism (10-1) is cube structure, described four-quadrant polarizer group (10-2) is comprised of four polaroids
The incident beam of the synchronous Phase Shifting System of light splitting (10) is the incident beam of depolarization Amici prism (10-1), and the outgoing beam of the synchronous Phase Shifting System of light splitting (10) is the outgoing beam of four-quadrant polarizer group (10-2),
Depolarization Amici prism (10-1) is divided into two light beams by incident beam, be respectively folded light beam and transmitted light beam, folded light beam is corresponding to two polaroids in four-quadrant polarizer group (10-2), transmitted light beam is corresponding to two polaroids in four-quadrant polarizer group (10-2), outgoing after four polaroid polarizations, as the outgoing beam of four-quadrant polarizer group (10-2);
The light splitting surface of depolarization Amici prism (10-1) and xoz plane parallel, the incident beam of depolarization Amici prism (10-1) is parallel with described light splitting surface, and the incident beam of depolarization Amici prism (10-1) is from the inclined-plane incident of light splitting surface one side; Described four-quadrant polarizer group (10-2) is 2 * 2 arrays that polarization direction is rotated counterclockwise four polaroids compositions of 45° angle successively;
The direction of optical axis of take is set up xyz coordinate axis as z direction of principal axis, and described rectangular window (6) is along the direction setting perpendicular to optical axis, and is divided into two wickets along x direction of principal axis;
Two λ/4 wave plates (4) all be arranged in parallel with rectangular window (6) and are positioned at same plane, and described two λ/4 wave plates (4) are equidistantly arranged along x direction of principal axis is parallel;
The focal length of first lens (7) and the second lens (9) is all f;
Rectangular window (6) is positioned on the front focal plane of first lens (7); One Dimension Periodic grating (8) is positioned on the back focal plane of first lens (7) and is positioned on the front focal plane of the second lens (9);
Imageing sensor (11) is positioned on the back focal plane of the second lens (9);
The cycle d of One Dimension Periodic grating (8) and rectangular window (6) are along meeting relation between the axial width D of x:
d＝2λf/D。
2. the interference with common path pick-up unit based on the synchronous phase shift of light splitting according to claim 1, is characterized in that:
Object under test (5) is placed in rectangular window (6), the light beam light incident side of rectangular window (6) or the light beam exiting side of rectangular window (6), object under test (5) is less than or equal to D/2 along the axial length of x, and object under test (5) is positioned at the dead astern of one of them λ/4 wave plate (4).
3. the interference with common path pick-up unit based on the synchronous phase shift of light splitting according to claim 1, is characterized in that: One Dimension Periodic grating (8) is two-value One Dimension Periodic grating, sinusoidal One Dimension Periodic grating or cosine One Dimension Periodic grating.
4. the interference with common path pick-up unit based on the synchronous phase shift of light splitting according to claim 1, is characterized in that: light transmission shaft and the x axle of polaroid (2) are 45° angle.
5. the interference with common path pick-up unit based on the synchronous phase shift of light splitting according to claim 1, it is characterized in that: in two λ/4 wave plates (4), the fast axle of λ/4 wave plate (4) is placed along x direction of principal axis, the fast axle of another λ/4 wave plate (4) is placed along y direction of principal axis.
6. the interference with common path pick-up unit based on the synchronous phase shift of light splitting according to claim 1, is characterized in that: described rectangular window (6) is the window of D * (D/2)=6.33mm * 3.16mm.
7. the interference detection method based on the interference with common path pick-up unit based on the synchronous phase shift of light splitting described in claim 1, is characterized in that: its implementation procedure is as follows:
Open light source (1), make the light beam of light source (1) transmitting form parallel polarization light beam after polaroid (2) and collimating and beam expanding system (3) collimator and extender, this parallel polarization light beam is by two λ/4 wave plates (4), after object under test (5) and rectangular window (6), pass through successively again first lens (7), One Dimension Periodic grating (8) and the second lens (9) produce 0 grade and ± 1 order diffraction light beam, this diffracted beam is incident to after the synchronous Phase Shifting System of light splitting (10), in imageing sensor (11) plane, produce and interfere, the interference pattern that computing machine (12) collection is obtained is cut apart the four width interference patterns that obtain object under test (5) according to the size of the wicket of rectangular window (6), this four width interference pattern be take upper right corner image as the first width interference pattern, and be first to fourth width interference pattern according to counterclockwise arranging, the intensity of the third and fourth width interference pattern being carried out to four width interference patterns after mirror image switch is I in turn
1, I
2, I
3and I
4, and press formula
Obtain the PHASE DISTRIBUTION of object under test (5)
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| CN102538986A (en) * | 2012-01-05 | 2012-07-04 | 哈尔滨工程大学 | Three-window based common-path interference detecting method and device |
| CN102589414A (en) * | 2012-02-21 | 2012-07-18 | 中国科学院西安光学精密机械研究所 | Synchronous phase-shifting Fizeau interference device capable of measuring in real time |
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| CN102538986A (en) * | 2012-01-05 | 2012-07-04 | 哈尔滨工程大学 | Three-window based common-path interference detecting method and device |
| CN102589414A (en) * | 2012-02-21 | 2012-07-18 | 中国科学院西安光学精密机械研究所 | Synchronous phase-shifting Fizeau interference device capable of measuring in real time |
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| Carrier fringes in the two-aperture common-path interferometer;Cruz Meneses-Fabian et al.;《OPTICS LETTERS》;20110301;第36卷(第5期);642-644 * |
| Cruz Meneses-Fabian et al..Carrier fringes in the two-aperture common-path interferometer.《OPTICS LETTERS》.2011,第36卷(第5期),642-644. * |
| JP特开2008-157710A 2008.07.10 * |
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