CN107388983B - A kind of uniform scanning laser line generation system and method for energy - Google Patents
A kind of uniform scanning laser line generation system and method for energy Download PDFInfo
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- CN107388983B CN107388983B CN201710514997.6A CN201710514997A CN107388983B CN 107388983 B CN107388983 B CN 107388983B CN 201710514997 A CN201710514997 A CN 201710514997A CN 107388983 B CN107388983 B CN 107388983B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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Abstract
The invention belongs to field of photodetection, are related to a kind of uniform scanning laser line generation system and method for energy height.Including laser, MEMS galvanometer, laser control module, MEMS galvanometer control module and main system control module；Real-time windup-degree, torsional frequency and galvanometer in main system control module combination MEMS galvanometer vibration processes receive the relative position of the plane of reference to laser scanning line, it obtains each moment reflection laser beam in MEMS galvanometer vibration processes and receives the speed scanned on the plane of reference in laser scanning line, the energy for controlling laser real time emission makes the product definite value of the energy of scanning speed and laser real time emission.It solves the problems, such as that scanning laser beam uniformity is poor, scan line dispersion angle is difficult to adjust, passes through the energy hole E that laser control module real-time control laser emits(t)Fluctuation range, i.e., the adjusting of controllable laser scanning line optical power distribution, to realize that laser scanning line energy uniformity is adjusted and control.
Description
Technical field
The invention belongs to field of photodetection, and in particular to a kind of uniform scanning laser line of energy height generate system and
Method.
Background technique
With the development of artificial intelligence and emerging in large numbers for many brand new technicals, 3D is measured in industrial detection, mobile robot field
The potential huge application in the fields such as scape cognition, reverse-engineering, laser remote sensing monitoring, human-computer interaction, bio-identification, CAD/CAM is empty
Between.3D measurement generallys use active measurement method, i.e., projects controllable light beam, i.e. 3D scanning, using light as carrier to testee
Obtain the profile information of body surface.Since laser monochromaticjty, directionality go with coherence, brightness is high, and 3D scanning is usually with sharp
Optical scanning is realized, laser point or line scanning are divided into principle and structure fringe scans two kinds of forms.Structure fringe scanning system list
Secondary achievable large-range measuring, time of measuring is also very short, is suitable for large scale or to the demanding occasion of time of measuring；And swash
Luminous point or linear scanning system, full accuracy can achieve micron order, 10 or 100 times of quantity higher than the precision of structure fringe scanning
Grade has irreplaceable role in precision component measurement and processing and other fields.
The generating mode of laser rays at present is mainly realized by optical lens or traditional vibration mirror scanning.Patent
It is realized in CN2387506Y using cylindrical mirror and point light source is stretched as light-knife, to scan object shape；CN103206926A with
It is scanned detection using a wordline laser device in the patents such as CN102749310A, and the linear type of a wordline laser device projection swashs
Light pattern is realized that optical power is only capable of up to 50%-80%, and optical power fluctuation is bigger in a wordline, light by cylindrical mirror
Power is uneven, will appear distortion in detection process；And laser scanning line dispersion angle can not be adjusted.In CN105196537A,
Laser line scanning is realized using motor galvanometer, but is not related to the uniformity controlling of laser rays optical power；In CN105785696A
It is the scanning for driving galvanometer to realize laser rays using motor, and swept by multi-laser beam, adjusting parallel flat and zoom mirror, improvement
The uniformity of laser rays is retouched, but using conventional motors galvanometer there are volumes big, the high problem of power consumption, in high-precision, miniaturized intelligent
Popularization and application faces significant limitations in mobile device.
Summary of the invention
In order to solve the problems, such as that scanning laser beam uniformity is poor, scan line dispersion angle is difficult to adjust, the present invention is provided
A kind of uniform scanning laser line of simple, small in size, the low in energy consumption energy of structure generates system and the scanning based on the system swashs
Light generation method.
The technical solution of the invention is as follows provides a kind of uniform scanning laser line generation system of energy, including laser
1 includes mirror surface 31 and shaft 32, is characterized in that further include laser control with MEMS galvanometer 3, above-mentioned MEMS galvanometer 3
Module 8, MEMS galvanometer control module 4 and main system control module 9；
Above-mentioned laser control module 8 is connect with laser 1 and main system control module 9 for controlling laser 1 respectively
Light power, and light power information is fed back into main system control module 9；
Above-mentioned MEMS galvanometer control module 4 is connect with MEMS galvanometer 3 and main system control module 9 for controlling and driving respectively
32 torsion around the shaft of MEMS galvanometer 3, and torsion parameter is fed back into main system control module 9；
Light power information and torsion parameter control 8 He of laser control module to above system main control module 9 based on the received
MEMS galvanometer control module 4；
The laser beam that laser 1 emits exposes to the mirror surface 31 of MEMS galvanometer 3, reflects through MEMS galvanometer mirror surface 31.
Preferably, the spot size of actually required scan line, the system further include being located at 1 emergent light of laser in order to obtain
The diaphragm or lens of road obtain specific laser exit beam 2 by adding diaphragm or lens shaping.
Preferably, above-mentioned torsion parameter includes torsional frequency, windup-degree amplitude and real-time windup-degree.
The present invention also provides a kind of uniform scanning laser line generation methods of energy based on above system, including following step
It is rapid:
Step 1: it introduces a laser scanning line and receives the plane of reference, and determine that laser, MEMS galvanometer and laser scanning line connect
Receive the relative position of the plane of reference；
Step 2: laser beam receives the plane of reference through MEMS vibration mirror reflected to laser scanning line, and main system control module combines
Real-time windup-degree, torsional frequency and galvanometer in MEMS galvanometer vibration processes receive the opposite position of the plane of reference to laser scanning line
It sets, obtains the speed that each moment reflection laser beam scans on laser scanning line receiving screen in MEMS galvanometer vibration processes, control
The energy of laser real time emission makes the product definite value of the energy of scanning speed and laser real time emission.
Preferably, laser beam connects after diaphragm or lens shaping through MEMS vibration mirror reflected to laser scanning line in step 2
Receive the plane of reference.
Preferably, above-mentioned steps two further include adjusting the torsion of MEMS galvanometer before the energy of control laser real time emission
The step of frequency and windup-degree amplitude.
The present invention also provides the uniform scanning laser line generation method of another energy based on above system, features
It is:
Step 1: introducing a laser scanning line and receive the plane of reference, makes plane where the plane of reference and laser rays region to be scanned
In parallel, and determine laser, MEMS galvanometer and laser scanning line receiving screen relative position；
Step 2: laser beam through MEMS vibration mirror reflected to laser scanning line receive the plane of reference, main system control module according to
The laser light power of laser control module feedback, control MEMS galvanometer control module adjust MEMS galvanometer windup-degree and
Torsional frequency makes the product definite value of the energy of scanning speed and laser real time emission.
Preferably, in above-mentioned steps two laser beam after diaphragm or lens shaping through MEMS vibration mirror reflected to laser scanning
Line receives the plane of reference.
The beneficial effects of the present invention are:
The motion conditions of galvanometer of the present invention are determining by galvanometer control module and control, real-time by laser control module
Control the energy hole E of laser transmitting(t)Fluctuation range, i.e., the adjusting of controllable laser scanning line optical power distribution, thus
Realize that laser scanning line energy uniformity is adjusted and controlled；Galvanometer can also be adjusted according to the light power of laser simultaneously to turn round
Turn, realize laser scanning line energy uniformity adjust and control, may make scan line everywhere the optical power uniformity up to 95%
More than；In addition, the windup-degree amplitude of logical control galvanometer, can be realized the adjusting of laser scanning line dispersion angle.
Detailed description of the invention
Fig. 1 is system schematic of the invention；
Fig. 2 is uniform laser scanning line generation method system schematic；
Fig. 3 is the method for the present invention and the laser rays uniformity comparison diagram obtained by optical lens；
Appended drawing reference in figure are as follows: 1- laser, 2- laser exit beam, 3-MEMS galvanometer, 31- mirror surface, 32- shaft, 4-
MEMS galvanometer control module, 5- reflection laser light beam, 6- laser scanning line receive the plane of reference, 7- scan line, 8- laser control
Module, 9- main system control module.
Specific embodiment
Below in conjunction with drawings and the specific embodiments, the present invention will be further described.
It will be seen from figure 1 that present system includes laser 1, laser control module 8, MEMS galvanometer 3, MEMS vibration
Mirror control module 4 and main system control module 9.The light power of 8 real-time control laser 1 of laser control module, and light will be gone out
Power information feeds back to main system control module 9；The motion conditions of 4 real-time control MEMS galvanometer of MEMS galvanometer control module, including
Torsional frequency, the windup-degree amplitude of MEMS galvanometer mirror surface 31, and the real-time corner for feeding back galvanometer (is exactly each moment galvanometer mirror surface
Angular position) and torsion kinematic parameters such as angular speed, and above-mentioned kinematic parameter is transmitted to main system control module 9；System master
Control module 9 by controlling laser control module 8 and MEMS galvanometer control module 4 simultaneously, come realize to laser light power with
The real-time adjusting of each moment motion state of galvanometer.
The laser exit beam 2 that laser 1 emits is irradiated to the surface of MEMS galvanometer 3, and is reflected by galvanometer mirror surface 31；When
MEMS galvanometer mirror surface 31 around the shaft 32 by certain frequency reverse when, reflection laser light beam 5 just inswept one perpendicular to galvanometer shaft
32 scan line 7；When the torsional frequency of galvanometer is sufficiently high, the track of scan line 7 forms a laser bright line, passes through galvanometer control
The windup-degree amplitude that molding block adjusts galvanometer is the dispersion angle that can control laser scanning line.
Wherein laser 1 obtains spy by adding diaphragm or lens shaping according to the spot size of actually required scan line 7
Determine laser exit beam 2；
Influence during laser line scanning the Energy distribution of laser rays everywhere because being known as: laser scanning line is with respect to MEMS vibration
The position of mirror, each moment laser exit beam be incident to MEMS galvanometer incidence angle (i.e. the relative position of laser and galvanometer with
The real-time corner of galvanometer will affect galvanometer to the reflectivity of incoming laser beam, i.e. shoot laser optical power beam), MEMS galvanometer
Reverse speed (torsional frequency of galvanometer) and the laser beam energy of laser transmitting.
Preferably, it the laser scanning line generation method of high uniformity: such as Fig. 2, is incorporated herein by reference face 6 and receives laser scanning
Line, according to laser rays region to be scanned determine the plane of reference 6, laser, MEMS galvanometer three relative position: go out including laser
Penetrate the incident angle of light relative specular initial position, distance of the plane of reference 6 with respect to galvanometer and initial angle, it is preferred that make to join
Examine the emergent ray that initial position is in perpendicular to MEMS galvanometer mirror surface in face 6.
It, can be by the real-time position of galvanometer mirror surface 31 that MEMS galvanometer control module 4 is fed back according in MEMS galvanometer vibration processes
Angular speed and galvanometer are set and reversed in conjunction with the relative position that laser scanning line receives the plane of reference 6, system master molding block 9 can obtain
The real-time speed v scanned on the plane of reference 6 is met in laser scanning line to reflection laser light beam(t), to control laser control module
It realizes the real-time adjusting of laser emitted energy P (t), makes v(t)*P(t)=E(t), wherein E(t)For scan line optical power everywhere,
Make E(t)It keeps constant, that is, can guarantee the uniformity of laser scanning line optical power distribution, to realize that laser scanning heat input is equal
Even property control.Such scheme, from figure 3, it can be seen that may make scan line everywhere the optical power uniformity up to 95% or more, and
The uniformity of the scan line obtained by optical lens changes in 75% to 100% range.
System master molding block 9 can also control MEMS galvanometer control module 4 by the light power of laser 1 and adjust
Real-time torsional frequency, windup-degree and the windup-degree amplitude of MEMS galvanometer, realize laser scanning line energy uniformity adjust with
Control.
Claims (8)
1. a kind of uniform scanning laser line of energy generates system, including laser (1) and MEMS galvanometer (3), the MEMS vibration
Mirror (3) includes mirror surface (31) and shaft (32), it is characterised in that: further includes laser control module (8), MEMS galvanometer control mould
Block (4) and main system control module (9)；
The laser control module (8) connect with laser (1) and main system control module (9) for controlling laser respectively
(1) light power, and light power information is fed back into main system control module (9)；
The MEMS galvanometer control module (4) connect with MEMS galvanometer (3) and main system control module (9) for controlling and driving respectively
Dynamic MEMS galvanometer (3) are reversed around the shaft (32), and torsion parameter is fed back to main system control module (9)；
The main system control module (9) based on the received light power information and torsion parameter control laser control module (8) and
MEMS galvanometer control module (4) makes the product definite value of the energy of scanning speed and laser real time emission；Laser (1) hair
The laser beam penetrated exposes to the mirror surface (31) of MEMS galvanometer (3), reflects through MEMS galvanometer mirror surface (31).
2. the uniform scanning laser line of energy according to claim 1 generates system, it is characterised in that: further include being located to swash
Diaphragm or lens on light device (1) emitting light path.
3. the uniform scanning laser line of energy according to claim 2 generates system, it is characterised in that: the torsion parameter
Including torsional frequency, windup-degree amplitude and real-time windup-degree.
4. a kind of energy for generating system based on any uniform scanning laser line of energy of claims 1 to 3 is uniformly swept
Retouch laser rays generation method, which comprises the following steps:
Step 1: introducing laser scanning line and receive the plane of reference (6), and determines that laser, MEMS galvanometer and laser scanning line receive
The relative position of the plane of reference；
Step 2: laser beam receives the plane of reference (6) through MEMS vibration mirror reflected to laser scanning line, and main system control module combines
Real-time windup-degree, torsional frequency in MEMS galvanometer vibration processes receive the phase of the plane of reference (6) with galvanometer to laser scanning line
To position, obtains each moment reflection laser beam in MEMS galvanometer vibration processes and receive the speed scanned on the plane of reference in laser scanning line
Degree controls the energy of laser real time emission, makes the product definite value of the energy of scanning speed and laser real time emission.
5. the uniform scanning laser line generation method of energy according to claim 4, it is characterised in that: laser in step 2
Light beam receives the plane of reference (6) through MEMS vibration mirror reflected to laser scanning line after diaphragm or lens shaping.
6. the uniform scanning laser line generation method of energy according to claim 4 or 5, it is characterised in that: the step
Two further include the step for adjusting MEMS galvanometer torsional frequency and windup-degree amplitude before the energy of control laser real time emission
Suddenly.
7. a kind of energy for generating system based on any uniform scanning laser line of energy of claims 1 to 3 is uniformly swept
Retouch laser rays generation method, which comprises the following steps:
Step 1: laser scanning line is introduced according to laser rays and receives the plane of reference (6), and determines laser, MEMS galvanometer and laser
The relative position of the scan line reception plane of reference；
Step 2: laser beam receives the plane of reference (6) through MEMS vibration mirror reflected to laser scanning line, and main system control module is according to sharp
The laser light power of light device control module feedback, control MEMS galvanometer control module adjust MEMS galvanometer windup-degree and torsion
Turn frequency, makes the product definite value of the energy of scanning speed and laser real time emission.
8. the uniform scanning laser line generation method of energy according to claim 7, it is characterised in that: laser in step 2
Light beam receives the plane of reference (6) through MEMS vibration mirror reflected to laser scanning line after diaphragm or lens shaping.
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| CN201710514997.6A CN107388983B (en) | 2017-06-29 | 2017-06-29 | A kind of uniform scanning laser line generation system and method for energy |
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| CN109458928B (en) * | 2018-10-29 | 2020-12-25 | 西安知微传感技术有限公司 | Laser line scanning 3D detection method and system based on scanning galvanometer and event camera |
| CN110739889B (en) * | 2019-08-15 | 2022-01-11 | 佛山市顺德区蚬华多媒体制品有限公司 | Driving device of electromagnetic driving micro motor |
| CN110927699A (en) * | 2019-12-02 | 2020-03-27 | 重庆知至科技有限公司 | Three-dimensional laser radar of MEMS light beam regulation and control |
| CN111174702B (en) * | 2020-01-22 | 2022-03-15 | 无锡微视传感科技有限公司 | Adaptive structured light projection module and measurement method |
| CN112958958B (en) * | 2021-02-08 | 2023-03-21 | 西安知象光电科技有限公司 | MEMS micro-mirror scanning and line scanning mixed laser welding seam scanning device and scanning method |
| CN114932120A (en) * | 2022-04-28 | 2022-08-23 | 杨琦 | Laser cleaning method based on two-dimensional galvanometer |
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| US5606174A (en) * | 1994-05-26 | 1997-02-25 | Matsushita Electric Works, Ltd. | Method and device for detecting a shape of object with high resolution measurement of displacement of an object surface from a reference plane |
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