CN111398969A - Laser radar and transmitting-receiving device thereof - Google Patents

Laser radar and transmitting-receiving device thereof Download PDF

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Publication number
CN111398969A
CN111398969A CN202010342177.5A CN202010342177A CN111398969A CN 111398969 A CN111398969 A CN 111398969A CN 202010342177 A CN202010342177 A CN 202010342177A CN 111398969 A CN111398969 A CN 111398969A
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CN
China
Prior art keywords
lens
collimation
unit
laser
laser beam
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Pending
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CN202010342177.5A
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Chinese (zh)
Inventor
黄印
朱建中
邹旗
方国明
徐丹慧
张于通
向思桦
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Chengdu Yingfeirui Technology Co ltd
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Chengdu Yingfeirui Technology Co ltd
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Priority to CN202010342177.5A priority Critical patent/CN111398969A/en
Publication of CN111398969A publication Critical patent/CN111398969A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Abstract

The application discloses a laser radar and a transceiver thereof, wherein, the transceiver of the laser radar arranges an MEMS galvanometer between a first collimation unit and a second collimation unit, so that the first collimation unit firstly collimates a laser beam for the first time, then the MEMS galvanometer reflects the laser beam after the first collimation to a second collimation unit, meanwhile, the MEMS galvanometer rapidly vibrates along the collimation direction of the first collimation unit, so when the laser beam reflected by the MEMS galvanometer reaches the second collimation unit, the second collimating unit may perform a second collimation of the other vibration direction of the laser beam, the light beam in the collimation direction of the first collimation unit is not changed, so that the aim of meeting the scanning requirement by using the MEMS galvanometer with smaller area is fulfilled, the aim of obtaining a larger scanning area while emitting the light at a small divergence angle is fulfilled.

Description

Laser radar and transmitting-receiving device thereof
Technical Field
The application relates to the technical field of light path design, in particular to a laser radar and a transmitting and receiving device thereof.
Background
Laser radar is a radar system for detecting the position, speed and other characteristic quantities of a target by emitting laser beams, belongs to an active detection technology capable of accurately acquiring space three-dimensional information, is mainly used in the fields of intelligent automobiles, robots, unmanned aerial vehicles and surveying and mapping, and has wide application prospects.
Most of existing laser radars in the market are mechanical laser radars, the mechanical laser radars generally adopt a plurality of transmitting units to transmit laser, and a plurality of receiving units are used for receiving echo signals, for example, 128-line mechanical laser radars need 128 transmitting units and 128 receiving units, which greatly increases system cost and optical installation and adjustment difficulty.
In order to solve the problem, a laser radar adopting an MEMS galvanometer scheme for scanning appears, and the laser radar has the advantages of simple structure, small size and the like and is the development trend of the future laser radar.
However, in the laser radar adopting the MEMS galvanometer scheme, there is a contradiction between the light transmission areas of the laser beam and the MEMS galvanometer, and specifically, in order to obtain an outgoing laser beam with higher quality, a MEMS galvanometer with a larger area is required, but the larger the area of the MEMS galvanometer is, the larger the scanning frequency of the whole system and the difficulty in the research and development of the MEMS galvanometer are.
Disclosure of Invention
In order to solve the technical problem, the application provides a laser radar and a transceiver thereof, so as to achieve the purpose of emitting detection laser with better quality by using an MEMS galvanometer with a smaller area.
In order to achieve the technical purpose, the embodiment of the application provides the following technical scheme:
a lidar transceiver apparatus comprising: the MEMS micro-mirror comprises an emitting unit, a first collimating unit, an MEMS galvanometer, a second collimating unit and a receiving unit; wherein the content of the first and second substances,
the emitting unit is used for emitting laser beams;
the first collimation unit is used for collimating the laser beam for the first time and transmitting the laser beam to the MEMS galvanometer;
the MEMS galvanometer is used for vibrating along the collimation direction of the first collimation unit so as to reflect the laser beam after primary collimation to the second collimation unit;
the second collimation unit is used for carrying out second collimation on the laser beam after the first collimation so as to obtain detection laser;
and the receiving unit is used for receiving the detection laser reflected by the target and transmitting the detection laser reflected by the target to a detector of the laser radar.
Optionally, the first collimating unit includes a cylindrical lens or a lens group formed by a plurality of lenses;
the second collimating unit includes a cylindrical lens or a lens group composed of a plurality of lenses.
Optionally, the first collimating unit is specifically configured to collimate a fast-axis divergence angle of the laser beam for the first time;
the second collimation unit is used for performing second collimation on the laser beam after the first collimation, and is particularly used for collimating the slow axis divergence angle of the laser beam after the first collimation.
Optionally, the receiving unit comprises a first lens group and a second lens group;
the optical axes of the first lens group and the second lens group are positioned on the same straight line;
the distance between the first lens group and the second lens group in the optical axis direction is less than 15 mm.
Optionally, the first lens group includes a first lens and a second lens which are sequentially disposed;
the second lens group comprises a third lens and a fourth lens which are arranged in sequence.
Optionally, a distance between the first lens and the second lens in the optical axis direction is less than 3 mm;
and the distance between the third lens and the fourth lens in the optical axis direction is less than 3 mm.
Optionally, the first lens and the fourth lens are both meniscus lenses;
the second lens is a plano-concave lens;
the third lens is a biconvex lens.
A lidar comprising: a receiving and transmitting device and a detector of the laser radar; wherein the content of the first and second substances,
the laser radar transceiver is any one of the above laser radar transceivers, and is configured to process the laser beam to obtain detection laser, transmit the detection laser outward, receive the detection laser reflected by the target, and transmit the detection laser reflected by the target to a detector of the laser radar;
the detector is used for detecting according to the detection laser reflected by the target.
Optionally, the method further includes: a mirror rotating module;
the rotating mirror module is used for scanning along a first direction so as to convert one-dimensional scanning of the MEMS galvanometer into two-dimensional scanning;
the first direction is perpendicular to the vibration direction of the MEMS galvanometer.
It can be seen from the foregoing technical solutions that, in the transceiver of the laser radar, the MEMS galvanometer is disposed between the first collimating unit and the second collimating unit, so that the first collimating unit first collimates the laser beam, and then the MEMS galvanometer reflects the laser beam after the first collimation to the second collimating unit, and meanwhile, the MEMS galvanometer rapidly vibrates along the collimation direction of the first collimating unit, so that when the laser beam reflected by the MEMS galvanometer reaches the second collimating unit, the second collimating unit can perform the second collimation on the other vibration direction of the laser beam, and the beam in the collimation direction of the first collimating unit does not change, thereby achieving the purpose that the MEMS galvanometer with a small area meets the scanning requirement, that is, achieving the purpose of emitting the laser beam with a small divergence angle, the purpose of obtaining a larger scanning area is achieved.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, it is obvious that the drawings in the following description are only embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a schematic diagram of an optical path in a collimating direction of a first collimating unit when the MEMS galvanometer is not vibrating;
FIG. 2 is a schematic diagram of the light path in the collimating direction of the second collimating unit when the MEMS galvanometer is not vibrating;
FIG. 3 is a schematic diagram of the optical path in the collimating direction of the first collimating unit when the MEMS galvanometer vibrates up and down in the direction parallel to the paper;
fig. 4 is a schematic structural diagram of a receiving unit according to an embodiment of the present application;
fig. 5 is a schematic diagram illustrating a positional relationship between a rotating mirror module and a transmitting module according to an embodiment of the present application.
Detailed Description
As described in the background art, in the conventional laser radar with MEMS galvanometer scanning, since the divergence angle of the semiconductor laser is too large and the beam quality is not high, when the semiconductor laser is used as a light source, the laser beam emitted from the semiconductor laser needs to be collimated.
According to the basic theory of geometric optics and the propagation theory of Gaussian beams. The larger the aperture of the collimated light beam is, the smaller the divergence angle is, the better the collimation effect is, and the more concentrated the far-field energy is. However, this is contradictory to the light transmission area of the MEMS, and the larger the area of the MEMS, the greater the scanning frequency of the whole system and the difficulty of the development and integration of the MEMS micro-mirror. MEMS mirrors are currently available on the market with an area of about 7 mm, which increases the power consumption of the MEMS and reduces the frequency of MEMS vibrations.
In view of this, an embodiment of the present application provides a laser radar transceiver apparatus, including: the MEMS micro-mirror comprises an emitting unit, a first collimating unit, an MEMS galvanometer, a second collimating unit and a receiving unit; wherein the content of the first and second substances,
the emitting unit is used for emitting laser beams;
the first collimation unit is used for collimating the laser beam for the first time and transmitting the laser beam to the MEMS galvanometer;
the MEMS galvanometer is used for vibrating along the collimation direction of the first collimation unit so as to reflect the laser beam after primary collimation to the second collimation unit;
the second collimation unit is used for carrying out second collimation on the laser beam after the first collimation so as to obtain detection laser;
and the receiving unit is used for receiving the detection laser reflected by the target and transmitting the detection laser reflected by the target to a detector of the laser radar.
The receiving and transmitting device of the laser radar is characterized in that the MEMS vibration mirror is arranged between the first collimating unit and the second collimating unit, so that the first collimating unit firstly collimates the laser beam for the first time, then the MEMS vibration mirror reflects the laser beam collimated for the first time to the second collimating unit, and meanwhile, the MEMS vibration mirror rapidly vibrates along the collimating direction of the first collimating unit, therefore, when the laser beam reflected by the MEMS vibration mirror reaches the second collimating unit, the second collimating unit can perform the second collimation on the other vibrating direction of the laser beam, and the beam in the collimating direction of the first collimating unit does not change, so that the aim of meeting the scanning requirement by using the MEMS vibration mirror with a small area is fulfilled, namely, the aim of obtaining a large scanning area while emitting the laser beam at a small divergence angle is fulfilled.
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
The embodiment of the present application provides a lidar transceiver, as shown in fig. 1, 2 and 3, comprising a transmitting unit L D, a first collimating unit 10, a MEMS galvanometer 20, a second collimating unit 30 and a receiving unit, wherein,
the emission unit L D for emitting laser beam
The first collimating unit 10 is configured to collimate the laser beam for the first time and transmit the collimated laser beam to the MEMS galvanometer 20;
the MEMS galvanometer 20 is configured to vibrate along the collimation direction of the first collimation unit 10 to reflect the laser beam after the first collimation to the second collimation unit 30;
the second collimating unit 30 is configured to perform second collimation on the laser beam after the first collimation to obtain detection laser;
and the receiving unit is used for receiving the detection laser reflected by the target and transmitting the detection laser reflected by the target to a detector of the laser radar.
Fig. 1 is a schematic diagram showing the optical path in the collimation direction of the first collimation unit 10 when the MEMS galvanometer 20 is not vibrating.
Fig. 2 is a schematic diagram showing the optical path in the collimating direction of the second collimating unit 30 when the MEMS galvanometer 20 is not vibrating.
Fig. 3 is a schematic diagram showing the optical path in the collimating direction of the first collimating unit 10 when the MEMS galvanometer 20 vibrates up and down in the direction parallel to the paper.
In general, the collimation direction of the first collimation unit 10 is perpendicular to the collimation direction of the second collimation unit 30, so as to respectively realize collimation on the fast and slow axes of the laser beam, and finally obtain the detection laser with a smaller divergence angle.
That is, correspondingly, the first collimating unit 10 may be an optical element unit that collimates the fast axis direction of the laser beam, and the second collimating unit 30 may be an optical element unit that collimates the slow axis direction of the laser beam.
That is, the first collimating unit 10 is specifically configured to collimate the fast-axis divergence angle of the laser beam in the first collimation of the laser beam;
the second collimating unit 30 is specifically configured to collimate the slow-axis divergence angle of the laser beam after the first collimation, by performing the second collimation on the laser beam after the first collimation.
Illustratively, the first collimating unit 10 and the second collimating unit 30 may each be composed of a cylindrical lens, but in other embodiments of the present application, the first collimating unit 10 and the second collimating unit 30 may also be a lens group composed of a plurality of lenses, which is not limited in this application, depending on the actual situation.
The laser radar transceiver provided by the embodiment of the application can utilize a smaller area (less than or equal to 5 mm) because the MEMS galvanometer 20 is arranged between the first collimating unit 10 and the second collimating unit 302) The MEMS galvanometer 20 meets the system requirements for light collimation and scanning.
The receiving unit provided by the embodiment of the application is described below, and the receiving unit adopts a scheme of focusing large light spots, so that the light spots uniformly cover the blind area between each single-point detector, and the situation that the light spots of the received detection laser fall into the gaps of the detectors due to being too small is avoided.
Referring to fig. 4, the receiving unit includes a first lens group 31 and a second lens group 32;
the optical axes of the first lens group 31 and the second lens group 32 are positioned on the same straight line;
the first lens group 31 and the second lens group 32 have a distance in the optical axis direction of less than 15 mm.
The first lens group 31 includes a first lens 311 and a second lens 312 which are arranged in this order;
the second lens group 32 includes a third lens 321 and a fourth lens 322, which are sequentially disposed.
The first lens 311 and the fourth lens 322 are both meniscus lenses;
the second lens 312 is a plano-concave lens;
the third lens 321 is a biconvex lens.
The plane of the first lens 311 is disposed toward the second lens 312, and the curved surface of the second lens 312 is disposed toward the plane of the first lens 311; the curved surface of the fourth lens 322 is disposed toward the third lens 321.
In fig. 4, a filter is also shown on the surface of the fourth lens 322 facing away from the third lens 321, through which filter light is finally focused on the detector.
Optionally, a distance between the first lens and the second lens in the optical axis direction is less than 3 mm;
and the distance between the third lens and the fourth lens in the optical axis direction is less than 3 mm.
The distance requirement between the first lens and the second lens, the distance requirement between the third lens and the fourth lens and the distance requirement between the first lens group and the second lens group are all used for enabling the length of the whole system to be smaller and simultaneously playing a part of function of eliminating aberrations.
Correspondingly, the embodiment of the present application further provides a laser radar, including: a receiving and transmitting device and a detector of the laser radar; wherein the content of the first and second substances,
the receiving and transmitting device of the laser radar is the receiving and transmitting device of the laser radar in any embodiment, and is used for emitting laser beams, processing the laser beams to obtain detection laser which is transmitted outwards, receiving the detection laser reflected by a target, and transmitting the detection laser reflected by the target to a detector of the laser radar;
the detector is used for detecting according to the detection laser reflected by the target.
Optionally, referring to fig. 5, the lidar further includes: a mirror rotating module 40;
the rotating mirror module 40 is used for scanning along a first direction;
the first direction is perpendicular to the vibration direction of the MEMS galvanometer.
During the scanning process, the turning mirror module 40 reflects the laser beam emitted from the emitting unit L D and transmits the reflected laser beam outward, and reflects the probe laser beam reflected by the target toward the receiving unit 50, so that the receiving unit 50 receives the probe laser beam reflected by the target.
The rotating mirror module 40 has the function of changing the one-dimensional scanning of the MEMS galvanometer into two-dimensional scanning to obtain more comprehensive information of the object. In an optional embodiment of the present application, the detector is configured to record a time interval from when the transmitting unit emits the laser beam to when the receiving unit receives the detection laser reflected by the target, so as to calculate a distance between the laser radar and the target according to the time interval, thereby achieving acquisition of three-dimensional information of the target.
Meanwhile, the distance (inter-axis distance) between the optical axes of the turning mirror module 40 and the transmitting unit L D is D, that is, a non-coaxial optical path is adopted between the turning mirror module 40 and the transmitting unit L D, so as to enlarge the horizontal view field angle of the laser radar.
To sum up, the embodiment of the present application provides a laser radar and a transceiver thereof, wherein the transceiver of the laser radar arranges an MEMS galvanometer between a first collimating unit and a second collimating unit, such that the first collimating unit firstly collimates a laser beam, and then the MEMS galvanometer reflects the laser beam after the first collimation toward the second collimating unit, and meanwhile, the MEMS galvanometer rapidly vibrates along a collimating direction of the first collimating unit, so that when the laser beam reflected by the MEMS galvanometer reaches the second collimating unit, the second collimating unit can collimate another vibration direction of the laser beam for the second time, and the beam in the collimating direction of the first collimating unit does not change, thereby achieving the purpose that the MEMS galvanometer with a smaller area satisfies a scanning requirement, that is, while emitting the laser beam at a very small divergence angle, the purpose of obtaining a larger scanning area is achieved.
Features described in the embodiments in the present specification may be replaced with or combined with each other, each embodiment is described with a focus on differences from other embodiments, and the same and similar portions among the embodiments may be referred to each other.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (9)

1. A laser radar transmitting/receiving apparatus, comprising: the MEMS micro-mirror comprises an emitting unit, a first collimating unit, an MEMS galvanometer, a second collimating unit and a receiving unit; wherein the content of the first and second substances,
the emitting unit is used for emitting laser beams;
the first collimation unit is used for collimating the laser beam for the first time and transmitting the laser beam to the MEMS galvanometer;
the MEMS galvanometer is used for vibrating along the collimation direction of the first collimation unit so as to reflect the laser beam after primary collimation to the second collimation unit;
the second collimation unit is used for carrying out second collimation on the laser beam after the first collimation so as to obtain detection laser;
and the receiving unit is used for receiving the detection laser reflected by the target and transmitting the detection laser reflected by the target to a detector of the laser radar.
2. The lidar transceiver according to claim 1, wherein the first collimating unit includes a cylindrical lens or a lens group of a plurality of lenses;
the second collimating unit includes a cylindrical lens or a lens group composed of a plurality of lenses.
3. The lidar transceiver according to claim 1, wherein the first collimating unit is configured to collimate a fast-axis divergence angle of the laser beam;
the second collimation unit is used for performing second collimation on the laser beam after the first collimation, and is particularly used for collimating the slow axis divergence angle of the laser beam after the first collimation.
4. The lidar transceiver according to claim 1, wherein the receiving unit includes a first lens group and a second lens group;
the optical axes of the first lens group and the second lens group are positioned on the same straight line;
the distance between the first lens group and the second lens group in the optical axis direction is less than 15 mm.
5. The lidar transceiver according to claim 4, wherein the first lens group comprises a first lens and a second lens which are arranged in this order;
the second lens group comprises a third lens and a fourth lens which are arranged in sequence.
6. The lidar transceiver according to claim 5, wherein a distance between the first lens and the second lens in the optical axis direction is less than 3 mm;
and the distance between the third lens and the fourth lens in the optical axis direction is less than 3 mm.
7. The lidar transceiver according to claim 5, wherein the first lens and the fourth lens are both meniscus lenses;
the second lens is a plano-concave lens;
the third lens is a biconvex lens.
8. A lidar, comprising: a receiving and transmitting device and a detector of the laser radar; wherein the content of the first and second substances,
the laser radar transceiver is the laser radar transceiver of any one of claims 1 to 7, and is configured to process the laser beam to obtain detection laser light for outward transmission, and to receive the detection laser light reflected by a target and transmit the detection laser light reflected by the target to a detector of the laser radar;
the detector is used for detecting according to the detection laser reflected by the target.
9. The lidar of claim 8, further comprising: a mirror rotating module;
the rotating mirror module is used for scanning along a first direction so as to convert one-dimensional scanning of the MEMS galvanometer into two-dimensional scanning;
the first direction is perpendicular to the vibration direction of the MEMS galvanometer.
CN202010342177.5A 2020-04-27 2020-04-27 Laser radar and transmitting-receiving device thereof Pending CN111398969A (en)

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Application Number Priority Date Filing Date Title
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113687330A (en) * 2021-09-22 2021-11-23 宁波未感半导体科技有限公司 Laser radar and transmitting device thereof
CN113759350A (en) * 2021-09-29 2021-12-07 宁波未感半导体科技有限公司 Laser radar debugging device and method
CN113759542A (en) * 2021-08-24 2021-12-07 长春理工大学 Tracking and capturing optical system of unmanned aerial vehicle laser communication device
CN117907979A (en) * 2024-03-20 2024-04-19 深圳大舜激光技术有限公司 Remote wind-finding radar receiving and transmitting antenna

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113759542A (en) * 2021-08-24 2021-12-07 长春理工大学 Tracking and capturing optical system of unmanned aerial vehicle laser communication device
CN113759542B (en) * 2021-08-24 2022-08-26 长春理工大学 Tracking and capturing optical system of unmanned aerial vehicle laser communication device
CN113687330A (en) * 2021-09-22 2021-11-23 宁波未感半导体科技有限公司 Laser radar and transmitting device thereof
CN113759350A (en) * 2021-09-29 2021-12-07 宁波未感半导体科技有限公司 Laser radar debugging device and method
CN113759350B (en) * 2021-09-29 2023-10-27 宁波未感半导体科技有限公司 Laser radar debugging device and debugging method
CN117907979A (en) * 2024-03-20 2024-04-19 深圳大舜激光技术有限公司 Remote wind-finding radar receiving and transmitting antenna

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