CN103234953A - Laser scanning thermal wave tomography system and method - Google Patents
Laser scanning thermal wave tomography system and method Download PDFInfo
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- CN103234953A CN103234953A CN2013101306946A CN201310130694A CN103234953A CN 103234953 A CN103234953 A CN 103234953A CN 2013101306946 A CN2013101306946 A CN 2013101306946A CN 201310130694 A CN201310130694 A CN 201310130694A CN 103234953 A CN103234953 A CN 103234953A
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Abstract
The present invention relates to an infrared thermal wave tomography nondestructive detection system, wherein a high power laser beam is adopted, and a laser scanning device is adopted to rapidly scan the surface of a sample so as to achieve pulse thermal excitation. The system comprises a data acquisition unit, a scanning control unit, a high power laser, an infrared thermal imager, a laser scanning device and the like, wherein the laser outputs a laser beam to scan the surface of a sample, an excited thermal wave signal is imaged by the infrared thermal imager, and is transmitted to the data acquisition control unit, and the scanning control unit concurrently controls a galvanometer and the infrared thermal imager, such that line frequency scanned by the laser beam and line frequency readout by the infrared thermal imager are the same, and the one stepping delay increment exists between frame frequencies. In the prior art, a sampling period of the infrared thermal wave tomography is limited by the frame frequency of the infrared thermal imager. With the present invention, the laser phase shift scanning technology is adopted to effectively solve the problem in the prior art, such that time resolution of the detection is substantially increased, and the sampling period is increased to the line frequency from the traditional frame frequency, and achieves a microsecond magnitude so as to easily achieve shallow layer defect detection.
Description
Technical field
The present invention relates to a kind of thermal excitation heat wave chromatographic imaging system and method, adopt the high-power laser beam phase shift to scan the purpose that reaches the high speed thermal wave imaging, belong to the technical field of Infrared Non-destructive Testing.
Background technology
Heat wave tomography Non-Destructive Testing ultimate principle is at first to adopt the thermal excitation source that the testee surface is heated, and make itself and testee temperature inside form thermal potential difference, thereby heat energy flows from the surface to interior of articles.If the thermal characteristic of interior of articles has heterogeneity, such as defectives such as fracture or spaces, the propagation of hot-fluid will be affected, and makes the part hot-fluid be reflected back to object surfaces, so corresponding variation can take place the surface temperature distribution of testee in time.Utilize the infrared video camera continuous acquisition from the heat radiation of testee, can obtain the time and intensity that heat wave is reflected by analyzing these time dependent infrared images, therefore can learn defective and the structure of testee inside.
Along with the fast development of industry such as new material, new forms of energy, high-speed railway, nuclear industry and Aero-Space, the requirement of Dynamic Non-Destruction Measurement is increased day by day.The thermal wave detection technology is widely used, and from little aspect, can comprise the test of encapsulation heat conductivility of packaging and testing, semiconductor light sources of test, the integrated circuit of solar cell and measurement of metal and other non-transparent film etc. to semiconductor material.From big aspect, can be to the bonding situation in inside and the extent of corrosion of the shell of aircraft and spacecraft, the delivery line of the shell of naval vessel, gas and liquid under water, track for a train and wheel disc, boiler pot body, automobile case and enamelled coating quality etc. is assessed, thereby in time scents a hidden danger to avoid accident.
Compare traditional nondestructiving detecting means, such as ultrasound wave, eddy current, technology such as X ray, the infrared thermal wave imaging technique has special advantages.And this technology is especially very effective to the detection of compound substance.The utilization of compound substance has become one of advanced important symbol of modern aerospace field equipment.Along with the application at positions such as fuselage, wing, turbo blade, storepipe, aeromotor jet pipe, turbo blade and airframe structures of various particulate metal materials and compound substance, the requirement of Non-Destructive Testing is progressively increased.Use also in quick growth at the compound substance of new energy field equally, mainly all made by glass fibre potting resin material at present as the blade of aerogenerator.Usually compound substance is mode or the honeycomb sandwich construction that adopts the multi-layer fiber gummed, has high strength and lightweight advantage.Owing in the process of making and using, produce inherent vice through regular meeting, as layering, unsticking, crack etc., influenced intensity and the serviceable life of material greatly.Though can adopt traditional ultrasonic inspection technology to the Non-Destructive Testing of compound substance, this technical requirement probe contact testee, point by point scanning is wasted time and energy.For baroque material, as cellular sheet material, the detection of ultrasonic technology then is very difficult.
When the heat wave tomography, characteristic per sample has two kinds of thermal excitation modes.For the material of thinner sample, particularly high thermal conductivity, for example semiconductor wafer and solar silicon wafers etc., the time of thermal excitation must be very short, otherwise the echo of heat wave when arriving the surface thermal excitation also and do not finish, influence detects.And for sample thicker or the heat conduction rate variance, the variation of heat wave is slow, and to the energy requirement height of thermal excitation, so the time of common thermal excitation is long, sampling rate can be very slow.
Detection to quick variation heat wave signal need solve two problems, the thermal excitation of high-energy short pulse and high-speed image sampling.At the problem of high-energy short pulse thermal excitation, the product on the foreign market all adopts the high-energy flashlamp as pulse thermal excitation source at present.But this high-energy flashlamp has a lot of limitations, and for example its gross energy is limited, and the area of each test can not be too big; Beam divergence can not telekinesy; The flash pulse cycle is extremely short, and non-adjustable, and too high peak power can cause the damage of sample; The serviceable life of fluorescent tube is limited, and equipment volume is huge, it is mobile etc. to be difficult for.At the problem of high-speed image sampling, have only at present and adopt the thermal imaging system with high frame frequency function, this thermal imaging system is very expensive, and the image resolution ratio of output descends significantly along with the raising of frame frequency.
High power semiconductor lasers obtained rapid development in recent years, make the power of this type of laser instrument increase substantially, and price descended fast.Laser instrument is compared with traditional thermal excitation light source has that wavelength can be selected, intensity can be modulated, and light beam such as can focus on and can scan at advantage.The novel high-power laser instrument also can make detection signal-to-noise ratio improve simultaneously, and sensing range gets a promotion, and the single area of detection increases, and detection speed is accelerated.Be example with the wavelength, for metallic aluminium, it be absorbed in 800nm near double than visible light, if select the laser instrument of respective wavelength for use, the heat wave signal is effectively improved.By the power of modulated laser, can carry out the thermal wave imagine technique based on phase-locked principle in addition, make that detection sensitivity and spatial resolution are all further promoted.
Existing a small amount of thermal wave imagine technique adopts the LASER HEAT excitation at present, for example United States Patent (USP) 3,808, and 439,6,343,874,6,419,387 etc., all introduced and adopted the method for laser scanning thermal excitation to carry out thermal wave imaging, but the problem of the heat wave tomography of all failing effectively to solve in these methods particularly for the detection of shallow cosmetic bug, must adopt the problem of high speed thermal imaging system.
Summary of the invention
Purpose of the present invention is exactly the deficiency at above-mentioned heat wave Dynamic Non-Destruction Measurement, and a kind of thermal wave imaging nondestructive detection system that can realize PULSE HEATING is provided.When the superpower laser of continuous output when sample surfaces scans fast, for any one point of fixity of sample surfaces, its time of being shone by laser can be regarded a short pulse as.The present invention adopts the high power CW laser instrument as the thermal excitation source, by galvanometer control the surface of sample is scanned fast, realizes the pulse thermal excitation.
Further aim of the present invention provides a kind of thermal wave imaging nondestructive detection system that can realize the high speed infrared image acquisition.The sampling time resolution of present infrared thermal wave tomography is subject to the frame frequency of thermal infrared imager, the frame frequency of the thermal imaging system that conventional infrared imaging is used is at 30-60Hz, the frame frequency cycle, this was unaccommodated to detecting sample thinner or that thermal conductivity is bigger at the 17-33 millisecond.This is because in this case, and the heat wave pace of change is very fast, and the sampling number in a thermal excitation cycle is insufficient, can't obtain accurately heat wave change curve in time.The laser phase shift scanning technique that the present invention adopts has effectively solved this problem, makes the temporal resolution that detects significantly improve, and sample frequency is brought up to line frequency from traditional frame frequency, brings up to the microsecond magnitude from tens of milliseconds.
The system that described laser scanning thermal wave imaging method adopts mainly comprises data processing unit 20, scan control unit 24, superpower laser 21, thermal infrared imager 22, laser scanning device 25 etc. as shown in Figure 5.Laser Output Beam 27 forms fan-shaped linear laser bundle 30 and carries out one-dimensional scanning on testee 28 surfaces by optical module 26, and data processing unit 20 is gathered and delivered to the heat wave signal that excites by thermal infrared imager 22.Scan control unit 24 is controlled galvanometer 25 and thermal infrared imager 22 simultaneously, make that the line frequency of the line-scanning frequency of laser beam 30 and thermal infrared imager 22 is synchronous, but a relative retardation is arranged between the frame frequency, and this relative retardation is increasing progressively progressively along with the scanning of every two field picture.Keep same retardation on any like this two field picture between the heat wave signal of all pixels and the corresponding thermal excitation, but the retardation between every two field picture increasing progressively progressively, until finishing a frame frequency cycle.This serial heat wave image is lined up, the heat wave signal of same position pixel in all images is carried out match, just can obtain every bit heat wave signal over time.Sampling period in such cases is the delay incremental change of every two field picture, and this increment is more little, and the sample frequency of equivalence is more high.
Utilize the continuous sweep of laser rays shaped light beam, make energy after the testee surface is absorbed, be diffused into again in the body, produce the process of thermal excitation-cooling fast, be equivalent to pulse excitation.Adopt above-mentioned phase shift thermal wave imaging method simultaneously, can detect the defective on the nearly surface of testee.
Description of drawings
Fig. 1 heat wave signal varies with temperature synoptic diagram.
Fig. 2 difference heat wave signal schematic representation.
Fig. 3 is traditional heat wave chromatography imaging technique schematic diagram.
Fig. 4 is the schematic diagram of thermal wave imagine technique of the present invention.
Fig. 5 is one embodiment of the present invention synoptic diagram.
Fig. 6 is the detailed annotation figure of thermal wave imagine technique of the present invention.
Fig. 7 is the detailed annotation figure of thermal wave imagine technique of the present invention.
Fig. 8 is one embodiment of the present invention synoptic diagram.
Fig. 9 is the scanning pattern synoptic diagram of one embodiment of the present invention.
Figure 10 is one embodiment of the present invention synoptic diagram.
Embodiment
The invention will be further described below in conjunction with concrete drawings and Examples.
Shown in Figure 1 is the time dependent relation of heat wave signal, if sample interior does not have defective, the heat wave signal changes shown in curve 31, if but the thermal resistance defective is arranged, as the space, the then variation of signal such as curve 32.The difference of described two signals is shown in Fig. 2 curve 33.Can obtain the proterties of defective according to the peak value So of curve 33 size and the time to that occurs, as the degree of depth and size etc.
The process of traditional heat wave tomography as shown in Figure 3.After the high-energy flashlamp heated sample, sample surfaces absorption band energy began to propagate to sample interior, and surface temperature descends shown in curve 36.Thermal infrared imager is continuous acquisition image 34 in the process that temperature descends, and signal 35 matches of the same pixel point in all images 34 are got up, and can obtain the variation of this heat wave signal.What traditional heat wave chromatography imaging technique adopted is once to excite, Cai Yang method repeatedly, and the minimum interval of image acquisition is the frame frequency cycle.
The advantage of LASER HEAT of the present invention excitation is that laser power is continuous, can multiple scanning, and intensification and the temperature-fall period of each scanning repeat substantially.As shown in Figure 4, to some points on the sample, laser scanning causes that temperature rises as curve 37, gathers image 38 in temperature decline process.Every like this two field picture run-down, each laser scanning zero-time difference, i.e. so-called phase shift.Through several all after dates, obtain a series of images 38.Heat wave signal fitting with these images 38 just can obtain temperature decline curve 39.The single thermal excitation of adopting with traditional heat wave tomography, repeatedly Sampling techniques are compared, and the feature of the technology of the present invention is the method that adopts repeatedly scanning, repeatedly adopts, and keeps certain synchronized relation between scanning and the sampling.
Shown in Figure 5 is a kind of embodiment synoptic diagram of system of the present invention, comprises data processing and control module 20, superpower laser 21, infrared video camera 22, galvanometer 25 and control module 24, infrared fileter 23, lens 26 etc.Lens 26 are made into fan-shaped in-line laser wire harness 30 with laser beam, line by line scan in the laser scanning district 29 on testee 28.The heat wave signal that excites is received by infrared video camera 22, delivers to data and handles and control module 20, and infrared fileter 23 is used for the wavelength, the particularly wavelength of thermal excitation light beam beyond the elimination heat wave signal.Acquisition control system 20 control galvanometer controller 24 and infrared video cameras 22 make both frame scan speed unanimity.
Figure 6 shows that the light path synoptic diagram of apparatus of the present invention imaging moiety.The lens 43 of infrared video camera 22 project to laser scanning district 29 on the infrared focal plane detector 40 of infrared video camera 22, laser wire harness 30 current positions are projected on the pixel column 42 on the infrared focal plane detector 40, and infrared focal plane detector 40 current read row 41 then corresponding to the position 46 in laser scanning district 29.Pixel column 42 and the current line-spacing of reading between the row 41 are exactly that the current heat wave signal of row 41 of reading is with respect to the delay of thermal excitation divided by line frequency.If for example the frame frequency of infrared video camera is 30Hz, the frame frequency cycle is 33ms, if current gap of reading row 41 and location of pixels 42 is 1/3 frame, then the current heat wave signal of reading has postponed 11ms than excitation instant.
In order to realize high speed heat wave tomography, when each frame began to scan, the scanning zero-time of laser beam 27 increased a retardation dt with respect to reading of focus planardetector 40.Like this, when the n frame, the heat wave signal of all pixels is n*dt with respect to the delay of thermal excitation on the focus planardetector 40.When described retardation n*dt reaches a frame frequency cycle, just can obtain the time dependent curve 39 of complete heat wave.On this heat wave curve 39, the sampling period is and postpones increment dt, if the frame frequency cycle is T, then sample frequency can be brought up to T/dt.
In order further to understand principle of the present invention, Figure 7 shows that the example of a simplification.Suppose that infrared focal plane detector 40 has 16 row, the frame frequency cycle is 32ms, and namely the line frequency cycle is 2ms.When the 1st frame, the image position 42 of laser wire harness 30 is at the 6th row, and the current row 41 of reading is at the 4th row, and both namely have 4ms to postpone at a distance of 2 row; During the 2nd frame, the image position 42 of laser wire harness 30 is at the 10th row, and the current row 41 of reading is still at the 4th row, and both namely have 12ms to postpone at a distance of 6 row; During the 3rd frame, the image position 42 of laser wire harness 30 is at the 14th row, and the current row 41 of reading is still at the 4th row, and both are at a distance of 10 row, and namely 20ms postpones; During the 4th frame, the image position 42 of laser wire harness 30 is at the 2nd row, and the current row 41 of reading is still at the 4th row, because the current row 41 of reading need be finished the heat wave signal that this frame starts anew just to detect excitation this moment again, therefore both are at a distance of 14 row, and namely 28ms postpones; Get back to the state of the 1st frame during to the 5th frame again.Find out that thus adopt laser scanning method of the present invention, the sample frequency of heat wave tomography is largely increased.Sampling period is the delay increment between every frame, and postponing increment in the above-mentioned example is 8ms, and namely sample frequency reaches 120Hz, but also can significantly improve.Be example with a kind of thermal imaging system on the market, its pixel resolution is 640x480, frame frequency 30Hz.When adopting flashlamp to carry out thermal excitation, the fastest sample frequency is 30Hz.If employing the technology of the present invention makes that the laser scanning zero-time shifts to an earlier date 1 line period between every frame, namely about 50 microseconds, then the equivalent sampling frequency of heat wave tomography can be up to arriving 20kHz.
Adopting the advantage of described laser wire harness 30 scannings is that scanning mechanism is simple, only needs one dimension, can obtain very high frame frequency.But described laser wire harness 30 uniformity coefficient require than higher.Therefore also can adopt single spot or many luminous points two-dimensional scan method, as shown in Figure 8.Laser beam is focused to luminous point 31, carries out two-dimensional scan by laser scanner 25, and the direction of scanning of luminous point 31 is consistent with the direction of line scan of infrared video camera 22 focus planardetectors 40.Luminous point 31 can unidirectional pectination scan, and namely all is from left to right, shown in Fig. 9 (a) at every turn.Laser when shortcoming is flyback is not utilized, and has therefore reduced sweep velocity, and laser power is also wasted; Can take the method for shuttle-scanning in addition, shown in Fig. 9 (b).Because per horizontal-scanning interval is very short, thus concerning most of sample, during shuttle-scanning about the difference of two ends thermal excitation time can ignore.
Described heat wave chromatographic imaging system can also increase a visible light camera, as shown in figure 10.Video camera 32 record absorbs and reflection condition the surface of testee 28, in order to revise the infrared thermal wave image because of thermal excitation cause inhomogeneous.The wavelength of a lot of high power semiconductor lasers just in time is near the 800-900nm scope of visible light camera sensitivity.Can certainly adopt other to the video camera of thermal excitation wavelength sensitive, as the near infrared video camera of indium gallium arsenic (InGaAs) material.
Claims (8)
1. infrared thermal wave tomography nondestructive detection system, described system comprises:
Thermal infrared imager (22), described thermal infrared imager (22) is used for gathering the heat wave image on testee (28) surface;
Superpower laser (21), described superpower laser (21) are used for testee (28) surface excitation heat wave;
Light-beam forming unit (26), described light-beam forming unit (26) make laser beam (27) form required light spot shape on testee (28) surface;
Beam deflection device (25), described beam deflection device (25) are used for deflection laser bundle (27) and are lined by line scan in testee (28) surface;
Data processing unit (20), described data processing unit (20) are used for the heat wave image that described thermal infrared imager (22) is gathered is carried out Treatment Analysis;
Scan control unit (24), described scan control unit (24) the described beam deflection device of control (25) keeps identical line frequency with thermal infrared imager (22), but keeps a retardation between the frame frequency.
2. infrared thermal wave tomography nondestructive detection system according to claim 1, described retardation be between at least one frame, delay increment less than the frame frequency cycle of increasing or decreasing.
3. infrared thermal wave tomography nondestructive detection system according to claim 1, described light-beam forming unit (26) makes laser beam (27) form at least one focal spot on testee (28) surface, and described beam deflection device (25) carries out two-dimensional scan.
4. infrared thermal wave tomography nondestructive detection system according to claim 1, described light-beam forming unit (26) makes laser beam (27) form at least one line spot on testee (28) surface, and described beam deflection device (25) carries out one-dimensional scanning.
5. infrared thermal wave tomography nondestructive detection system according to claim 1 further comprises optically filtering sheet (23), is used for removing scattered light and other stray light of the laser beam (27) that arrives thermal infrared imager (22).
6. infrared thermal wave tomography nondestructive detection system according to claim 1, further comprise the video camera (32) to laser beam (27) wavelength sensitive, be used for the surface optics feature of record testee (28) and the optical signature of thermal excitation light beam (27).
7. infrared thermal wave tomography lossless detection method may further comprise the steps:
Testee is placed in the laser scanning zone (29);
Adopt laser beam (27) that testee (28) is carried out thermal excitation scanning, described thermal excitation scanning line frequency is synchronized with the line frequency of reading of described thermal infrared imager (22), and reading of described thermal excitation scanning frame frequency and described thermal infrared imager (22) keeps a retardation between the frame frequency;
Every at least one frame, one of described frame frequency retardation increasing or decreasing is postponed increment;
Continuous acquisition heat wave image records the corresponding frame frequency retardation of described every two field picture;
According to the heat wave image of gathering and corresponding frame frequency retardation thereof, carry out the heat wave chromatographic analysis.
8. infrared thermal wave tomography lossless detection method may further comprise the steps:
Testee is placed in the laser scanning zone (29);
Adopt laser beam (27) that testee (28) is carried out thermal excitation scanning, described thermal excitation scanning line frequency is synchronized with the line frequency of reading of described thermal infrared imager (22), and reading of described thermal excitation scanning frame frequency and described thermal infrared imager (22) keeps a frame frequency retardation between the frame frequency;
Every at least one frame, one of described frame frequency retardation increasing or decreasing is postponed increment;
Continuous acquisition heat wave image records the corresponding frame frequency retardation of described every frame heat wave image;
Gather the optical imagery of laser scanning, utilize described optical imagery that the heat wave image of gathering is carried out the intensity correction, reduce surface optics feature and laser beam heterogeneity to the influence of heat wave signal;
According to the heat wave image of gathering and corresponding frame frequency retardation thereof, carry out the heat wave chromatographic analysis.
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