CN107356189B - Grating straight-line displacement sensor when a kind of - Google Patents
Grating straight-line displacement sensor when a kind of Download PDFInfo
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- CN107356189B CN107356189B CN201710543488.6A CN201710543488A CN107356189B CN 107356189 B CN107356189 B CN 107356189B CN 201710543488 A CN201710543488 A CN 201710543488A CN 107356189 B CN107356189 B CN 107356189B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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Abstract
The invention discloses it is a kind of when grating straight-line displacement sensor, including scale and dynamic ruler, scale is made of the scale matrix of magnetic conduction with the Energizing unit being arranged on scale matrix, Energizing unit includes insulating layer and excitation wire ring layer, excitation wire ring layer is made of two magnet exciting coil linear arrays, magnet exciting coil linear array is sequentially connected in series along measurement direction by m identical conducting wire groups and is arranged to make up, and positive, the reversed lead unit in conducting wire group is all made of n root rectilinear wire section according to certain regular parallel connection；Dynamic ruler is made of the dynamic ruler matrix of magnetic conduction with the sensing unit being arranged on dynamic ruler matrix, and sensing unit includes insulating layer and line of induction ring layer, and line of induction ring layer is made of the square coil for meeting certain wiring rule.The sensor can simplify sensor structure, sensor is made to be easy to commercialization in the case where guaranteeing high resolution.
Description
Technical field
The invention belongs to accurate displacement fields of measurement, and in particular to grating straight-line displacement sensor when a kind of.
Background technique
Straight-line displacement measurement is most basic geometric measurement, and precision linear displacement measurement is mainly sensed using straight-line displacement
Device, such as grating, magnetic grid, capacitive grating, they are common special by carrying out counting to get displacement to the grid line spatially divided equally
Point is to meet the resolving power requirement of micro-displacement using the space ultraprecise groove of grid line, and in order to further improve resolution
Power, can only be by the electronic fine-grained of complexity, to keep system structure complicated, cost is high, and poor anti jamming capability, easily
It is contaminated.
When grating straight-line displacement sensor be a kind of sensor based on electromagnetic induction principle, using clock pulses as measure
On the one hand benchmark, resolving power depend on the space pole span of sensor, on the other hand work as depending on the space of interpolation clock pulse
Amount；Due to the space equivalent of interpolation clock pulse can take it is minimum, therefore when grating straight-line displacement sensor in biggish space pole span
Under be also able to achieve high resolution displacement measurement.But when existing a few classes grating straight-line displacement sensor magnet exciting coil and the line of induction
Winding mode used by enclosing is complicated, so that structure is complicated for sensor, is not easy to realize；Also, the excitation of sensor
The consistency of performance of the precision of coil and induction coil arranged relative, the number of turns and magnetizer also will have a direct impact on the survey of sensor
Accuracy of measurement.
Summary of the invention
The object of the present invention is to provide it is a kind of when grating straight-line displacement sensor, in the case where guaranteeing high resolution, simplify
Sensor structure.
Grating straight-line displacement sensor when of the present invention a kind of, including scale and dynamic ruler, dynamic ruler is parallel with scale face,
And there are gaps；The scale is made of the scale matrix of magnetic conduction with the Energizing unit being arranged on scale matrix, the excitation
Unit includes insulating layer and excitation wire ring layer；Dynamic ruler matrix and the induction list that is arranged in dynamic ruler matrix on of the dynamic ruler by magnetic conduction
Member composition, the sensing unit includes insulating layer and line of induction ring layer.
The excitation wire ring layer is by two be arranged side by side on same layer magnet exciting coil linear arrays that are identical and being parallel to each other
It constitutes, is not interfere with each other between two magnet exciting coil linear arrays, and initial position is staggered along measurement direction (direction of motion of i.e. dynamic ruler)
W/4 (W indicates period of sensor, pole span), perpendicular to differing L+b in measurement direction (b indicates small spacing)；The excitation
Coil linear array is sequentially connected in series along measurement direction by m identical conducting wire groups and is arranged to make up, the center of two neighboring conducting wire group away from for
W, a conducting wire group is in series by a positive lead unit and a reversed lead unit, positive, the reversed conducting wire list
Member is all made of the conductor in parallel that n root long degree is L, meets following relationship between each conducting wire in a conducting wire group:
Using the starting point of positive lead unit as coordinate origin, measurement direction is the direction x, and conductor length direction is (i.e. vertical
In the direction of measurement direction) it is the direction y；
The x-axis coordinate of each conducting wire indicates in the forward direction lead unit are as follows:
The x-axis coordinate of each conducting wire indicates in the reversed lead unit are as follows:
In formula, i successively all positive integers of the value 1 to n, liIndicate that the x-axis of i-th conducting wire in positive lead unit is sat
Mark, diIndicate the x-axis coordinate of i-th conducting wire in reversed lead unit, in positive, reversed lead unit, adjacent two conducting wires it
Between spacing be much smaller than conductor length L；The terminating point of positive lead unit is overlapped with the starting point of reversed lead unit, coordinate
For (W/2, L)；The coordinate of the terminating point of reversed lead unit is (W, 0).It is positive in synchronization when being passed through exciting current
The current direction of each conducting wire is opposite with the current direction of each conducting wire in reversed lead unit in lead unit.
The line of induction ring layer is made of first square coil or is made of a first induction coil linear array, institute
It states the first square coil along the width of measurement direction to be W/2, be 2L+b perpendicular to the length of measurement direction, first line of induction
Astragal battle array is followed in series to form by P identical second square coils along measurement direction, and each second square coil is along measurement side
To width be W/2-c, be 2L+b perpendicular to the length of measurement direction, the direction of winding phase of two neighboring second square coil
Instead, center is away from for W/2, wherein c indicates the small spacing between two neighboring second square coil, and P is integer, and 1 < P <
2m。
Two-phase symmetrical drive electric current is each led into magnet exciting coil linear array described in two, and (i.e. amplitude is equal in magnitude, phase
The alternating excitation signal of 90 ° of difference), the magnetic changed by sinusoidal rule is generated along measurement direction under the effect of respective exciting current
?.When along measurement direction relative motion occurs for dynamic ruler and scale, in the first square coil or the first induction coil linear array
Magnetic flux will generating period variation, the first square coil or the first induction coil linear array output amplitude is constant, phase becomes
The inductive signal and pumping signal are carried out phase demodulation processing by the inductive signal of change, and phase difference is a by the high-frequency clock pulse of interpolation
Number indicates, straight-line displacement of the dynamic ruler with respect to scale is obtained after converting.
Grating straight-line displacement sensor when of the present invention another, including scale and dynamic ruler, move ruler and scale face is flat
Row, and there are gaps；The scale is made of the scale matrix of magnetic conduction with the Energizing unit being arranged on scale matrix, described to encourage
Magnetic cell includes insulating layer and excitation wire ring layer；Dynamic ruler matrix and the induction that is arranged in dynamic ruler matrix on of the dynamic ruler by magnetic conduction
Unit composition, the sensing unit includes insulating layer and line of induction ring layer.
The excitation wire ring layer is by two be arranged side by side on same layer magnet exciting coil linear arrays that are identical and being parallel to each other
It constitutes, is not interfere with each other between two magnet exciting coil linear arrays, and initial position is aligned, on perpendicular to measurement direction along measurement direction
Differ L+b；The magnet exciting coil linear array is sequentially connected in series along measurement direction by m identical conducting wire groups and is arranged to make up, two neighboring
Away from for W, a conducting wire group is in series by a positive lead unit and a reversed lead unit, described at the center of conducting wire group
Positive, reversed lead unit is all made of the conductor in parallel that n root long degree is L, is met between each conducting wire in a conducting wire group
Following relationship:
Using the starting point of positive lead unit as coordinate origin, measurement direction is the direction x, and conductor length direction is the direction y；
The x-axis coordinate of each conducting wire indicates in the forward direction lead unit are as follows:
The x-axis coordinate of each conducting wire indicates in the reversed lead unit are as follows:
In formula, i successively all positive integers of the value 1 to n, liIndicate that the x-axis of i-th conducting wire in positive lead unit is sat
Mark, diIndicate the x-axis coordinate of i-th conducting wire in reversed lead unit, in positive, reversed lead unit, adjacent two conducting wires it
Between spacing be much smaller than conductor length L；The terminating point of positive lead unit is overlapped with the starting point of reversed lead unit, coordinate
For (W/2, L)；The coordinate of the terminating point of reversed lead unit is (W, 0).It is positive in synchronization when being passed through exciting current
The current direction of each conducting wire is opposite with the current direction of each conducting wire in reversed lead unit in lead unit.
The line of induction ring layer be made of two be arranged side by side third square coils that are identical and being parallel to each other or by
Two to be arranged side by side are identical and the second induction coil linear array for being parallel to each other is constituted；Third square coil described in two rises
Beginning position differs L+b along be staggered W/4, central point of measurement direction on perpendicular to measurement direction, and each third square coil is along surveying
The width in amount direction is W/2, is L perpendicular to the length of measurement direction；The start bit of second induction coil linear array described in two
It sets and differs L+b on perpendicular to measurement direction along be staggered W/4, central point of measurement direction, each second induction coil linear array is by P
A identical 4th square coil is followed in series to form along measurement direction, and each 4th square coil is along the width of measurement direction
It W/2-c, perpendicular to the length of measurement direction is L, the direction of winding of two neighboring 4th square coil is opposite, center is away from for W/2,
Wherein, c indicates the small spacing between two neighboring 4th square coil, and P is integer, and 1 < P < 2m.
Two-phase symmetrical drive electric current is each led into magnet exciting coil linear array described in two, and (i.e. amplitude is equal in magnitude, phase
The alternating excitation signal of 90 ° of difference), the magnetic changed by sinusoidal rule is generated along measurement direction under the effect of respective exciting current
?.When along measurement direction relative motion occurs for dynamic ruler and scale, two third square coils or two the second induction coils
Magnetic flux in linear array will generating period variation, two third square coils difference output amplitudes are constant, phase change
Inductive signal, after superimposed and pumping signal carries out phase demodulation processing or two the second induction coil linear arrays distinguish output amplitude
Constant, phase change inductive signal, it is superimposed after with pumping signal progress phase demodulation processing, phase difference by interpolation high frequency clock
Pulse number indicates, straight-line displacement of the dynamic ruler with respect to scale is obtained after converting.
In order to improve the magnetic field strength of scale, the Energizing unit can be by multiple insulating layers and multiple magnet exciting coils
Perpendicular to scale matrix surface direction, successively arranged for interval is constituted on layer edge, parallel with one another between each excitation wire ring layer.
To improve inductive signal intensity, the sensing unit can be by multiple insulating layers and multiple line of induction ring layer edges
Perpendicular to dynamic ruler matrix surface direction, successively arranged for interval is constituted, and is serially connected between each line of induction ring layer.
The present invention has the effect that
(1) due to the scale and dynamic ruler using above structure form, the opposite fortune in measurement direction when dynamic ruler and scale
When moving a pole span W, the initial phase angle of inductive signal changes a cycle, and by high frequency clock interpolation, conversion obtains relative displacement,
High-resolution survey can be achieved.
(2) two magnet exciting coil linear arrays in excitation wire ring layer are all successively gone here and there by m identical conducting wire groups along measurement direction
Connection is arranged to make up, positive, the reversed lead unit in conducting wire group all by n root rectilinear wire section (i.e. length be L conducting wire) according to
Certain rule is in parallel to be constituted, and wiring is convenient, and wiring (i.e. excitation wire ring layer is single layer structure) is completed in single plane,
Therefore sensor structure is simple, at low cost, is easy to commercialization.
(3) two magnet exciting coil linear arrays of excitation wire ring layer are arranged on same wiring layer by the way of being arranged side by side,
Rather than be arranged on upper layer and lower layer wiring layer, the amplitude of two-phase inductive signal can be made almost the same, it is suppressed that secondary survey in pole span
Measure error.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of embodiment 1.
Fig. 2 is the schematic wiring diagram of the excitation wire ring layer in embodiment 1.
Fig. 3 is the schematic wiring diagram of the line of induction ring layer in embodiment 1.
Fig. 4 is the schematic wiring diagram of the line of induction ring layer in embodiment 3.
Fig. 5 is the schematic wiring diagram of the excitation wire ring layer in embodiment 4.
Fig. 6 is the schematic wiring diagram of the line of induction ring layer in embodiment 4.
Fig. 7 is the schematic wiring diagram of the line of induction ring layer in embodiment 5.
Specific embodiment
It elaborates with reference to the accompanying drawing to the present invention.
Embodiment 1: when grating straight-line displacement sensor as shown in Figure 1, Figure 2, Figure 3 shows, including scale 1 and dynamic ruler 2 move ruler 2
It is parallel with 1 face of scale, and there are the gaps 0.1mm.
Scale 1 is made of scale matrix 11 and the Energizing unit being fixed on 11 surface of scale matrix, and scale matrix 11 is
The permeability magnetic material matrix of rectangular-shape is encouraged using the longitudinal direction of scale matrix 11 as measurement direction (direction of motion of i.e. dynamic ruler)
Magnetic cell is tool there are two the printed circuit board of insulating layer and an excitation wire ring layer, and the surface area of scale matrix 11 is greater than excitation
The area coverage of coil layer, and had a margin on four direction.
As shown in Fig. 2, excitation wire ring layer by two be arranged side by side on the same wiring layer of printed circuit board it is identical and
The magnet exciting coil linear array 12 being parallel to each other is constituted, and is not interfere with each other between two magnet exciting coil linear arrays 12, and initial position is along measurement
Direction be staggered W/4 (W indicates period of sensor, pole span), perpendicular to differing L+b in measurement direction (b indicates small spacing).
Magnet exciting coil linear array 12 is sequentially connected in series along measurement direction by 5 identical conducting wire groups and is arranged to make up, in two neighboring conducting wire group
The heart is away from for W, and a conducting wire group is in series by a positive lead unit 121 and a reversed lead unit 122, positive guiding line
Unit 121, reversed lead unit 122 are all arranged side by side by the conducting wire that 5 root long degree are L along measurement direction and parallel connection is constituted, and one
Meet following relationship between each conducting wire in conducting wire group:
Using the starting point O of positive lead unit 121 as coordinate origin, measurement direction is the direction x, and conductor length direction is y
Direction；The x-axis coordinate of the 1st conducting wire in positive lead unit 121 are as follows:The x-axis coordinate of 2nd conducting wire
Are as follows:The x-axis coordinate of 3rd conducting wire are as follows:The x-axis coordinate of 4th conducting wire are as follows:The x-axis coordinate of 5th conducting wire are as follows:In reversed lead unit 122
The x-axis coordinate of 1st conducting wire are as follows:The x-axis coordinate of 2nd conducting wire are as follows:The x-axis coordinate of 3rd conducting wire are as follows:The x-axis coordinate of 4th conducting wire are as follows:The x-axis coordinate of 5th conducting wire are as follows:Forward direction is reversely led
In line unit, the spacing between adjacent two conducting wires is much smaller than conductor length L；The terminating point of positive lead unit 121 and reversed
The starting point of lead unit 122 is overlapped, and coordinate is (W/2, L)；The coordinate of the terminating point of reversed lead unit 122 is (W, 0).
When being passed through exciting current, the current direction of 5 conducting wires in synchronization, positive lead unit 121 and reversed conducting wire list
The current direction of 5 conducting wires in member 122 is opposite.
Dynamic ruler 2 is made of the sensing unit for moving ruler matrix 21 and being fixed in dynamic ruler matrix 21 one side opposite with scale 1,
Dynamic ruler matrix 21 is the permeability magnetic material matrix of rectangular-shape, and sensing unit is that there are two insulating layer and a line of induction ring layers for tool
Printed circuit board, the surface area for moving ruler matrix 21 is greater than the area coverage of line of induction ring layer, and has a margin on four direction,
Dynamic ruler matrix 21 is consistent with scale matrix 11 in the length perpendicular to measurement direction in the length perpendicular to measurement direction.
As shown in figure 3, line of induction ring layer is by first rectangular lines being arranged on a wiring layer of printed circuit board
Circle 22 is constituted, which along the width of measurement direction is W/2, is 2L+b perpendicular to the length of measurement direction.
Two magnet exciting coil linear arrays 12 are separately connected that two-phase amplitude is equal, 90 ° of phase phase difference of sinusoidal excitation current, and two
Magnet exciting coil linear array 12 generates along measurement direction under the effect of respective exciting current and presses sinusoidal rule changing magnetic field.When dynamic ruler 2
When relative motion occurs along measurement direction with scale 1, magnetic flux in the first square coil 22 will generating period variation, the
The electrical signal of reaction of one square coil, 22 output type (1):
In formula, k1For induced voltage amplitude, T is exciting current period of change, and x is the straight line position of the opposite scale 1 of dynamic ruler 2
It moves.
Along measurement direction relative motion occurs for dynamic ruler 2 with scale 1, and the initial phase angle of inductive signal changes generating period,
Dynamic ruler 2 moves a pole span W relative to scale 1, and the initial phase angle of inductive signal is (i.e. in formula (1)) variation a cycle,
Inductive signal in formula (1) is carried out with above-mentioned sinusoidal excitation signal (the exciting current signal being passed through in magnet exciting coil linear array)
Phase demodulation processing, phase difference are indicated by the high-frequency clock pulse number of interpolation, and the straight line of the opposite scale 1 of dynamic ruler 2 is obtained after converting
Displacement.
In the present embodiment, two magnet exciting coil linear arrays 12 in excitation wire ring layer are all by 5 identical conducting wire groups along measurement
Direction, which is sequentially connected in series, to be arranged to make up, and all by 5 rectilinear wire sections, (i.e. length is L's to positive, the reversed lead unit in conducting wire group
Conducting wire) it is constituted according to aforementioned rule parallel connection, wiring is convenient, and completes in single plane wiring (i.e. excitation wire ring layer is
Single layer structure), sensor structure is simple, it is at low cost, be easy to commercialization；In addition, line of induction ring layer uses first rectangular lines
Circle, wiring is convenient, can be realized the high-precision arranged relative of excitation wire ring layer Yu line of induction ring layer, the measurement accuracy of sensor
It is high.
Embodiment 2: in the present embodiment when grating straight-line displacement sensor most of structure it is same as Example 1, it is different
Place is: Energizing unit is the printed circuit board with 4 insulating layers and 3 above-mentioned excitation wire ring layers, 4 insulating layers and 3
A excitation wire ring layer passes through via hole between 3 excitation wire ring layers along perpendicular to 11 surface direction of scale matrix successively arranged for interval
The mode of wiring is parallel with one another, improves the magnetic field strength of scale；Sensing unit is with 4 insulating layers and 3 above-mentioned inductions
The printed circuit board of coil layer, 4 insulating layers and 3 line of induction ring layers edges are successively spaced cloth perpendicular to dynamic 21 surface direction of ruler matrix
Composition is set, is serially connected by way of via hole wiring between 3 line of induction ring layers, improves inductive signal intensity.
Embodiment 3: as shown in figure 4, in the present embodiment when grating straight-line displacement sensor most of structure and embodiment 1
It is identical, the difference is that: line of induction ring layer is made of a first induction coil linear array being arranged on printed circuit board, should
First induction coil linear array is followed in series to form by two identical second square coils 23 along measurement direction, each second rectangle
Coil 23 along the width of measurement direction is W/2-c, is 2L+b, two the second square coils 23 perpendicular to the length of measurement direction
In a wiring layer, center away from for W/2 and direction of winding on the contrary, the lead-out wire of two the second square coils 23 is located at another cloth
Line layer, wherein c indicates the small spacing between two neighboring second square coil 23.
Two magnet exciting coil linear arrays 12 are separately connected that two-phase amplitude is equal, 90 ° of phase phase difference of sinusoidal excitation current, and two
Magnet exciting coil linear array 12 generates along measurement direction under the effect of respective exciting current and presses sinusoidal rule changing magnetic field.When dynamic ruler 2
When relative motion occurs along measurement direction with scale 1, magnetic flux in the first induction coil linear array will generating period variation,
And the electrical signal of reaction of output type (2):
In formula, k2For induced voltage amplitude, T is exciting current period of change, and x is the straight line position of the opposite scale 1 of dynamic ruler 2
It moves.
By the electrical signal of reaction and above-mentioned sinusoidal excitation signal (the excitation electricity being passed through in magnet exciting coil linear array in formula (2)
Flow signal) phase demodulation processing is carried out, phase difference is indicated by the high-frequency clock pulse number of interpolation, and it is opposite that dynamic ruler 2 is obtained after converting
The straight-line displacement x of scale 1.
Embodiment 4: as shown in Figure 5, Figure 6, in the present embodiment when grating straight-line displacement sensor most of structure and reality
Apply that example 1 is identical, the difference is that: the initial position of two magnet exciting coil linear arrays 12 in excitation wire ring layer is along measurement direction pair
Together.Line of induction ring layer is by two be arranged side by side on a wiring layer of printed circuit board third squares that are identical and being parallel to each other
Shape coil 24 is constituted, and the initial position of two third square coils 24 is staggered W/4, central point perpendicular to measurement along measurement direction
Differ L+b on direction, each third square coil 24 along the width of measurement direction is W/2, is perpendicular to the length of measurement direction
L。
Two magnet exciting coil linear arrays 12 are separately connected that two-phase amplitude is equal, 90 ° of phase phase difference of sinusoidal excitation current, and two
Magnet exciting coil linear array 12 generates along measurement direction under the effect of respective exciting current and presses sinusoidal rule changing magnetic field.When dynamic ruler 2
When relative motion occurs along measurement direction with scale 1, the magnetic flux in two third square coils 24 will generating period change
Change,
Two third square coils 24 distinguish the inductive signal of output type (3), formula (4):
The inductive signal of formula (3), formula (4) is accessed into add circuit, the electrical signal of reaction of superimposed rear output type (5):
In formula, k3For induced voltage amplitude, T is exciting current period of change, and x is the straight line position of the opposite scale 1 of dynamic ruler 2
It moves.
By the electrical signal of reaction and above-mentioned sinusoidal excitation signal (the excitation electricity being passed through in magnet exciting coil linear array in formula (5)
Flow signal) phase demodulation processing is carried out, phase difference is indicated by the high-frequency clock pulse number of interpolation, and it is opposite that dynamic ruler 2 is obtained after converting
The straight-line displacement x of scale 1.
Embodiment 5: as shown in fig. 7, in the present embodiment when grating straight-line displacement sensor most of structure and embodiment 1
It is identical, the difference is that: the initial position of two magnet exciting coil linear arrays 12 in excitation wire ring layer is aligned along measurement direction.Sense
Coil layer is answered to be made of two be arranged side by side on printed circuit board the second induction coil linear arrays that are identical and being parallel to each other, two
The initial position of a second induction coil linear array differs L+ along be staggered W/4, central point of measurement direction on perpendicular to measurement direction
B, each second induction coil linear array are followed in series to form by two identical 4th square coils 25 along measurement direction, each
4th square coil 25 along the width of measurement direction is W/2-c, is L perpendicular to the length of measurement direction, first second induction
Two the 4th square coils 25 in coil linear array are located at a wiring layer, center away from for W/2 and direction of winding on the contrary, first
The lead-out wire of two the 4th square coils 25 in second induction coil linear array is located at another wiring layer, second second induction
Two the 4th square coils 25 in coil linear array and two the 4th square coils 25 in first the second induction coil linear array
The lead-out wire of two the 4th square coils 25 in the same wiring layer, second the second induction coil linear array and first
The lead-out wire of two the 4th square coils 25 in second induction coil linear array is located at the same wiring layer.Wherein, c is indicated adjacent
Small spacing between two the 4th square coils 25.
Two magnet exciting coil linear arrays 12 are separately connected that two-phase amplitude is equal, 90 ° of phase phase difference of sinusoidal excitation current, and two
Magnet exciting coil linear array 12 generates along measurement direction under the effect of respective exciting current and presses sinusoidal rule changing magnetic field.When dynamic ruler 2
When relative motion occurs along measurement direction with scale 1, the magnetic flux in two the second induction coil linear arrays will generating period
Variation, and the inductive signal of difference output type (6), formula (7):
The inductive signal of formula (6), formula (7) is accessed into add circuit, the electrical signal of reaction of superimposed rear output type (8):
In formula, k4For induced voltage amplitude, T is exciting current period of change, and x is the straight line position of the opposite scale 1 of dynamic ruler 2
It moves.
By the electrical signal of reaction and above-mentioned sinusoidal excitation signal (the excitation electricity being passed through in magnet exciting coil linear array in formula (8)
Flow signal) phase demodulation processing is carried out, phase difference is indicated by the high-frequency clock pulse number of interpolation, and it is opposite that dynamic ruler 2 is obtained after converting
The straight-line displacement x of scale 1.
Claims (4)
1. grating straight-line displacement sensor when a kind of, including scale (1) and dynamic ruler (2), dynamic ruler (2) are parallel with scale (1) face, and
There are gaps；The scale (1) is made of the scale matrix (11) and the Energizing unit that is arranged on scale matrix of magnetic conduction, described
Energizing unit includes insulating layer and excitation wire ring layer；The dynamic ruler (2) is by the dynamic ruler matrix (21) and setting of magnetic conduction in dynamic ruler base
Sensing unit composition on body, the sensing unit includes insulating layer and line of induction ring layer；It is characterized by:
The excitation wire ring layer is by two be arranged side by side on same layer magnet exciting coil linear arrays (12) that are identical and being parallel to each other
Constitute, do not interfere with each other between two magnet exciting coil linear arrays, and initial position along measurement direction be staggered W/4, perpendicular to measurement side
Difference L+b upwards；The magnet exciting coil linear array (12) is sequentially connected in series along measurement direction by m identical conducting wire groups and is arranged to make up,
The center of two neighboring conducting wire group is away from for W, and a conducting wire group is by a positive lead unit (121) and a reversed lead unit
(122) in series, positive, the reversed lead unit (121,122) is all made of the conductor in parallel that n root long degree is L, with just
The starting point of guiding line unit is coordinate origin, and measurement direction is the direction x, and conductor length direction isyDirection；
The x-axis coordinate of each conducting wire indicates in the forward direction lead unit (121) are as follows:
The x-axis coordinate of each conducting wire indicates in the reversed lead unit (122) are as follows:
In formula, i successively all positive integers of the value 1 to n, liIndicate the x-axis coordinate of i-th conducting wire in positive lead unit, diTable
Show the x-axis coordinate of i-th conducting wire in reversed lead unit；The starting point of the terminating point of positive lead unit and reversed lead unit
It is overlapped, coordinate is (W/2, L)；The coordinate of the terminating point of reversed lead unit is (W, 0)；
The line of induction ring layer is made of first square coil (22) or is made of a first induction coil linear array, institute
It states the first square coil (22) along the width of measurement direction to be W/2, be 2L+b perpendicular to the length of measurement direction, first sense
Coil linear array is answered to be followed in series to form by P identical second square coils (23) along measurement direction, each second square coil
(23) it is W/2-c, is 2L+b perpendicular to the length of measurement direction along the width of measurement direction, two neighboring second square coil
(23) direction of winding is opposite, center is away from being W/2, wherein b indicates small spacing, two neighboring second square coil of c expression it
Between spacing, P is integer, and 1 < P < 2m；
Two-phase symmetrical drive electric current is each led into magnet exciting coil linear array (12) described in two, when dynamic ruler (2) is with respect to scale (1)
When moving along measurement direction, the first square coil (22) or the first induction coil linear array export inductive signal, which is believed
Number phase demodulation processing is carried out with pumping signal, phase difference is indicated by the high-frequency clock pulse number of interpolation, and dynamic ruler is obtained after converting
The straight-line displacement of opposite scale.
2. grating straight-line displacement sensor when a kind of, including scale (1) and dynamic ruler (2), dynamic ruler (2) are parallel with scale (1) face, and
There are gaps；The scale (1) is made of the scale matrix (11) and the Energizing unit that is arranged on scale matrix of magnetic conduction, described
Energizing unit includes insulating layer and excitation wire ring layer；The dynamic ruler (2) is by the dynamic ruler matrix (21) and setting of magnetic conduction in dynamic ruler base
Sensing unit composition on body, the sensing unit includes insulating layer and line of induction ring layer；It is characterized by:
The excitation wire ring layer is by two be arranged side by side on same layer magnet exciting coil linear arrays (12) that are identical and being parallel to each other
It constitutes, is not interfere with each other between two magnet exciting coil linear arrays, and initial position is aligned, on perpendicular to measurement direction along measurement direction
Differ L+b；The magnet exciting coil linear array (12) is sequentially connected in series along measurement direction by m identical conducting wire groups and is arranged to make up, adjacent
The center of two conducting wire groups is away from for W, and a conducting wire group is by a positive lead unit (121) and a reversed lead unit
(122) in series, positive, the reversed lead unit (121,122) is all made of the conductor in parallel that n root long degree is L, with just
The starting point of guiding line unit is coordinate origin, and measurement direction is the direction x, and conductor length direction is the direction y；
The x-axis coordinate of each conducting wire indicates in the forward direction lead unit (121) are as follows:
The x-axis coordinate of each conducting wire indicates in the reversed lead unit (122) are as follows:
In formula, i successively all positive integers of the value 1 to n, liIndicate the x-axis coordinate of i-th conducting wire in positive lead unit, diTable
Show the x-axis coordinate of i-th conducting wire in reversed lead unit；The starting point of the terminating point of positive lead unit and reversed lead unit
It is overlapped, coordinate is (W/2, L)；The coordinate of the terminating point of reversed lead unit is (W, 0)；
The line of induction ring layer be made of two be arranged side by side third square coils (24) that are identical and being parallel to each other or by
Two to be arranged side by side are identical and the second induction coil linear array for being parallel to each other is constituted；Third square coil (24) described in two
Initial position L+b, each third square coil are differed on perpendicular to measurement direction along be staggered W/4, central point of measurement direction
(24) it is W/2, is L perpendicular to the length of measurement direction along the width of measurement direction；Second induction coil linear array described in two
Initial position L+b, each second induction coil are differed on perpendicular to measurement direction along be staggered W/4, central point of measurement direction
Linear array is all followed in series to form by P identical 4th square coils (25) along measurement direction, each 4th square coil (25)
Width along measurement direction is W/2-c, is L perpendicular to the length of measurement direction, two neighboring 4th square coil (25) around
Line is contrary, center is away from for W/2, wherein b indicates small spacing, between c is indicated between two neighboring 4th square coil
It is integer away from, P, and 1 < P < 2m；
Two-phase symmetrical drive electric current is each led into magnet exciting coil linear array (12) described in two, when dynamic ruler (2) is with respect to scale (1)
When moving along measurement direction, two third square coils (24) export inductive signal respectively, carry out after superimposed with pumping signal
Phase demodulation processing or two the second induction coil linear arrays export inductive signal respectively, and after superimposed and pumping signal carries out phase demodulation
Processing, phase difference are indicated by the high-frequency clock pulse number of interpolation, and straight-line displacement of the dynamic ruler with respect to scale is obtained after converting.
3. grating straight-line displacement sensor when according to claim 1 or 2, it is characterised in that: the Energizing unit is by multiple
Successively arranged for interval is constituted perpendicular to scale matrix (11) surface direction for insulating layer and multiple excitation wire ring layer edges, Ge Geli
It is parallel with one another between magnet-wire ring layer.
4. grating straight-line displacement sensor when according to claim 1 or 2, it is characterised in that: the sensing unit is by multiple
Successively arranged for interval is constituted perpendicular to dynamic ruler matrix (21) surface direction for insulating layer and multiple line of induction ring layer edges, each sense
It answers and is serially connected between coil layer.
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Application publication date: 20171117 Assignee: Chongqing Han's Shizha Technology Co.,Ltd. Assignor: Chongqing University of Technology Contract record no.: X2022500000007 Denomination of invention: A time grating linear displacement sensor Granted publication date: 20190402 License type: Exclusive License Record date: 20220926 |