CN106441059B - Grating straight-line displacement sensor when a kind of single-row double-row type - Google Patents
Grating straight-line displacement sensor when a kind of single-row double-row type Download PDFInfo
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- CN106441059B CN106441059B CN201610815628.6A CN201610815628A CN106441059B CN 106441059 B CN106441059 B CN 106441059B CN 201610815628 A CN201610815628 A CN 201610815628A CN 106441059 B CN106441059 B CN 106441059B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The invention discloses grating straight-line displacement sensors when a kind of single-row double-row type, including scale and dynamic ruler, scale includes scale matrix and excitation coil, excitation coil is along the rectangular wave coiling of measurement direction, dynamic ruler includes dynamic ruler matrix and the first, second induction coil, first, second induction coil uses semisinusoidal winding mode coiling, the first, second induction coil parallel with excitation coil face；Sinusoidal excitation current is passed through in excitation coil, dynamic ruler is moved with respect to scale, it is superimposed to form travelling wave signal with the inductive signal of the first induction coil output after 90 ° of the inductive signal phase shift of second induction coil output, it is carried out again than phase with same frequency reference signal, phase difference is indicated by the high-frequency clock pulse number of interpolation, and straight-line displacement is obtained after conversion.The sensor structure is simple, can realize that the straight-line displacement of high resolution measures, easy batch micro operations.
Description
Technical field
The invention belongs to accurate measurement sensor technical fields, and in particular to grating straight-line displacement passes when a kind of single-row double-row type
Sensor.
Background technology
Straight-line displacement measurement is most basic geometric measurement, be largely present in using manufacturing industry as the industrial practice of representative and
In scientific practice.Precision linear displacement, which measures, mainly uses linear displacement transducer, such as grating, magnetic grid, capacitive grating, such sensing
Device is all to carry out counting to get displacement by the grid line for dividing equally space, and common feature is empty using high density, ultraprecise
Between grid line reach the resolving power requirement of micro-displacement.In order to further improve the measurement resolution of sensor, it is typically only capable to
The original signal exported to sensor by complicated electronic fine-grained technology is finely divided processing, obtains higher measurement and differentiates
Power, to keep the structure of measuring system more complicated, cost increases, and poor anti jamming capability, is vulnerable to working environment interference
It influences.
Recent year has developed a kind of when grating straight-line displacement sensor using clock pulses as displacement measurement benchmark,
It does not depend on high density spatial precision groove and realizes high resolution displacement measurement.When grating straight-line displacement sensor be based primarily upon electromagnetism
Principle of induction measures, resolving power depend on high frequency interpolator clock pulses space equivalent and time-grating sensor it is extremely right
Number, number of pole-pairs is higher, and resolving power is higher.
Currently, the when grating straight-line displacement sensor developed improves number of pole-pairs using the form of machining wire casing and coiling
Difficulty is big, of high cost, and uses harmonic analysis method, the main fundamental wave letter considered in electromagnetic signal to electromagnetism square-wave signal
Number effect, higher hamonic wave can influence the quality of inductive signal in electromagnetism square-wave signal, reduce the survey of linear displacement transducer
Measure accuracy.
Invention content
The object of the present invention is to provide grating straight-line displacement sensors when a kind of single-row double-row type, to eliminate to electromagnetism rectangular wave
Signal is influenced using higher hamonic wave caused by harmonic analysis method, improves the accuracy that straight-line displacement measures, while reducing biography
Sensor moves the volume of ruler.
Grating straight-line displacement sensor when single-row double-row type of the present invention, including scale and face parallel with scale and stay
There is the dynamic ruler in gap.
The scale includes scale matrix and the excitation coil for being located at the dynamic ruler one side of scale matrix face, the throwing of scale matrix
Excitation coil can be completely covered for shadow；The excitation coil along the rectangular wave coiling of measurement direction, the amplitude of the rectangular wave be L,
Period is W, duty ratio 0.5.After being passed through sinusoidal excitation current in excitation coil, excitation coil will form alternate close in direction
Like the impulsive magnetic field of rectangular wave, magnetic induction intensity will change with the variation of the excitation of addition；Excitation coil is equivalent to encourage
Under effect, the rectangular wave impulsive magnetic field that sinusoidal rule variation is pressed along measurement direction is generated.
The dynamic ruler includes dynamic ruler matrix and the first, second induction coil for being located at dynamic ruler matrix face scale one side, is moved
The first, second induction coil can be completely covered for the projection of ruler matrix；First induction coil is along the curve that the period is WCoiling forms the first induction coil coiling track,
Second induction coil is along the curve that the period is WCoiling forms second
Induction coil coiling track, wherein the directions x are measurement direction, and all integers in value 0 to j-1, j are integer and 0 to i successively<
j<N (i.e. any integers of the j between 0 and n), n indicate that the number of pole-pairs of sensor, W are equal to the pole span of sensor, and b is constant, and
B indicates the amplitude of the first, second induction coil coiling track, and 2A+b < L not equal to 0, A；First, second induction coil with swash
It is parallel to encourage coil face.
It is passed through sinusoidal excitation current in the excitation coil of scale, when along measurement direction relative motion occurs for dynamic ruler and scale
When, the first, second induction coil exports two-way inductive signal, 90 ° of the inductive signal phase shift that the second induction coil is exported, then
It is superimposed to form travelling wave signal with the inductive signal of the first induction coil output, the travelling wave signal and same frequency reference signal is carried out
Than phase, phase difference is indicated by the high-frequency clock pulse number of interpolation, and straight-line displacement of the dynamic ruler with respect to scale is obtained after conversion.
The scale further includes the scale insulating layer being located on excitation coil；The dynamic ruler further includes being located at first,
Dynamic ruler insulating layer under two induction coils.Scale insulating layer for protecting excitation coil, move ruler insulating layer for protecting first,
Second induction coil, scale insulating layer and dynamic ruler insulating layer can contact to avoid excitation coil with the first, second induction coil, keep away
Exempt from the generation of influence inductive signal.
After the travelling wave signal is shaped to square wave with the shaped circuit of same frequency reference signal, then carry out than phase.
In the present invention excitation coil use rectangular wave winding mode, the first, second induction coil using double semisinusoidal around
Line mode, not only eliminating influences electromagnetism square-wave signal using higher hamonic wave caused by harmonic analysis method, improves
Line measurement accuracy, and reduce the volume that sensor moves ruler；And entire sensor structure is simple, easily manufactured,
It is at low cost.
Description of the drawings
Fig. 1 is the structural diagram of the present invention.
Fig. 2 is the coiling schematic diagram of excitation coil in the present invention.
Fig. 3 is the coiling schematic diagram of the first, second induction coil in the present invention.
Fig. 4 is the location diagram of a certain moment the first, second induction coil and excitation coil face in the present invention.
Fig. 5 is the principles of signal processing block diagram of the present invention.
Specific implementation mode
It elaborates below in conjunction with the accompanying drawings to the present invention.
Grating straight-line displacement sensor when single-row double-row type as shown in Figures 1 to 5, including scale 1 and it is parallel with scale 1 just
Pair and there are the dynamic rulers 2 in the gaps 0.2mm.
Scale 1 includes scale matrix 11, the excitation coil being arranged in the wiring layer of the dynamic ruler one side of 11 face of scale matrix
12 and the scale insulating layer 13 that is located on the wiring layer, the projection of scale matrix 11 excitation coil 12 can be completely covered, it is fixed
Ruler matrix 11 is the non-magnetic matrix that thickness is equal to 2mm, is formed using ceramic material；Excitation coil 12 is in along measurement direction
Rectangular wave coiling, the amplitude of the rectangular wave is L, period W, duty ratio 0.5.
The dynamic ruler 2 includes dynamic ruler matrix 21, the first sense being located in the wiring layer of 21 face scale one side of dynamic ruler matrix
Coil 22, the second induction coil 23 and the dynamic ruler insulating layer 24 being located under the wiring layer are answered, moving the projection of ruler matrix 21 can incite somebody to action
First, second induction coil is completely covered, and the non-magnetic matrix that ruler matrix 21 is equal to 2mm for thickness is moved, using ceramic material system
It forms；First induction coil 22 is along the curve that the period is WAround
System forms the first induction coil coiling track, and the second induction coil 23 is along the curve that the period is WCoiling forms the second induction coil coiling track, wherein the directions x are to survey
Direction is measured, all integers in value 0 to j-1, j are integer and 0 to i successively<j<N, n indicate the number of pole-pairs of sensor, and W, which is equal to, to be passed
The pole span of sensor, b is constant, and b indicates the amplitude of the first, second induction coil coiling track, and 2A+b < L not equal to 0, A,
J=6 in the present embodiment, then i successively feel by value 0,1,2,3,4,5, the initial position and first for forming the second induction coil 23
The initial position of coil 22 is answered to differFirst induction coil 22, the second induction coil 23 are parallel with 12 face of excitation coil.
It is passed through sinusoidal excitation current in the excitation coil 12 of scale 1 and (adds pumping signal at the both ends of excitation coil 12
u1=UmSin ω t), when with scale 1 along measurement direction relative motion occurs for dynamic ruler 2, the induction of the first induction coil 22, second
Coil 23 is moved relative to excitation coil 12,
By the magnetic flux of production (1) in first induction coil 22：
By the magnetic flux of production (2) in second induction coil 23：
First induction coil 22 is by the inductive signal of output type (3)：
Second induction coil 23 is by the inductive signal of output type (4)：
The inductive signal e that second induction coil 23 is exported2By 90 ° of phase-shift circuit phase shift, then with first line of induction
The inductive signal e of 22 output of circle1Superposition, output travelling wave signal e (the total induced electromotive force for moving ruler 2) are：
Wherein：UmFor the amplitude of pumping signal, ω is the frequency of pumping signal, k1For proportionality coefficient,For electricity
Gesture induction coefficient, x are the straight-line displacement of 2 opposite scale 1 of dynamic ruler.
As shown in figure 5, with scale 1 along measurement direction relative motion occurs for dynamic ruler 2, week will occur for the phase angle of inductive signal
Phase property changes, and moves ruler 2 and moves a pole span relative to scale 1, the phase angle of inductive signal is (i.e. in formula (5)) variation one
A period.By travelling wave signal e and the fixed same frequency reference signal u accesses shaping circuit processing of phase, two-way square wave is converted to
It is sent into signal processing module after signal to carry out than phase, phase difference is indicated by the high-frequency clock pulse number of interpolation, after conversion i.e.
It can obtain the straight-line displacement of 2 opposite scale 1 of dynamic ruler.
Claims (2)
1. grating straight-line displacement sensor when a kind of single-row double-row type, including scale (1) and face parallel with scale and there are gaps
Dynamic ruler (2), it is characterised in that：
The scale (1) includes scale matrix (11) and the excitation coil (12) for being located at the dynamic ruler one side of scale matrix face；It is described
Excitation coil (12) is along the rectangular wave coiling of measurement direction, and the amplitude of the rectangular wave is L, period W, duty ratio 0.5；
The dynamic ruler (2) includes dynamic ruler matrix (21) and the first, second induction coil for being located at dynamic ruler matrix face scale one side
(22,23)；First induction coil (22) is along the curve that the period is W
Coiling forms the first induction coil coiling track, and second induction coil (23) is along the curve that the period is WCoiling forms the second induction coil coiling track, wherein the directions x are to survey
Direction is measured, all integers in value 0 to j-1, j are integer and 0 to i successively<j<N, n indicate the number of pole-pairs of sensor, and W, which is equal to, to be passed
The pole span of sensor, b is constant, and b indicates the amplitude of the first, second induction coil coiling track, and 2A+b < L not equal to 0, A；
First, second induction coil (22,23) is parallel with excitation coil (12) face；
The scale (1) further includes the scale insulating layer (13) being located on excitation coil (12)；The dynamic ruler (2) further includes setting
Dynamic ruler insulating layer (24) under the first, second induction coil (22,23)；
It is passed through sinusoidal excitation current in the excitation coil (12) of scale (1), when dynamic ruler (2) and scale (1) occur along measurement direction
When relative motion, the first, second induction coil (22,23) exports two-way inductive signal, by the second induction coil (23) output
Then 90 ° of inductive signal phase shift is superimposed to form travelling wave signal, by the traveling wave with the inductive signal of the first induction coil (22) output
Signal is carried out with same frequency reference signal than phase, and phase difference is indicated by the high-frequency clock pulse number of interpolation, is obtained after conversion
Straight-line displacement of the dynamic ruler with respect to scale.
2. grating straight-line displacement sensor when single-row double-row type according to claim 1, it is characterised in that：The travelling wave signal
After being shaped to square wave with the shaped circuit of same frequency reference signal, then carry out than phase.
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| CN108571986A (en) * | 2017-03-07 | 2018-09-25 | 赛卓电子科技（上海）有限公司 | Displacement sensor |
| CN113008120B (en) * | 2019-12-19 | 2023-09-22 | 通用技术集团国测时栅科技有限公司 | Capacitive linear displacement sensor and movable ruler thereof |
| CN111077344B (en) * | 2019-12-30 | 2021-03-26 | 华中科技大学 | Acceleration sensor |
| CN112721995B (en) * | 2020-12-02 | 2022-12-02 | 桂林理工大学 | Railway jointless track crawling monitoring device and method |
| CN112857194B (en) * | 2021-01-22 | 2022-08-16 | 重庆理工大学 | Plane two-dimensional displacement sensor based on eddy current effect |
| CN114608431B (en) * | 2022-03-29 | 2023-06-09 | 重庆理工大学 | Double-layer sine time grating linear displacement sensor |
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| CN103644834A (en) * | 2013-12-24 | 2014-03-19 | 重庆理工大学 | Time grating linear displacement sensor |
| CN103822571A (en) * | 2014-03-19 | 2014-05-28 | 重庆理工大学 | Electric field type time grating linear displacement sensor based on single-row multilayered structure |
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| JPS52150059A (en) * | 1976-06-08 | 1977-12-13 | Mitsubishi Electric Corp | Length measuring apparatus |
| DE102013218768A1 (en) * | 2013-09-19 | 2015-03-19 | Dr. Johannes Heidenhain Gmbh | Inductive position measuring device |
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| CN103644834A (en) * | 2013-12-24 | 2014-03-19 | 重庆理工大学 | Time grating linear displacement sensor |
| CN103822571A (en) * | 2014-03-19 | 2014-05-28 | 重庆理工大学 | Electric field type time grating linear displacement sensor based on single-row multilayered structure |
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