CN107192854B

CN107192854B - Z scanner and probe device of atomic force microscope and probe device mounting device

Info

Publication number: CN107192854B
Application number: CN201710255058.4A
Authority: CN
Inventors: 刘璐; 吴森; 胡晓东; 徐临燕; 胡小唐
Original assignee: Tianjin University
Current assignee: Furui Si Suzhou Instrument Co ltd
Priority date: 2017-04-18
Filing date: 2017-04-18
Publication date: 2020-12-04
Anticipated expiration: 2037-04-18
Also published as: CN107192854A

Abstract

The Z scanner is provided with an annular iron sheet, an annular piezoelectric ceramic sheet and an annular magnet which are sequentially arranged from bottom to top, the annular iron sheet, the annular piezoelectric ceramic sheet and the annular magnet are coaxially arranged, and the inner periphery of the annular iron sheet, the annular piezoelectric ceramic sheet and the annular magnet jointly form a light through hole; the probe device is provided with a probe clamping structure, a cantilever beam probe and a spring pressing sheet, wherein the probe clamping structure is used for being connected with the annular iron sheet through magnetic force, the cantilever beam probe is embedded into the probe clamping structure, and the spring pressing sheet is used for fixing the cantilever beam probe on the probe clamping structure through a screw. The probe device mounting device of the probe device has a rectangular opening formed at one end of a mounting device body, countersunk threaded holes formed at both sides and bottom of the rectangular opening for connecting the probe device by countersunk screws, and a countersunk through hole formed at a portion of the mounting device body away from the rectangular opening for connecting an external device. The invention can be applied to atomic force microscopes with various efficacies and various scanning modes.

Description

Z scanner and probe device of atomic force microscope and probe device mounting device

Technical Field

The invention relates to an atomic force microscope probe clamping device. In particular to a Z scanner and a probe device of an atomic force microscope and a probe device mounting device.

Background

Since Binning et al invented the first atomic force microscope in 1986, many technologists developed and improved techniques and broadened the application fields thereof, many types of atomic force microscopes were developed, which could not only perform electric, magnetic, nano-lithography processing and bioactive molecular property analysis, but also be widely used to explore microscopic properties (optical, force, electrical, magnetic) at nano-scale, with functions far exceeding the previous microscope technologies, bringing human into the nano-era.

Various researches are carried out on the structure of the atomic force microscope by researchers in various countries aiming at different test requirements, but most of the researches adopt an cantilever beam type probe as a sensing element and carry out scanning by combining different scanner structures by using an optical lever detection method. According to different movement modes of the scanner, the structure of the atomic force microscope can be divided into an upper scanning structure, a lower scanning structure and a mixed scanning structure, wherein the upper scanning structure refers to that a sample is static, and a measuring head performs scanning movement relative to the sample under the drive of an XYZ scanner; the lower scanning means that the measuring head is static, and the sample performs scanning motion relative to the measuring head under the drive of an XYZ scanner; the hybrid scanning means that the probe and the sample are both in scanning motion, and can be divided into different scanning mechanisms according to different positions of the XYZ scanner.

Different configurations of XYZ scanners result in a large difference in the scanning motion pattern, but the scanning patterns are approximately the same. The current common scanning modes include contact scanning, tapping scanning, peak force tapping mode scanning and the like, and the motion state of the probe is different according to different scanning modes. During contact scanning, the probe is static, and the Z scanner is controlled to move to track the change of the surface appearance of the sample by detecting the deformation information of the probe; when in tapping type scanning, the probe vibrates at the resonant frequency of the probe, and the Z scanner is driven to move by detecting the vibration amplitude of the probe; under the mode of peak force tapping, the Z scanner drives the probe to vibrate at a frequency lower than the resonance frequency of the probe, the probe is driven to do high-speed force curvilinear motion, the peak force at each scanning point is controlled to be constant, and the position information of the Z scanner represents the morphology information.

When an upper scanner and a hybrid scanner (a Z scanner is arranged on a measuring head) are adopted, the design of the mounting structure of the Z scanner and a probe needs to be considered, and how to quickly and effectively mount and replace a cantilever probe is a problem to be solved.

Disclosure of Invention

The invention aims to provide a Z scanner, a probe device and a probe device mounter of an atomic force microscope with better universality.

The technical scheme adopted by the invention is as follows: a Z scanner and probe device for atomic force microscope, comprising a Z scanner and a probe device connected below the Z scanner, the Z scanner comprises: the annular iron sheet, the annular piezoelectric ceramic sheet and the annular magnet are coaxially arranged, and the inner peripheries of the annular iron sheet, the annular piezoelectric ceramic sheet and the annular magnet form a light through hole together; the probe apparatus includes: the probe clamping structure is used for being connected with the annular iron sheet through magnetic force, the cantilever beam probe embedded in the probe clamping structure and the spring pressing sheet are used for fixing the cantilever beam probe on the probe clamping structure through screws.

The inner diameter of the annular magnet is larger than that of the annular piezoelectric ceramic piece.

The annular iron sheet, the annular piezoelectric ceramic sheet and the annular magnet are fixedly connected through epoxy resin glue, wherein the lower end face of the annular iron sheet is connected with the probe clamp holder, and the upper end face of the annular magnet is installed on a Y scanner of the atomic force microscope.

The probe clamping structure comprises a clamping main body, wherein a flat part and an inclined part are integrally formed on the lower end surface of the clamping main body, a light through window which is vertically communicated and corresponds to the light through hole and a mounting hole which is positioned on the periphery of the light through window and is used for connecting an external probe device mounter are formed on the flat part and adjacent to the inclined part, a groove for embedding the cantilever beam probe is formed on one side of the inclined part adjacent to the light through window, a screw hole for fixing a spring pressing sheet through a screw is formed on one side of the inclined part corresponding to the groove, and one end of the spring pressing sheet is pressed on the mounting cantilever beam probe; the upper end face of the clamping main body is embedded with three magnetic blocks which are used for being connected with an annular iron sheet on the Z scanner through magnetic force.

The spring pressing piece is provided with an adjusting groove used for adjusting the amount of the spring pressing piece pressed on the cantilever beam probe along the length direction, and the screw penetrates through the adjusting groove and is in threaded connection with the screw hole.

The inclined plane part is an inclined plane with an included angle of 10-12 degrees with the horizontal plane.

The depth of the groove for embedding the cantilever beam probe is 0.2-0.3 mm.

A probe device mounting device for a Z scanner and a probe device of an atomic force microscope is characterized by comprising a mounting device main body, wherein a rectangular opening is formed at one end of the mounting device main body, 4 countersunk threaded holes for connecting the probe device through countersunk screws are formed in the two sides and the bottom of the rectangular opening in a distributed mode, and countersunk through holes for connecting an external device are formed in the part, far away from the rectangular opening, of the mounting device main body.

The Z scanner, the probe device and the probe device installer of the atomic force microscope have simple structures and can be suitable for atomic force microscopes with various effects and various scanning modes. Has the following beneficial effects:

1. the applicability of the structure can be ensured for various scanning modes and modes, and the universality is better;

2. the pretightening force of the piezoelectric ceramics is provided by utilizing the magnetic attraction force, and the structure is simple;

3. the design of the installation structure of the probe clamp holder is simple in structure, and the installation and position adjustment of the cantilever beam probe are facilitated.

Drawings

FIG. 1 is a schematic diagram of the overall structure of a Z scanner and probe apparatus for an atomic force microscope of the present invention;

FIG. 2 is a bottom view of FIG. 1;

FIG. 3 is a schematic view of the overall structure of the Z-scanner of the present invention;

FIG. 4 is a schematic view of the overall structure of the probe apparatus of the present invention;

FIG. 5 is a schematic view of the overall structure of the probe clamping structure according to the present invention;

FIG. 6 is a bottom view of FIG. 5;

FIG. 7 is a right side view of FIG. 5;

FIG. 8 is a rear view of FIG. 5;

FIG. 9 is a schematic view showing the overall structure of a probe apparatus mounter in the present invention;

FIG. 10 is a schematic view showing a structure in which a probe apparatus is placed on a probe apparatus mounter in the present invention;

FIG. 11 is a bottom view of FIG. 10;

fig. 12 is a schematic view of the probe apparatus mounter of the present invention mounting the probe apparatus on the Z scanner.

In the drawings

1: the Z scanner 11: ring-shaped iron sheet

12: annular piezoelectric ceramic sheet 13: ring magnet

14: light-passing hole 2: probe apparatus

21: the probe clamping structure 211: clamping body

212: horizontal portion 213: bevel portion

214: light-passing window 215: mounting hole

216: groove 217: screw hole

218: magnetic block 22: cantilever probe

23: the spring pressing piece 231: adjusting groove

24: and (3) screws: probe device installer

31: the mounter body 32: rectangular opening

33: countersunk threaded hole 34: countersunk through hole

4: countersunk screw 5: incident laser beam

6: reflecting the laser beam

Detailed Description

The Z scanner and the probe apparatus of the atomic force microscope and the probe apparatus mounter according to the present invention will be described in detail with reference to the embodiments and the accompanying drawings.

The Z scanner and the probe device for the atomic force microscope realize the fixation of the probe device by utilizing the magnetic attraction, are beneficial to the adjustment of the position of the probe, and simultaneously utilize the magnetic attraction to provide a pretightening force for the piezoelectric ceramics used by the Z scanner so as to ensure the motion performance of the piezoelectric ceramics.

The invention relates to a Z scanner and a probe device for an atomic force microscope, which are arranged on the atomic force microscope. The structure of the atomic force microscope is referred to patent number 2015100890154 entitled "an atomic force microscope suitable for high speed scanning".

As shown in fig. 1 and fig. 2, the Z scanner and probe apparatus for atomic force microscope of the present invention includes a Z scanner 1 and a probe apparatus 2 connected to the lower side of the Z scanner 1.

As shown in fig. 3, the Z scanner 1 includes: the ring-shaped iron sheet 11, the ring-shaped piezoelectric ceramic sheet 12 and the ring-shaped magnet 13 are sequentially arranged from bottom to top, the ring-shaped iron sheet 11, the ring-shaped piezoelectric ceramic sheet 12 and the ring-shaped magnet 13 are coaxially arranged, and the inner periphery of the ring-shaped piezoelectric ceramic sheet and the inner periphery of the ring-shaped magnet form a light through hole 14 together. The inner diameter of the annular magnet 13 is larger than that of the annular piezoelectric ceramic plate 12. The annular iron sheet 11, the annular piezoelectric ceramic sheet 12 and the annular magnet 13 are fixedly connected through epoxy resin glue, so that the rigidity is high, and the measurement requirement can be met. Wherein, the lower end face of the annular iron sheet 11 is connected with the probe holder 2, and the upper end face of the annular magnet 13 is arranged on a Y scanner of the atomic force microscope. The annular magnet 13 and the annular iron sheet 11 are respectively fixed on the upper and lower surfaces of the annular piezoelectric ceramic sheet 12 to provide pretightening force for the annular piezoelectric ceramic sheet 12.

In the embodiment of the invention, a piezoelectric ceramic plate in the Z scanner is in an annular structure with the outer diameter of 12mm, the inner diameter of 6mm and the thickness of 2mm, the inner diameter size can meet the condition that incident and reflected laser beams pass through simultaneously, the inner diameter required by an annular magnet is larger than that of the annular piezoelectric ceramic plate, and the inner diameter of the annular magnet is 7mm and 1mm thick.

As shown in fig. 4, the probe apparatus 2 includes: the probe clamping structure 21 is used for being connected with the annular iron sheet 11 through magnetic force, the cantilever probe 22 is embedded in the probe clamping structure 21, and the spring pressing sheet 23 is used for fixing the cantilever probe 22 on the probe clamping structure 21 through a screw 24.

As shown in fig. 4, 5, 6, 7, and 8, the probe clamping structure 21 includes a clamping main body 211, a horizontal portion 212 and a slope portion 213 are integrally formed on a lower end surface of the clamping main body 211, and the slope portion 213 is an inclined surface having an angle of 10 to 12 ° with the horizontal surface. A light-passing window 214 which is vertically penetrated and corresponds to the light-passing hole 14 and a mounting hole 215 which is positioned at the periphery of the light-passing window 214 and is used for connecting an external probe device mounter 3 are formed on the horizontal part 212 and adjacent to the inclined surface part 213, a groove 216 for embedding the cantilever probe 22 is formed on one side of the inclined surface part 213 adjacent to the light-passing window 214, and the depth of the groove 216 for embedding the cantilever probe 22 is 0.2-0.4 mm, and preferably 0.3 mm. A screw hole 217 for fixing the spring pressing piece 23 through a screw 24 is formed on the inclined surface part 213 corresponding to one side of the groove 216, and one end of the spring pressing piece 23 is pressed on the installation cantilever probe 22; three magnetic blocks 218 which are magnetically connected with the annular iron sheet 11 on the Z scanner 1 are embedded in the upper end surface of the clamping main body 211, so that the cantilever probe is fixed on the Z scanner 1. Magnetic attraction exists between the magnetic block 218 and the annular iron sheet on the Z scanner, so that attraction between the magnetic attraction surface of the probe clamping structure 21 and the Z scanner can be realized.

As shown in fig. 4, the spring pressing plate 23 is formed with an adjusting groove 231 along the length direction for adjusting the amount of the spring pressing plate 23 pressed on the cantilever probe 22, and the screw 24 is threaded through the adjusting groove 231 and the screw hole 217.

The probe device 2 is fixed on the ring-shaped iron sheet 11 of the Z scanner 1 through magnetic attraction, so as to ensure that the cantilever beam probe 22 moves along with the Z scanner 1, and the ring-shaped magnet 13 in the Z scanner 1 is fixed in the structure of the atomic force microscope with the patent number of 2015100890154 and the invention name of the atomic force microscope suitable for high-speed scanning. The invention replaces the Z-direction scanner and the probe device. The light-transmitting window 214 of the probe device and the light-transmitting hole of the Z scanner ensure that the incident laser beam can be focused on the cantilever probe, and the reflected laser beam reflected by the cantilever probe can pass through the Z scanner and finally return to the aspheric lens to be changed into a parallel beam to be output. To ensure proper passage of the laser beam, the inner diameter of the ring magnet in the Z scanner is larger than the inner diameter of the ring piezoceramic wafer, as shown by the dashed line in fig. 2.

As shown in fig. 9, the probe apparatus mounter for Z scanner and probe apparatus of atomic force microscope of the present invention includes a mounter body 31, a rectangular opening 32 formed at one end of said

mounter body

31, 4 countersunk screw holes 33 formed at both sides and bottom of said rectangular opening 32 for connecting probe apparatus 2 by means of countersunk screws 4, and a countersunk through hole 34 formed at a portion of said mounter body 31 remote from said rectangular opening 32 for connecting an external apparatus.

As shown in fig. 10 and 11, the probe device 2 is placed on the probe device mounter 3 before being attached to the Z scanner 1, the probe device 2 is attached to the upper surface of the main body 31 of the probe device mounter 3, four countersunk screws 4 are inserted through the mounting holes 215 of the probe device 2 to secure the position of the probe device 2, and a rectangular opening 32 is formed in the main body 31 of the mounter to prevent the cantilever probe from being damaged when the probe device 2 is placed. The mounter body 31 has four countersunk through holes at its end for fixing the mounter body 31 to a three-dimensional displacement table (not shown) for adjusting the position of the probe unit 2 to perform mounting and position adjustment of the cantilever probe.

As shown in fig. 4, 10, 11 and 12, when the cantilever probe needs to be installed, the cantilever probe is first fixed in the groove 216 of the clamping body 211 by the spring pressing plate 23 and the screw 24 to form the probe device 2; then, the probe device 2 is placed on the probe device mounting device 3 in an inverted manner, the placing surface of the probe device 2 is overlapped with the upper surface of the probe device mounting device 3, four countersunk screws 4 in the probe device mounting device 3 are respectively inserted into the mounting holes 215 of the probe device at the corresponding positions, at the moment, the probe device mounting device 3 is far away from the Z scanner, and the attraction between the magnetic block 217 on the probe device 2 and the annular iron sheet 11 on the Z scanner is small; when the probe device installer 3 brings the probe device 2 close to the Z scanner, the attraction force between the magnetic block 218 and the annular iron sheet 11 can adsorb the probe device 2 on the Z scanner 1, at this time, the magnetic attraction surface of the probe device 2 is attracted with the annular iron sheet 11 of the Z scanner 1, and the four countersunk head screws 4 in the probe device installer 3 are still in the adjusting holes of the probe device 2, so that the probe device 2 can be driven to move in a plane on the annular iron sheet 11 of the Z scanner, and the position of the cantilever beam probe can be adjusted; after the position of the cantilever probe is adjusted, the probe device installer 3 is removed, and the atomic force microscope can perform scanning work until the cantilever probe is installed. When the cantilever beam probe is worn and needs to be replaced in the working process, the probe device 2 only needs to be manually taken down, and the purpose of replacing the cantilever beam probe can be achieved by repeating the process.

Claims

1. An apparatus for atomic force microscope, comprising a Z scanner (1), a probe apparatus (2) connected to the lower side of the Z scanner (1), and a probe apparatus mounting device (3), wherein the Z scanner (1) comprises: the ring-shaped iron sheet (11), the ring-shaped piezoelectric ceramic sheet (12) and the ring-shaped magnet (13) are sequentially arranged from bottom to top, the ring-shaped iron sheet (11), the ring-shaped piezoelectric ceramic sheet (12) and the ring-shaped magnet (13) are coaxially arranged, and the inner peripheries of the ring-shaped iron sheet, the ring-shaped piezoelectric ceramic sheet (12) and the ring-shaped magnet (13) jointly form a light through hole (; the probe device (2) comprises: a probe clamping structure (21) which is used for being connected with the annular iron sheet (11) through magnetic force, a cantilever probe (22) which is embedded on the probe clamping structure (21) and a spring pressing sheet (23) which is used for fixing the cantilever probe (22) on the probe clamping structure (21) through a screw (24), wherein the probe clamping structure (21) comprises a clamping main body (211), a flat part (212) and an inclined part (213) are integrally formed on the lower end surface of the clamping main body (211), a light through window (214) which is vertically communicated and is corresponding to the light through hole (14) and a mounting hole (215) which is positioned on the periphery of the light through window (214) and is used for connecting an external probe device mounter (3) are formed on the flat part (212) and is adjacent to the inclined part (213), and a groove (216) which is used for embedding the cantilever probe (22) is formed on one side of the inclined part (213) which is adjacent to the light through window (214), a screw hole (217) used for fixing a spring pressing sheet (23) through a screw (24) is formed on one side of the inclined surface part (213) corresponding to the groove (216), and one end of the spring pressing sheet (23) is pressed on the installation cantilever beam probe (22); three magnetic blocks (218) which are connected with an annular iron sheet (11) on the Z scanner (1) through magnetic force are embedded in the upper end face of the clamping main body (211);

the probe device mounter (3) comprises a mounter body (31), wherein a rectangular opening (32) is formed at one end of the mounter body (31), 4 countersunk threaded holes (33) for connecting the probe device (2) through countersunk screws (4) are formed on two sides and the bottom of the rectangular opening (32) in a distributed manner, and countersunk through holes (34) for connecting an external device are formed in the part, far away from the rectangular opening (32), of the mounter body (31).

2. The apparatus according to claim 1, wherein the inner diameter of the ring magnet (13) is larger than the inner diameter of the ring piezoceramic wafer (12).

3. The apparatus according to claim 1, wherein the ring-shaped iron sheet (11), the ring-shaped piezoelectric ceramic sheet (12) and the ring-shaped magnet (13) are fixedly connected by epoxy glue, wherein the lower end face of the ring-shaped iron sheet (11) is connected with the probe holder (2), and the upper end face of the ring-shaped magnet (13) is mounted on a Y scanner of the atomic force microscope.

4. The apparatus according to claim 1, wherein the spring plate (23) is formed with an adjustment groove (231) along a length direction thereof for adjusting an amount of the spring plate (23) pressed against the cantilever probe (22), and the screw (24) is threaded through the adjustment groove (231) to the screw hole (217).

5. The apparatus according to claim 1, wherein the inclined surface portion (213) is an inclined surface having an angle of 10-12 ° with respect to a horizontal plane.

6. The apparatus of claim 1, wherein the groove (216) for embedding the cantilever probe (22) has a depth of 0.2-0.3 mm.