CN107167070A - A kind of resistance strain sensor and its manufacture method - Google Patents
A kind of resistance strain sensor and its manufacture method Download PDFInfo
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- CN107167070A CN107167070A CN201710492101.9A CN201710492101A CN107167070A CN 107167070 A CN107167070 A CN 107167070A CN 201710492101 A CN201710492101 A CN 201710492101A CN 107167070 A CN107167070 A CN 107167070A
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- polymer film
- graphene
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- thin polymer
- strain sensor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
Abstract
A kind of resistance strain sensor and its manufacture method, are related to resistance strain sensor.Graphene-based resistance strain sensor is provided with lower basalis, thin polymer film, laser, graphene-based strain grid, metal coupling assembling and lead-out wire；Lower basalis is workpiece to be tested, positioned at thin polymer film of the upper surface of lower basalis for spraying；Graphene-based strain grid realize irradiation area film graphite alkylene by the laser pattern structure that radiation-induced is formed on the polymer film, laser；Metal coupling assembling is located at graphene-based strain grid two ends with lead-out wire.Manufacture method is：Thin polymer film is deposited on to the first-class method of lower basalis by way of spraying, graphene-based strain grid are on the polymer film with the strand of high-frequency impulse energy damages thin polymer film using laser, the functional group of the elements such as oxygen-containing, hydrogen is gasified and volatilized, the functional groups such as C C, C=C are left on strand, induction film graphite alkylene is completed.
Description
Technical field
The present invention relates to resistance strain sensor, more particularly, to a kind of resistance strain sensor and its manufacture method.
Background technology
Resistance strain sensor, is the element for measuring strain, strain transducer is by substrate, sensitive grid and two extractions
Line is constituted, and wherein sensitive grid is the deformation sensing unit of foil gauge.The measuring principle of resistance strain sensor is by sensing unit
Be pasted onto on component, when member stress is deformed, the length of sensing unit or cross-sectional area changed also with component one, enter
And occurring resistance variations, it can read measured workpiece strain variation with resistance variations.Resistance strain sensor sensing unit has many
The form of kind, according to the difference of sensing element material, strain transducer can be divided into metal and the major class of semiconductor two：Metal type strain is passed
Sensor can be divided into metal wire type and foil again, generally by manual or semi-automatic coiling or lithography process into strain transducer.Such as
Palisade (or corroding into palisade with very thin metal foil) folder is coiled into by a diameter of 0.02~0.05mm constantan wire or nickel filament
It is made, is connected with tinned wird with foil gauge wire grid as foil gauge lead, for connecting in two layers of heat insulating lamella (substrate)
Measure traverse line.Due to the limitation of foil thickness, it is constrained in the application for minimizing and being miniaturized on sensor, which also promotes
The development of semiconductor-type foil gauge, the features such as semiconductor-type strain transducer has integrated micro and high sensitivity.But at it
On the forming technology of foil gauge, it should also be noted that being either deposited or sputtering technology, the control of strain sheet grating shape is typically to use
Mask, due to vacuum environment condition and the high manufacturing cost of photoetching process, the mass for limiting semiconductor-type foil gauge is low
Honest and clean manufacture.On the other hand, metal or semiconductor strain sensor can not be brought into close contact in curve surface work pieces, and which also limits such
The application of strain transducer.Either metal or semiconductor strain sensor are pasted when test needs at present
On workpiece to be tested, the reliability pasted can influence workpiece strain and the synchronism of strain transducer.Chinese patent
CN206132080U discloses a kind of adherent graphite grid flexible resistor foil gauge, goes for the test piece of many occasions, but
Mechanical hysteresis can influence its measurement accuracy caused by the mode pasted.Chinese patent CN201611041219.1,
CN201620822089.4 and CN201610239111.7 are disclosed in aeroengine pipeline, shaft wall structure model test piece etc. respectively
The foil gauge of occasion the method such as effectively pastes to improve the measuring accuracy of foil gauge, but the expansibility of these methods is relatively low, no
More workpiece to be tested and occasion, and complex process are can be suitably used for, and cost is high.
The content of the invention
It is an object of the invention to overcome the above in the prior art manufacturing cost it is higher and need paste caused by it is delayed
Effect and it the defect such as can not be brought into close contact in curved surface there is provided a kind of low graphene-based resistance strain sensor of simple and convenient cost
And its manufacture method.
The graphene-based resistance strain sensor is provided with lower basalis, thin polymer film, laser, graphene-based strain
Grid, metal coupling assembling and lead-out wire；The lower basalis is workpiece to be tested, is spraying positioned at the upper surface of lower basalis
Thin polymer film；It is described it is graphene-based strain grid by laser on the polymer film radiation-induced formed pattern structure,
Laser realizes irradiation area film graphite alkylene；Metal coupling assembling is located at graphene-based strain grid two ends with lead-out wire；Institute
Stating metal coupling assembling and lead-out wire is used for connecting test equipment and output data.
The thin polymer film can form conductive structure by laser irradiation, and the thin polymer film may be selected from benzene-type polyamides
Imines etc..
The graphene-based strain grid pass through movement locus on the polymer film radiation-induced shape of the laser according to setting
Into pattern structure, laser realizes irradiation area film graphite alkylene in irradiation process.
The parameter of the laser can be：Power：0.1W~1kW, frequency：1~100GHz；Dutycycle：1%~100%；
Wavelength：1nm~1mm；Translational speed scope<10m/s；Waveform is pulse square wave；Can also be other kinds of laser and its
Relevant parameter.
The graphene-based strain grid are used to perceive the resistance variations caused by deformation.
The manufacture method of the graphene-based resistance strain sensor, is comprised the following steps that：
Thin polymer film is deposited on lower basalis by way of spraying, or passes through the modes such as blade coating, electrostatic spray
Deposition, or thin polymer film is directly pasted on lower basalis, or various dimensions strain transducer is produced by stacked system,
The graphene-based strain grid are on the polymer film with the molecule of high-frequency impulse energy damages thin polymer film using laser
Chain, the functional group of the elements such as oxygen-containing, hydrogen is gasified and volatilized, and the functional groups such as C-C, C=C are left on strand, completes induction thin
Film graphite alkylene, produces graphene-based resistance strain sensor.
High polymer ink is placed on test specimen using high polymeric solution as working fluid and is deposited thin film by the present invention,
Sensitive grid structure is patterned on film according to the movement locus of setting using laser after drying.Laser irradiation process on film
Middle induction film graphite alkylene formation strain gauge element.The resistance strain gage that the strain sensitive grid are constituted being capable of single or multidigit
The strain of dynamic monitoring specific portion or the mean strain of large area position are put, plane even metal or semiconductor can be applicable
The curve surface work pieces that foil gauge can not be brought into close contact, measurement accuracy is high, while there is simple and fast, it is with low cost to wait manufacture advantage.
The manufacture of the graphene-based resistance-strain sensitive grid of spraying and laser Collaborative Manufacturing of the present invention, the graphene-based sensitivity
Grid are applied to workpiece strain detecting as the strain gauge element of resistance strain sensor, can be applicable plane even metal or half
The curve surface work pieces that conductor strain transducer can not be brought into close contact.
Brief description of the drawings
Fig. 1 is the structural representation of the embodiment of the present invention.
Embodiment
The present invention is described in further detail with specific embodiment below in conjunction with the accompanying drawings.
Referring to Fig. 1, the graphene-based resistance strain sensor embodiment is provided with lower basalis 1, thin polymer film 3, swashed
Light device 4, graphene-based strain grid 5, metal coupling assembling and lead-out wire 6；The lower basalis 1 is workpiece to be tested, under being located at
The upper surface of basalis 1 is the thin polymer film 3 of spraying 2；The graphene-based strain grid 5 are by laser in thin polymer film 3
The pattern structure that upper radiation-induced is formed, laser 4 realizes irradiation area film graphite alkylene；Metal coupling assembling is with drawing
Line 6 is located at graphene-based strain grid 5 two ends；The metal coupling assembling is used for connecting test equipment with lead-out wire 6 and exports number
According to.
The thin polymer film 3 can form conductive structure by laser irradiation, and the thin polymer film 3 may be selected from benzene-type and gather
Acid imide etc..
The graphene-based strain grid 5 pass through movement locus on thin polymer film 3 radiation-induced of the laser according to setting
The pattern structure of formation, laser 4 realizes irradiation area film graphite alkylene in irradiation process.
The parameter of the laser 4 is：Power：0.1W~1kW, frequency：1~100GHz；Dutycycle：1%~100%；
Wavelength：1nm~1mm；Translational speed scope<10m/s；Waveform is pulse square wave；Can also be other kinds of laser and its
Relevant parameter.
The graphene-based strain grid 5 are used to perceive the resistance variations caused by deformation.
The manufacture method of the graphene-based resistance strain sensor, is comprised the following steps that：
Thin polymer film 3 is deposited on by way of spraying on lower basalis 1, or passes through the side such as blade coating, electrostatic spray
Formula is deposited, or thin polymer film 3 is directly pasted on lower basalis 1, or produces various dimensions strain biography by stacked system
Sensor, the graphene-based strain grid 5 are to utilize laser on thin polymer film 3 with high-frequency impulse energy damages thin polymer film
3 strand, the functional group of the elements such as oxygen-containing, hydrogen is gasified and volatilized, the functional groups such as C-C, C=C are left on strand, is completed
Film graphite alkylene is induced, graphene-based resistance strain sensor is produced.
Specific embodiment given below.
The inventive method is using polypyromelliticimide high polymeric solution as working fluid, by spraying 2 in trial work to be measured
One layer of polymeric film 3 is deposited on part (lower basalis 1), is being worked after drying using laser 4 according to the movement locus of setting
Irradiation forms the graphene-based strain structure of grid 5 on film, and laser can photograph well as a kind of energetic particle beam in thin polymer film 3
With the strand of its high-frequency impulse energy damages polypyromelliticimide during penetrating, by functional group's gas of the elements such as oxygen-containing, hydrogen
Change volatilization, the functional groups such as C-C, C=C are left on strand, complete induction polypyromelliticimide film graphite alkylene simultaneously
As strain gauge element, finally in graphene-based strain grid 5 two ends connection metal assembly and lead-out wire 6, connected and surveyed by lead-out wire
Try equipment, output data.The resistance strain gage that the graphene-based strain grid 5 are constituted being capable of single or multiposition dynamic monitoring
Specific portion strain or the mean strain of large area position, can be applicable plane even metal or semiconductor strain sensor
The curve surface work pieces that can not be brought into close contact.
Claims (6)
1. a kind of resistance strain sensor, it is characterised in that provided with lower basalis, thin polymer film, laser, it is graphene-based should
Become grid, metal coupling assembling and lead-out wire；The lower basalis is workpiece to be tested, is spraying positioned at the upper surface of lower basalis
Thin polymer film；The graphene-based strain grid pass through the laser patterning knot that radiation-induced is formed on the polymer film
Structure, laser realizes irradiation area film graphite alkylene；Metal coupling assembling is located at graphene-based strain grid two ends with lead-out wire；
The metal coupling assembling is used for connecting test equipment and output data with lead-out wire.
2. a kind of resistance strain sensor as claimed in claim 1, it is characterised in that the thin polymer film is irradiated by laser
Conductive structure is formed, the thin polymer film is selected from benzene-type polyimides.
3. a kind of resistance strain sensor as claimed in claim 1, it is characterised in that the graphene-based strain grid pass through laser
According to the movement locus pattern structure that radiation-induced is formed on the polymer film of setting, laser is real in irradiation process
Existing irradiation area film graphite alkylene.
4. a kind of resistance strain sensor as claimed in claim 1, it is characterised in that the parameter of the laser is：Power：
0.1W~1kW, frequency：1~100GHz；Dutycycle：1%~100%；Wavelength：1nm~1mm；Translational speed scope<10m/s；
Waveform is pulse square wave.
5. a kind of resistance strain sensor as claimed in claim 1, it is characterised in that the graphene-based strain grid are used to perceive
Resistance variations caused by deformation.
6. the manufacture method of graphene-based resistance strain sensor as described in Claims 1 to 5, it is characterised in that specific steps are such as
Under：
Thin polymer film is deposited on lower basalis by way of spraying, or deposited by blade coating, electrostatic spray mode, or
Thin polymer film is directly pasted on lower basalis, or various dimensions strain transducer is produced by stacked system；The stone
Mertenyl strain grid are that, on the polymer film with the strand of high-frequency impulse energy damages thin polymer film, will contain using laser
Functional group's gasification volatilization of oxygen, protium, C-C, C=C functional group are left on strand, induction film graphite alkylene is completed,
Produce graphene-based resistance strain sensor.
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Cited By (8)
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|---|---|---|---|---|
| CN108489592A (en) * | 2018-04-13 | 2018-09-04 | 东莞市鸿博电子有限公司 | A kind of automatic quadrangle output error update the system of parallel beam load cell |
| CN109294233A (en) * | 2018-09-25 | 2019-02-01 | 重庆大学 | A kind of nano-conductive fiber/polymer composite, preparation method and application |
| CN109373889A (en) * | 2018-11-19 | 2019-02-22 | 华中科技大学 | A kind of metal strain perception device and its manufacturing method and application method |
| CN109412354A (en) * | 2018-11-27 | 2019-03-01 | 厦门新鸿洲精密科技有限公司 | It is a kind of can sensing movement track voice coil motor |
| CN109489542A (en) * | 2018-11-15 | 2019-03-19 | 华东理工大学 | Strain transducer and its manufacturing method |
| CN109781151A (en) * | 2019-01-22 | 2019-05-21 | 苏州大学 | The sensor and its preparation of sensing element and elastic sensing element process integration |
| CN110006328A (en) * | 2019-04-10 | 2019-07-12 | 浙江清华柔性电子技术研究院 | Strain piece preparation method and foil gauge and Hopkinson bar with it |
| EP4133159A1 (en) * | 2020-04-08 | 2023-02-15 | Services Pétroliers Schlumberger | Thermally induced graphene sensing circuitry on intelligent valves, actuators, and pressure sealing applications |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108489592A (en) * | 2018-04-13 | 2018-09-04 | 东莞市鸿博电子有限公司 | A kind of automatic quadrangle output error update the system of parallel beam load cell |
| CN109294233A (en) * | 2018-09-25 | 2019-02-01 | 重庆大学 | A kind of nano-conductive fiber/polymer composite, preparation method and application |
| CN109294233B (en) * | 2018-09-25 | 2021-03-19 | 重庆大学 | Nano conductive fiber/polymer composite material strain sensor |
| CN109489542A (en) * | 2018-11-15 | 2019-03-19 | 华东理工大学 | Strain transducer and its manufacturing method |
| CN109373889A (en) * | 2018-11-19 | 2019-02-22 | 华中科技大学 | A kind of metal strain perception device and its manufacturing method and application method |
| CN109412354A (en) * | 2018-11-27 | 2019-03-01 | 厦门新鸿洲精密科技有限公司 | It is a kind of can sensing movement track voice coil motor |
| CN109412354B (en) * | 2018-11-27 | 2024-01-12 | 厦门新鸿洲精密科技有限公司 | Voice coil motor capable of sensing motion trail |
| CN109781151A (en) * | 2019-01-22 | 2019-05-21 | 苏州大学 | The sensor and its preparation of sensing element and elastic sensing element process integration |
| CN109781151B (en) * | 2019-01-22 | 2021-10-26 | 苏州大学 | Sensor with integrated processing of sensing element and elastic sensing element and preparation thereof |
| CN110006328A (en) * | 2019-04-10 | 2019-07-12 | 浙江清华柔性电子技术研究院 | Strain piece preparation method and foil gauge and Hopkinson bar with it |
| CN110006328B (en) * | 2019-04-10 | 2021-08-17 | 浙江清华柔性电子技术研究院 | Strain gauge preparation method, strain gauge with strain gauge and Hopkinson bar |
| EP4133159A1 (en) * | 2020-04-08 | 2023-02-15 | Services Pétroliers Schlumberger | Thermally induced graphene sensing circuitry on intelligent valves, actuators, and pressure sealing applications |
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Application publication date: 20170915 |