CN109781151A - The sensor and its preparation of sensing element and elastic sensing element process integration - Google Patents
The sensor and its preparation of sensing element and elastic sensing element process integration Download PDFInfo
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- CN109781151A CN109781151A CN201910059582.3A CN201910059582A CN109781151A CN 109781151 A CN109781151 A CN 109781151A CN 201910059582 A CN201910059582 A CN 201910059582A CN 109781151 A CN109781151 A CN 109781151A
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Abstract
The present invention relates to the sensors of a kind of sensing element and elastic sensing element process integration, including elastic sensing element, sensing element and electrical resistance collection system, at least two parts are electrically connected with the electrical resistance collection system sensing element in-situ preparation respectively as electrode in the surface of the elastic sensing element, the sensing element.Wherein, the elastic sensing element is three-dimensional structure, the elastic sensing element include be arranged at one surface can carbonized polymeric layer, the sensing element can obtain by described after a part is carbonized in carbonized polymeric layer.The present invention directly carries out the preparation of sensing element on the elastic sensing element of three-dimensional structure, needed not move through between elastic sensing element and sensing element complicated approach carry out it is compound, thus realize the design of sensor elastic sensing element and sensing element, preparation, process it is integrated.
Description
Technical field
The present invention relates to sensor technical field more particularly to a kind of sensing element and elastic sensing element process integrations
Sensor and its preparation.
Background technique
Force-sensing sensor is the device or device that stress/strain signal is converted into exportable signal.Force-sensing sensor
Usually it is made of elastic sensing element and sensing element.Wherein elastic sensing element refer in sensor can direct feeling stress/
The part of strain, the shape of elastic sensing element have the configuration/shapes such as column, cantilever beam, bellows diaphragm, thin-walled cylinder, can root
Different structure type is selected or designed according to different measured parameters.Sensing element refer in sensor can will elasticity it is sensitive
The stress/strain of element output is converted to the part of the electric signal suitable for transmitting and measuring, and sensing element is the core of sensor
Element.Such as the metal/semiconductor foil gauge in resistance strain type sensor, the electrical-conductive nanometer in thick film piezoresistance sensor
Grain-ceramic composite membrane and electrical integrated (MEMS) sensing system of microcomputer.In existing force-sensing sensor, elasticity is sensitive
The design of element and sensing element, preparation be it is independent, sensing element by sintering, bonding etc. in conjunction with elastic sensing element,
This just considerably increases sensor design, the difficulty of preparation.For example, patent CN201711193503 discloses a kind of flexible sensing
The preparation method of device writes sensing element on the surface of flexible substrate, and prepared sensing element needs again first with elastic sensitivity
Part (such as cantilever beam) forms sensor after combining.Sensing element in the sensor utilizes the macromolecule and flexibility after in-situ carburization
Deformation signal is converted to electric signal output by physical and chemical performance difference between matrix, such as thermal expansion coefficient, hygroscopicity etc..
Summary of the invention
In order to solve the above technical problems, the object of the present invention is to provide a kind of sensing elements and elastic sensing element processing one
The sensor of body and its preparation, the present invention directly carry out the preparation of sensing element on the elastic sensing element of three-dimensional structure,
It is compound that complicated approach progress is needed not move through between elastic sensing element and sensing element, to realize sensor elastic sensing element
With sensing element design, preparation, processing it is integrated.
The first purpose of the invention is to provide the sensor of a kind of sensing element and elastic sensing element process integration,
Including elastic sensing element, sensing element and electrical resistance collection system, the sensing element in-situ preparation is in the sensitive member of the elasticity
The surface of part, at least two parts in the sensing element are electrically connected with the electrical resistance collection system respectively as electrode,
In, the elastic sensing element is three-dimensional structure, the elastic sensing element include be arranged at one surface can carbon
Change macromolecule layer, the sensing element can be obtained by described after a part is carbonized in carbonized polymeric layer.
Further, the sensor is piezoresistive transducer.
Further, the structure of the elastic sensing element is hollow/solid cylinder, column, diaphragm and bellows, cantilever
Beam, bourdon tube, bellows or torsion stick.
Further, the elastic sensing element further includes matrix, it is described can carbonized polymeric layer be set to described matrix
Surface on.
Further, the material of described matrix is metal, ceramics, plastics, glass.
Further, it is described can carbonized polymeric layer and matrix can be compound by modes such as bondings, can also can be carbonized
The solution of macromolecule layer is compound coated in matrix surface progress, and coating method can be drop coating, dip-coating, spraying and spin coating.
Further, it is described can carbonized polymeric layer material be polyimides, silicon carbide or graphene oxide.
Preferably, elastic sensing element is polyimide tube, the polyimides conduct of surface (outer surface or inner surface)
Can carbonized polymeric layer, be carbonized to a part therein, the polyimides after carbonization is used as sensing element.
Further, sensing element can outer surface with in-situ preparation in elastic sensing element or inner surface, sensing element
Pattern can be by the various patterns such as point or the linear or face shape that forms of line.
Further, the carbonization mode used for integrating laser carbonization, when integrating laser carbonization the wavelength of used laser light source be
10nm-1mm, laser power 200mW-10W.
Preferably, the wavelength of used laser light source is 193-1064nm when laser irradiation.Laser light source and its wavelength
Different selections can be made according to the absorbability of macromolecule matrix；Further, power when laser irradiation is preferably
500mW-1W.Other telecontrol equipment auxiliary laser carbonisations can be implemented, carry out laser in elastomer different parts to realize
Carbonization.
Further, one of sensor of the invention response stretching, compression, shearing, bending, torsion or several above
The composite force of power.
A second object of the present invention is to provide the biographies of a kind of above-mentioned sensing element and elastic sensing element process integration
The preparation method of sensor, comprising the following steps:
(1) elastic sensing element with three-dimensional structure is provided, the elastic sensing element includes being arranged at it
One surface can carbonized polymeric layer；
(2) by it is described can a part of carbonized polymeric layer be carbonized, in the surface of elastic sensing element original
Position generates sensing element；
(3) it using at least two parts of the sensing element as electrode, is electrically connected, fills with electrical resistance collection system respectively
Match and obtain after encapsulating the sensor of the sensing element Yu elastic sensing element process integration.
Further, in step (1), the elastic sensing element further includes matrix, it is described can carbonized polymeric layer set
It is placed on the surface of described matrix.The material of matrix is metal, ceramics, plastics, glass.
Further, it is described can carbonized polymeric layer and matrix can be compound by modes such as bondings, can also can be carbonized
The solution of macromolecule layer is compound coated in matrix surface progress, and coating method can be drop coating, dip-coating, spraying and spin coating.
Further, in step (1), the structure of elastic sensing element be hollow/solid cylinder, column, diaphragm and
Bellows, cantilever beam, bourdon tube, bellows or torsion stick.
Further, in step (1), it is described can carbonized polymeric layer material be polyimides, silicon carbide or oxidation
Graphene.
Preferably, in step (1), elastic sensing element is the ceramics of polyimide tube, surface coated with polyimides
Pipe, surface are coated with the plastic tube of glass tube or surface coated with polyimides of polyimides.
Further, in step (2), the carbonization mode used for integrating laser carbonization, when integrating laser carbonization used laser light
The wavelength in source is 10nm-1mm, laser power 200mW-10W.Integrating laser carbonization mode has preferable flexibility.Integrating laser carbonization
Be using superlaser and can between carbonized polymeric layer photothermal conversion physical phenomenon, in-situ carburization can carbonized polymeric layer it is raw
At carbon material.
Preferably, the wavelength of used laser light source is 193-1064nm when laser irradiation.Laser light source and its wavelength
Different selections can be made according to the absorbability of macromolecule matrix；Further, power when laser irradiation is preferably
500mW-1W.Other telecontrol equipment auxiliary laser carbonisations can be implemented, carry out laser in elastomer different parts to realize
Carbonization.
Further, sensing element can outer surface with in-situ preparation in elastic sensing element or inner surface, sensing element
Pattern can be by the various patterns such as point or the linear or face shape that forms of line.
Further, in step (3), the preparation method of electrode is point conducting resinl, point elargol, vapor deposition or welding manner.
Further, in step (3), the preparation of electrode can be two-probe method and be also possible to four electrode method.
Further, in step (3), the assembly and encapsulation of sensor-based system are according to different applications, on a sensor
Design accessory directly encapsulates sensor.
Third object of the present invention is the sensor for disclosing above-mentioned sensing element Yu elastic sensing element process integration
Application in one or more of detection stretching, compression, shearing, bending, torsion deform.
Further, sensor of the invention can be used for detecting vacuum degree, contact pressure, viscosity, wind direction or super
Sound wave.
According to the above aspect of the present invention, the present invention has at least the following advantages:
Using can the elastic sensing element that directly makes of carbonized polymeric, or using can carbonized polymeric and other matrixes
The elastic sensing element of compound preparation, the present invention carry out in-situ carburization on the elastic sensing element of above-mentioned three-dimensional structure, thus
Realize the design of sensor elastic sensing element and sensing element, preparation, process it is integrated.It is quick with sensor by in-situ carburization
The integrated design of sensing unit, technology of preparing are organically combined the flexibility of design of material with the design of sensor with preparation,
The design flexibility of sensor is improved, to realize the sensor orientation design of Demand-Oriented.
The above description is only an overview of the technical scheme of the present invention, in order to better understand the technical means of the present invention,
And can be implemented in accordance with the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention and the accompanying drawings.
Detailed description of the invention
Fig. 1 is the Sensor section structural schematic diagram in the embodiment of the present invention 1；
Fig. 2 is real-time pressure variation of the sensor when carrying out vacuum degree measurement, in vacuum tank in the embodiment of the present invention 1
Curve；
Fig. 3 is sensor in the embodiment of the present invention 1 when carrying out vacuum degree measurement, and the real time resistance of sensor changes bent
Line；
Fig. 4 is the structural schematic diagram of the sensor in the embodiment of the present invention 2；
Fig. 5 is the schematic diagram of the carbonization pattern of the sensor in the embodiment of the present invention 2；
Fig. 6 is contact pressure and sensor resistance variation relation figure in the embodiment of the present invention 2；
Fig. 7 is the sensor of 3 medium viscosity sensor viscosity of the embodiment of the present invention
Fig. 8 is the resistance of sensor and prepare liquid viscosity relationship figure in the embodiment of the present invention 3；
Fig. 9 is the photo in kind of wind-force wind detection sensor in the embodiment of the present invention 4；
Figure 10 is the phase of carbon line when the wind of different wind speed in the embodiment of the present invention 4 applies from the front and back of a carbon line
To resistance variations test result；
Figure 11 is that the sensor of two carbon lines is distributed in the embodiment of the present invention 4 for detecting the test knot of multiple wind directions
Fruit；
Figure 12 is the photo in kind in the embodiment of the present invention 5 for the sensor of underwater ultrasound signal detection；
Figure 13 is real time resistance testing result of the sensor under ultrasonic signal in the embodiment of the present invention 5；
Figure 14 is after carrying out Fourier transformation to the real time resistance signal of the sensor in the embodiment of the present invention 5 in frequency domain
Interior signal results；
Figure 15 is the carbonizing zone for carrying out integrating laser carbonization on the stainless steel tube with polyimides clad and preparing sensor
Domain schematic diagram；
Figure 16 is the carbonized region for carrying out integrating laser carbonization on the bourdon tube with polyimides clad and preparing sensor
Schematic diagram；
Description of symbols:
1- polyimide tube；2- carbon line；3- plectane；The first steel pipe of 4-；The second steel pipe of 5-；6- fixing end, 7- first are stainless
Steel plate；The second stainless steel plate of 8-；9- connecting tube.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiments of the present invention will be described in further detail.Implement below
Example is not intended to limit the scope of the invention for illustrating the present invention.
Embodiment 1
Present embodiments provide it is a kind of for detecting the sensor of vacuum degree, including elastic sensing element, sensing element and
Electrical resistance collection system, wherein elastic sensing element is polyimide tube 1, and sensing element is one be looped around on polyimide tube 1
Enclose carbon line 2, by obtaining after the corresponding position integrating laser carbonization of polyimide tube 1, the axial length of sensing element and polyimide tube 1
Direction is perpendicular, sensing element two at pass through elargol respectively and be connected with conducting wire, two conducting wires again respectively with electrical resistance collection system
It is connected, plectane sealing end is respectively adopted in the both ends of polyimide tube 1, and the material of plectane is polymethyl methacrylate (PMMA).
The preparation method of the sensor of the present embodiment the following steps are included:
With commercially available tubular polyimide (internal diameter × wall thickness=2.5mm × 0.06mm) for elastic sensing element, by polyamides
The sealing of imines pipe both ends, can carry out vacuum monitor.It is simulated using finite element analysis, optimizes laser inscription position, passed through
When sunykatuib analysis, linear integrating laser carbonization pattern and pipe axis angle theta are 90 °, the strain that sensing element is subject to is maximum, therefore, choosing
It selects the pattern and carries out integrating laser carbonization.Using rotating electric machine come auxiliary laser process, polyimide tube is horizontally arranged at electricity
On machine, laser head face polyimide tube keeps laser head position constant, is rotated using motor and polyimide tube is driven to rotate,
The carbonization pattern (sensing element) of annular (θ=90 °) can be then formed outside polyimide tube.Zlasing mode is to get mould ready
Formula, laser power 0.7W, tubular matrix linear velocity are 12.3mm/s, and it is as shown in Figure 1 to obtain carbonization pattern.In circular carbon
The both ends of one diameter of line bond conducting wire with elargol respectively, and 5min is heated at 150 DEG C solidifies conductive silver paint, carry out two collimation methods
The other end of the preparation of electrode, electrode is electrically connected with electrical resistance collection system.In order to carry out vacuum monitor, by polyimide tube into
Row sealing.Polyimide tube both ends are inserted into polymethyl methacrylate (PMMA) plectane (diameter with circular groove respectively
× thickness=5mm × 2.5mm) in, circular groove depth 1mm, width and internal diameter and tubular matrix cross-sections match, respectively 0.06mm
And 2.5mm, seam crossing epoxy glue seal, the device after sealing is placed 12 hours or more at 50 DEG C keeps epoxy glue completely solid
Change.In application, sensor is put into vacuum tank, carry out vacuum monitor is vacuumized, while with digital multimeter (electrical resistance collection
System) record resistance variation.The resistance of air pressure versus time curve and sensor manufactured in the present embodiment in vacuum tank
Versus time curve difference is as shown in Figures 2 and 3.By result as it can be seen that when air pressure changes over time, the sensing of the present embodiment
The resistance of device can also change therewith, illustrate that the sensor of the present embodiment can incude the variation of vacuum degree.
Embodiment 2
It present embodiments provides a kind of for detecting the sensor of touch pressure, including elastic sensing element, sensing element
With electrical resistance collection system, wherein elastic sensing element is polyimide tube 1, and sensing element is along 1 axial length of polyimide tube
The carbon line 2 that direction extends, by being obtained after the corresponding position integrating laser carbonization of polyimide tube 1, sensing element and polyimides
The axial length direction of pipe 1 is parallel, and the both ends of carbon line 2 pass through elargol respectively and are connected with conducting wire, two conducting wires again respectively with electricity
Resistance acquisition system is connected, and the sealing end of plectane 3 is respectively adopted in the both ends of polyimide tube 1, and the material of plectane 3 is polymethylacrylic acid
Methyl esters (PMMA).
The preparation method of the sensor of the present embodiment the following steps are included:
With commercially available tubular polyimide (internal diameter × wall thickness=2.5mm × 0.06mm) for elastic sensing element, design is passed
Sensing system, schematic device are as shown in Figure 4.It is simulated using finite element analysis, optimizes laser inscription position, by simulation point
When analysis, linear integrating laser carbonization pattern and pipe axis angle theta are 0 °, the strain that sensing element is subject to is maximum, therefore, selects the pattern
Integrating laser carbonization is carried out, zlasing mode is cut mode, laser power 0.7W, laser speed 12.3mm/s, obtained sensing
Element is as shown in Figure 5.Conducting wire is bonded with elargol respectively at the both ends of carbon line 2,5min is heated at 150 DEG C makes conductive silver Qi Gu
Change, carry out the preparation of two collimation method electrodes, electrode is electrically connected with external electrical resistance collection system.1 both ends of polyimide tube are distinguished
Insertion has in polymethyl methacrylate (PMMA) plectane 3 (diameter × thickness=15mm × 2.5mm) of circular groove, round
Groove depth 1mm, width and internal diameter and tubular matrix cross-sections match, respectively 0.06mm and 2.5mm, junction are solid with epoxy glue
Fixed, placing 12 hours or more at 50 DEG C is fully cured epoxy glue, obtains contact pressure sensor (Fig. 4).In application, will
Sensor vertical is placed, and pressure perpendicular is applied on plectane 3, while recording resistance variations, between resistance variations and pressure
Relationship is as shown in Figure 6.
Embodiment 3
It present embodiments provides a kind of for detecting the sensor of viscosity, including elastic sensing element, sensing element and electricity
Hinder acquisition system, wherein elastic sensing element is polyimide tube 1, and sensing element is that spiral is arranged on 1 surface of polyimide tube
Carbon line 2, by being obtained after the corresponding position integrating laser carbonization of polyimide tube 1, the inclined direction and polyimides of the carbon line of spiral
The angle in the axial length direction of pipe 1 is 45 °, and the both ends of carbon line 2 pass through elargol respectively and are connected with conducting wire, and two conducting wires are distinguished again
It is connected with electrical resistance collection system, the both ends of polyimide tube 1 are connect with one end of the first steel pipe 4 and the second steel pipe 5 respectively, the
The other end of one steel pipe 4 is fixedly connected with fixing end 6, and the side of the other end of the second steel pipe 5 and the first stainless steel plate 7 is fixed to be connected
It connects, the other side of the first stainless steel plate 7 is opposite to be arranged in parallel with the second stainless steel plate 8, the first stainless steel plate 7 and the second stainless steel
One is formed between plate 8 for carrying the cavity of testing liquid, the other side of the second stainless steel plate 8 passes through a connecting tube 9 connection rotation
Rotating motor, rotating electric machine is for driving the rotation of the second stainless steel plate 8.
The preparation method of the sensor of the present embodiment the following steps are included:
With commercially available tubular polyimide (internal diameter × wall thickness=2.5mm × 0.06mm) for elastic sensing element, design is flat
The sensor of andante formula, structure are as shown in Figure 7.It is simulated using finite element analysis, optimizes laser inscription position, by simulation
When analysis, linear integrating laser carbonization pattern and pipe axis angle theta are 45 °, the strain that sensing element is subject to is maximum, and therefore, selection should
Pattern carries out integrating laser carbonization.It is processed, polyimide tube is horizontally fixed on motor, laser head using rotating electric machine auxiliary laser
Face polyimide tube, motor rotation combine laser beam horizontal movement, can prepare spiral carbon line on tubular matrix surface, swash
Optical mode is that cutting laser power is 0.7W, and laser level speed is 3.5mm/s, and polyimide tube linear velocity is 3.5mm/
S, laser are moved horizontally along the tube axial direction of polyimide tube, and the distance moved horizontally is 10mm.It is used respectively at the both ends of carbon line
Elargol bonds conducting wire, and 5min is heated at 150 DEG C solidifies conductive silver paint, carries out the preparation of two collimation method electrodes, electrode is again and outside
The electrical resistance collection system in portion is electrically connected.It is designed according to device, sensor is assembled, by one end of polyimide tube and fixation
End is fixedly connected, and other end freedom simultaneously connects circular first stainless steel plate (diameter × thickness=38mm × 0.2mm), and first is not
It becomes rusty circular second stainless steel plate of steel plate face one (diameter × thickness=58mm × 0.2mm), the second stainless steel plate and first is not
Rust steel plate is parallel to each other, and the second stainless steel plate is connect with rotating electric machine, drives the second stainless steel plate to carry out by rotating electric machine
Rotation, testing liquid are clipped between the second stainless steel plate and the first stainless steel plate, and liquid is by viscous when the second stainless steel plate rotates
Resistance hysteresis, being transmitted on polyimide tube makes sensor by twisting force, one timing of revolving speed, the size and liquid viscosity of torsion
It is related.The junction of all components is fixed with epoxy glue, and placing 12 hours or more at 50 DEG C is fully cured epoxy glue.This reality
It applies and the glycerine water solution of different quality containing is selected to carry out viscosity test in example.When test, the first stainless steel plate is remained stationary, the
Two stainless steel plates are connected to motor to be rotated with the angular speed of 5.8rad/s, between the first stainless steel plate and the second stainless steel plate
Gap be 3mm, testing liquid is full of between two plates, while recording resistance variations, between resistance variations and fluid viscosity to be measured
Relationship it is as shown in Figure 8.Fluid viscosity to be measured is measured with Ubbelohde viscometer.The result shows that the electricity of the viscosity sensor of the present embodiment
Resistance is in a linear relationship with fluid viscosity to be measured, and the viscosity value of prepare liquid can be conversed according to the resistance value of sensor.
Embodiment 4
It present embodiments provides a kind of for detecting the sensor of wind direction, including elastic sensing element, sensing element
With electrical resistance collection system, wherein elastic sensing element is polyimide tube 1, and sensing element is along 1 axial length of polyimide tube
Two carbon lines 2 that direction extends, by being obtained after the corresponding position integrating laser carbonization of polyimide tube 1, carbon line 2 and polyimide tube 1
Axial length direction it is parallel, on the cross section of polyimide tube 1, the angle of two carbon lines 2 is 90 °, every carbon line 2
Both ends pass through elargol respectively and are connected with conducting wire, and two conducting wires are connected with electrical resistance collection system respectively again, and the one of polyimide tube 1
End is connected with several flabellums, and the other end is connected and fixed device.
The preparation method of the sensor of the present embodiment the following steps are included:
With commercially available tubular polyimide (internal diameter × wall thickness=2.5mm × 0.06mm) for elastic sensing element, carbon is carried out
Change pattern and sensor design.Tubular sensor is disposed vertically, and one end is fixed, and the other end is free, sensor when by wind-force,
Matrix generates Bending Deformation, causes the variation of sensor resistance.In order to experience wind-force to a greater extent, four are devised along vertical
The flabellum of direction setting, each flabellum is orthogonal in the horizontal direction, and the angle between every two flabellum in the horizontal direction
It is 90 °, four flabellums are arranged in 3 points, 6 points, 9 points and ten two directions of tubular matrix respectively.The material of flabellum is PET,
Length × width x thickness=6 × 9 × 0.5mm.Two are distributed in polyimide tube root along the carbon line that polyimide tube pipe axis is write
Ten two points and 3 directions.The long 10mm of carbon line, integrating laser carbonization power are 0.7W, and laser speed is 12.3mm/s.In every carbon line
Both ends respectively with silver paint bond conducting wire, at 150 DEG C heat 5min make conductive silver paint solidify, carry out two collimation method electrodes preparation,
The other end of electrode is electrically connected with electrical resistance collection system.Two steel pipes are inserted into the both ends along polyimide tube to respectively respectively
Flabellum and fixed device are connected, wind-force direction detection sensor is prepared.Each junction in sensor is all carried out with epoxy glue
It is fixed, and epoxy glue is fully cured placing 12 hours or more at 50 DEG C, photo in kind such as Fig. 9 of resulting device.By three
The air-flow of a speed blows to a wherein carbon line from front and back respectively, and the resistance variations of the carbon line are as shown in Figure 10, horizontal line
Upper square column is towards wind as a result, lower post is the result backwards to wind, the results showed that, it is relatively electric when wind direction is towards the carbon line
Resistance is higher than 1, and wind-force is bigger, and resistance variations are bigger；When wind direction is backwards to the carbon line, relative resistance is less than 1, and wind-force is bigger,
Resistance variations are bigger.Further, change different wind directions, tested and analyzed by the resistance variations to two carbon lines, tie
Fruit shows that the resistance of two carbon lines changes, and can tell 8 wind directions, and result is as shown in figure 11.
Embodiment 5
It present embodiments provides a kind of for detecting the sensor of underwater ultrasound, including elastic sensing element, sensing element
With electrical resistance collection system, wherein elastic sensing element is polyimide tube 1, is offered on polyimide tube 1 generally rectangular shaped
Opening is provided with sensing element on the inner surface of opposite polyimide tube 1 with being open, and sensing element is the rectangle being made of point
Pattern, sensing element by obtaining after the corresponding position integrating laser carbonization of polyimide tube 1, diagonally lead to respectively by two for passing rectangular patterns
It crosses elargol and is connected with conducting wire, the both ends of polyimide tube 1 and opening use epoxy glue seal, a portion of two conducting wires
It is sealed in polyimide tube 1, another part is connected with external electrical resistance collection system respectively again.
The preparation method of the sensor of the present embodiment the following steps are included:
With commercially available tubular polyimide (internal diameter × wall thickness=2.5mm × 0.06mm) for elastic sensing element, pipe is utilized
The hollow structure of shape carries out integrating laser carbonization in inside pipe wall, can form physical protection, sealing to carbon structure naturally after tube body sealing
After sensor-based system can be immersed in the water, carry out the detection of underwater ultrasound.The a length of 20mm of polyimide tube, with laser in tubulose base
Ablation goes out long 4.4mm, the opening of wide 1.2mm on body, and laser is set as scan pattern, laser power 1W, and laser speed is
1mm/s, sweep spacing 0.1mm.When ablation is open, it is inserted into a waddy in polyimide tube, prevents polyimide tube phase
To the side inner wall of opening by laser damage.Polyimides inside pipe wall is penetrated into order to enable laser to be accurately positioned from opening
Integrating laser carbonization is carried out, keeps extracting waddy out in the case that polyimide tube is motionless after ablation.In inside pipe wall integrating laser carbonization
The face shape pattern (3 × 3mm) that is made of point of pattern, as shown in figure 12.Zlasing mode is to get mode ready, and laser power is
0.7W, dotting time 0.015s are divided into 0.1mm between getting ready.In face, two of shape pattern diagonally bond conducting wire with elargol, in
5min is heated at 150 DEG C solidifies conductive silver paint, carries out the preparation of two collimation method electrodes.Finally by opening and polyimide tube
Both ends are sealed with epoxy glue, and one end of conducting wire is sealed in pipe, and outside other end protruded tube, and placement 12 is small at 50 DEG C
When more than epoxy glue is fully cured.Conducting wire outside protruded tube is connect with digital multimeter, will be packaged after sensor be put into
In water bath sonicator washer, equipment is opened, while acquiring the real time resistance of sensor with digital multimeter, as a result such as Figure 13 and figure
Shown in 14.
Embodiment 6
As shown in figure 15, using stainless steel tube as matrix, dip-coating 20%PAA (polyacrylic acid) solution on stainless steel tube, warp
It, can be stainless after crossing heating 30min at 100 DEG C, heating the program curing for heating 60min at 90min and 300 DEG C at 150 DEG C
Polyimides clad is obtained on steel pipe, that is, forms elastic sensing element.To the polyimides clad on elastic sensing element
After carrying out integrating laser carbonization, sensing element can be formed in situ, the sensor being further prepared can be used for the biography such as temperature, pressure
Sense.
Embodiment 7
Using bourdon tube as matrix, dip-coating 20%PAA (polyacrylic acid) solution on stainless steel tube, by being heated at 100 DEG C
30min, after heating the program curing of 60min at 150 DEG C at 90min and 300 DEG C of heating, polyamides Asia can be obtained on bourdon tube
Amine clad, that is, form elastic sensing element.Be carbonized pattern (sensing element) can with laser inscription bourdon tube different parts,
As shown in figure 15.Obtaining the sensor being further prepared into can be used for gas pressure sensing.
The above is only a preferred embodiment of the present invention, it is not intended to restrict the invention, it is noted that for this skill
For the those of ordinary skill in art field, without departing from the technical principles of the invention, can also make it is several improvement and
Modification, these improvements and modifications also should be regarded as protection scope of the present invention.
Claims (10)
1. the sensor of a kind of sensing element and elastic sensing element process integration, it is characterised in that: including elastic sensitive member
Part, sensing element and electrical resistance collection system, the sensing element in-situ preparation is in the surface of the elastic sensing element, the biography
At least two parts in sensing unit are electrically connected with the electrical resistance collection system respectively as electrode, wherein the elasticity is sensitive
Element is three-dimensional structure, the elastic sensing element include be arranged at one surface can carbonized polymeric layer, it is described
Sensing element can be obtained by described after a part is carbonized in carbonized polymeric layer.
2. the sensor of sensing element according to claim 1 and elastic sensing element process integration, it is characterised in that:
The sensor is piezoresistive transducer.
3. the sensor of sensing element according to claim 1 and elastic sensing element process integration, it is characterised in that:
The structure of the elastic sensing element is column, diaphragm and bellows, cantilever beam, bourdon tube, bellows or torsion stick.
4. the sensor of sensing element according to claim 1 and elastic sensing element process integration, it is characterised in that:
The elastic sensing element further includes matrix, it is described can carbonized polymeric layer be set on the surface of described matrix.
5. the sensor of sensing element according to claim 1 and elastic sensing element process integration, it is characterised in that:
It is described can carbonized polymeric layer material be polyimides, silicon carbide or graphene oxide.
6. the sensor of sensing element according to claim 1 and elastic sensing element process integration, it is characterised in that:
The carbonization mode used for integrating laser carbonization, when integrating laser carbonization the wavelength of used laser light source be 10nm-1mm, laser power is
200mW-10W。
7. the sensor of sensing element according to claim 1 and elastic sensing element process integration, it is characterised in that:
The sensor is used to measure answering for one of drawing force, compressing force, shearing force, bending force and twisting resistance or above several power
With joint efforts.
8. a kind of sensing element of any of claims 1-7 and the sensor of elastic sensing element process integration
Preparation method, it is characterised in that: the following steps are included:
(1) elastic sensing element with three-dimensional structure is provided, the elastic sensing element includes being arranged at one
Surface can carbonized polymeric layer；
(2) by it is described can a part of carbonized polymeric layer be carbonized, with raw in the surface in situ of the elastic sensing element
At sensing element；
(3) using at least two parts of the sensing element as electrode, be electrically connected respectively with electrical resistance collection system, assembly and
The sensor of the sensing element Yu elastic sensing element process integration is obtained after encapsulation.
9. preparation method according to claim 8, it is characterised in that: in step (1), the elastic sensing element is also wrapped
Include matrix, it is described can carbonized polymeric layer be set on the surface of described matrix.
10. sensing element of any of claims 1-7 and the sensor of elastic sensing element process integration are being examined
Survey the application in the composite force of one or more of drawing force, compressing force, shearing force, bending force, twisting resistance.
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