CN107044898A - A kind of six-dimension force sensor of flexible body structure - Google Patents
A kind of six-dimension force sensor of flexible body structure Download PDFInfo
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- CN107044898A CN107044898A CN201710190373.3A CN201710190373A CN107044898A CN 107044898 A CN107044898 A CN 107044898A CN 201710190373 A CN201710190373 A CN 201710190373A CN 107044898 A CN107044898 A CN 107044898A
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- foil gauge
- spring beam
- branch
- center
- horizontal resiliency
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
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- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The invention discloses a kind of six-dimension force sensor of flexible body structure, including horizontal resiliency beam, the vertical spring beam in center, loading axis and outer ring fixed station, horizontal resiliency beam is decussate texture, horizontal resiliency beam includes four isometric branches, one end of the vertical spring beam in center is fixed on the center of horizontal resiliency beam decussate texture, and it is vertical with the face where decussate texture, loading axis is arranged on the other end of the vertical spring beam in center, outer ring fixed station is to be set in the circle shape part on the outside of horizontal resiliency beam, the end of four branches of horizontal resiliency beam is fixed on the medial surface of outer ring fixed station, the end of four branches of horizontal resiliency beam is S type structures, foil gauge is also covered with the vertical spring beam of horizontal resiliency beam and/or center.The end of horizontal resiliency beam branch of the present invention is S type structures, makes it in the active force by respective direction as flexible link；The design of the vertical spring beam in center reduces retinoic acid syndrome, so that simplied decoupling algorithm, improves measurement accuracy.
Description
Technical field
The invention belongs to sensor technical field, more particularly to a kind of six-dimension force sensor of flexible body structure.
Background technology
What six-dimension force sensor was measured is the three-dimensional orthogonal power (Fx, Fy, Fz) and three-dimensional of cartesian coordinate system three dimensions
Orthogonal torque (Mx, My, Mz), due to its dynamometry abundant information, measurement accuracy is high the features such as, be mainly used in power and power-position control
Occasion processed, such as end effector of robot, the detection of vehicle traveling process wheel power, Contour extraction, precision assembly, two hands coordination etc.,
Especially in aviation robot, the occasion such as space station Docking simulation has played extremely important effect.
Cross beam type structure is a kind of most forms of current six-dimension force sensor use, and resistance-strain type of dynamometer principle
It is that most one kind is applied in current six-dimension force sensor.A kind of cross beam type six-dimensional force is disclosed in patent CN103528746A
Sensor elastomer, it is made up of four inner beams, four Wai Liang and four overload protection beams etc., can improve sensitivity, reduces
Retinoic acid syndrome, but structure is relative complex.A kind of strain-type six-dimensional force of compact conformation is disclosed in patent CN205333238U
Sensor, it includes base elastomer, rood beam elastomer etc., and base elastomer has a cavity, and rood beam elastomer is located at
In cavity, overall structure is more compact.
In the world to more than the study hotspot of multiple dimension force/moment sensor in Cleaning Principle, method innovation and novel elastomer
In terms of structure design.And the distinctive retinoic acid syndrome of multiple dimension force/moment sensor turns into the master that multiple dimension force/moment sensor is present
Problem is wanted, measurement accuracy is govern, so as to directly affect follow-up force feedback and power control performance.
The content of the invention
Goal of the invention：In order to reduce the measurement error of six-dimension force sensor, the present invention provides a kind of flexible body structure
Six-dimension force sensor.
Technical scheme：A kind of six-dimension force sensor of flexible body structure, including horizontal resiliency beam, center are vertical spring
Beam, loading axis and outer ring fixed station, the horizontal resiliency beam are decussate texture, and horizontal resiliency beam includes four isometric branches,
One end of the vertical spring beam in center is fixed on the center of horizontal resiliency beam decussate texture, and with decussate texture institute
Face it is vertical, the loading axis is arranged on the other end of the vertical spring beam in center, and the outer ring fixed station is is set in level
Circle shape part on the outside of spring beam, outer ring fixed station includes medial surface, and the end of four branches of horizontal resiliency beam is fixed on
On the medial surface of outer ring fixed station, the ends of four branches of horizontal resiliency beam is S type structures, the horizontal resiliency beam and/
Or also it is covered with foil gauge on the vertical spring beam in center.
Operation principle：When sensor is by Y-direction directed force F y, two X occur bending and deformation to spring beam branch, and two
GeYXiang spring beams branch occurs tension and compression deformation and its variable quantity very little is negligible, and now S types structure in its end can regard flexible ring as
Section, the Wheatstone full-bridge circuits that Fy can be constituted by being pasted on X to the foil gauge of spring beam left and right side are measured；Work as biography
When sensor is by Z-direction opplied moment Mz, two X occur bending and deformation to spring beam branch, and two X are to spring beam branch
The deformation produced at the same position of left and right side is equal in magnitude, in opposite direction, and Mz can be left to spring beam by being pasted on X
The Wheatstone full-bridge circuits of the foil gauge composition of right flank are measured.
When sensor is by Z-direction directed force F z, Liang GeYXiang spring beams branch occurs bending and deformation, and two Y-direction bullets
The deformation produced at the same position on the upper and lower surface of Xing Liang branches is equal in magnitude, in opposite direction, and Fz can be by being pasted on two
The full-bridge circuit of the foil gauge composition on the upper and lower surface of Y-direction spring beam branch is measured；When sensor is by X-direction torque Mx, two
GeYXiang spring beams branch is occured bending and deformation, and two X twist deformation to spring beam branch, and deflection very little can be neglected
Slightly, the full-bridge circuit that Mx can be constituted by being pasted on the foil gauge of Liang GeYXiang spring beams branch upper and lower surface is measured.
When sensor is by X-direction directed force F x or Y-direction torque My, the vertical spring beam in center occurs large curved and become
The strain produced at shape, and the same position of the forward and backward side of the vertical spring beam in center is equal in magnitude, in opposite direction, Fx and My
The bridge that can be constituted by being pasted on the foil gauge of the center forward and backward side of vertical spring beam is measured.
Beneficial effect：A kind of six-dimension force sensor for flexible body structure that the present invention is provided, horizontal resiliency beam branch
Tip designs be S type structures, make it in the active force by respective direction as flexible link；Compared to more existing cross
Beam type six-dimension force sensor, many vertical spring beams in Liao Yige centers, directed force F x and the torque of Y-direction to experience X-direction
My；In addition to pasting foil gauge in four horizontal resiliency beam branches, at center, vertical spring beam is towards Y-direction spring beam branch
Two sides are also covered with two pairs of foil gauges, reduce measurement error；Existing cross beam type six-dimension force sensor at three and
There is coupling (between such as Fy, Mz, Fx, Fz, Mx, between My) between more than three directions, and the flexible body structure of this patent
Only be present coupling (between such as Fy, Mz, Fz, between Mx, Fx, between My) in six-dimension force sensor, reduce between both direction between dimension
Coupling, so as to simplify decoupling algorithm, improves measurement accuracy.
Brief description of the drawings
Fig. 1 is the six-dimension force sensor overall structure diagram of the flexible body structure of the present invention.
Embodiment
The invention will be further described with specific embodiment below in conjunction with the accompanying drawings.
As shown in figure 1, for convenience of description direction, setting up a dimensional Cartesian coordinates system as depicted.
As shown in figure 1, the six-dimension force sensor of flexible body structure includes horizontal resiliency beam 1, the vertical spring beam in center
2nd, loading axis 3 and outer ring fixed station 4, the horizontal resiliency beam 1 are decussate texture, and horizontal resiliency beam 1 includes four isometric point
Branch, one end of the vertical spring beam 2 in center is fixed on the center of the decussate texture of horizontal resiliency beam 1, and and cross
Face where structure is vertical, and the loading axis 3 is arranged on the other end of the vertical spring beam 2 in center, and the outer ring fixed station 4 is set
The circle shape part in the outside of horizontal resiliency beam 1 is located at, outer ring fixed station 4 includes medial surface 41, four branches of horizontal resiliency beam 1
End be fixed on the medial surface 41 of outer ring fixed station 4, the end of four branches of horizontal resiliency beam 1 is S type structures, institute
State and be also covered with foil gauge on the vertical spring beam of horizontal resiliency beam and/or center.The thickness of the S types structure is 1mm.Level bullet
The tip designs of Xing Liang branches are S type structures, it as flexible link, that is, is played floating in the active force by respective direction
Dynamic beam action.Compared to existing cross beam type six-dimension force sensor, the vertical spring beam 2 in many Liao Yige centers of the present embodiment is used
To experience the directed force F x of X-direction and the torque M y of Y-direction.
Four branches of the vertical spring beam 2 in center and horizontal resiliency beam 1 are that cross section is square quadrangular.
The loading axis 3 is cylindrical structure.The outer ring fixed station 4 is provided with 8 upper lower through-holes, for fixing sensor.
Four branches of the horizontal resiliency beam 1 include two X to spring beam branch 11 and Liang GeYXiang spring beams branch
To spring beam branch 11 point-blank, point-blank, two X are to bullet for Liang GeYXiang spring beams branch 12 by 12, two X
The opening direction of S type structures in Xing Liang branches 11 is identical, the opening direction of the S type structures in Liang GeYXiang spring beams branch 12
It is identical and vertical to the opening direction of the S type structures in spring beam branch 11 with X.In the present embodiment, the X divides to spring beam
The opening direction of the S type structures of 11 ends of branch is left and right directions；The opening of the S type structures of the end of Y-direction spring beam branch 12
Direction is above-below direction.
In addition, the present embodiment also has designed to the position that pastes of foil gauge.
Described two X are identical and be covered with identical foil gauge in symmetrical position to the structure of spring beam branch 11；
One of X includes in left surface 111 and right flank (being blocked in figure, not shown), left surface 111 to spring beam branch 11
It is covered with heart axis on the first foil gauge 01 and the second foil gauge 02, right flank and the first foil gauge 01 and the second foil gauge 02
Corresponding position is covered with the 3rd foil gauge and the 4th foil gauge (being blocked in figure, not shown) respectively；Another X is to spring beam
Answered for corresponding with the first foil gauge 01, the second foil gauge 02, the 3rd foil gauge, the 4th foil gauge respectively four in branch 11 '
Become piece and be designated as the 13rd foil gauge 013, the 14th foil gauge 014, the 15th foil gauge, the 16th foil gauge.
Described two Y-direction spring beam branched structures are identical and are covered with identical foil gauge in symmetrical position；Its
In a GeYXiang spring beams branch 12 include upper surface 121 and lower surface (being blocked in figure, not shown), the center of upper surface 121
It is covered with axis on the 5th foil gauge 05 and the 6th foil gauge 06, lower surface and 06 pair of the 5th foil gauge 05 and the 6th foil gauge
The position answered is covered with the 7th foil gauge and the 8th foil gauge (being blocked in figure, not shown) respectively；Another Y-direction spring beam point
(it is blocked, does not show in figure with the 5th foil gauge 05, the 6th foil gauge 06, the 7th foil gauge, the 8th foil gauge respectively in branch 12 '
Going out) four corresponding foil gauges are designated as the 17th foil gauge 017, the 18th foil gauge 018, the 19th foil gauge, the 20th
Foil gauge (is blocked, not shown) in figure.
The vertical spring beam 2 in center includes leading flank 21, trailing flank (being blocked in figure, not shown), the and of left surface 22
Right flank (is blocked, not shown) in figure, and leading flank 21 is respectively facing two X to spring beam branch 11, leading flank with trailing flank
It is covered with 21 central axis on the 9th foil gauge 09 and the tenth foil gauge 010, trailing flank and the 9th foil gauge 09 and the tenth
The corresponding position of foil gauge 010 is covered with the 11st foil gauge and the 12nd foil gauge (being blocked in figure, not shown) respectively.
All foil gauges are identical foil gauge.If the first foil gauge 01 is to the distance of Y-direction spring beam branch 12
D1, if the distance of the 5th foil gauge 05 to the vertical spring beam 2 in center is d2, if the 9th foil gauge 09 arrives X to spring beam branch 11
Distance be d3, wherein d1=d2=d3；If the distance that the second foil gauge 02 arrives Y-direction spring beam branch 12 is d4, if the 6th should
Become the distance of the vertical spring beam 2 in Pian06Dao centers into d5, if distance of the tenth foil gauge 10 to X to spring beam branch 11 is d6,
Wherein d4=d5=d6；And first foil gauge 01 arrive Y-direction spring beam to distance and the second foil gauge 02 of Y-direction spring beam branch 12
The distance of branch 12 is unequal, i.e. d1 ≠ d4.
This 20 foil gauges, which have altogether, constitutes six groups of foil gauge groups.Each foil gauge group is by being electrically connected composition one
Wheatstone full-bridges or half-bridge circuit, power or torque for one dimension of measurement space.
First foil gauge 01, the 3rd foil gauge, the 13rd foil gauge 013 and the 15th foil gauge constitute the first foil gauge
Group；Second foil gauge 02, the 4th foil gauge, the 14th foil gauge 014 and the 16th foil gauge constitute the second foil gauge group.Work as biography
Sensor by Y-direction active force or Z-direction torque when, the horizontal resiliency beam of X-direction can be produced compared with large deformation, therefore,
First, the Wheatstone bridge circuits of two foil gauge groups composition are respectively used to measure the directed force F y of Y-direction and the torque of Z-direction
Mz size.
5th foil gauge 05, the 7th foil gauge, the 17th foil gauge 017 and the 19th foil gauge constitute the 3rd foil gauge
Group；6th foil gauge 06, the 8th foil gauge, the 18th foil gauge 018 and the 20th foil gauge constitute the 4th foil gauge group.Work as biography
Sensor by Z-direction active force or X-direction torque when, the horizontal resiliency beam of Y-direction is produced compared with large deformation, therefore, third and fourth
The Wheatstone bridge circuits of foil gauge group composition are respectively used to measure the big of the Z-direction directed force F z and torque Mx of X-direction
It is small.
9th foil gauge 09 and the 11st foil gauge at the back side the 5th foil gauge group of composition, the tenth foil gauge 10 and the back side
12nd foil gauge constitutes the 6th foil gauge group.When sensor is by X-direction active force or Y-direction torque, center vertical bullet
Property beam produce compared with large deformation, therefore, the Wheatstone bridge circuits of the five, the six foil gauge groups composition are respectively used to measure X side
To directed force F x and Y-direction torque My size.
The structure in the relevant position of four horizontal resiliency beam branches in addition to being pasted with foil gauge group, in the vertical bullet in center
Two sides of the property beam 2 towards X to spring beam branch are also covered with two pairs of foil gauges, and measurement error is relatively small.The sensor
There is coupling (between such as Fy, Mz, Fz, between Mx, Fx, between My) in structure, decoupling algorithm can be made simple between both direction
Change, be more prone to decoupling.
Claims (10)
1. a kind of six-dimension force sensor of flexible body structure, it is characterised in that vertical including horizontal resiliency beam (1), center
Spring beam (2), loading axis (3) and outer ring fixed station (4), the horizontal resiliency beam (1) are decussate texture, horizontal resiliency beam
(1) four isometric branches are included, one end of the vertical spring beam in center (2) is fixed on horizontal resiliency beam (1) decussate texture
Center, and vertical with the face where decussate texture, the loading axis (3) is arranged on the vertical spring beam in center (2)
The other end, the outer ring fixed station (4) is to be set in the circle shape part on the outside of horizontal resiliency beam (1), outer ring fixed station (4) bag
Medial surface (41) is included, the end of four branches of horizontal resiliency beam (1) is fixed on the medial surface of outer ring fixed station (4) (41),
The end of four branches of horizontal resiliency beam (1) is S type structures, the horizontal resiliency beam (1) and/or the vertical spring beam in center
(2) foil gauge is also covered with.
2. the six-dimension force sensor of flexible body structure according to claim 1, it is characterised in that the center is vertical
Four branches of spring beam (2) and horizontal resiliency beam (1) are that cross section is square quadrangular.
3. the six-dimension force sensor of the flexible body structure according to right wants 1 or 2, it is characterised in that the level bullet
Property beam (1) four branches include two X to spring beam branch (11) and Liang GeYXiang spring beams branch (12), two X are to elasticity
Point-blank, point-blank, two X are to spring beam branch for Liang GeYXiang spring beams branch (12) for beam branch (11)
(11) opening direction of the S type structures on is identical, and the opening direction of the S type structures in Liang GeYXiang spring beams branch (12) is identical
And it is vertical to the opening direction of the S type structures in spring beam branch (11) with X.
4. the six-dimension force sensor of flexible body structure according to claim 3, it is characterised in that described two X to
Spring beam branch (11) structure is identical and is covered with identical foil gauge in symmetrical position；X is to spring beam branch (11)
Including left surface (111) and right flank, the first foil gauge (01) and the second strain are covered with the central axis of left surface (111)
Position corresponding with the first foil gauge (01) and the second foil gauge (02) is covered with the 3rd foil gauge respectively on piece (02), right flank
With the 4th foil gauge；
Described two Y-direction spring beam branched structures are identical and are covered with identical foil gauge in symmetrical position；Y-direction elasticity
Beam branch (12) includes being covered with the 5th foil gauge (05) on upper surface (121) and lower surface, the central axis of upper surface (121)
With the 6th foil gauge (06), position corresponding with the 5th foil gauge (05) and the 6th foil gauge (06) is covered with respectively on lower surface
7th foil gauge and the 8th foil gauge；
The vertical spring beam in center (2) includes leading flank (21), trailing flank, left surface (22) and right flank, leading flank (21)
Two X are respectively facing to spring beam branch (11) with trailing flank, and the 9th foil gauge is covered with the central axis of leading flank (21)
(09) and the tenth foil gauge (10), position corresponding with the 9th foil gauge (09) and the tenth foil gauge (10) is pasted respectively on trailing flank
It is covered with the 11st foil gauge and the 12nd foil gauge.
5. the six-dimension force sensor of flexible body structure according to claim 4, it is characterised in that the first foil gauge
(01), the second foil gauge (02), the 3rd foil gauge, the 4th foil gauge, the 5th foil gauge (05), the 6th foil gauge (06), the 7th
Foil gauge, the 8th foil gauge, the 9th foil gauge (09), the tenth foil gauge (10), the 11st foil gauge and the 12nd foil gauge are equal
For identical foil gauge.
6. the six-dimension force sensor of flexible body structure according to claim 4, it is characterised in that set the first foil gauge
(01) distance to Y-direction spring beam branch (12) is d1, if the distance of the 5th foil gauge (05) to the vertical spring beam in center (2) is
D2, if distance of the 9th foil gauge (09) to X to spring beam branch (11) is d3, wherein d1=d2=d3；If the second foil gauge
(02) distance to Y-direction spring beam branch (12) is d4, if the distance of the 6th foil gauge (06) to the vertical spring beam in center (2) is
D5, if distance of the tenth foil gauge (10) to X to spring beam branch (11) is d6, wherein d4=d5=d6；And d1 ≠ d4.
7. the six-dimension force sensor of flexible body structure according to claim 1 or 2, it is characterised in that the S types knot
The thickness of structure is 1mm.
8. the six-dimension force sensor of flexible body structure according to claim 1 or 2, it is characterised in that the loading
Axle (3) is cylindrical structure.
9. the six-dimension force sensor of flexible body structure according to claim 1 or 2, it is characterised in that the outer ring
Fixed station (4) is provided with multiple upper lower through-holes, for fixing sensor.
10. the six-dimension force sensor of flexible body structure according to claim 4, it is characterised in that the X to
The opening direction of the S type structures of spring beam branch (11) end is left and right directions；The S of Y-direction spring beam branch (12) end
The opening direction of type structure is above-below direction.
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| CN201710190373.3A CN107044898B (en) | 2017-03-28 | 2017-03-28 | Six-dimensional force sensor with elastomer structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710190373.3A CN107044898B (en) | 2017-03-28 | 2017-03-28 | Six-dimensional force sensor with elastomer structure |
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| CN107044898B CN107044898B (en) | 2022-11-29 |
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Cited By (18)
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| CN108981987A (en) * | 2018-08-07 | 2018-12-11 | 东南大学 | A kind of small retinoic acid syndrome spring beam six-dimension force sensor |
| CN109186831A (en) * | 2018-09-28 | 2019-01-11 | 中国科学院长春光学精密机械与物理研究所 | A kind of torque sensor |
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