JPH0474942A - Three-dimensional input device of stress sensor - Google Patents
Three-dimensional input device of stress sensorInfo
- Publication number
- JPH0474942A JPH0474942A JP2188469A JP18846990A JPH0474942A JP H0474942 A JPH0474942 A JP H0474942A JP 2188469 A JP2188469 A JP 2188469A JP 18846990 A JP18846990 A JP 18846990A JP H0474942 A JPH0474942 A JP H0474942A
- Authority
- JP
- Japan
- Prior art keywords
- force sensor
- stress sensor
- elastic body
- input device
- gripper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 10
- 238000005259 measurement Methods 0.000 claims description 9
- 239000013078 crystal Substances 0.000 claims description 5
- 238000009792 diffusion process Methods 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 239000000126 substance Substances 0.000 abstract 2
- 230000015556 catabolic process Effects 0.000 abstract 1
- 238000010276 construction Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 9
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は自動化製造装置やロボットの物品把握部等で対
象物を把握する場合の把握力の自動設定等に使用する力
覚センサーの入力装置に関し、特に拡散歪ゲージを形成
したシリコン単結晶板を起歪体上に接合した拡散型力覚
センサーの入力装置に関する。[Detailed Description of the Invention] (Field of Industrial Application) The present invention is an input device for a force sensor used for automatic setting of grasping force when grasping an object in an automated manufacturing device or an article grasping section of a robot, etc. In particular, the present invention relates to an input device for a diffusion type force sensor in which a silicon single crystal plate on which a diffusion strain gauge is formed is bonded onto a strain body.
（従来の技術とその課題）
先ず、本発明の対象となる拡散型力覚センサーについて
、その概要を説明する。従来より知られている力覚セン
サーは三次元構造に加工された起歪体にストレインゲー
ジを貼付したものであるが、大きさや感度、更に価格の
面で充分ではない。(Prior art and its problems) First, an overview of the diffused force sensor to which the present invention is applied will be explained. Conventionally known force sensors have a strain gauge attached to a strain body processed into a three-dimensional structure, but they are not sufficient in terms of size, sensitivity, and cost.
これを改良したものとして、シリコン単結晶板に機械的
外力を加えると結晶格子に歪みを生じ、半導体中のキャ
リア数や移動度が変化して抵抗率が変わる現象、即ちピ
エゾ抵抗効果を利用して起歪体の歪みを抵抗の変化に変
換し、ブリフジ回路によって起歪体に加わる力を電気信
号に変換するものである。An improved version of this method uses the piezoresistance effect, which is a phenomenon in which when an external mechanical force is applied to a silicon single crystal plate, the crystal lattice is distorted, the number and mobility of carriers in the semiconductor change, and the resistivity changes. The distortion of the flexure element is converted into a change in resistance, and the force applied to the flexure element is converted into an electrical signal by a bridge circuit.
拡散型力覚センサー（以下単に力覚センサーという）１
０の起歪体１１は第４図に示すように環状のダイアフラ
ム１２が形成され、ダイアフラム１２の工ッジ部１２ａ
、１２ｂの上方にゲージ抵抗１４−１〜１４−４が形
成されている。このゲージ抵抗１４−１〜１４−４は第
４図に示すように、起歪体１１の一つの直径上の一烏側
から他端側に１４−１．１４−２．１４−３．１４−４
の順に配置されており、この順序はＸ軸周、Ｙ軸用、Ｚ
軸周とも同じである。又、このダイアフラム１２の中心
からダイアフラム面に垂直に検出アーム１３が延伸して
いる。Diffuse force sensor (hereinafter simply referred to as force sensor) 1
As shown in FIG.
, 12b are formed with gauge resistors 14-1 to 14-4. As shown in FIG. 4, the gauge resistances 14-1 to 14-4 are 14-1.14-2.14-3.14 from one end to the other end on one diameter of the strain-generating body 11. -4
They are arranged in the order of X-axis circumference, Y-axis circumference, and Z-axis circumference.
The same is true for the shaft circumference. Further, a detection arm 13 extends from the center of the diaphragm 12 perpendicularly to the diaphragm surface.
この起歪体１１にＸ軸又はＹ軸方向のモーメントが働い
た時、又はＺ軸方向の力（押力、又は張力）が働いた時
の変形シミュレーションを第５図、第６図に示す。FIGS. 5 and 6 show deformation simulations when a moment in the X-axis or Y-axis direction or a force (pushing force or tension) in the Z-axis direction is applied to the strain body 11.
上述のブリフジ回路は第７．８．９図に示すもので、こ
の各ブリッジ回路を構成している各辺の抵抗Ｒｘｌ〜Ｒ
ｘ４、ＲＹ１〜ＲＶ＋、Ｒｚ１〜Ｒｚ４が外力を受けた
時に第１表に示す変化を起こす。この変化により、Ｘ軸
モーメント（Ｍｘ）、Ｙ軸モーメント（Ｍｙ）、Ｚ軸押
張力（Ｆｚ）を検出することが出来る。The above-mentioned bridge circuit is shown in Figure 7.8.9, and the resistors Rxl to R on each side forming each bridge circuit
When x4, RY1 to RV+, and Rz1 to Rz4 receive an external force, the changes shown in Table 1 occur. Through this change, the X-axis moment (Mx), Y-axis moment (My), and Z-axis pushing tension (Fz) can be detected.
第１表
以上のように構成された３軸以上の軸数を有する力覚セ
ンサー１０を使用する場合の入力方法としては、測定す
べき変位部材の測定点と力覚センサー１０の検出アーム
１３を連結して測定するが、この連結が従来は金属棒等
の剛体を使用して行っていた。When using the force sensor 10 having three or more axes configured as shown in Table 1, the input method is to input the measurement point of the displacement member to be measured and the detection arm 13 of the force sensor 10. Measurements are made by connecting the parts, but conventionally this connection has been done using a rigid body such as a metal rod.
このために、次のような問題がある。This causes the following problems.
ｌ）直接１８械的に連結しているため、変位部材の変位
量が大きく、力覚センサー１０の検出アーム１３の許容
変位置を超過すると、力覚センサー１０を破壊してしま
うことになる。l) Since they are directly 18 mechanically connected, the amount of displacement of the displacement member is large, and if the allowable displacement position of the detection arm 13 of the force sensor 10 is exceeded, the force sensor 10 will be destroyed.
２）Ｘ、Ｙ方向と２方向の変位を同時に入力する三次元
入力のためには、入力側の接続機構が複雑になってしま
う。2) For three-dimensional input in which displacements in two directions (X and Y directions) are input simultaneously, the connection mechanism on the input side becomes complicated.
本発明は上述の問題を解決して、簡単で、かつ力覚セン
サーを破壊することのない三次元入力装置を提供するこ
とを課題とする。An object of the present invention is to solve the above-mentioned problems and provide a simple three-dimensional input device that does not destroy the force sensor.
（課題を達成するための手段）
上述の課題を達成するために、拡散歪ゲージを形成した
シリコン単結晶板を起歪体上に接合してなる力覚センサ
ー１０の入力装置において、被測定物に固定されて変位
するグリッパ−１，４の測定点１ａ、４ａと前記力覚セ
ンサー１０の検出アーム１３の先端とを糸状弾性体２で
連結して信号の入力を行うものである。(Means for Achieving the Object) In order to achieve the above-mentioned object, in the input device of the force sensor 10, which is formed by bonding a silicon single crystal plate on which a diffusion strain gauge is formed onto a strain-generating body, an object to be measured is used. The measuring points 1a and 4a of the grippers 1 and 4 which are fixed and displaced are connected to the tip of the detection arm 13 of the force sensor 10 by means of a filamentous elastic body 2 to input signals.
又、前記グリッパ−４には送信器６を設け、前記力覚セ
ンサーｌＯにはこれに接続される出力処理装置７と、前
記送信器６の送信々号により前記出力処理装置７を動作
させる受信器８を設けたものである。Further, the gripper 4 is provided with a transmitter 6, and the force sensor IO has an output processing device 7 connected thereto, and a receiver that operates the output processing device 7 by the signals sent from the transmitter 6. It is equipped with a container 8.
（作用）
上述のように、糸状弾性体の弾性限界内ではＸ軸モーメ
ント及びＹ軸モーメントは糸状弾性体により引っ張られ
る方向で、Ｚ軸張力は糸状弾性体の伸びに比例した張力
（弾性体の伸びに反抗する張力）により、検出される。(Function) As mentioned above, within the elastic limit of the thread-like elastic body, the X-axis moment and the Y-axis moment are the directions in which the thread-like elastic body is pulled, and the Z-axis tension is the tension proportional to the elongation of the thread-like elastic body (the tension of the elastic body). (tension that opposes elongation).
（実施例）
第１図は本発明の入力装置の一例の説明図である。この
入力装置はＺ軸方向の外力は張力の場合のみに利用でき
るものである。(Embodiment) FIG. 1 is an explanatory diagram of an example of an input device of the present invention. This input device can be used only when the external force in the Z-axis direction is tension.
被測定物に固定されて変位するグリ・ツバ−Ｉの先端の
測定点１ａと力覚センサー１０の検出アーム１３の先端
とは、この先端に取付けたユニバーサルジヨイント等の
方向可変の連結部材３を通して糸状弾性体２で連結する
。The measurement point 1a at the tip of the Grid Tube I, which is fixed to the object to be measured and is displaced, and the tip of the detection arm 13 of the force sensor 10 are connected to a direction-variable connecting member 3 such as a universal joint attached to this tip. The thread-like elastic body 2 connects the fibers through the threads.
このような構成の入力装置の動作は、糸状弾性体２の伸
びに対する張力は、その弾性限界内において使用する限
り、次式■で表せる力Ｆが連結部材３に働くことになる
。In the operation of the input device having such a configuration, as long as the tensile force against the elongation of the filamentous elastic body 2 is used within its elastic limit, a force F expressed by the following equation (2) acts on the connecting member 3.
力覚センサー１０に伝わる力Ｆは、伸ばした時点での糸
状弾性体２の長さをＲ１元の長さをＲｏ、ｋをハネ定数
とすれば、
Ｆ＝（ＲＲｏ）ｋ・・・・■
■を変換してＲを求めると、
Ｒ＝Ｆ／に＋ＲＯ＝ 、／Ｆｘ ＋Ｆｙ ＋Ｆｚ
／に＋Ｒ。The force F transmitted to the force sensor 10 is calculated as follows: If the length of the filamentous elastic body 2 at the time of stretching is R1, the original length is Ro, and k is the spring constant, then F=(RRo)k...■ Converting ■ to find R, R=F/ +RO= , /Fx +Fy +Fz
/ to +R.
＝ Ｊ Ｍｘ Ｌ） ＋ Ｍｙ／Ｌ） ＋Ｆｚ
／に＋Ｒｏ−−・■ここで、Ｌは連結部材３の接続点
Ａからダイアフラム１２の中心Ｐまでの長さを示す。（
第３図参照）
この糸状弾性体２の伸び（Ｒ−Ｒｏ）は、その弾性限界
内では伸びの長さと糸状弾性体２の張力（弾性体の伸び
に抗する張力）とは比例することから、この力Ｆは、上
式のようにＦｘ、 Ｆｙ、 Ｆｚに分解して考えること
が出来、Ｆｚはそのまま力覚センサー１０の出力として
取出すことが出来るが、Ｆｘ、 Ｆｙはそれぞれ次式■
、■゛で表すような力のモーメントＭｘ、 Ｍｙとして
力覚センサー１０から出力される。= J Mx L) + My/L) +Fz
/to+Ro--*■Here, L indicates the length from the connection point A of the connecting member 3 to the center P of the diaphragm 12. (
(See Figure 3) The elongation (R-Ro) of the elastic filament 2 is because within its elastic limit, the length of elongation and the tension of the elastic filament 2 (tension that resists the elongation of the elastic body) are proportional. , this force F can be considered by decomposing it into Fx, Fy, and Fz as shown in the above equation, and Fz can be taken as is as the output of the force sensor 10, but Fx and Fy are each expressed by the following equation
, ■゛ are output from the force sensor 10 as moments of force Mx and My.
Ｆｘ＝Ｍｘ／Ｌ・・・・■ Ｆｙ−Ｍｙ／Ｌ・・・・
■これらのＭｘ、 Ｍｙ、 Ｍｚと１１、ｋ、 ＲＯ
を用いれば計算式■〜■により、グリッパ−１の先端の
測定点１ａの座標（ｘ、ｙ、ｚ）が求められることにな
る。Fx=Mx/L・・・・■ Fy−My/L・・・・
■These Mx, My, Mz and 11, k, RO
By using calculation formulas (1) to (2), the coordinates (x, y, z) of the measurement point 1a at the tip of the gripper 1 can be determined.
θ１＝ｊａｎ−１（Ｆｙ／Ｆｘ） −ｔａｎ−’（Ｍｙ
／Ｍｘ） ＨＨＨＨ■θ２＝ｊａｎ−１（ＪＦｘ ＋Ｆ
ｙ ／Ｐｚ）＝ｔａｎ−’（、／Ｍｘ ＋Ｍｙ１ルＦ
ｚ）・ ・ ・ ・■
以上、■、■、■より測定点１ａの座標はｘ−（７（ｆ
ｉｘ Ｌ ＋（Ｍｙ Ｌ ＋ Ｆｚ Ｌ ／に
＋Ｒｏ）Ｘ ｓｉｎθ２ｃｏｓθｌ °■
ｙ −（／（Ｍｘ／Ｌ） ＋ （Ｍｙ／Ｌ） ＋
（Ｆｚ／Ｌ） ／に＋Ｒｏ）Ｘ ｓｉｎθ２Ｓｉｎ
θｌ’■
となり、力覚センサー１０の出力門ｘ、 Ｍｙ、 Ｆｚ
とし、糸状弾性体２によって決まるｋとＲ８のみで座標
が計算され、グリッパ−１の先端の測定点１ａの位置を
算出することが出来る。θ1=jan-1(Fy/Fx)-tan-'(My
/Mx) HHHH■θ2=jan-1(JFx +F
y /Pz)=tan-'(, /Mx +My1F
z)・・・・・■ From the above, from ■, ■, and ■, the coordinates of measurement point 1a are x-(7(f
ix L + (My L + Fz L / + Ro)
(Fz/L) /ni+Ro)X sinθ2Sin
θl'■, and the output gates of the force sensor 10 are x, My, Fz
Then, the coordinates are calculated only using k and R8 determined by the filamentous elastic body 2, and the position of the measurement point 1a at the tip of the gripper 1 can be calculated.
第２図は同じく他の例の説明図である。この例ではグリ
ッパ−４の先端の測定点４ａと力覚センサー１０の検出
アーム１３との連結は上述の例と同しであるが、グリッ
パ一部分及び力覚センサ一部分が相違しているものであ
る。FIG. 2 is an explanatory diagram of another example. In this example, the connection between the measurement point 4a at the tip of the gripper 4 and the detection arm 13 of the force sensor 10 is the same as in the above example, but a portion of the gripper and a portion of the force sensor are different. .
グリッパ−４には内部に送信器６が設けてあり、スイッ
チ５で操作するように構成されている。この送信器６は
送信々号としては電波、音波、光、赤外線の何れかが使
用されている。The gripper 4 is provided with a transmitter 6 inside, and is configured to be operated by a switch 5. This transmitter 6 uses any one of radio waves, sound waves, light, and infrared rays as transmission signals.
力覚センサ一部分は力覚センサー１０そのものは上記実
施例のものと同しであるが、この検出信号を処理する出
力処理装置７と上記送信器６の送信々号を受けて出力処
理装置７を動作させる受信器８及びこれらの電源９を設
けたものである。A part of the force sensor 10 itself is the same as that of the above embodiment, but includes an output processing device 7 that processes this detection signal and an output processing device 7 that receives the transmission signal from the transmitter 6. A receiver 8 to be operated and a power source 9 for these are provided.
この例では、力覚センサー１０そのものの動作は上述の
例と同じであるが、グリッパ−４でスイッチ５を操作す
ることによって送信される送信々号を受信器８が受信し
、この受信々号により出力処理装置は力覚センサー１０
の検出アーム１３の受けている外力を座標計算し、グリ
ッパ−４の先端の測定点４ａの座標を算出する。In this example, the operation of the force sensor 10 itself is the same as in the above example, but the receiver 8 receives the transmission signal transmitted by operating the switch 5 with the gripper 4, and the reception signal The output processing device is a force sensor 10.
The coordinates of the external force being received by the detection arm 13 are calculated, and the coordinates of the measurement point 4a at the tip of the gripper 4 are calculated.
（発明の効果）
上述のような三次元入力装置を用いれば、簡易型三次元
測定器や図形入力及びボクシングゲーム等のコンピュー
ター入力装置、更には図面や地図等から実測距離及び面
積を測定することが出来る。(Effect of the invention) By using the above three-dimensional input device, actual distances and areas can be measured from simple three-dimensional measuring instruments, computer input devices such as graphic input and boxing games, and even drawings, maps, etc. I can do it.
第１図は本発明の入力装置の一例の説明図、第２図は同
じく他の例の説明図、第３図は力Ｆをベクトル成分に分
解した説明図、第４図は起歪体断面図、第５図はＸ （
Ｙ）軸方向の変形シミュレーション図、第６図はＺ軸方
向の押力（張力）の変形シミュレーション図、第７図は
Ｘ軸周ブリ、７ジ回路図、第８図はＹ軸周ブリフジ回路
図、第９図はＺ軸周ブリッジ回路図である。
１ニゲリソパー、 ２：糸状弾性体、 ４ニゲリソパー
、 ６：送信器、 ７：出力処理装置、８：受信器、
１０：力覚センサー １３：検出アーム。
箋３目
手
続
補
正
書
（自発）
１゜
事件の表示
平成２年
特
許
願
第１８８４６９号
２゜
発明の名称
力覚センサーの三次元入力装置
３゜
補正をする者
事件との関係 特許出願人
住 所 埼玉県用口市並木２丁目３０番１号名 称
株式会社 エンプラス
４゜Fig. 1 is an explanatory diagram of an example of the input device of the present invention, Fig. 2 is an explanatory diagram of another example, Fig. 3 is an explanatory diagram of the force F decomposed into vector components, and Fig. 4 is a cross section of the strain body. Figure 5 is X (
Fig. 6 is a deformation simulation diagram of pushing force (tension) in the Z-axis direction, Fig. 7 is an X-axis circumference circuit diagram, and Fig. 8 is a Y-axis circumference circumference circuit diagram. 9 are Z-axis peripheral bridge circuit diagrams. 1 Nigelisopar, 2: Thread-like elastic body, 4 Nigelisopar, 6: Transmitter, 7: Output processing device, 8: Receiver,
10: Force sensor 13: Detection arm. 3rd Procedural Amendment (Spontaneous) 1゜Indication of the Case 1990 Patent Application No. 188469 2゜Name of the Invention Three-Dimensional Input Device for Force Sensor 3゜Relationship with the Case Patent Applicant Address 2-30-1 Namiki, Yoguchi City, Saitama Prefecture Name
Enplus 4゜ Co., Ltd.
Claims (1)
上に接合してなる拡散型力覚センサーの入力装置におい
て、被測定物に固定されて変位するグリッパーの測定点
と前記力覚センサーの検出アームの先端とを糸状弾性体
で連結して信号の入力を行うことを特徴とした力覚セン
サーの三次元入力装置。 ２）前記グリッパーには送信器を設け、前記力覚センサ
ーにはこれに接続される出力処理装置と、前記送信器の
送信々号により前記出力処理装置を動作させる受信器を
設けたことを特徴とする第１項記載の力覚センサーの三
次元入力装置。[Claims] 1) Measurement of a gripper that is fixed to an object to be measured and displaces in an input device for a diffusion type force sensor in which a silicon single crystal plate on which a diffusion strain gauge is formed is bonded onto a strain body. A three-dimensional input device for a force sensor, characterized in that a point and the tip of a detection arm of the force sensor are connected by a thread-like elastic body to input a signal. 2) The gripper is provided with a transmitter, and the force sensor is provided with an output processing device connected thereto, and a receiver that operates the output processing device based on the signals transmitted from the transmitter. A three-dimensional input device for a force sensor according to item 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2188469A JPH0474942A (en) | 1990-07-16 | 1990-07-16 | Three-dimensional input device of stress sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2188469A JPH0474942A (en) | 1990-07-16 | 1990-07-16 | Three-dimensional input device of stress sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0474942A true JPH0474942A (en) | 1992-03-10 |
Family
ID=16224271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2188469A Pending JPH0474942A (en) | 1990-07-16 | 1990-07-16 | Three-dimensional input device of stress sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0474942A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012137421A (en) * | 2010-12-27 | 2012-07-19 | Fanuc Ltd | Control device of robot performing force control using triaxial sensor |
| US8897919B2 (en) | 2012-06-13 | 2014-11-25 | Fanuc Corporation | Robot controller which conducts a force control by using a three-axial force sensor |
| CN107044898A (en) * | 2017-03-28 | 2017-08-15 | 东南大学 | A kind of six-dimension force sensor of flexible body structure |
-
1990
- 1990-07-16 JP JP2188469A patent/JPH0474942A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012137421A (en) * | 2010-12-27 | 2012-07-19 | Fanuc Ltd | Control device of robot performing force control using triaxial sensor |
| US8897919B2 (en) | 2012-06-13 | 2014-11-25 | Fanuc Corporation | Robot controller which conducts a force control by using a three-axial force sensor |
| CN107044898A (en) * | 2017-03-28 | 2017-08-15 | 东南大学 | A kind of six-dimension force sensor of flexible body structure |
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