CN116698260B - Three-dimensional six-dimensional force sensor - Google Patents
Three-dimensional six-dimensional force sensor Download PDFInfo
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- CN116698260B CN116698260B CN202310830382.XA CN202310830382A CN116698260B CN 116698260 B CN116698260 B CN 116698260B CN 202310830382 A CN202310830382 A CN 202310830382A CN 116698260 B CN116698260 B CN 116698260B
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- 230000002265 prevention Effects 0.000 claims description 44
- 238000005259 measurement Methods 0.000 abstract description 36
- 230000008878 coupling Effects 0.000 description 14
- 238000010168 coupling process Methods 0.000 description 14
- 238000005859 coupling reaction Methods 0.000 description 14
- 238000000034 method Methods 0.000 description 12
- 238000001514 detection method Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
- 230000002427 irreversible effect Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
- G01L5/1627—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of strain gauges
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T90/00—Enabling technologies or technologies with a potential or indirect contribution to GHG emissions mitigation
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- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The invention discloses a three-dimensional six-dimensional force sensor, which comprises: an inner core; the inner ball core is provided with a first mounting hole for mounting the component to be tested; three-axis six elastic beams which extend from the intersection of the inner ball cores and avoid the first mounting hole; an outer case externally connected to the elastic beam; the strain gauges are used for sensing deformation degree of the corresponding elastic beams in a certain dimension in a three-dimensional rectangular coordinate system and forming measurement bridge output stress data or moment data. The invention can realize spatial symmetry of the six-dimensional force sensor structurally, ensure that each elastic beam keeps isotropy during measurement, and further improve measurement accuracy.
Description
Technical Field
The invention relates to the field of force sensors, in particular to a three-dimensional six-dimensional force sensor.
Background
The multi-dimensional force sensor refers to a force sensor capable of measuring force and moment components in more than two directions simultaneously, and force and moment can be respectively decomposed into three components in a Cartesian coordinate system, so that the most complete form of multi-dimensional force is a six-dimensional force/moment sensor, namely a sensor capable of measuring three force components and three moment components simultaneously, and the widely used multi-dimensional force sensor is the sensor. The six-dimensional force sensor can be used as a basic element for precise assembly, precise operation, precise control and man-machine interaction control because of being capable of detecting three-dimensional force and three-dimensional moment in a space. Meanwhile, the six-dimensional force sensor is also used for guaranteeing that the robot completes a contact operation task, such as a space detection technology, space manipulator force control, industrial robots, underwater robot remote control operation and the like, and a large-range high-precision six-dimensional force sensor is required.
At present, most six-dimensional force sensors are difficult to truly realize smaller inter-dimensional coupling due to the structure, and have better isotropy, so that force and moment measurement is not accurate enough.
Disclosure of Invention
The research of the applicant shows that: most of six-dimensional force sensors on the market are in plane cross structures, and the overall structure is only symmetrical on a plane, but not completely symmetrical in space, so that the six-dimensional force sensor has no isotropic characteristic, and further has larger inter-dimensional coupling and inaccurate measurement.
In view of the above-mentioned drawbacks of the prior art, the present invention is to provide a three-dimensional six-dimensional force sensor, which is designed to realize spatial symmetry in structure, ensure that each elastic beam remains isotropic during measurement, and further improve measurement accuracy.
To achieve the above object, the present invention discloses a three-dimensional six-dimensional force sensor, the six-dimensional force sensor comprising: an inner core; the inner ball core is provided with a first mounting hole for mounting the component to be tested; three-axis six elastic beams which extend from the inner ball core in an intersecting manner and avoid the first mounting hole; and an outer case externally connected to the outside of the elastic beam; the strain gauges are used for sensing deformation degrees of the elastic beams and forming output stress data and/or moment data of the measuring bridge.
Optionally, the shell body is three-dimensional symmetrical structure and with interior ball core is concentric, first mounting hole equidistance set up in the center of six elastic beams of triaxial.
Optionally, the outer shell is formed by three annular shells which are concentric and perpendicular to each other, and the center of the annular shells is the same as the center of the inner sphere.
Optionally, a second mounting hole for fixing the outer shell is formed in the outer shell.
Optionally, the elastic beam is a cuboid columnar structure, the strain gauges are attached to each side surface of the elastic beam, the strain gauges of the opposite elastic beam on the same opposite side surfaces form measurement bridges with corresponding dimensions, and the strain gauges for sensing deformation degrees of the elastic beam form a plurality of measurement bridges together for measuring stress data and moment data with three different dimensions.
Optionally, the surface of the inner ball core is provided with a plurality of first overload prevention posts, the inner part of the outer shell is provided with a plurality of second overload prevention posts corresponding to the first overload prevention posts, and gaps with preset distances are reserved between the first overload prevention posts and the second overload prevention posts, and the first overload prevention posts and the second overload prevention posts are of concave-convex embedded structures.
Optionally, 24 strain gages are symmetrically pasted on the elastic beam, and the strain gages at four different preset positions form one measuring bridge, and the measuring bridge is used for measuring the force or moment born by the elastic beam in corresponding dimensions.
Optionally, the deformation chamber has been seted up on the roof beam body to the elastic beam, four sides in deformation chamber paste the foil gage, two relative the foil gage that sets up on the same relative lateral wall in the deformation chamber constitutes the measurement bridge of corresponding dimension, and each is used for the response elastic beam deformation degree the foil gage constitutes jointly a plurality of measurement bridges are used for measuring three different dimension atress data and moment data.
The invention has the beneficial effects that: 1. the center pillow block (a component for connecting the six-dimensional force sensor and the force component to be tested in the prior art) adopts an inner ball core, and three-axis six elastic beams which are intersected and extended from the inner ball core and avoid a first mounting hole are adopted. The six elastic beams of the invention realize symmetrical structures in three different dimensions, namely, are symmetrical in three dimensions, and the inner ball cores for connecting the elastic beams are spherical, so that the combined structure of the two elastic beams realizes spatial symmetry, the elastic beams are ensured to show better isotropy during measurement, the inter-dimensional coupling is reduced, and the measurement accuracy is improved.
2. The outer shell is of a three-dimensional symmetrical structure and is concentric with the inner ball core, and the first mounting holes are equidistantly formed in the centers of the six elastic beams. According to the invention, through the symmetrical structure of the outer shell, isotropy is realized at the connection point of each elastic beam and the outer shell, the inter-dimensional coupling is reduced, and the measurement accuracy is improved. Meanwhile, the first mounting holes are formed in the centers of the three-axis six elastic beams at equal intervals, so that when the force component to be measured is mounted in the first mounting holes for measurement, isotropy is guaranteed when the force component acts on the inner ball core and the elastic beams, inter-dimensional coupling is reduced, and measurement accuracy is improved.
3. The elastic beam is of a cuboid columnar structure, the strain gauges are attached to each side face of the elastic beam, the strain gauges of the opposite elastic beams on the same opposite side face form measuring bridges of corresponding dimensions, and the strain gauges for sensing the deformation degree of the elastic beam form a plurality of measuring bridges together to measure stress data and moment data of three different dimensions. The position of the strain gauge patch is adapted to the three-dimensional symmetrical structure of the six-dimensional force sensor, so that the measurement is more accurate.
4. The surface of the inner ball core is provided with a plurality of first overload prevention posts, the inside of the outer shell is provided with a plurality of second overload prevention posts corresponding to the first overload prevention posts, gaps with preset distances are reserved between the first overload prevention posts and the second overload prevention posts, and the first overload prevention posts and the second overload prevention posts are of concave-convex embedded structures. According to the invention, the first overload prevention column and the second overload prevention column are arranged, so that overload of the six-dimensional force sensor caused by overranging use is avoided, and irreversible damage is caused.
5. The elastic beam is provided with the deformation cavity on the beam body, the strain gages are stuck to the four sides of the deformation cavity, the strain gages arranged on the same opposite side wall in the two opposite deformation cavities form measuring bridges with corresponding dimensions, and each strain gage for sensing the deformation degree of the elastic beam jointly forms a plurality of measuring bridges for measuring stress data and moment data with three different dimensions. According to the invention, the strain gauge is stuck in the deformation cavity through the design of the deformation cavity, so that the strain gauge is more sensitive to deformation detection of the elastic beam, and the measurement accuracy is improved.
In conclusion, the six-dimensional force sensor structurally realizes spatial symmetry, so that each elastic beam is ensured to keep isotropy during measurement, and the measurement accuracy is further improved.
Drawings
FIG. 1 is a schematic perspective view of a three-dimensional six-dimensional force sensor according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram corresponding to a top view of a three-dimensional six-dimensional force sensor according to an embodiment of the present invention.
Reference numerals illustrate: the anti-overload ball comprises an inner ball core-1, a first mounting hole-2, an elastic beam-3, an outer shell-4, a strain gauge-5, a second mounting hole-6, a first anti-overload column-7 and a second anti-overload column-8.
Detailed Description
The invention discloses a three-dimensional six-dimensional force sensor, which can be realized by appropriately improving technical details by a person skilled in the art by referring to the content of the text. It is expressly noted that all such similar substitutions and modifications will be apparent to those skilled in the art, and are deemed to be included in the present invention. While the methods and applications of this invention have been described in terms of preferred embodiments, it will be apparent to those skilled in the relevant art that variations and modifications can be made in the methods and applications described herein, and in the practice and application of the techniques of this invention, without departing from the spirit or scope of the invention.
The research of the applicant shows that: most of six-dimensional force sensors on the market are in plane cross structures, and the overall structure is only symmetrical on a plane, but not completely symmetrical in space, so that the six-dimensional force sensor has no isotropic characteristic, and further has larger inter-dimensional coupling and inaccurate measurement.
Accordingly, an embodiment of the present invention provides a three-dimensional six-dimensional force sensor, as shown in fig. 1 and 2, including:
an inner core 1; the inner ball core 1 is provided with a first mounting hole 2 for mounting a component to be tested; three-axis six elastic beams 3 which extend from the inner ball core 1 in an intersecting manner and avoid the first mounting hole 2; and an outer case 4 externally connected to the outside of the elastic beam 3; the strain gauges 5 are arranged on the elastic beams 3 according to the Huygens bridge, and the strain gauges 5 are used for sensing the deformation degree of the elastic beams 3 and forming measurement bridge output stress data and/or moment data.
In the embodiment of fig. 2, the elastic beams 3 are shielded by the outer housing 4 due to the equal width of the outer housing 4 and the elastic beams 3, only the strain gauge 5 attached to the elastic beams 3 is shown.
It should be noted that, the three axes of the three-dimensional rectangular coordinate system corresponding to the embodiment of the present invention are the same as the straight lines where the 6 elastic beams 3 are located, and the origin is the center of the inner core 1. The structure of the six-dimensional force sensor according to the embodiment of the present invention may be shown in fig. 1 and 2, and may be shown in fig. 2, except for the first mounting hole 2, regardless of the observation of the six-dimensional force sensor from the top view, the bottom view, the left view, the right view, the front view, and the rear view. The isotropy of the structure is well ensured, so that the inter-dimensional coupling is reduced, and the measurement accuracy is improved. Compared with the prior art, the method and the device have the advantages that the influence caused by inter-dimensional coupling is reduced by a complex algorithm, and the inter-dimensional coupling can be greatly reduced from the root, so that the algorithm can be simplified.
In a specific embodiment, the outer shell 4 has a three-dimensional symmetrical structure and is concentric with the inner ball core 1, and the first mounting holes 2 are equidistantly arranged in the centers of the three-axis six elastic beams 3.
It should be noted that, in this embodiment, on the basis of the stereo symmetry of the inner ball core 1 and the elastic beam 3, the outer housing 4 is also in a three-dimensional symmetrical structure and is concentric with the inner ball core 1, so that the six-dimensional force sensor is integrally stereo symmetrical, further reducing inter-dimensional coupling, and improving measurement accuracy. Meanwhile, the first mounting holes 2 are equidistantly formed in the centers of the three-axis six elastic beams 3, namely, the projection of the center line corresponding to the first mounting holes 2 is 45 degrees on the plane formed by the three axes and each axis, so that isotropy is ensured when the force measuring assembly works on the inner ball core 1 and the elastic beams 3 when the force measuring assembly is mounted in the first mounting holes 2 for measurement, inter-dimensional coupling is reduced, and measurement accuracy is improved.
Further, the first mounting hole 2 is a through hole, and penetrates through the whole inner ball core 1.
Further, the number of the first mounting holes 2 is plural, so as to ensure that the force measuring assembly can be firmly fixed.
In a specific embodiment, as shown in fig. 1, the outer shell 4 is formed by three concentric and mutually perpendicular annular shells, and the center of the annular shells is the same as the center of the inner core 1.
It should be noted that, the outer housing 4 may be configured to provide space for mounting the force measuring assembly.
In a specific embodiment, the outer casing 4 is provided with a second mounting hole 6 for fixing the outer casing 4.
In a practical application scenario, the first mounting hole 2 is typically used for connecting with a tool end (i.e. a force measuring assembly) of the manipulator, and the second mounting hole 6 is typically mounted at a fixed end of the manipulator. The tool end is intended to contact a target object (e.g., a grip).
In a specific embodiment, the elastic beam 3 is in a cuboid columnar structure, the strain gauges 5 are attached to each side surface of the elastic beam 3, the strain gauges 5 on the same opposite side surfaces of the opposite elastic beam 3 form measuring bridges with corresponding dimensions, and each strain gauge 5 for sensing the deformation degree of the elastic beam 3 jointly form a plurality of measuring bridges for measuring stress data and moment data with three different dimensions.
As shown in fig. 1, two elastic beams 3 on a straight line, and strain gauges 5 on the same opposite sides of the two elastic beams 3 form a measuring bridge. For example two spring beams 3 in the X-axis, the strain gauges 5 of the two spring beams 3 on both sides in the Z-axis constitute a measuring bridge.
In a specific embodiment, a measuring bridge formed by the four Y-axis side surfaces of the elastic beam 3 corresponding to the strain gauges 5 can be used to measure the moment in the Z-axis direction; the measuring bridge formed by the four Z-axis side surfaces of the Y-axis corresponding elastic beam 3 corresponding strain gauges 5 can be used for measuring the moment in the X-axis direction; the measuring bridge composed of the four X-axis side surfaces of the Z-axis corresponding elastic beam 3 corresponding to the strain gauges 5 can be used for measuring the moment in the Y-axis direction. The measuring bridge formed by the four Z-axis side surfaces of the X-axis corresponding elastic beam 3 corresponding to the strain gauges 5 can be used for measuring the force in the Z-axis direction; the measuring bridge formed by the four X-axis side surfaces of the Y-axis corresponding elastic beam 3 corresponding strain gauges 5 can be used for measuring the force in the X-axis direction; the measuring bridge composed of the four Y-axis side surfaces of the Z-axis corresponding elastic beam 3 corresponding to the strain gauges 5 can be used for measuring the moment in the Y-axis direction.
In a specific embodiment, as shown in fig. 1 and fig. 2, a plurality of first overload prevention posts 7 are disposed on the surface of the inner core 1, a plurality of second overload prevention posts 8 corresponding to the first overload prevention posts 7 are disposed inside the outer casing 4, and a gap with a preset distance is reserved between the first overload prevention posts 7 and the second overload prevention posts 8, and the first overload prevention posts and the second overload prevention posts are of a concave-convex jogged structure.
Further, as shown in fig. 1 and 2, the first overload prevention post 7 and the second overload prevention post 8 have a plurality of three-dimensional symmetrical structures with the inner core 1 as a center. This further ensures isotropy.
It should be noted that when the six-dimensional force sensor is used in an over-range, overload exists, and irreversible damage is caused. The first overload prevention post 7 and the second overload prevention post 8 can mutually resist when the overload prevention posts are used in an overrun range, so as to play a role in protection.
Optionally, 24 strain gages 5 are symmetrically attached to the elastic beam 3, and four strain gages 5 at different preset positions form a measuring bridge, and the measuring bridge is used for measuring the force or moment born by the elastic beam 3 in corresponding dimensions.
Optionally, the elastic beam 3 is provided with a deformation cavity on the beam body, four sides of the deformation cavity are attached with strain gauges 5, the strain gauges 5 arranged on the same opposite side wall in two opposite deformation cavities form a measuring bridge with corresponding dimensions, and each strain gauge 5 for sensing the deformation degree of the elastic beam 3 jointly forms a plurality of measuring bridges for measuring stress data and moment data with three different dimensions.
It should be noted that, set up the deformation chamber on the deformation roof beam, paste strain gauge 5 in the deformation intracavity for strain gauge 5 is more sensitive to the deformation detection of elastic beam 3, thereby improves measurement accuracy.
The center pillow block (a component for connecting a six-dimensional force sensor and a component to be tested in the prior art) of the embodiment of the invention adopts an inner ball core 1, and three-axis six elastic beams 3 which are intersected and extended from the inner ball core 1 and avoid a first mounting hole 2 are adopted. The six elastic beams 3 of the embodiment of the invention realize symmetrical structures in three different dimensions, namely, are symmetrical in three dimensions, and the inner ball cores 1 for connecting the elastic beams 3 are spherical, so that the combined structure of the two realizes spatial symmetry, the elastic beams 3 are ensured to show better isotropy during measurement, the inter-dimensional coupling is reduced, and the measurement accuracy is improved.
The outer shell 4 of the embodiment of the invention is of a three-dimensional symmetrical structure and is concentric with the inner ball core 1, and the first mounting holes 2 are equidistantly arranged in the center of the three-axis six elastic beams 3. According to the embodiment of the invention, through the symmetrical structure of the outer shell 4, isotropy is realized at the connection point of each elastic beam 3 and the outer shell 4, the inter-dimensional coupling is reduced, and the measurement accuracy is improved. Meanwhile, the first mounting holes 2 are formed in the centers of the three-axis six elastic beams 3 at equal intervals, so that when the force component to be measured is mounted in the first mounting holes 2 for measurement, isotropy is ensured when the force component acts on the inner ball core 1 and the elastic beams 3, inter-dimensional coupling is reduced, and measurement accuracy is improved.
According to the embodiment of the invention, the elastic beam 3 is of a cuboid columnar structure, each side surface of the elastic beam 3 is stuck with the strain gauge 5, the strain gauges 5 of the opposite elastic beam 3 on the same opposite side surface form a measuring bridge of corresponding dimension, and each strain gauge 5 for sensing the deformation degree of the elastic beam 3 jointly form a plurality of measuring bridges for measuring stress data and moment data of three different dimensions. The position of the patch of the strain gauge 5 is adapted to the three-dimensional symmetrical structure of the six-dimensional force sensor according to the embodiment of the invention, so that the measurement is more accurate.
The surface of the inner ball core 1 is provided with a plurality of first overload prevention posts 7, the inside of the outer shell 4 is provided with a plurality of second overload prevention posts 8 corresponding to the first overload prevention posts 7, and gaps with preset distances are reserved between the first overload prevention posts 7 and the second overload prevention posts 8, and the first overload prevention posts and the second overload prevention posts 8 are of concave-convex embedded structures. According to the embodiment of the invention, the first overload prevention column 7 and the second overload prevention column 8 are arranged, so that overload of the six-dimensional force sensor caused by overrange use is avoided, and irreversible damage is caused.
According to the embodiment of the invention, the elastic beam 3 is provided with the deformation cavity, the four sides of the deformation cavity are stuck with the strain gauges 5, the strain gauges 5 arranged on the same opposite side wall in the two opposite deformation cavities form the measuring bridge with corresponding dimensions, and each strain gauge 5 for sensing the deformation degree of the elastic beam 3 jointly forms a plurality of measuring bridges for measuring stress data and moment data with three different dimensions. According to the embodiment of the invention, the strain gauge 5 is stuck in the deformation cavity through the design of the deformation cavity, so that the strain gauge 5 is more sensitive to deformation detection of the elastic beam 3, and the measurement accuracy is improved.
In summary, the embodiment of the invention ensures that each elastic beam 3 maintains isotropy during measurement by realizing spatial symmetry of the six-dimensional force sensor structurally, thereby improving measurement accuracy.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises an element.
In this specification, each embodiment is described in a related manner, and identical and similar parts of each embodiment are all referred to each other, and each embodiment mainly describes differences from other embodiments. In particular, for system embodiments, since they are substantially similar to method embodiments, the description is relatively simple, as relevant to see a section of the description of method embodiments.
The foregoing is merely illustrative of the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention are included in the protection scope of the present invention.
Claims (5)
1. A stereoscopic six-dimensional force sensor, the six-dimensional force sensor comprising: an inner core; the inner ball core is provided with a first mounting hole for mounting the component to be tested; three-axis six elastic beams which extend from the inner ball core in an intersecting manner and avoid the first mounting hole; and an outer case externally connected to the outside of the elastic beam; the strain gauges are used for sensing the deformation degree of the elastic beams and forming output stress data and/or moment data of the measuring bridge; the outer shell is of a three-dimensional symmetrical structure and is concentric with the inner ball core, and the first mounting holes are equidistantly formed in the centers of the six triaxial elastic beams; the outer shell is composed of three annular shells which are concentric and perpendicular to each other, and the center of the annular shells is the same as the center of the inner ball core; the surface of the inner ball core is provided with a plurality of first overload prevention posts, the inside of the outer shell is provided with a plurality of second overload prevention posts corresponding to the first overload prevention posts, a gap with a preset distance is reserved between the first overload prevention posts and the second overload prevention posts, and the first overload prevention posts and the second overload prevention posts are of a concave-convex jogged structure; the inner ball core, the outer shell and the elastic beam are integrated; the center line projection corresponding to the first mounting hole is projected on planes formed by three shafts of the three-shaft six elastic beams and each shaft at 45 degrees, and the first mounting hole is a through hole and penetrates through the inner ball core.
2. The three-dimensional six-dimensional force sensor of claim 1, wherein the outer housing is provided with a second mounting hole for fixing the outer housing.
3. The three-dimensional six-dimensional force sensor according to claim 1, wherein the elastic beam has a rectangular columnar structure, the strain gauges are attached to each side surface of the elastic beam, the strain gauges of the opposite elastic beams on the same opposite side surfaces form measuring bridges of corresponding dimensions, and the strain gauges for sensing the deformation degree of the elastic beams together form a plurality of measuring bridges for measuring the stress data and the moment data of three different dimensions.
4. The three-dimensional six-dimensional force sensor according to claim 1, wherein 24 strain gauges are symmetrically attached to the elastic beam, and four strain gauges at different preset positions form one measuring bridge, and the measuring bridge is used for measuring the force or moment of the elastic beam bearing corresponding dimensions.
5. The three-dimensional six-dimensional force sensor according to claim 1, wherein the elastic beam is provided with a deformation cavity on the beam body, four sides of the deformation cavity are attached with the strain gauges, the strain gauges arranged on the same opposite side wall in two opposite deformation cavities form a measuring bridge with corresponding dimensions, and each strain gauge for sensing the deformation degree of the elastic beam jointly forms a plurality of measuring bridges for measuring the stress data and the moment data with three different dimensions.
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