CN107024838B - 一种pcb曝光机灯箱的复位调距方法 - Google Patents
一种pcb曝光机灯箱的复位调距方法 Download PDFInfo
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- CN107024838B CN107024838B CN201710413864.XA CN201710413864A CN107024838B CN 107024838 B CN107024838 B CN 107024838B CN 201710413864 A CN201710413864 A CN 201710413864A CN 107024838 B CN107024838 B CN 107024838B
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/7015—Details of optical elements
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- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
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CN201710413864.XA CN107024838B (zh) | 2017-06-05 | 2017-06-05 | 一种pcb曝光机灯箱的复位调距方法 |
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CN201710413864.XA CN107024838B (zh) | 2017-06-05 | 2017-06-05 | 一种pcb曝光机灯箱的复位调距方法 |
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CN107024838A CN107024838A (zh) | 2017-08-08 |
CN107024838B true CN107024838B (zh) | 2018-08-10 |
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CN201710413864.XA Expired - Fee Related CN107024838B (zh) | 2017-06-05 | 2017-06-05 | 一种pcb曝光机灯箱的复位调距方法 |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN110488574B (zh) * | 2019-08-08 | 2024-06-21 | 深圳市安铂柔印科技有限公司 | 曝光机 |
CN111723486B (zh) * | 2020-06-22 | 2021-05-04 | 西华大学 | 一种双面pcb结构稳态热分析方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1847985A (zh) * | 2005-04-15 | 2006-10-18 | 陈花明 | 印刷电路板曝光机 |
JP4414866B2 (ja) * | 2004-11-19 | 2010-02-10 | 九州ナノテック光学株式会社 | 紫外線露光機 |
CN101876784A (zh) * | 2009-04-29 | 2010-11-03 | 翊晖科技股份有限公司 | 曝光机及其曝光方法 |
CN101937173A (zh) * | 2009-06-30 | 2011-01-05 | 景兴精密机械有限公司 | 曝光机的曝光方法 |
CN201765435U (zh) * | 2010-08-25 | 2011-03-16 | 景兴精密机械有限公司 | 曝光机光源装置 |
CN204009354U (zh) * | 2014-06-12 | 2014-12-10 | 志圣科技(广州)有限公司 | 一种气动遮光门保持结构 |
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2017
- 2017-06-05 CN CN201710413864.XA patent/CN107024838B/zh not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4414866B2 (ja) * | 2004-11-19 | 2010-02-10 | 九州ナノテック光学株式会社 | 紫外線露光機 |
CN1847985A (zh) * | 2005-04-15 | 2006-10-18 | 陈花明 | 印刷电路板曝光机 |
CN101876784A (zh) * | 2009-04-29 | 2010-11-03 | 翊晖科技股份有限公司 | 曝光机及其曝光方法 |
CN101937173A (zh) * | 2009-06-30 | 2011-01-05 | 景兴精密机械有限公司 | 曝光机的曝光方法 |
CN201765435U (zh) * | 2010-08-25 | 2011-03-16 | 景兴精密机械有限公司 | 曝光机光源装置 |
CN204009354U (zh) * | 2014-06-12 | 2014-12-10 | 志圣科技(广州)有限公司 | 一种气动遮光门保持结构 |
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CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Cai Changtao Inventor after: Gu Xiaoping Inventor after: Ran Lin Inventor after: Ma Xiaoqian Inventor after: Xie Huan Inventor after: He Xiaorong Inventor after: Zhou Yan Inventor after: Xiang Kuiwei Inventor before: Cai Changtao Inventor before: Gu Xiaoping Inventor before: Ma Xiaoqian Inventor before: Xie Huan Inventor before: Zhou Yan Inventor before: Yang Tao Inventor before: Ran Lin Inventor before: He Xiaorong |
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Granted publication date: 20180810 Termination date: 20190605 |