CN106959517A - Optical beam transformation device and laser processing device - Google Patents
Optical beam transformation device and laser processing device Download PDFInfo
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- CN106959517A CN106959517A CN201710387272.5A CN201710387272A CN106959517A CN 106959517 A CN106959517 A CN 106959517A CN 201710387272 A CN201710387272 A CN 201710387272A CN 106959517 A CN106959517 A CN 106959517A
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- conical mirror
- transformation device
- mirror
- optical beam
- beam transformation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0977—Reflective elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/361—Removing material for deburring or mechanical trimming
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention provides a kind of optical beam transformation device and laser processing device；Wherein, the device includes the first conical mirror and the second conical mirror；First conical mirror and the second conical mirror are recessed reflection axicon lens；The apex of first conical mirror concave surface is provided with the opening entered for light beam；The line on the summit of the first conical mirror and the second conical mirror concave surface is conllinear with the optical axis of incident beam；The bottom surface of first conical mirror and the second conical mirror is parallel；The taper concave surface of first conical mirror and the second conical mirror is oppositely arranged；The circular light beam entered via opening in optical beam transformation device, first passes through the reflection of the second conical mirror, then by the reflection of the first conical mirror, is transformed into after annular beam and projects.The present invention improves beam edge energy, and then improves the processing fineness of the processing such as being portrayed, marked by light beam.
Description
Technical field
The present invention relates to optical beam transformation technical field, more particularly, to a kind of optical beam transformation device and laser processing device.
Background technology
In microelectronics, biomedicine, information industry field, people use various light beams more and more, especially swash
Light beam is relevant to solve microchip manufacture, disk storage, the making of Miniature coder, laser labelling marking etc. as icking tool
Retrofit problem.
TEMoo single-mode laser beams are widely used that on the production line of related factories at present, still, this laser beam is not
Superfinishing superfine comminution can be used for, because what the laser beam followed is Gaussian distribution feature, the center intensity of laser beam to be high and edge
Intensity is weak, so that the profile of the lines being scored, word, pattern is unclear, edge blurry, can not meet superfinishing micro-machined
Particular/special requirement.
For existing laser beam edge energy it is weaker the problem of, not yet propose effective solution.
The content of the invention
In view of this, it is an object of the invention to provide a kind of optical beam transformation device and laser processing device, to improve light
Beam edge energy, and then improve the processing fineness of the processing such as being portrayed, marked by light beam.
In a first aspect, the embodiments of the invention provide a kind of optical beam transformation device, including the first conical mirror and the second taper
Mirror；First conical mirror and the second conical mirror are recessed reflection axicon lens；The apex of first conical mirror concave surface is provided with to be entered for light beam
The opening entered；The line on the summit of the first conical mirror and the second conical mirror concave surface is conllinear with the optical axis of incident beam；First taper
The bottom surface of mirror and the second conical mirror is parallel；The taper concave surface of first conical mirror and the second conical mirror is oppositely arranged；Enter via opening
Enter the circular light beam in optical beam transformation device, first pass through the reflection of the second conical mirror, then by the reflection of the first conical mirror, conversion
Projected after cyclic shaped light beam.
With reference in a first aspect, the embodiments of the invention provide the possible embodiment of the first of first aspect, wherein, on
The cone angle for stating the first conical mirror and the second conical mirror is identical.
With reference in a first aspect, the embodiments of the invention provide the possible embodiment of second of first aspect, wherein, on
State the diameter with diameter greater than the second conical mirror of the first conical mirror.
With reference in a first aspect, the embodiments of the invention provide the possible embodiment of the third of first aspect, wherein, on
Stating optical beam transformation device also includes shell, and enclosure is provided with slot, and slot is used for the conical mirror of grafting first and the second taper
Mirror.
With reference to the third possible embodiment of first aspect, the embodiments of the invention provide the 4th of first aspect kind
Possible embodiment, wherein, the quantity of above-mentioned slot is multiple, and multiple slots set along optical axis direction, the first conical mirror
With the second conical mirror is selectable is plugged in slot so that the distance between the first conical mirror and the second conical mirror can be along light
Direction of principal axis is adjusted.
With reference in a first aspect, the embodiments of the invention provide the possible embodiment of the 5th of first aspect kind, wherein, on
Stating the distance between the first conical mirror and the second conical mirror can be adjusted along optical axis direction.
With reference to the 5th kind of possible embodiment of first aspect, the embodiments of the invention provide the 6th of first aspect kind
Possible embodiment, wherein, above-mentioned, optical beam transformation device also includes guide rail, the first conical mirror and the second conical mirror respectively with
Slide is connected, so that the distance between the first conical mirror and the second conical mirror can be adjusted along optical axis direction.
With reference in a first aspect, the embodiments of the invention provide the possible embodiment of the 7th of first aspect kind, wherein, on
The surface for stating the concave surface of the first conical mirror and the second conical mirror is coated with total reflection film；The coefficient of total reflection film and incident light beam ripple
Length matches.
Second aspect, the embodiments of the invention provide a kind of laser processing device, including above-mentioned optical beam transformation device.
With reference to second aspect, the embodiments of the invention provide the possible embodiment of the first of second aspect, wherein, on
Stating laser processing device also includes laser generator and focus pack；Above-mentioned optical beam transformation device is arranged at laser generator and poly-
Between burnt component；The laser generator is used to provide LASER Light Source；The focus pack is used for the ring for projecting optical beam transformation device
Shaped light beam is converged.
The embodiment of the present invention brings following beneficial effect：
A kind of optical beam transformation device provided in an embodiment of the present invention and laser processing device, the first conical mirror and the second taper
Mirror is recessed reflection axicon lens；The circular light entered via the opening of the apex of the first conical mirror concave surface in optical beam transformation device
Beam, first passes through the reflection of the second conical mirror, then by the reflection of the first conical mirror, is transformed into after annular beam and projects；Which
The inside and outside energy of circular light beam is overturn, annular beam is formed, after the annular beam is focused on through outside focusing arrangement, formation
The energy centralization of light beam is stronger, improves beam edge energy, and then improves and the processing such as portrayed, marked by light beam
Processing fineness.
Other features and advantages of the present invention will be illustrated in the following description, also, partly be become from specification
Obtain it is clear that or being understood by implementing the present invention.The purpose of the present invention and other advantages are in specification, claims
And specifically noted structure is realized and obtained in accompanying drawing.
To enable the above objects, features and advantages of the present invention to become apparent, preferred embodiment cited below particularly, and coordinate
Appended accompanying drawing, is described in detail below.
Brief description of the drawings
, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical scheme of the prior art
The accompanying drawing to be used needed for embodiment or description of the prior art is briefly described, it should be apparent that, in describing below
Accompanying drawing is some embodiments of the present invention, for those of ordinary skill in the art, before creative work is not paid
Put, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is a kind of cross-sectional view of the optical beam transformation device provided in an embodiment of the present invention along optical axis direction；
Fig. 2 (a) is the Energy distribution schematic diagram of circular light beam provided in an embodiment of the present invention；
Fig. 2 (b) is the Energy distribution schematic diagram of the annular beam after convergence provided in an embodiment of the present invention；
Fig. 3 is a kind of light path principle figure of optical beam transformation device provided in an embodiment of the present invention；
Fig. 4 is a kind of structural representation of laser processing device provided in an embodiment of the present invention.
Icon：The conical mirrors of 100- first；The conical mirrors of 101- second；100a- is open；40- optical beam transformation devices；41- laser
Generator；42- focus packs.
Embodiment
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with accompanying drawing to the present invention
Technical scheme be clearly and completely described, it is clear that described embodiment is a part of embodiment of the invention, rather than
Whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art are not making creative work premise
Lower obtained every other embodiment, belongs to the scope of protection of the invention.
In view of existing laser beam edge energy it is weaker the problem of, the embodiments of the invention provide a kind of optical beam transformation
Device and laser processing device；The technology be can apply to be portrayed by laser, be marked etc. in the flow of retrofit, should
Technology can be realized using related hardware, be described below by embodiment.
Embodiment one
A kind of cross-sectional view of optical beam transformation device shown in Figure 1 along optical axis direction, the device includes the
One conical mirror 100 and the second conical mirror 101；
The conical mirror 101 of first conical mirror 100 and second is recessed reflection axicon lens；The top of the concave surface of first conical mirror 100
The opening 100a entered for light beam is provided with point；
The line on the summit of the concave surface of 100 and second conical mirror of the first conical mirror 101 is conllinear with the optical axis of incident beam；Should
First conical mirror 100 is parallel with the bottom surface of the second conical mirror 101；The taper of the conical mirror 101 of first conical mirror 100 and second is recessed
Face is oppositely arranged；
The circular light beam entered via above-mentioned opening in optical beam transformation device, first passes through the reflection of the second conical mirror 101, then
By the reflection of the first conical mirror 100, it is transformed into after annular beam and projects.
Referring to the Energy distribution schematic diagram of the circular light beam shown in Fig. 2 (a), and the annular after convergence shown in Fig. 2 (b)
The Energy distribution schematic diagram of light beam；Via the incident circular light beam of the opening of above-mentioned first conical mirror, its Energy distribution meets height
This distribution, i.e., energy is most strong at beam center, and energy is most weak at beam edge；The circular light beam successively passes through above-mentioned optical beam transformation
After the second conical mirror and the conversion of the first conical mirror in device, the inside and outside energy of circular light beam is overturn, annular beam is formed, should
After annular beam is focused on through outside focusing arrangement, the energy centralization of the light beam of formation is stronger.
A kind of light path principle figure of optical beam transformation device shown in Figure 3；As shown in figure 3, incident beam is close to light beam
The light of center is after the first conical mirror and the refraction of the second conical mirror, and the light can the position in the close outside of annular beam
Put, thus, the optical beam transformation device can overturn the inside and outside energy of circular light beam so that the outside energy of light beam is more than light beam
Inner side energy.
By taking laser beam as an example, circular laser beam is weaker due to beam edge energy, portrays, marks carrying out laser
During processing, processing effect can be caused poor, such as profile is unclear, edge blurry；Light beam after being converged through annular laser beam,
Its edge energy is stronger, and when being laser machined, processing effect is more preferably fine, clear-cut, thus, through annular laser beam
Light beam after convergence can apply in more fine, complicated work flow.
A kind of optical beam transformation device provided in an embodiment of the present invention, the first conical mirror and the second conical mirror are recessed reflection cone
Mirror；The circular light beam entered via the opening of the apex of the first conical mirror concave surface in optical beam transformation device, first passes through the second cone
The reflection of shape mirror, then by the reflection of the first conical mirror, be transformed into after annular beam and project；Which is by inside and outside circular light beam
Energy is overturn, and forms annular beam, after the annular beam is focused on through outside focusing arrangement, the energy centralization of the light beam of formation
It is relatively strong, beam edge energy is improved, and then improve the processing fineness of the processing such as being portrayed, marked by light beam.
Further, the cone angle of above-mentioned first conical mirror and the second conical mirror is identical；As shown in figure 1, the first taper
The cone angle of mirror is θ, and the cone angle of the second conical mirror is α, wherein, θ=α；The annular of injection can be made by this way
Light in light beam is parallel to each other.
When actually realizing, in order to not stop the light outgoing beam converting means reflected through the first conical mirror, above-mentioned the
The diameter with diameter greater than the second conical mirror of one conical mirror；Which can be in order to the injection of light, it is to avoid make light in device
The energy dissipation that interior repeated multiple times reflection is caused.
Further, the surface of the concave surface of above-mentioned first conical mirror and the second conical mirror is coated with total reflection film；The total reflection
The coefficient of film matches with incident light beam wavelength；If for example, the wavelength of incident light beam is 1064nm, the total reflection film
Coefficient be 1064nm；Meanwhile, the material and thickness of the total reflection film can be selected as needed, be not limited herein；Should
Mode can ensure that the light of the light beam wavelength of incidence all reflects, and reduce further the energy absorption of optical beam transformation device
Rate.
The material of above-mentioned total reflection film includes ZnS, ZrO2、TiO2、MgF2、SiO2Deng, and the membrane material mixed, for example,
TiO2+Ta2O5Or Ta2O5+ZrO2Deng.Different materials, the coefficient such as its refractive index is different, can be selected according to actual needs
Select.
Embodiment two
Corresponding to a kind of optical beam transformation device provided in above-described embodiment one, the embodiments of the invention provide another light
Beam converting means, the device includes above-mentioned first conical mirror and the second conical mirror, and also including shell, the enclosure is provided with slotting
Groove, the slot is used for the conical mirror of grafting first and the second conical mirror.
Further, the quantity of above-mentioned slot is multiple, and multiple slots are set along optical axis direction, the first conical mirror and the
Two conical mirrors are selectable to be plugged in slot, so that the distance between the first conical mirror and the second conical mirror can be along optical axis sides
To regulation.
When actually realizing, for the ease of operation, the first conical mirror can be fixed in a slot, pass through selection the
The slot position of two conical mirrors, and then adjust the distance between the first conical mirror and the second conical mirror.
The distance between above-mentioned first conical mirror and the second conical mirror can be adjusted along optical axis direction.Bored by regulation first
The distance between shape mirror and the second conical mirror, thus it is possible to vary the size of the annular beam of injection, so as to change the annular after convergence
The depth of focus of light beam；Specifically, when the distance between the first conical mirror and the second conical mirror become big, the annular beam of injection becomes big,
Depth of focus diminishes, now, and the light beam of formation can carry out thinner finer work flow.
Above-mentioned depth of focus, is the abbreviation of the depth of focus, and engineering material field is frequently referred to the depth of field, i.e., when using microscope, when
When focus is directed at jobbie, each point being not only located in the plane can be seen, and in the upper next of this plane
Determine in thickness, can also see clearly, this understands that the thickness of part is exactly depth of focus.
Further, above-mentioned optical beam transformation device also includes guide rail, the first conical mirror and the second conical mirror respectively with guide rail
It is slidably connected, so that the distance between the first conical mirror and the second conical mirror can be adjusted along optical axis direction.
A kind of optical beam transformation device provided in an embodiment of the present invention, the first conical mirror and the second conical mirror are recessed reflection cone
Mirror；The circular light beam entered via the opening of the apex of the first conical mirror concave surface in optical beam transformation device, first passes through the second cone
The reflection of shape mirror, then by the reflection of the first conical mirror, be transformed into after annular beam and project；Which is by inside and outside circular light beam
Energy is overturn, and forms annular beam, after the annular beam is focused on through outside focusing arrangement, the energy centralization of the light beam of formation
It is relatively strong, beam edge energy is improved, and then improve the processing fineness of the processing such as being portrayed, marked by light beam.
Further, the optical beam transformation device that the present embodiment is provided, the distance between the first conical mirror and the second conical mirror
It can be adjusted along optical axis direction；Which can obtain different size, the light beam of different depths of focus, expand the application model of device
Enclose, realize more fine process operation flow.
Embodiment three
Corresponding to the optical beam transformation device provided in above-described embodiment one and embodiment two, one kind shown in Figure 4 swashs
The structural representation of optical machining device, the laser processing device includes above-mentioned optical beam transformation device 40；
Further, above-mentioned laser processing device also includes laser generator 41 and focus pack 42；Above-mentioned optical beam transformation
Device 40 is arranged between laser generator and focus pack；The laser generator 41 is used to provide LASER Light Source；The focusing group
The annular beam that part 42 is used to project in optical beam transformation device is converged.
Specifically, above-mentioned focus pack can be condenser lens；The condenser lens is used to converge annular beam；The convergence
Annular beam afterwards can apply in actual work flow, for example, the annular laser beam after convergence is applied to engraving, mark
In the flows such as note.
Specifically, above-mentioned laser processing device also includes grip part, is gripped for user, workpiece to be processed is carved
Carve, electro-insulating rubber layer is provided with grip part.
Laser processing device provided in an embodiment of the present invention, the first conical mirror and the second conical mirror are recessed reflection axicon lens；
The circular light beam entered via the opening of the apex of the first conical mirror concave surface in optical beam transformation device, first passes through the second conical mirror
Reflection, then by the reflection of the first conical mirror, be transformed into after annular beam and project；Which is by the inside and outside energy of circular light beam
Upset, forms annular beam, after the annular beam is focused on through outside focusing arrangement, the energy centralization of the light beam of formation compared with
By force, beam edge energy is improved, and then improves the processing fineness of the processing such as being portrayed, marked by light beam.
Example IV
Corresponding to the optical beam transformation device provided in above-described embodiment one and embodiment two, and provided in embodiment three
Laser processing device, the embodiments of the invention provide a kind of optical beam transformation method, this method is complete by above-mentioned optical beam transformation device
Into this method comprises the following steps：
Step 1：User sets the first conical mirror and the second conical mirror in optical beam transformation device according to optical beam transformation demand
Between along optical axis direction distance；
Step 2：The circular light beam entered by the opening of the first conical mirror in optical beam transformation device, it is anti-by the second conical mirror
Penetrate；
Step 3：The light reflected by the second conical mirror, then reflected through the first conical mirror, it is transformed into after annular beam and projects；
Step 4：Annular beam after injection is converged by plus lens.
Optical beam transformation method provided in an embodiment of the present invention, the opening via the apex of the first conical mirror concave surface enters light
Circular light beam in beam converting means, first passes through the reflection of the second conical mirror, then by the reflection of the first conical mirror, conversion cyclization
Projected after shaped light beam；Which overturns the inside and outside energy of circular light beam, forms annular beam, and the annular beam gathers through outside
After coke installation is focused on, the energy centralization of the light beam of formation is stronger, improves beam edge energy, and then improve by light beam
The processing fineness of processing such as portrayed, marked.
In addition, in the description of the embodiment of the present invention, unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected, or be integrally connected；Can
To be mechanical connection or electrical connection；Can be joined directly together, can also be indirectly connected to by intermediary, Ke Yishi
The connection of two element internals.For the ordinary skill in the art, with concrete condition above-mentioned term can be understood at this
Concrete meaning in invention.
In the description of the invention, it is necessary to explanation, term " " center ", " on ", " under ", "left", "right", " vertical ",
The orientation or position relationship of the instruction such as " level ", " interior ", " outer " be based on orientation shown in the drawings or position relationship, merely to
Be easy to the description present invention and simplify description, rather than indicate or imply signified device or element must have specific orientation,
With specific azimuth configuration and operation, therefore it is not considered as limiting the invention.In addition, term " first ", " second ",
" the 3rd " is only used for describing purpose, and it is not intended that indicating or implying relative importance.
Finally it should be noted that：Embodiment described above, is only the embodiment of the present invention, to illustrate the present invention
Technical scheme, rather than its limitations, protection scope of the present invention is not limited thereto, although with reference to the foregoing embodiments to this hair
It is bright to be described in detail, it will be understood by those within the art that：Any one skilled in the art
The invention discloses technical scope in, it can still modify to the technical scheme described in previous embodiment or can be light
Change is readily conceivable that, or equivalent is carried out to which part technical characteristic；And these modifications, change or replacement, do not make
The essence of appropriate technical solution departs from the spirit and scope of embodiment of the present invention technical scheme, should all cover the protection in the present invention
Within the scope of.Therefore, protection scope of the present invention described should be defined by scope of the claims.
Claims (10)
1. a kind of optical beam transformation device, it is characterised in that including the first conical mirror and the second conical mirror；
First conical mirror and second conical mirror are recessed reflection axicon lens；The apex of the first conical mirror concave surface is set
It is equipped with the opening entered for light beam；
The line on the summit of first conical mirror and the second conical mirror concave surface is conllinear with the optical axis of incident beam；Described
One conical mirror is parallel with the bottom surface of second conical mirror；The taper concave surface phase of first conical mirror and second conical mirror
To setting；
The circular light beam entered via the opening in the optical beam transformation device, first passes through the reflection of second conical mirror,
Pass through the reflection of first conical mirror again, be transformed into after annular beam and project.
2. optical beam transformation device according to claim 1, it is characterised in that first conical mirror and second taper
The cone angle of mirror is identical.
3. optical beam transformation device according to claim 1, it is characterised in that first conical mirror with diameter greater than described
The diameter of second conical mirror.
4. optical beam transformation device according to claim 1, it is characterised in that the optical beam transformation device also includes shell,
The enclosure is provided with slot, and the slot is used for the first conical mirror described in grafting and second conical mirror.
5. optical beam transformation device according to claim 4, it is characterised in that the quantity of the slot is multiple and multiple
The slot is set along the optical axis direction, first conical mirror and second conical mirror it is selectable be plugged on it is described insert
In groove, so that the distance between first conical mirror and second conical mirror can be adjusted along optical axis direction.
6. optical beam transformation device according to claim 1, it is characterised in that first conical mirror and second taper
The distance between mirror can be adjusted along optical axis direction.
7. optical beam transformation device according to claim 6, it is characterised in that the optical beam transformation device also includes guide rail,
First conical mirror and second conical mirror are connected with the slide respectively, so that first conical mirror and described
The distance between second conical mirror can be adjusted along optical axis direction.
8. optical beam transformation device according to claim 1, it is characterised in that first conical mirror and second taper
The surface of the concave surface of mirror is coated with total reflection film；
The coefficient of the total reflection film matches with incident light beam wavelength.
9. a kind of laser processing device, it is characterised in that including the optical beam transformation device described in claim 1-8 any one.
10. laser processing device according to claim 9, it is characterised in that the laser processing device also includes laser
Generator and focus pack；
The optical beam transformation device is arranged between the laser generator and the focus pack；
The laser generator is used to provide LASER Light Source；The focus pack is used for the ring for projecting the optical beam transformation device
Shaped light beam is converged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710387272.5A CN106959517A (en) | 2017-05-26 | 2017-05-26 | Optical beam transformation device and laser processing device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710387272.5A CN106959517A (en) | 2017-05-26 | 2017-05-26 | Optical beam transformation device and laser processing device |
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| CN106959517A true CN106959517A (en) | 2017-07-18 |
Family
ID=59481997
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| CN201710387272.5A Pending CN106959517A (en) | 2017-05-26 | 2017-05-26 | Optical beam transformation device and laser processing device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111618426A (en) * | 2020-06-05 | 2020-09-04 | 成都拓米电子装备制造有限公司 | Light beam shaping structure and method for improving flexible OLED module laser cutting |
| CN114217447A (en) * | 2021-11-22 | 2022-03-22 | 中国工程物理研究院应用电子学研究所 | Laser beam shaping and converting device |
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| CN114217447A (en) * | 2021-11-22 | 2022-03-22 | 中国工程物理研究院应用电子学研究所 | Laser beam shaping and converting device |
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