CN207547871U - A kind of laser drilling system - Google Patents
A kind of laser drilling system Download PDFInfo
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- CN207547871U CN207547871U CN201721506700.3U CN201721506700U CN207547871U CN 207547871 U CN207547871 U CN 207547871U CN 201721506700 U CN201721506700 U CN 201721506700U CN 207547871 U CN207547871 U CN 207547871U
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- 238000005553 drilling Methods 0.000 title claims abstract description 24
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- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
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Abstract
The utility model discloses a kind of laser drilling system, including：Laser light source, for emitting fundamental-mode gaussian beam；Beam splitting switchs, and for controlling whether fundamental-mode gaussian beam deflects, when not deflecting, fundamental-mode gaussian beam acts on workpiece to be processed by closing beam switch；Light beam converter unit, for when fundamental-mode gaussian beam deflects, the fundamental-mode gaussian beam after deflection to be converted into the Laguerre Gaussian beam of annular angular polarization-type；Close beam switch, Laguerre Gaussian beam for controlling annular angular polarization type deflects, so that angularly the Laguerre Gaussian beam of polarization-type and laser light source transmitting fundamental-mode gaussian beam are coaxial for the annular after deflection, so that the Laguerre Gaussian beam of the angular polarization-type of annular acts on workpiece to be processed.The utility model can obtain big depth-to-width ratio, the aperture of Small Taper in the case where identical energy exports.
Description
Technical field
The utility model belongs to technical field of laser processing, more particularly, to a kind of laser drilling system.
Background technology
With the rapid development of science and technology, traditional processing method has been unable to meet wanting for increasingly sophisticated aperture processing
It asks.Such as on refractory metal molybdenum plate processing micron magnitude aperture micropore；Diameter is processed on hard tungsten carbide platform gold
For tens microns of aperture；In hard and crisp materials such as hard and crisp deep holes red, that hundreds of micron diameters are processed on sapphire, use
Conventional machining process is impossible.
Laser beam is the photon a fluid stream of the high concentration on room and time, and Application Optics focusing technology can be converged
In the very low range of micron dimension, to obtain 105W/cm2~1015W/cm2The high illumination power density of magnitude.This is to appoint
What its light source cannot and.Under so high optical power density irradiation, can almost laser boring be carried out to any material.
Laser boring has：Do not need to that machining tool, process velocity are fast, surface deformation is small, it is significant excellent to process a variety of materials etc.
More property, so widely being paid attention in engineering field.Light has and traditional processing and other spies in the microfabrication of material
The incomparable advantage of kind manufacturing process, laser boring heat effect area is small, and machining accuracy is higher, has extensive versatility.But
It is that the common laser boring processing unit (plant) still laser power density with termination phase declines, removes the quick of material and fly
Cooling is splashed, discharge causes the depth in aperture or taper that can not continue to accomplish that more preferably the finish of hole wall is poor, hole not in time
Roundness is bad, and recast layer is particularly generated on hole wall, results even in phenomena such as aperture blocks, and influences the precision in hole.
Therefore, the hole wall quality in processed aperture how is improved, increases aspect ratio, further reduces taper, be laser hole
Diameter processing industry urgent problem to be solved.
Utility model content
The purpose of this utility model is to provide a kind of composite laser drilling systems, it is intended to solve existing laser boring and add
Tooling, which puts the depth in the aperture of processing or taper, can not continue to accomplish that more preferably the finish of hole wall is poor, and the roundness in hole is not
It is good, the technical issues of recast layer is particularly generated on hole wall, phenomena such as aperture blocks is resulted even in, influences the precision in hole.
To achieve the above object, the utility model provides a kind of laser drilling system, including：Laser light source, beam splitting are opened
Pass, light beam converter unit and conjunction beam switch；
Laser light source, for emitting fundamental-mode gaussian beam；Beam splitting switchs, for controlling whether fundamental-mode gaussian beam occurs
Deflection, when not deflecting, fundamental-mode gaussian beam acts on workpiece to be processed by closing beam switch；Light beam transformation is single
Member, for when fundamental-mode gaussian beam deflects, the fundamental-mode gaussian beam after deflection to be converted into annular angular polarization-type
Laguerre-Gaussian beam；Beam switch is closed, for when beam splitting switchs control fundamental-mode gaussian beam and deflects, controlling annular angle
It deflects to the Laguerre-Gaussian beam of polarization-type so that the Laguerre-Gaussian beam of the angular polarization-type of annular after deflection
It is coaxial with laser light source transmitting fundamental-mode gaussian beam, so that the Laguerre-Gaussian beam of the angular polarization-type of annular is acted on and is treated
The workpiece of processing.
Wherein, fundamental-mode gaussian beam is the light beam of Gaussian Profile, and only there are one main peaks, and work is processed with fundamental-mode gaussian beam
Part main purpose forms aperture for material ablation, completes preliminary processing.Melting the surplus material to splash may be because discharging not
In time and the reasons such as Gaussian beam edge energy reduces cause surplus material to cool down again to be attached to hole wall, lead to the light of hole wall
The problems such as cleanliness is bad, easy formation crackle.And its section of the Laguerre-Gaussian beam of angular polarization type of optical field distribution for annular
There are two main peak, and the two main peaks are symmetrical with respect to the peak position of fundamental-mode gaussian beam, therefore, using annular angular
The Laguerre-Gaussian beam of polarization-type carries out further modification to the hole wall that preparatory processing is formed and processes, and reaches and improves hole
The purpose of path quality.
Laser drilling system provided by the utility model, can by controlling whether fundamental-mode gaussian beam deflects, with
Control the Laguerre-Gaussian beam difference workpieces processing aperture of fundamental-mode gaussian beam and the angular polarization-type of annular centre position and
Hole wall position to improve the finish of workpieces processing and quality, processes the hole of high quality.
Specifically, light beam converter unit can be polarization converter (polarization converter, PC), Asia
Input fundamental-mode gaussian beam can be converted into annular angular polarization type optical beam by wave length grating, combination wave plate or spiral phase plate etc.
Device.
Optionally, which further includes：Axial cone prism；Axial cone prism be located at light beam converter unit and close beam switch it
Between, for the Laguerre-Gaussian beam of annular angular polarization-type to be converted into the high-order bessel beam of annular angular polarization-type,
Make it have the characteristic of nearly salt free ligands transmission；Beam switch is closed, for making the high-order bessel beam effect of annular angular polarization-type
In workpiece to be processed.
The Laguerre-Gaussian beam of annular angular polarization-type is converted into annular angular by the utility model using axial cone prism
The high-order bessel beam of polarization-type makes it have the characteristic of nearly salt free ligands transmission, can improve the working depth of workpieces processing,
Continue processing and the discharge of excess stock with assist aperture bottom, so as to fulfill big aspect ratio, Small Taper and height is processed
Hole wall finish quality hole.
Optionally, which further includes：First speculum and the second speculum；First speculum and the second speculum difference
For fundamental-mode gaussian beam with laser light source transmitting in 135 degree of angles and 45 degree of angles, the first speculum and the second speculum are vertical；When
When fundamental-mode gaussian beam deflects, by control beam splitting switch fundamental-mode gaussian beam is made to turn 90 degrees partially, be incident upon and its
Into on first speculum at 45 degree of angles；Fundamental-mode gaussian beam of first speculum for after deflecting reflexes to light beam transformation list
Member, the light beam after the reflection of the first speculum are parallel with the direction for the fundamental-mode gaussian beam that laser light source emits；Second speculum
The high-order bessel beam of the angular polarization-type of annular being converted to axial cone prism is in 45 degree of angles, for by high-order Bezier light
Beam reflexes to conjunction beam switch；Closing beam switch by control makes high-order bessel beam turn 90 degrees partially so that the annular angle after deflection
It is coaxial to the Laguerre-Gaussian beam and laser light source transmitting fundamental-mode gaussian beam of polarization-type.
Optionally, which further includes：First collimation focus unit and the second collimation focus unit；First collimation focusing is single
Member is located at light path where the fundamental-mode gaussian beam not deflected, between being located at beam splitting switch and closing beam switch, for this
Light beam in light path carries out collimator and extender and focus adjustment；Second collimation focus unit is located at the fundamental-mode gaussian beam to deflect
Place light path, between axial cone prism and the second speculum, for carrying out collimator and extender and coke to the light beam in the light path
Away from adjusting.
Optionally, which further includes：Export focusing unit；It exports focusing unit and is located at conjunction beam switch and work to be processed
Between part, the light beam for the output of pairing beam switch focuses on and adjusts position of the focus in workpiece to be processed of light beam so that adds
Work best results.
Optionally, by the way that beam splitting is controlled to switch and close the drawing that beam switch realizes fundamental-mode gaussian beam and the angular polarization-type of annular
Gai Er-Gaussian beam two types light beam switching acts on workpiece to be processed.
In general, have the above technical solutions conceived by the present invention are compared with the prior art, with following
Beneficial effect：
1st, laser drilling system provided by the utility model need not change light supply apparatus, by installing two kinds of different type light additional
The conversion outside optical system of beam can be realized while angularly light beam is respective in perforation processing with annular using basic mode light beam
The advantages of, do not change laser internal structure, it is easy for installation simple, it is applied widely.
2nd, laser drilling system provided by the utility model can pass through beam splitting according to the specific actual conditions of material processed
Switch and the action time for closing each light beam in beam switch two kinds of light beams of independent control make its function and effect integrated reach most
It is excellent.
3rd, the high-order bessel beam of the angular polarization-type of annular has the characteristic of salt free ligands transmission in itself, can be in free space
Middle and long distance transmits and unlikely diverging, can improve the distance of outgoing mirror and rapidoprint, and the material to splash is effectively prevented to be stained with
Contaminate camera lens and caused by influence.
4th, the utility model overall structure is relatively simple, and in addition to light beam converter unit, other are all more typical optics
Element, processing are convenient and simple.
5th, the utility model has had both quick, the vector light beam energy absorption of common basic mode beam laser perforation processing
The characteristics of rate height is with annular beam modification aperture hole wall edge can improve the quality and operating efficiency in processed aperture, this reality
Big depth-to-width ratio, the aperture of Small Taper can be obtained with novel in the case where identical energy exports.
Description of the drawings
Fig. 1 is laser drilling system overall structure frame diagram provided by the utility model；
Fig. 2 is laser drilling system optical beam transformation part index path provided by the utility model；
Fig. 3 is polarization converter STRUCTURE DECOMPOSITION structure diagram；
Fig. 4 is waveform diagram of the fundamental-mode gaussian beam after beam shaping system each section；
Fig. 5 is optical field distribution section emulation of the high-order bessel beam of the angular polarization-type of annular in different transmission ranges
Figure, optical field distribution section analogous diagrams of the Fig. 5 (a) for transmission range high-order bessel beam when 200mm-800mm changes, Fig. 5
(b) it is the optical field distribution section analogous diagram of transmission range high-order bessel beam when 800mm-1400mm changes.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention is further described in detail.It should be appreciated that specific embodiment described herein is only explaining this
Utility model is not used to limit the utility model.It is in addition, involved in the various embodiments of the present invention described below
And to technical characteristic can be combined with each other as long as they do not conflict with each other.
The utility model proposes a kind of laser drilling systems, it is intended to solve the light of existing laser drilling device aperture hole wall
The technical problems such as cleanliness is poor, and the roundness in hole is bad, generates recast layer on hole wall, and aspect ratio is limited.
It is understood that since laser drilling system provided by the utility model is angular based on basic mode light beam and annular
Light beam is combined, and therefore, and can be described as composite laser drilling method and system.
Composite laser drilling system provided by the utility model, this laser boring system of processing can be in identical energy
In the case of amount output, big depth-to-width ratio, the aperture of Small Taper are obtained.Simultaneously greatly improve aperture quality (aperture inner wall
Roughness, cracks etc.).
Fig. 1 is laser drilling system overall structure frame diagram provided by the utility model, as shown in Figure 1, including：Laser
Light source, the first collimation focus unit, closes beam switch, output focusing unit, light beam converter unit and second at beam splitting switch
Collimate focus unit.
Laser light source, for emitting fundamental-mode gaussian beam；Beam splitting switchs, for controlling whether fundamental-mode gaussian beam occurs
Deflection, when not deflecting, fundamental-mode gaussian beam acts on workpiece to be processed by closing beam switch；Light beam transformation is single
Member, for when fundamental-mode gaussian beam deflects, the fundamental-mode gaussian beam after deflection to be converted into annular angular polarization-type
Laguerre-Gaussian beam；Beam switch is closed, for when beam splitting switchs control fundamental-mode gaussian beam and deflects, controlling annular angle
It deflects to the Laguerre-Gaussian beam of polarization-type so that the Laguerre-Gaussian beam of the angular polarization-type of annular after deflection
It is coaxial with laser light source transmitting fundamental-mode gaussian beam, so that the Laguerre-Gaussian beam of the angular polarization-type of annular is acted on and is treated
The workpiece of processing.
Light beam converter unit further includes axial cone prism；Axial cone prism is located at light beam converter unit and closes beam switch
Between, for the Laguerre-Gaussian beam of annular angular polarization-type to be converted into the high-order Bezier light of annular angular polarization-type
Beam makes it have the characteristic of nearly salt free ligands transmission；Beam switch is closed, the high-order bessel beam for making annular angular polarization-type is made
For workpiece to be processed.
First collimation focus unit is located at light path where the fundamental-mode gaussian beam that does not deflect, be located at beam splitting switch and
Between closing beam switch, for carrying out collimator and extender and focus adjustment to the light beam in the light path；
Second collimation focus unit is located at light path where the fundamental-mode gaussian beam to deflect, for the light in the light path
Shu Jinhang collimator and extenders and focus adjustment.
It exports focusing unit to be located between conjunction beam switch and workpiece to be processed, the light beam for the output of pairing beam switch gathers
Position of the focus in workpiece to be processed that be burnt and adjusting light beam so that processing effect is best.
By the way that beam splitting is controlled to switch and closes Laguerre-height of beam switch realization fundamental-mode gaussian beam and the angular polarization-type of annular
The switching of this light beam two types light beam acts on workpiece to be processed.
In a specific example, pulsed solid stale laser can be selected in laser light source, such as neodymium glass (Nd3+- silicic acid
Salt glass) laser or yttrium-aluminium-garnet (Nd-YAG crystal) laser, repetition rate is high, good beam quality.
Beam splitting switchs, and either automatically controlled galvanometer or any device of laser beam splitter can be realized using Electro-optical Modulation crystal,
For by from the beam splitter that light source is launched to two different light paths, inhomogeneity to be generated to pass through different optical devices
The light beam of type.
Light beam converter unit is mainly made of polarization converter (PC) and axial cone prism.Laser emits basic mode Gauss
Fundamental-mode gaussian beam after radial polarisation converter, is converted into the Laguerre-Gaussian beam of annular angular polarization by light beam,
Using the angular light beam of high-order Bessel type annular that required nearly salt free ligands transmission is converted into after axicon mirror.
First collimation focus unit and the second collimation focus unit are respectively to fundamental-mode gaussian beam and annular angularly polarized light
Shu Jinhang collimations expand and the adjusting of focal length.
Beam switch is closed, either automatically controlled galvanometer or any device of sharp combiner can be realized using Electro-optical Modulation crystal,
For beam will to be closed to outgoing mirror from the light beam of different light paths incidence.
Focusing unit focuses on and adjusts position of the focus in workpieces processing of light beam so that function and effect are best.
The premise of laser boring processing is that laser is received for machined material and is converted into thermal energy.In different power density etc.
Under the conditions of, a variety of different variations occur for material surface area.These variations include temperature raising, fusing, vaporization, form aperture
With plasma cloud etc..Cooperation auxiliary gas blasting realizes perforation processing more than material.
The purpose of this utility model is to realize the combination of common fundamental-mode gaussian beam and the angular light beam of annular, collaboration
Carry out aperture processing operation.The utility model has had both quick, the vector light beam of common basic mode beam laser perforation processing
The characteristics of S. E. A. height is with annular beam modification aperture hole wall edge, the quality and operation that can improve processed aperture are imitated
Rate.According to actual conditions, working time and the frequency of two kind beam state can be dynamically adjusted, and such as processing the starting stage can be with
Based on fundamental-mode gaussian beams, two kinds of light beams are used alternatingly when having formed certain pore size, continue to punch using fundamental-mode gaussian beam,
With reference to the annular established hole walls of angular light Shu Jiagong, and gas-pressurized is coordinated to blow down waste material among aperture.This practicality is new
Type can obtain big depth-to-width ratio, the aperture of Small Taper in the case where identical energy exports.Because when the aperture of Small Taper
Depth when continuing to increase, traditional fundamental-mode gaussian beam causes light beam to generate certain hair with the increase of transmission range
It dissipates, it is difficult to ensure that the aperture quality of bottom, and the excess stock melted is also easy to be condensate on hole wall, with reference to annular angular
The salt free ligands transmission of light beam and the advantage of its optical field distribution just can be good at solving the problems, such as this.
Further, fundamental-mode gaussian beam is mainly used for the primary action of operation material surface holes, makes workpiece surface or adds
The material fusing of the bottom in aperture, vaporization during work, form plasma, and absorption of the reinforcing material to laser is that punching adds
The main process of work, existing laser boring processing technology are also only limitted to this.
Further, it is the utility model in the gap of fundamental-mode gaussian beam processing by adding in annular angularly polarized light
Most crucial part.Axially symmetry polarization light beam is the special non-uniform polarisation structure of one of which, radial polarisation and angular polarization
It is two typical polarization states of axially symmetry polarization, angular polarization light beam has axisymmetric electric field intensity structure and hollow ring-type
Intensity distribution, it can generate the electric field longitudinal component of intensity bigger after high numerical aperture lens focus on, it is existing the study found that
At identical conditions, vector light beam can realize higher energy absorption efficiency than common circularly polarized light beam, therefore
It is very beneficial for laser machining.Meanwhile the annular mould field far-field distribution of angular polarization light beam also can be to machined aperture portion
Hole wall edge carries out additional treatments, improve finish and quality, while aperture bottom is assisted to continue to process and more than material
Discharge, so as to fulfill the hole of big aspect ratio, Small Taper and high hole wall finish quality is processed.
Further, to realize that the high speed of two kinds of beam types in process converts, in beam splitting with closing beam switch part
Using high speed electro-optical switch or high-velocity scanning galvanometer, the conversion frequency of kHz grade and the response speed of Millisecond can be realized
Degree.
Fig. 2 is laser drilling system optical beam transformation part index path provided by the utility model, as shown in Fig. 2, the light path
Including：The 1, first collimation of beam splitting switch focus unit 2 closes beam switch 3, output focusing unit 4, the first speculum 5, light beam
Converter unit 6, axial cone prism 7, second collimate 8 and second speculum 9 of focus unit.Compared with prior art, main area
The light path part for not being to generate the angular light beam of annular designs, and is illustrated below.
Under fundamental-mode gaussian beam operating mode, optical routing beam splitting switch 1, first collimation focus unit 2, close beam switch 3,
Export 4 composition of focusing unit (focus lamp).
In this operating mode：Beam splitting switch 1 is first passed around by the fundamental-mode gaussian beam that lasing light emitter is sent out, control point at this time
Beam switch 1 makes light beam not deflect, then passes sequentially through the first collimation focus unit 2 and close beam switch 3, and control at this time is closed beam and opened
Closing 3 makes light beam not deflect, and fundamental-mode gaussian beam is ultimately applied to workpiece to be processed by exporting focusing unit 4.
Under the operating mode of annular angularly polarized light, optical routing beam splitting switchs the 1, first speculum 5, light beam transformation
Unit 6, axial cone prism 7, second collimate focus unit 8, the second speculum 9, conjunction beam switch 3, output focusing unit 4 and form.
In this operating mode：Beam splitting switch 1 is first passed around by the light that lasing light emitter is sent out, beam splitting switch is controlled to make light at this time
Beam deflects 90 °, is incident upon on the first speculum 5 of angle at 45 ° with light path, and the first speculum 5 is by beam emissions to annular angle
It is generated in light path to polarised light, light beam vertical incidence and passes through light beam converter unit 6, axial cone prism 7 and second successively
Focus unit 8 is collimated, light beam is converted into the annular angular polarization of salt free ligands transmission from basic mode Gaussian by the device in the light path
Light beam is again incident on the second speculum 9 with light path placement at 45 °.Second speculum 9 reflects annular angular light beam
To beam switch 3 is closed, closing beam switch 3 by control at this time makes 90 ° of light beam deflection, same with the light path of fundamental-mode gaussian beam before
Axis, and finally workpiece to be processed is acted on perpendicular through output focusing unit number 4.Beam splitting switch 1 passes through electricity with closing beam switch 3
Control signal works at the same time deflection optical path, to meet the angular light beam of annular and the coaxial output of fundamental-mode gaussian beam light path.
Specifically, as shown in Fig. 2, the first collimation collimation focus unit 8 of focus unit 2 and second can be by one group (such as two
Piece) varifocal convex lens group forms.
Polarization converter PC (polarization converter) in the utility model is as shown in figure 3, its structure is
The annular line style polarization of a series of radially (radius) same to transmission axle (concentric transmission axis) distribution
Piece, fundamental-mode gaussian beam can form angular polarization after along the direction of its cyclic annular polarizer.Circle centre position can form an angle
To the singular point of distribution, therefore transformed beam center is minimum, forms annular spread.Its effect is will to enter the base come in
Mould Gaussian beam is converted into angularly polarized light of the main peak for annular.The part can complete in several ways, such as using sub- wave
Long grating, combination wave plate, spiral phase plate etc..But since the polarization light quality that above device is complicated and generates needs
It further discusses, therefore selects the polarization converter of the structure.Fundamental-mode gaussian beam forward and backward waveform such as Fig. 4 with this configuration
Shown, fundamental-mode gaussian beam first passes through the colimated light system being made of convex lens L1 and L2, and waveform is the basic mode Gauss light of single main peak
Beam, then the drawing lid that main peak is annular (being presented as symmetrical two main peaks in section) is converted by the fundamental-mode gaussian beam after PC
That-Gaussian beam.
The angular light beam field distribution of annular used in the utility model can be expressed as：
Wherein A is amplitude, and w is the beam radius in z=0.R is the radial direction radius of light field, and z is the position of the direction of propagation
Coordinate, the salt free ligands transmission of angularly polarized light can be realized by axial cone prism.The transfer function of axial cone prism can represent
For：
Refractive index of the wherein n for axial cone prism, cone-apex angles of the γ for axial cone prism, radiuses of the R for prism of corner cube, k=2 π/
λ is wave number.
In cartesian coordinate system, it can angularly be described as with the light of radial direction：
Wherein,For x directions unit coordinate vector,For y directions unit coordinate vector,For radial direction unit coordinate vector,For angular unit coordinate vector,For azimuth, further according to Collins Formula, the angularly polarized light in y directions passes through axial cone prism
It can be expressed as in free space transmission afterwards：
Wherein, Ey(ρ, θ, z) is the optical field distribution on y directions, and λ is wavelength, and ρ is the polar diameter under polar coordinates, and θ is in pole
Polar angle under coordinate, z are the position coordinates of the direction of propagation, and k is wave number,For azimuth, w is the beam radius in z=0, r
For the radial direction radius of light field, n is the refractive index of axial cone prism, and γ is the cone-apex angle of axial cone prism.
Using a series of simplification, the light field in y directions can be described as：
Wherein, Ey(ρ, z) be y directions on optical field distribution, J1For first kind first-order bessel function, λ is wavelength, ρ be
Polar diameter under polar coordinates, θ are the polar angle under polar coordinates, and z is the position coordinates of the direction of propagation, and k is wave number,For azimuth, w
For the beam radius in z=0, r is the radial direction radius of light field, and n is the refractive index of axial cone prism, and γ is the vertex of a cone of axial cone prism
Angle.X orientation principles are identical, do not repeat.
Fig. 5 is mode distributions situation emulation of the angular light beam of the annular after different z are to distance.Fig. 5 (a) is passes
The optical field distribution section analogous diagram of defeated distance high-order bessel beam when 200mm-800mm changes, Fig. 5 (b) are transmission range
The optical field distribution section analogous diagram of high-order bessel beam when 800mm-1400mm changes.Wherein, with reference to Fig. 5 (a) and Fig. 5
(b) it can be seen that, which is annular spread, and to be symmetrical bimodal, the collimation focus unit before coordinating can match in section
The size in the aperture processed makes its peak energy just can act on hole wall, plays modification hole wall, improves aperture light
The effect of cleanliness.After by long a distance (1400mm), the mode distributions of the angular light beam of annular are still
Original state is remain, transmission process is substantially not subject to the influence of diffraction diverging, therefore is very suitable for big aspect ratio, no cone
The processing in the aperture of degree.
As it will be easily appreciated by one skilled in the art that the above is only the preferred embodiment of the utility model only, not
To limit the utility model, any modification made within the spirit and principles of the present invention, equivalent replacement and change
Into etc., it should be included within the scope of protection of this utility model.
Claims (6)
1. a kind of laser drilling system, which is characterized in that including：Laser light source, beam splitting switch, light beam converter unit with
And close beam switch；
The laser light source, for emitting fundamental-mode gaussian beam；
The beam splitting switch, for controlling whether the fundamental-mode gaussian beam deflects, when not deflecting, the basic mode
Gaussian beam acts on workpiece to be processed by the conjunction beam switch；
The light beam converter unit, for when the fundamental-mode gaussian beam deflects, by the basic mode Gauss after deflection
Light beam is converted into the Laguerre-Gaussian beam of annular angular polarization-type；
The conjunction beam switch, for when beam splitting switch controls the fundamental-mode gaussian beam to deflect, controlling the ring
The Laguerre-Gaussian beam of shape angular polarization type deflects so that and the Laguerre of the angular polarization-type of annular after the deflection-
Gaussian beam and laser light source transmitting fundamental-mode gaussian beam are coaxial, so that the Laguerre-Gauss of the angular polarization-type of the annular
Light beam acts on workpiece to be processed.
2. laser drilling system according to claim 1, which is characterized in that further include：Axial cone prism；
The axial cone prism is located between the light beam converter unit and the conjunction beam switch, for by annular angular polarization
The Laguerre-Gaussian beam of type is converted into the high-order bessel beam of annular angular polarization-type, makes it have nearly salt free ligands transmission
Characteristic；
The conjunction beam switch, the high-order bessel beam for making the angular polarization-type of the annular act on workpiece to be processed.
3. laser drilling system according to claim 2, which is characterized in that further include：First speculum and the second reflection
Mirror；
First speculum and the second speculum are in respectively 135 degree of angles with the fundamental-mode gaussian beam of laser light source transmitting
With 45 degree of angles, first speculum and second speculum are vertical；
When the fundamental-mode gaussian beam deflects, by controlling the beam splitting switch that fundamental-mode gaussian beam is made to turn 90 degrees partially,
Be incident upon on its first speculum into 45 degree of angles；
Fundamental-mode gaussian beam of first speculum for after deflecting reflexes to the light beam converter unit, and described first
Light beam after speculum reflection is parallel with the direction for the fundamental-mode gaussian beam that the laser light source emits；
The high-order bessel beam of second speculum and the angular polarization-type of the annular that the axial cone prism is converted to is in 45
Angle is spent, for the high-order bessel beam to be reflexed to the conjunction beam switch；
By controlling the conjunction beam switch that the high-order bessel beam is made to turn 90 degrees partially so that the annular after the deflection is angular
The Laguerre-Gaussian beam of polarization-type and laser light source transmitting fundamental-mode gaussian beam are coaxial.
4. laser drilling system according to claim 3, which is characterized in that further include：First collimation focus unit and the
Two collimation focus units；
The first collimation focus unit is located at light path where the fundamental-mode gaussian beam that does not deflect, be located at beam splitting switch and
Between closing beam switch, for carrying out collimator and extender and focus adjustment to the light beam in the light path；
The second collimation focus unit is located at light path where the fundamental-mode gaussian beam that deflects, is located at axial cone prism and the
Between two-mirror, collimator and extender and focus adjustment are carried out for the light beam in the light path.
5. laser drilling system according to any one of claims 1 to 4, which is characterized in that further include：Output focuses on single
Member；
The output focusing unit, which is located at, to be closed between beam switch and workpiece to be processed, for the light to the conjunction beam switch output
Beam focuses on and adjusts position of the focus in workpiece to be processed of light beam so that processing effect is best.
6. laser drilling system according to claim 5, which is characterized in that opened by the way that the beam splitting is controlled to switch and closes beam
Close realize fundamental-mode gaussian beam and the angular polarization-type of annular the switching of Laguerre-Gaussian beam two types light beam act on it is described
Workpiece to be processed.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721506700.3U CN207547871U (en) | 2017-11-13 | 2017-11-13 | A kind of laser drilling system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721506700.3U CN207547871U (en) | 2017-11-13 | 2017-11-13 | A kind of laser drilling system |
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| CN207547871U true CN207547871U (en) | 2018-06-29 |
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| CN201721506700.3U Withdrawn - After Issue CN207547871U (en) | 2017-11-13 | 2017-11-13 | A kind of laser drilling system |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107824959A (en) * | 2017-11-13 | 2018-03-23 | 华中科技大学 | A kind of laser boring method and system |
| CN109352170A (en) * | 2018-12-25 | 2019-02-19 | 珠海光库科技股份有限公司 | Focus control, laser equipment and its application method |
| CN110174770A (en) * | 2019-03-18 | 2019-08-27 | 首都师范大学 | Multistage stablizes the generation device and method of transmission bessel beam on a kind of axis |
| CN111151873A (en) * | 2018-11-06 | 2020-05-15 | 大族激光科技产业集团股份有限公司 | Laser cutting device and method for brittle material |
| CN112894146A (en) * | 2019-12-04 | 2021-06-04 | 大族激光科技产业集团股份有限公司 | Laser processing method and device for glass substrate through hole |
-
2017
- 2017-11-13 CN CN201721506700.3U patent/CN207547871U/en not_active Withdrawn - After Issue
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107824959A (en) * | 2017-11-13 | 2018-03-23 | 华中科技大学 | A kind of laser boring method and system |
| CN107824959B (en) * | 2017-11-13 | 2024-02-02 | 华中科技大学 | Laser drilling method and system |
| CN111151873A (en) * | 2018-11-06 | 2020-05-15 | 大族激光科技产业集团股份有限公司 | Laser cutting device and method for brittle material |
| CN109352170A (en) * | 2018-12-25 | 2019-02-19 | 珠海光库科技股份有限公司 | Focus control, laser equipment and its application method |
| CN110174770A (en) * | 2019-03-18 | 2019-08-27 | 首都师范大学 | Multistage stablizes the generation device and method of transmission bessel beam on a kind of axis |
| CN110174770B (en) * | 2019-03-18 | 2023-10-27 | 首都师范大学 | Device and method for generating on-axis multistage stable transmission Bessel light beam |
| CN112894146A (en) * | 2019-12-04 | 2021-06-04 | 大族激光科技产业集团股份有限公司 | Laser processing method and device for glass substrate through hole |
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