CN106956512B

CN106956512B - Liquid ejecting head and liquid injection apparatus

Info

Publication number: CN106956512B
Application number: CN201710008649.1A
Authority: CN
Inventors: 奥岛真吾; 刈田诚一郎; 青木孝纲; 永井议靖
Original assignee: Canon Inc
Current assignee: Canon Inc
Priority date: 2016-01-08
Filing date: 2017-01-06
Publication date: 2019-08-02
Anticipated expiration: 2037-01-06
Also published as: JP6914645B2; CN106956512A; JP2017124606A

Abstract

Liquid ejecting head and liquid injection apparatus, liquid ejecting head include: the first recording element plate and the second recording element plate, and having will be used to spray the recording element of the energy of liquid for generating；First support member and the second support member are used to support the first recording element plate and the second recording element plate respectively；And flow channel forming member, the first support member and the second support member being arranged in juxtaposition are carried thereon.The edge for being located in second that side of recording element plate of first recording element plate is prominent from the edge for being located in second that side of support member of the first support member towards the second recording element plate.

Description

Liquid ejecting head and liquid injection apparatus

Technical field

Liquid injection apparatus (such as ink-jet printer) is applied not only to household printing, and is used for Commercial print (such as quotient The printing of industry purposes and the printing of retail photo), and answered for the Industrial Printing including electronic circuitry and plate display manufacturing With.For liquid injection apparatus, field especially is printed in commercial use, needs high-speed printing ability strongly.It is being dedicated to Realize that viable commercial row type liquid ejecting head, the width of the row type liquid ejecting head are greater than the note that will be used together with this The width of recording medium and the liquid injection port therefore with more than ever before quantity, to realize the printing of higher speed.

Background technique

As the technology for realizing the liquid ejecting head with wider width, it has been proposed that by liquid ejecting head Longitudinal direction on arrange multiple recording element plates and the liquid ejecting head that is formed, wherein it is every in multiple recording element plate A recording element plate has multiple injection tips.

The specification of Japan Patent No.4,495,762 disclose it is a kind of will be multiple on the longitudinal direction of liquid ejecting head The technology of recording element plate arrangement in column.The specification of Japan Patent No.4,824,795, which describes, a kind of prepares multiple injection moulds The technology of block, each jet module have recording element plate and support the support member of the recording element plate, and in injection mould Multiple jet modules are installed in support plate in the state that block is individually detachable.By this technology, if in jet module A specific jet module fall into failure, then can only replace the module of failure.

When jet module is by using technology described in the specification in Japan Patent No.4,495,762 or in Japan Patent No.4, technology described in 824,795 specification and when being arranged in column in the state of independent detachable, any two Minimum range between the recording element plate of adjacent positioned is directed at essence with installation site by the level of the machining accuracy of support member The horizontal limitation of degree, this is because these precision levels are lower.The problem may cause the record member of any two adjacent positioned The case where the distance between part plate can not satisfactorily reduce.

When unsatisfactorily shorten separate the recording element plate of any two adjacent positioned apart from when, such as sweeping What the side of retouching looked up, the width for being arranged in the displacement of the injection tip column on two recording element plates in adjacent area may It is very big, and as observed in a longitudinal direction, between separating the injection tip being arranged on two recording element plates column Gap may become difficult to endure ground greatly.Then as a result, by using having the shortcomings that this liquid ejecting head record figure obtained As the inhomogeneities on the record image in region corresponding with the adjacent area of recording element plate may be showed.

Summary of the invention

Therefore, in view of the above-mentioned problems of the prior art, the purpose of the present invention is to provide a kind of liquid ejecting head and liquid Injection apparatus, the distance between recording element plate of any two of them adjacent positioned can be smaller than previous.

According to the present invention, a kind of liquid ejecting head is provided, comprising: the first recording element plate and the second recording element plate, The first recording element plate and the second recording element plate have a recording element for generating energy, and the energy will be by Injection for liquid；First support member and the second support member, first support member and second support member For supporting the first recording element plate and the second recording element plate respectively；And flow channel forming member, it is described First support member and second support member being arranged side by side are carried on flow channel forming member, wherein described The edge for being located in that side of second data board of first recording element plate is described from being located in for first support member The edge of second that side of support member is prominent towards the second recording element plate.

From the description with reference to the accompanying drawings to exemplary embodiment, other feature of the invention be will be apparent.

Detailed description of the invention

Fig. 1 is the schematic diagram of the liquid injection apparatus of the invention using example 1, and that schematically shows liquid injections The construction of device.

Fig. 2 is the schematic diagram of the invention using the first circulation path in example 1.

Fig. 3 is the schematic diagram of the invention using the second circulation path in example 1.

Fig. 4 A and 4B are the schematic perspective views of the liquid ejecting head of the invention using example 1, are schematically shown The construction of the liquid ejecting head.

Fig. 5 is the schematic, exploded, isometric illustration of the liquid ejecting head of the invention using example 1.

Fig. 6 A, 6B, 6C, 6D, 6E and 6F are that the surface of the invention using the flow channel forming member in example 1 regards Figure.

Fig. 7 is the schematic amplification perspective view of the flow channel forming member of the invention using example 1, is shown Internal flow channel.

Fig. 8 is the schematic cross section of the line 8-8 interception in Fig. 7.

Fig. 9 A and 9B are the schematic diagrames of the invention using the jet module in example 1.

Figure 10 A, 10B and 10C are the schematic plan views of the invention using the recording element plate in example 1.

Figure 11 is along the signal of recording element plate and cover shown in the line 11-11 interception cross section in Figure 10 A Property perspective view.

Figure 12 is the schematic enlarged plan view of the adjacent area of two recording element plates of the invention using example 1.

Figure 13 A and 13B are the schematic perspective views of the liquid ejecting head of the invention using example 2, are schematically shown The construction of the liquid ejecting head is gone out.

Figure 14 is the schematic, exploded, isometric illustration of the liquid ejecting head of the invention using example 2.

Figure 15 A, 15B, 15C, 15D and 15E are that the surface of the invention using the flow channel forming member in example 2 regards Figure.

Figure 16 is the schematic isometric perspective of the recording element plate using example 2 and flow channel forming member of the invention Figure, shows recording element plate and flow channel from the visual angle for the liquid for flowing through recording element plate and flow channel forming member The connection relationship of forming member.

Figure 17 is the schematic cross section of the line 17-17 interception in Figure 16.

Figure 18 A and 18B are the schematic diagrames of the invention using the jet module in example 2.

Figure 19 A, 19B and 19C are the schematic plan views of the invention using the recording element plate in example 2.

Figure 20 is the schematic perspective view of the liquid injection apparatus of the invention using example 2, that schematically shows The construction of the liquid injection apparatus.

Figure 21 A and 21B are the schematic perspective views of liquid ejecting head according to a first embodiment of the present invention, schematically Show the construction of the liquid ejecting head.

Figure 22 A, 22B, 22C and 22D are the schematic plans of liquid ejecting head according to a first embodiment of the present invention.

Figure 23 A and 23B are some column in the injection tip column of liquid ejecting head according to a first embodiment of the present invention The schematic diagram of position displacement.

Figure 24 is showing for the adjacent area of the recording element plate of two adjacent positioneds of first embodiment according to the present invention Meaning property cross-sectional side view.

Figure 25 A, 25B, 25C and 25D are the signals of some advantages of liquid ejecting head according to a first embodiment of the present invention Figure.

Figure 26 A and 26B are the schematic perspective views of liquid ejecting head according to a second embodiment of the present invention, schematically Show the construction of the liquid ejecting head.

Figure 27 A and 27B are some records members in the recording element plate being arranged side by side according to a second embodiment of the present invention The schematic diagram of part plate.

Figure 28 is the flow chart for showing the manufacturing step of liquid ejecting head of second embodiment according to the present invention.

Specific embodiment

Now, by use example and embodiment through the invention and the present invention will be described in more detail by reference to attached drawing. However, it should be noted that description given below does not limit the scope of the invention.The liquid ejecting head of the embodiments described below is logical It crosses using heat type recording element and realizes, the heat type recording element is designed to generate fever member of the bubble to spray liquid Part, but piezo-electric type or some other liquid jet type recording elements can alternatively for purposes of the present invention.According to this The liquid ejecting head for spraying liquid (such as black) and the liquid injection apparatus including this liquid ejecting head of invention can be with In the field of printer, duplicator, the facsimile machine with telecommunication system and the word processor with printer department It is applied.In addition, liquid ejecting head and the liquid injection apparatus including this liquid ejecting head can also pass through basis Liquid injection apparatus of the invention and any one of various processing equipments combine compoundly and the industrial recording apparatus that is formed Field in be applied.For example, liquid ejecting head and the liquid injection apparatus including this liquid ejecting head can produce It is applied in biochip field, electronic circuit print field, semiconductor substrate production field etc..

Although each of be described below using in example using embodiments of the present invention, in this embodiment, So that such as black liquid recycles between storage container and liquid ejecting head, but can alternatively be appointed using of the invention What his implementation.In realizing different embodiments of the invention, for example, liquid ejecting head can be set, there are two storages Container, and a storage container in two storage containers is arranged in upstream side, and another storage container is arranged in liquid The downstream side of body injector head, and make the container flowing of liquid downstream from the container of upstream side, not cause to flow Flow the liquid in the pressure chamber of liquid ejecting head in the state of body circulation.

It each of is described below using in example, using so-called row type (page width type) liquid with following length Injector head, the length correspond to the width for the recording medium that will be used together with liquid ejecting head.However, it is possible to alternatively Using so-called serial type liquid ejecting head, the serial type liquid ejecting head, which is designed to scanning at it, will be used to record operation Record operation is executed while recording medium.Illustrative serial type liquid ejecting head is usual but is equipped with record member without limitation Part plate, the recording element plate include the recording element plate for black ink and the recording element plate for various colors ink.Substitution Property, serial type liquid ejecting head may include multiple recording element plates, and multiple recording element plate is arranged such that multiple notes The injection tip of record element board is listed on the direction of the injection tip column and is partly overlapped, and the serial type liquid ejecting head Width be greater than the width of recording medium that will be used together with liquid ejecting head.

(using example 1)

(explanation of ink jet recording device)

Fig. 1 is using the schematic diagram of the liquid injection apparatus of example 1, and that schematically shows can be by applying this hair The construction of the liquid injection apparatus of bright realization.Liquid injection apparatus shown in FIG. 1 be ink jet recording device 1000 (below also referred to as For recording equipment).Recording equipment 1000 includes transport unit 1 for transmitting recording medium 2 and is transmitted relative to recording medium 2 The row type liquid ejecting head 3 arranged substantially orthogonal to ground of direction, and recording equipment 1000 be designed to continuously or The one way recording equipment of record operation is consecutively carried out while intermittently transmitting recording medium 2 with one way.Recording medium 2 can be with It is the form of the form either paper of roll web.Liquid ejecting head 3 can by using CMYK ink (cyan ink, magenta ink, Yellow ink and black ink) it is used as liquid to execute panchromatic printing.As will be described below, liquid ejecting head 3 is fluidly connected to liquid Body supply device, the liquid feeder part are as will be described below for the feed path with liquid supply injector head, main appearance Device and buffer container (referring to fig. 2).Liquid ejecting head 3 is additionally electrically connected to electric control portion, and the electric control portion is to liquid injection First 3 transmitting electric power and logical signal.The flow path of the liquid in liquid ejecting head 3 and electric signal transmission path is described below.

(explanation in first circulation path)

Now, the circulation path for circulating liquid applied to this using the recording equipment in example will be described hereinafter Diameter.Fig. 2 is the schematic diagram in the first circulation path for circulating liquid, and it illustrates can be applied to this to set using exemplary record The embodiment of standby circulating path.Referring to Fig. 2, liquid ejecting head 3 is fluidly coupled to first circulation pump (high-pressure side) 1001, the One circulating pump (low-pressure side) 1002 and buffer container 1003.Although magenta, blueness are illustrated only in Fig. 2 for purposes of simplicity The path that one of color, yellow and black ink ink flow through, in reality, in 1000 main body of liquid ejecting head 3 and recording equipment In be disposed with four groups of circulating paths in total of ink for four kinds of colors.

The buffer container 1003 for being arranged as secondary container operation is connected to primary tank 1006.Buffer container 1003, which has, to be used The air communication port (not shown) being connected to is established in the inside in container and between atmosphere, it will be in the ink in buffer container Bubble is discharged to the outside.Buffer container 1003 is extraly connected to replenishment pump 1005.When the liquid in liquid ejecting head 3 due to from The injection tip of liquid ejecting head 3 spray or the operation of discharge liquid and when being consumed, the operation of replenishment pump 1005 is with by Mo Congzhu Container 1006 is transferred to buffer container 1003, to compensate the consumption of ink.Injection and the operation of discharge liquid generally include to record Operation and suction recovery operation.

Two first circulations pump 1001,1002 as device for transporting liquid, which has from the liquid of liquid ejecting head 3, to be connected 111 pumping liquid of portion simultaneously makes downward liquid flow to the function of buffer container 1003.First circulation pump is preferably capable quantitatively The positive-displacement pump of feed fluid.More specifically, the pump that can be preferably selected for first circulation pump includes tubing pump, gear Pump, diaphragm pump and syringe pump.For example, the pump can be the type with constant flow rate valve and pressure reducing valve, the constant flow rate Valve and pressure reducing valve are well known and are arranged at pump discharge and ensure constant flow.When liquid ejecting head 3 is actuated to grasp When making, so that liquid pumps (high-pressure side) 1001 by first circulation and first circulation pumps (low-pressure side) 1002 respectively with constant flow rate Flow through common feed path 211 and shared recovery approach 212.Fluid flow be preferably selected in following traffic levels it On, wherein under the traffic level, the temperature difference between recording element plate 10 in liquid ejecting head 3 is negatively affected By the quality for the image that ink jet recording device is recorded.However, if excessive flow is selected, in the stream of liquid ejecting head 3 Under the influence of the pressure loss in dynamic channel, the Negative Pressure Difference between recording element plate 10 becomes excessive and causes on the image of record Density inhomogeneity the problem of.It is therefore preferred that by consider temperature difference between recording element plate 10 and both Negative Pressure Differences come Select flow.

Vacuum cavitations unit 230 is arranged between second circulation pump 1004 and liquid ejection unit 300.Vacuum cavitations unit 230 operate so that vacuum cavitations unit 230 will when the flow in circulating path is fluctuated due to record load (duty) difference Pressure limit at the downstream side of vacuum cavitations unit 230 is in the predetermined model centered on pre-selection and desired stress level In enclosing.The downstream side of vacuum cavitations unit 230 is positioned as than vacuum cavitations unit 230 closer to liquid ejection unit 300 Side.The tool of vacuum cavitations unit 230 is there are two pressure regulator, wherein respective control pressure different from each other be preselected and It is default.As long as each pressure regulator in described two pressure regulators can control the pressure at side downstream with by pressure Any fluctuation be limited in by pre-selection and desired stress level centered on preset range in, described two pressure regulators It is not subject to any particular limitation.So-called " pressure reducing regulator " can be used for pressure regulator.When pressure reducing regulator is used for When pressure regulator, as shown in Fig. 2, preferably by second circulation pump 1004 and by fluid supply unit 220 come to negative pressure The upstream side of control unit 230 applies pressure.The laying buffer container 1003 in recording equipment 1000 can be improved in this arrangement Freedom degree, this is because the arrangement can inhibit the head pressure (head pressure) of buffer container 1003 to liquid spray Penetrate first 3 influence.Second circulation pump 1004 only needs to show observed not less than when liquid ejecting head 3 is actuated to operation The head pressure of predetermined pressure level in the range of flow of the recirculation ink arrived.For example, turbine pump or positive-displacement pump can be used for Second circulation pump 1004.More specifically, diaphragm pump can be selected for second circulation pump 1004.Alternatively, second circulation Pump 1004 can be replaced by water header tank, which is arranged to show relative to vacuum cavitations unit 230 Predetermined head difference.

About two pressure regulators, preselects the pressure regulator of relatively high output pressure and preselect relatively low The pressure regulator of output pressure is connected respectively to being total in liquid ejection unit 300 by the inside of fluid supply unit 220 With feed path 211 and shared recovery approach 212.In Fig. 2, with it is relatively high pre-selection output pressure pressure regulator by H is indicated, and the pressure regulator with relatively low pre-selection output pressure is indicated by L.Common feed path 211 shares recycling Channel 212, with each individual feed path 213 of corresponding recording element plate connection and be also connected to each recording element plate Each individual recovery approach 214 be disposed in liquid ejection unit 300.Each individual feed path 213 and it is each individually Recovery approach 214 is connected to common feed path 211 and shared recovery approach 212 respectively.Due to this arrangement, shared confession is flowed through To channel 211 liquid a part then by the inner flow passage inside recording element plate 10 from common feed path 211 flow to shared recovery approach 212 (as by represented by the arrow in Fig. 2).This is because having relatively high pre-selection The pressure regulator H of output pressure is connected to common feed path 211, and the pressure with relatively low pre-selection output pressure Adjuster L is connected to shared recovery approach 212, thus leads to two common-use tunnels (common feed path 211 and to share recycling logical Road 212) between pressure difference.

As described above, liquid flows through common feed path 211 and shared recovery approach 212 in liquid ejection unit 300 The two, to generate flow path in the corresponding recording element plate 10 that a part of liquid flows through.Therefore, as a result, record member The heat generated in part plate 10 can be by flowing through a part of liquid of common feed path 211 and shared recovery approach 212 Body and the outside for being discharged to recording element plate 10.Extraly, by above-mentioned arrangement, when liquid ejecting head 3 is actuated to for remembering When record operation, so that liquid is flowed through in the injection tip and pressure chamber not run, to inhibit to occur in these positions Black viscosity any possible raising.In addition, can by the increased liquid of viscosity and comprising in a liquid foreign matter (if there is If) it is discharged to shared recovery approach 212.Therefore, this arrangement allows this using exemplary liquid ejecting head 3 with high speed Record the image of high-quality.

(explanation in second circulation path)

Fig. 3 is the schematic diagram of the invention using the second circulation path in example 1, the second circulation path and above-mentioned First circulation path is different, but also can be applied to recording equipment according to the present invention.Second circulation path and first circulation The difference in path essentially consists in, and two pressure regulators of vacuum cavitations unit 230 all control vacuum cavitations unit 230 Pressure at upstream side.In other words, two pressure regulators are all operated with by the pressure at the upstream side of vacuum cavitations unit 230 Power limit is in the preset range centered on pre-selection and desired stress level (as the behaviour of so-called " back pressure regulator " Make).Second circulation path also differ in that 1004 operation of second circulation pump is for reducing negative with first circulation path Press the negative pressure source of the pressure at the downstream side of control unit 230.The difference volume in second circulation path and first circulation path Other places is that both first circulation pump (high-pressure side) 1001 and first circulation pump (low-pressure side) 1002 are all disposed within liquid ejecting head Upstream side at, and vacuum cavitations unit 230 is arranged at the downstream side of liquid ejecting head.

At second circulation path, the operation of vacuum cavitations unit 230 is even if when the flow in circulating path is due to record Load difference and when fluctuating, also the pressure oscillation generated at the upstream side of vacuum cavitations unit 230 itself is limited in pre- In preset range centered on choosing and desired stress level.The upstream side of vacuum cavitations unit 230 is compared to negative pressure The side closer to liquid ejection unit 300 of control unit 230.As shown in Figure 3, at the downstream side of vacuum cavitations unit 230 Pressure preferably reduces by second circulation pump 1004 and by fluid supply unit 220.Laying note can be improved in this arrangement The freedom degree of buffer container 1003 in recording apparatus 1000, this is because the arrangement can inhibit the head pressure of buffer container 1003 Influence of the power to liquid ejecting head 3.Second circulation pump 1004 can be replaced by water header tank, which is arranged to Show the predetermined head difference relative to vacuum cavitations unit 230.

As shown in figure 3, there are two pressure to adjust for the tool of vacuum cavitations unit 230 as the case where first circulation path Device, wherein corresponding control pressure different from each other is preselected and presets.About two pressure regulators, there is relatively high pre-selection The pressure regulator (H) of output pressure and pressure regulator (L) with relatively low pre-selection output pressure pass through liquid supply The inside of unit 220 is connected respectively to common feed path 211 and shared recovery approach 212 in liquid ejection unit 300.By In two draft regulators are arranged, the pressure in common feed path 211 relative to the pressure in shared recovery approach 212 more It is high.Therefore, it flows through a part of the liquid of common feed path 211 and then passes through each individual feed path 213, recording element Flow channel and each 214 (as shown by the arrow in Figure 3) of individual recovery approach inside plate 10 are from common feed path 211 It flow to shared recovery approach 212.As described above, second circulation path can be as first circulation path in liquid injection list Liquid flow is generated in member 300, and the advantage that the advantages of additionally providing the path as described below from first circulation is different.

First the advantage is that vacuum cavitations unit 230 is arranged in liquid spray due in the case where second circulation path The dust and other foreign matters penetrated at first 3 downstream side, therefore generated by vacuum cavitations unit 230 can hardly flow to liquid In injector head.Second advantage is, in the case where second circulation path, liquid is supplied to liquid from buffer container 1003 The maximum value of flow necessary to injector head 3 is less than comparable flow in the case where first circulation path.It will retouch below The reason of stating above-mentioned advantage.

When liquid ejection unit 300 is in record standby mode and therefore liquid ejection unit 300 does not spray any liquid It when body, needs to make liquid in common feed path 211 and also be flowed in shared recovery approach 212, to reduce liquid spray Penetrate the temperature difference between the recording element plate 10 in unit 300.It is assumed that by the recording element plate 10 in liquid ejecting head 3 it Between temperature difference be limited within the temperature range of expectation necessary to the flow of liquid that is flowed in common feed path 211 and The minimum value or minimal circulation flow of the sum of the flow of liquid flowed in sharing recovery approach 212 are A.In addition, it is assumed that Liquid ejection unit 300 is from the injection stream under the full spray regime of all injection tip jet inks of the liquid ejection unit 300 Amount is F.Then, in the case where first circulation path (in the case of figure 2), the pre-selection stream of first circulation pump (high-pressure side) 1001 The preselected flow rate of amount and first circulation pump (low-pressure side) 1002 is equal to minimal circulation flow A.It therefore, will under full spray regime Liquid is supplied to liquid supply flow rate necessary to liquid ejecting head 3 equal to A+F.Therefore, at first circulation channel must The maximum value of the supply flow rate needed is equal to A+F.

On the other hand, in the case where second circulation path (in the context of fig. 3), by liquid in record standby mode Liquid supply flow rate necessary to liquid ejecting head 3 is supplied to equal to A, and supplies a liquid to liquid under full spray regime Liquid supply flow rate necessary to injector head 3 is equal to F.Therefore, the preselected flow rate and first of first circulation pump (high-pressure side) 1001 The sum of preselected flow rate of circulating pump (low-pressure side) 1002 is equal to A or F, should and greater than another in A or F.Therefore, it is followed second The maximum value of necessary supply flow rate at endless path is equal to A or F, which is greater than another in A or F.

Therefore, when compare with same structure but it is one of using first circulation path and another is followed using second When two liquid ejecting heads 3 of endless path, using second circulation path liquid ejecting head 3 required supply flow rate maximum Be worth (A or F) inevitably be less than using first circulation path institute must supply flow rate maximum value (A+F).Therefore, second The selection freedom degree of applicable circulating pump at circulating path is higher than the comparable value at first circulation path.In other words, may be used To use the inexpensive circulating pump with simple structure and/or can reduce the cooler being mounted at main body side path (not Show) load, with provide reduce recording equipment main body cost the advantages of.The advantage is in A value or the relatively large row type of F value It is particularly significant in liquid ejecting head and more particularly significant in the row type liquid ejecting head with larger longitudinal length.

However, on the other hand, existing and using the more favorable situation in second circulation path using first circulation path ratio.Example Such as, when using second circulation path, in record standby mode, the flow of the liquid flowed in liquid ejection unit 300 Become maximum, therefore, the record load of image to be recorded is lower, and the negative pressure for being applied to injection tip is higher.Therefore, especially When reduce common feed path 211 and shared recovery approach 212 channel width (channel orthogonal with the direction that liquid flows Direction on lateral length) width (length of liquid ejecting head in a lateral direction) to reduce liquid ejecting head when, When recording image (wherein, the inhomogeneities of image tends to become significant) of low record load, high negative pressure is applied to injection Port.Then, the influence of so-called satellite droplet may become quite big.On the other hand, when using first circulation path, only exist Apply high negative pressure to injection tip when the image of the high record load of record, so that if generating satellite droplet, satellite droplet It is hardly visible to eyes.Then, first circulation path provides satellite droplet the advantage minimum to the adverse effect of record image.

It therefore, can be according to the specification of liquid ejecting head and the specification (regulation including injection flow F of recording equipment main body Value, minimal circulation flow A specified value and liquid ejecting head in regulation Channel resistance values) select first circulation path and Preferred one in two circulating paths.

(explanation of the construction of liquid ejecting head)

The construction of the liquid ejecting head 3 using example 1 will be described below now.Fig. 4 A and 4B are these using exemplary The schematic perspective view of liquid ejecting head 3.Liquid ejecting head 3 is by the linear arrangement a recording element plate 10 in 15 (15) in total (embarking on journey) and the row type liquid ejecting head formed, each recording element plate in recording element plate 10 can spray magenta, blueness The ink of four kinds of color, yellow and black colors.As shown in Figure 4 A, liquid ejecting head 3 includes recording element plate 10, flexible wiring sheet 40, signal input terminal 91 and power supply terminal 92, signal input terminal 91 and power supply terminal 92 are electrically connected by electric wiring plate 90 It is connected to recording element plate 10 and flexible wiring sheet 40.Signal input terminal 91 and power supply terminal 92 are electrically connected to recording equipment 1000 Control unit (not shown), and respectively to recording element plate 10 provide injection liquid necessary to logical signal and electric power. It can realize intensive wiring, by the circuit in electric wiring plate 90 to reduce signal relative to the quantity of recording element plate 10 The quantity of input terminal 91 and the quantity of power supply terminal 92.Then as a result, it is possible to make when installing liquid ejecting head 3 and replace liquid The quantity for the electrical connection for needing to be disassembled and be reconstructed when body injector head 3 minimizes.As shown in Figure 4 B, it is located in liquid ejecting head The fluid connection 111 of 3 opposite edge is connected to the liquid-supplying system of recording equipment 1000.Pass through this arrangement, product Red, cyan, the black of four kinds of colors of yellow and black are supplied to liquid ejecting head 3 from the feed system of recording equipment 1000, And the feed system of recording equipment 1000 is recovered and is brought back by the ink of the inside of liquid ejecting head 3.With this Mode, every kind in the ink of four kinds of colors can pass through the corresponding ink road diameter and liquid ejecting head 3 in recording equipment 1000 In corresponding ink road diameter recycle.

Fig. 5 is using the exploded perspective schematic diagram of the liquid ejecting head 3 of example 1, and it illustrates the components of liquid ejecting head 3 And unit.In Fig. 5, liquid ejection unit 300, fluid supply unit 220 and electric wiring plate 90 are assembled to casing 80.Liquid Object supply unit 220 is provided with respective fluid connection 111 (referring to figs. 2 and 3), and the mistake of the ink for each color Filter 221 (referring to figs. 2 and 3) is arranged in the inside of fluid supply unit 220 and corresponding at fluid connection 111 Opening keeps connection, to remove foreign matter included in the liquid supplied by fluid supply unit 220.Two liquid supplies Each fluid supply unit in unit 220 is provided with for two different colors of two filters 221.Pass through phase in liquid After the filter 221 answered, liquid is then fed to the vacuum cavitations unit 230 being arranged on fluid supply unit 220, with Corresponding to corresponding color.Vacuum cavitations unit 230 is the unit with the pressure-regulating valve for four kinds of different colours, negative pressure Control unit 230 be designed to valve by being arranged in inside unit and spring members it is significant decay in recording equipment 1000 The variation of the pressure loss in feed system (being arranged in the feed system at the upstream side of liquid ejecting head 3), the pressure loss Variation may due to fluid flow fluctuation and occur.Each pressure control due to this arrangement, in pressure control unit The variation of negative pressure at the downstream side of unit (at that side of liquid ejection unit 300) can be limited in a certain range, So that negative regulation.Each vacuum cavitations unit in the vacuum cavitations unit 230 of four kinds of colors includes to be used for vacuum cavitations Two pressure-regulating valves of the color of unit 230 itself, and referring to Fig. 2, divide in two pressure-regulating valves as described above Different control pressure is not set.In two pressure-regulating valves, an on high-tension side pressure-regulating valve is supplied single by liquid Member 220 is connected to the common feed path 211 in liquid ejection unit 300, and a pressure-regulating valve of low-pressure side passes through Fluid supply unit 220 is connected to the shared recovery approach 212 in liquid ejection unit 300.

Casing 80 includes liquid ejection unit supporting element 81 and electric wiring plate support 82.Therefore, casing 80 supports liquid Body injection unit 300 and electric wiring plate 90 and the rigidity for ensuring liquid ejecting head 3.Electric wiring plate support 82 is to be used for The component of electric wiring plate 90 is supported, which is rigidly held to liquid ejection unit supporting element 81 by screw.Liquid spray It penetrates unit supports part 81 to play the role of correcting warpage and deformation that liquid ejection unit 300 is likely to occur, and ensures multiple The relative positional accuracy of recording element plate 10, to inhibit the striped possibly otherwise being present on the image by recording equipment record With it is uneven.Therefore, liquid ejection unit supporting element 81 preferably shows satisfactory rigidity level.It can be preferred for The material of liquid ejection unit supporting element 81 includes the metal material of such as SUS (stainless steel) and aluminium and the pottery of such as aluminium oxide Ceramic material.Liquid ejection unit supporting element 81 is provided with the opening 83 and 84 for receiving elastomer connector 100.It is supplied from liquid single The liquid of 220 supply of member is directed to third flow channel forming portion included by liquid ejection unit 300 by elastomer connector 100 Part 70.

Liquid ejection unit 300 includes multiple liquid injection modules 200 and flow channel forming member 210, and cover Part 130 is mounted to the surface of the record-oriented medium of liquid ejection unit 300.As shown in figure 5, cover 130 is that have to see Get up as the surface of photo frame and the component of elongated oblong openings 131, belongs to the recording element plate of corresponding jet module 200 10 and seal member 110 (referring to Fig. 9 A and 9B) be externally exposed by the opening 131.It operates and makees around the frame of opening 131 For contact surface, which contacts the cap cover part for Covering Liguid injector head 3 in the case where recording standby mode.Therefore, Adhesive, sealing material and packing material are applied to liquid ejection unit 300 preferably along the periphery of opening 131, so as to rise Volt planarizes and fills the gap on the jeting surface of liquid ejection unit 300, so as to when liquid ejecting head is by cover 130 Closed space is generated when covering in liquid ejecting head 3.

The construction of the flow channel forming member 210 of liquid ejection unit 300 will be described below now.As shown in figure 5, Flow channel forming member 210 is by by first flow channel forming member 50, second flow path forming member 60 and third Flow channel forming member 70 is sequentially placed by above-mentioned order one on top of the other and is formed.Flow channel forming member The liquid supplied from fluid supply unit 220 is assigned to each individual jet module 200 by 210, and will be flowed from jet module 200 The liquid returned returns to fluid supply unit 220.Flow channel forming member 210 is rigidly held to liquid injection by screw Unit supports part 81, with the warpage and deformation for inhibiting flow channel forming member 210 to be otherwise likely to occur.

Fig. 6 A to Fig. 6 F is to show the front surface of first flow channel forming member to third flow channel forming member With the view of rear surface.More specifically, Fig. 6 A show first flow channel forming member 50 jet module 200 is installed Surface, Fig. 6 F show the surface of third flow channel forming member 70 being kept in contact with liquid ejection unit supporting element 81. First runner forming member 50 and second flow channel forming member 60 are joined together, so that contacting shown in Fig. 6 B and 6C Surface positions Face to face relative to each other, and second flow path forming member and third flow channel forming member are joined to Together, so that contact surface shown in Fig. 6 D and 6E positions Face to face relative to each other.In second flow path forming portion When part 60 and third flow channel forming member 70 are joined together, by being formed on second flow path forming member 60 Common-use tunnel forms slot 62 and the common-use tunnel being formed on third flow channel forming member 70 forms slot 71 and generates and flowing A common-use tunnel in eight (8) in total extended on the longitudinal direction of dynamic channel forming member.Then as a result, in flow channel forming portion The magenta of the inside of part 210 (referring to Fig. 7), cyan, each color in four kinds of colors of yellow and black form one group and share Feed path 211 and shared recovery approach 212.The communications ports 72 and elastomer connector 100 of third flow channel forming member 70 Corresponding hole keep connection, to be fluidly coupled to fluid supply unit 220.Multiple communications ports 61 are formed in the second flowing The common-use tunnel of channel forming member 60 forms the bottom surface of slot 62, so that each communications ports in communications ports 61 and the The corresponding channel that each individual channel of one flow channel forming member 50 is formed in slot 52 forms the opposite edges of slot In an edge connection.Each individual channel that communications ports 51 are formed in first flow channel forming member 50 forms slot 52 In each channel formed at the other edge of slot so that each individual channel, which forms slot 52, passes through communications ports 51 and more A jet module 200 is in fluid communication.Each individual channel, which forms slot 52, allows flow channel to be intensively arranged in flow channel shape At at the center of component and immediate vicinity.

First preferably has corrosion resistance by using relative to liquid to third flow channel forming member 50,60,70 And also the material with low linear expansion coefficient is formed.It is excellent for first to third flow channel forming member 50,60 and 70 Choosing as substrate and is added using by using such as aluminium oxide, LCP (liquid crystal polymer), PPS (polyphenylene sulfide) or PSF (polysulfones) The composite material for adding inorganic filling material and manufacturing.For this purpose, the inorganic filler material that can be used includes particle and dioxy SiClx fiber.Flow channel forming member 210 can by by three flow channel forming members one on top of the other It sequentially places and three flow channel forming members is engaged via bonding agent and are formed, or formed for flow channel In the case where subassembly selection composite material, formed and by flow channel forming member via solder joints.

Now, it will be closed below by the connection of the flow channel described referring to Fig. 7 in flow channel forming member 210 System.Fig. 7 be show it is from the surface for being equipped with jet module 200 of first flow channel forming member 50, pass through by A part of flow channel in the first flow channel forming member 210 formed to the engagement of third flow channel forming member Schematic amplification perspective view.Extend on the longitudinal direction of liquid ejecting head 3 for magenta, cyan, yellow and Four kinds of colors of black common feed path 211 (211a, 211b, 211c, 211d) and shared recovery approach 212 (212a, 212b, 212c, 212d) it is arranged on flow channel forming member 210.Multiple lists that slot 52 is formed are formed by each individual channel Only feed path 213 (213a, 213b, 213c, 213d) is connected respectively to the shared confession of four kinds of colors by communications ports 61 To channel 211.Similarly, form that slot 52 formed by each individual channel multiple each individual recovery approaches 214 (214a, 214b, 214c, 214d) the shared recovery approach 212 of four kinds of colors is connected respectively to by communications ports 61.Due to such logical Road configuration can make liquid intensively flow to by each individual feed path 213 from common feed path 211 and be arranged in The recording element plate 10 of the central portion of flow channel forming member.Extraly, liquid can be logical by each individual recycling Road 214 is recovered to shared recovery approach 212 from recording element plate 10.

Fig. 8 is the schematic cross section of the line 8-8 interception in Fig. 7.As shown in figure 8, each individual recovery approach 214a and 214c passes through the holding of communications ports 51 respectively and is connected to jet module 200.Although illustrating only in fig. 8 each individual Recovery approach 214a and 214c, as seen in figure 7, some other viewgraph of cross-section will show each individual feed path 213 It keeps communicating with each other respectively with jet module 200.Support member 30 and recording element included in each jet module 200 It is formed with flow channel in plate 10, liquid is supplied to from first flow channel forming member 50 and is arranged in recording element plate 10 On recording element 15 (referring to Figure 10 B).Similarly, the support member 30 included in each jet module 200 and record It is formed with channel in element board 10, is arrived with being fed into part or all of downward recycling (reflux) of liquid of recording element 15 First flow channel forming member 50.Note that for each color in four kinds of colors, common feed path 211 passes through liquid Feed unit 220 is connected to vacuum cavitations unit 230 (high-pressure side), and is shared recovery approach 212 and passed through fluid supply unit 220 are connected to vacuum cavitations unit 230 (low-pressure side).Vacuum cavitations unit 230 be designed to generate common feed path 211 with Share the pressure difference between recovery approach 212.Therefore, this using exemplary flow channel by Fig. 7 and it is shown in Fig. 8 in a manner of connect In the liquid ejecting head 3 connect, the liquid flow for flowing through following paths, the path are all established for each color in four kinds of colors It is logical by sequentially connecting common feed path 211, each individual feed path 213, recording element plate 10, each individual recycling Road 214 and the formation of shared recovery approach 212.

(explanation of jet module)

Fig. 9 A is the schematic perspective view of a jet module in jet module 200, and Fig. 9 B is point of jet module 200 Solve perspective view.In order to prepare jet module 200, firstly, recording element plate 10 and flexible wiring sheet 40, which are engaged to, to be had in advance The support member 30 of the fluid connection port 31 of formation.Then, the terminal 16 on recording element plate 10 is divided by wire bonding The terminal 41 not being electrically coupled on flexible wiring sheet 40, and then pass through the covering of seal member 110 and sealing wire joint portion (electrical connection section).It is arranged at the side opposite with that the aspectant side of recording element plate 10 with being positioned to of flexible wiring sheet 40 Terminal 42 be electrically connected to one connection terminal 93 of correspondence of electric wiring plate 90 (referring to Fig. 5).Support member 30 is used as and is used for The component of recording element plate 10 is supported, and also as making recording element plate 10 and flow channel forming member 210 each other The flow channel forming member of fluid communication.Therefore, support member 30 is preferably prepared as showing the flatness of height, and And it is also prepared as highly reliably being joined to recording element plate.It can be used for being formed showing for the preferred material of support member 30 Example includes aluminium oxide and resin material.

(explanation of the structure of recording element plate)

Now, it will be described below the construction using the recording element plate 10 in example.Figure 10 A is recording element plate 10 Formation injection tip 13 surface schematic plan view.Figure 10 B is recording element plate 10 by circle encirclement and by scheming The enlarged view for the part that 10B in 10A is indicated.Figure 10 C is the table opposite with surface shown in Figure 10 A of recording element plate 10 The plan view in face.As illustrated in figs. 10 a and 10b, injection tip is formed as four rows, is formed with the injection tip with recording element plate 10 The ink of four kinds of colors on component 12 is corresponding.In the following description, the direction that injection tip column extend is referred to as " ejection end Mouth column direction ", wherein each column has multiple injection tips 13.

As shown in Figure 10 B, recording element 15 also be arranged at the corresponding position of corresponding injection tip 13 record member On part plate 10.Recording element 15 is to generate the heater element for making liquid by heat necessary to thermal energy blistering.However, for this The purpose of invention, recording element 15 may not necessarily be heater elements.In other words, recording element according to the present invention can be selected from Can generate will be used to spray the various elements of the energy of liquid, such as piezoelectric element.Internal packet is generated by partition wall 22 Pressure chamber 23 containing corresponding recording element 15.Recording element 15 (is not shown by the electric wire being arranged on recording element plate 10 It is electrically connected to terminal 16 shown in Figure 10 A out).Recording element 15 is matched according to by electric wiring plate 90 (referring to Fig. 5) and flexibility Line plate 40 (referring to Fig. 9 B) from the control circuit of recording equipment 1000 be input to recording element 15 pulse signal generate heat with Make the liquid boiling in recording element 15, and from the injection of recording element 15 under the action of the power of the bubble generated due to boiling Spray liquid in port 13.As shown in Figure 10 B, the side in the opposite side for each column that liquid supply passage 18 is arranged along injection tip Extend, and liquids recovery channel 19 extends along the other side that the injection tip arranges.Liquid supply passage 18 and liquids recovery Channel 19 is arranged on the channel on recording element plate 10 and extends along the extending direction of injection tip column, and liquid supplies It is kept respectively by relevant supply port 17a or recovery port 17b to each of channel 18 and liquids recovery channel 19 It is connected to relevant injection tip 13.Supply port 17a is for supplying a liquid to pressure chamber 23, and recovery port 17b is used for From 23 withdrawal liquid of pressure chamber.The liquid in pressure chamber 23 is forced to pass through its corresponding supply port 17a and corresponding recovery end Mouthful 17b is recycled to outside and from outer loop.

As will be described below, as illustrated in figure 10 c and shown in Figure 11, sheet cover 20 is laid in recording element plate 10 On the back side opposite with the surface for being formed with injection tip 13.As will be described in more detail, cover 20 be provided with Multiple openings 21 that liquid supply passage 18 is connected to liquids recovery channel 19.In the case where this is using exemplary situation, for each Liquid supply passage 18, three openings 21 are arranged on cover 20, and for each liquids recovery channel 19, two openings 21 It is arranged on cover 20.Each opening in the opening 21 of cover 20 shown in Figure 10 B keep with it is multiple shown in Fig. 6 A Communications ports 51 are connected to.As shown in figure 11, cover 20 is also supplied as the liquid in the substrate 11 for being formed in recording element plate 10 A part of the wall of a part and liquids recovery channel 19 to the wall in channel 18.Cover 20 is preferably satisfactorily opposite It is anticorrosive in liquid, and from preventing the liquid of different colours to be not intended to mixed angle, need the shape and position in opening 21 It sets aspect and shows high accuracy.Therefore, cover 20 is preferably made of photoresist material or is made of silicon plate, and And opening 21 is generated by photoetching process.View of the above, it will be seen that cover 20 passes through the opening 21 of cover 20 Change the pitch of flow channel, therefore from the angle of the pressure loss, it is expected that cover 20 has lesser thickness.Therefore, cover Part 20 is preferably formed into film-like members.

Now, it will be described below how liquid flows in each recording element plate 10.Figure 11 is along in Figure 10 A Line 11-11 interception recording element plate 10 and cover with the schematic perspective view shown in section.Recording element plate 10 passes through It lays injection tip forming member 12 and is formed, the photonasty tree of the injection tip forming member 12 on the substrate 11 made of Si Rouge material is made.Cover 20 is joined to the back side of substrate 11.Recording element 15 is formed in the front surface of substrate 11 (referring to figure 10B), and along injection tip column extending, be used to form liquid supply passage 18 and the slot in liquids recovery channel 19 is formed On apparent surface or the back side.The liquid supply passage 18 and liquids recovery channel 19 formed by substrate 11 and cover 20 is distinguished The common feed path 211 and shared recovery approach 212 being connected in flow channel forming member 210, and supplied in liquid Pressure difference is generated between channel 18 and liquids recovery channel 19.Pass through some injections from liquid ejecting head 3 in liquid ejecting head 3 While port 13 is sprayed liquid and operated by driving to be recorded, at the injection tip for not spraying liquid, in ejection end Some liquid in the liquid supply passage 18 of each column injection tip in mouth column by supply port 17a, pressure chamber 23 and return Receiving end mouth 17b flow to corresponding liquids recovery channel 19.Therefore, it does not spray in the injection tip 13 of liquid and related pressure In room 23 by the raised liquid of evaporation viscosity or ink, and comprising in a liquid bubble and foreign matter can pass through flowing It is recycled to liquids recovery channel 19 (being indicated by the arrow C in Figure 11).Liquid flow can also inhibit to be maintained at these ejection ends The increase of the viscosity of liquid or ink in mouth 19 and these pressure chambers 23.Then, the liquid for being recovered to liquids recovery channel 19 is logical The fluid connection port 31 (referring to Fig. 9 B) of the opening 21 and support member 30 of crossing cover 20 is sequentially recovered to flow channel Communications ports 51, each individual recovery approach 214 and shared recycling flow channel 212 in forming member 210.Then, liquid Finally it is recovered to the feed path of recording equipment 1000.

In other words, the liquid flowing of liquid ejecting head 3 is supplied to as described below from 1000 main body of recording equipment Mode supply and recycle.Liquid is flowed into liquid ejecting head 3 from the fluid connection 111 of fluid supply unit 220 first It is internal.Then, the connection end that liquid is sequentially fed to elastomer connector 100, is formed in third flow channel forming member Mouth 72 forms slot 71 with common-use tunnel, the common-use tunnel being formed in second flow path forming member 22 forms slot 62 and is connected to Port 61 and each individual channel being formed in first flow channel forming member form slot 52 and communications ports 51.This Afterwards, liquid by the fluid connection port 31 being formed in support member 30, the opening 21 being formed in cover and is formed Supply port 17a and liquid supply passage 18 in substrate 11 are sequentially supplied to pressure chamber 23.It is being supplied to pressure chamber 23 Liquid in, not from injection tip 13 spray liquid part order flow through the recovery port 17b being formed in substrate 11 With liquids recovery channel 19, the opening being formed in cover 21 and the fluid connection port being formed in support member 30 31.In addition, the part order of liquid flow through the communications ports 51 that are formed in first flow channel forming member and each Individual channel forms slot 52, the communications ports 61 being formed in second flow path forming member and common-use tunnel and forms slot 62, the common-use tunnel being formed in third flow channel forming member 70 forms slot 71 and communications ports 72 and elastomer connector 100.Later, the part of liquid flows out to liquid ejecting head 3 from the fluid connection 111 being arranged in fluid supply unit Outside.In the case where first circulation path shown in Fig. 2, the liquid in first circulation path is flowed into from fluid connection 111 Body is fed to elastomer connector 100 after through vacuum cavitations unit 230.The case where second circulation path shown in Fig. 3 Under, the liquid recycled from pressure chamber 23 passes through vacuum cavitations unit 230 from fluid connection after through elastomer connector 100 111 flow out to the outside of liquid ejecting head.

In addition, as shown in Figures 2 and 3, from the opposite edges of the connection feed path 211 of liquid ejection unit 300 The all liq that one edge flows into not necessarily passes through each individual feed path 213 and is supplied to pressure chamber 23.In other words, liquid The a part of of body can flow into fluid supply unit 220 by being connected to another edge of feed path 211, each without being flowed into In individual feed path 213.Such as in the case where this is using exemplary situation, due to the provision of flow channel, liquid flows through the flowing Channel by any recording element plate 10, therefore even if recording element plate 10 is formed into have without showing for flow fluid The fine channels of the big resistance of body can also inhibit any reflux of circulating liquid.Therefore, because can inhibit in ejection end Mouthfuls 13 and pressure chamber 23 at and 23 vicinity of injection tip 13 and pressure chamber liquid viscosity any increase, this uses example Liquid ejecting head 3 can inhibit the phenomenon that surge spray and not spray, and therefore can recorde the image of high quality.

(explanation of the positional relationship between recording element plate)

Figure 12 is the adjacent region of the recording element plate 10 of the jet module of two adjacent positioneds of the invention using example 1 The schematic enlarged plan view in domain.This using in example using the record of substantially parallel quadrangle shown in Figure 10 A to 10C Element board 10.As shown in figure 12, the injection tip column 14a to 14d of each recording element plate in recording element plate 10 is arranged Direction to transmit injection tip column 14a to 14d relative to recording medium is tilted a certain angle.As this arrangement As a result, being looked up in the side that recording medium is transmitted, in the injection tip of each column injection tip 13 of recording element plate 10 In the injection tip of the recording element plate 10 being adjacently positioned in the adjacent area of at least one injection tip and injection tip One injection tip overlapping.In Figure 12, two injection tips overlap each other on every line D.By this arrangement, even if working as When a recording element plate in recording element plate 10 shifts to a certain extent from the appropriate location of recording element plate 10, overlapping Injection tip can be operated in a controlled manner by driving and compensated displacement, to make blackstreak and blank area Domain scintillation (if any) is least obvious.Multiple recording element plates 10 can not be arranged but linear in a zigzag manner Ground (as the crow flies) arrangement.Even if arranging (linear arrangement) by latter, as above by reference to effect described in Figure 12, When recording medium sender looks up, the blackstreak in recording element plate join domain and blank area can be minimized Domain scintillation, while inhibiting any increase of the length of liquid ejecting head 3.Although this is existed using exemplary recording element plate 10 It is parallelogram in plan view, but the present invention is never limited to using parallelogram recording element plate, and the present invention Principle be advantageously applicable to for example for liquid ejecting head according to the present invention using rectangle, trapezoidal or some other shapes Recording element plate 10 the case where.

(using example 2)

Now, the construction and liquid ejecting head 3 of the recording equipment 1000 of the invention using example 2 will be described below Construction.Note that will describe to use example 2 mainly for the difference used between example 1 and this example below, and can save Slightly part similar with the construction of example 1 the is used explanation of the exemplary construction.

(explanation of ink jet recording device)

Figure 20 is the schematic perspective view of the ink jet recording device of the invention using example 2, that schematically shows The construction of the ink jet recording device.The difference of recording equipment 1000 using example 2 and the recording equipment using example 1 exists In, for the purpose operated by using the panchromatic record of recording medium 2, be designed as with magenta, cyan, yellow and black A liquid ejecting head 3 in four (4) in total of the corresponding monochromatic record of the ink of color is arranged in juxtaposition.Although in using example 1, for Only single-row injection tip is available for each color, but using in example 2, for each color, 20 (20) column spray in total (Figure 19 A) can be used in port.Record data due to being input to recording equipment can be suitably allocated to multiple injection tip column, this Kind arrangement allows to execute the record operation of very high speed.In addition, if existing in the injection tip of some column has become not Can spray the injection tip of liquid again, then recording medium sender look up relative to being no longer able to injection liquid The injection tip that above-mentioned injection tip is located in other column at corresponding position sprays liquid with being actuated to compensation, to ensure The reliability of recording equipment 1000.Therefore, which can be suitably used for Commercial print purpose.Such as show in use In example 1 like that, at this using in example, the feed system of recording equipment 1000, buffer container 1003 and primary tank 1006 (referring to Fig. 2) it is fluidly connected to corresponding liquid ejecting head 3.For electric power and injection control signal to be transmitted to the electricity of liquid ejecting head 3 Control unit is electrically connected to corresponding liquid ejecting head 3.

(explanation of circulating path)

As using example 1, first circulation path shown in Fig. 2 or second circulation path shown in Fig. 3 can be used The liquid circulation path between exemplary recording equipment 1000 and liquid ejecting head 3 is used in this.

(explanation of the construction of liquid ejecting head)

Now, the construction below to mutually the same multiple liquid ejecting heads 3 of the invention using example 2 is carried out Explanation.Figure 13 A and 13B are the schematic perspective views of the liquid ejecting head of the invention using example 2, that schematically shows The construction of one of liquid ejecting head.Liquid ejecting head 3 includes the side by side linear arrangement on the longitudinal direction of liquid ejecting head 3 A recording element plate 10 in 16 (16) in total.Liquid ejecting head 3 is row type ink jet print head, which can be with It is actuated to carry out monochromatic record by using monochromatic ink.As in using example 1, liquid ejecting head 3 includes that liquid connects Socket part 111, signal input terminal 91 and power supply terminal 92.If due to use compared with example 1, this use exemplary liquid Injector head 3 is arranged with a large amount of injection tip, therefore signal input terminal 91 and power supply terminal 92 are along the phase of liquid ejecting head 3 Edge is arranged.This is to reduce the decline of the voltage in the wiring part for being likely to occur in and being arranged on recording element plate 10 and letter Number transmission delay.

Figure 14 is the schematic, exploded, isometric illustration of the liquid ejecting head of the invention using example 2.The portion of liquid ejecting head 3 Part and unit are separately shown in Figure 14, to illustrate component and the respective function of unit.The angle flowed from liquid, each unit The order of placement of effect and unit and component with component is substantially identical as example 1 is used, but the unit and component For ensure liquid ejecting head rigidity function with use example 1 it is different.Using in example 1, liquid ejecting head it is rigid Property is mainly ensured by liquid ejection unit supporting element 81.On the other hand, in using example 2, by being included in liquid injection list Second flow path forming member 60 in member 300 ensures the rigidity of liquid ejecting head.This uses exemplary liquid injection list First supporting element 81 is connected respectively to the opposite edges of second flow path forming member 60, and liquid ejection unit 300 is by machine It is joined to tool the bracket of recording equipment 1000, liquid ejecting head 3 is properly positioned in place.Including corresponding vacuum cavitations The liquid ejection unit 220 and electric wiring plate 90 of unit 230 are joined to liquid ejection unit supporting element 81.Filter (does not show It is respectively received in two fluid supply units 220 out).Two vacuum cavitations units 230 are designed to through two negative pressure controls The respective negative pressure different from each other of unit 230 processed controls pressure, wherein a negative pressure is higher than another negative pressure.In addition, working as When high-pressure side vacuum cavitations unit 230 and low-pressure side vacuum cavitations unit 230 are arranged in the opposite edge of liquid ejecting head 3, As shown in figure 14, the liquid in common feed path 211 extended on the longitudinal direction of liquid ejecting head leads to recycling is shared Liquid in road 212 flows in mutually opposite directions.By this arrangement, common feed path 211 and shared recovery approach Heat exchange between 212 helps to reduce the temperature difference between two groups of common-use tunnels.Therefore, arranged along common-use tunnel it is more Hardly there is temperature difference between a recording element plate 10, to provide the non-uniform record as caused by temperature difference hardly The advantages of generation.

Now, the flow channel forming member 210 of liquid ejection unit 300 will be described in more detail below.As shown in figure 14, Flow channel forming member 210 is by the way that second flow path forming member 60 to be laid on first flow channel forming member 50 And it is formed, and the operation of flow channel forming member 210 is to be assigned to injection mould for the liquid fed from fluid supply unit 220 Block 200.Flow channel forming member 210 is also operated as making to supply from the liquid that jet module 200 flows back back to liquid To the flow channel forming member of unit 220.The second flow path forming member 60 of flow channel forming member 210 is wherein It is formed with the component of common feed path 211 and shared recovery approach 212, and at the same time, the second flow path forming member 60 play the effect for mainly ensuring the rigidity of liquid ejecting head 3.Therefore, second flow channel forming member 60 is preferably by using order People is satisfactorily anticorrosive relative to liquid and there is the material of the mechanical strength of height to be formed.More specifically, can be suitable for using In the material of second flow path forming member 60 include SUS, Ti and aluminium oxide.

What Figure 15 A showed first flow channel forming member 50 will install the surface of jet module 200, and Figure 15 B shows The surface of the opposite side of first flow channel forming member 50, the surface of the opposite side will be with second flow path forming member 60 form contact.It is different from example 1 is used, using the first flow channel forming member 50 of example 2 by by multiple composition portions Part is arranged side by side and is formed, to correspond to jet module 200.When first flow channel forming member 50 is by using as described above Multiple building blocks formation when, length phase of the length of first flow channel forming member 50 with liquid ejecting head can be made It is corresponding.Therefore, the arrangement of the first flow channel forming member 50 is particularly suitable for relatively large-sized liquid ejecting head 3, Relatively large-sized liquid ejecting head 3 enables to its own to adapt to B2 size and bigger recording medium.Such as Figure 15 A Shown, the communications ports 51 and jet module 200 of first flow channel forming member 50 are in fluid communication, and as shown in fig. 15b, The communications ports of each individual communications ports 53 and second flow path forming member 60 of first flow channel forming member 50 61 are in fluid communication.Figure 15 C shows being formed with first flow channel forming member 50 for second flow path forming member 60 The surface of contact, Figure 15 D show the transversal of the center portion of the second flow path forming member 60 from thickness direction Face, Figure 15 E show the surface that will be contacted with the formation of fluid supply unit 220 of second flow path forming member 60.Second The functions of the flow channel of flow channel forming member 60 and communications ports and using example 1 for monochromatic flow channel and The function of communications ports is similar.One in a pair of of common-use tunnel formation slot 71 of second flow path forming member 60 is shared logical Road formation slot is common feed path 211 and another common-use tunnel formation slot is that recovery approach 212 is shared shown in Figure 16. Each common-use tunnel that common-use tunnel is formed in slot 71 forms slot and extends along the longitudinal direction of liquid ejecting head 3, so that liquid Body is fed into another edge from an edge in opposite edges.It is different from example 1 is used, it uses in example, shares at this The flow direction of feed path 211 and the flow direction of shared recovery approach 212 are opposite relative to each other.

Figure 16 is the schematic perspective perspective view that this uses exemplary recording element plate 10 and flow channel forming member 210, It shows the connection relationship of recording element plate 10 Yu flow channel forming member 210 from the angle of the liquid flowed herein.Such as Shown in Figure 16, common feed path 211 and shared recovery approach 212 are arranged in flow channel forming member 210, along liquid The longitudinal direction of injector head 3 extends.The communications ports 61 and first flow channel forming portion of second flow path forming member 60 Corresponding each individual communications ports 53 of part 50 are aligned and connect, and pass through common feed path 211 from second to establish The communications ports 72 of flow channel forming member 60 arrive the liquid supply of the communications ports 51 of first flow channel forming member 50 Path.Similarly, it is flowed by sharing recovery approach 212 from the communications ports 72 to the first of second flow path forming member 60 The liquid supply path of the communications ports 51 of channel forming member 50 is established.

Figure 17 is the schematic cross section of the line 17-17 interception in Figure 16.As shown in figure 17, common feed path is logical It crosses each individual communications ports 53 and communications ports 51 is connected to jet module 200.Although being not shown in Figure 17, by referring to Figure 16 will be clear that, as will be shown in some other cross sections, each individual recovery approach passes through similar path It is connected to jet module 200.As using in example 1, jet module 200 and recording element plate 10 be provided with it is corresponding The flow channel that injection tip 13 is connected to, so that part or all of the liquid of supply can pass through liquid spraying operation The injection tip 13 (pressure chamber 23) that is suspended and flow back to.In addition, common feed path 211 passes through phase such as using in example 1 The fluid supply unit 220 closed is connected to vacuum cavitations unit 230 (high-pressure side), and is shared recovery approach 212 and passed through separately One fluid supply unit 220 is connected to vacuum cavitations unit 230 (low-pressure side).Due to leading to common feed path 211 together With this arrangement of the pressure difference between recovery approach 212, the 13 (pressure chamber of injection tip for passing through recording element plate 10 occurs 23) it is flowed from common feed path 211 to the liquid of shared recovery approach 212.

(explanation of jet module)

Figure 18 A is the schematic perspective view of jet module 200, and Figure 18 B is the exploded perspective view of jet module.Show in use The difference between jet module and the jet module in example 1 is that multiple terminals 16 are by along in the more of recording element plate 10 Opposite edges (each long side part of the recording element plate 10) arrangement that the side of a injection tip column upwardly extends, and for list A pair of of the flexible wiring sheet 40 for being electrically connected to these terminals 16 is arranged in a recording element plate 10.Here this arrangement is introduced, because 20 (20) column injection tips are disposed in recording element plate 10 in total, and it illustrates spray from eight (8) column used in example 1 The column for the injection tip for penetrating port dramatically increase.In other words, which is introduced into, to reduce from terminal 16 to being arranged as The maximum distance of recording element 15 corresponding to injection tip column, so that reducing may send out at the wiring part of recording element plate 10 Raw voltage decline and signal propagation delay.In addition, the fluid connection port 31 of support member 30 is disposed in recording element plate In 10, so that the column across all injection tips extend.Other aspects, jet module are similar to using the jet module of example 1.

(explanation of the construction of recording element plate)

Figure 19 A is the signal on the surface for being disposed with injection tip 13 of a recording element plate in recording element plate 10 Figure.Figure 19 C is the schematic diagram of the surface opposite with surface shown in Figure 19 A (rear surface).Figure 19 B be recording element plate 10 with The schematic diagram on the identical surface 19C (rear surface), wherein cover 20 is removed from the figure.As shown in Figure 19 B, liquid supply is logical Road 18 and liquids recovery channel 19 are alternately arranged in the rear surface of recording element plate 10, to prolong along the direction that injection tip arranges It stretches.Although compared with using example 1, arrange significant amount column injection tip, using example 1 and this using example it Between essential distinction be, terminal 16 along recording element plate 10 opposite edges arrange, the recording element plate 10 it is opposite Direction of the edge as described above along injection tip column extends.This is using exemplary essential structure and uses the essential structure of example 1 Similar, the essential structure includes: that each column injection tip is provided with a pair of of liquid supply passage 18 and liquids recovery channel 19, and And cover 20 is provided with the opening 21 being connected with the fluid connection port 31 of support member 30.

Now, the embodiment of the present invention will be described below for characteristic aspect of the invention.

(first embodiment)

Figure 21 A and 21B are the schematic perspective views of the liquid ejecting head of first embodiment of the invention, are schematically shown The structure of liquid ejecting head.More specifically, Figure 21 A is for spraying the schematic vertical of the liquid ejecting head of liquid (such as black) Body figure, Figure 21 B are the schematic, exploded, isometric illustrations of liquid ejecting head.

Liquid ejecting head 13 shown in Figure 21 A and 21B includes multiple recording element plates 10, multiple support members 30 and stream Dynamic channel forming member 210.The quantity of recording element plate 10 is identical as the quantity of support member 30.Recording element plate 10 is by corresponding Support member 30 support, and multiple support members 30 are arranged side by side on single flow channel forming member 210.Figure 22A to 22D is the schematic plan of liquid ejecting head 3, and it illustrates the records for the liquid ejecting head 3 that can be used for the present embodiment The four kinds of different exemplary shapes and four kinds of different exemplary arrangements of element board 10.In the case where Figure 22 A, have parallel The arrangement of recording element plate 10 of quadrangular configuration is in column.The statement of " parallelogram profile " used in this exemplary description Refer to following quadrangles, each angle of the quadrangle formed by the adjacent edge of the quadrangle is non-orthogonal.In the following description, Recording element plate 10 is arranged to form the column direction in liquid ejecting head 3 for referred to as longitudinal direction 401, and Be parallel to be transversely to the machine direction in the plane on the surface of recording element plate 10 direction 401 direction will be referred to as scanning direction 402.

In the case where Figure 22 B, recording element plate 10 is arranged to form column, wherein each recording element plate 10 has Following shapes, in the shape, a pair of side in multipair side positioned opposite extends parallel to each other, and another pair Side is formed by ladder-like bending line.In the case where Figure 22 C, the recording element plate 10 with parallelogram profile is such as being schemed While arrangement in column like that in 22A, the recording element plate 10 of any two adjacent positioned moves each other on scanning direction 402 Position.In the case where Figure 22 D, rectangle recording element plate 10 is arranged in column.

In each figure situation of Figure 22 A to 22C, the recording element plate 10 of any two adjacent positioned in longitudinal direction and It at least partly overlaps each other in the two of scanning direction.In the case where Figure 22 D, the recording element plate of any two adjacent positioned 10 only overlap each other in a longitudinal direction.

Figure 23 A and 23B are the schematic diagrames of the position displacement of the injection tip column of liquid ejecting head 3.Figure 23 A is that have and figure The enlarged diagram of the recording element plate 10 of two adjacent positioneds of the identical profile of recording element plate 10, shows shown in 22A The width of the displacement 403 of the injection tip of respective column is gone out.As shown in fig. 23 a, go out in the adjacent area of recording element plate 10 The displacement of existing injection tip column, and the inter-element spacing 404 of the distance between recording element plate 10 as adjacent positioned is got over Small, the width of the displacement 403 of injection tip column is smaller.In other words, the width of the displacement 403 arranged for reduction injection tip, Smaller inter-element spacing 404 is much better.Foregoing description is applicable not only to the case where Figure 22 A, and applies in general to following liquid Body injector head 3, wherein such as the case where Figure 22 B and 22C, the recording element plate 10 of adjacent positioned is in longitudinal direction and scanning It at least partly overlaps each other in the two of direction.

Figure 23 B is that the amplification of the adjacent area of the recording element plate 10 of two adjacent positioneds in the case where Figure 22 D is shown It is intended to.Although in the case where Figure 23 B, injection tip column between as be suitable in Figure 22 A liquid ejecting head the case where that There is no position displacements for sample, but smaller inter-element spacing 404 is also much better.This is because inter-element spacing 404 is smaller, Gap 405 between the injection tip column of adjacent positioned in adjacent area is smaller.Although will be described below shown in Figure 22 A The wherein liquid that the recording element plate 10 of adjacent positioned at least partly overlaps each other on longitudinal direction and scanning direction the two Injector head 3, but the case where Figure 23 B, can also provide the advantage similar to the liquid ejecting head of Figure 22 A.

Now, the feature of the present embodiment will be described in greater detail below.

Figure 24 is the schematic cross-section of the adjacent area of the recording element plate 10 of two adjacent positioneds of first embodiment Side view.As shown in figure 24, in the gap area 410 between the recording element plate 10 of two adjacent positioneds, recording element plate 10 and the contact surface 411 of support member 30 and the edge 412 of recording element plate 10 being reversed separate.In other words, remember The edge 412 of record element board 10 being reversed is protruded outward from the corresponding edge of support member 30 413, so that adjacent positioned The distance between recording element plate 10 (gap) is less than the distance between the support member 30 of adjacent positioned (gap).

Each recording element plate 10 in recording element plate 10 has previously prepared in chip processing (semiconductor machining) Circuit and other components, and usually formed by using silicon.Generally use any one in various etchings and cutting technique It plants to manufacture the peripheral profile of recording element plate 10.On the other hand, support member 30 is made by being machined and/or moulding It is standby.Support member 30 is produced usually using the metal of resin or such as SUS.Therefore, the machining accuracy of recording element plate 10 is high In the machining accuracy of support member 30.

Referring to Figure 24, if the edge of recording element plate 10 is not protruded outward from the edge of support member 30, it is used as two The precision of the inter-element spacing 404 of the distance between the recording element plate 10 of a adjacent positioned by support member 30 machining accuracy It is determined with the installation site alignment precision of recording element plate 10.This is because if attempting for inter-element spacing 404 to be reduced to small Nominally in machining accuracy and recording element plate 10 by support member 30 installation site alignment precision and limit distance, branch Support part part 30 can be interfering with each other.

On the contrary, when the edge 412 of recording element plate 10 as in the present embodiment from the edge of support member 30 to evagination When out, the machining accuracy of the unsupported component 30 of the precision of the inter-element spacing 404 between the recording element plate 10 of adjacent positioned Limitation.The precision of inter-element spacing 404 is aligned by the machining accuracy of recording element plate 10 and the installation site of recording element plate 10 Precision determines.By this arrangement, if the machining accuracy of support member 30 and the installation site of recording element plate 10 alignment essence Spend it is relatively low, as long as then the edge of recording element plate 10 is protruded outward from the edge of support member 30 greater than support member 30 The distance of dimensional tolerance, support member 30 would not be interfering with each other.Therefore, constructing liquid spray in a manner of being described below First 3 are penetrated, can reduce the distance between the recording element plate 10 of two adjacent positioneds.

Figure 25 A, 25B, 25C and 25D are the schematic diagram of some advantages of the liquid ejecting head of the present embodiment, and show The side view of the adjacent area of the recording element plate 10 of the adjacent positioned of liquid ejecting head.More specifically, Figure 25 A shows first Comparative example, Figure 25 B shows first example of the present embodiment, and Figure 25 C shows the second comparative example, and Figure 25 D is shown Second example of the present embodiment.Figure 25 A and 25B show the corresponding recording element plate 10 of carrying, and (it is mounted on support member 30 On) support member 30 be arranged in the situation on flow channel forming member 210, Figure 25 C and 25D show recording element plate 10 Situation about being installed in corresponding support member 30, the support member 30 are arranged on flow channel forming member 210.

It is assumed here that the machining accuracy of support member 30 be ± 0.1mm, and the machining accuracy of recording element plate 10 be ± 0.01mm, and the installation alignment precision of support member 30 is ± 0.1mm, the installation alignment precision of recording element plate 10 is ± 0.01mm。

In the comparative example shown in Figure 25 A and Figure 25 C, the edge of recording element plate 10 is not from the edge of support member 30 It protrudes outward.In these cases, greater than the value of 0.4mm, (value passes through by the machining accuracy of each support member 30 and each The installation alignment precision of support member 30 is added and will and double to obtain) need to be selected for distance 406 between component, component Between distance 406 be the distance between support member 30 of two adjacent positioneds.In other words, inter-element spacing 404 at least equal to 0.4mm。

For first example of the present embodiment shown in Figure 25 B, inter-element spacing 404 can be made to be equal to by by each note The installation alignment precision phase adduction of the machining accuracy and each recording element plate 10 of recording element board 10 will be obtained with doubling 0.04mm.Therefore, the first of the present embodiment the exemplary inter-element spacing 404 can be from the element of comparative example shown in Figure 25 A Between distance 404 reduce 0.36mm.

For second example of the present embodiment shown in Figure 25 D, inter-element spacing 404 can be made to be equal to by will be each The machining accuracy of recording element plate 10 and the installation alignment precision phase adduction of each support member 30 will be obtained with doubling 0.22mm.Therefore, the second of the present embodiment the exemplary inter-element spacing 404 can be from the element of comparative example shown in Figure 25 C Between distance 404 reduce 0.18mm.

In the case where Figure 25 D, if the installation alignment precision of recording element plate 10 can pass through as low as to a certain degree The installation alignment precision of support member 30 is improved to further decrease inter-element spacing 404.For example, by making each recording element The installation alignment precision of plate 10 is equal to 0.1mm and the installation alignment precision of each support member 30 is made to be equal to 0.01mm, can be with Inter-element spacing 404 is set to be equal to 0.04mm.In this example, high-precision component installation steps is needed only to need to be implemented once.

As described above, by making the edge 412 of recording element plate 10 relative to the edge 413 of support member 30 to evagination Out, it can reduce inter-element spacing 404, to reduce the injection tip in the adjacent area of the recording element plate 10 of adjacent positioned The displacement width 403 of column.It is thereby possible to reduce being situated between in the adjacent area of the recording element plate 10 of adjacent positioned in scanning record Displacement width on the direction of matter 2, and then reduce the displacement width 403 of injection tip column, without the processing by support member 30 The limitation that the installation alignment precision of precision and support member 30 is applied.Then as a result, image it is adjacent with recording element plate 10 The non-uniform problem of such as image at the corresponding position in region is minimized and can produce the image of high quality.

In addition, following problems can be inhibited using present embodiment, that is, for engaging recording element plate 10 and support portion The adhesive of part 30 is wriggled upwards from the isolated gap 410 of the recording element plate 10 by adjacent positioned to the cloth of recording element plate 10 It is equipped with the first surface of injection tip 13.Therefore, when using adhesive bond recording element plate 10 and support member 30, this reality The arrangement for applying example provides advantage as described below, wherein in the arrangement of the present embodiment, so that the edge of recording element plate 10 It is protruded outward from the edge of corresponding support member 30.That is, being come out if adhesive comes out from the surface of engagement Adhesive be forced to be retained in recording element plate 10 from the rear surface of corresponding support member 30 marginal portion outstanding, thus The problem of inhibiting adhesive to wriggle upwards from gap 410.

Desirably, multiple support members 30 are arranged on single flow channel forming member 210.Then, support member 30 can Accurately to arrange on longitudinal direction 401, the image for generating high quality is enabled to.

The length of the part for being disposed with recording element plate 10 side by side of flow channel forming member 210 is preferably no less than The maximum width of recording medium 2 in place can be set in recording equipment 1000.It is this arrangement allow improve image with phase The quality of image to be recorded in the corresponding region of adjacent area of the recording element plate 10 of neighbour's positioning, and can record High quality graphic is recorded on the entire width of medium 2.

Although in the present embodiment, recording element plate 10 can be individually replaced, the present invention is not limited to this arrangements. For example, recording element plate 10 cannot be individually replaced the liquid ejecting head 3 that still support member 10 advantageously can be processed individually The advantage similar to the present embodiment can also be provided.

Therefore, the construction requirements to be met of the present embodiment is simply that the edge of the recording element plate 10 of adjacent positioned It is protruded outward from the edge of corresponding support member 30.As shown in Figure 22 A to 22D, by not having the edge of support member 30 Have and protruded outward at the side of the recording element plate 10 of adjacent positioned from the edge of corresponding recording element plate 10, can make to support Component 30 steadily supports recording element plate 10.In addition, as illustrated in figures 9a and 9b, it is also possible that each support member 30 is stablized Ground supports the flexible wiring sheet 40 for being joined to recording element plate 10.Described above, it is preferably so that recording element plate 10 It is protruded outward at the side that recording element plate 10 is arranged in juxtaposition relative to corresponding support member 30.On the other hand, preferably So that support member 30 (is joined to accordingly in the side that the recording element plate 10 of not adjacent positioned is arranged in support member The side of flexible wiring sheet 40) it is protruded outward from corresponding recording element plate 10.

In the following description, a recording element plate in the recording element plate 10 of any two adjacent positioned will be claimed For the first recording element plate, and another recording element plate will be referred to as the second recording element plate.Similarly, the first record of support The support member 30 of element board will be referred to as the first support member, support the support member 30 of the second recording element plate that will be referred to as Second support member.Then, the first support member and the second support member are arranged in flow channel forming member 210 side by side On.In addition, the edge for being positioned adjacent to the second recording element plate of the first recording element plate is preferably from the first support member The edge for being positioned adjacent to the second support member is prominent towards the second recording element plate.Similarly, the second recording element plate is determined Position is at the edge close to the first recording element plate preferably from the side for being positioned adjacent to the first support member of the second support member Edge is prominent towards the first recording element plate.

However, the present invention is not limited to arrangement shown in Figure 22 A to Figure 22 D, it is also possible to apply the invention to each notes Element board 10 is recorded along its entire periphery from the outwardly projecting arrangement of corresponding support member 30.

(second embodiment)

Figure 26 A and 26B and Figure 27 A and 27B schematically show the second reality of liquid ejecting head according to the present invention Apply example.Figure 26 A and 26B are the schematic diagrames of liquid ejecting head.More specifically, Figure 26 A is the schematic perspective view of liquid ejecting head, Figure 26 B is the signal exploded perspective view of liquid ejecting head.On the other hand, Figure 27 A and 27B is the recording element plate of adjacent positioned Schematic diagram.More specifically, Figure 27 A is the schematic plan of liquid ejecting head, Figure 27 B is that the line 27B-27B in Figure 27 A is cut The schematic cross section taken.

Shown in Figure 26 A and 26B and Figure 27 A and 27B, the liquid ejecting head of the present embodiment and the liquid of first embodiment spray Penetrate head the difference is that, cover 20 be arranged between recording element plate 10 and support member 30.Extraly, in this implementation In the liquid ejecting head of example, the back side feed path of the injection tip 13 for supplying a liquid to each recording element plate 10 420 are arranged in the rear surface of recording element plate 10, and the operation of cover 20 is supplied as the back side for recording element plate 10 To the lid in channel 420.In addition, cover 20 is provided with the supply port for supplying a liquid to back side feed path 420 17a.It is connected to supply port 17a with the feed path being arranged in inside support member 30.Cover 20 is by resin film It is made and there is the thickness smaller than the thickness of support member 30.The thickness of cover 20 is preferably not more than 1mm, more preferably No more than 0.1mm.

In the liquid ejecting head 3 of the present embodiment, in the phase from corresponding support member 30 of each recording element plate 10 The edge answered is formed with injection tip 13 in outwardly projecting part.Since back side feed path 420 is covered by cover 20, because This liquid can be fed into the injection tip 13 in the outwardly projecting part of recording element plate 10.

Such as in the description of first embodiment, it is assumed here that a record in the recording element plate 10 of two adjacent positioneds Element board will be referred to as the first recording element plate, and another recording element plate will be referred to as the second recording element plate, and false Surely the first support member will be referred to as by supporting the support member 30 of the first recording element plate, and support the second recording element plate Support member 30 will be referred to as the second support member.It should be noted that cover 20 is arranged in first with back side feed path 420 together To cover back side feed path 420 between recording element plate and corresponding support member, the back side feed path 420 is formed in On the surface for being positioned adjacent to corresponding first support member of first recording element plate and as supplying a liquid to The feed path of recording element.

It should be noted that the cover of the lid as covering back side feed path 420 is that thickness is thinner than the thickness of support member 30 Component so that cover can be processed with the machining accuracy substantially the same with the machining accuracy of recording element plate 10. For example, cover 20 can be formed by processing silicon substrate.If it is, the thickness of cover 20 can be made to be not more than 1mm.Silicon substrate can be processed by photoetching, the blade cutting as the technology for processed wafer or laser.These technologies Any one of may ensure that machining accuracy is substantially equal to the machining accuracy of operation record element board 10.Alternatively, Cover 20 can be formed by processing resin film.If it is the case, the thickness of cover 20 can be made to be not less than 0.1mm.As in the case where processing silicon substrate, resin film can by photoetching, for processed wafer blade cutting or Person laser is processed.Any one of these technologies are also ensured that machining accuracy is substantially equal to operation record element board 10 Machining accuracy.Recording element plate 10 and cover 20 are preferably engaged with each other without using any liquid adhesive.Then, The adhesive for engaging recording element plate 10 and cover 20 can be effectively prevented and be penetrated into recording element plate 10 and cover In feed path in part 20.

In the present embodiment, injection tip 13 be arranged in recording element plate 10 respectively from the side of corresponding support member 30 On the outwardly projecting part of edge 413.Due to this arrangement, compared with first embodiment, keep any two of the present embodiment adjacent The separation distance that the injection tip 13 of the recording element plate 10 of positioning is separated can further decrease.It then as a result, can be further Reduce the displacement width of the injection tip column in the adjacent area of the recording element plate 10 of any two adjacent positioned.

As in the description of the upper surface of first embodiment, between the recording element plate 10 that considers two adjacent positioneds Inter-element spacing 404 between the case where inter-element spacing 404 is 0.02mm and the recording element plate 10 of two adjacent positioneds The case where for 0.2mm.In these cases, injection tip 13 is arranged in the phase with the edge separation 0.05mm of recording element plate 10 It answers at position.When the angle formed by two sides being obliquely installed of each recording element plate 10 is 45 degree, two adjacent The displacement width of injection tip column will be respectively about 0.17mm and about 0.42mm.It therefore, can be with if compared with first embodiment It is substantially reduced displacement width.As described above, machining accuracy and peace of the displacement width of the present embodiment independent of support member 30 Fill alignment precision.Therefore, as observed on the scanning direction of corresponding recording medium 2, the record of any two adjacent positioned The displacement width in its adjacent area of element board 10 can reduce, to reduce the displacement width 403 of injection tip column.Then As a result, the non-uniform problem of the image at position such as corresponding with the adjacent area of recording element plate 10 can be made minimum Change, and can produce the image of high quality.

In addition, as with the first embodiment, the viscous of engagement recording element plate 10 and support member 30 can be effectively inhibited Mixture is wriggled upwards from the gap 410 for keeping the recording element plate 10 of any two adjacent positioned isolated to the cloth of recording element plate 10 The problem of setting the first surface of injection tip 13.

It should be noted that as in the present embodiment, in the first embodiment, injection tip 13 can be arranged in recording element On the outwardly projecting part in corresponding edge of the slave support member 30 of plate 10.If it is the case, feed path need by The formation for being formed in recording element plate 10 has on the surface of injection tip 13, to supply a liquid to injection tip 13, the spray Port 13 is penetrated to be arranged on the outwardly projecting part of recording element plate 10.Then, however, although in the first embodiment, supplying The height in channel is up to tens μm, but the height of the back side feed path 420 of second embodiment can be made about several hundred μ m.It means that in a second embodiment, liquid, which can be more fully supplied to, is arranged in record member compared with first embodiment Injection tip 13 in the outwardly projecting part in corresponding edge from corresponding support member 30 of part plate 10, so that with One embodiment is compared, and in a second embodiment, can more satisfactorily improve the record image-region corresponding to adjacent area Picture quality.

Be formed with back side feed path 420 rear surface refer to recording element plate 10 relative to being formed with injection tip 13 Surface substantive rear surface.In other words, pass through in recording element plate 10 multiple substrates one are suitable on top of the other In the case where secondary placement, rear surface is not formed with the rear surface of the front surface upper top substrate of injection tip 13 instead of, is inciting somebody to action Substrate one place after the other after made of entire recording element plate 10 rear surface, and the rear surface positions At opposite with the front surface for being formed with injection tip 13.In the case where Figure 27 B, the recording element plates 10 of two adjacent positioneds it Between distance be equal to the distance between the covers 20 of two adjacent positioneds, between the recording element plate 10 of two adjacent positioneds Distance can be less than the distance between the cover 20 of two adjacent positioneds.

(manufacturing step of the liquid ejecting head of second embodiment)

Figure 28 is the flow chart for showing the manufacturing step of liquid ejecting head of second embodiment.

Firstly, the injection tip forming step (step S501) that injection tip 13 is formed on recording element plate 10 is executed, Wherein, it is already formed on the recording element plate 10 for circuit necessary to foaming liquid (such as recording element 15). At this point, recording element plate 10 is the form of chip.Then, it executes and forms back side feed path on the back side of recording element plate 10 420 back side feed path forming step (step S502).Then, it executes and forms cover on the back side of recording element plate 10 20 cover forming step (step S503).Then, it executes and recording element plate 10 is machined so as to recording element plate 10 The designed appropriate exterior contour of presentation and the recording element that chip form is manufactured from the recording element plate 10 of wafer format The cutting step (step S504) of plate 10.Then, it executes to engage recording element plate 10 to corresponding support member 30 and to cover The engagement step (step S505) that component 20 and support member 30 position face-to-face.Finally, executing recording element plate 10 It is joined to the deposition step (step S506) that support member 30 thereon is arranged in side by side on flow channel forming member 210.

As the cover forming step (step S503) before engagement step (step S505) is middle 20 shape of cover At in the rear surface of recording element plate 10, the liquid ejecting head of second embodiment has been made.It is thereby possible to reduce any two The displacement width of the recording element plate 10 of adjacent positioned in a scanning direction, thus reduce the displacement width of injection tip column, and Machining accuracy and installation alignment precision independent of support member 30.Then as a result, can make adjacent with recording element plate 10 The non-uniform problem of such as image at the corresponding position in region minimizes, and can produce the image of high quality.

When forming cover 20 by using silicon substrate, the cover that is formed by using the silicon substrate of wafer format 20 can be joined to the recording element plate 10 of wafer format.Therefore, the corresponding of many chip forms is joined to cover 20 The case where recording element plate 10, is compared, it is possible to reduce step number.

When cover 20 is formed by using resin film, the cover 20 of form membrane can be joined to recording element plate 10 Chip to produce laminate.Then as a result, with cover 20 is formed like that based on chip to chip by silicon substrate as described above The case where each individual cover 20 is joined respectively to recording element plate 10 is compared, it is possible to reduce step number.

It should be noted that the manufacturing step of the present embodiment description is only exemplary manufacturing step, and the present invention never limits In above-mentioned manufacturing step.For example, executing injection tip forming step (step S501), back side feed path forming step (step S502), cover forming step (step S503) and the sequence of cutting step (step S504) may not necessarily be above for The sequence of the present embodiment description.For manufacturing step, sole requirement meets, needs before engagement step (step S505) It executes cover forming step (step S503).

As described above liquid ejecting head 3 and recording equipment 1000 can in printer, duplicator, equipped with communication system Facsimile machine and word processor field with printer section in be applied.In addition, liquid injection according to the present invention First 3 and recording equipment 1000 can also be in the industrial recording apparatus formed and combining various processing equipments in a complex manner It is applied in field.For example, liquid ejecting head can production biochip field in, in electronic circuit print field etc. In be applied.

Therefore, according to the present invention, the edge of recording element plate is from the side for the support member for supporting corresponding recording element plate Edge protrudes outward on the direction that support member is arranged in juxtaposition.It, can be by reference to being higher than support member due to this arrangement Machining accuracy and the machining accuracy of the recording element plate of installation alignment precision and installation alignment precision are adjacent to limit any two The distance between recording element plate of positioning.Then as a result, can reduce between the recording element plate of any two adjacent positioned Distance.

While the invention has been described with reference to exemplary embodiments, but it is to be understood that the present invention is not limited to disclosed Exemplary embodiment.Scope of the appended claims should be endowed broadest explanation, to include all such modifications And equivalent structure and function.

Claims

1. a kind of liquid ejecting head, comprising:

First recording element plate and the second recording element plate, the first recording element plate and the second recording element plate have For generating the recording element of energy, the energy will be used for the injection of liquid；

First support member and the second support member, first support member and second support member for supporting respectively The first recording element plate and the second recording element plate；And

Flow channel forming member carries first support member being arranged in juxtaposition and institute on the flow channel forming member The second support member is stated,

Wherein, the edge for being located in that side of second data board of the first recording element plate is from first support member Be located in that side of second support member edge towards described in

Second recording element plate is prominent.

2. liquid ejecting head according to claim 1,

Wherein, the edge for being located in that side of the first recording element plate of the second recording element plate is supported from described second The edge for being located in that side of first support member of component is prominent towards the first recording element plate.

3. liquid ejecting head according to claim 1 or 2,

Wherein, liquid service duct is formed in positioning face-to-face with first support member for the first recording element plate On surface, to supply a liquid to the recording element, and

Wherein, cover is arranged between the first recording element plate and first support member, to form liquid supply The a part in channel.

4. liquid ejecting head according to claim 3,

Wherein, the thickness of the cover is less than the thickness of first support member and the thickness of second support member.

5. liquid ejecting head according to claim 3,

Wherein, the thickness of the cover is not more than 1mm.

6. liquid ejecting head according to claim 3,

Wherein, the cover is formed by using resin film.

7. liquid ejecting head according to claim 1 or 2,

Wherein, the first recording element plate include with for spray liquid injection tip injection tip forming member and Substrate with recording element, and

Wherein, the substrate there is the liquid for supplying a liquid to recording element to supply in the rear surface of the substrate logical Road and for from the liquids recovery channel of recording element withdrawal liquid, the rear surface is positioned to the surface with carrying recording element On the contrary, wherein the recording element is arranged on the surface of the carrying recording element.

8. liquid ejecting head according to claim 1 or 2,

Wherein, the peripheral profile of the first recording element plate and the second recording element plate is parallelogram.

9. liquid ejecting head according to claim 8,

Wherein, the edge adjacent with the edge that is located in that side of the second recording element plate of the first recording element plate be not Corresponding edge relative to first support member is prominent.

10. liquid ejecting head according to claim 1 or 2,

Wherein, the liquid ejecting head is page width type liquid ejecting head, and

Wherein, for supplying liquid to the common feed path of the first recording element plate and the second recording element plate And for being arranged in from the shared recovery approach of the first recording element plate and the second recording element plate withdrawal liquid At flow channel forming member.

11. liquid ejecting head according to claim 1 or 2,

Wherein, the machining accuracy of the substrate of the first recording element plate is higher than the machining accuracy of first support member.

12. liquid ejecting head according to claim 1 or 2,

Wherein, it is formed at the protrusion of the first recording element plate for spraying the injection tip of liquid.

13. liquid ejecting head according to claim 1 or 2,

Wherein, multiple recording element plates including the first recording element plate and the second recording element plate are linearly arranged At flow channel forming member.

14. liquid ejecting head according to claim 1 or 2,

Wherein, the first recording element plate has pressure chamber, is respectively provided with recording element, and institute in the inside of each pressure chamber The liquid stated in pressure chamber recycles between the inside and outside of pressure chamber.

15. a kind of liquid injection apparatus, the liquid injection apparatus includes liquid ejecting head and described for supplying a liquid to The conveying device of liquid ejecting head, the liquid ejecting head include:

First recording element plate and the second recording element plate, the first recording element plate and the second recording element plate have The recording element of energy is generated, the energy will be used for the injection of liquid；

Second recording element plate is prominent.