CN106927466B - A kind of 48 pairs of rod reducing furnace body structures - Google Patents
A kind of 48 pairs of rod reducing furnace body structures Download PDFInfo
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- CN106927466B CN106927466B CN201710217911.3A CN201710217911A CN106927466B CN 106927466 B CN106927466 B CN 106927466B CN 201710217911 A CN201710217911 A CN 201710217911A CN 106927466 B CN106927466 B CN 106927466B
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
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Abstract
The invention discloses a kind of 48 pairs of rod reducing furnace body structures, oven body part includes outer wall, interlayer and inwall, inwall is connected with interlayer, interlayer is connected with outer wall, and internals are provided with interlayer, and internals include X-type reinforcement and top material air inlet pipe, inwall is three-layer composite structure, outer layer is housing, and intermediate layer is nanometer micropore thermal insulation layer, and internal layer is nanometer silver coating；Some groups of X-type reinforcements helically risen outside inwall from bottom to up are provided with interlayer, the both ends of X-type reinforcement are connected with outer wall and interlayer respectively；The body of heater top material air inlet pipe helically risen outside inwall from bottom to up is provided with the interlayer of body of heater.The present invention sets nanometer micropore heat-barrier material and nanometer silver coating effectively to reduce furnace heat and scatter and disappear in inwall, and X-type reinforcement can make furnace binding have good mechanical strength and bearing capacity, ensure that material gas circulates more glibly in stove, cooling radiating effect is improved, is advantageous to quick, the uniform growth of polysilicon.
Description
Technical field
The present invention relates to polysilicon preparing device technical field, and in particular to a kind of body of heater knot for polycrystalline silicon reducing furnace
Structure.
Background technology
Improved Siemens are the mainstream technologys for producing polysilicon in the world, and its nucleus equipment is reduction furnace, reduction furnace
Operation principle is that the mixing gas reaction of trichlorosilane and hydrogen is generated into polysilicon by energization high temperature silicon core and is deposited on silicon
On core, final product is deposited on the polysilicon on silicon core, and product is finally produced in the form of polycrystalline silicon rod from reduction furnace.
The polysilicon that the whole world has more than 85% is produced using improved Siemens.Improved Siemens are a kind ofization
Method, it is easy to the three of purification first with metalluragical silicon (purity requirement is more than 99.5%) and hydrogen chloride (HCl) are synthetically produced
Chlorine hydrogen silicon gas (SiHCl3, hereinafter referred TCS), then by TCS rectification and purifications, finally by reduction reaction and chemical vapor deposition
The TCS of high-purity is converted into the polysilicon of high-purity by product (CVD).
The country is that producer uses 24/36 pair of rod reduction furnace in terms of production of polysilicon mostly, and power consumption cost is production polycrystalline
One of prime cost of silicon, also, the power consumption cost of low capacity reduction furnace is higher.High power consumption largely governs industry
Development, compared to small-sized reduction furnace, large-scale reduction furnace has that single furnace output is high, the advantages such as unit consumption of product is low, utilization of materials is high.Cause
This, no matter from production efficiency, or it is energy-saving from the aspects of, polycrystalline reduction technique is necessarily to become using large-scale reduction furnace
Gesture.
When the volume of polycrystalline silicon reducing furnace increases to 48 pairs of rods, thermal field, the increase of flow field complexity in reduction furnace are complicated
The requirement to low energy consumption of temperature field in furnace and flow fields environment and production of polysilicon, all promote it is more practical, more energy-conservation,
The design of more advanced 48 pairs of rod reducing furnace body structures.Reduce heat size expansion so that feed flow rate, material flow field,
The key parameter that thermal field etc. influences polycrystalline silicon growth becomes more complicated, it is necessary to develop series of key techniques, to ensure key
The stabilization of parameter, and then efficient, the stable operation of large-scale reduction furnace are realized, the body of heater of reduction furnace is to ensure polycrystalline silicon growth and go back
The critical piece of former stove stable operation, it is the key realized reduction furnace maximization and reduce reduction furnace energy consumption.
Therefore, how for the more rational furnace binding of reduction furnace design structure, it is made to be dissipated in air current flow, cooling
There is more excellent performance to become one of industry urgent problem to be solved for heat, temperature control etc..
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of structure design more rationally, there is higher intensity, heat in stove
48 pairs of rod reduction furnaces of the homoepitaxial that amount radiation loss is smaller, can improve the deposition growing efficiency of silicon rod and ensure silicon rod
Body structure, mainly for the furnace binding with 48 pairs of electrodes.
In order to solve the above technical problems, the present invention adopts the following technical scheme that：A kind of 48 pairs of rod reducing furnace body structures, stove
Body portion includes outer wall, interlayer and inwall, and inwall is connected with interlayer, and interlayer is connected with outer wall, and interlayer is internally provided with internals,
It is characterized in that：Internals include X-type reinforcement and top material air inlet pipe；The inwall is three-layer composite structure, and outer layer is shell
Body, intermediate layer are nanometer micropore thermal insulation layer, and internal layer is nanometer silver coating, and nanometer micropore thermal insulation layer is attached to the inner surface of outer layer,
Nanometer silver coating is then attached to the inner surface of nanometer micropore thermal insulation layer, and nanometer micropore thermal insulation layer uses nanometer micropore heat-barrier material system
Into；It is provided with some groups of X-type reinforcements helically risen outside the inwall from bottom to up in interlayer, the two of X-type reinforcement
End is connected with outer wall and inwall respectively；It is provided with what is helically risen outside inwall from bottom to up in the interlayer of body of heater
Body of heater top material air inlet pipe, air inlet pipe are stretched into inwall from the top of body of heater.
Nanometer micropore heat-barrier material has a huge specific surface area, and the contact between nano particle contacts for minimum point,
The thermal resistance of point contact is very big so that the conduction heat transfer effect of material becomes very small, causes nanometer level microporous heat-barrier material
Conductive heat transfer coefficient is very small；Substantial amounts of nanoporous is formed between nano particle, its size is averaged in 20nm, and static sky
Evenly heat freedom of motion journey under the molecule normal temperature of gas is 60nm, thus air molecule be locked in powder nanometer stomata it
It is interior so that the small convection heat transfer' heat-transfer by convection event resolves between still air molecule, thus the normal temperature heat conduction of nanometer micropore heat-barrier material
The static air of coefficient ratio is also low；At high temperature, the main function of heat transfer is heat radiation, and the addition of nanometer micropore heat-barrier material is special
Different infrared additive, prevent at high temperature and reflect infrared-ray, radiant heat transfer effect is bottomed out so that material
Radiation heat transfer coefficient under high temperature is reduced to minimum, so as to effectively reduce the loss of furnace heat.
Further, the air inlet of air inlet pipe is located at the bottom of outer wall, and the end that air inlet pipe is located in inwall is connected with
One dome-type air inlet spray head, some ventholes are evenly distributed with the hemisphere face of air inlet spray head.The air inlet pipe can be by material gas
Lead at the top of body of heater, the main nozzle of air supply in the chassis as auxiliary air inlet channel and reduction furnace coordinates, and is provided for reduction furnace more equal
Even material qi leel cloth so that the growth that polysilicon can be evenly.
Further, the interlayer is internally provided with internals, and it is internally formed interlayer cooling-water duct, in the bottom of outer wall
Water inlet provided with interlayer cooling-water duct, the delivery port of interlayer cooling-water duct is provided with the top of outer wall.
Further, the nanometer silver coating be reflectivity more than 95% high reflectance nanometer silver coating, the Nano Silver
The thickness of coating is 0.5~2mm, and nanometer silver coating can be by infra-red radiation in stove in effectively reflection be melted down, so as to reduce stove
The radiation of interior heat is scattered and disappeared.And the chemical property of nanometer silver coating is stable, fusing point is up to 961 DEG C, can be well adapted for stove
Interior high temperature and corrosivity working environment.Coating has good thermal conductivity, and its thermal conductivity (420W/mK) is close to iron thermal conductivity
Seven times, good thermal conductivity make it that the hydrogen chloride gas with thermotaxis forms one layer of gas blanket, gas in coating surface in stove
Body layer can effectively prevent deposition of the silica soot on inwall in stove.
Further, the housing of the inwall is made of alloy materials such as carbon steels, and X-type reinforcement is by welding or casting
Processing mode is made to be connected on the external shell of inwall.
Further, the section of the X-type reinforcement is in X-shape, and X-type reinforcement forms two triangle pair roof constructions,
Two triangular bases are connected to inner wall outside and inside outer wall.The stable mechanical structure of triangle can be inside and outside body of heater
Wall provides effective structural support, so as to strengthen the structural strength of body of heater.
Further, the crossover location of the X-type reinforcement is arranged to fillet structure, is handled by fillet, can avoid X-type
The geometry mutation in reinforcement section, so as to slow down the stress concentration inside X-type reinforcement, it is strong to improve its endurance
Degree.
Further, the X-type reinforcement is that hollow structure, its underpart and top connect with the cooling-water duct that interlayer is formed
It is logical.Cooling water in interlayer can be distributed along it path spiral by the hollow space of X-type reinforcement, directly reach interlayer
Top, without cooling water can also be reached into cooling effect, also, X-type cross-sectional hollow portion's water flowing of reinforcement full of whole interlayer
It can play a part of afterwards " heat sink ", increase the contact area of cooling water and metallic walls, so as to improve the radiating efficiency of cooling water.
Further, the air inlet pipe is attached on the X-type reinforcement and the top of outer wall is extended to along X-type reinforcement
Portion, so inlet channel can need not be redesigned for the air inlet pipe, so as to improve the use function of body of heater, reduce furnace binding
Complexity.Meanwhile spirality channel may also function as the effect of uniform pickup interlayer cooling water heat.
Further, the shower nozzle hemisphere face straightened portion of the dome-type air inlet spray head is set down, on shower nozzle hemisphere face
Venthole set along the hemispherical radial direction of shower nozzle.Hemisphere die cavity can play buffering decompression to the material gas in air inlet pipe
Effect, reduce gas shock of the material gas to silicon rod in stove, flow more gentle air inlet to provide at the top of reduction furnace.
Meanwhile gas material sprays from the hemispherical venthole of dome-type air inlet spray head.The gas sprayed in the middle part of from shower nozzle in venthole
Body can provide uniform material gas for connecting bridge at the top of polycrystalline silicon rod in stove, avoid connecting bridge puffed rice at the top of polycrystalline silicon rod
The generation of shape deposition, more effectively with improving the Growing Quality to crystal silicon, also, the gas sprayed from venthole in the middle part of shower nozzle can
Think that connecting bridge carries out certain cooling at the top of polycrystalline silicon rod in stove.The gas sprayed from shower nozzle external diameter venthole can be whole
Gas flow guiding is played a part of in the circulation of material gas in individual stove, further lift material gas in reduction furnace uniform point
Cloth, it is the more favourable growing environment of homoepitaxial body of polysilicon.
The required body of heater cooling water of the present invention enters furnace sandwich by the cooling water intake of furnace body outer wall bottom, when cold
But after water is full of interlayer, excluded by the interlayer cooling water outlet at the top of furnace body outer wall.Wherein, a part of cooling water passes through by pressing from both sides
Layer bottom upward around the X-type reinforcement helically risen outside inwall middle vacancy, along the spiral track of X-type reinforcement
Interlayer headroom is directly reached, so as to play extraordinary cooling effect.And material gas is from the air inlet of furnace body outer wall bottom
Mouth enters, and is then reached at the top of body of heater by the material air inlet pipe helically risen outside inwall, finally led to from bottom to up
The dome-type air inlet spray head for crossing air inlet pipe end sprays into feed in reduction furnace, and the material qi leel being more uniformly distributed is provided for reduction furnace
Cloth so that polysilicon can more uniformly grow.The X-type helically risen outside inwall from bottom to up is set in interlayer
Body of heater reinforcement can improve the intensity of whole body of heater.Nanometer silver coating is set to make in stove heat radiation through high reflection inside inboard wall of furnace body
After the reflection of rate nanometer silver coating, furnace interior is effectively reflected back, thermal loss is greatly reduced.Nanometer is set among inboard wall of furnace body
Micropore heat-barrier material has further completely cut off furnace heat and outwards scattered and disappeared.So that this furnace binding have good mechanical strength and
Bearing capacity, material gas in stove can be made to circulate more glibly, and efficiently reduce the radiation loss of furnace heat, more favorably
In quick, the uniform growth of polysilicon.
Brief description of the drawings
Fig. 1 is general structure schematic diagram of the present invention；
Fig. 2 is X-type reinforced bag sand well structural representation of the present invention；
Fig. 3 is material air inlet pipe distributed architecture schematic diagram of the present invention；
Fig. 4 is furnace body wall structural representation；
Fig. 5 is dome-type air inlet spray head structure schematic diagram.
1 is outer wall, and 2 be interlayer, and 21 be X-type reinforcement, and 22 be delivery port, and 23 be water inlet, and 24 be air inlet, and 3 be interior
Wall, 31 be nanometer silver coating, and 32 be nanometer micropore thermal insulation layer, and 33 be housing, and 4 be air inlet spray head, and 41 be shower nozzle hemisphere face, and 42 are
Venthole, 5 be air inlet pipe.
Embodiment
In the present embodiment, reference picture 1- Fig. 5,48 pairs of rod reducing furnace body structures, oven body part include outer wall 1,
Interlayer 2 and inwall 3, inwall 3 are connected with interlayer 2, and interlayer 2 is connected with outer wall 1, and interlayer 2 is internally provided with internals；The inwall 3
For three-layer composite structure, outer layer is housing 33, and intermediate layer is nanometer micropore thermal insulation layer 32, and internal layer is nanometer silver coating 31, nanometer
Micropore thermal insulation layer 32 is attached to the inner surface of outer layer, and nanometer silver coating 31 is then attached to the inner surface of nanometer micropore thermal insulation layer 32,
Nanometer micropore thermal insulation layer 32 is made of nanometer micropore heat-barrier material；It is provided with interlayer 2 and is in outside inwall from bottom to up
Spiralling some groups of X-type reinforcements 21, the both ends of X-type reinforcement 21 are connected with outer wall 1 and inwall 3 respectively；In stove
The body of heater top material air inlet pipe 5 helically risen outside inwall 3 from bottom to up is provided with the interlayer 2 of body, air inlet pipe 5 is certainly
Stretched at the top of body of heater in inwall 3.
The air inlet 24 of air inlet pipe 5 is located at the bottom of outer wall 1, and the end that air inlet pipe 5 is located in inwall 3 is connected with half
Ball-type air inlet spray head 4, some ventholes 42 are evenly distributed with the hemisphere face of air inlet spray head 4.The air inlet pipe 5 can be by material gas
Lead at the top of body of heater, the main nozzle of air supply in the chassis as auxiliary air inlet channel and reduction furnace coordinates, and is provided for reduction furnace more equal
Even material qi leel cloth so that the growth that polysilicon can be evenly.
The interlayer 2 is internally provided with internals, and it is internally formed interlayer cooling-water duct, and folder is provided with the bottom of outer wall 1
The water inlet 23 of layer cooling-water duct, the delivery port 22 of interlayer cooling-water duct is provided with the top of outer wall 1.
The nanometer silver coating 31 is the high reflectance nanometer silver coating of reflectivity more than 95%, this nanometer of silver coating 31
Thickness is 0.5~2mm, and nanometer silver coating can be by infra-red radiation in stove in effectively reflection be melted down, so as to reduce furnace heat
Radiation scatter and disappear.And the chemical property of nanometer silver coating is stable, fusing point is up to 961 DEG C, the height that can be well adapted in stove
Gentle corrosivity working environment.Coating has good thermal conductivity, and its thermal conductivity (420W/mK) is close to the seven of iron thermal conductivity
Times, good thermal conductivity make it that the hydrogen chloride gas with thermotaxis forms one layer of gas blanket, gas blanket in coating surface in stove
Deposition of the silica soot on inwall in stove can effectively be prevented.
The housing 33 of the inwall 3 is made of carbon steel, and X-type reinforcement 21 passes through welding (or casting processing also can) side
Formula is connected on the external shell of inwall 3.
The section of the X-type reinforcement 21 is in X-shape, and X-type reinforcement 21 forms two triangle pair roof constructions, two three
Angled bottom is connected to the outside of inwall 3 and the inner side of outer wall 1.The stable mechanical structure of triangle can be that body of heater inside and outside wall carries
For effective structural support, so as to strengthen the structural strength of body of heater.
The crossover location of the X-type reinforcement 21 is arranged to fillet structure, is handled by fillet, can avoid X-type reinforcement
The geometry mutation in 21 sections, so as to slow down the stress concentration inside X-type reinforcement 21, improves its endurance degree.
The X-type reinforcement 21 is that hollow structure, its underpart and top connect with the cooling-water duct that interlayer 2 is formed.Folder
Cooling water in layer 2 can be distributed along it path spiral by the hollow space of X-type reinforcement 21, directly reach interlayer 2
Top, without cooling water can also be reached into cooling effect, also, X-type cross-sectional hollow portion's water flowing of reinforcement full of whole interlayer 2
It can play a part of afterwards " heat sink ", increase the contact area of cooling water and metallic walls, so as to improve the radiating efficiency of cooling water.
The air inlet pipe 5 is attached on the X-type reinforcement 21 and the top of outer wall 1 is extended to along X-type reinforcement 21, such as
This can need not redesign inlet channel for the air inlet pipe 5, so as to improve the use function of body of heater, reduce the complexity of furnace binding
Degree.Meanwhile spirality channel may also function as the effect of uniform pickup interlayer cooling water heat.
The straightened portion of shower nozzle hemisphere face 41 of the dome-type air inlet spray head 4 is set down, going out on shower nozzle hemisphere face 41
Stomata 42 is set along the hemispherical radial direction of shower nozzle.Hemisphere die cavity can play buffering decompression to the material gas in air inlet pipe 5
Effect, reduce gas shock of the material gas to silicon rod in stove, flow more gentle air inlet to provide at the top of reduction furnace.
Meanwhile gas material sprays from the hemispherical venthole of dome-type air inlet spray head.The gas sprayed in the middle part of from shower nozzle in venthole
Body can provide uniform material gas for connecting bridge at the top of polycrystalline silicon rod in stove, avoid connecting bridge puffed rice at the top of polycrystalline silicon rod
The generation of shape deposition, more effectively with improving the Growing Quality to crystal silicon, also, the gas sprayed from venthole in the middle part of shower nozzle can
Think that connecting bridge carries out certain cooling at the top of polycrystalline silicon rod in stove.The gas sprayed from shower nozzle external diameter venthole can be whole
Gas flow guiding is played a part of in the circulation of material gas in individual stove, further lift material gas in reduction furnace uniform point
Cloth, it is the more favourable growing environment of homoepitaxial body of polysilicon.
Radiant heat inside reduction furnace is after the high reflectance nanometer silver coating 31 inside inboard wall of furnace body 33 by effective anti-
It is emitted back towards furnace interior；Nanometer of the heat transmitted in high reflectance nanometer silver coating 31 inside inwall 3 through the middle part of inboard wall of furnace body 3
After micropore thermal insulation layer 32, the outside transmission of heat is effectively obstructed.The heat of part outflow is passed by the external shell 33 of inboard wall of furnace body 3
After passing, the cooling water in via interlayer 2 is taken away；The heat of also part outflow is delivered to X-type after the external shell 33 of inboard wall of furnace body 3
In reinforcement 21, taken away by the cooling water in interlayer 2, so as to increase cooling effectiveness.
Material gas enters in top material air inlet pipe 5 through air inlet 24, is in spiral shell by surrounding from bottom to up outside inwall
Reached after screwing on the top material air inlet pipe risen at the top of body of heater, then by the venthole 42 in dome-type air inlet spray head 4 be body of heater
Top is fed.
The present invention is described in detail above, described above, only the preferred embodiments of the invention, when can not
Limit the scope of the present invention, i.e., it is all to make equivalent changes and modifications according to the application scope, it all should still belong to covering scope of the present invention
It is interior.
Claims (8)
1. a kind of 48 pairs of rod reducing furnace body structures, oven body part include outer wall, interlayer and inwall, inwall is connected with interlayer,
Interlayer is connected with outer wall, and internals are provided with interlayer, it is characterised in that：Internals include X-type reinforcement and top material air inlet pipe；
The inwall is three-layer composite structure, and outer layer is housing, and intermediate layer is nanometer micropore thermal insulation layer, and internal layer is nanometer silver coating, is received
Meter Wei Kong thermal insulation layers are attached to the inner surface of outer layer, and nanometer silver coating is then attached to the inner surface of nanometer micropore thermal insulation layer, nanometer
Micropore thermal insulation layer is made of nanometer micropore heat-barrier material；It is provided with interlayer and helically rises outside inwall from bottom to up
Some groups of X-type reinforcements, the both ends of X-type reinforcement are connected with outer wall and inwall respectively；It is provided with the interlayer of body of heater
The body of heater top material air inlet pipe helically risen outside inwall from bottom to up, air inlet pipe stretch into inwall from the top of body of heater
In；
The section of the X-type reinforcement is in X-shape, and X-type reinforcement forms two triangle pair roof constructions, two triangular bases
It is connected to inner wall outside and inside outer wall；The cooling-water duct that the X-type reinforcement, its underpart and top are formed with interlayer
Connection.
2. 48 pairs of rod reducing furnace body structures according to claim 1, it is characterised in that：The air inlet of air inlet pipe is located at outer
The bottom of wall, and the end that air inlet pipe is located in inwall is connected with a dome-type air inlet spray head, on the hemisphere face of air inlet spray head
It is even that some ventholes are distributed with.
3. 48 pairs of rod reducing furnace body structures according to claim 1, it is characterised in that：The interlayer, it is internally formed
Interlayer cooling-water duct, the water inlet of interlayer cooling-water duct is provided with the bottom of outer wall, it is cold to be provided with interlayer at the top of outer wall
But the delivery port of aquaporin.
4. 48 pairs of rod reducing furnace body structures according to claim 1, it is characterised in that：The nanometer silver coating is reflection
The high reflectance nanometer silver coating of rate more than 95%, the thickness of this nanometer of silver coating is 0.5~2mm.
5. 48 pairs of rod reducing furnace body structures according to claim 1, it is characterised in that：The housing of the inwall uses carbon
Steel is made, and X-type reinforcement is connected on the external shell of inwall by welding or casting processing mode.
6. 48 pairs of rod reducing furnace body structures according to claim 1, it is characterised in that：The intersection of the X-type reinforcement
Position is arranged to fillet structure.
7. 48 pairs of rod reducing furnace body structures according to claim 1, it is characterised in that：The air inlet pipe is attached to described
The top of outer wall is extended on X-type reinforcement and along X-type reinforcement.
8. 48 pairs of rod reducing furnace body structures according to claim 2, it is characterised in that：The dome-type air inlet spray head
Shower nozzle hemisphere face straightened portion is set down, and the venthole on shower nozzle hemisphere face is set along the hemispherical radial direction of shower nozzle.
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| CN107904658A (en) * | 2017-11-27 | 2018-04-13 | 亚洲硅业（青海）有限公司 | A kind of reduction furnace inner wall preparation method of composite coating |
| CN117247019B (en) * | 2023-11-17 | 2024-01-23 | 内蒙古耀煜新能源科技有限公司 | Reducing furnace control instrument device for producing based on polycrystalline silicon |
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| JP3802864B2 (en) * | 2002-10-09 | 2006-07-26 | 新日本製鐵株式会社 | Hot-blast furnace iron skin structure |
| CN201313954Y (en) * | 2008-11-03 | 2009-09-23 | 江苏中能硅业科技发展有限公司 | Reducing furnace for preparing polycrystalline silicon |
| CN101748482B (en) * | 2008-12-19 | 2013-02-13 | 江苏中能硅业科技发展有限公司 | Improvement method for the preparation of highly dense structure polycrystalline silicon and the device thereof |
| CN202080898U (en) * | 2011-05-10 | 2011-12-21 | 长沙科星纳米工程技术有限公司 | Reduction furnace based on energy-saving coating |
| CN202170244U (en) * | 2011-05-20 | 2012-03-21 | 四川瑞能硅材料有限公司 | Polycrystalline silicon reducing furnace |
| CN102424386B (en) * | 2011-09-06 | 2012-12-19 | 江苏中圣高科技产业有限公司 | Efficient energy-saving type polysilicon reduction furnace |
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Address after: 810007 No.1, Jinsi Road, Xining Economic and Technological Development Zone, Xining City, Qinghai Province Patentee after: Asia silicon (Qinghai) Co., Ltd Address before: 810007 Dongchuan economic and Technological Development Zone, Qinghai, Xining Patentee before: ASIA SILICON (QINGHAI) Co.,Ltd. |