CN207109143U - A kind of polycrystalline furnace for being used to produce solar level high-efficiency polycrystalline silicon chip - Google Patents
A kind of polycrystalline furnace for being used to produce solar level high-efficiency polycrystalline silicon chip Download PDFInfo
- Publication number
- CN207109143U CN207109143U CN201720741657.2U CN201720741657U CN207109143U CN 207109143 U CN207109143 U CN 207109143U CN 201720741657 U CN201720741657 U CN 201720741657U CN 207109143 U CN207109143 U CN 207109143U
- Authority
- CN
- China
- Prior art keywords
- heater
- outer barrel
- flange
- inner cylinder
- viewing mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Silicon Compounds (AREA)
Abstract
The utility model provides a kind of polycrystalline furnace for being used to produce solar level high-efficiency polycrystalline silicon chip, including the helical form deflector in body of heater inner cylinder, body of heater outer barrel, and the interlayer cavity being arranged between the body of heater inner cylinder and body of heater outer barrel；The body of heater outer barrel bottom is provided with the first cooling water inlet, can import cooling water in the interlayer cavity between body of heater inner cylinder and body of heater outer barrel, and flowed along helical form deflector spiral；The first coolant outlet is provided with the top of the body of heater outer barrel, the cooling water in the interlayer cavity between body of heater inner cylinder and body of heater outer barrel can be exported.In-furnace temperature can be maintained, ensures the pressure (hydraulic) water water conservancy diversion cooling of body of heater, and the local water cooling of double glass viewing mirror again.
Description
Technical field
It the utility model is related to the polycrystalline furnace of production solar level high-efficiency polycrystalline silicon chip.
Background technology
At present, preparing the production technology of silicon for solar cell ingot mainly includes pulling single crystal silicon and polysilicon drawing.It is more
Crystal silicon ingot casting technology due to can directly founding go out the square silicon ingot suitable for large-scale production, manufacturing process it is relatively easy, from into
The main stream approach prepared for silicon for solar cell ingot.Polycrystalline silicon ingot casting technology is commonly used in polycrystalline furnace.
Reduction furnace is the nucleus equipment for producing polysilicon, and decision systems production capacity energy consumptions, environmental protection index, and reliably,
The key factor of security.Trichlorosilane reduces generation polycrystalline silicon rod in polycrystalline furnace, while also generates silicon tetrachloride, chlorination
Hydrogen, hydrogen etc..Undressed silicon tetrachloride is that a kind of have extremely strong corrosivity, be difficult to the liquid that preserves.By by silicon tetrachloride
The recovery such as continuous hydrogenation generation trichlorosilane, hydrogen chloride is used in hydrogenation furnace, and profit can be reclaimed by repeatedly recovery and rectifying
With most silicon, reduce cost, reduce pollution.In addition to a small number of producers, most domestic does not all build up tail gas hydrogenation recovery system
System, causes China's production of polysilicon cost can not to be in any more, and seriously polluted.
, it is necessary to which electric energy heating electrode maintains 1000 DEG C of high temperature above states in stove in hydrogenating and reducing process, thus it is more
The safe handling of crystalline substance reaction furnace body cooling direct relation reacting furnace and service life.
Utility model content
The problem of existing for prior art, the utility model provide a kind of for producing solar level high-efficiency polycrystalline silicon chip
Polycrystalline furnace, in-furnace temperature can be maintained, ensure the pressure (hydraulic) water water conservancy diversion cooling of body of heater, and the local water of double glass viewing mirror again
It is cold.
The technical solution of the utility model is：A kind of polycrystalline furnace for being used to produce solar level high-efficiency polycrystalline silicon chip, including
Helical form water conservancy diversion in body of heater inner cylinder, body of heater outer barrel, and the interlayer cavity being arranged between the body of heater inner cylinder and body of heater outer barrel
Plate；The body of heater outer barrel bottom is provided with the first cooling water inlet, cooling water can be imported body of heater inner cylinder and body of heater outer barrel it
Between interlayer cavity in, and along helical form deflector spiral flow；The first cooling water is provided with the top of the body of heater outer barrel
Outlet, the cooling water in the interlayer cavity between body of heater inner cylinder and body of heater outer barrel can be exported.
Further, bottom of furnace body is provided with flange in the bottom.
Further, water-cooling double glass viewing mirror is provided with body of heater.
Further, the water-cooling double glass viewing mirror includes passing through spaced glass outer and inner glass, institute
State and pass through casing off between glass outer and inner glass；Second flange, the second flange one are cased with the outside of described sleeve pipe
Side is provided with the 3rd cooling water inlet, and relative opposite side is provided with the 3rd coolant outlet.
Further, the both sides of second flange axial direction are respectively arranged with first flange and the 3rd flange, and described first
Flange, second flange and the 3rd flange are fixedly connected by screw bolt and nut.
Further, the inner glass is provided with the double glass viewing mirror inner cylinder that can pass through body of heater towards body of heater side
With double glass viewing mirror outer barrel；The double glass viewing mirror outer barrel side is provided with the second cooling water inlet, can be by cooling water
Import in the interlayer cavity between double glass viewing mirror inner cylinder and double glass viewing mirror outer barrel；The double glass viewing mirror outer barrel phase
To opposite side be provided with the second coolant outlet, can be by between double glass viewing mirror inner cylinder and double glass viewing mirror outer barrel
Cooling water export in interlayer cavity.
The beneficial effects of the utility model are：Inside, helical form deflector is set in outer barrel sealing cavity, pressurize cooling water
Flowed in cavity along deflector direction, inner cylinder, outside visor to body of heater cool down, and ensure it at reliable temperature
Work.Water-cooling double glass viewing mirror is set on outer barrel, can be with the growing state of silicon rod in inspection section body by visor.It can maintain
In-furnace temperature, ensure the pressure (hydraulic) water water conservancy diversion cooling of body of heater, and the local water cooling of double glass viewing mirror again.
Brief description of the drawings
Fig. 1 is overall structure diagram of the present utility model；
Fig. 2 is the structure chart of water-cooling double glass viewing mirror.
In figure：1 is the first coolant outlet, and 2 be body of heater inner cylinder, and 3 be body of heater outer barrel, and 4 be deflector, and 5 be water cooled double-layered
Glass visor, 6 be the first cooling water inlet, and 7 be flange in the bottom, and 8 be the second cooling water inlet, and 9 be the 3rd cooling water inlet, 10
It is bolt for nut, 11,12 be glass outer, and 13 be inner glass, and 14 be first flange, and 15 be second flange, and 16 be the 3rd
Coolant outlet, 17 be the 3rd flange, and 18 be the second coolant outlet, and 19 be double glass viewing mirror inner cylinder, and 20 be double glazing
Visor outer barrel.
Embodiment
The utility model is described further below in conjunction with the accompanying drawings.
As shown in figure 1, a kind of polycrystalline furnace for being used to produce solar level high-efficiency polycrystalline silicon chip, including body of heater inner cylinder 2, body of heater
Helical form deflector 4 in outer barrel 3, and the interlayer cavity being arranged between body of heater inner cylinder 2 and body of heater outer barrel 3.Bottom of furnace body is set
It is equipped with flange in the bottom 7.The bottom of body of heater outer barrel 3 is provided with the first cooling water inlet 6, and cooling water can be imported to the He of body of heater inner cylinder 2
In interlayer cavity between body of heater outer barrel 3, and flowed along the spiral of helical form deflector 4.The top of body of heater outer barrel 3 is provided with the
One coolant outlet 1, the cooling water in the interlayer cavity between body of heater inner cylinder 2 and body of heater outer barrel 3 can be exported.
As shown in Fig. 2 water-cooling double glass viewing mirror 5 is provided with body of heater.Water-cooling double glass viewing mirror 5 includes passing through interval
The glass outer 12 and inner glass 13 of setting, pass through casing off between glass outer 12 and inner glass 13.Outside of sleeve
Second flange 15 is cased with, the side of second flange 15 is provided with the 3rd cooling water inlet 9, and relative opposite side is provided with the 3rd cooling
Water out 16.
Inner glass 13 is provided with towards body of heater side can pass through the double glass viewing mirror inner cylinder 19 of body of heater and double-deck glass
Glass visor outer barrel 20.The side of double glass viewing mirror outer barrel 20 is provided with the second cooling water inlet 8, can import cooling water double-deck
In interlayer cavity between glass visor inner cylinder 19 and double glass viewing mirror outer barrel 20.Relative another of double glass viewing mirror outer barrel 20
Side is provided with the second coolant outlet 18, can be by between double glass viewing mirror inner cylinder 19 and double glass viewing mirror outer barrel 20
Cooling water export in interlayer cavity.
As preferred embodiment, the both sides of the axial direction of second flange 15 are respectively arranged with the flange of first flange 14 and the 3rd
17, first flange 14, second flange 15 and the 3rd flange 17 are fixedly connected by bolt 11 with nut 10.
The utility model can maintain in-furnace temperature, ensure the pressure (hydraulic) water water conservancy diversion cooling of body of heater, and double glass viewing mirror again
Local water cooling.
Described above is only preferred embodiment of the present utility model, it is noted that for the common skill of the art
For art personnel, on the premise of the utility model principle is not departed from, some improvements and modifications can also be made, these improve and
Retouching also should be regarded as the scope of protection of the utility model.
Claims (6)
- A kind of 1. polycrystalline furnace for being used to produce solar level high-efficiency polycrystalline silicon chip, it is characterised in that：Including body of heater inner cylinder (2), stove External cylinder (3), and the helical form deflector in the interlayer cavity being arranged between the body of heater inner cylinder (2) and body of heater outer barrel (3) (4)；Body of heater outer barrel (3) bottom is provided with the first cooling water inlet (6), can by cooling water import body of heater inner cylinder (2) and In interlayer cavity between body of heater outer barrel (3), and flowed along helical form deflector (4) spiral；Body of heater outer barrel (3) top Portion is provided with the first coolant outlet (1), can will be cold in the interlayer cavity between body of heater inner cylinder (2) and body of heater outer barrel (3) But water exports.
- A kind of 2. polycrystalline furnace for being used to produce solar level high-efficiency polycrystalline silicon chip according to claim 1, it is characterised in that： Bottom of furnace body is provided with flange in the bottom (7).
- A kind of 3. polycrystalline furnace for being used to produce solar level high-efficiency polycrystalline silicon chip according to claim 1, it is characterised in that： Water-cooling double glass viewing mirror (5) is provided with body of heater.
- A kind of 4. polycrystalline furnace for being used to produce solar level high-efficiency polycrystalline silicon chip according to claim 3, it is characterised in that： The water-cooling double glass viewing mirror (5) includes passing through spaced glass outer (12) and inner glass (13), the outer layer Pass through casing off between glass (12) and inner glass (13)；It is cased with second flange (15) on the outside of described sleeve pipe, described second Flange (15) side is provided with the 3rd cooling water inlet (9), and relative opposite side is provided with the 3rd coolant outlet (16).
- A kind of 5. polycrystalline furnace for being used to produce solar level high-efficiency polycrystalline silicon chip according to claim 4, it is characterised in that： The both sides of second flange (15) axial direction are respectively arranged with first flange (14) and the 3rd flange (17), the first flange (14), second flange (15) is fixedly connected with the 3rd flange (17) by bolt (11) with nut (10).
- A kind of 6. polycrystalline furnace for being used to produce solar level high-efficiency polycrystalline silicon chip according to claim 4, it is characterised in that： The inner glass (13) is provided with towards body of heater side can pass through the double glass viewing mirror inner cylinder (19) of body of heater and double-deck glass Glass visor outer barrel (20)；Double glass viewing mirror outer barrel (20) side is provided with the second cooling water inlet (8), will can cool down Water is imported in the interlayer cavity between double glass viewing mirror inner cylinder (19) and double glass viewing mirror outer barrel (20)；The double glazing The relative opposite side of visor outer barrel (20) is provided with the second coolant outlet (18), can by double glass viewing mirror inner cylinder (19) and Cooling water export in interlayer cavity between double glass viewing mirror outer barrel (20).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720741657.2U CN207109143U (en) | 2017-06-23 | 2017-06-23 | A kind of polycrystalline furnace for being used to produce solar level high-efficiency polycrystalline silicon chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720741657.2U CN207109143U (en) | 2017-06-23 | 2017-06-23 | A kind of polycrystalline furnace for being used to produce solar level high-efficiency polycrystalline silicon chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207109143U true CN207109143U (en) | 2018-03-16 |
Family
ID=61578891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720741657.2U Expired - Fee Related CN207109143U (en) | 2017-06-23 | 2017-06-23 | A kind of polycrystalline furnace for being used to produce solar level high-efficiency polycrystalline silicon chip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207109143U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112281212A (en) * | 2020-11-10 | 2021-01-29 | 无锡双雄通用机械有限公司 | Polycrystalline silicon growth furnace |
-
2017
- 2017-06-23 CN CN201720741657.2U patent/CN207109143U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112281212A (en) * | 2020-11-10 | 2021-01-29 | 无锡双雄通用机械有限公司 | Polycrystalline silicon growth furnace |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN211522367U (en) | Water-cooling heat shield structure of single crystal furnace | |
| CN203006955U (en) | 72-cobar polycrystalline silicon reduction furnace | |
| CN207109143U (en) | A kind of polycrystalline furnace for being used to produce solar level high-efficiency polycrystalline silicon chip | |
| CN109112624A (en) | It is a kind of for producing the polycrystalline furnace of solar level high-efficiency polycrystalline silicon wafer | |
| CN101311657A (en) | Polycrystalline silicon reducing furnace water-cooling double glass viewing mirror | |
| CN102674359B (en) | Device and method for cooing tail gas recovery liquid of polysilicon reduction furnace with inner tank | |
| CN102515167A (en) | Periodical alternatively operating polycrystalline silicon reduction furnace equipped with inner heat-insulating barrel and operation method | |
| CN103172067B (en) | Cold wall fluidized bed and application thereof | |
| CN202379745U (en) | Hydrogenation furnace | |
| CN102485649B (en) | Polysilicon hydrogenation furnace | |
| CN107512719B (en) | Polycrystalline silicon reduction exhaust residual-heat utilization method and system | |
| CN205090834U (en) | Polycrystalline silicon production hydrogenation furnace tail gas cooling device | |
| CN101830467B (en) | Polycrystalline silicon decomposing furnace | |
| CN204251760U (en) | Thermal field of czochralski silicon | |
| CN211770336U (en) | Energy recycling type titanium tetrachloride production system | |
| CN202131104U (en) | Bell jar and chassis of polycrystalline silicon reduction furnace | |
| CN202272744U (en) | Equipment for preparing polycrystalline silicon by using silane decomposition method | |
| CN106870077A (en) | A kind of gas turbine of energy-conserving and environment-protective | |
| CN201678457U (en) | Heat transfer oil silicon chip jacking device for polycrystalline silicon decomposing furnace | |
| CN102718220B (en) | Polysilicon reducing furnace tail gas gradual-cooling absorbing tower device and method | |
| CN203079698U (en) | Two-in-one byproduct steam graphite synthesis furnace | |
| CN102674360B (en) | Heat insulation inner liner of energy-saving polycrystalline silicon reduction furnace provided with polycrystalline silicon slice, and implementation method thereof | |
| CN206019373U (en) | A kind of solid material cooling device | |
| CN100465333C (en) | Chemical vapor deposition high temperature furnace used water cooling furnace wall | |
| CN202492370U (en) | Cold hydrogenation reaction gas heat recovery system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180316 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |