CN106896113A - Defect detection system and method - Google Patents
Defect detection system and method Download PDFInfo
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- CN106896113A CN106896113A CN201710035668.3A CN201710035668A CN106896113A CN 106896113 A CN106896113 A CN 106896113A CN 201710035668 A CN201710035668 A CN 201710035668A CN 106896113 A CN106896113 A CN 106896113A
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- 230000007547 defect Effects 0.000 title claims abstract description 63
- 238000000034 method Methods 0.000 title claims description 21
- 238000001514 detection method Methods 0.000 title abstract description 5
- 230000003287 optical effect Effects 0.000 claims description 93
- 239000010409 thin film Substances 0.000 claims description 75
- 230000000737 periodic effect Effects 0.000 claims description 19
- 239000010408 film Substances 0.000 claims description 14
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 claims description 11
- 238000007689 inspection Methods 0.000 claims description 10
- 230000002950 deficient Effects 0.000 claims description 9
- 239000012788 optical film Substances 0.000 abstract 4
- 239000002184 metal Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
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- 239000004925 Acrylic resin Substances 0.000 description 1
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- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
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- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
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- 229920005672 polyolefin resin Polymers 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9511—Optical elements other than lenses, e.g. mirrors
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
A defect detection system for detecting a transferred optical film includes a light source, an image capturing device, and a slit plate. The light source is arranged on one side of the optical film, and the image capturing device is arranged on the other side of the optical film. The slit plate is provided with a slit and is arranged between the light source and the optical film so as to enable incident light to pass through the slit. Wherein the image capturing device is offset from the extended line connecting the light source and the slit.
Description
Technical field
The invention relates to a kind of Systems for optical inspection and method, and in particular to a kind of defect of optical thin film
Detecting system and method.
Background technology
With the development of science and technology the requirement of the various optical modules used for liquid crystal display is also high.However, in
In the production process of optical element, flaw is but easily produced because of various factors, and then reduce display quality.Therefore, in optics
Defective detecting system is configured in the production system of element, to exclude the defective optical element of tool early.
The content of the invention
The present invention is related to a kind of defect detecting system and method, and image capturing device offsets from the extension of light source and slit
Line, scattering can be produced when light is irradiated to the concavo-convex defect on optical thin film, therefore the image capturing device of offset configuration can
The scattering light produced by concavo-convex defect is received, so as to the image contrast of the defect area captured by lifting image capturing device.
An embodiment of the invention, proposes a kind of defect detecting system, for detecting the optical thin film transferred.
Defect detecting system includes a light source, an image capturing device and a slit plate.Light source is configured at the side of optical thin film.Shadow
The opposite side of optical thin film is configured at as capture device.Slit plate has a slit, and slit plate is configured at light source and optical thin film
Between, so that an incident ray passes through slit.Wherein, image capturing device offsets from the extension line of light source and slit.
Wherein, the incident ray vertically injects the optical thin film.
Wherein, the width of the slit is 1.5~2.5 millimeters.
Wherein, when the image capturing device image sensor in alignment with the light source and the slit extension line when, institute
The image brilliance for sensing is I0；When the image capturing device is in offsetting from the light source on the moving direction of the parallel optical thin film
During with the extension line of the slit, the image brilliance for being sensed is I1；Wherein, I1/I0The optics can be observed for 0.5~0.9
Defective locations point of film.
Wherein, the defect detecting system is further included：One mobile unit, on the moving direction of the parallel optical thin film
The mobile image capturing device.
According to another embodiment of the present invention, a kind of defects detection side for detecting the optical thin film transferred is proposed
Method.Defect inspection method is comprised the following steps.A light source is provided, light source is configured at the side of optical thin film.An image is provided to catch
Equipment is obtained, image capturing device is configured at the opposite side of optical thin film.A slit plate is provided, slit plate has a slit, slit
Plate is configured between light source and optical thin film, so that an incident ray passes through slit.Then, image capturing device is made to offset from light
Source and the extension line of slit.
Wherein, in the step of providing the light source and the slit plate, the incident ray is made vertically to inject the optical thin film.
Wherein, the width of the slit is 1.5~2.5 millimeters.
Wherein, the defect inspection method is further included：
A mobile unit is provided, the mobile unit is in mobile image capturing device on the moving direction of the optical thin film.
Wherein, the defect inspection method is further included：
A graphics processing unit is provided, the graphics processing unit is received and processes the image transmitted by the image capturing device
Signal；
A periodic signal generation unit is provided, the periodic signal generation unit sends according to the screen of the optical thin film
One periodic signal；And
A control unit is provided, the control unit is coupled to the graphics processing unit, and receives from periodic signal product
The periodic signal of raw unit, and image pickup signal is transmitted to the image capturing device.
Brief description of the drawings
More preferably understand to have to above-mentioned and other aspect of the invention, preferred embodiment cited below particularly, and coordinate institute
Accompanying drawings, are described in detail below：
Fig. 1 is illustrated according to the defect detecting system of one embodiment of the invention.
Fig. 2 illustrates the top view of the defect detecting system of Fig. 1.
Wherein, reference：
10：Optical thin film
11：Disk roller
12：Graphics processing unit
13：Control unit
14：Periodic signal generation unit
100：Defect detecting system
110：Light source
110a：Light-emitting area
120：Image capturing device
130：Slit plate
130s：Slit
D1：Moving direction
P：Region
LA：Optical axis
Li：Incident ray
Ls：Scattering light
Specific embodiment
Traditional defect detecting system detects foreign matter defect using the principle that light is penetrated.Due to the foreign matter on optical element
Defect can cover light, the transmitted light images of shooting is detected dim spot, therefore be adapted to detection foreign matter defect.However, this kind of defect
Detecting system is but difficult to detect the defect caused by the will have local variations in thickness of concavo-convex defect, i.e. optical element.
The present invention is related to a kind of defect detecting system and method.Fig. 1 is refer to, it is illustrated according to one embodiment of the invention
Defect detecting system 100.Defect detecting system 100 can be used to detect the optical thin film 10 transferred that optical thin film 10 is in life
Product is handled upside down via disk roller 11 along a moving direction D1 online, and defect can be in real time distinguished by defect detecting system 100, with
The defective part of tool is excluded early.In one embodiment, the present invention can be used to detect that optics film coil or sheet-form optical are thin
Film.
Defect detecting system 100 is applicable to various optical thin films.For example, optical thin film 10 can be an individual layer or many
Tunic piece, for example can for a polaroid, phase retardation film, brightness enhancement film or other to optical gain, orientation, compensation, steering, straight
The helpful diaphragm such as friendship, diffusion, protection, anti-stick, scratch resistance, anti-dizzy, reflection suppression, high index of refraction；In foregoing polaroid
At least one side is attached with the Polarizer of protective film, phase-contrast film etc.；Protective film, material for example may be selected from：It is cellulose-based
Resin, acrylic resin, amorphism polyolefin-based resins, polyester based resin, polycarbonate-based resin and combinations thereof, but this
Exposure is not limited to these films.
Defect detecting system 100 includes a light source 110 and an image capturing device 120.Can be for example fluorescent lamp, metal
Halogen lamp LED or LED, light source 110 have a light-emitting area 110a.In a preferred embodiment, light source 110 is LED.Image
Capture device 120 can be line scan camera, and it is, for example, photosensitive coupling element that it has image sensor IS, image sensor IS
(Charge Coupled Device, CCD) or any element with photoelectric conversion capacity.
As shown in figure 1, light source 110 and image capturing device 120 are configured at relative two sides of the optical thin film 10 transferred.
Specifically, light source 110 is from the side irradiation light of optical thin film 10, and image capturing device 120 is in the another of optical thin film 10
Side joint receives the transmitted light images of the light for penetrating optical thin film 10.In this exposure, the irradiating angle of light is simultaneously not particularly limited.One
In preferred embodiment, light source 110 in the side of optical thin film 10 vertically irradiation light, that is, along the light-emitting area of light source 110
The incident ray Li of the optical axis L A of 110a irradiates perpendicular to the surface of optical thin film 10.In this, described optical axis L A is a vacation
Think line, it is the normal of light-emitting area 110a.In one embodiment, image capturing device 120 is the table for facing optical thin film 10
Face filmed image, that is to say, that image capturing device 120 is towards the side of the optical axis L A of the light-emitting area 110a parallel to light source 110
To shooting optical thin film 10, that is, the not inclined angle shot optical thin film 10 of image capturing device 120.
In one embodiment, defect detecting system 100 has more a slit plate 130, and slit plate 130 can be by metal, ceramics
Or made by macromolecular material.In a preferred embodiment, slit plate 130 is as made by metal.Slit plate 130 is configured at light
Between source 110 and optical thin film 10, it is used to limit to the angle of light traveling.Specifically, slit plate 130 has a slit
130s, and slit 130s injects the light of optical thin film 10 to improve in alignment with the optical axis L A of the light-emitting area 110a of light source 110
Directive property, makes the light of incidence more straight.In a preferred embodiment, the optical axis L A of the light-emitting area 110a of light source 110 with
The extension line of the axis (sign) of slit 130s perpendicular to the surface of optical thin film 10, to limit through slit 130s's
Incident ray Li irradiates perpendicular to the surface of optical thin film 10.
However, as shown in figure 1, in the present invention, image capturing device 120 offsets from prolonging for light source 110 and slit 130s
Stretch line.That is, image capturing device 120 not in alignment with light source 110 light-emitting area 110a optical axis L A and slit
The extension line of the axis of 130s.I.e. image capturing device 120 is not located at the optical axis L A and slit 130s of light-emitting area 110a
On the extension line of axis.Specifically, image capturing device 120 can be in the moving direction D1 parallel to optical thin film 10
Upper movement, for example, can be controlled the movement of image capturing device 120 by a mobile unit, so that image capturing device 120 offsets
Light source 110 is configured with the extension line of slit 130s.The mobile unit is, for example, installed in the position of image capturing device 120
Put, it can move image capturing device 120 via the mode for manually adjusting；In another embodiment, also can be via long-range distant
The mode of control makes image capturing device 120 carry out mechanical movement, in this embodiment, can in addition set slide rail (sign)
Etc. mobile unit, will not be repeated here.And in movable image capture device 120, image capturing device 120 can be made toward optically thin
The upstream side shifting of the moving direction D1 of film 10, or toward optical thin film 10 moving direction D1 downstream side shifting.
Above-described embodiment is explained in the way of movable image capture device 120, so in another embodiment, can also make shadow
As capture device 120 is maintained static, and light source 110 and slit plate 130 are simultaneously integratedly in the mobile side of collimating optics film 10
To (or rightabout) is moved on D1, so that image capturing device 120 offsets from the extension line of light source 110 and slit 130s.
According to above-described embodiment, because the incident ray Li only through slit 130s can inject optical thin film 10, therefore can
The directive property of the light of optical thin film 10 is injected in raising, simultaneously as light can produce diffraction effect when passing through slit 130s, therefore
Bright dark interference fringe staggeredly can be produced on optical thin film 10, the concavo-convex defect institute on optical thin film 10 is detected to be more convenient for
The brightness for causing changes.Additionally, the incident ray Li worked as through slit 130s passes through will have local variations in thickness on optical thin film 10
During region P (i.e. concavo-convex defect), light can produce scattering.Because image capturing device 120 offsets from light source 110 and slit 130s
Extension line, therefore image capturing device 120 can receive the scattering light Ls of a part, and influence the institute of image capturing device 120
The light quantity of reception.On the other hand, in the case of without concavo-convex defect, due to that will not produce scattering light, therefore image is captured
The light quantity that equipment 120 is received will not change.Whereby, as long as incident ray Li passes through the concavo-convex defect on optical thin film 10, light
Line can produce scattering and the light quantity that influences image capturing device 120 to be received, compared with the region without concavo-convex defect it
Under, the image brilliance that image capturing device 120 is received can be changed, therefore can lift the image contrast of concavo-convex defect area, and
Defective presence can more easily be detected whether.
Wherein, when the image sensor IS of image capturing device 120 is in alignment with light source 110 and the extension line of slit 130s
When, the image brilliance for being sensed is I0.Then, if image capturing device 120 is in the moving direction D1 of collimating optics film 10
Upper movement and when offsetting from the extension line of light source 110 and slit 130s, the image brilliance for being sensed drops to I1.Originally taking off
In dew, can be according to I1/I0Ratio range adjust the side-play amount of image capturing device 120 or optical thin film 10.Work as I1/I0's
Scope falls between 0.5~0.9, preferably scope I1/I0When between 0.8~0.85, can be enough to observe optical thin film 10
Brightness change caused by concavo-convex defect, and position sunken location point of falling vacant.In one embodiment, can be in this processing procedure, same to markers
Remember this concavo-convex defective locations point on optical thin film.
In one embodiment, I1/I0More preferably 0.8~0.83, now observed image contrast most can be verified more preferably
The concavo-convex defective locations point of optical thin film.
Additionally, defect detecting system 100 further includes a graphics processing unit 12, a periodic signal generation unit 14 and a control
Unit processed 13.Graphics processing unit 12 can be received and process the signal of video signal transmitted by image capturing device 120, be entered with to signal
Row image procossing, graphics processing unit 12 for example can be Frame Grabber.Periodic signal generation unit 14 can be according to optical thin film
10 screen sends a periodic signal, for example, can be encoder.Control unit 13 can be coupled to graphics processing unit 12, and
The periodic signal from periodic signal generation unit 14 is received, and image pickup signal is transmitted to image capturing device 120, control is single
Unit 13 for example can be computer.Whereby, operating personnel is able to obtain saturating captured by image capturing device 120 from control unit 13
Penetrate light image, with detect in image whether defect.
Fig. 2 is refer to, the top view of its defect detecting system 100 for illustrating Fig. 1.Defect detecting system 100 may include multiple
Several image capturing devices 120, this little image capturing device 120 are arranged perpendicular to the moving direction D1 of optical thin film 10, therefore
Optical thin film 10 can shoot transmitted light images during being handled upside down by image capturing device 120, optically thin so as to whole of detection
Whether film 10 has defect.
As shown in Fig. 2 the external form of the light-emitting area 110a of light source 110 can be rectangle, the external form of slit plate 130 also can be square
Shape.As seen from Figure 2, slit plate 130 is made up of two panels shield, therefore can be adjusted by the distance between two panels shield and be adjusted
The width of slit 130s.In this case, the width of slit 130s can be 1.5~2.5 millimeters.In a preferred embodiment,
The width of slit 130s is 2 millimeters.
As shown in Fig. 2 length direction of the length direction of slit 130s parallel to the light-emitting area 110a of light source 110, slit
The width of 130s parallel to the light-emitting area 110a of light source 110 width, and slit 130s length direction perpendicular to
Moving direction D1 of the width of the moving direction D1 of optical thin film 10, slit 130s parallel to optical thin film 10.In addition, narrow
The length for stitching 130s is longer than the width of the optical thin film 10 transferred, and the width of slit 130s is shorter than the width of light-emitting area 110a,
Whereby, from the light emitted by light source 110, the light only through slit 130s (i.e. passes through slit in Fig. 1 along optical axis L A
The incident ray Li of 130s) optical thin film 10 can be injected, therefore the influence of context light can be prevented and image contrast is reduced.
Above-mentioned provided defect detecting system 100 and defect inspection method, can make operating personnel be more easily detected light extraction
Whether learn on film 10 has concavo-convex defect.Defect detecting system 100 is matched somebody with somebody between light source 110 and the optical thin film transferred 10
Slit plate 130 is put, makes slit 130s in alignment with the optical axis L A of the light-emitting area 110a of light source 110, optical thin film 10 is injected to improve
Light directive property.Additionally, image capturing device 120 not in alignment with optical axis L A configure, but offset from light source 110 with it is narrow
Stitch the extension line of 130s.Consequently, it is possible to when incident ray Li passes through the concavo-convex defect on optical thin film 10, can produce light
Raw scattering, therefore image capturing device 120 can receive scattering light Ls.Drawbacks described above detecting system 100 can pass through and receive scattering light
The mode of line Ls, judges whether optical thin film 10 has defect, as long as the light quantity that image capturing device 120 is received has substantially change
Change or have the place of obvious contrast, that is, represent has concavo-convex defect herein.
Certainly, the present invention can also have other various embodiments, ripe in the case of without departing substantially from spirit of the invention and its essence
Knowing those skilled in the art can make various corresponding changes and deformation, but these corresponding changes and deformation according to the present invention
The protection domain of the claims in the present invention should all be belonged to.
Claims (11)
1. a kind of defect detecting system, for detecting the optical thin film transferred, it is characterised in that including：
One light source, is configured at the side of the optical thin film；
One image capturing device, is configured at the opposite side of the optical thin film；And
One slit plate, with a slit, the slit plate is configured between the light source and the optical thin film, so that an incident ray is worn
Cross the slit；
Wherein, the image capturing device offsets from the extension line of the light source and the slit.
2. defect detecting system according to claim 1, it is characterised in that it is optically thin that the incident ray vertically injects this
Film.
3. defect detecting system according to claim 1, it is characterised in that the width of the slit is 1.5~2.5 millimeters.
4. defect detecting system according to claim 1, it is characterised in that when the image sensor of the image capturing device
In alignment with the light source and the slit extension line when, the image brilliance for being sensed is I0；When the image capturing device is in flat
When offsetting from the extension line of the light source and the slit on the moving direction of the row optical thin film, the image brilliance for being sensed is
I1；Wherein, I1/I0It is 0.5~0.9 defective locations point that can observe the optical thin film.
5. defect detecting system according to claim 1, it is characterised in that further include：
One mobile unit, in mobile image capturing device on the moving direction of the parallel optical thin film.
6. defect detecting system according to claim 1, it is characterised in that further include：
One graphics processing unit, receives and processes the signal of video signal transmitted by the image capturing device；
One periodic signal generation unit, a periodic signal is sent according to the screen of the optical thin film；And
One control unit, is coupled to the graphics processing unit, and receives the periodic signal from the periodic signal generation unit,
And image pickup signal is transmitted to the image capturing device.
7. a kind of defect inspection method for detecting the optical thin film transferred, it is characterised in that including：
A light source is provided, the light source is configured at the side of the optical thin film；
An image capturing device is provided, the image capturing device is configured at the opposite side of the optical thin film；
A slit plate is provided, the slit plate has a slit, the slit plate is configured between the light source and the optical thin film, so that
One incident ray passes through the slit；And
The image capturing device is set to offset from the extension line of the light source and the slit, when the image sensing of the image capturing device
Device in alignment with the light source and the slit extension line when, the image brilliance for being sensed is I0, when the image capturing device in
When the extension line of the light source and the slit is offset from the moving direction of the optical thin film, the image brilliance for being sensed is
I1, wherein, I1/I0For 0.5~0.9 when, a defective locations point of the optical thin film can be observed.
8. defect inspection method according to claim 7, it is characterised in that the step of the light source and the slit plate are provided
In, the incident ray is vertically injected the optical thin film.
9. defect inspection method according to claim 7, it is characterised in that the width of the slit is 1.5~2.5 millimeters.
10. defect inspection method according to claim 7, it is characterised in that further include：
A mobile unit is provided, the mobile unit is in mobile image capturing device on the moving direction of the optical thin film.
11. defect inspection methods according to claim 7, it is characterised in that further include：
A graphics processing unit is provided, the graphics processing unit is received and processes the letter of the image transmitted by the image capturing device
Number；
A periodic signal generation unit is provided, the periodic signal generation unit sends one week according to the screen of the optical thin film
Phase signal；And
A control unit is provided, the control unit is coupled to the graphics processing unit, and receives single from periodic signal generation
The periodic signal of unit, and image pickup signal is transmitted to the image capturing device.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW105143448 | 2016-12-27 | ||
| TW105143448A TWI628429B (en) | 2016-12-27 | 2016-12-27 | Defect inspection system and defect inspection method |
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| Publication Number | Publication Date |
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| CN106896113A true CN106896113A (en) | 2017-06-27 |
| CN106896113B CN106896113B (en) | 2021-08-17 |
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| CN201710035668.3A Active CN106896113B (en) | 2016-12-27 | 2017-01-17 | Defect detection system and method |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108287165A (en) * | 2017-11-24 | 2018-07-17 | 住华科技股份有限公司 | Defect inspection method and defect inspection system |
| CN108414531A (en) * | 2018-04-18 | 2018-08-17 | 常州市安视智能科技有限公司 | A kind of fexible film defect detecting device and its detection method based on machine vision |
| CN109781743A (en) * | 2017-11-14 | 2019-05-21 | 鹤立精工股份有限公司 | Optical detecting method |
| CN110018582A (en) * | 2018-01-10 | 2019-07-16 | 日东电工株式会社 | The continuous inspection method of optical display panel and device, method for continuous production and system |
| CN110793916A (en) * | 2018-08-02 | 2020-02-14 | 宰体有限公司 | Slit light source and visual inspection device including the same |
| CN111024707A (en) * | 2019-03-12 | 2020-04-17 | 住华科技股份有限公司 | Optical film detection device and detection method of optical film |
| CN111929317A (en) * | 2020-07-08 | 2020-11-13 | 昆山之奇美材料科技有限公司 | Polarizing film defect detection system and method |
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| CN110793916B (en) * | 2018-08-02 | 2022-08-16 | 宰体有限公司 | Slit light source and visual inspection device including the same |
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| CN111929317A (en) * | 2020-07-08 | 2020-11-13 | 昆山之奇美材料科技有限公司 | Polarizing film defect detection system and method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106896113B (en) | 2021-08-17 |
| TWI628429B (en) | 2018-07-01 |
| TW201823710A (en) | 2018-07-01 |
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