CN106802200B - A kind of flexibility vector tactile and slip sense compound sensor - Google Patents
A kind of flexibility vector tactile and slip sense compound sensor Download PDFInfo
- Publication number
- CN106802200B CN106802200B CN201710100759.0A CN201710100759A CN106802200B CN 106802200 B CN106802200 B CN 106802200B CN 201710100759 A CN201710100759 A CN 201710100759A CN 106802200 B CN106802200 B CN 106802200B
- Authority
- CN
- China
- Prior art keywords
- layer
- flexible
- power
- tactile
- vector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
Abstract
The invention discloses a kind of flexible vector tactile and slip sense compound sensors, are related to robot flexibility touch sensor and intelligent operation instrument field.Flexible vector tactile and slip sense compound sensor of the invention includes the upper layer flexible substrates fitted closely from top to bottom, power sensing structure layer and lower layer's flexible substrate.Power sensing structure layer includes top electrode layer, flexible pressure drag material layer and bottom electrode layer from top to bottom.There is equidistant micro structure array in the upper layer flexible substrates upper surface；The power sensing structure layer is fitted closely with lower layer's flexible substrate upper surface, and lower layer's flexible substrate has periodic symmetrical bulge-structure along sensor thickness direction, and the symmetrical quick unit of power is located at the two sides of the symmetrical bulge-structure.The present invention can judge to slide situation, measure normal pressure, frictional force and sliding velocity by internal simple symmetrical bulge-structure；There is micro structure array in sensor upper surface, improves clamping stability and safety.
Description
Technical field
The present invention relates to a kind of tactile and slip sense compound sensors, more particularly, to robot flexibility touch sensor field and intelligence
A kind of flexible vector tactile and slip sense compound sensor of energy field of surgical.
Background technique
Flexible tactile and slip sense compound sensor is that mechanical hand or Minimally Invasive Surgery instrument acquisition clamp position information are indispensable
Means.According to the signal of sensor feedback, normal pressure between clamping device and gripped object, frictional force, opposite fortune can be calculated
The physical quantitys such as dynamic state, steadily clamp gripped object with realizing.Current most of touch sensors can only detect forward direction and connect
Touch does not have sliding feel perceptional function.
Therefore, highly sensitive and wide range flexible vector tactile and slip sense compound sensor is developed, it can be convenient, close
It pastes on machine watch face or Minimally Invasive Surgery clamping surface, while can detect that the power such as contact pressure, frictional force, slip state
Information is learned, instrument intelligence can be promoted, improve safety and the practicability of Minimally Invasive Surgery.
China national patent of invention (application number 201410451649.5) discloses a kind of based on the soft of pressure-sensitive conductive rubber
Property tactile and slip sense composite sensing array, the sensor using conductive rubber unit and test electrode mechanism formed four it is mutually perpendicular
Resistance derives three-dimensional force by four varistor change in resistance of test.But the flexible sensing array electrode structure of the structure is multiple
It is miscellaneous and low using single layer electrode structure sensitivity, also have in terms of distinguishing the static friction of sliding friction and variation structured
Limitation.In addition, highest Applicable temperature is 50 using the Inastomer conductive rubber of INABA company production as pressure sensitive
Degree, is not suitable for hot environment, being unable to satisfy surgical clamp needs the actual requirement of high-temperature sterilization.
Summary of the invention
Normal pressure can only be detected for most MEMS touch sensors and can not detect sliding, and sensor surface is without anti-skidding function
Can defect, the present invention proposes a kind of flexible vector tactile and slip sense compound sensor, can measure contact surface power (including normal pressure
And stiction) size and direction, judge whether slide when contact, realize it is stable it is sliding feel signal output, calculate and slide
Move speed.Mechanical hand or intelligent operation equipment surfaces portable can be mounted on, mechanical information when obtaining clamping in real time is realized steady
Fixed, safety holding.
Flexibility vector tactile and slip sense compound sensor provided by the invention, including the upper layer flexibility base fitted closely from top to bottom
Bottom, power sensing structure layer and lower layer's flexible substrate.Power sensing structure layer include from top to bottom top electrode layer, flexible pressure drag material layer and
Bottom electrode layer.
The upper layer flexible substrates by flexible composite by pouring, the techniques preparation such as nano-imprint process is described
Power sensing structure layer, the power transfer layer as power sensing structure layer.There are equidistant micro structure array, and micro-structure cross section in upper surface
For rectangle or trapezoidal.
The power sensing structure layer is fitted closely with lower layer's flexible substrate upper surface.Lower layer's flexible substrate is multiple by flexibility
Condensation material is made, and has periodic symmetrical bulge-structure along sensor thickness direction, therefore the power sensing structure layer includes
The multipair symmetrical quick unit of power of periodic arrangement.The quick unit of symmetrical power is located at the symmetrical bulge-structure
Two sides.
The power sensing structure layer includes flexible pressure drag material layer, top electrode layer and bottom electrode layer, the top
Electrode layer segmentation is discontinuous, and each section is symmetrically distributed in flexible pressure drag material layer upper surface in pairs, by micro-nano technology art pattern CAD
Change.
The bottom electrode layer is integral continuous electrode film, sputters or be vaporized on flexible pressure drag material layer following table
Face, each section of top electrode layer form a quick unit of power with corresponding bottom electrode layer, are symmetrically distributed in symmetrical bulge-structure
Two sides.
The flexibility pressure drag material layer is rectangle composite conducting pressure drag material, total with top electrode layer and bottom electrode layer
With composition power sensing structure layer.Power sensing structure layer, which is integrally bonded, to be bonded in lower layer's flexible substrate, and it is soft to be symmetrically arranged amongst lower layer in pairs
The power sensing structure layer of the symmetrical bulge-structure two sides of property upper surface of substrate forms the quick unit of left and right two power.When flexible vector touches
When sliding feel compound sensor is acted on by constant stiction, the difference output of the pairs of quick unit of two power is steady state value；Work as flexibility
When vector tactile and slip sense compound sensor is acted on by the stiction of alternation, the difference output of the pairs of quick unit of two power is alternation letter
Number；When flexible vector tactile and slip sense compound sensor is with occurring opposite sliding by contact object, the pairs of quick cell voltage of two power is defeated
Frequency out is directly proportional to sliding speed, and the speed and cunning that can be slided by the output signal comprehensive judgement of the quick unit of multiple power
The size of kinetic force of friction.Therefore the present invention judges whether sliding generates, slides using the output signal and its variation of the quick unit of multiple power
Dynamic speed, the size of normal pressure and frictional force and direction.
The beneficial effects of the present invention are:
(1) flexible vector tactile and slip sense compound sensor of the invention can be sentenced by internal simple symmetrical bulge-structure
It is disconnected to go out to slide situation, measure normal pressure, frictional force and sliding velocity；There is micro structure array in sensor upper surface, improves clamping
Stability and safety.
(2) use flexible composite as upper layer flexible substrates and lower layer's flexible substrate material in the present invention, it is reliable resistance to
With can satisfy the use condition of high-temperature sterilization.
(3) electrode layer structure is simple in the present invention, only need to using at symmetrical structure the quick unit of left and right two power it is defeated
Out, i.e. three electrodes, can be obtained required physical quantity.
Detailed description of the invention
Fig. 1 is tactile and slip sense compound sensor sectional view of the invention.
Fig. 2 is tactile and slip sense compound sensor structural schematic diagram of the invention.
Fig. 3 is upper layer flexible substrate oblique view of the invention.
Fig. 4 is the oblique view of power sensing structure layer of the invention.
Fig. 5 is the quick unit stress deformation schematic diagram of power at a triangular hill structure of the invention.
In figure:
1. upper layer flexible substrates；2. power sensing structure layer；3. lower layer's flexible substrate；
201. top electrode layer；202. bottom electrode layer；203. flexible pressure drag material layers.
Specific embodiment
The present invention is described in detail with reference to the accompanying drawings and examples.
The present invention provides a kind of flexible vector tactile and slip sense compound sensor, the sensor generally rectangular parallelepiped structure,
Surface has equidistant micro structure array, for contacting and conduction surfaces normal pressure or frictional force；Middle layer has multiple groups pairs of
The quick unit of power, differential output signal is provided；Bottom surface and mechanical hand or equipment surfaces bond.The quick unit of pairs of power point
It Wei Yu not symmetrical bulge-structure two sides.Specifically, as depicted in figs. 1 and 2, the sensor include: upper layer flexible substrates 1,
Power sensing structure layer 2 and lower layer's flexible substrate 3, the power sensing structure layer 2 include top electrode layer 201 from top to bottom, bottom
Electrode layer 202 and flexible pressure drag material layer 203.The power sensing structure layer 2 is fixed on upper layer flexible substrates 1 and lower layer's flexible liner
Between bottom 3, the lower surface bonds of lower layer's flexible substrate 3 are fixed in mechanical hand or equipment surfaces, upper layer flexible substrates 1 it is upper
Surface has micro-structure, for directly carrying and transmitting forces.
Spacing of the upper surface of the upper layer flexible substrates 1 there are equidistant micro structure array, between the micro-structure
It is 10~500 μm, the section of micro-structure is rectangle or trapezoidal, as shown in Figure 3.Entire upper layer flexible substrates 1 by pouring, nanometer
The techniques preparation such as coining or photoetching is on the power sensing structure layer 2.The upper surface micro-structure of upper layer flexible substrates 1, which can increase, rubs
It wipes, it is whole to transmit pressure and frictional force, calculate sliding velocity.The upper layer flexible substrates 1 can be by epoxy resin or PDMS material
Material is made, and maximum gauge is 50~1000 μm.
The power sensing structure layer 2 is adhered to the upper surface of lower layer's flexible substrate 3, and the upper table with lower layer's flexible substrate 3 is presented
The identical shape and structure in face.Induction element as sensor perceives external forces, by top electrode layer 201 and bottom electrode
The upper and lower surface that layer 202 is respectively attached to flexible pressure drag material layer 203 is constituted, as shown in Figure 4.
The material of the top electrode layer 201 and bottom electrode layer 202 is conductive metal.By sputtering or being deposited difference
The upper and lower surface prepared in flexible pressure drag material layer 203 forms upper/lower electrode.Wherein make top by techniques such as etching, corrosion
The top electrode segmentation of electrode layer 201 is discontinuous, exists only at the left and right sides of symmetrical bulge-structure, and be symmetric, bottom
Two of the continuously distributed lower surface in flexible pressure drag material layer 203 of portion's electrode layer 202, each symmetrical bulge-structure two sides power on
The lower electrode of pole and corresponding position forms two symmetrical quick units of power.
The flexibility pressure drag material layer 203, is the combined pressure material based on graphene, have excellent piezoresistive characteristic,
Lag performance, flexibility and machinability have good voltage-sensitive effect to slight vibration, can detect that the power letter of high frequency short arc
Number.Graphene film interlayer spacing reduces in pressure drag material when by compression, and tunnel current enhancing, resistance reduces；Conversely, electric
Resistance increases.
The upper surface of lower layer's flexible substrate 3 has periodic symmetrical bulge-structure, such as isosceles triangle, isosceles ladder
Shape or parabola shaped equal symmetric shapes.The bottom electrode layer 202 of power sensing structure layer 2 is bonded in lower layer's flexible substrate 3
Upper surface makes capable sensing structure layer 2 form shape identical with the Cycle-symmetry bulge-structure, and the top
The top electrode of electrode layer 201 is located at the two sides of the bulge-structure, between the top electrode of two sides and the lower electrode of corresponding position
Form one group of quick unit of pairs of power.3 lower surface of lower layer's flexible substrate and mechanical hand or equipment surfaces by micro-force sensing technique into
Row bonding.The maximum gauge h of lower layer's flexible substrate 3 is 500~2000um, as shown in Figure 1.
The working principle of the invention:
The sensor is based on flexibility vector tactile and slip sense compound sensor made of piezoresistive effect.As shown in Figure 1, upper layer is soft
Property substrate 1 is by the pressure conduction of horizontal friction force and vertical direction to power sensing structure layer 2.Due to power sensing structure layer 2
The symmetrical bulge-structure of piezoresistive effect and lower layer's flexible substrate 3, between the top electrode of symmetrical bulge-structure two sides and lower electrode respectively
There are two equivalent resistance R1And R2.As shown in figure 5, making R under the action of power1And R2Resistance value changes.
Normal pressure sensing principle: normal pressure is conducted to power sensing structure layer 2 by upper layer flexible substrates 1 straight down,
Under the action of normal pressure, symmetrical bulge-structure two sides are compressed by equivalent, then equivalent resistance R1And R2Reduce simultaneously, voltage output
Become larger, and increment value is identical, increase is related with pressure size.Positive pressure value can be calculated after summation output.It can be by more
The output signal comprehensive judgement normal pressure distribution situation of a quick unit of power.
Vector static friction sensing principle: the stiction Fx of horizontal direction passes through the upper layer flexible substrates 1 with micro-structure
Power is conducted to power sensing structure layer 2, under the action of horizontal force, the resistance value of different parts flexibility pressure drag material layer 203 occurs
Different variations can calculate stiction size and Orientation.Now by taking triangular hill structural capacity sensing structure layer 2 at one as an example
Explanation.When stiction horizontally to the right when, the quick unit of power is compressed on the left of triangular hill structure, and power quick unit in right side is drawn
It stretches, the equivalent resistance R of the quick unit of left side power1It is decreased to R1', the equivalent resistance R of the quick unit of right side power2Increase to R2', such as Fig. 5 institute
Show；When stiction level to the left when, power quick unit in left side is stretched, and power quick unit in right side is compressed, the quick unit of left side power
Equivalent resistance R1Increase, the equivalent resistance R of the quick unit of right side power2Reduce；The resistance value increase and decrease of the equivalent resistance of each quick unit of power is big
Small identical, differential voltage output is a steady state value relevant to frictional force size.The size and just exported by differential voltage
It is negative can determined level direction stiction size and direction.
Sliding speed detects mode: since there are micro-structure, gripped object and sensors for the upper surfaces of upper layer flexible substrates 1
Actually contact-separation-contact recurrent state when surface slides, voltage differential exports high potential, separation when contact
When voltage differential export low potential, difference output is that relevant to a micro-structure period and Relative sliding speed exchange is believed at this time
Number.It is determined when the micro-structure period, then the frequency of the quick cell voltage output of power is directly proportional to sliding speed, and can be quick by multiple power
The speed of the output signal comprehensive judgement sliding of unit and the size of force of sliding friction.
Flexibility vector tactile and slip sense compound sensor provided by the invention the preparation method comprises the following steps: first by 201 He of top electrode layer
Bottom electrode layer 202 is bonded in two surfaces up and down of flexible pressure drag material layer 203；Then bottom electrode layer 202 is bonded in
The upper surface of lower layer's flexible substrate 3 makes capable sensing structure layer 1 that structure identical with the upper surface of lower layer flexible substrate 3 be presented；Most
Upper layer flexible substrates 1 are poured afterwards, the preparation of nano impression or photolithographicallpatterned is on power sensing structure layer 2.
Claims (6)
1. a kind of flexibility vector tactile and slip sense compound sensor, it is characterised in that: the sensor includes close from top to bottom pastes
Upper layer flexible substrates, power sensing structure layer and the lower layer's flexible substrate of conjunction；Table on the power sensing structure layer and lower layer's flexible substrate
Face fits closely；Lower layer's flexible substrate is made of flexible composite, and it is periodically right to have along sensor thickness direction
Claim bulge-structure, therefore the power sensing structure layer includes the multipair symmetrical quick unit of power of periodic arrangement；Described is symmetrical
The quick unit of power be located at the two sides of the symmetrical bulge-structure；The upper layer flexible substrates preparation is quick in the power
On structure sheaf, as the power transfer layer of power sensing structure layer, there is equidistant micro structure array in the upper surface of upper layer flexible substrates；It is described
Power sensing structure layer include flexible pressure drag material layer, top electrode layer and bottom electrode layer, the top electrode layer segmentation is not
Continuously, it is symmetrically distributed in flexible pressure drag material layer upper surface in pairs for each section, by micro-nano technology art pattern CAD；The bottom electricity
Pole layer is integral continuous electrode film, sputters or be vaporized on flexible pressure drag material layer lower surface, each section of top electrode layer
A quick unit of power is formed with corresponding bottom electrode layer, is symmetrically distributed in the two sides of symmetrical bulge-structure；The flexibility pressure drag
Material layer is the combined pressure material based on graphene, and graphene film interlayer spacing subtracts in pressure drag material when by compression
Small, tunnel current enhancing, resistance reduces；Conversely, resistance increases.
2. a kind of flexible vector tactile and slip sense compound sensor according to claim 1, it is characterised in that: the micro-structure it
Between spacing be 10~500 μm, the cross section of the micro-structure is rectangle or trapezoidal.
3. a kind of flexible vector tactile and slip sense compound sensor according to claim 1, it is characterised in that: the upper layer is soft
Property substrate be made of epoxy resin or PDMS material, maximum gauge be 50~1000 μm.
4. a kind of flexible vector tactile and slip sense compound sensor according to claim 1, it is characterised in that: the upper electrode
Layer and the material of bottom electrode layer are conductive metal, are prepared above and below flexible pressure drag material layer respectively by sputtering or being deposited
Surface forms upper/lower electrode.
5. a kind of flexible vector tactile and slip sense compound sensor according to claim 1, it is characterised in that: described is symmetrical convex
Playing structure is isosceles triangle, isosceles trapezoid or parabola shaped.
6. a kind of flexible vector tactile and slip sense compound sensor according to claim 1, it is characterised in that: the lower layer is soft
Property substrate maximum gauge h be 500~2000um.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710100759.0A CN106802200B (en) | 2017-02-23 | 2017-02-23 | A kind of flexibility vector tactile and slip sense compound sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710100759.0A CN106802200B (en) | 2017-02-23 | 2017-02-23 | A kind of flexibility vector tactile and slip sense compound sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106802200A CN106802200A (en) | 2017-06-06 |
| CN106802200B true CN106802200B (en) | 2019-04-12 |
Family
ID=58988659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710100759.0A Active CN106802200B (en) | 2017-02-23 | 2017-02-23 | A kind of flexibility vector tactile and slip sense compound sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106802200B (en) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102648766B1 (en) | 2017-11-20 | 2024-03-20 | 삼성디스플레이 주식회사 | Pressure sensor, manufacturing method of the same, and display device having the same |
| CN108051027B (en) * | 2017-11-23 | 2019-12-31 | 清华-伯克利深圳学院筹备办公室 | Sliding sense sensor capable of measuring pressure and sliding simultaneously |
| CN109269694B (en) * | 2018-11-08 | 2019-10-29 | 清华大学 | Softness haptic perception sensing device, system and its manufacturing method |
| CN109580050B (en) * | 2018-12-14 | 2020-02-11 | 电子科技大学 | Flexible mechanical patterned sensor and preparation method thereof |
| CN109696260A (en) * | 2018-12-25 | 2019-04-30 | 电子科技大学 | A kind of novel pressure sensitivity meta structure |
| CN110095223A (en) * | 2019-05-29 | 2019-08-06 | 京东方科技集团股份有限公司 | A kind of pressure sensor |
| CN110108395B (en) * | 2019-06-14 | 2024-01-16 | 清华大学深圳研究生院 | Touch and slide sensor and preparation method thereof |
| KR20220024831A (en) * | 2019-06-24 | 2022-03-03 | 알베르트-루드비히스-우니베르시테트 프라이부르크 | Tactile sensors and how tactile sensors work |
| CN110207861A (en) * | 2019-07-18 | 2019-09-06 | 柔微智能科技(苏州)有限公司 | A kind of pliable pressure sensor and preparation method thereof |
| CN110487450B (en) * | 2019-08-23 | 2021-09-07 | 南方科技大学 | Flexible touch sensor and preparation method and application thereof |
| CN110589754B (en) * | 2019-09-12 | 2023-03-24 | 复旦大学 | Flexible underwater pressure sensor and preparation method thereof |
| CN111368740B (en) * | 2020-03-05 | 2024-03-15 | 信利半导体有限公司 | Flexible identification sensor and manufacturing method thereof |
| CN111547675B (en) * | 2020-04-22 | 2022-08-16 | 西安交通大学 | Flexible electronic device, microstructure flexible electrode and preparation method thereof |
| CN111735562B (en) * | 2020-08-06 | 2021-01-15 | 钛深科技(深圳)有限公司 | Film pressure sensor and preparation method thereof |
| CN112067177B (en) * | 2020-08-26 | 2022-07-08 | 上海域丰传感仪器有限公司 | Piezoresistive pressure sensor and piezoresistive pressure sensing array |
| CN113576084A (en) * | 2021-08-18 | 2021-11-02 | 同济大学 | Integrated intelligent waistband and preparation method thereof |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002340700A (en) * | 2001-05-14 | 2002-11-27 | Matsushita Electric Ind Co Ltd | Piezoelectric sensor |
| JP2003050165A (en) * | 2001-08-06 | 2003-02-21 | Sumitomo Wiring Syst Ltd | Pressure-sensitive sensor |
| CN100541151C (en) * | 2008-02-29 | 2009-09-16 | 合肥工业大学 | Touch sensor based on flexible pressure-sensitive conductive rubber |
| CN102706489B (en) * | 2012-06-13 | 2014-01-29 | 哈尔滨工业大学 | Flexible three-dimensional force touch sensor of multi-fingered hands of human-simulated robot and three-dimensional force detecting system thereof |
| CN103134622B (en) * | 2013-01-31 | 2014-12-10 | 中国科学院合肥物质科学研究院 | Three-dimensional soft tactile sensor array |
| CN203705097U (en) * | 2013-11-22 | 2014-07-09 | 沈阳工业大学 | Flexible three-dimensional contact force matrix sensing device |
| CN203672526U (en) * | 2013-12-31 | 2014-06-25 | 浙江大学 | Flexible three-dimensional force tactile sensor based on piezoresistive and capacitive combination |
| CN104215363B (en) * | 2014-09-05 | 2016-12-07 | 浙江大学 | Flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber |
| CN105784254A (en) * | 2016-04-20 | 2016-07-20 | 南方科技大学 | Flexible pressure sensor and touch screen |
-
2017
- 2017-02-23 CN CN201710100759.0A patent/CN106802200B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN106802200A (en) | 2017-06-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106802200B (en) | A kind of flexibility vector tactile and slip sense compound sensor | |
| CN106197774B (en) | Flexible piezoresistive tactile sensor array and preparation method thereof | |
| Engel et al. | Polymer micromachined multimodal tactile sensors | |
| Deng et al. | A flexible field-limited ordered ZnO nanorod-based self-powered tactile sensor array for electronic skin | |
| CN103743503B (en) | Based on the flexible 3 D force-touch sensor of pressure resistance type and capacitive combination | |
| CN103424214B (en) | Flexible capacitive touch sensor and manufacturing method of flexible capacitive unit of flexible capacitive touch sensor | |
| CN102539029B (en) | Three-dimensional fluid stress sensor based on flexible MEMS (microelectromechanical system) technology and array thereof | |
| CN104792255B (en) | A kind of film thickness test device and film thickness test method | |
| Hu et al. | Development of patterned carbon nanotubes on a 3D polymer substrate for the flexible tactile sensor application | |
| CN104316224A (en) | Three-dimensional force touch sensing unit based on combination of capacitor and pressure-sensitive rubber | |
| Choi | Polymer micromachined flexible tactile sensor for three-axial loads detection | |
| CN207366110U (en) | A kind of high sensibility pressure transducer | |
| CN109813466A (en) | Touch sensor with sliding perceptional function | |
| CN109708785A (en) | Flexible capacitive touch sensor, electronic skin, wearable device and method | |
| CN104215363A (en) | Soft tactile-slip sensation composite sensing array based on pressure-sensitive conductive rubber | |
| CN209117220U (en) | A kind of threedimensional haptic sensor array of flexible piezoelectric formula | |
| CN108051027B (en) | Sliding sense sensor capable of measuring pressure and sliding simultaneously | |
| Kim et al. | Design of flexible tactile sensor based on three-component force and its fabrication | |
| CN108557759A (en) | High-performance flexible touch force sensor and preparation method thereof | |
| CN204154421U (en) | A kind of three-dimensional force tactile sensing unit combined based on electric capacity and pressure sensitive elastomer | |
| Chen et al. | Recent advances in flexible force sensors and their applications: A review | |
| Liu et al. | Touch position identification based on a flexible array-less supercapacitive tactile sensor | |
| CN104764904B (en) | A kind of three axle piezoelectric accelerometers | |
| CN203798395U (en) | Graphene micro flow sensor | |
| CN209541957U (en) | A kind of dot matrix pliable pressure distributed sensor device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |