CN106772748A - A kind of rank for ultra-optical spectrum imaging system gets over optical filter - Google Patents
A kind of rank for ultra-optical spectrum imaging system gets over optical filter Download PDFInfo
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- CN106772748A CN106772748A CN201611059140.1A CN201611059140A CN106772748A CN 106772748 A CN106772748 A CN 106772748A CN 201611059140 A CN201611059140 A CN 201611059140A CN 106772748 A CN106772748 A CN 106772748A
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- optical filter
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/289—Rugate filters
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Abstract
Optical filter is got over the invention discloses a kind of rank for ultra-optical spectrum imaging system.Step filter spectral independence, discontinuously, but spectrum interval monotone variation at equal intervals；Geometrically same spectral band corresponds to m image scanning row (corresponding with detector), and this m image scanning row has identical spectral band characteristic, and adjacent spectrum spectral coverage is also m scanning imagery row of correspondence, spectral coverage Spline smoothing.The optical filter of different-waveband, spectral centroid wavelength interval and port number can freely be chosen, the whole piece step optical filter that the step optical filter of several big wave bands is spliced, it is possible to achieve spectral centroid wavelength interval and port number unrestricted choice.Using the ultraphotic spectra system of step optical filter light splitting, the equivalent frame frequency of system can be improved 1 times of m by m image scanning row one spectrum of correspondence, and imaging system focal plane detector reads 1 times of m of frame rate requirement reduction.
Description
Technical field
The invention belongs to optical element technology field, refer specifically to a kind of more optical filter of the rank for ultra-optical spectrum imaging system and set
Meter method, it is suitable for visible, infrared remote sensing instrument or the instrument of military surveillance.
Background technology
In aerospace field, it is made up of optical system, spectrum groupware, infrared focal plane device, signal processing circuit etc.
Ultraphotic spectrum or EO-1 hyperion photoelectric instrument be the satellites such as earth observation, military surveillance important load.Remote sensing load passes through optics
System collects all band radiation information of target, and target optical spectrum wave band is separated by light-splitting device, to obtain target optical spectrum information,
The core capabilities index of light-splitting device spectroscopic modes and the whole machine of spectroscopic behaviour direct relation.
In super spectral instrument equipment, usually used prismatic decomposition, grating beam splitting and Fourier light splitting are assigned to every row
Spectrum on pixel is that the spectrum of specific band is uniquely corresponded on this journey pixel, it is desirable to light-splitting device light in thang-kng spectral coverage
Efficiency high is learned, the spectrum outside thang-kng spectral coverage scope does not pass through.Other spectrum groupwares in this manner, spectrophotometric spectra is in width
All be continuous in spectral region, typically use push-scan imaging, and ultraphotic spectrum it is general require speed very high it is high than with it is fast
Fast imaging capability, so requires that focus planardetector has a reading frame frequency very high, and data volume can be very big, can be to follow-up data at
Reason and transmission belt carry out great pressure, and in the range of same optical channel, near the spectral coverage that spectrum can only set, it is impossible to
Spectral coverage is chosen according to actual needs.
The content of the invention
Presence based on problem above, it is an object of the invention to provide a kind of phase step type optical filter, this phase step type filters
Spectrum is applied in ultraphotic spectra system, it is possible to achieve the Spline smoothing of spectrum, spectrum can be selected according to needs,
And the equivalent reading frame frequency topic of system can be improved.
The present invention proposes that a kind of new spectroscopic modes-rank gets over optical filter, the geometry such as the same band structure chart of accompanying drawing 1
With shown in the spliced map of the different-waveband of accompanying drawing 2.The optical filter of this miniaturization, by the spectral band Spline smoothing of optical filter,
Geometrically each spectral coverage corresponds to m image scanning row (corresponding with detector, the system m=5), and each imaging is swept in this spectral coverage
Retouch at row optical filter through identical spectral band, there is image scanning line width on one end border of m image scanning row
Excessive band, intermediate zone is light tight.
Described step optical filter geometrically has L broadband, and L is positive integer；There is n spectral coverage in each broadband, n is
Positive integer, the n values in each broadband can be with difference；N spectral coverage changes through optical spectrum phase step, and two neighboring spectrum
Interval can also be selected according to needs；Each spectral coverage m image scanning row of correspondence in n spectral coverage, m is positive integer,
It is identical through spectrum in this m image scanning row, that is to say, that in this m scanning imagery row, passed through with same spectra
Curve.
The feasibility that described optical filter makes according to system spectrum design requirement and optical filter, whole optical filter can be by list
The optical filter of individual or multiple broadband scopes is spliced to form.The optical filter of each wide spectrum wavelength band, the spectrum of its single wave band
Duan Kuandu monotone variations, physical dimension is identical.But constitute each broadband optical filter of whole optical filter, its spectrum channel number
Can be with difference with spectral width, foundation is actually needed flexible design.There is a splicing stitching portion of two different-waveband optical filters
Band, splicing bandwidth is the individual image scanning rows of m (m=5).The optical filter being spliced by multiple optical filter pieces just constitutes one
Complete step optical filter.So all of single spectral band and splicing tape geometrically all correspond to m scanning imagery row, convenient
The geometry and Spectral Reconstruction of the making of whole step optical filter, the implementation of IMC and data.
Described step optical filter, for m image scanning row same spectra hyperspectral imager, by as moving benefit
Repay imaging, it is possible to the equivalent frame frequency that reads of the system of super spectral instrument is improved m-1 times, is also equivalent to visit focal plane accordingly
M-1 times of the read-out speed reduction of device is surveyed, its essence is the deficiency for exchanging the time for using the surplus of system space.And step filters
The spectral coverage number and spectral width of piece can carry out free selection according to being actually needed.
Described step filter spectral light-dividing principle is：The spectral reflection band being made up of optical multilayer optical thin film and one
Optical interval layer forms a complete F-P optical filter.The film layer of the zone of reflections determine spectral coverage and passband width,
The optical indexes such as transmitance, and the spectral position (i.e. central wavelength lambda 0) of passband is determined by optical interval layer.It is spaced by changing
The optical thickness of layer, it is possible to change the spectral band-width position of optical filter, while little on the influence of the spectral targets such as bandwidth.
The preparation method of described step optical filter, can add the method for plated film to complete using photoetching.Using partly leading
Body technology, coupled ion beam lithographic technique forms 64 (or 2 on wallnIt is individual) step.Each step correspondence is different several
What thickness, the light refractive index of film layer is constant under normal circumstances, also with regard to corresponding different optical thickness.Each step is corresponding several
What region also just forms a miniature unit optical filter.On same substrate, 64 (or 2 can be formednIt is individual) independent light
Compose the miniature integrated optical filter of passage.
Due to there is also secondary peak after passband, need to be suppressed with secondary peak membrane system is cut.Cut secondary peak membrane system and be plated in optical filter
On another side of the substrate relative to F-P multilayer films, typically it is made up of 20-30 tunics, its spectrum coordinates with main peak (passband) spectrum.
For four Out-of-band rejections of wave band, need to respectively plate corresponding section of secondary peak assembly of thin films to suppress with outer corresponding.
After carrying out the optical filter of each big wave band, using fine splicing, four optical filters are spliced as requested
Get up, just constitute satisfactory overall step optical filter.
The method have the advantages that：
1. proposed spectrum separation method of the invention can be realized giving out light the Spline smoothing of spectrum, spectrum separation purity
Compare high.
2. step optical filter of the invention can be needed according to system design, and multiple spectral coverage models are realized on an optical filter
The Subsection spectrum for enclosing.
3. the hyperspectral imager of step optical filter combination IMC system of the invention, can improve the equivalent of system
Read m-1 times of frame frequency.
Brief description of the drawings
Fig. 1 is same broadband inside spectral transmission and intermediate zone structure chart；
Fig. 2 is the splicing construction figure of different broadband optical filters；
Fig. 3 is that ultra-optical spectrum imaging system aerial image moves compensation principle figure.
Specific embodiment
Thought is set more than, the related personnel of Shanghai Technical Physics Inst., Chinese Academy of Sciences devises the filter of short-wave infrared step
Mating plate, whole optical filter is divided into four wide spectrum wave bands, and each spectral band has different spectrum channel number and spectral widths,
But each spectrum channel has identical physical dimension, its main performance index and the following Tables 1 and 2 of centre wavelength：
The step filter performance parameter list of table 1
The step optical filter wave band of table 2 is divided and centre wavelength table
According to above design objective, using etching and coating process described in the content of the invention, it is possible to produce corresponding
Step optical filter.
Claims (1)
1. a kind of rank for ultra-optical spectrum imaging system gets over optical filter, it is characterised in that：
Described step optical filter geometrically has L broadband, and L is positive integer；There is n spectral coverage in each broadband, n is just whole
Number, the n values in each broadband can be with difference；N spectral coverage changes through optical spectrum phase step, and two neighboring spectrum is spaced
Can also be selected according to needs；Each spectral coverage m image scanning row of correspondence in n spectral coverage, m is positive integer, in this m
It is identical through spectrum in individual image scanning row, that is to say, that in this m scanning imagery row, with same spectra H103 resin.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510864345.6A CN105511005A (en) | 2015-12-01 | 2015-12-01 | Phase-step optical filter for hyper-spectral imaging system |
| CN2015108643456 | 2015-12-01 |
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| Publication Number | Publication Date |
|---|---|
| CN106772748A true CN106772748A (en) | 2017-05-31 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510864345.6A Pending CN105511005A (en) | 2015-12-01 | 2015-12-01 | Phase-step optical filter for hyper-spectral imaging system |
| CN201611059140.1A Pending CN106772748A (en) | 2015-12-01 | 2016-11-25 | A kind of rank for ultra-optical spectrum imaging system gets over optical filter |
| CN201621279816.3U Active CN206281995U (en) | 2015-12-01 | 2016-11-25 | For the step optical filter of ultra-optical spectrum imaging system |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510864345.6A Pending CN105511005A (en) | 2015-12-01 | 2015-12-01 | Phase-step optical filter for hyper-spectral imaging system |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201621279816.3U Active CN206281995U (en) | 2015-12-01 | 2016-11-25 | For the step optical filter of ultra-optical spectrum imaging system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110879435A (en) * | 2019-11-18 | 2020-03-13 | 中国科学院上海技术物理研究所 | Medium-long wave infrared wide spectrum color separation sheet with zinc selenide crystal as substrate |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105511005A (en) * | 2015-12-01 | 2016-04-20 | 中国科学院上海技术物理研究所 | Phase-step optical filter for hyper-spectral imaging system |
| CN107843949B (en) * | 2017-11-20 | 2020-08-14 | 北京空间机电研究所 | High-precision positioning ultra-precise optical filter with error compensation function |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101303424A (en) * | 2008-06-12 | 2008-11-12 | 中国科学院上海技术物理研究所 | Three-cavity multichannel optical spectrum step type integrated optical filter |
| CN104090320A (en) * | 2014-06-12 | 2014-10-08 | 中国科学院上海技术物理研究所 | Secondary spectrum elimination integrated optical filter for hyper-spectral imaging system |
| CN206281995U (en) * | 2015-12-01 | 2017-06-27 | 中国科学院上海技术物理研究所 | For the step optical filter of ultra-optical spectrum imaging system |
-
2015
- 2015-12-01 CN CN201510864345.6A patent/CN105511005A/en active Pending
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2016
- 2016-11-25 CN CN201611059140.1A patent/CN106772748A/en active Pending
- 2016-11-25 CN CN201621279816.3U patent/CN206281995U/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101303424A (en) * | 2008-06-12 | 2008-11-12 | 中国科学院上海技术物理研究所 | Three-cavity multichannel optical spectrum step type integrated optical filter |
| CN104090320A (en) * | 2014-06-12 | 2014-10-08 | 中国科学院上海技术物理研究所 | Secondary spectrum elimination integrated optical filter for hyper-spectral imaging system |
| CN206281995U (en) * | 2015-12-01 | 2017-06-27 | 中国科学院上海技术物理研究所 | For the step optical filter of ultra-optical spectrum imaging system |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110879435A (en) * | 2019-11-18 | 2020-03-13 | 中国科学院上海技术物理研究所 | Medium-long wave infrared wide spectrum color separation sheet with zinc selenide crystal as substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| CN206281995U (en) | 2017-06-27 |
| CN105511005A (en) | 2016-04-20 |
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