CN106596052A - Automatic angle adjustment mechanism for interferometer, and angle control method thereof - Google Patents
Automatic angle adjustment mechanism for interferometer, and angle control method thereof Download PDFInfo
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- CN106596052A CN106596052A CN201611248171.1A CN201611248171A CN106596052A CN 106596052 A CN106596052 A CN 106596052A CN 201611248171 A CN201611248171 A CN 201611248171A CN 106596052 A CN106596052 A CN 106596052A
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- angle
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- riser
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- plate
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
- G01B9/02072—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by calibration or testing of interferometer
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Dental Tools And Instruments Or Auxiliary Dental Instruments (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The invention discloses an automatic angle adjustment mechanism for an interferometer, and an angle control method of the automatic angle adjustment mechanism. The automatic angle adjustment mechanism comprises a clamp platform, wherein a clamp vertical plate base and a clamp vertical plate are arranged on the clamp platform, the clamp vertical plate base is fixedly connected on the clamp platform, the clamp vertical plate is connected on the clamp platform in a rotated manner, an elastic member used for driving the clamp vertical plate to rotate toward a deflection direction is connected between the clamp vertical plate and the clamp platform, a driving motor, an angle sensor and a control system are further connected on the clamp platform, the driving motor is used for driving the clamp vertical plate to rotate, the angle sensor is used for acquiring a rotating angle of the clamp vertical plate, and the control system is used for comparing the acquired rotating angle with a pre-input deflection angle so as to perform feedback adjustment control on a driving stroke of the driving motor. The automatic angle adjustment mechanism and the angle control method thereof replace the existing manual adjustment and comparison based on experience with automatic control and adjustment, and improve the efficiency and precision of angle adjustment.
Description
Technical field
The present invention relates to interferometer, more particularly to a kind of interferometer automatic angle adjusting mechanism and its Angle ambiguity side
Method.
Background technology
Interferometry is the bright fringes that produce of the optical path difference produced by coherence between two beam coherent lights surveying
A kind of method of amount altitude information.Light is divided into two-beam by Amici prism, through the light that non-reflective reference mirror and sample are returned
Between optical path difference formed interference fringe.
As the equipment of measurement end surface of optical fiber connector geometric parameter, the emphasis that APC angles always are in test is measured.
But existing regulative mode is all to adjust manually, angle passes through the first-class displacement facility of differential by the measurement of angular adjustment to APC
State, and the adjustment mode to cause to measure stability not enough, not enough precisely, adjust also need to be proofreaded every time, efficiency compared with
It is low.
The content of the invention
The first object of the present invention is to provide a kind of automatic angle adjusting mechanism of interferometer, with automatically adjusting angle
And adjusted angle more accurate, more efficient advantage.
The present invention above-mentioned purpose technical scheme is that：
A kind of automatic angle adjusting mechanism of interferometer, including jig platform, jig platform be provided be fixedly connected on fixture put down
Fixture riser seat on platform and the fixture riser being rotatably connected on jig platform, are connected between fixture riser and jig platform
To drive fixture to the elastic component that riser is rotated to beat direction, it is also associated with driving fixture to riser rotation on jig platform
Motor, the angular transducer of rotational angle to gather fixture riser and by the rotational angle for collecting with it is pre-
The deflection angle of input compares, and forming the stroke that drives to motor carries out the control system of feedback regulation control.
Using above-mentioned technical proposal, fixture riser rotates with jig platform and is connected and can rotate to beat direction, elastic component
Make fixture riser keep the trend rotated to beat direction, transmitted to control system, control by angular transducer collection rotational angle
System processed controls the driving of motor according to rotational angle and the multilevel iudge result of deflection angle in the way of feedback regulation
Stroke replaces the mode of existing artificial regulation to drive fixture to riser rotation, possess automatization adjust angle and more precisely,
More efficient advantage.
Further, fixture riser seat has the vertical plate body of through hole, the bottom of vertical plate body and jig platform including middle part
It is fixedly connected, horizontal connecting plate is connected with the top of vertical plate body, fixture riser is rotatably connected on horizontal connecting plate and fixture is flat
Between platform.
Using above-mentioned technical proposal, fixture riser is connected between horizontal connecting plate and jig platform, and connection is more consolidated,
Rotation process is more stable.
Further, horizontal connecting plate is provided with connecting plate rotating shaft, and jig platform is provided with coaxial with connecting plate rotating shaft putting down
Platform rotating shaft, fixture riser is connected rotatable to realize with connecting plate rotating shaft and platform rotating shaft.
Using above-mentioned technical proposal, connecting plate rotating shaft and platform rotating shaft rotate up and down connection in fixture riser, rotate
Cheng Gengjia stablizes.
Further, angular transducer is connected in the lower section of jig platform with platform rotating shaft.
Using above-mentioned technical proposal, angular transducer is arranged on arrangement more adduction of the jig platform lower section to volumetric spaces
Reason, the rotational angle of fixture riser is transmitted by platform rotating shaft, is gathered by angular transducer.
Further, vertical plate body is reserved with the side in fixture riser beat direction and overturns the appearance for entering for fixture riser
Chamber.
Using above-mentioned technical proposal, when fixture riser overturns, fixture riser is entered in cavity volume naturally, thus fixture riser
Without the need for remaining larger space and fixture riser seat between, mechanism's overall volume can be reduced.
Further, the bottom of fixture riser is connected with horizontal plate, and the bottom of vertical plate body has and passed through for horizontal plate
And the hollow-out parts for swinging.
Using above-mentioned technical proposal, fixture riser is located at the front end of fixture riser seat, and the rotation for convenience of fixture riser is driven
Dynamic, by arranging horizontal plate and passing through hollow-out parts, hollow-out parts reserve the space of swing, such that it is able to from after fixture riser seat
End is driven.
Further, horizontal plate is equipped with plate connecting hole, and jig platform is equipped with platform connecting hole, plate connecting hole with
Platform connecting hole is turned on, and one end of elastic component is connected in plate connecting hole, and the other end is connected in platform connecting hole.
Using above-mentioned technical proposal, elastic component is connected in plate connecting hole and platform connecting hole, reduces peripheral hardware elasticity
The spatial volume that part brings takes, while the materials of horizontal plate and jig platform are also saved, positioned at plate connecting hole peace
Elastic component telescopic process in platform connecting hole is interference-free.
Further, plate connecting hole is provided with draw-in groove open upward, and platform connecting hole is provided with the draw-in groove towards lower open mouth, draw-in groove
Spring catch is inside connected with, elastic component is drag hook spring, and the two ends of drag hook spring are equipped with drag hook, and drag hook is hooked on spring catch.
Using above-mentioned technical proposal, in the horizontal plate of elastic connection and jig platform, the drag hook at the top of drag hook spring
Through spring catch, spring catch is connected in the draw-in groove of plate connecting hole, drag hook spring connects from upper following nature into plate
In hole and platform connecting hole, drag hook spring is suitably stretched, another spring catch is passed through into the drag hook of drag hook spring bottom, then will
Spring catch is connected in draw-in groove, and the process of dismounting removes any spring catch, takes out drag hook spring, and the process of dismounting is simply fast
It is prompt.
Further, the plane that jig platform is contacted with horizontal plate is provided with the oil storage tank for storing lubricating oil.
Using above-mentioned technical proposal, in fixture riser rotation process, the upper flat plane-plane contact of horizontal plate and jig platform,
With larger frictional force, after oil storage tank is set, there is oil lubrication in horizontal plate rotation process, reduce frictional force, rotate
Smoothness is stable.
Further, oil storage tank is the mounting hole of depression, and its long axis direction is tangent with the swinging track of horizontal plate.
Using above-mentioned technical proposal, horizontal plate has larger along the lubricating oil area coverage on swaying direction, side
Help flow rotation.
Further, the motor be linear reciprocating motor, its outfan on the swaying direction of horizontal plate with water
The side of flat plate abuts to promote it to swing.
Using above-mentioned technical proposal, linear reciprocating motor drives process, and its outfan rectilinear direction is moved back and forth, and drives water
Flat plate is rotated.
Further, the outfan of linear reciprocating motor is provided with ball with the horizontal plate place of abutting.
Using above-mentioned technical proposal, because the outfan of linear reciprocating motor contradicts horizontal plate movement along linear reciprocation,
And horizontal plate has sliding friction to swing between outfan and the side of horizontal plate, by arranging ball to roll generation
For slip, frictional force is reduced, help flow rotation.
Further, control system includes single-chip microcomputer and drive circuit, and drive circuit receives Single-chip Controlling to drive electricity
Machine, single-chip microcomputer connection angle sensor is compared with receiving rotational angle with the deflection angle of pre-input, is got over first in rotational angle
Cross before deflection angle and riser rotation is driven fixture to fixed angles amplitude, after rotational angle crosses first deflection angle, with two
Point-score principle, rotational angle often cross deflection angle then with current direction drive motor in opposite direction, and angular width degree
Halve, make rotational angle constantly close deflection angle.
Using above-mentioned technical proposal, using minimum two way classification mathematical principle, by single-chip microcomputer multilevel iudge, by drive circuit
Motor work is driven, rotational angle constantly close deflection angle is made, angular adjustment is quicker, accurately.
The second object of the present invention is that offer is a kind of to be realized based on above-mentioned interferometer with automatic angle adjusting mechanism
Angle control method, with automatically adjust angle and adjusted angle more precisely, more efficient advantage.
The present invention above-mentioned second purpose technical scheme is that：
The angle control method that a kind of above-mentioned interferometer is realized with automatic angle adjusting mechanism, including
S1. the deflection angle of pre-input is obtained；
S2. drive fixture to riser with fixed angles amplitude before rotational angle crosses deflection angle first to rotate, after rotating each time
Gather once current rotational angle and with deflection angle multilevel iudge；
S3. deflection angle is crossed first in rotational angle, with two way classification principle, rotational angle often crosses a deflection angle then
To drive motor, and angular width degree to halve with current direction in opposite direction, rotational angle constantly close deflection angle is made.
In sum, the invention has the advantages that：Drive horizontal plate to swing by linear reciprocating motor so that
Fixture riser is rotated, and the deflection angle of the rotational angle and pre-input that gather fixture riser while rotation is compared judgement,
Carry out the driving stroke of feedback regulation motor, instead of it is existing manually adjust and check and correction by experience, improve and adjust angle
Efficiency, accuracy.
Description of the drawings
Fig. 1 is the structural representation of the fixture riser with fixture riser base rear end visual angle of the automatic angle adjusting mechanism of interferometer
Figure；
Fig. 2 is the structural representation of the fixture riser with fixture riser seat front end visual angle of the automatic angle adjusting mechanism of interferometer；
Fig. 3 is to conceal display tablet connecting hole, the structural representation of oil storage tank after fixture riser is hidden；
Fig. 4 is the draw-in groove of flat board connecting hole and coder structure schematic diagram；
Fig. 5 is control system schematic diagram；
Fig. 6 is software flow pattern.
In figure, 1, jig platform；11st, platform rotating shaft；12nd, platform connecting hole；13rd, oil storage tank；2nd, fixture riser seat；21、
Vertical plate body；211st, hollow-out parts；212nd, cavity volume；22nd, horizontal connecting plate；221st, connecting plate rotating shaft；3rd, fixture riser；31st, level
Plate；311st, plate connecting hole；4th, linear reciprocating motor；41st, motor mounting plate；42nd, ball；5th, drag hook spring；51st, drag hook；
6th, draw-in groove；7th, spring catch；8th, encoder.
Specific embodiment
A kind of automatic angle adjusting mechanism of interferometer, referring to Fig. 1, including jig platform 1, jig platform 1 is provided with solid
Surely the fixture riser seat 2 being connected on jig platform 1 and the fixture riser 3 being rotatably connected on jig platform 1, fixture riser seat
The 2 vertical plate bodys 21 including middle part with through hole, the bottom of vertical plate body 21 is fixedly connected with jig platform 1, vertical plate body 21
Top be connected with horizontal connecting plate 22, horizontal connecting plate 22 is provided with connecting plate rotating shaft 221, and jig platform 1 is provided with and even
The coaxial platform rotating shaft 11 of fishplate bar rotating shaft 221（It is visible in Fig. 2）, fixture riser 3 be located at horizontal connecting plate 22 and jig platform 1 it
Between, its top rotates with connecting plate rotating shaft 221 and is connected, and its bottom and platform rotating shaft 11 rotate connection.The bottom court of fixture riser 3
Be connected with horizontal plate 31 to the rear end of fixture riser seat 2, the bottom of vertical plate body 21 have pass through for horizontal plate 31 and
The hollow-out parts 211 of swing.Vertical plate body 21 is reserved with the side in the beat direction of fixture riser 3 and is entered for the upset of fixture riser 3
Cavity volume 212.Thus fixture riser 3 can swing drive and rotate by horizontal plate 31, and when fixture riser 3 overturns, fixture stands
Plate 3 is entered in cavity volume 212 naturally, thus without the need for remaining larger space between fixture riser 3 and fixture riser seat 2, is reduced whole
Body volume.
With reference to Fig. 1 and Fig. 2, the sidepiece of jig platform 1 is provided with motor, and motor is for promoting horizontal plate 31
Swing to drive fixture to the linear reciprocating motor 4 of the rotation of riser 3, linear reciprocating motor 4 is fixedly connected by motor mounting plate 41
On the side of jig platform 1, referring to Fig. 3, the outfan of linear reciprocating motor 4 is provided with ball 42, and by ball 42 and water
The side of flat plate 31 rolls connection, for ease of observation, conceals fixture riser 3 in Fig. 3.
Referring to Fig. 1 and Fig. 3, it is connected with to drive fixture to riser 3 between fixture riser 3 and jig platform 1 to beat side
To the drag hook spring 5 for rotating, horizontal plate 31 is equipped with plate connecting hole 311, and jig platform 1 is equipped with platform connecting hole 12,
Plate connecting hole 311 is turned on platform connecting hole 12, and plate connecting hole 311 is provided with draw-in groove 6 open upward, with reference to referring to Fig. 4,
Platform connecting hole 12 is provided with the draw-in groove 6 towards lower open mouth, draw-in groove 6 and is connected with spring catch 7, and the two ends of drag hook spring 5 are equipped with
Drag hook 51, drag hook 51 is hooked on spring catch 7, is thus resiliently connected together horizontal plate 31 with jig platform 1, dials level
The side of plate 31 remains and is connected on the outfan of linear reciprocating motor 4.
In the horizontal plate 31 of elastic connection and jig platform 1, the drag hook 51 at the top of drag hook spring 5 passes through spring catch 7,
Spring catch 7 is connected in the draw-in groove 6 of plate connecting hole 311, drag hook spring 5 from it is upper it is following naturally enter plate connecting hole 311
In platform connecting hole 12, drag hook spring 5 is suitably stretched, another spring catch 7 is passed through into the drag hook of the bottom of drag hook spring 5
51, then spring catch 7 is connected in draw-in groove 6, the process of dismounting removes any spring catch 7, takes out drag hook spring 5, dismounting
Process simple and fast.
Due in the rotation process of fixture riser 3, the upper flat plane-plane contact of horizontal plate 31 and jig platform 1, with larger
Frictional force, visible in Fig. 3, the plane that jig platform 1 is contacted with horizontal plate 31 is provided with oil storage tank 13, and oil storage tank 13 is recessed
Sunken mounting hole, its long axis direction is tangent with the swinging track of horizontal plate 31, for storing lubricating oil, to horizontal plate 31 with
The upper plane of jig platform 1 is lubricated.
Referring to Fig. 4, be provided with to constitute the encoder 8 of angular transducer in the lower section of jig platform 1, encoder 8 with it is flat
Platform rotating shaft 11 connects, and to the rotational angle for gathering fixture riser 3, encoder 8 is connected to control system.
Referring to Fig. 5, control system includes single-chip microcomputer and drive circuit, and drive circuit receives Single-chip Controlling to drive straight line past
Compound machine, single-chip microcomputer connection angle sensor is compared with receiving rotational angle with the deflection angle of pre-input, first in rotational angle
Secondary crossing drive fixture to riser rotation with fixed angles amplitude before deflection angle, after rotational angle crosses first deflection angle,
With two way classification principle, rotational angle often cross deflection angle then with current direction drive motor in opposite direction, and angle
Amplitude halves, and makes rotational angle constantly close deflection angle, forms the feedback regulation control of the driving stroke to linear reciprocating motor
System.
Using minimum two way classification mathematical principle, by single-chip microcomputer multilevel iudge, motor work is driven by drive circuit,
Rotational angle constantly close deflection angle is made, angular adjustment is quicker, accurately, herein it should be noted that " crossing deflection angle
Degree " is less than from changing to more than deflection angle from changing to less than deflection angle comprising rotational angle more than deflection angle or rotational angle
Two kinds of situations of deflection angle, that is to say, that when forward drive, are more than the situation of deflection angle, then if there is rotational angle
Simultaneously angular width degree halves reverse drive；And when reverse drive, there is situation of the rotational angle less than deflection angle, then it is changed to just
Halve to simultaneously angular width degree is driven.
The engineering of above-mentioned single-chip microcomputer realizes that the operational process of software is as shown in fig. 6, refinement is with the software of operation in it
Method and step：
A kind of angle control method, including
S1. the deflection angle of pre-input is obtained；
S2. drive fixture to riser 3 with fixed angles amplitude before rotational angle crosses deflection angle first to rotate, rotate each time
Gather once afterwards current rotational angle and with deflection angle multilevel iudge；
S3. deflection angle is crossed first in rotational angle, with two way classification principle, rotational angle often crosses a deflection angle then
To drive motor, and angular width degree to halve with current direction in opposite direction, rotational angle constantly close deflection angle is made.
To sum up, horizontal plate 31 is driven to swing by linear reciprocating motor 4 so that fixture riser 3 is rotated, while rotation
The rotational angle of collection fixture riser 3 is compared judgement with the deflection angle of pre-input, carries out feedback regulation motor
Drive stroke, instead of it is existing manually adjust and check and correction by experience, improve the efficiency for adjusting angle, accuracy.
The above is only the preferred embodiment of the present invention, and protection scope of the present invention is not limited merely to above-mentioned enforcement
Example, all technical schemes belonged under thinking of the present invention belong to protection scope of the present invention.It should be pointed out that for the art
Those of ordinary skill for, some improvements and modifications without departing from the principles of the present invention, these improvements and modifications
Should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of automatic angle adjusting mechanism of interferometer, is characterized in that：Including jig platform, jig platform is provided with fixed company
The fixture riser seat being connected on jig platform and the fixture riser being rotatably connected on jig platform, fixture riser and jig platform
Between be connected with to drive fixture to the elastic component that riser is rotated to beat direction, be also associated with driving folder on jig platform
Motor that tool riser is rotated, the angular transducer of rotational angle to gather fixture riser and by turning for collecting
Dynamic angle compares with the deflection angle of pre-input, and forming the stroke that drives to motor carries out the control system of feedback regulation control
System.
2. the automatic angle adjusting mechanism of interferometer according to claim 1, is characterized in that：Fixture riser seat includes middle part
Vertical plate body with through hole, the bottom of vertical plate body is fixedly connected with jig platform, and at the top of vertical plate body level is connected with
Connecting plate, fixture riser is rotatably connected between horizontal connecting plate and jig platform.
3. the automatic angle adjusting mechanism of interferometer according to claim 2, is characterized in that：Horizontal connecting plate is provided with company
Fishplate bar rotating shaft, jig platform is provided with the platform rotating shaft coaxial with connecting plate rotating shaft, fixture riser and connecting plate rotating shaft and platform
Rotating shaft connection is rotatable to realize;Angular transducer is connected in the lower section of jig platform with platform rotating shaft.
4. the automatic angle adjusting mechanism of interferometer according to claim 2, is characterized in that：Vertical plate body is in fixture riser
The side in beat direction is reserved with and overturns the cavity volume for entering for fixture riser.
5. the automatic angle adjusting mechanism of interferometer according to claim 2, is characterized in that：The bottom connection of fixture riser
There is horizontal plate, the bottom of vertical plate body has the hollow-out parts for passing through for horizontal plate and swinging.
6. the automatic angle adjusting mechanism of interferometer according to claim 5, is characterized in that：Horizontal plate is equipped with plate
Connecting hole, jig platform is equipped with platform connecting hole, and plate connecting hole is turned on platform connecting hole, and one end of elastic component is connected to
In plate connecting hole, the other end is connected in platform connecting hole;Plate connecting hole is provided with draw-in groove open upward, platform connecting hole
It is provided with the draw-in groove towards lower open mouth, draw-in groove and is connected with spring catch, elastic component is drag hook spring, and the two ends of drag hook spring are equipped with
Drag hook, drag hook is hooked on spring catch.
7. the automatic angle adjusting mechanism of interferometer according to claim 1, is characterized in that：Jig platform is dialled with level
The plane of plate contact is provided with the oil storage tank for storing lubricating oil;Oil storage tank is the mounting hole of depression, its long axis direction and water
The swinging track of flat plate is tangent.
8. the automatic angle adjusting mechanism of interferometer according to claim 1, is characterized in that：The motor is straight line
Reciprocating motor, its outfan abuts to promote it to swing on the swaying direction of horizontal plate with the side of horizontal plate;Straight line
The outfan of reciprocating motor is provided with ball with the horizontal plate place of abutting.
9. the automatic angle adjusting mechanism of interferometer according to claim 1, is characterized in that：Control system includes monolithic
Machine and drive circuit, drive circuit receives Single-chip Controlling to drive motor, single-chip microcomputer connection angle sensor to turn to receive
Dynamic angle compares with the deflection angle of pre-input, is driven fixture to fixed angles amplitude before rotational angle crosses deflection angle first
Riser is rotated, and after rotational angle crosses first deflection angle, with two way classification principle, rotational angle often crosses a deflection angle
Degree then to halve with current direction drive motor in opposite direction, and angular width degree, makes rotational angle constantly close deflection angle.
10. the angle control method that a kind of interferometer based on described in claim 9 is realized with automatic angle adjusting mechanism, its
It is characterized in that：Including
S1. the deflection angle of pre-input is obtained；
S2. drive fixture to riser with fixed angles amplitude before rotational angle crosses deflection angle first to rotate, after rotating each time
Gather once current rotational angle and with deflection angle multilevel iudge；
S3. deflection angle is crossed first in rotational angle, with two way classification principle, rotational angle often crosses a deflection angle then
To drive motor, and angular width degree to halve with current direction in opposite direction, rotational angle constantly close deflection angle is made.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611248171.1A CN106596052B (en) | 2016-12-29 | 2016-12-29 | Automatic angle adjusting mechanism for interferometer and angle control method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611248171.1A CN106596052B (en) | 2016-12-29 | 2016-12-29 | Automatic angle adjusting mechanism for interferometer and angle control method thereof |
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| CN106596052A true CN106596052A (en) | 2017-04-26 |
| CN106596052B CN106596052B (en) | 2019-12-06 |
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| Application Number | Title | Priority Date | Filing Date |
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|---|---|---|---|---|
| JPH04269611A (en) * | 1991-02-26 | 1992-09-25 | Canon Inc | Interference optical apparatus |
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| CN2690905Y (en) * | 2004-02-17 | 2005-04-06 | 中国科学院力学研究所 | Automatic angle focusing imaging system when object plane and light shaft forming inclined intersection angle |
| CN201199273Y (en) * | 2008-04-16 | 2009-02-25 | 周其 | Optical fiber connector positioning apparatus for detecting optical fiber end-face |
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| Publication number | Publication date |
|---|---|
| CN106596052B (en) | 2019-12-06 |
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