CN2690905Y - Automatic angle focusing imaging system when object plane and light shaft forming inclined intersection angle - Google Patents
Automatic angle focusing imaging system when object plane and light shaft forming inclined intersection angle Download PDFInfo
- Publication number
- CN2690905Y CN2690905Y CN 200420003596 CN200420003596U CN2690905Y CN 2690905 Y CN2690905 Y CN 2690905Y CN 200420003596 CN200420003596 CN 200420003596 CN 200420003596 U CN200420003596 U CN 200420003596U CN 2690905 Y CN2690905 Y CN 2690905Y
- Authority
- CN
- China
- Prior art keywords
- image
- angle
- motor
- object plane
- imaging system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Microscoopes, Condenser (AREA)
- Automatic Focus Adjustment (AREA)
Abstract
The utility model relates to an automatic angle focusing imaging system when an object plane and a light shaft form an inclined intersection angle, which comprises an image receiving device and at least a piece of imaging lens arranged in the light path of an object and the image receiving device, a drive and control device and an image analysis processing system. Wherein, the geometric centre of the image quick surface of the image receiving device passes the light shaft determined by the imaging lens and is positioned at the axial position on the object plane conjugated with the dot of the corresponding object. The image receiving device is electrically connected with the image analysis processing system which is in electric connection with the drive and control device via cables. The automatic angle focusing optical imaging system provided by the utility model is the optical imaging system concerning that the object plane and the light shaft form an inclined intersection angle (0 degree < theta <=90 degrees), and compensates for the shortage that the axial focusing device and the method only achieves part focus on the image surface, so as to achieve the clear effect of the whole image surface when focusing. The device structure of the utility model is simple and easy to regulate.
Description
Technical field
The utility model relates to a kind of method and device of angle automatic focusing of optical imaging system, particularly relates to a kind of object plane becomes the optical imaging system of a slanted angle (0 °<θ≤90 °) with optical axis angle automatic focusing system.
Background technology
Since the sixties in 20th century, automatic focusing has been widely used in optical imaging systems such as camera, microscope, projector, video camera, lithographic equipment and detecting instrument as a kind of important automatic technology.
Technology of auto roughly is divided into telemetry and picture detection method.Telemetry is sent probing waves such as ultrasound wave or infrared ray on one's own initiative object is found range by system, regulate then image distance (or object distance) reach focus on clear.Change the parameter that obtains with graphical analysis as detection method by the picture element sharpness that focusing is caused and weighed, thereby judge that picture receives the plane and whether is in the ideal image position.Advantage as detection method is and can directly focuses with the image change FEEDBACK CONTROL that influences of being focused, and also can eliminate simultaneously for system's image planes drift that other reason causes.Research of automatic focusing in recent years and application are adopted mostly as the image sharpness determining method in the detection method, the device that this method only needs seldom or not to need to add usually just can be realized automatic focusing, and can realize very high focusing accuracy, but this method requires image to have certain contrast, and it is consuming time more than telemetry.
The research of image sharpness determining method automatic focusing and application are main concentrates both ways: the design and the selection of the computing method of (1) image sharpness (being the out of focus function).The degree of out of focus when the out of focus function is used to judge imaging mainly is according to when object focus is clear, the contrast maximum of spatial domain epigraph, and the HFS maximum of frequency domain epigraph, promptly details is the abundantest.The out of focus function has determined the accuracy and the sensitivity of focusing.The out of focus function requires to have unimodality in focus area, highly sensitive, characteristics such as signal to noise ratio (S/N ratio) is high, operand is little.(2) searching method of optimal imaging position, the quality of searching method have determined the speed of automatic focusing process.
At present the automatic focusing method of using is to regulate image device vertically to realize focusing on clearly axial automatic focusing (as the focus adjustment method and the device of disclosed a kind of optical imagery system among the patent CN-1065341A) substantially.Because most optical imaging system is vertically arranged as receiving plane and optical axis, so the object that utilizes axial automatic focusing can reach within the depth of field can blur-free imaging.In the optical imaging system of reality, it is that the imaging object plane becomes a slanted angle with the optical axis of imaging system that the important system of a class is arranged, such as surface plasma resonance imaging technology, ellipsometry imaging system etc.Because object plane becomes a slanted angle with optical axis, know that by imaging theory the picture of the object plane of inclination behind lens also is a plane with inclined light shaft.This type systematic must satisfy image planes simultaneously and overlap and the angle coincidence with the axial location of picture receiving device.If only utilize axial automatic focusing method, can only make on the sample one locally to focus on clear and can't realize that the global focus of image planes is clear.For this reason, angle automatic focusing method of the present utility model, can with axial automatic focusing method coupling, thereby make optical system after obtaining axially focusing, focus on clearly under the situation, the global focus that reaches image planes is effect clearly.
Summary of the invention
The purpose of this utility model is will solve existing optical imaging system and focus on the time, the problem that image planes overlap with picture receiving plane angle (being that angle is focused), thus make in the visual field global focus of image planes clear; Thereby provide a kind of object plane to become the angle automatic focusing system of the optical imaging system of a slanted angle (0 °<θ≤90 °) with optical axis.
The purpose of this utility model is achieved in that
A kind of object plane that the utility model provides carries out the imaging system of angle automatic focusing when becoming slanted angle (0 °<θ≤90 °) with optical axis, comprise four parts:
(1) at least one imaging len 3, this imaging len 3 are placed in the light path of object 1 and image received device 5;
(2) image received devices 5 are used to receive optical imagery and are translated into electric signal, as charge-coupled device (CCD) and complementary metal oxide semiconductor (CMOS) (CMOS) imageing sensor;
(3) at least one is in order to control driving and the control device that relevant image-forming block is rotated the image-forming block of motion;
(4) at least one image that is used for that system is obtained carries out image analysis processing system 7 (this angle focus control as shown in Figure 1), wherein pass through by the definite optical axis of imaging len as the image sensing surface geometric center of receiving trap, and be in object plane on the axial location of corresponding object point conjugation, can in the plane of incidence, be rotated around axis as receiving trap 5 by the image sensing surface geometric center; As receiving trap 5 optical imagery that receives is changed into electric signal, and, the electric signal of image is sent to image analysis processing system 7 by being electrically connected with image analysis processing system 7; Driving and control device with carry out mechanical connection as receiving trap 5 and be connected with electric control, be rotated along the image sensing surface center as receiving trap 5 thereby drive; Graphical analysis and disposal system 7 are electrically connected with driving and control device by cable carries out exchanges data, thereby as receiving trap 5 rotations, image analysis processing system 7 obtains the self-driven positional information of feeding back with control device as the receiving trap rotation to the reception of driving and control device on the other hand from the instruction driving of image analysis processing system 7 on the one hand.
In said apparatus, also be included in the light path between object and the lens variable optical attenuator is set, described variable optical attenuator comprises diaphragm, attenuator or linear polarization.
In said apparatus, the image analysis processing system comprises: computing machine or also can adopt other single-chip microcomputer, electronic circuits such as single card microcomputer are realized the control to system.
In said apparatus, driving and control device comprise: motor 5B and motor driver 5D, electric rotary table 5A, and the position sensing feedback assembly of picture receiving trap; Wherein motor 5B and driver 5D are electrically connected, and the control device of motor driver is electrically connected with driver 5D and position sensing feedback assembly respectively, and motor 5B is installed on the electric rotary table 5A.
In said apparatus, be installed on the electric rotary table 5A as receiving trap 5, guarantee the image sensing surface center line and the universal stage dead in line of video camera during installation, electric rotary table 5A and motor 5B electrically connect, and motor 5B and driver 5D are electrically connected and receive the control signal from motor control card.Comprise that also electric rotary table 5A is installed on the support 6, this support 6 is installed on the guide rail 4; Motor 6B is connected with leading screw 6C, and it is fixing that leading screw 6C cooperates with support 6 usefulness nut 6E, and motor 6B is electrically connected with its driver 6D, and driver 6D is electrically connected with stepping motor control card in the computing machine 17, and reception is from the control signal of motor control card.Comprise that also lens 3 are installed on the support 3A, support 3A is installed on the guide rail 4, and motor 3B is connected with leading screw 3C, and leading screw 3C cooperates fixing with lens carrier 3A with nut 3E.
In said apparatus, described picture receives image device 5 and comprises: charge-coupled image sensor, cmos image sensor or array photoelectricity converted image sensor.
In said apparatus, described motor comprises: stepper motor, servomotor.
Advantage of the present utility model is: the angle automatic focusing system of a kind of optical imaging system that the utility model provides is the optical imaging system that becomes a slanted angle (0 °<θ≤90 °) at object plane with optical axis, remedy axial focus adjustment method and can only reach on the image planes the local deficiency that focuses on, thus image planes integral body effect clearly when reaching focusing.
Apparatus structure of the present utility model is simple, is easy to regulate, and carries out work under the angle automatic focusing method that the utility model provides, and can realize the whole clear of image planes.
Description of drawings
Fig. 1 is that the angle automatic focusing system of the utility model optical imaging system is formed synoptic diagram
Fig. 2 is the process flow diagram of the angle automatic focusing process of a kind of optical imaging system of the present utility model
Fig. 3 is that the angle automatic focusing system embodiment of a kind of optical imaging system of the present utility model forms synoptic diagram
Fig. 4 is that the normalized curve drawing of the angle position-evaluation function value of the utility model focus adjustment process indicates:
Stepping motor 2B driver 2D gear train 2C
Motor 3B leading screw 3C driver 3D
Embodiment
The 1 pair of the utility model preferable system embodiment made from reference to the accompanying drawings, and be explained in detail in conjunction with automatic focusing method.
With reference to the accompanying drawings 3, in the system of present embodiment, target object can also adopt white light source or other to throw light on, and can adopt in the light path to add diaphragm or two linear polarizations 2 between object 1 and lens 3, can change the light intensity that incides on the CCD video camera.Wherein linear polarization device 2 is installed on the support 2A, and stepping motor 2B can drive linear polarization device 2 by the gear train 2C on the support and be rotated around its central shaft; Stepping motor 2B is electrically connected with driver 2D, and driver 2D and stepping motor control card in the computing machine 7 are electrically connected and receive the control signal from stepping motor control card.
The picture receiving trap adopts the CCD video camera, CCD video camera 5 is installed on the electric rotary table 5A, guarantee the image sensing surface center line and the universal stage dead in line of video camera during installation, universal stage is driven by stepper motor 5B, and stepper motor 5B and driver 5D are electrically connected and receive the control signal from stepping motor control card.Universal stage is installed on the support 6, and this support is installed on the guide rail 4 to carry out translation.Stepper motor 6B is connected with leading screw 6C, and leading screw 6C cooperates with nut 6E on the support 6, carries out translation to drive support 6 along guide rail 4, realizes the axial translation of CCD video camera 5 is regulated.Stepper motor 6B is electrically connected with its driver 6D, and driver 6D and stepping motor control card in the computing machine 17 are electrically connected and receive the control signal from stepping motor control card.
In said apparatus, driving and control device comprise: motor 5B and motor driver 5D, electric rotary table 5A, and the position sensing feedback assembly of picture receiving trap (illustrate in the drawings, present embodiment adopts commercially available rotary encoder); Wherein motor 5B and driver 5D are electrically connected, and the control device of motor driver is electrically connected with driver 5D and position sensing feedback assembly respectively, and motor 5B is installed on the electric rotary table 5A.
Comprised following four parts in the described computing machine 7:
● image analysis processing software: the image from image pick-up card is carried out analyzing and processing, regulate for imaging system and prepare;
● Control Software: imaging multiplying power and focusing situation to system are judged, send motor message for driver 2D, 3D, 5D, the 6D of linear polarization device 2, lens 3 and CCD video camera 5 by stepping motor control card;
● stepping motor control card: send motor message respectively for stepping motor driver 2D, 3D, 5D, 6D, respectively drive stepping motor 2B, 3B, 5B, 6B rotate, thus realized linear polarization device 2 around the rotation of optical axis, lens 3 along the translation of optical axis, CCD video camera 5 along optical axis translation and along the rotation of image sensing surface central axis;
● image pick-up card: receive the image that is obtained from CCD video camera 5, the row format conversion of going forward side by side, thus image transitions is become the picture format that the image analysis processing software in the computing machine can analyze and handle (as, tiff format);
In the system of the foregoing description, also can adopt a stepper motor to come drive lens and CCD video camera to carry out translation, this situation is also contained among the utility model.
In the system of the foregoing description, image processing system (as, the computing machine 5 in the example) also can adopt other single-chip microcomputer, and electronic circuits such as single card microcomputer are realized the control to system.
Use the angle automatic focusing system of optical imaging system of the present utility model and realize image planes global focus method clearly, comprise the steps (process flow diagram is seen Fig. 2):
(1) at first adjust as the image sensing surface geometric center of receiving trap optical axis by determining by imaging len, and be in object plane on the axial location of corresponding object point conjugation; This can realize by the method instrumentality distance or the image distance of manual focusing or axial automatic focusing; Zone within this moment image sensing surface center focal depth range reaches and focuses on clearly, according to result of calculation universal stage is driven into the neighborhood that image sensing surface is in the ideal image angle then;
(2) on image, choose the zone of one or more reflection sample global features as the automatic focusing zone;
(3) with selected step pitch (such as, be not more than minimum half the step pitch that allows the angle error of focusing) axis that image sensing surface is centered on by its geometric center rotates a step pitch in the plane of incidence, utilize the image analysis processing system to carry out image acquisition then;
(4) utilize in focusing range, have unimodality, highly sensitive, signal to noise ratio (S/N ratio) is high, the autofocusing evaluation function of the little characteristics of operand carries out sharpness computation to the automatic focusing zone of choosing in the step (2), obtains the evaluation function value U of this moment
0
(5) before and after theoretical angle position in certain angular range (as, in the 10-20 of minimum angles permissible error angular range doubly) repeat step (3)~(4) operation, obtain n autofocusing evaluation function value U
i(i=1,2 ... n), select a maximum U therein
Max, its corresponding angle position is P
Max
(6) image sensing surface is rotated to the position P of evaluation function correspondence when getting maximal value
Max, be the angle position of optimum focusing.
Can select the Laplacian function for use at the image sharpness evaluation function described in the above-mentioned angle automatic focusing method of the present utility model; Its form is as follows:
FM
Lap=∑∑[
2g(x,y)]
2
Wherein,
2G (x, y)=4g (x, y)-g (x, y+1)-g (x, y-1)-g (x+1, y)-g (x-1, y).
In above-mentioned automatic focusing method, also wrap: draw together focus effect in order to obtain, by suitable optical imagery condition is set, such as, control the electron gain of incident light energy and image device by regulating diaphragm, make optical imagery have certain brightness.
In above-mentioned automatic focusing method, also comprise:, utilize as receiving device (as, Array CCD sensor) and grasp the be reduced sample image of random noise of method that multiple image carries out integral mean continuously in order to improve the sensitivity of focusing function.
Present embodiment uses that the angle position of angle automatic focusing method of the present utility model in the focus adjustment process---the normalized curve of evaluation function value as shown in Figure 4.This curve adopts the Laplacian evaluation function as the image sharpness evaluation function, and the image pretreatment mode of employing is 100 width of cloth consecutive image time integral averaging methods.As can be seen from the figure, this curve has only one maximal value in whole focusing process, and the angle of maximum of points place ccd video camera image sensing surface is best focus position.
Claims (8)
1. carry out the imaging system of angle automatic focusing when an object plane becomes slanted angle with optical axis, comprise a picture receiving trap (5) and at least one imaging len (3), this imaging len (3) is placed in the light path of object (1) and picture receiving trap (5); It is characterized in that: comprise that also at least one is in order to control driving and the control device that relevant image-forming block is rotated the image-forming block of motion; Carry out image analysis processing system (7) with at least one image that is used for that system is obtained; Wherein as the image sensing surface geometric center of receiving trap (5) optical axis by determining by imaging len (3), and be in object plane on the axial location of corresponding object point conjugation; Picture receiving trap (5) is by being electrically connected to image analysis processing system (7); Image analysis processing system (7) is electrically connected with driving and control device by cable.
2. carry out the imaging system of angle automatic focusing when becoming slanted angle by the described object plane of claim 1 with optical axis, it is characterized in that: described driving and control device comprise: motor (5B) and motor driver (5D), electric rotary table (5A), and the position sensing feedback assembly of picture receiving trap; Wherein motor (5B) and driver (5D) are electrically connected, and the control device of motor driver is electrically connected with driver (5D) and position sensing feedback assembly respectively, and motor (5B) is installed on the electric rotary table (5A).
3. carry out the imaging system of angle automatic focusing when becoming slanted angle by the described object plane of claim 1 with optical axis, it is characterized in that: described picture receiving trap (5) is installed on the electric rotary table (5A), its image sensing surface center line and universal stage dead in line, electric rotary table (5A) electrically connects with motor (5B), and motor (5B) is electrically connected with driver (5D).
4. carry out the imaging system of angle automatic focusing when becoming slanted angle by the described object plane of claim 3 with optical axis, it is characterized in that: comprise that also electric rotary table (5A) is installed on the support (6), this support (6) is installed on the guide rail (4); Motor (6B) is connected with leading screw (6C), leading screw (6C) cooperates fixing with support (6) with nut (6E), motor (6B) is electrically connected with its driver (6D), driver (6D) is electrically connected with stepping motor control card in the computing machine (17), and receives the control signal from motor control card.
5. carry out the imaging system of angle automatic focusing when becoming slanted angle by the described object plane of claim 3 with optical axis, it is characterized in that: comprise that also lens (3) are installed on the support (3A), support (3A) is installed on the guide rail (4), motor (3B) is connected with leading screw (3C), and leading screw (3C) cooperates fixing with lens carrier (3A) with nut (3E).
6. carry out the imaging system of angle automatic focusing when becoming slanted angle by the described object plane of claim 1 with optical axis, it is characterized in that: described picture receiving trap (5) is a CC D video camera.
7. carry out the imaging system of angle automatic focusing when becoming slanted angle by the described object plane of claim 1 with optical axis, it is characterized in that: also be included between object and the lens variable optical attenuator is set; Described variable optical attenuator is diaphragm or linear polarization.
8. carry out the imaging system of angle automatic focusing when becoming slanted angle by the described object plane of claim 1 with optical axis, it is characterized in that: described image analysis processing system (7) is computing machine.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200420003596 CN2690905Y (en) | 2004-02-17 | 2004-02-17 | Automatic angle focusing imaging system when object plane and light shaft forming inclined intersection angle |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200420003596 CN2690905Y (en) | 2004-02-17 | 2004-02-17 | Automatic angle focusing imaging system when object plane and light shaft forming inclined intersection angle |
Publications (1)
Publication Number | Publication Date |
---|---|
CN2690905Y true CN2690905Y (en) | 2005-04-06 |
Family
ID=34667718
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 200420003596 Expired - Fee Related CN2690905Y (en) | 2004-02-17 | 2004-02-17 | Automatic angle focusing imaging system when object plane and light shaft forming inclined intersection angle |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN2690905Y (en) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102147556A (en) * | 2011-03-09 | 2011-08-10 | 华为终端有限公司 | Focusing method and device for mobile device and mobile device |
CN103064231A (en) * | 2013-02-01 | 2013-04-24 | 信利光电(汕尾)有限公司 | Mobile equipment focusing method and device and mobile equipment |
CN104482878A (en) * | 2014-12-04 | 2015-04-01 | 华中科技大学 | Large-area online measurement device and method for geometrical parameters of nano-structure |
CN105241637A (en) * | 2015-09-02 | 2016-01-13 | 天津大学 | Object plane inclined imaging system sampling volume measurement method |
CN105446055A (en) * | 2014-06-16 | 2016-03-30 | 南昌欧菲光电技术有限公司 | Camera module group and focusing method therefor |
CN105652576A (en) * | 2016-03-09 | 2016-06-08 | 宁波萨瑞通讯有限公司 | Device and method for automatically adjusting projection position of projector |
CN106596052A (en) * | 2016-12-29 | 2017-04-26 | 深圳市维度科技有限公司 | Automatic angle adjustment mechanism for interferometer, and angle control method thereof |
CN107144962A (en) * | 2017-06-06 | 2017-09-08 | 南京信息工程大学 | A kind of system and method for finding the optimal running parameter of imaging system |
CN107619848A (en) * | 2017-09-08 | 2018-01-23 | 江苏大学 | The interference light source optimization experimental provision and method of Cell-oriented Activity determination |
CN110441311A (en) * | 2019-07-22 | 2019-11-12 | 中国科学院上海光学精密机械研究所 | The multifocal camera lens of multiaxis for the imaging of more object planes |
CN113204155A (en) * | 2021-04-28 | 2021-08-03 | 上海孟非自动化科技有限公司 | Method and device for rapid focusing and accurate distance measurement |
-
2004
- 2004-02-17 CN CN 200420003596 patent/CN2690905Y/en not_active Expired - Fee Related
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102147556B (en) * | 2011-03-09 | 2012-08-29 | 华为终端有限公司 | Focusing method and device for mobile device and mobile device |
CN102147556A (en) * | 2011-03-09 | 2011-08-10 | 华为终端有限公司 | Focusing method and device for mobile device and mobile device |
CN103064231A (en) * | 2013-02-01 | 2013-04-24 | 信利光电(汕尾)有限公司 | Mobile equipment focusing method and device and mobile equipment |
CN105446055A (en) * | 2014-06-16 | 2016-03-30 | 南昌欧菲光电技术有限公司 | Camera module group and focusing method therefor |
CN104482878A (en) * | 2014-12-04 | 2015-04-01 | 华中科技大学 | Large-area online measurement device and method for geometrical parameters of nano-structure |
CN105241637A (en) * | 2015-09-02 | 2016-01-13 | 天津大学 | Object plane inclined imaging system sampling volume measurement method |
CN105652576B (en) * | 2016-03-09 | 2017-09-26 | 宁波萨瑞通讯有限公司 | The adjusting device and method of adjust automatically projector position |
CN105652576A (en) * | 2016-03-09 | 2016-06-08 | 宁波萨瑞通讯有限公司 | Device and method for automatically adjusting projection position of projector |
CN106596052A (en) * | 2016-12-29 | 2017-04-26 | 深圳市维度科技有限公司 | Automatic angle adjustment mechanism for interferometer, and angle control method thereof |
CN107144962A (en) * | 2017-06-06 | 2017-09-08 | 南京信息工程大学 | A kind of system and method for finding the optimal running parameter of imaging system |
CN107144962B (en) * | 2017-06-06 | 2019-06-21 | 南京信息工程大学 | A kind of system and method for finding the optimal running parameter of imaging system |
CN107619848A (en) * | 2017-09-08 | 2018-01-23 | 江苏大学 | The interference light source optimization experimental provision and method of Cell-oriented Activity determination |
CN107619848B (en) * | 2017-09-08 | 2020-01-24 | 江苏大学 | Interference light source optimization experimental device and method for cell activity detection |
CN110441311A (en) * | 2019-07-22 | 2019-11-12 | 中国科学院上海光学精密机械研究所 | The multifocal camera lens of multiaxis for the imaging of more object planes |
CN110441311B (en) * | 2019-07-22 | 2021-10-08 | 中国科学院上海光学精密机械研究所 | Multi-axis and multi-focus lens for multi-object plane imaging |
CN113204155A (en) * | 2021-04-28 | 2021-08-03 | 上海孟非自动化科技有限公司 | Method and device for rapid focusing and accurate distance measurement |
CN113204155B (en) * | 2021-04-28 | 2022-04-22 | 上海孟非自动化科技有限公司 | Method and device for rapid focusing and accurate distance measurement |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN2690905Y (en) | Automatic angle focusing imaging system when object plane and light shaft forming inclined intersection angle | |
CN1296742C (en) | Angular automatic focusing system and method for optical imaging system | |
CN1112798C (en) | Contact type image sensor and information processing apparatus | |
CN1160556C (en) | Plane ray-detector unit and X-ray pic-up device | |
US20100289891A1 (en) | Apparatus for inspecting object under inspection | |
CN1479868A (en) | Off-center tomosynthesis | |
CN1216103A (en) | Angle detection method for bending machine, angle detection apparatus and angle sensor | |
CN1137409C (en) | Automatic focusing method | |
CN1808174A (en) | Beam irradiation device | |
CN1237364C (en) | Automatic focussing method and apparatus | |
CN1740759A (en) | Laser beam parameter measuring method based on image processing | |
CN1917812A (en) | Targeting system and method of targeting | |
CN1296767C (en) | Lens apparatus and camera | |
CN1364279A (en) | Image reader | |
CN1129866C (en) | Image scanning unit | |
CN101051107A (en) | Automatic alignment method for coupling light cone and CCD | |
CN1419147A (en) | Automatic focusing regulation method and device for multiple variable ptial imaging system of 3D object | |
CN2583668Y (en) | Device for proceeding measuring and analysis of structure and composition of combined sample | |
EP3461114A1 (en) | Contact image sensor and image scanning device | |
CN1313817C (en) | Multifunctional optical quality detection device | |
US7397894B2 (en) | Transmission imager | |
CN1611986A (en) | Multibeam light source unit, laser scanning apparatus and assembling method | |
CN210072282U (en) | Automatic focusing device | |
CN1131415C (en) | Device and apparatus for calibration of elements | |
CN1776472A (en) | New optical fiber collimator packaging process |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20050406 |