CN106594070B - 基于柔性结构的次纳米级精密驱动工作台 - Google Patents
基于柔性结构的次纳米级精密驱动工作台 Download PDFInfo
- Publication number
- CN106594070B CN106594070B CN201611192773.XA CN201611192773A CN106594070B CN 106594070 B CN106594070 B CN 106594070B CN 201611192773 A CN201611192773 A CN 201611192773A CN 106594070 B CN106594070 B CN 106594070B
- Authority
- CN
- China
- Prior art keywords
- workbench
- sliding block
- grating encoder
- flexible structure
- precision
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/04—Ball or roller bearings
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B9/00—Housing or supporting of instruments or other apparatus
- G12B9/08—Supports; Devices for carrying
- G12B9/10—Instruments boards; Panels; Desks; Racks
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Bearings For Parts Moving Linearly (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201611192773.XA CN106594070B (zh) | 2016-12-21 | 2016-12-21 | 基于柔性结构的次纳米级精密驱动工作台 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201611192773.XA CN106594070B (zh) | 2016-12-21 | 2016-12-21 | 基于柔性结构的次纳米级精密驱动工作台 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106594070A CN106594070A (zh) | 2017-04-26 |
CN106594070B true CN106594070B (zh) | 2019-09-27 |
Family
ID=58602238
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201611192773.XA Active CN106594070B (zh) | 2016-12-21 | 2016-12-21 | 基于柔性结构的次纳米级精密驱动工作台 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN106594070B (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108015564A (zh) * | 2017-12-19 | 2018-05-11 | 广东工业大学 | 一种超声辅助克服摩擦直线运动平台 |
DE102019101974A1 (de) * | 2019-01-28 | 2020-07-30 | Man Energy Solutions Se | Gleitlager mit additiv gefertigten Strukturen |
CN110202472B (zh) * | 2019-05-31 | 2021-11-16 | 西安理工大学 | 闭式静压导轨运动精度的压电调控装置及压电调控方法 |
TWI735295B (zh) * | 2020-07-24 | 2021-08-01 | 潤達精密股份有限公司 | 線性致動裝置 |
CN112879427B (zh) * | 2021-03-01 | 2022-03-29 | 东台超德机械有限公司 | 一种带有便于拆装滑块的低阻直线导轨 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002156480A (ja) * | 2000-11-15 | 2002-05-31 | Fujitsu Ltd | ステージ移動機構 |
CN1701925A (zh) * | 2005-07-22 | 2005-11-30 | 北京航空航天大学 | 带双边直线电机同步驱动的h型气浮工作台 |
CN101770166A (zh) * | 2010-01-06 | 2010-07-07 | 天津大学 | 一种用于纳米压印光刻***的两平动精密定位工作台 |
CN102543217A (zh) * | 2012-01-20 | 2012-07-04 | 澳门大学 | 宏微驱动二维一体式微定位平台 |
CN103252761A (zh) * | 2013-04-28 | 2013-08-21 | 合肥工业大学 | 具有角度补偿功能的大行程二维纳米工作台*** |
JP2015117958A (ja) * | 2013-12-17 | 2015-06-25 | 日本精工株式会社 | XYθテーブル装置 |
CN106002312A (zh) * | 2016-06-29 | 2016-10-12 | 广东工业大学 | 一种单驱动刚柔耦合精密运动平台及其实现方法及应用 |
-
2016
- 2016-12-21 CN CN201611192773.XA patent/CN106594070B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002156480A (ja) * | 2000-11-15 | 2002-05-31 | Fujitsu Ltd | ステージ移動機構 |
CN1701925A (zh) * | 2005-07-22 | 2005-11-30 | 北京航空航天大学 | 带双边直线电机同步驱动的h型气浮工作台 |
CN101770166A (zh) * | 2010-01-06 | 2010-07-07 | 天津大学 | 一种用于纳米压印光刻***的两平动精密定位工作台 |
CN102543217A (zh) * | 2012-01-20 | 2012-07-04 | 澳门大学 | 宏微驱动二维一体式微定位平台 |
CN103252761A (zh) * | 2013-04-28 | 2013-08-21 | 合肥工业大学 | 具有角度补偿功能的大行程二维纳米工作台*** |
JP2015117958A (ja) * | 2013-12-17 | 2015-06-25 | 日本精工株式会社 | XYθテーブル装置 |
CN106002312A (zh) * | 2016-06-29 | 2016-10-12 | 广东工业大学 | 一种单驱动刚柔耦合精密运动平台及其实现方法及应用 |
Also Published As
Publication number | Publication date |
---|---|
CN106594070A (zh) | 2017-04-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN106594070B (zh) | 基于柔性结构的次纳米级精密驱动工作台 | |
US10661399B2 (en) | Single-drive rigid-flexible coupling precision motion platform and realization method and application thereof | |
CN106891306B (zh) | 基于变刚度柔性结构的磁辅助激励精密驱动工作台 | |
CN103021473B (zh) | 一种直驱式运动解耦的高精度伺服平台 | |
KR101895960B1 (ko) | 위치 지정 들보 및 그 위치 지정 들보를 구비한 로봇 직선 운동 유닛 | |
US7901167B2 (en) | Machining apparatus with mechanism for retaining axial position of guide member | |
CN104950797B (zh) | 一种3-prrs六自由度并联定位平台 | |
CN102307031A (zh) | 一种永磁电磁相结合的磁悬浮直线运动平台 | |
CN204262872U (zh) | 直线电机共定子双驱动宏微一体化高速精密运动一维平台 | |
CN106272353A (zh) | 一种大行程高精度的平面三自由度柔顺并联机构 | |
CN102501224A (zh) | 一种平面型磁浮直线运动平台 | |
CN2536348Y (zh) | 整体式二维运动工作平台 | |
CN1528559A (zh) | 工业应用型主动磁悬浮机床导轨直线电机进给平台 | |
CN207888241U (zh) | 一种数控机床用大范围超精密定位工件台 | |
CN206154294U (zh) | 一种大行程高精度的平面三自由度柔顺并联机构 | |
CN208483834U (zh) | 环形导轨 | |
CN209054040U (zh) | 一种综合自锁机构 | |
CN202037455U (zh) | 一种五坐标定位机构 | |
CN212413024U (zh) | 一种直线电机驱动平台以及加工装置 | |
CN108214465A (zh) | 一种单轴机器人 | |
CN204221489U (zh) | 直线电机共定子多驱动宏微一体化高速精密运动二维平台 | |
CN112536580B (zh) | Xz轴高速高精度平台 | |
CN219006116U (zh) | 一种工业精密机械臂 | |
CN203852428U (zh) | 平衡式升降吊塔及其导向装置 | |
CN214171252U (zh) | 一种大行程多轴传龙门模组 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20210520 Address after: No.70, Jinye 1st Road, high tech Zone, Xi'an, Shaanxi 710000 Patentee after: SHAANXI OBOTR AUTOMATION TECHNOLOGY Co.,Ltd. Address before: 710048 No. 5 Jinhua South Road, Shaanxi, Xi'an Patentee before: XI'AN University OF TECHNOLOGY |
|
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 710000 No. 16, Shanglinyuan Third Road, high tech Zone, Xi'an, Shaanxi Patentee after: Shaanxi nobet Automation Technology Co.,Ltd. Address before: No.70, Jinye 1st Road, high tech Zone, Xi'an, Shaanxi 710000 Patentee before: SHAANXI OBOTR AUTOMATION TECHNOLOGY CO.,LTD. |