CN106546469B - 一种平板玻璃的电镜样品的制备方法 - Google Patents
一种平板玻璃的电镜样品的制备方法 Download PDFInfo
- Publication number
- CN106546469B CN106546469B CN201610931681.2A CN201610931681A CN106546469B CN 106546469 B CN106546469 B CN 106546469B CN 201610931681 A CN201610931681 A CN 201610931681A CN 106546469 B CN106546469 B CN 106546469B
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- China
- Prior art keywords
- plate glass
- mark zone
- platinum
- crystallization
- preparation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000005357 flat glass Substances 0.000 title claims abstract description 74
- 238000002360 preparation method Methods 0.000 title claims abstract description 27
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract description 173
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 87
- 238000002425 crystallisation Methods 0.000 claims abstract description 78
- 230000008025 crystallization Effects 0.000 claims abstract description 78
- 238000005260 corrosion Methods 0.000 claims abstract description 58
- 239000002253 acid Substances 0.000 claims abstract description 52
- 230000007797 corrosion Effects 0.000 claims abstract description 52
- 239000007788 liquid Substances 0.000 claims abstract description 44
- 238000005498 polishing Methods 0.000 claims abstract description 9
- 239000011248 coating agent Substances 0.000 claims abstract description 4
- 238000000576 coating method Methods 0.000 claims abstract description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 238000004140 cleaning Methods 0.000 claims description 7
- 244000137852 Petrea volubilis Species 0.000 claims description 6
- 239000002390 adhesive tape Substances 0.000 claims description 5
- 230000007547 defect Effects 0.000 abstract description 29
- 238000004031 devitrification Methods 0.000 abstract description 12
- 239000012535 impurity Substances 0.000 abstract description 2
- 239000011521 glass Substances 0.000 description 14
- 239000000758 substrate Substances 0.000 description 12
- 238000001035 drying Methods 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000000227 grinding Methods 0.000 description 3
- AFCARXCZXQIEQB-UHFFFAOYSA-N N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CCNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 AFCARXCZXQIEQB-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005816 glass manufacturing process Methods 0.000 description 1
- 239000000156 glass melt Substances 0.000 description 1
- 230000000266 injurious effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 150000003057 platinum Chemical class 0.000 description 1
- 231100000241 scar Toxicity 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/32—Polishing; Etching
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201610931681.2A CN106546469B (zh) | 2016-10-31 | 2016-10-31 | 一种平板玻璃的电镜样品的制备方法 |
Applications Claiming Priority (1)
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---|---|---|---|
CN201610931681.2A CN106546469B (zh) | 2016-10-31 | 2016-10-31 | 一种平板玻璃的电镜样品的制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN106546469A CN106546469A (zh) | 2017-03-29 |
CN106546469B true CN106546469B (zh) | 2019-03-12 |
Family
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CN201610931681.2A Active CN106546469B (zh) | 2016-10-31 | 2016-10-31 | 一种平板玻璃的电镜样品的制备方法 |
Country Status (1)
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CN (1) | CN106546469B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108061736B (zh) * | 2017-11-14 | 2020-11-13 | 东旭光电科技股份有限公司 | 使用反射电子探针对玻璃缺陷进行分析的方法 |
CN110455814A (zh) * | 2019-08-30 | 2019-11-15 | 彩虹显示器件股份有限公司 | 一种电子玻璃中针状异物成分的检测方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002122524A (ja) * | 2000-10-13 | 2002-04-26 | Sumitomo Metal Mining Co Ltd | 透過電子顕微鏡用試料の作製方法 |
CN102023108A (zh) * | 2009-09-23 | 2011-04-20 | 中芯国际集成电路制造(上海)有限公司 | 透射电子显微镜样品的制备方法 |
CN105651582A (zh) * | 2015-12-30 | 2016-06-08 | 芜湖东旭光电装备技术有限公司 | 一种玻璃针状缺陷反射电镜样品的制作方法 |
CN105717137A (zh) * | 2016-01-27 | 2016-06-29 | 中国建筑材料科学研究总院 | 石英玻璃微缺陷检测方法 |
-
2016
- 2016-10-31 CN CN201610931681.2A patent/CN106546469B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002122524A (ja) * | 2000-10-13 | 2002-04-26 | Sumitomo Metal Mining Co Ltd | 透過電子顕微鏡用試料の作製方法 |
CN102023108A (zh) * | 2009-09-23 | 2011-04-20 | 中芯国际集成电路制造(上海)有限公司 | 透射电子显微镜样品的制备方法 |
CN105651582A (zh) * | 2015-12-30 | 2016-06-08 | 芜湖东旭光电装备技术有限公司 | 一种玻璃针状缺陷反射电镜样品的制作方法 |
CN105717137A (zh) * | 2016-01-27 | 2016-06-29 | 中国建筑材料科学研究总院 | 石英玻璃微缺陷检测方法 |
Non-Patent Citations (1)
Title |
---|
TFT玻璃基板中的铂金粒子研究;张军锋;《玻璃深加工》;20141231(第12期);第44-45页 |
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CN106546469A (zh) | 2017-03-29 |
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Effective date of registration: 20200911 Address after: 050035 No. 9, the Yellow River Avenue, hi tech Zone, Hebei, Shijiazhuang Patentee after: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. Address before: The 100070 Beijing Seahawks Fengtai District Science City Road No. 9 Building No. 2 room 266 (Park) Co-patentee before: TUNGHSU GROUP Co.,Ltd. Patentee before: TUNGHSU TECHNOLOGY GROUP Co.,Ltd. |
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Application publication date: 20170329 Assignee: Zhuzhou Guoyang Photoelectric Technology Co.,Ltd. Assignor: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. Contract record no.: X2021110000027 Denomination of invention: A preparation method of electron microscope sample of flat glass Granted publication date: 20190312 License type: Common License Record date: 20210823 |
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Application publication date: 20170329 Assignee: Beijing Zhongding Weihe Technology Co.,Ltd. Assignor: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. Contract record no.: X2023110000063 Denomination of invention: A Method for Preparing Electron Microscope Samples of Flat Glass Granted publication date: 20190312 License type: Common License Record date: 20230515 Application publication date: 20170329 Assignee: Baotou Xingraw Material Technology Co.,Ltd. Assignor: Beijing Zhongding Weihe Technology Co.,Ltd. Contract record no.: X2023110000064 Denomination of invention: A Method for Preparing Electron Microscope Samples of Flat Glass Granted publication date: 20190312 License type: Fen Xuke Record date: 20230515 |