CN106505008B - A kind of support construction for preventing chamber cover board from falling - Google Patents
A kind of support construction for preventing chamber cover board from falling Download PDFInfo
- Publication number
- CN106505008B CN106505008B CN201510566063.8A CN201510566063A CN106505008B CN 106505008 B CN106505008 B CN 106505008B CN 201510566063 A CN201510566063 A CN 201510566063A CN 106505008 B CN106505008 B CN 106505008B
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- Prior art keywords
- support
- pin
- support plate
- plate
- locking
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Power Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Chemical & Material Sciences (AREA)
- Emergency Lowering Means (AREA)
- Sewing Machines And Sewing (AREA)
Abstract
A kind of support construction for preventing chamber cover board from falling, mainly solve control fault, the interlocking failure of the semiconductor equipment of existing chamber cover board automatic lifting, the security risk of cover board gravity fall is led to problems such as to be particularly acute, the present invention provides a kind of support construction for preventing chamber cover board from falling, including upper cover plate, cavity, guiding axis, the support construction further includes support device A, support device B.It is the configuration of the present invention is simple, easy to operate, using nylon material, guarantee absolute wearability, there is stronger safety.
Description
Technical field
The present invention relates to a kind of chamber cover board falling proof devices applied to semiconductor deposition equipment, in particular to a kind of anti-
The only support construction that chamber cover board falls.Belong to semiconductive thin film deposition applications and manufacturing technology field.
Background technique
Semiconductor equipment is made, in maintenance process, and the personal safety of operator is the most important thing.Prestige is caused to personal safety
There are many factor of the side of body, and except the chemistry such as gas, electromagnetic radiation is in addition to physical factor, mechanical wounding be can not be ignored.
Durings semiconductor equipment processing, maintenance etc., it is sometimes desirable to which operator opens chamber cover board, to check and safeguard
All parts in cavity.
And for the semiconductor equipment of chamber cover board automatic lifting, control fault, interlocking failure lead to cover board gravity
The security risk of whereabouts is particularly acute.It is mechanical interlocked as last safety guarantee, exist and effectiveness be all particularly important.
Summary of the invention
The present invention is mainly solved after cavity cover board rises for the purpose of solving the above problems since control fault, interlocking are lost
Effect, leads to security risk brought by the abnormal whereabouts of cover board and provides a kind of support construction for preventing chamber cover board from falling.It should
Support construction simple installation adapts to cavity and cover board contact face structure, diagonal to install, and side is using this dress of pin hole abutting joint
It sets, guiding axis installation is wrapped up in the other side, using nylon material, guarantees that absolute wearability, structure are simple.
To achieve the above object, the present invention adopts the following technical scheme:
A kind of support construction for preventing chamber cover board from falling, including upper cover plate, cavity, guiding axis, the support construction are also wrapped
Include support device A, support device B；The support device A includes support plate A, support plate B, locks pin locking device A, described
Support plate A is connect by hinge with lock-screw with the side support plate B, and the other side passes through locking pin locking dress by locking pin
It sets A support plate A and support plate B are fixed or opened；The support device B includes support plate C, support plate D, fixing pin installation
Hole, locking pin locking device B, the lower part support device B pin hole, pin hole, the side of support plate C and support plate D by hinge with
Support plate C and support plate D are fixed by locking pin by locking pin locking device B, are prevented by lock-screw connection, the other side
It opens, the fixing pin mounting hole in the top center of the support plate C and support plate D blocks fixing pin package, support plate C
Bottom is equipped with the lower part support device B pin hole；The upper cover plate bottom is equipped with upper cover plate dowel hole corresponding with fixing pin, institute
Cavity upper surface is stated equipped with pin corresponding with support device B lower part pin hole；The support device A guiding axis is wrapped up after again
It is fixed between upper cover plate and cavity by locking pin by locking pin locking device A, the fixing pin of the support device B
Installation corresponding with the upper cover plate dowel hole of the upper cover plate, support device B lower part pin hole are opposite with the pin of the cavity
It should install.
The support device A and support device B are diagonally installed between the upper cover plate and cavity.
The support device A and support device B is cylindrical shape.
The support plate A, support plate B, support plate C and support plate D are nylon material.
Beneficial effects of the present invention and feature:
The support construction for preventing chamber cover board from falling of the invention is fallen upper using the rounded face fitting of its support device
Cover board and cavity support cover board, prevent it from falling.It is the configuration of the present invention is simple, easy to operate, using nylon material, guarantee absolute
Wearability, have stronger safety.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of support device A1 of the invention；
Fig. 2 is the structural schematic diagram of support device B2 of the invention；
Fig. 3 is the structural schematic diagram of the support construction for preventing chamber cover board from falling of the invention.
Specific embodiment
Below with reference to embodiment, further the present invention is described in detail, but invents protection content and be not limited to the reality
Apply example:
Embodiment
Referring to Fig.1-3, a kind of support construction for preventing chamber cover board from falling, including upper cover plate 11, cavity 12, guiding axis
14, which further includes support device A1, support device B2；The support device A1 include support plate A3, support plate B4,
Lock pin locking device A5, the support plate A3 connect by hinge with lock-screw with the side support plate B4, the other side by
Support plate A and support plate B are fixed or are opened fixed or open by locking pin by locking pin locking device A5；The support
Device B2 includes support plate C6, support plate D7, fixing pin mounting hole 8, locking pin locking device B9, fixing pin 10, branch
The lower part support arrangement B pin hole 13, the support plate C6 is connect by hinge with lock-screw with the side of support plate D7, the other side by
Locking pin is fixed support plate C6 and support plate D7 by locking pin locking device B9, prevents from opening, support plate C6 and branch
The fixing pin mounting hole 8 in the top center of fagging D7 blocks the package of fixing pin 10, and the bottom support plate C6 is equipped with support dress
Set the lower part B pin hole 13；11 bottom of upper cover plate is equipped with upper cover plate dowel hole corresponding with fixing pin 10, the cavity 12
Upper surface is equipped with pin corresponding with support device B lower part pin hole 13；The support device A1 by guiding axis 14 wrap up after again
It is fixed between upper cover plate 11 and cavity 12 by locking pin by locking pin locking device A5, the support device B2's consolidates
10 installations corresponding with the upper cover plate dowel hole of the upper cover plate 11, the lower part support device B pin hole 13 and the chamber are followed closely in rationed marketing
The corresponding installation of pin on the upper surface of body 12.
The support device A1 and support device B2 is diagonally installed between the upper cover plate 11 and cavity 12.
The support device A1 and support device B2 is cylindrical shape.
The support plate A, support plate B, support plate C and support plate D are nylon material.
The locking pin locking device B9 is identical as the locking pin locking device A5 structure.
When work, after upper cover plate 11 rises, 14 side of guiding axis, opening locking pin locking device A5 makes support device A1
After guiding axis 14 is wrapped up, then by locking pin by lock pin locking device A5 be fixed on upper cover plate 11 and cavity 12 it
Between, support device B2 is fixed with locking pin by locking pin locking device B9, then will be consolidated by the diagonal side of guiding axis 14
Rationed marketing nail 10 is installed in fixing pin mounting hole 8, finally by the pin hole of the fixing pin 10 of support device B2 and upper cover plate 11
Corresponding, pin hole 13 is corresponding with the pin on the upper surface of cavity 12, keeps support device A1 vertical with support device B2's,
Decline upper cover plate 11, the fixing pin 10 of device B2 to be supported enters 11 pin hole of upper cover plate.
Claims (4)
1. a kind of support construction for preventing chamber cover board from falling, including upper cover plate, cavity, guiding axis, which is characterized in that the support
Structure further includes support device A, support device B；The support device A includes support plate A, support plate B, locking pin locking dress
A is set, the support plate A is connect by hinge with lock-screw with the side support plate B, and the other side passes through locking pin by locking pin
Support plate A and support plate B are fixed or are opened by sub- locking device A；The support device B includes support plate C, support plate D, fixation
Pin mounting hole, locking pin locking device B, fixing pin, the lower part support device B pin hole, the one of support plate C and support plate D
Side is connect by hinge with lock-screw, and the other side by support plate C and is supported by locking pin by locking pin locking device B
Plate D is fixed, and prevents from opening, and the fixing pin mounting hole in the top center of support plate C and support plate D, which wraps up fixing pin, to be blocked
Firmly, the bottom support plate C is equipped with the lower part support device B pin hole；The upper cover plate bottom is equipped with upper cover plate corresponding with fixing pin
Dowel hole, the cavity upper surface are equipped with pin corresponding with support device B lower part pin hole；The support device A will be led
It is fixed between upper cover plate and cavity by locking pin by locking pin locking device A again after to axis package, the support dress
The fixing pin for setting B installation corresponding with the upper cover plate dowel hole of the upper cover plate, support device B lower part pin hole and the chamber
The corresponding installation of the pin of body.
2. a kind of support construction for preventing chamber cover board from falling as described in claim 1, which is characterized in that the support device
A and support device B are diagonally installed between the upper cover plate and cavity.
3. a kind of support construction for preventing chamber cover board from falling as described in claim 1, which is characterized in that the support device
A and support device B is cylindrical shape.
4. a kind of support construction for preventing chamber cover board from falling as described in claim 1, which is characterized in that the support plate A,
Support plate B, support plate C and support plate D are nylon material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510566063.8A CN106505008B (en) | 2015-09-08 | 2015-09-08 | A kind of support construction for preventing chamber cover board from falling |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510566063.8A CN106505008B (en) | 2015-09-08 | 2015-09-08 | A kind of support construction for preventing chamber cover board from falling |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106505008A CN106505008A (en) | 2017-03-15 |
| CN106505008B true CN106505008B (en) | 2019-04-26 |
Family
ID=58286864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510566063.8A Active CN106505008B (en) | 2015-09-08 | 2015-09-08 | A kind of support construction for preventing chamber cover board from falling |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106505008B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108918036B (en) * | 2018-08-02 | 2024-02-23 | 广东光之典照明有限公司 | Line lamp waterproof test equipment protection device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004158642A (en) * | 2002-11-06 | 2004-06-03 | Toshiba Ceramics Co Ltd | Semiconductor wafer supporting device |
| CN102315145A (en) * | 2011-09-23 | 2012-01-11 | 北京七星华创电子股份有限公司 | Reaction-chamber cover plate and reaction chamber provided with same |
| CN104617016A (en) * | 2014-12-31 | 2015-05-13 | 上海新阳半导体材料股份有限公司 | Wafer processing unit |
| CN107949680A (en) * | 2015-07-15 | 2018-04-20 | 布劳恩惰性气体***有限公司 | Frame section bar element, wall elements and frame for clean gas chamber |
-
2015
- 2015-09-08 CN CN201510566063.8A patent/CN106505008B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004158642A (en) * | 2002-11-06 | 2004-06-03 | Toshiba Ceramics Co Ltd | Semiconductor wafer supporting device |
| CN102315145A (en) * | 2011-09-23 | 2012-01-11 | 北京七星华创电子股份有限公司 | Reaction-chamber cover plate and reaction chamber provided with same |
| CN104617016A (en) * | 2014-12-31 | 2015-05-13 | 上海新阳半导体材料股份有限公司 | Wafer processing unit |
| CN107949680A (en) * | 2015-07-15 | 2018-04-20 | 布劳恩惰性气体***有限公司 | Frame section bar element, wall elements and frame for clean gas chamber |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106505008A (en) | 2017-03-15 |
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| CP03 | Change of name, title or address |
Address after: No.900 Shuijia, Hunnan District, Shenyang City, Liaoning Province Patentee after: Tuojing Technology Co.,Ltd. Address before: 110179 3rd floor, No.1-1 Xinyuan street, Hunnan New District, Shenyang City, Liaoning Province Patentee before: PIOTECH Co.,Ltd. |
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| CP03 | Change of name, title or address |