CN102315145A - Reaction-chamber cover plate and reaction chamber provided with same - Google Patents
Reaction-chamber cover plate and reaction chamber provided with same Download PDFInfo
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- CN102315145A CN102315145A CN201110285858A CN201110285858A CN102315145A CN 102315145 A CN102315145 A CN 102315145A CN 201110285858 A CN201110285858 A CN 201110285858A CN 201110285858 A CN201110285858 A CN 201110285858A CN 102315145 A CN102315145 A CN 102315145A
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- reaction chamber
- plate
- connecting rod
- sheet door
- door
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Abstract
The invention relates to a reaction-chamber cover plate, which comprises a reaction-chamber baffle plate, a driving-sheet door plate, a connecting-rod mechanism and a motor; the reaction-chamber baffle plate is arranged on the lateral surface of a reaction chamber and is drilled with a square hole corresponding to a reaction-chamber inlet; the driving-sheet door plate can move on the reaction-chamber baffle plate; the connecting-rod mechanism comprises at least one connecting rod; and the driving-sheet door plate, the connecting-rod mechanism and the motor are sequentially connected, and the driving-sheet door plate can be driven to move by the connecting-rod mechanism under the driving of the motor to open or close the square hole on the reaction-chamber baffle plate. In the invention, a driving-sheet door is driven by adopting the connecting-rod mechanism, the structure is simple and easy to operate, the opening height is more easily controlled, and the motor is used for driving the connecting-rod mechanism to more easily control the opening and the closing of the driving-sheet door; and compared with cylinder driving, a cylinder gas source can be saved.
Description
Technical field
The present invention relates to field of semiconductor devices, be specifically related to a kind of reaction chamber cover plate and have the reaction chamber of this cover plate.
Background technology
When carrying out semiconductor technology, manipulator transmits wafer or from reaction chamber, takes out wafer in reaction chamber all need be through the structure of the door that can open automatically or close.In the semiconductor equipment in the past, automatic unlatching in the past or close the door structure drive by cylinder.Because pass the sheet door-plate mobile guide rail of mainly fixing through the door-plate both sides up and down, therefore, when mounted, the depth of parallelism of both sides guide rail requires very high.And when adopting the cylinder transmission, just need be very high to the depth of parallelism requirement of cylinder piston rod and guide rail, so just strengthened the difficulty when installing.If the parallelism error of guide rail and cylinder piston rod is bigger, passing film gate can be stuck in opening the process of closing, and not only can damage manipulator, also can cause the wafer in the reaction chamber to be polluted, and has a strong impact on technological effect.And when adopting cylinder, also need the compressed air with certain degree of purity be provided to cylinder, so just increased the complexity that equipment medium uses.If the compressed air degree of purity that uses is not high, not only can reduce the useful life of cylinder, bring harm also can for the device interior microenvironment, make the wafer that cleaned contaminated once more.
Summary of the invention
The technical problem that (one) will solve
The purpose of this invention is to provide a kind of simple, reliable mechanical hand and pass reaction chamber cover plate that film gate opens and closes automatically and reaction chamber with this cover plate.
(2) technical scheme
In order to solve the problems of the technologies described above, the present invention provides a kind of reaction chamber cover plate, comprising: reaction chamber dividing plate, biography sheet door-plate, linkage and motor; Said reaction chamber dividing plate is located at reaction chamber top, and has the square hole corresponding to the reaction chamber inlet; Said biography sheet door-plate can move on said reaction chamber dividing plate; Said linkage comprises at least one connecting rod; Said biography sheet door-plate, linkage, motor connect successively, and linkage can drive under the driving of motor and pass the motion of sheet door-plate, so that the square hole on the reaction chamber dividing plate is opened or closed.
Preferably, the square hole both sides of said reaction chamber dividing plate are provided with the door-plate guide rail, pass sheet door-plate both sides and are provided with the guide rail slide block, pass the sheet door-plate and move on said door-plate guide rail through the guide rail slide block.
Preferably, the length of said door-plate guide rail is decided according to the distance that passes the motion of sheet door-plate.
Preferably, the size of said biography sheet door-plate is decided according to the size of the square hole of reaction chamber dividing plate.
Preferably, this reaction chamber is the semiconductor reaction chamber, passes through manipulator and gets wafer, and the size of said square hole is decided according to the size of manipulator and the size of wafer.
Preferably, said linkage is a double connecting rod, comprises first connecting rod and second connecting rod, passes the sheet door-plate and is connected with first connecting rod, and first connecting rod is connected through rotating shaft with second connecting rod, and two connecting rods can relatively rotate around the shaft; Second connecting rod is connected with motor, when motor shaft rotates, can drive second connecting rod and rotate together, moves on the reaction chamber dividing plate thereby drive biography sheet door-plate.
Preferably; Said linkage is a quadric chain; Comprise two first connecting rods, second connecting rod and third connecting rods; Pass the sheet door-plate first connecting rod identical with two and connect, these two first connecting rods are connected through rotating shaft with the two ends of third connecting rod, and two first connecting rods can relatively rotate with third connecting rod around the shaft; Second connecting rod is connected through the rotating shaft in the middle of the third connecting rod with third connecting rod, and through rotating shaft, second connecting rod and third connecting rod can relatively rotate; Second connecting rod is connected with motor, when motor shaft rotates, can drive second connecting rod and rotate together, and second connecting rod, third connecting rod and two first connecting rods are formed linkage, moves on the reaction chamber dividing plate thereby drive biography sheet door-plate.
The present invention also provides a kind of reaction chamber of above-mentioned reaction chamber cover plate, also comprises: cavity, said reaction chamber cover plate are used for chamber environment of living in and external environment are kept apart.
Preferably, this reaction chamber is the semiconductor reaction chamber.
(3) beneficial effect
1, the transmission of employing linkage passes film gate, and is simple for structure, is easier to control the height of unlatching.
2, use the motor-driven linkage to control the switch that passes film gate, relatively easy to control, compare with adopting the cylinder transmission, can save the cylinder source of the gas.
Description of drawings
Fig. 1 is the structure chart of reaction chamber dividing plate among the present invention;
Structure chart when Fig. 2 adopts two linkages for the present invention;
Structure chart when the biography film gate was all opened when Fig. 3 adopted two linkages for the present invention;
Structure chart when passing the film gate Close All when Fig. 4 adopts two linkages for the present invention;
Structure chart when Fig. 5 adopts four linkages for the present invention;
Structure chart when the biography film gate was all opened when Fig. 6 adopted four linkages for the present invention;
Structure chart when passing the film gate Close All when Fig. 7 adopts four linkages for the present invention.
Wherein, 1: the reaction chamber dividing plate; 2: square hole; 3: the door-plate guide rail; 4: pass the sheet door-plate; 5: the guide rail slide block; 6: first connecting rod; 7: second connecting rod; 8: third connecting rod; 9: motor.
Embodiment
Below in conjunction with accompanying drawing and embodiment, specific embodiments of the invention describes in further detail.Following examples are used to explain the present invention, but are not restriction scopes of the present invention.
As shown in Figure 2, the structure chart for reaction chamber cover plate one embodiment according to the invention comprises: reaction chamber dividing plate 1, biography sheet door-plate 4, linkage and motor 9; Said reaction chamber dividing plate 1 is located at the reaction chamber side, and has the square hole 2 (as shown in Figure 1) corresponding to the reaction chamber inlet; Door-plate guide rail 3 is fixed on the reaction chamber dividing plate 1, and guide rail slide block 5 links together with door-plate guide rail 3, and guide rail slide block 5 can move along door-plate guide rail 3.Passing sheet door-plate 4 is fixed together with guide rail slide block 5.Passing sheet door-plate 4 relies on guide rail slide block 5 on door-plate guide rail 3, to move; Said linkage is a double connecting rod, comprises first connecting rod 6 and second connecting rod 7, passes sheet door-plate 4 and is connected with first connecting rod 6, and first connecting rod 6 and second connecting rod 7 are connected through rotating shaft, and two connecting rods can relatively rotate around the shaft; Second connecting rod 7 is connected with motor 9, when motor shaft rotates, can drive second connecting rod 7 and rotate together, moves on reaction chamber dividing plate 1 thereby drive biography sheet door-plate 4.Said biography sheet door-plate 4, linkage, motor 9 connect successively, and linkage can drive under the driving of motor 9 and pass 4 motions of sheet door-plate, so that the square hole on the reaction chamber dividing plate 2 is opened or closed.
The length of said door-plate guide rail 3 can be decided according to the distance that passes 4 motions of sheet door-plate.The size of said biography sheet door-plate 4 is decided according to the size of the square hole 2 of reaction chamber dividing plate.The size of said square hole 2 is decided according to the size of manipulator and the size of wafer.
When manipulator need pass when getting wafer; Apparatus control system control motor 9 rotates; Motor 9 drivening rod mechanisms (first connecting rod 6 and second connecting rod 7) rotate; First connecting rod 6 drives and passes sheet door-plates 4 and move to the position that reaction chamber dividing plate square hole 2 opens fully along door-plate guide rail 3 and stop, and waits for that manipulator is accomplished to pass to get wafer action (position as shown in Figure 3).
When manipulator completion biography is got the wafer action, need in time reaction chamber dividing plate square hole 2 is closed.Apparatus control system control motor 9 rotates; Motor 9 drivening rod mechanisms (first connecting rod 6 and second connecting rod 7) rotate; First connecting rod 6 drives and passes sheet door-plates 4 and move to the position that reaction chamber dividing plate square hole 2 closes fully along door-plate guide rail 3 and stop, and waits for that manipulator passes next time to get wafer action beginning (position as shown in Figure 4).
In the process that biography sheet door-plate 4 moves up and down, pass main stressed the coming from and first connecting rod 6 junctions of sheet door-plate.Extreme position for fear of at connecting rod is stuck, when concrete size design, should avoid first connecting rod 6 at vertical direction.
As shown in Figure 5; Be the structure chart of another embodiment of reaction chamber cover plate according to the invention, be that with the difference of previous embodiment said linkage is a quadric chain; Comprise two first connecting rods 6, second connecting rod 7 and third connecting rod 8; Pass sheet door-plate 4 and connect with two identical first connecting rods 6, these two first connecting rods 6 are connected through rotating shaft with the two ends of third connecting rod 8, and two first connecting rods 6 can relatively rotate with third connecting rod 8 around the shaft; Second connecting rod 7 is connected through the rotating shaft in the middle of the third connecting rod 8 with third connecting rod 8, and through rotating shaft, second connecting rod 7 can relatively rotate with third connecting rod 8; Second connecting rod 7 is connected with motor 9, when motor shaft rotates, can drive second connecting rod 7 and rotate together, and second connecting rod 7, third connecting rod 8 and two first connecting rods 6 are formed linkage, moves on reaction chamber dividing plate 1 thereby drive biography sheet door-plate 4.
When manipulator need pass when getting wafer; Apparatus control system control motor 9 rotates; Motor 9 drivening rod mechanisms (second connecting rod 7, third connecting rod 8, two first connecting rods 6) rotate; First connecting rod 6 drives and passes sheet door-plates 4 and move to the position that reaction chamber dividing plate square hole 2 opens fully along door-plate guide rail 3 and stop, and waits for that manipulator is accomplished to pass to get wafer action (position as shown in Figure 6).
When manipulator completion biography is got the wafer action, need in time reaction chamber dividing plate square hole 2 is closed.Apparatus control system control motor 9 rotates; Motor 9 drivening rod mechanisms rotate; First connecting rod 6 drives and passes sheet door-plates 4 and move to the position that reaction chamber dividing plate square hole 2 closes fully along door-plate guide rail 3 and stop, and waits for that manipulator passes next time to get wafer action beginning (position as shown in Figure 7).
In passing the process that sheet door-plate 4 moves up and down, first connecting rod 6 remains level, has so just guaranteed first connecting rod 6 and has passed two points that sheet door-plate 4 is connected on same horizontal line, and the stressed comparatively equilibrium of biography sheet door-plate 4 can not cause unbalance loading.
Linkage among the present invention comprises a connecting rod at least, and its principle is identical with above two kinds of structures, all falls within the protection range of the present invention.
Reaction chamber dividing plate square hole 2 opens and closes in the action, and the rotation direction of motor 9 can arbitrarily be chosen, and can turn clockwise, and also can be rotated counterclockwise.The opening degree of reaction chamber dividing plate square hole 2 can be decided according to the size of manipulator in the equipment.This is simple for structure, has avoided using cylinder and the problem of the parallelism error that causes, has guaranteed manipulator when biography is got wafer, and reaction chamber is isolated from the outside, thereby keep the microenvironment of high lustration class.Because cylinder is in running, the bleed pressure size is very big for the cylinder piston velocity effect, makes to pass the spot speed maximum that sheet door-plate 4 is opening and cutting out.And according to structure of the present invention, passing the moment that sheet door-plate 4 opens and cuts out, and speed is minimum, has guaranteed like this passing the moment that sheet door-plate 4 opens and cuts out, air-flow can not poured into reaction chamber rapidly and reduce the cleanliness factor of reaction chamber.
Reaction chamber with above-mentioned reaction chamber cover plate according to the invention also comprises: cavity, said reaction chamber cover plate are used for chamber environment of living in and external environment are kept apart.Be to be example among the present invention with the semiconductor reaction chamber.
The above only is a preferred implementation of the present invention; Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from know-why of the present invention; Can also make some improvement and replacement, these improvement and replacement also should be regarded as protection scope of the present invention.
Claims (9)
1. a reaction chamber cover plate is characterized in that, comprising: reaction chamber dividing plate (1), biography sheet door-plate (4), linkage and motor (9); Said reaction chamber dividing plate (1) is located at the reaction chamber side, and has the square hole (2) corresponding to the reaction chamber inlet; Said biography sheet door-plate (4) can be gone up motion at said reaction chamber dividing plate (1); Said linkage comprises at least one connecting rod; Said biography sheet door-plate (4), linkage, motor (9) connect successively, and linkage can drive under the driving of motor (9) and pass sheet door-plate (4) motion, so that the square hole on the reaction chamber dividing plate (2) is opened or closed.
2. reaction chamber cover plate as claimed in claim 1; It is characterized in that; The square hole of said reaction chamber dividing plate (2) both sides are provided with door-plate guide rail (3), pass sheet door-plate (4) both sides and are provided with guide rail slide block (4), pass sheet door-plate (4) and go up motion through guide rail slide block (4) at said door-plate guide rail (3).
3. reaction chamber cover plate as claimed in claim 1 is characterized in that, the length of said door-plate guide rail (3) is decided according to the distance that passes sheet door-plate (4) motion.
4. reaction chamber cover plate as claimed in claim 1 is characterized in that, the size of said biography sheet door-plate (4) is decided according to the size of the square hole (2) of reaction chamber dividing plate.
5. reaction chamber cover plate as claimed in claim 1 is characterized in that, this reaction chamber is the semiconductor reaction chamber, passes through manipulator and gets wafer, and the size of said square hole (2) is decided according to the size of manipulator and the size of wafer.
6. like any described reaction chamber cover plate among the claim 1-5; It is characterized in that; Said linkage is a double connecting rod, comprises first connecting rod (6) and second connecting rod (7), passes sheet door-plate (4) and is connected with first connecting rod (6); First connecting rod (6) is connected through rotating shaft with second connecting rod (7), and two connecting rods can relatively rotate around the shaft; Second connecting rod (7) is connected with motor (9), when motor shaft rotates, can drive second connecting rod (7) and rotate together, goes up mobile at reaction chamber dividing plate (1) thereby drive biography sheet door-plate (4).
7. like any described reaction chamber cover plate among the claim 1-5; It is characterized in that; Said linkage is a quadric chain, comprises two first connecting rods (6), second connecting rod (7) and third connecting rod (8), passes sheet door-plate (4) and connects with two identical first connecting rods (6); These two first connecting rods (6) are connected through rotating shaft with the two ends of third connecting rod (8), and two first connecting rods (6) can relatively rotate with third connecting rod (8) around the shaft; Second connecting rod (7) is connected through the rotating shaft in the middle of the third connecting rod (8) with third connecting rod (8), and through rotating shaft, second connecting rod (7) and third connecting rod (8) can relatively rotate; Second connecting rod (7) is connected with motor (9); When motor shaft rotates; Can drive second connecting rod (7) and rotate together, second connecting rod (7), third connecting rod (8) and two first connecting rods (6) are formed linkage, go up mobile at reaction chamber dividing plate (1) thereby drive biography sheet door-plate (4).
8. the reaction chamber with any described reaction chamber cover plate among the claim 1-7 is characterized in that, also comprises: cavity, said reaction chamber cover plate are used for chamber environment of living in and external environment are kept apart.
9. reaction chamber as claimed in claim 8 is characterized in that, this reaction chamber is the semiconductor reaction chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110285858A CN102315145A (en) | 2011-09-23 | 2011-09-23 | Reaction-chamber cover plate and reaction chamber provided with same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110285858A CN102315145A (en) | 2011-09-23 | 2011-09-23 | Reaction-chamber cover plate and reaction chamber provided with same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102315145A true CN102315145A (en) | 2012-01-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110285858A Pending CN102315145A (en) | 2011-09-23 | 2011-09-23 | Reaction-chamber cover plate and reaction chamber provided with same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102315145A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104658949A (en) * | 2015-02-02 | 2015-05-27 | 北京七星华创电子股份有限公司 | Movable type sealing device |
| CN105336656A (en) * | 2014-06-18 | 2016-02-17 | 上海华力微电子有限公司 | Single-wafer bearing chamber structure |
| CN106505008A (en) * | 2015-09-08 | 2017-03-15 | 沈阳拓荆科技有限公司 | A kind of supporting construction for preventing chamber cover plate from falling |
| CN107960850A (en) * | 2016-10-20 | 2018-04-27 | 佛山市顺德区美的电热电器制造有限公司 | Cooking apparatus and its upper cover |
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| US20030136343A1 (en) * | 2002-01-18 | 2003-07-24 | Shen Tsung-Lin | Apparatus for sealing a vacuum chamber |
| US20040093801A1 (en) * | 2002-11-15 | 2004-05-20 | Steris Inc. | Door assembly for sealing a chamber |
| CN201655771U (en) * | 2009-12-24 | 2010-11-24 | 徐竹林 | Fully-automatic silicon slice loading and unloading machine |
| CN202307825U (en) * | 2011-09-23 | 2012-07-04 | 北京七星华创电子股份有限公司 | Reaction chamber cover plate and reaction chamber with same |
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2011
- 2011-09-23 CN CN201110285858A patent/CN102315145A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US6082951A (en) * | 1998-01-23 | 2000-07-04 | Applied Materials, Inc. | Wafer cassette load station |
| US20030136343A1 (en) * | 2002-01-18 | 2003-07-24 | Shen Tsung-Lin | Apparatus for sealing a vacuum chamber |
| US20040093801A1 (en) * | 2002-11-15 | 2004-05-20 | Steris Inc. | Door assembly for sealing a chamber |
| CN201655771U (en) * | 2009-12-24 | 2010-11-24 | 徐竹林 | Fully-automatic silicon slice loading and unloading machine |
| CN202307825U (en) * | 2011-09-23 | 2012-07-04 | 北京七星华创电子股份有限公司 | Reaction chamber cover plate and reaction chamber with same |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105336656A (en) * | 2014-06-18 | 2016-02-17 | 上海华力微电子有限公司 | Single-wafer bearing chamber structure |
| CN105336656B (en) * | 2014-06-18 | 2020-01-21 | 上海华力微电子有限公司 | Single wafer bearing cavity structure |
| CN104658949A (en) * | 2015-02-02 | 2015-05-27 | 北京七星华创电子股份有限公司 | Movable type sealing device |
| CN104658949B (en) * | 2015-02-02 | 2017-10-17 | 北京七星华创电子股份有限公司 | Mobile sealing device |
| CN106505008A (en) * | 2015-09-08 | 2017-03-15 | 沈阳拓荆科技有限公司 | A kind of supporting construction for preventing chamber cover plate from falling |
| CN106505008B (en) * | 2015-09-08 | 2019-04-26 | 沈阳拓荆科技有限公司 | A kind of support construction for preventing chamber cover board from falling |
| CN107960850A (en) * | 2016-10-20 | 2018-04-27 | 佛山市顺德区美的电热电器制造有限公司 | Cooking apparatus and its upper cover |
| CN107960850B (en) * | 2016-10-20 | 2023-08-22 | 佛山市顺德区美的电热电器制造有限公司 | Cooking utensil and upper cover thereof |
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Application publication date: 20120111 |