CN204123269U - Polishing die face shape monitoring device - Google Patents

Polishing die face shape monitoring device Download PDF

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Publication number
CN204123269U
CN204123269U CN201420394276.8U CN201420394276U CN204123269U CN 204123269 U CN204123269 U CN 204123269U CN 201420394276 U CN201420394276 U CN 201420394276U CN 204123269 U CN204123269 U CN 204123269U
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CN
China
Prior art keywords
connecting plate
shape connecting
shape
die face
monitoring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN201420394276.8U
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Chinese (zh)
Inventor
马平
游云峰
谢磊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHENGDU FINE OPTICAL ENGINEERING RESEARCH CENTER
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CHENGDU FINE OPTICAL ENGINEERING RESEARCH CENTER
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Priority to CN201420394276.8U priority Critical patent/CN204123269U/en
Application granted granted Critical
Publication of CN204123269U publication Critical patent/CN204123269U/en
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Withdrawn - After Issue legal-status Critical Current

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Abstract

The utility model discloses a kind of polishing die face shape monitoring device, belong to optical element processing technique field.It comprises displacement detector, vertical locator, L shape connecting plate and radial displacement guide rail, L shape connecting plate is connected with radial displacement guide rail through connector, vertical locator is fixed on L shape connecting plate by trip bolt, and displacement detector is connected with the riser of L shape connecting plate; Displacement detector has probe; The base plate of L shape connecting plate is provided with transmission window and constrained port.The utility model achieves the on-line real time monitoring to polishing die face type, decreases the uncertain factor in ring throwing optical manufacturing, can control effectively to workpiece face type, improve crudy and the precision of element, and improve working (machining) efficiency.

Description

Polishing die face shape monitoring device
Technical field
The utility model relates to a kind of optics ring and throws auxiliary processing device, and especially polished die monitoring, belongs to optical element processing technique field.
Background technology
At present, in optical element processing, unified processing mode is to process high surface figure accuracy, great surface quality optical element and the one extensively used.In unified processing, element and polished die interact, and the shape facility of polished die directly can affect the processing surface figure accuracy of element.Ideally, polished die becomes a rigid body, and the face shape of element is exactly copying of polished die surface configuration.But polished die can along with factors such as the changes with the contacting with each other of element, processing environment humiture, and produce certain distortion, this directly will have influence on the face shape of element, causes the local error of component side shape.Therefore, polished die shape monitoring and control to be the key of machining high-precision element.
At present, conventional polished die has pitch polishing tol, polyurethane polishing mould, polishing cloth polished die, tin polished die etc.Different unified processing modes, to the shape need of polished die and control measure also different.Tin polished die as hard is mainly used in floating polishing.This finishing method is first by within the single-point diamond lathe process of tin polished die superhigh precision to surface undulation 50 nanometer, then be arranged on the turntable of superhigh precision, work in-process tin polishing disk High Rotation Speed, and drive polishing fluid to be floated over by element on tin polishing disk, by the micro mechanics effect machine component of polishing fluid, and controlled working variations in temperature is within 0.01 DEG C, thus reach high surface figure accuracy.But this processing method is high to the flatness of polished die, processing environment and process equipment required precision, tooling cost is huge, and range of application is very little.And relatively soft polished die, as pitch polishing tol, polyurethane polishing mould, polishing cloth polished die are simple owing to making, low to equipment precision requirement, and are used widely.But because these polished dies are in process, larger deformation can be produced along with the change of component shape, processing environment etc., not easily keep high accuracy for a long time, lack the on-line monitoring of polished die simultaneously, need the shape of subjective judgement polished die in process by processing staff, thus cause processing certainty poor, the experience of heavy dependence processing staff.
In the bibliographical information can looked at present and patent, the main offline mode that adopts measures polishing card shape.Offline mode is measured polishing card shape and is referred to after polished die uses a period of time, when polished die does not work, detects its face shape, and is revised by correction means.This mode to the detection of the shape discontinuity of polished die and control, but can only lack monitoring to the shape of polished die in actual process, is unfavorable for that polishing die face shape adjusts rapidly, can not realizes the continuous monitoring of polishing die face shape and accurately control.
Utility model content
For above-mentioned problem, the utility model provides a kind of device glass polishing machine polishing die face type being carried out to Real-Time Monitoring.
The utility model solves the technical scheme that its technical problem adopts: polishing die face shape monitoring device, comprise displacement detector, vertical locator, L shape connecting plate and radial displacement guide rail, L shape connecting plate is connected with radial displacement guide rail through connector, vertical locator is fixed on L shape connecting plate by trip bolt, and displacement detector is connected with the riser of L shape connecting plate; Displacement detector has probe; The base plate of L shape connecting plate is provided with transmission window and constrained port.
The beneficial effects of the utility model are; have employed the measurement function of differential transformation sensor; design and have employed the fore device of a kind of superhard contact transmission window as detection; solve the problem that cannot on a large scale comparatively measure of general differential transformation sensor on the surface of complexity; meanwhile, the probe protecting differential transformation sensor can not be damaged.Achieve the on-line real time monitoring to polishing die face type, decrease the uncertain factor in ring throwing optical manufacturing, can control effectively to workpiece face type, improve crudy and the precision of element, and improve working (machining) efficiency.
Accompanying drawing explanation
Fig. 1 is the utility model general structure (duty) schematic diagram;
Fig. 2 is monitoring device agent structure (amplification) schematic diagram in Fig. 1.
Parts and numbering in figure:
1-displacement detector, 2-probe, 3-transmission window, 4-constrained port, 5-vertical locator,
6-L shape connecting plate, 7-connector, 8-polished die, 9-radial displacement guide rail.
Detailed description of the invention
Below in conjunction with embodiment, the utility model is further illustrated.
See Fig. 1,2, polishing die face shape monitoring device, comprise displacement detector 1, vertical locator 5, L shape connecting plate 6 and radial displacement guide rail 9, L shape connecting plate 6 is connected with radial displacement guide rail 9 through connector 7, vertical locator 5 is fixed on L shape connecting plate 6 by trip bolt, and displacement detector 1 is connected with the riser of L shape connecting plate 6; Displacement detector 1 has probe 2; The base plate of L shape connecting plate 6 is provided with transmission window 3 and constrained port 4.
Displacement detector 1 is differential transformation sensor.
Transmission window 3 is sapphire sheet.Sapphire sheet has certain thickness superhard smooth disk.
Radial displacement guide rail 9 is driven by precision electric motor.Monitoring device main body is driven to do radial displacement by precision electric motor.
The face type of polished die 8 rises and falls by transmission window 3 and probe 2, and drive to displacement detector 1, realize face type DATA REASONING, constrained port about 4 communicates, and transmission window 3 restrained hole 4 is spacing, can only move in vertical direction, cannot move in the horizontal direction; Displacement detector 1 is fixed on L shape connecting plate 6 by vertical locator 5, forms monitoring device main body, is connected to radial displacement guide rail 9; Move radially rotate with polished die self time, monitoring device main body, in polar coordinate scanner mode, realizes the unified measurement of polishing die face type.
Transmission window 3 contacts with polished die 8, and constrained port 4 pairs of transmission windows 3 carry out spacing; In polished die rotary course, its face type rises and falls and drives to displacement detector 1 by transmission window 3 probe 2, thus realizes face type data monitoring; Displacement detector 1 is fixed on L shape connecting plate 6 by vertical locator 5.
Form loose fit between constrained port 4 and transmission window 3, make transmission window 3 only there is one-movement-freedom-degree in vertical direction.
The job step of polishing die face type monitoring device is:
A. regulate displacement detector position in vertical direction, make transmission window (sapphire sheet) lower surface be close to polished die, and make detector probe press transmission window upper surface
B. transmission window coordinates with constrained port, the state of spacing, the vertical activity that is up to the standard.
C. whole detector is in polished die maximum outside diameter position Rmax, starts polissoir, and polished die starts to rotate.
D. the polishing die face type within transmission window coverage, be reflected as the overall relief volume h of transmission window, these data are passed to displacement detector by probe and measure.
E. by polar coordinates information (r, θ) and the face type data h of each measuring position of computer platform real time record.
F., after the polished die anglec of rotation terminates one-period, displacement detector, under the clamping moving radially guide rail, moves a unit according to the step pitch r of setting to direction, the polished die center of circle, measures the face type data of next unit circumference.
G. according to above polar coordinate scanner mode mobile detector until arrive polished die minimum diameter position Rmin, this timer completes the face type DATA REASONING of the unified scope of polished die.
H. based on the face type data recorded, polishing die face type is rebuild in a matrix fashion.

Claims (4)

1. a polishing die face shape monitoring device, comprise displacement detector (1), vertical locator (5), L shape connecting plate (6) and radial displacement guide rail (9), it is characterized in that, L shape connecting plate (6) is connected with radial displacement guide rail (9) through connector (7), vertical locator (5) is fixed on L shape connecting plate (6) by trip bolt, and displacement detector (1) is connected with the riser of L shape connecting plate (6); Displacement detector (1) has probe (2); The base plate of L shape connecting plate (6) is provided with transmission window (3) and constrained port (4).
2. polishing die face shape monitoring device according to claim 1, is characterized in that, described displacement detector (1) is differential transformation sensor.
3. polishing die face shape monitoring device according to claim 1, is characterized in that, described transmission window (3) is sapphire sheet.
4. polishing die face shape monitoring device according to claim 1, is characterized in that, described radial displacement guide rail (9) is driven by precision electric motor.
CN201420394276.8U 2014-07-17 2014-07-17 Polishing die face shape monitoring device Withdrawn - After Issue CN204123269U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420394276.8U CN204123269U (en) 2014-07-17 2014-07-17 Polishing die face shape monitoring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201420394276.8U CN204123269U (en) 2014-07-17 2014-07-17 Polishing die face shape monitoring device

Publications (1)

Publication Number Publication Date
CN204123269U true CN204123269U (en) 2015-01-28

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201420394276.8U Withdrawn - After Issue CN204123269U (en) 2014-07-17 2014-07-17 Polishing die face shape monitoring device

Country Status (1)

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CN (1) CN204123269U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104057395A (en) * 2014-07-17 2014-09-24 成都精密光学工程研究中心 Polishing mold surface shape monitoring device
CN108500777A (en) * 2018-04-04 2018-09-07 中国工程物理研究院激光聚变研究中心 The detection device and its detection method of polishing disk form error in unified annular polishing

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104057395A (en) * 2014-07-17 2014-09-24 成都精密光学工程研究中心 Polishing mold surface shape monitoring device
CN108500777A (en) * 2018-04-04 2018-09-07 中国工程物理研究院激光聚变研究中心 The detection device and its detection method of polishing disk form error in unified annular polishing
CN108500777B (en) * 2018-04-04 2023-08-04 中国工程物理研究院激光聚变研究中心 Detection device and detection method for shape error of polishing disc in full-caliber annular polishing

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C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Granted publication date: 20150128

Effective date of abandoning: 20160413

C25 Abandonment of patent right or utility model to avoid double patenting