CN106430084A - Single micro/nano structure transferring device and single micro/nano structure transferring method - Google Patents
Single micro/nano structure transferring device and single micro/nano structure transferring method Download PDFInfo
- Publication number
- CN106430084A CN106430084A CN201611019900.6A CN201611019900A CN106430084A CN 106430084 A CN106430084 A CN 106430084A CN 201611019900 A CN201611019900 A CN 201611019900A CN 106430084 A CN106430084 A CN 106430084A
- Authority
- CN
- China
- Prior art keywords
- micro
- nano structure
- nano
- probe
- manipulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
Abstract
The invention discloses a single micro/nano structure transferring device and a single micro/nano structure transferring method. A micro/nano structure transfer substrate with a periodically raised platform and a coordinate mark is smartly designed; precise fixe-point transferring of a single micro/nano structure is realized by observing through a microscope in real time and manipulating a micro/nano manipulator in situ; on one hand, preliminary characterization analysis of the micro/nano structure can be completed on the micro/nano structure transfer substrate; on the other hand, under in-situ observation of the microscope, the single micro/nano structure to be transferred is searched in situ through the coordinate mark; furthermore, the single micro/nano structure can be extracted from the micro/nano structure transfer substrate through a transfer probe of the micro/nano manipulator, and then, precisely transferred at an appointed position on a target substrate; the transfer locating precision is superior to 1 micron; in addition, an electrostatic adsorption theory is adopted in the transferring method disclosed by the invention; and thus, unknown impurities cannot be introduced in a micro/nano structure transferring process under a condition that the fact that a tip probe of the transfer probe is clean is ensured.
Description
Technical field
The present invention relates to the pinpoint transfer techniques of single micro nano structure are and in particular to a kind of single micro nano structure
Transfer device and its transfer method.
Background technology
Material under micro-nano-scale and structure be widely used in because of its unique physical and chemical performance information, the energy,
The fields such as environment, life sciences and chemical industry, and increasingly show potential using value.Grind in micro Nano material and structure
In studying carefully, generally require to observe and measure the physicochemical characteristicss of single structure, such as single-root carbon nano-tube or semiconductor nanowires
Electrons transport property, to explore its application in microelectronic component, the optical characteristics of single metal nano flake for another example, with
Explore its application in the environment based on optical characteristics or biosensor, and there is the single nanostructured of special shape
Ultramicroscope phenetic analysis etc..Additionally, cannot solve in the research of material and device and application under macro-scale at present
The problem in science released or technical barrier are also required to find principle or solution under micro/nano-scale it is therefore desirable to by macroscopic material
With device fabrication to micro-nano-scale, then by microscopic sdIBM-2+2q.p.approach detection mode, it is conducted a research.
In the processing preparation process of micro Nano material and structure, often numerous structures mix, such as using change
Learn vapour deposition process and prepare nano wire or solution methods growth nano-particle, gather generally in the substrate or solution of mm-scale
Ten hundreds of micro-nano materials and structure, and single structure cannot be transferred out of to carry out microstructure and properties observation；In addition,
Material devices under macro-scale are machined to after micro/nano-scale, also typically require to transfer them in observation instrument and ground
Study carefully.The usual employing of transfer currently for single micro nano structure is diluted dispersion in the solution, then solution is titrated in institute
Need the method on substrate, this disposable batch transfer method cannot be accomplished to be pinpointed for specific micro nano structure first
Transfer, can only select from the micro nano structure being randomly dispersed on a large scale substrate be in required fixed position research right
As secondly it is impossible to accomplish to carry out secondary transferring for single micro nano structure interested, once micro nano structure is adsorbed to lining
On bottom, will be unable to take out again be transferred on other substrate and carry out other phenetic analysis or processing, the 3rd, the method is easily turning
Not clear impurity is introduced during shifting.
Content of the invention
Pinpoint in order to realize single micro nano structure shifts, and the present invention provides a kind of single micro nano structure transfer
Device and its transfer method, realize the pinpoint transfer of micro nano structure by cleverly design.
It is an object of the present invention to provide a kind of single micro nano structure transfer device.
The single micro nano structure transfer device of the present invention includes：Microscope, micro-nano manipulator fixed mount, micro-nano manipulate
Device, transfer probe and micro-nano structure transfer substrate；Wherein, micro-nano manipulator fixed mount rigidly fixes and is arranged on microscope；Micro-
Manipulator of receiving is rigidly attached on micro-nano manipulator fixed mount；Transfer probe is arranged on the top of micro-nano manipulator；Micro-nano structure
Fixing being placed on microscopical sample stage of transfer substrate position, on micro-nano structure transfer substrate, hanging carrying is to be transferred
Micro nano structure；Micro-nano structure transfer substrate includes substrate, periodic raised platforms and coordinate labelling, in the base of surfacing
On piece, periodic raised platforms and coordinate labelling are formed by micro-nano technology, coordinate is labeled as on the surface of substrate according to fixation
The regular label of pitch period arrangement, with the accurate location of the periodic raised platforms of labelling, forms between raised platforms
Groove, the width of groove is more than the width at the tip of transfer probe；It is more than the micro-nano of raised platforms for having a dimension
Structure, a part is located in raised platforms, and another part is suspended on the groove between raised platforms.
Single micro nano structure to be transferred requires the size that there is a dimension more than 5 μm, for example quasi- one-dimensional nano line
, more than 5 μm, certain length of side of quasi- two-dimensional nano thin slice is more than 5 μm for length.
Microscope adopts optical microscope, or ultramicroscope；Microscope includes microscope body, sample stage, object lens
With imaging display system；Wherein, microscope body includes mechanical cover, imaging optical path and illuminator；Sample stage, object lens with become
As display system is connected to microscope body, sample stage is relative with object lens；Sample stage has horizontal two-dimension position adjustments, highly
Adjust and rotation regulatory function；The enlargement ratio of object lens is adjustable, and microscope entirety enlargement ratio is up to or more than 2000
～10000 times, the operating distance of object lens is more than 10mm；Imaging display system is a computer it is desirable to be imaged speed of response height,
For example during imaging resolution 500,000 pixel, frame per second is per second more than 60 frames.
Micro-nano manipulator includes coarse adjustment manipulator and fine tuning manipulator；Wherein, coarse adjustment manipulator passes through pinion and rack
Or Damping sliding rail mechanism carries out three-dimensional position regulation, inclination angle, pivot angle and rotation are carried out by bearing locking mechanism and adjusts；Coarse adjustment
Manipulator includes coarse adjustment fixing device for installing, coarse position governor motion and coarse adjustment drive link, and coarse adjustment fixing device for installing is fixed
It is arranged on micro-nano manipulator fixed mount, coarse adjustment fixing device for installing installs coarse position governor motion, in coarse position
The top of governor motion is rigidly connected coarse adjustment drive link；Fine tuning manipulator realizes fine three by piezoelectric ceramics or hydraulic mechanism
Dimension position adjustments, can reach the position adjustments resolution better than 0.1 micron；Fine tuning manipulator includes fine tuning and installs fixing dress
Put, fine tuning position adjusting mechanism, controller and fine tuning drive link, in the setting fine tuning of the top of coarse adjustment drive link, fixing dress is installed
Put；Fine tuning position adjusting mechanism is arranged on fine tuning fixing device for installing, fine tuning position adjusting mechanism passes through conductor cable or liquid
Pressure pipe connects to controller, is rigidly connected fine tuning drive link on the top of fine tuning position adjusting mechanism.
Transfer probe includes three-dimensional locking mechanism of rotating shaft, probe fix bar and tip probe；Wherein, machine is locked in three-dimensional rotating shaft
Structure is rigidly attached at the top of the fine tuning drive link of the fine tuning manipulator of micro-nano manipulator；Three-dimensional locking mechanism of rotating shaft is installed
Probe fix bar；It is rigidly connected tip probe on the top of probe fix bar；Under the drive of micro-nano manipulator, shift probe energy
Enough carry out position adjustments；Probe fix bar is rigidly connected tip probe and micro-nano manipulator, and locks machine by three-dimensional rotating shaft
Structure can adjust probe fix bar with the angle between the drive link of the fine tuning manipulator of micro-nano manipulator；The tip of tip probe
Diameter is less than 0.5 micron, and in single micro nano structure transfer process, bonding is shifted by most advanced and sophisticated Electrostatic Absorption effect
Single micro nano structure.
Micro-nano structure transfer substrate includes substrate, periodic raised platforms and coordinate labelling；Need to cut according to experiment
The size of substrate；Being shaped as of the periodicity raised platforms of substrate surface is square or circular, size between 5～10 microns,
Height between 1～3 micron, the spacing of adjacent protrusion platform be the width of groove between 1～3 micron, the table of raised platforms
Face is polished surface, and flatness is less than 1 nanometer；The position to each raised platforms on micro-nano structure transfer substrate for the coordinate labelling
It is accurately positioned.
It is an object of the present invention to provide a kind of transfer method of single micro nano structure.
The transfer method of the single micro nano structure of the present invention, comprises the following steps：
1) micro nano structure is transferred on micro-nano structure transfer substrate：
Volatile non-corrosiveness solution containing micro nano structure is titrated on micro-nano structure transfer substrate, or by gas
Phase method growth micro nano structure substrate directly press on micro-nano structure transfer substrate, realize micro nano structure be transferred to micro-
On micro-nano structure transfer substrate；
2) pass through microscope Real Time Observation and mobile example platform, according to the coordinate labelling on micro-nano structure transfer substrate, seek
Find the position of single micro nano structure to be transferred, by the mobile extremely microscopical visual field of single micro nano structure to be transferred
Centre；
3) microscope Real Time Observation, manipulates transfer probe by the coarse adjustment manipulator of micro-nano manipulator mobile extremely microscopical
Between object lens and sample stage, the more most advanced and sophisticated entrance controlling the tip probe of transfer probe by the fine tuning manipulator of micro-nano manipulator
In groove below single micro nano structure overhanging portion to be transferred；
4) tip probe is controlled to be lifted up so that the tip of tip probe exists by the fine tuning manipulator of micro-nano manipulator
Contact in uphill process to single micro nano structure bottom, continuation carries tip probe, drive single micro nano structure to move upwards
Dynamic, then leave the raised platforms of micro-nano structure transfer substrate；
5) when single micro nano structure completely disengages from raised platforms, single micro nano structure is inhaled by Electrostatic Absorption effect
It is attached to the tip of tip probe；
6), further after the height of lifting tip probe, the tip of tip probe and the single micro-nano of Electrostatic Absorption are kept
Structure is in existing position, and is maintained in the microscopical visual field, and now microscope imaging focuses on micro-nano structure transfer substrate table
The single micro nano structure of the surface of the periodic raised platforms in face, the tip of tip probe and Electrostatic Absorption regards in microscope
Yezhong assumes broad image；
7) control microscopical sample stage, reduce sample stage height first to safe altitude, safe altitude refers to work as sample
In two dimensional surface during mobile example platform, the micro-nano structure transfer substrate that sample stage is fixed will not contact transfer probe to platform
Tip probe, micro-nano structure transfer substrate removes sample stage, then the target substrate substrate of micro nano structure to be received is moved extremely
In the middle of the microscopical visual field on sample stage, slowly rise sample stage, make microscope imaging focus on the surface of target substrate substrate；
8) further according to the position of the azimuth vernier adjusting sample stage of the single micro nano structure adsorbing on the tip of tip probe
And direction, under microscope high power imaging, the particular location of micro nano structure to be received on target substrate substrate is adjusted to
The single micro nano structure of the tip of tip probe and Electrostatic Absorption is under the microscope at the position of become broad image；
9) the slow height reducing tip probe is controlled by the fine tuning manipulator of micro-nano manipulator so that single micro-nano
Form touch, to the surface of target substrate substrate, and adsorbs on the surface of target substrate substrate, then by the tip of tip probe
Remove the single micro nano structure being shifted, complete the transfer process of single micro nano structure.
Further, after micro nano structure is transferred on micro-nano structure transfer substrate, observed micro- by microscopical object lens
Nanostructured, and micro nano structure interested position in micro-nano structure transfer substrate is recorded by coordinate labelling；So
Afterwards the micro-nano structure transfer substrate carrying micro nano structure is transferred in other optical instruments, completes to micro nano structure
Preliminary characterization, such as pattern, size, chemical composition etc.；Again the micro-nano structure transfer substrate carrying micro nano structure is put back to aobvious
Subsequent transfer is carried out on the sample stage of micro mirror.
Advantages of the present invention：
The present invention dexterously devises the micro-nano structure transfer substrate with periodicity raised platforms and coordinate labelling, passes through
Microscope Real Time Observation and in situ manipulation micro-nano manipulator, realize the pinpoint transfer of single micro nano structure；On the one hand,
Micro-nano structure transfer substrate, as the substrate base carrying micro nano structure, can complete to micro- on micro-nano structure transfer substrate
The preliminary characterization analysis of nanostructured；On the other hand, under microscopical home position observation, by micro-nano structure transfer substrate
Coordinate labelling original position searches single micro nano structure to be transferred, and can pass through the transfer probe of micro-nano manipulator by it from micro-
Extract on micro-nano structure transfer substrate, be more accurately transferred to the specified location on target substrate substrate, shift positioning precision energy
Enough it is better than 1 micron；Additionally, the transfer method of the present invention employs the principle of Electrostatic Absorption, visit in the tip ensureing transfer probe
In the case of pin cleaning, not clear impurity will not be introduced in micro nano structure transfer process.
Brief description
Fig. 1 is the perspective view of an embodiment of single micro nano structure transfer device of the present invention；
Fig. 2 is showing of the micro-nano structure transfer substrate of an embodiment of single micro nano structure transfer device of the present invention
It is intended to；
Fig. 3 is on the micro-nano structure transfer substrate of an embodiment of single micro nano structure transfer device of the present invention
The schematic diagram of coordinate labelling；
The flow chart of the transfer method of single micro nano structure of Fig. 4 present invention, wherein, (A) and (B) is transfer probe
The tip of tip probe enters the schematic diagram in the groove below single micro nano structure overhanging portion, and (C) is above to carry tip to visit
Pin drives the schematic diagram of the raised platforms of single micro nano structure upward out micro-nano structure transfer substrate, and (D) is single micro-nano
Rice structure passes through the schematic diagram at the tip of tip probe for the Electrostatic Absorption effect absorption, and (E) is to reduce sample stage height to sample
The micro-nano structure transfer substrate fixed on platform will not contact the schematic diagram of the tip probe of transfer probe, and (F) is to rise sample
Platform makes microscope imaging focus on the schematic diagram on the surface of target substrate substrate of micro nano structure to be received, and (G) is to reduce point
The height of head probe makes single micro nano structure contact the schematic diagram on the surface to target substrate substrate, and (H) is tip probe
Tip remove the schematic diagram of the single micro nano structure being shifted.
Specific embodiment
Below in conjunction with the accompanying drawings, by embodiment, the present invention will be further described.
As shown in figure 1, the single micro nano structure transfer device of the present embodiment includes：Microscope, micro-nano manipulator are fixed
Frame 5, micro-nano manipulator, transfer probe and micro-nano structure transfer substrate 4.
Microscope includes microscope body 11, sample stage 12, object lens 13 and imaging display system 14；Wherein, microscope master
Body 11 includes mechanical cover, imaging optical path and illuminator；Sample stage 12, object lens 13 and imaging display system are connected to micro-
Mirror main body, sample stage 12 is relative with object lens 13；Micro-nano manipulator fixed mount 5 rigidly fixes and is attached on microscope body 11.
Micro-nano manipulator includes coarse adjustment manipulator 21 and fine tuning manipulator 22；Wherein, coarse adjustment manipulator 21 includes coarse adjustment peace
Dress fixing device 211, coarse position governor motion 212 and coarse adjustment drive link 213, coarse adjustment fixing device for installing 211 fixedly mounts
On micro-nano manipulator fixed mount 5, coarse adjustment fixing device for installing 211 installs coarse position governor motion 212, in coarse adjustment position
The top putting governor motion 212 is rigidly connected coarse adjustment drive link 213；Fine tuning manipulator 22 include fine tuning fixing device for installing 221,
Fine tuning position adjusting mechanism 222, controller 223 and fine tuning drive link 224, in the top of coarse adjustment drive link 213 setting fine tuning peace
Dress fixing device 221；Fine tuning position adjusting mechanism 222, fine tuning position adjusting mechanism are arranged on fine tuning fixing device for installing 221
222 are connected to controller 223 by conductor cable or hydraulic tube, are rigidly connected carefully on the top of fine tuning position adjusting mechanism 222
Adjust drive link 224.Controller 223 manipulates the movement in tri- directions of X, Y and Z for the fine tuning position adjusting mechanism 222.
Transfer probe includes three-dimensional locking mechanism of rotating shaft 31, probe fix bar 32 and tip probe 33；Wherein, three-dimensional rotating shaft
Retaining mechanism 31 is rigidly attached at the top of the fine tuning drive link 224 of the fine tuning manipulator of micro-nano manipulator；In three-dimensional spindle lock
In tight mechanism 31, probe fix bar 32 is installed；It is rigidly connected tip probe 33 on the top of probe fix bar 32.
As shown in Fig. 2 micro-nano structure transfer substrate 4 includes substrate 41, periodic raised platforms 42 and coordinate labelling 44；
The substrate 41 of surfacing forms periodic raised platforms 42 and coordinate labelling 44, raised platforms 42 by micro-nano technology
Between formed groove 43.As shown in figure 3, coordinate labelling 44 is to have rule on the surface of substrate according to constant spacing periodic arrangement
Rule label, with the accurate location of the periodic raised platforms of labelling 42.
The transfer method of the single micro nano structure of the present invention, comprises the following steps：
1) micro nano structure is transferred on micro-nano structure transfer substrate：
Volatile non-corrosiveness solution containing micro nano structure is titrated on micro-nano structure transfer substrate；
2) pass through microscope Real Time Observation and mobile example platform, according to the coordinate labelling on micro-nano structure transfer substrate, seek
Find the position of micro nano structure to be transferred, by micro nano structure movement to be transferred to field of microscope central authorities；
3) microscope Real Time Observation, manipulates transfer probe by the coarse adjustment manipulator of micro-nano manipulator mobile extremely microscopical
Between object lens and sample stage, the more most advanced and sophisticated entrance controlling the tip probe of transfer probe by the fine tuning manipulator of micro-nano manipulator
In groove below single micro nano structure 5 overhanging portion, shown in such as Fig. 4 (A) and (B)；
4) tip probe is controlled to be lifted up so that the tip of tip probe exists by the fine tuning manipulator of micro-nano manipulator
Contact in uphill process to single micro nano structure bottom, continuation carries tip probe, drive single micro nano structure to move upwards
Dynamic, then leave the raised platforms of micro-nano structure transfer substrate, such as shown in Fig. 4 (C)；
5) when single micro nano structure completely disengages from raised platforms, single micro nano structure 5 passes through Electrostatic Absorption effect
At the tip of tip probe, such as Fig. 4 (D) is shown for absorption；
6), further after the height of lifting tip probe, the tip of tip probe and the single micro-nano of Electrostatic Absorption are kept
Structure is in existing position, and is maintained in the microscopical visual field, and now microscope imaging focuses on micro-nano structure transfer substrate table
The single micro nano structure of the surface of the periodic raised platforms in face, the tip of tip probe and Electrostatic Absorption regards in microscope
Yezhong assumes broad image；
7) control microscopical sample stage, reduce sample stage height first to safe altitude, safe altitude refers to work as sample
In two dimensional surface during mobile example platform, the micro-nano structure transfer substrate that sample stage is fixed will not contact transfer probe to platform
Tip probe, such as shown in Fig. 4 (E), removes micro-nano structure transfer substrate, then the target substrate substrate by micro nano structure to be received
In the middle of the 6 mobile extremely microscopical visuals field, slowly rise sample stage, make microscope imaging focus on the mesh of micro nano structure to be received
The surface of mark substrate base, such as shown in Fig. 4 (F)；
8) position of the azimuth vernier adjusting sample stage according to single micro nano structure on the tip of tip probe for the absorption and
Direction, under microscope high power imaging, the particular location of micro nano structure to be received on target substrate substrate 6 is adjusted to point
The single micro nano structure of tip and the Electrostatic Absorption of head probe is under the microscope at the position of become broad image；
9) the slow height reducing tip probe is controlled by the fine tuning manipulator of micro-nano manipulator so that single micro-nano
Form touch, to the surface of target substrate substrate 6, such as shown in Fig. 4 (G), and adsorbs on the surface of target substrate substrate, then will
The single micro nano structure being shifted is removed at the tip of tip probe, such as shown in Fig. 4 (H), completes turning of single micro nano structure 5
Move past journey.
It is finally noted that, the purpose publicizing and implementing mode is that help further understands the present invention, but ability
The technical staff in domain is appreciated that：Without departing from the spirit and scope of the invention and the appended claims, various replace and
Modification is all possible.Therefore, the present invention should not be limited to embodiment disclosure of that, the scope of protection of present invention with
The scope that claims define is defined.
Claims (9)
1. a kind of single micro nano structure transfer device is it is characterised in that described transfer device includes：Microscope, micro-nano manipulate
Device fixed mount, micro-nano manipulator, transfer probe and micro-nano structure transfer substrate；Wherein, described micro-nano manipulator fixed mount rigidity
It is fixedly mounted on microscope；Described micro-nano manipulator is rigidly attached on micro-nano manipulator fixed mount；Described transfer probe peace
It is contained in the top of micro-nano manipulator；Fixing being placed on microscopical sample stage of described micro-nano structure transfer substrate position,
Hanging carrying micro nano structure to be transferred on micro-nano structure transfer substrate；Described micro-nano structure transfer substrate includes substrate, week
The raised platforms of phase property and coordinate labelling, on the substrate of surfacing by micro-nano technology formed periodic raised platforms and
Coordinate labelling, described coordinate is labeled as the regular label on the surface of substrate according to constant spacing periodic arrangement, with labelling
The accurate location of periodic raised platforms, forms groove between raised platforms, the width of described groove is more than transfer probe
Most advanced and sophisticated width；For having the micro nano structure that a dimension is more than raised platforms, a part is located in raised platforms, another
Part is suspended on the groove between raised platforms.
2. transfer device as claimed in claim 1 is it is characterised in that described microscope adopts optical microscope, or electronics
Microscope；Described microscope includes microscope body, sample stage, object lens and imaging display system；Wherein, microscope body includes
Mechanical cover, imaging optical path and illuminator；Sample stage, object lens and imaging display system are connected to microscope body, sample
Platform is relative with object lens；Sample stage has horizontal two-dimension position adjustments, altitude mixture control and rotation regulatory function；The times magnification of object lens
Rate is adjustable, and up to or more than 2000～10000 times, the operating distance of object lens is more than 10mm to microscope entirety enlargement ratio；
Imaging display system is a computer.
3. transfer device as claimed in claim 1 is it is characterised in that described micro-nano manipulator includes coarse adjustment manipulator and fine tuning
Manipulator；Wherein, coarse adjustment manipulator carries out three-dimensional position regulation by pinion and rack or Damping sliding rail mechanism, by axle
Hold retaining mechanism and carry out inclination angle, pivot angle and rotation regulation；Coarse adjustment manipulator includes coarse adjustment fixing device for installing, coarse position is adjusted
Mechanism and coarse adjustment drive link, coarse adjustment fixing device for installing is fixedly mounted on micro-nano manipulator fixed mount, installs in coarse adjustment and fixes
Coarse position governor motion is installed on device, is rigidly connected coarse adjustment drive link on the top of coarse position governor motion；Fine tuning is grasped
Vertical device is realized fine three-dimensional position by piezoelectric ceramics or hydraulic mechanism and is adjusted, and position adjustments resolution is more than 0.1 micron；Carefully
Manipulator is adjusted to include fine tuning fixing device for installing, fine tuning position adjusting mechanism, controller and fine tuning drive link, in coarse adjustment drive link
Top setting fine tuning fixing device for installing；Fine tuning position adjusting mechanism, fine tuning position are arranged on fine tuning fixing device for installing
Governor motion is connected to controller by conductor cable or hydraulic tube, is rigidly connected fine tuning on the top of fine tuning position adjusting mechanism
Drive link.
4. transfer device as claimed in claim 1 it is characterised in that described transfer probe include three-dimensional locking mechanism of rotating shaft,
Probe fix bar and tip probe；Wherein, three-dimensional locking mechanism of rotating shaft is rigidly attached at the top of micro-nano manipulator；Turn three-dimensional
Probe fix bar is installed on shaft locking mechanism；It is rigidly connected tip probe on the top of probe fix bar；In micro-nano manipulator
Under drive, transfer probe can carry out position adjustments；Probe fix bar is rigidly connected tip probe and micro-nano manipulator, and leads to
Cross three-dimensional locking mechanism of rotating shaft and can adjust probe fix bar with the angle between the drive link of the fine tuning manipulator of micro-nano manipulator
Degree.
5. transfer device as claimed in claim 4 it is characterised in that described tip probe tip diameter be less than 0.5 micron,
By the most advanced and sophisticated Electrostatic Absorption effect single micro nano structure that bonding is shifted in single micro nano structure transfer process.
6. transfer device as claimed in claim 1 is it is characterised in that the shape of periodicity raised platforms in described micro-nano structure
Shape is square or circular, and between 5～10 microns, highly between 1～3 micron, the spacing of adjacent protrusion platform is size
Between 1～3 micron, the surface of raised platforms is polished surface to the width of groove, and flatness is less than 1 nanometer.
7. a kind of transfer method of single micro nano structure is it is characterised in that described transfer method comprises the following steps：
1) micro nano structure is transferred on micro-nano structure transfer substrate；
2) pass through microscope Real Time Observation and mobile example platform, according to the coordinate labelling on micro-nano structure transfer substrate, search out
The position of single micro nano structure to be transferred, will be mobile central to the microscopical visual field for single micro nano structure to be transferred；
3) microscope Real Time Observation, manipulates the mobile extremely microscopical object lens of transfer probe by the coarse adjustment manipulator of micro-nano manipulator
And sample stage between, then the tip of the tip probe shifting probe by the fine tuning manipulator control of micro-nano manipulator enters and waits to turn
In the groove below single micro nano structure overhanging portion moving；
4) tip probe is controlled to be lifted up by the fine tuning manipulator of micro-nano manipulator so that the tip of tip probe is rising
During contact to single micro nano structure bottom, continuation carries tip probe, drives single micro nano structure to move up, continue
And leave the raised platforms of micro-nano structure transfer substrate；
5) when single micro nano structure completely disengages from raised platforms, single micro nano structure passes through the absorption of Electrostatic Absorption effect and exists
The tip of tip probe；
6), further after the height of lifting tip probe, the tip of tip probe and the single micro nano structure of Electrostatic Absorption are kept
In existing position, and it is maintained in the microscopical visual field, now microscope imaging focuses on micro-nano structure transfer substrate surface
The surface of periodic raised platforms, the single micro nano structure of the tip of tip probe and Electrostatic Absorption is in field of microscope
Assume broad image；
7) control microscopical sample stage, reduce sample stage height first to safe altitude, safe altitude refers to exist when sample stage
In two dimensional surface during mobile example platform, the micro-nano structure transfer substrate that sample stage is fixed will not contact the tip of transfer probe
Probe, micro-nano structure transfer substrate removes sample stage, then by the target substrate substrate movement of micro nano structure to be received to sample
In the middle of the microscopical visual field on platform, slowly rise sample stage, make microscope imaging focus on the surface of target substrate substrate；
8) position of the azimuth vernier adjusting sample stage of the single micro nano structure on the tip of tip probe and side further according to absorption
To, under microscope high power imaging, the particular location of micro nano structure to be received on target substrate substrate being adjusted to tip
The single micro nano structure of the tip of probe and Electrostatic Absorption is under the microscope at the position of become broad image；
9) the slow height reducing tip probe is controlled by the fine tuning manipulator of micro-nano manipulator so that single micro nano structure
Contact to the surface of target substrate substrate, and adsorb on the surface of target substrate substrate, then the tip of tip probe is removed
The single micro nano structure being shifted, completes the transfer process of single micro nano structure.
8. transfer method as claimed in claim 7 is it is characterised in that in step 1) in, by easily waving containing micro nano structure
Send out non-corrosiveness solution to titrate on micro-nano structure transfer substrate, or the micro nano structure substrate that gas phase process is grown is direct
Press on micro-nano structure transfer substrate, realize micro nano structure and be transferred on micro-nano structure transfer substrate.
9. transfer method as claimed in claim 7 is it is characterised in that further, be transferred to micro-nano structure in micro nano structure
After on transfer substrate, observe micro nano structure by microscopical object lens, and micro-nano interested is recorded by coordinate labelling
Rice position in micro-nano structure transfer substrate for the structure；Then the micro-nano structure transfer substrate carrying micro nano structure is shifted
To other optical instruments, complete the preliminary characterization to micro nano structure；Again by the micro-nano structure carrying micro nano structure
Turn substrate and put back to and subsequent transfer is carried out on microscopical sample stage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611019900.6A CN106430084B (en) | 2016-11-18 | 2016-11-18 | A kind of single micro nano structure transfer device and its transfer method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611019900.6A CN106430084B (en) | 2016-11-18 | 2016-11-18 | A kind of single micro nano structure transfer device and its transfer method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106430084A true CN106430084A (en) | 2017-02-22 |
| CN106430084B CN106430084B (en) | 2017-12-01 |
Family
ID=58220414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611019900.6A Active CN106430084B (en) | 2016-11-18 | 2016-11-18 | A kind of single micro nano structure transfer device and its transfer method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106430084B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109521649A (en) * | 2018-10-22 | 2019-03-26 | 中国科学技术大学 | A kind of integral system pinpointing transfer and alignment photoetching for two-dimensional material |
| CN109911846A (en) * | 2017-12-12 | 2019-06-21 | 天津大学 | A kind of device accurately shifted for two-dimensional material |
| CN111912683A (en) * | 2020-07-31 | 2020-11-10 | 南京大学 | PDMS-based block transfer fixing method |
| CN111929094A (en) * | 2019-05-13 | 2020-11-13 | 中国石油化工股份有限公司 | Sampling device and sampling method for nano CT test sample |
| CN113526457A (en) * | 2020-04-16 | 2021-10-22 | 中国科学院物理研究所 | Needle point-adhesive film combined transfer device and method for nano materials |
| CN113740988A (en) * | 2021-09-15 | 2021-12-03 | 中南大学 | Automatic coupling packaging equipment for micro-lens |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101655440A (en) * | 2009-09-14 | 2010-02-24 | 中国科学院宁波材料技术与工程研究所 | Microscopic repositioning method for nano material or micro-nano device |
| CN103760916A (en) * | 2013-12-23 | 2014-04-30 | 苏州帝尔泰司精密仪器有限公司 | Micro-nanoscale moving and sample operating device of multi-movement platform |
| CN105800548A (en) * | 2016-05-04 | 2016-07-27 | 南京安京太赫光电技术有限公司 | Device for fixed-point transferring of single-layer two-dimensional material |
| CN105973678A (en) * | 2016-07-15 | 2016-09-28 | 吉林大学 | Device and method for transferring two-dimensional layered semiconductor material to diamond anvil cell |
| CN106006546A (en) * | 2016-07-01 | 2016-10-12 | 吉林大学 | Method for transferring and controlling nano-structure |
| ES2557507B1 (en) * | 2014-07-23 | 2016-11-08 | Universidad Autónoma de Madrid | Procedure for obtaining microcontacts, obtainable microcontact and use thereof |
| CN206278904U (en) * | 2016-11-18 | 2017-06-27 | 北京大学 | A kind of single micro nano structure transfer device |
-
2016
- 2016-11-18 CN CN201611019900.6A patent/CN106430084B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101655440A (en) * | 2009-09-14 | 2010-02-24 | 中国科学院宁波材料技术与工程研究所 | Microscopic repositioning method for nano material or micro-nano device |
| CN103760916A (en) * | 2013-12-23 | 2014-04-30 | 苏州帝尔泰司精密仪器有限公司 | Micro-nanoscale moving and sample operating device of multi-movement platform |
| ES2557507B1 (en) * | 2014-07-23 | 2016-11-08 | Universidad Autónoma de Madrid | Procedure for obtaining microcontacts, obtainable microcontact and use thereof |
| CN105800548A (en) * | 2016-05-04 | 2016-07-27 | 南京安京太赫光电技术有限公司 | Device for fixed-point transferring of single-layer two-dimensional material |
| CN106006546A (en) * | 2016-07-01 | 2016-10-12 | 吉林大学 | Method for transferring and controlling nano-structure |
| CN105973678A (en) * | 2016-07-15 | 2016-09-28 | 吉林大学 | Device and method for transferring two-dimensional layered semiconductor material to diamond anvil cell |
| CN206278904U (en) * | 2016-11-18 | 2017-06-27 | 北京大学 | A kind of single micro nano structure transfer device |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109911846A (en) * | 2017-12-12 | 2019-06-21 | 天津大学 | A kind of device accurately shifted for two-dimensional material |
| CN109521649A (en) * | 2018-10-22 | 2019-03-26 | 中国科学技术大学 | A kind of integral system pinpointing transfer and alignment photoetching for two-dimensional material |
| CN111929094A (en) * | 2019-05-13 | 2020-11-13 | 中国石油化工股份有限公司 | Sampling device and sampling method for nano CT test sample |
| CN111929094B (en) * | 2019-05-13 | 2023-11-28 | 中国石油化工股份有限公司 | Sampling device and sampling method for nano CT test sample |
| CN113526457A (en) * | 2020-04-16 | 2021-10-22 | 中国科学院物理研究所 | Needle point-adhesive film combined transfer device and method for nano materials |
| CN113526457B (en) * | 2020-04-16 | 2023-07-21 | 中国科学院物理研究所 | Needle tip-adhesive film combined transfer device and method for nano material |
| CN111912683A (en) * | 2020-07-31 | 2020-11-10 | 南京大学 | PDMS-based block transfer fixing method |
| CN113740988A (en) * | 2021-09-15 | 2021-12-03 | 中南大学 | Automatic coupling packaging equipment for micro-lens |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106430084B (en) | 2017-12-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106430084B (en) | A kind of single micro nano structure transfer device and its transfer method | |
| Butt et al. | Surface and interfacial forces | |
| Tuma et al. | High-speed multiresolution scanning probe microscopy based on Lissajous scan trajectories | |
| US20110195850A1 (en) | Compact nanofabrication apparatus | |
| Kaestner et al. | Advanced electric-field scanning probe lithography on molecular resist using active cantilever | |
| CN108020252B (en) | Sample stage, microscopic observation device and sample stage adjusting method | |
| US10908179B2 (en) | Device and method for measuring and/or modifying surface features on a surface of a sample | |
| CN206278904U (en) | A kind of single micro nano structure transfer device | |
| Nyamjav et al. | Alignment of Long DNA Molecules on Templates Generated via Dip‐Pen Nanolithography | |
| Ulčinas et al. | Rotational scanning atomic force microscopy | |
| Fuchs et al. | D3, the new diffractometer for the macromolecular crystallography beamlines of the Swiss Light Source | |
| EP2867682B1 (en) | High throughput scanning probe microscopy device | |
| Ballone et al. | Nano-indentation of a room-temperature ionic liquid film on silica: a computational experiment | |
| Zhang et al. | Accessing crystal–crystal interaction forces with oriented nanocrystal atomic force microscopy probes | |
| Shimizu et al. | Feasibility study on the concept of thermal contact sensor for nanometre-level defect inspections on smooth surfaces | |
| CN114171362B (en) | Particle transfer device and application | |
| Xia | Design and Control of Versatile High-speed and Large-range Atomic Force Microscopes | |
| Zhou et al. | A rapid and automated relocation method of an AFM probe for high-resolution imaging | |
| Wasserman et al. | Fabrication of one-dimensional programmable-height nanostructures via dynamic stencil deposition | |
| Kuiper et al. | Large dynamic range atomic force microscope for overlay improvements | |
| US20180321276A1 (en) | Metrology devices and methods for independently controlling a plurality of sensing probes | |
| Holz et al. | Parallel active cantilever AFM tool for high-throughput inspection and metrology | |
| JP4852759B2 (en) | Molecular measuring apparatus and molecular measuring method | |
| Valdre et al. | Scanning probe microscopy with vertically oriented cantilevers made easy | |
| Wu et al. | Development of a multiprobe instrument for measuring microstructure surface topography |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |